JP2000258777A - Manufacture of liquid crystal display element - Google Patents

Manufacture of liquid crystal display element

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Publication number
JP2000258777A
JP2000258777A JP11058556A JP5855699A JP2000258777A JP 2000258777 A JP2000258777 A JP 2000258777A JP 11058556 A JP11058556 A JP 11058556A JP 5855699 A JP5855699 A JP 5855699A JP 2000258777 A JP2000258777 A JP 2000258777A
Authority
JP
Japan
Prior art keywords
substrates
liquid crystal
pressure
crystal display
sealant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11058556A
Other languages
Japanese (ja)
Inventor
Yuka Yamada
由夏 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11058556A priority Critical patent/JP2000258777A/en
Publication of JP2000258777A publication Critical patent/JP2000258777A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To realize sealing of a liquid crystal composition with a dripping method, to improve productivity of a liquid crystal display element and to reduce its cost by enabling a supporting means to vacuum-chuck substrates in laminating the substrates together under reduced pressure in order to prevent generation of air bubbles in the liquid crystal cell. SOLUTION: In this manufacturing method, at first the pressure in the pressure reducing device is kept comparative high, i.e., 103-104 Pa, the degree of the vacuum between supporting members 17, 18 and substrates 11, 12 is kept at 1-102 Pa to surely support the substrates 11, 12 with the supporting members 17, 18 and to align the both substrates 11, 12 and furthermore, a sealant 13 in almost half region of the array substrate 11 and the counter substrate 12 is laminated. Afterwards the air is evacuated from the gap between the array substrate 11 and the counter substrate 12 by reducing the pressure in the pressure reducing device to 1-102 Pa and subsequently the sealant 13 in the total region of the substrates 11, 12 is laminated.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、液晶表示素子の製
造方法に関する。
The present invention relates to a method for manufacturing a liquid crystal display device.

【0002】[0002]

【従来の技術】電極を有する一対の基板間に液晶組成物
を封入して成る液晶表示素子にあっては、液晶組成物を
封入する方法として、従来一般には基板対をシール剤に
より貼り合わせ液晶セルを組み立てた後、シール剤に形
成される注入口から液晶組成物を注入し更に接着剤等で
注入口を封止する注入法が採用されていた。
2. Description of the Related Art In a liquid crystal display device in which a liquid crystal composition is sealed between a pair of substrates having electrodes, a method of sealing the liquid crystal composition is generally such that a pair of substrates is pasted together with a sealant. After assembling the cell, an injection method of injecting a liquid crystal composition from an injection port formed in a sealant and sealing the injection port with an adhesive or the like has been adopted.

【0003】[0003]

【発明が解決しようとする課題】しかしながら前記注入
法にあっては、基板を貼り合わせ液晶セルを形成して、
狭い注入口から液晶組成物を注入するため、シール剤の
硬化から液晶組成物の注入完了に至るまでに極めて長時
間を要し、生産性に著しく劣ると言う問題を有してい
た。又、液晶組成物注入後に封止材により注入口を封止
しているため液晶表示素子内に特異点を生じ、これが白
ズミの原因に成り表示品位を低下するという問題も生じ
ていた。更に、封止材の接着性が悪い場合には剥がれを
生じたり、あるいは封止時に気泡を生じ易いという問題
も有していた。
However, in the above-mentioned injection method, a substrate is bonded to form a liquid crystal cell.
Since the liquid crystal composition is injected from a narrow injection port, it takes a very long time from the hardening of the sealant to the completion of the injection of the liquid crystal composition, which has a problem that productivity is extremely poor. In addition, since the injection port is sealed with a sealing material after injection of the liquid crystal composition, a singular point is generated in the liquid crystal display element, which causes white spots and lowers the display quality. Further, there is also a problem that when the adhesiveness of the sealing material is poor, the sealing material is peeled off or bubbles are easily generated at the time of sealing.

【0004】このため近年、基板に注入口を有しないシ
ール剤を配置し、そのシール剤により囲繞される領域に
液晶組成物を滴下して、当初より液晶組成物を介在した
状態で一対の基板を対向し、貼り合わせるという滴下法
による液晶組成物の封入も検討されている。
For this reason, in recent years, a sealant having no injection port is arranged on a substrate, and a liquid crystal composition is dropped on a region surrounded by the sealant. The encapsulation of a liquid crystal composition by a dropping method of facing and bonding is also being studied.

【0005】しかしながらこの滴下法は、基板の貼り合
わせ時にセル内に気泡が残らないよう減圧下で組み立て
る必要がある。一方基板の対向位置合わせ操作は、一般
には、少なくともいずれか一方の基板を保持手段にて真
空吸着し移動させて行うが、滴下法における減圧下で
は、基板を真空吸着出来ず位置合わせ不能になるという
問題を生じてしまい実用化されずにいた。
However, in this dropping method, it is necessary to assemble under reduced pressure so that no air bubbles remain in the cells when the substrates are bonded. On the other hand, the opposing positioning operation of the substrate is generally performed by moving at least one of the substrates by vacuum suction using the holding means, but under reduced pressure in the dropping method, the substrate cannot be vacuum suctioned and the positioning cannot be performed. The problem has arisen and it has not been put to practical use.

【0006】そこで本発明は上記課題を除去するもの
で、減圧下においても保持手段による基板の真空吸着を
可能とし、封入時間の短縮を図る滴下法での液晶組成物
の封入を実現可能にする液晶表示素子の製造方法を提供
することを目的とする。
Accordingly, the present invention has been made to solve the above-mentioned problems, and makes it possible to vacuum-adsorb a substrate by a holding means even under reduced pressure, and to realize a liquid crystal composition by a dropping method for shortening a time for sealing. An object of the present invention is to provide a method for manufacturing a liquid crystal display element.

【0007】[0007]

【課題を解決するための手段】本発明は上記課題を解決
するための手段として、減圧下で、シール剤及びこのシ
ール剤に囲繞される領域に設けられる液晶組成物を介し
て対向配置される2枚の基板を位置合わせした後、前記
シール剤にて貼り合わせる液晶表示素子の製造方法にお
いて、前記2枚を貼り合わせる間に、前記減圧下の気圧
を変動するものである。
According to the present invention, as a means for solving the above-mentioned problems, the liquid crystal composition is opposed to a liquid crystal composition provided in a region surrounded by the sealant and the sealant under reduced pressure. In the method for manufacturing a liquid crystal display element in which two substrates are aligned and then bonded with the sealant, the pressure under reduced pressure is changed while the two substrates are bonded.

【0008】このような構成により本発明は、基板の貼
り合わせ時、減圧下においても保持手段による基板の真
空吸着を可能とし、生産性が高く且つ良好な表示品位を
得られる滴下法での液晶組成物の封入を実現可能にす
る。
With this configuration, the present invention enables the liquid crystal by the dropping method which enables the substrate to be vacuum-sucked by the holding means even under reduced pressure when the substrates are bonded to each other, thereby achieving high productivity and good display quality. Encapsulation of the composition is feasible.

【0009】[0009]

【発明の実施の形態】以下本発明を、図1乃至図3に示
す実施の形態を参照して説明する。図1は、液晶表示素
子10を示す構成図であり、例えば、サイズ150mm
×200mmのガラス基板上に画素電極(図示せず)、
対向電極(図示せず)をそれぞれ設けてなるアレイ基板
11及び対向基板12は、熱硬化樹脂等からなるシール
剤13にて、図示しないスペーサにより所定の間隙を隔
てて張り合わされ、シール剤13に囲繞される領域に液
晶組成物14を封入して成っている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in FIGS. FIG. 1 is a configuration diagram showing a liquid crystal display element 10, for example, having a size of 150 mm.
A pixel electrode (not shown) on a × 200 mm glass substrate,
The array substrate 11 and the opposing substrate 12 provided with the opposing electrodes (not shown) are adhered to each other by a spacer (not shown) at a predetermined gap by a sealing agent 13 made of a thermosetting resin or the like. The liquid crystal composition 14 is sealed in the surrounding area.

【0010】次に液晶表示素子10の製造方法について
述べる。ガラス基板上に成膜技術及びフォトリソグラフ
ィ技術を繰り返し、画素電極を有するアレイ基板11と
対向電極を有する対向基板12を形成後、夫々に配向膜
(図示せず)を塗布しラビング処理した後、図2に示す
フロー図に従い、液晶組成物14を介在した状態でアレ
イ基板11と対向基板12を貼り合わせ、液晶表示素子
10を組み立てる。先ずステップ1にて、図3(a)に
示すように、大気圧(10Pa)中で、アレイ基板1
1の画素電極周囲にディスペンサ又は印刷等の手段によ
り熱硬化樹脂からなるシール剤13を塗布する。次いで
ステップ2にて図3(b)に示すように、大気圧(10
Pa)中で、シール剤13に囲繞された領域に液晶組
成物14を滴下する。
Next, a method for manufacturing the liquid crystal display element 10 will be described. After a film forming technique and a photolithography technique are repeated on a glass substrate to form an array substrate 11 having pixel electrodes and a counter substrate 12 having counter electrodes, an alignment film (not shown) is applied and rubbed, respectively. According to the flow chart shown in FIG. 2, the array substrate 11 and the opposing substrate 12 are bonded together with the liquid crystal composition 14 interposed therebetween, and the liquid crystal display element 10 is assembled. First, in step 1, as shown in FIG. 3A, the array substrate 1 is kept at atmospheric pressure (10 5 Pa).
A sealant 13 made of a thermosetting resin is applied around one pixel electrode by a dispenser or printing. Next, in step 2, as shown in FIG.
In 5 Pa), the liquid crystal composition 14 is dropped into a region surrounded by the sealant 13.

【0011】次にステップ3で、図3(c)に示すよう
に減圧装置(図示せず)内にてアレイ基板11を下側保
持部材17に真空吸着する一方、対向基板12を上側保
持部材18に真空吸着し、両基板11、12を離間した
状態で上下保持部材17、18を移動して位置合わせを
行う。この時、両保持部材17、18が基板11、12
を確実に真空吸着出来るよう、減圧装置内の気圧を10
〜10Paと比較的高く設定する一方、両保持部材
17、18及び基板11、12間の気圧をその1/10
〜1/100の1〜10Paとする。次いで両基板1
1、12の貼り合わせを行うが、この貼り合わせ時、保
持部材17、18により基板11、12を真空吸着する
必要がある間は、少なくとも両保持部材17、18及び
基板11、12間の気圧より高くなるよう、減圧装置内
の気圧を比較的高く設定する。そして保持部材17、1
8による基板11、12の吸着が不要となった時点で減
圧装置内の気圧をより低く設定するというように、減圧
装置内の気圧を2段階に調整する。
Next, in step 3, as shown in FIG. 3 (c), the array substrate 11 is vacuum-adsorbed to the lower holding member 17 in a decompression device (not shown), while the opposing substrate 12 is held in the upper holding member. The upper and lower holding members 17 and 18 are moved in a state where the substrates 11 and 12 are separated from each other by vacuum suction, and alignment is performed. At this time, the holding members 17 and 18 are
Pressure in the pressure reducing device should be 10
While the pressure is set relatively high at 3 to 10 4 Pa, the pressure between the holding members 17 and 18 and the substrates 11 and 12 is reduced to 1/10 of the pressure.
And 1~10 2 Pa of ~ 1/100. Next, both substrates 1
At this time, the substrates 11 and 12 need to be vacuum-sucked by the holding members 17 and 18, at least the pressure between the holding members 17 and 18 and the substrates 11 and 12. The pressure inside the pressure reducing device is set relatively high so as to be higher. And the holding members 17, 1
The pressure in the decompression device is adjusted in two stages such that the pressure in the decompression device is set lower when the adsorption of the substrates 11 and 12 by the substrate 8 becomes unnecessary.

【0012】即ち先ずステップ4では、ステップ3の位
置合わせ時と同様、減圧装置内の気圧を10〜10
Paと比較的高く保持する一方、保持部材17、18及
び基板11、12間の真空度を1〜10Paとして、
保持部材17、18による基板11、12の真空吸着を
確実にした状態で、一部貼り合わせのためにアレイ基板
11上に対向基板12を載置する。この時図3(d)に
示すように両基板11、12の一辺が1mm程度のすき
間を保よう、両基板11、12間にメカストッパ20を
挿通する。一方、これに対向する辺は、両基板11、1
2が接触した状態とする。これにより、アレイ基板11
及び対向基板12の約半分の領域のシール剤13が貼り
合わされる。
That is, first, in step 4, similarly to the position adjustment in step 3, the air pressure in the pressure reducing device is set to 10 3 to 10 4.
While maintaining a relatively high Pa, the degree of vacuum between the holding members 17, 18 and the substrates 11, 12 is set to 1 to 10 2 Pa,
The counter substrate 12 is placed on the array substrate 11 for partial bonding in a state where the vacuum suction of the substrates 11 and 12 by the holding members 17 and 18 is ensured. At this time, as shown in FIG. 3D, the mechanical stopper 20 is inserted between the substrates 11 and 12 so that one side of the substrates 11 and 12 has a gap of about 1 mm. On the other hand, the sides facing this are the two substrates 11, 1
2 is in contact. Thereby, the array substrate 11
Then, the sealant 13 in an area about half of the counter substrate 12 is attached.

【0013】次にステップ5で、減圧装置内の更なる排
気を行い、気圧を1〜10Paに低減する。これによ
りメカストッパー20で支えられているすき間から空気
が排気され、両基板11、12のすき間は、液晶セル内
に気泡が発生しない充分な真空度とされる。尚この減圧
装置内の真空度の増大により、保持部材17、18は基
板11、12を真空吸着出来なくなるが、この時点で
は、両基板の領域の半分程度がシール剤13で貼り合わ
されているので、両基板11、12間で位置ずれを生じ
るおそれが無い。
[0013] Then, in step 5, do a further evacuation of the vacuum device, to reduce the pressure to 1 to 10 2 Pa. As a result, air is exhausted from the gap supported by the mechanical stopper 20, and the gap between the substrates 11, 12 is set to a sufficient degree of vacuum that does not generate air bubbles in the liquid crystal cell. Note that the holding members 17 and 18 cannot vacuum-suck the substrates 11 and 12 due to the increase in the degree of vacuum in the decompression device. However, at this time, since about half of the area of both substrates is bonded with the sealant 13. Therefore, there is no possibility that a displacement occurs between the substrates 11 and 12.

【0014】この後、両基板11、12のすき間が充分
に排気された後、ステップ6にてメカストッパー20を
取り去り、アレイ基板11及び対向基板12の全領域の
シール剤13を完全に貼り合わせる。次いでステップ7
で、両基板11、12を大気中(10Pa)に取り出
すと、大気圧により基板面は一様に加圧され、基板間の
間隙が均一に保持される。更にステップ8でシール剤1
3を加熱硬化して液晶表示素子10を完成する。このよ
うにして製造された液晶表示素子10を用い、表示試験
を行ったところ白ズミによる表示不良が見られず、良好
な表示品位を得られた。
Thereafter, after the gap between the substrates 11 and 12 is sufficiently exhausted, the mechanical stopper 20 is removed in step 6 and the sealant 13 in the entire area of the array substrate 11 and the counter substrate 12 is completely bonded. . Then step 7
When the substrates 11 and 12 are taken out into the atmosphere (10 5 Pa), the substrate surface is uniformly pressed by the atmospheric pressure, and the gap between the substrates is uniformly maintained. Further, in Step 8, the sealant 1
3 is heat-cured to complete the liquid crystal display element 10. When a display test was performed using the liquid crystal display element 10 manufactured as described above, no display defect due to white spots was observed, and good display quality was obtained.

【0015】このような製造方法によれば、全域にわた
り均質なシール剤にて液晶組成物14を封入でき、且つ
均一な間隙を得られることから液晶表示素子10の表示
品位の向上を図れる。また、液晶組成物14の封入を滴
下法で行うことから従来の注入法に比しその製造時間を
著しく短縮出来製造コストの低減を得られる。しかも、
減圧下での封入工程にかかわらず、アレイ基板11及び
対向基板12を保持手段17、18により確実に吸着保
持して位置合わせ出来、位置合わせ精度の向上を得られ
る一方、位置合わせ終了後は両基板11、12間のすき
間の真空度を高めて、液晶セル内の気泡の発生を確実に
防止出来、液晶表示素子10の表示品位をより向上でき
る。
According to such a manufacturing method, the liquid crystal composition 14 can be sealed with a uniform sealing agent over the entire region, and a uniform gap can be obtained, so that the display quality of the liquid crystal display element 10 can be improved. Further, since the liquid crystal composition 14 is sealed by the dropping method, the manufacturing time can be remarkably reduced as compared with the conventional injection method, and the manufacturing cost can be reduced. Moreover,
Irrespective of the encapsulation process under reduced pressure, the array substrate 11 and the opposing substrate 12 can be aligned by reliably sucking and holding them by the holding means 17 and 18, thereby improving the alignment accuracy. By increasing the degree of vacuum between the substrates 11 and 12, the generation of bubbles in the liquid crystal cell can be reliably prevented, and the display quality of the liquid crystal display element 10 can be further improved.

【0016】尚本発明は上記実施の形態に限られるもの
でなく、その趣旨を変えない範囲での変更は可能であっ
て、例えば製造工程における減圧装置内の真空度は必要
に応じて任意であり、位置合わせ時に保持手段が基板を
吸着出来、更に貼り合わせ時に基板間の排気を確実に行
える範囲であれば良い。又、基板上へのシール剤の塗布
時あるいは液晶組成物の滴下時の気圧も、限定されず、
これらに続く位置合わせ工程等と同じ装置内で行う場合
は、後続の工程と同等の減圧下で行っても良い。又、シ
ール剤も紫外線照射により硬化されるものである等任意
である。更に本発明は、液晶表示素子複数個分の面積を
有するマザー基板を用いて複数個の液晶表示素子を同時
に形成するマルチ製法においても適用可能である。
The present invention is not limited to the above embodiment, but can be changed without departing from the spirit of the present invention. For example, the degree of vacuum in the decompression device in the manufacturing process can be arbitrarily set as necessary. Yes, it is only required that the holding means can adsorb the substrate at the time of alignment and the exhaust between the substrates can be reliably performed at the time of bonding. In addition, the pressure at the time of applying the sealant on the substrate or dropping the liquid crystal composition is not limited,
In the case where the subsequent alignment step and the like are performed in the same apparatus, the steps may be performed under the same reduced pressure as in the subsequent step. Further, the sealing agent is also arbitrary, such as being cured by ultraviolet irradiation. Further, the present invention is also applicable to a multi-process in which a plurality of liquid crystal display elements are simultaneously formed using a mother substrate having an area for a plurality of liquid crystal display elements.

【0017】[0017]

【発明の効果】以上説明したように本発明によれば、長
時間を要する注入口からの液晶組成物の注入工程を不要
とし、液晶表示素子の製造時間を短縮出来、生産性向上
によりコストの低減を得られる。しかも基板を高精度に
位置合わせ出来る一方、液晶セル内の気泡の発生を確実
に防止出来、液晶表示素子の表示品位向上を図れる。
As described above, according to the present invention, the step of injecting the liquid crystal composition from the injection port, which takes a long time, becomes unnecessary, the manufacturing time of the liquid crystal display element can be shortened, and the cost can be reduced by improving the productivity. A reduction can be obtained. Moreover, while the substrate can be positioned with high precision, the generation of bubbles in the liquid crystal cell can be reliably prevented, and the display quality of the liquid crystal display element can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態の液晶表示素子を示す構成
図である。
FIG. 1 is a configuration diagram showing a liquid crystal display element according to an embodiment of the present invention.

【図2】本発明の実施の形態の液晶表示素子退く見立て
工程を示すフロー図である。
FIG. 2 is a flowchart showing a step of simulating a liquid crystal display element according to an embodiment of the present invention.

【図3】本発明の実施の形態のアレイ基板及び対向基板
を貼り合わせる工程を示し、(a)はそのシール剤塗布
を示す説明図、(b)はその液晶組成物の滴下を示す説
明図、(c)はその位置合わせを示す説明図、(d)は
その基板の貼り合わせ途中を示す説明図、(e)はその
基板を完全に貼り合わせた状態を示す説明図である。
3A and 3B show a process of bonding an array substrate and a counter substrate according to an embodiment of the present invention, wherein FIG. 3A is an explanatory diagram showing application of a sealant, and FIG. 3B is an explanatory diagram showing dropping of a liquid crystal composition. (C) is an explanatory view showing the alignment, (d) is an explanatory view showing the substrate in the middle of bonding, and (e) is an explanatory view showing the state in which the substrate is completely bonded.

【符号の説明】 10…液晶表示素子 11…アレイ基板 12…対向基板 13…シール剤 14…液晶組成物 17…下側保持部材 18…上側保持部材 20…メカストッパ[Description of Signs] 10 ... Liquid crystal display element 11 ... Array substrate 12 ... Counter substrate 13 ... Sealant 14 ... Liquid crystal composition 17 ... Lower holding member 18 ... Upper holding member 20 ... Mechanical stopper

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 減圧下で、シール剤及びこのシール剤に
囲繞される領域に設けられる液晶組成物を介して対向配
置される2枚の基板を位置合わせした後、前記シール剤
にて貼り合わせる液晶表示素子の製造方法において、 前記2枚の基板を貼り合わせる間に、前記減圧下の気圧
を変動する事を特徴とする液晶表示素子の製造方法。
At least one substrate is positioned under reduced pressure with two substrates facing each other via a sealant and a liquid crystal composition provided in a region surrounded by the sealant, and then bonded with the sealant. In the method for manufacturing a liquid crystal display element, the pressure under reduced pressure is changed while the two substrates are bonded to each other.
【請求項2】 位置合わせ時、2枚の基板を保持手段に
て夫々真空吸着して対向配置することを特徴とする請求
項1に記載の液晶表示素子の製造方法。
2. The method for manufacturing a liquid crystal display device according to claim 1, wherein at the time of positioning, the two substrates are vacuum-adsorbed by holding means, respectively, and are opposed to each other.
【請求項3】 2枚の基板の位置合わせから前記2枚の
基板の一部を貼り合わせるまでの間の気圧より、前記2
枚の基板の一部を貼り合わせてから前記2枚の基板の全
面を貼り合わせるまでの間の気圧を低減する事を特徴と
する請求項1または請求項2のいずれかに記載の液晶表
示素子の製造方法。
3. The pressure difference between the positioning of two substrates and the bonding of a part of the two substrates,
3. The liquid crystal display device according to claim 1, wherein an air pressure between a time when a part of the two substrates is bonded and a time when the whole surface of the two substrates is bonded is reduced. Manufacturing method.
【請求項4】 2枚の基板の位置合わせから前記2枚の
基板の一部を貼り合わせるまでの間の気圧を10〜1
Paとし、前記2枚の基板の一部を貼り合わせてか
ら前記2枚の基板の全面を貼り合わせるまでの間の気圧
を1から10Paとする事を特徴とする請求項3に記
載の液晶表示素子の製造方法。
4. The air pressure between the positioning of two substrates and the bonding of a part of the two substrates is 10 4 to 1
4. The pressure according to claim 3, wherein the pressure is from 0 to 3 Pa, and a pressure between the time when a part of the two substrates is bonded and the time when the entire surfaces of the two substrates are bonded is 1 to 10 2 Pa. The manufacturing method of the liquid crystal display element described in.
【請求項5】 2枚の基板の位置合わせから前記2枚の
基板の一部を貼り合わせるまでの間の減圧下の気圧を、
保持手段の真空吸着の真空度より高く設定する事を特徴
とする請求項2に記載の液晶表示素子の製造方法。
5. The pressure under reduced pressure between the positioning of two substrates and the bonding of a part of the two substrates,
3. The method for manufacturing a liquid crystal display device according to claim 2, wherein the degree of vacuum of the holding means is set higher than the degree of vacuum.
JP11058556A 1999-03-05 1999-03-05 Manufacture of liquid crystal display element Pending JP2000258777A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7012001B2 (en) 1999-12-22 2006-03-14 Hyundai Electronics Industries Co., Ltd. Method for manufacturing a semiconductor device for use in a memory cell that includes forming a composite layer of tantalum oxide and titanium oxide over a bottom capacitor electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7012001B2 (en) 1999-12-22 2006-03-14 Hyundai Electronics Industries Co., Ltd. Method for manufacturing a semiconductor device for use in a memory cell that includes forming a composite layer of tantalum oxide and titanium oxide over a bottom capacitor electrode

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