JP2000256026A - Scribing method and apparatus therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form good scribing lines particularly to a work having plural layers with different hardnesses with a scribing apparatus for forming the scribing lines on the work surface by utilizing vibration. SOLUTION: A scribing body A has a cutter 30 (abutment member) and a vibration actuator 40 for imparting the vibration to the cutter 30. The scribing body A is movable along the work surface by a moving mechanism. While the vibration is imparted to the cutter 30 by driving the vibration actuator 40 in the state of pressing the cutter 30 to the work surface by its own weight of the scribing body A, the cutter 30 is moved relatively along the work surface, by which the scribing lines are formed on the work surface. At this time, the driving voltage by plural specific frequency signals is imparted to the vibration actuator 40.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribing apparatus for forming a score line on a work surface of a brittle material such as a plate glass or a ceramic plate.

[0002]

2. Description of the Related Art A scribing apparatus for forming a score line while applying vibration to a brittle material is disclosed in JP-A-9-25134. In this scribing device, an outer cylinder of an air cylinder is fixed to a support portion, and an inner cylinder of the air cylinder is connected to one end of a vibration actuator (piezoelectric actuator). Furthermore, at the other end of the vibration actuator,
The cutter holding unit is connected, and the cutter holding unit is slidably attached to the support unit via a slide mechanism.
The cutter holding unit is urged by the force of the air cylinder to press the cutter held by the cutter holding unit against the work surface and to apply a driving voltage to the vibration actuator to vibrate the cutter by expansion and contraction. ,
In this state, by moving the support portion along the work surface, a score line is formed on the work surface.

[0003]

In the above publication, only the range of the frequency (vibration frequency) of the drive voltage applied to the vibration actuator is mentioned, but there is no description about the waveform structure. On the other hand, the inventor of the present application has developed a scribe device which is an improvement of the device described in the above-mentioned publication, and filed a patent application in 1998 (Japanese Patent Application No. 10-101967). This scribing device also forms a score line using the vibration of a vibration actuator, and it is described in the specification that the vibration frequency is determined according to the hardness of a work or the like. Is not considered.

The apparatus disclosed in the above publication and the patent application by the inventor of the present application is based on the premise that the drive voltage applied to the vibration actuator and the vibration generated by the vibration actuator consist of a single frequency signal.
However, in the case of a vibration composed of a single frequency signal, it is sometimes difficult to form a good scored line having a deep vertical crack, for example, when scribing a work composed of a plurality of layers having different hardnesses. This is because if the determined vibration frequency corresponds to the hardness of one layer, it may not work effectively on the other layer. The present invention has been made in view of the technical problems of each of the above devices, and particularly for a work having a multilayer structure,
It is an object of the present invention to provide a scribing method and apparatus capable of simultaneously providing an effective crack over each layer.

[0005]

A scribing method according to the present invention, which has been made to achieve the above-mentioned object, provides a scribe method in which a vibration is applied to a contact member while the contact member is pressed against a work surface. A scribing method for forming a score line on a work surface by relatively moving along a surface, wherein vibration applied to a contact member is constituted by a plurality of specific frequency signals. In this case, the plurality of specific frequency signals are selected as frequencies at which cracks are formed with respect to each layer of the work having a plurality of layers. Further, the scribing device according to the present invention comprises: (a) a scribe main body having a contact member and a vibration actuator for applying vibration to the contact member; and (b) at least one of the scribe main body and the work to be moved. A scribing device comprising: a moving mechanism for relatively moving the contact member along the work surface; and (c) a driving voltage applying means for applying a driving voltage to the vibration actuator, wherein the driving voltage is applied by the driving voltage applying means. The driving voltage to be applied is constituted by a plurality of specific frequency signals.

In this case, in a preferred embodiment, a first specific frequency signal and a second specific frequency signal formed by an envelope connecting the peak values of the first specific frequency signal are used. The actuator is driven by the configured drive voltage. Further, in another preferred embodiment, for each of the first specific frequency signal and a predetermined number of peak values in the first specific frequency signal,
The actuator is also driven by a drive voltage constituted by a second specific frequency signal forming a higher peak value. Further, when the actuator is driven by a drive voltage composed of a first specific frequency signal and a second specific frequency signal that level-shifts a reference level of the first specific frequency signal. There is also. In any of these embodiments, the first specific frequency signal and the second specific frequency signal apply to each layer of a two-layered work in which a coating layer is formed on a base layer. Each signal is selected so as to form a crack.

[0007] According to the scribing method and apparatus according to the present apparatus as described above, vibration is applied to the abutting member by a plurality of specific frequency signals, and a score line is formed on the work surface based on the vibration. Is done. In this case, when scribing a work having a multi-layer structure, a plurality of composite frequency signals that can generate cracks in each layer are provided to the contact member. The abutting member is preferably configured to be excited by a piezo actuator, and the piezo actuator is driven by the plurality of composite frequency signal voltages so that cracks are simultaneously formed on a multi-layered work. Works.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1 to FIG. 3, the scribing device is a moving table 1 (support portion, shown only in FIG.
And a moving mechanism 2 for moving the moving table 1 in the horizontal direction.
(Shown only in FIG. 2), a slide mechanism 4 attached to the movable base 1 via a base plate 3, and a scribe main body A supported by the slide mechanism 4 so as to be vertically movable.

The scribe body A includes a body 10 and
A holder 20 supported by the body 10 so as to allow a small amount of vertical sliding, a cutter 30 (head, contact member) provided at a lower end of the holder 20, and a holder 2
And two vibration actuators 40 composed of a piezoelectric actuator and a piezo actuator for giving a vertical vibration to zero.

The moving mechanism 2 moves the moving table 1 as shown in FIG.
At the right side, and horizontally in the direction orthogonal to the plane of FIG. The slide mechanism 4
Has a guide 5 fixed to the base plate 3 and a slider 6 (support portion) supported by the guide 5 so as to be slidable in the vertical direction.

The scribe main body A is supported on the slider 6 via four leaf springs 7 (elastic vibration damping members). More specifically, brackets 8 and 9 are fixed to the upper and lower ends of the slider 6, respectively. The upper bracket 8 has a plate-shaped mounting portion 8a fixed to the slider 6, and a U-shaped spring fixing portion 8b provided to the left and right of the mounting portion 8a and extending forward. Similarly, the lower bracket 9 also has a mounting portion 9a and a pair of left and right spring fixing portions 9b, and both ends of a leaf spring 7 extending in the front-rear direction are fixed to the upper surfaces of the front and rear ends of the spring fixing portions 9b. (See FIG. 2).

On the other hand, the body 10 of the scribe device A
Has a vertically elongated box shape, and a spring fixing portion 11 is formed so as to protrude from the left and right side surfaces of the upper end thereof. The center of a pair of upper leaf springs 7 is fixed to the upper surfaces of the spring fixing portions 11. In addition, the body 10
A projecting portion 12 that projects left and right is formed at the lower end of the. The spring fixing portion 13 is formed so as to protrude from the lower surface at the center in the front-rear direction of the overhang portion 12, and the center of the lower leaf spring 7 is fixed to the spring fixing portion 13.

The body 10 has a vertically long storage space 15 whose front and lower sides are open, and has a substantially U-shaped cross section.
It is shaped like a letter. In the storage space 15, the holder 20
Is stored. The holder 20 has an elongated box shape extending vertically, has a storage space 25 whose rear side is open, and has a substantially U-shaped cross section. Holder 20
Is coaxial with the body 10. These bodies 10,
The central axis of the holder 20 is indicated by L in the figure.

The holder 20 is supported by the body 10 by a support mechanism so as to be able to move a very small amount in a direction (vibration direction) along the central axis L. The support mechanism includes a first support portion 5 disposed above the vibration actuator 40.
0 and the second
And a support portion 60.

As shown in FIG. 4, the first support portion 50 has a slide hole 51 having a circular cross section formed through the upper wall of the holder 20 and a guide member 52 mounted on the upper wall of the body 10. And The guide member 52 has a flat plate shape and is fixed to the upper end surface of the body 10.
a, and a cylindrical portion 52 projecting downward from the mounting portion 52a.
b. The cylindrical portion 52b penetrates the upper wall of the body 10 and is inserted into the slide hole 51 with a small clearance. Thereby, the upper end of the holder 20 is slidably supported by the body 10. Since the slide hole 51 and the cylindrical portion 52b of the guide member 52 are coaxial with the body 10, the sliding direction of the holder 20 matches the vibration direction of the vibration actuator 40.

As shown in FIG. 4, the second support portion 60 includes a leaf spring 61 and a spherical ball 62 (pressurized supply member) made of an elastic material such as rubber or resin. The leaf spring 61 has both ends formed on the projecting portions 12 of the body 10.
The center of the screw 63 is fixed to the lower end surface of the tapered spring fixing portion 21 formed on the holder 20.
It is fixed at. The centers of the spring fixing portion 21 and the leaf spring 61 are arranged on the central axis L of the body 10, the holder 20, and the vibration actuator 40.

The ball 62 is interposed between the head of the screw 63 and the receiving plate 64. The receiving plate 64 is fixed so as to span the lower end surfaces of the left and right overhang portions 12 of the body 10. Receiving seats 63a and 64a each having a concave spherical surface are formed on the head and the receiving plate 64, respectively.
The ball 62 is fitted between the receiving seats 63a and 64a. Screw 63, center of receiving plate 64 and ball 6
Reference numeral 2 is arranged on the center axis L of the piezo actuator 40 or the like. The ball 62 urges the holder 20 upward by its elastic restoring force, and preloads the vibration actuator 40 (compresses the vibration actuator 40 in the axial direction) between the bottom surface 25a of the housing space 25 of the holder 20 and the adjusting screw 55. Direction). The adjusting screw 55 adjusts the preload.

Next, the mounting structure of the cutter 30 will be described. The holder 20 is bifurcated from the spring fixing portion 21 and extends downward. These pair of extensions 2
Between the two, the leaf spring 61, the ball 62, and the receiving plate 64 are arranged. A first attachment 71 is connected to a lower end portion (tip portion) of the extension portion 22 of the holder 20, and a second attachment 72 is connected to the first attachment so that a connection angle can be adjusted. A storage hole 72 a is formed on the lower surface of the second attachment 72, and the cutter 30 is stored in the storage hole 72 a and is detachably fixed with a screw 73.

The cutter 30 is disposed on the center axis L of the vibration actuator 40, and its lower end (tip) is pointed in a conical shape. At the lower end of the cutter 30, diamond particles having a pyramid shape are fixed. The vertices of the diamond grains face downward and come into contact with a surface of a workpiece 100 described later.

Using the scribing device having the above structure,
A plate-shaped workpiece 100 set on a horizontal installation table 90
An engraved line is formed at In the initial state, the scribe body A is horizontally separated from the edge of the work 100,
It is at the lower limit position (the position corresponding to the lower limit position of the slider 6). In this state, when the moving mechanism 2 is driven to move the moving table 1 in the horizontal direction, the scribe main body A moves in the same direction. Then, the guide plate 35 attached to the holder 20 hits the edge of the workpiece 100, and the guide plate 3
5, the cutter 30 is placed on the upper surface of the workpiece 100.

As described above, the cutter 30 is
The work 100 is placed on the cutter 30 with the work 100
A pressing force (static pressure) is always applied to the upper surface.
This pressing force is caused by the weight of the scribe main body A, the slider 6, and the like.

As described above, scribing is performed while the cutter 30 is pressed against the surface of the work 100 by its own weight such as the body 10. That is, the moving table 1 is moved by the moving mechanism 2.
To move the cutter 30 along the upper surface of the workpiece 100, and apply a driving voltage to the vibration actuator 40 from the driving voltage applying means 45 (FIG. 4) connected to the vibration actuator 40. 40 is periodically expanded and contracted in the axial direction. Then, the vibration of the holder 20 due to the periodic expansion and contraction is generated by the cutter 3.
0 to the work 100. As a result, it is possible to form a score line having a vertical crack on the work surface. By utilizing the vibration in this manner, the pressing force (the work 1 of the cutter 30) caused by the gravity of the body 10 or the like is obtained.
A good score line can be formed even if the pressing force to (00) is relatively small.

In this embodiment, the two vibration actuators 40 are arranged so that the vibration directions are mechanically in series,
By applying the driving voltage provided by the driving voltage applying means 45 to each phase in the same phase, vibration having twice the amplitude can be generated as compared with the case where one vibration actuator 40 is used. Even if it is thick, a score line with a sufficient depth can be formed.

When the cutter 30 completes the formation of the score line on the work 100, the energization of the vibration actuator 40 is stopped, and the air cylinder 80 is driven to push the body 10 upward and separate the cutter 30 from the work 100. . Then, the work 100 is removed from the installation table 90. The work 100 on which the score line is formed as described above is broken along the score line by a breaking device (not shown).

The structure and operation of the above-described scribe device are substantially the same as those of the above-mentioned Japanese Patent Application No. 10-101967. Next, features of the present invention will be described in detail. As shown in FIG. 5, the workpiece 100 includes a base layer 101 made of a brittle material having a high hardness and a coating layer 10 having a low hardness.
Consists of two. The coating layer 102 is much thinner than the base layer 101.

The drive voltage applying means 45 applies the drive voltage shown in FIG. The application of the driving voltage acts only in the direction in which the vibration actuator 40 is extended against the preload by the ball 62. That is, the elongation increases as the voltage increases, and returns to a natural state when the voltage is zero volts. Therefore, the vibration actuator 40 repeatedly expands and contracts according to the drive voltage based on a specific composite frequency signal described later, and transmits vibration to the holder 20 and the cutter 30.

The composite frequency signal voltage shown in FIG. 6 is a sinusoidal frequency signal X having a frequency fx (period Tx = 1 / fx).
(Frequency component) and a lower frequency fy (period Ty =
1 / fy) frequency signal Y (frequency component).
In other words, it is composed of the first specific frequency signal X and the second specific frequency signal Y formed by an envelope connecting the peak values of the first specific frequency signal. The waveform (envelope) of the second specific frequency signal Y is configured to form a waveform of an isosceles triangle as shown in the figure. For example, the frequency fx of the first frequency signal X is 13 to 18 KHz, and the frequency fy of the second frequency signal Y is 1 to 2 KHz. The vibration actuator 40
Corresponds to the expansion and contraction of the vibration actuator 40, and thus corresponds to the vibration of the cutter 30. Therefore, the voltage waveform of FIG. 6 also represents the vibration waveform of the cutter 30, and it can be said that this vibration waveform includes the frequency signals X and Y.

In the vibration of the cutter 30, the first frequency signal X causes the coating layer 102
A good vertical crack 102a (FIG. 5) can be formed. The coating layer 102 has a relatively low hardness, so that the growth of cracks cannot be expected much. However, by striking the frequency signal X in small increments, that is, by striking the cracks at short intervals along the score line, a good vertical crack 102a can be formed. You get. On the other hand, the second frequency signal Y
Thereby, a good vertical crack 101a can be formed deeply in the base layer 101 of the work 100. This base layer 1
Since 01 is hard, growth of vertical cracks can be expected, and a large impact can be applied to the base layer even at intervals, whereby a good vertical crack 101a deep in the base layer can be obtained.

As described above, the base layer 101 of the workpiece 100
By applying vibrations including frequency signals X and Y suitable for the respective layers and the coating layer 102 to form good vertical cracks 101a and 102a in the respective layers,
Since the score line is formed, it is possible to favorably break along the score line.

As shown in FIG. 7, the driving voltage waveform (vibration applied to the cutter 30) applied to the vibration actuator 40 is formed by an envelope connecting the peak values of the first frequency signal X. The frequency signal Y ′ may be in the shape of a right-angled triangle having a sharp rise, or as shown in FIG. 8, the frequency signal Y ″ formed by an envelope connecting the peak values of the first frequency signal X may be It may be a right-angled triangle with a steep descent.

In the driving voltages shown in FIGS. 6 to 8, the first frequency signal X can be appropriately adjusted by the material such as the hardness of the coating layer 102, the thickness, and the like. Further, the period and peak value of the second frequency signals Y, Y ′, Y ″ can also be appropriately adjusted according to the material such as the hardness of the base layer 101 and the thickness.

Next, the driving voltage waveform shown in FIG. 9 has a first frequency signal X based on a fundamental wave and a second peak signal which forms a higher peak value for each predetermined number of peak values in the first frequency signal X. And a frequency signal Z.

The driving voltage waveform shown in FIG. 10 is configured such that the reference level of the first frequency signal X based on the fundamental wave is level-shifted by the triangular second frequency signal Z '.

In the driving voltages shown in FIGS. 6 to 8 and FIG. 10, the waveform of the first frequency signal may be a rectangular wave instead of a sine wave. Further, the waveform of the second frequency signal may be a triangular wave, a sine wave or a rectangular wave.

FIG. 11 is a block diagram showing a basic configuration of the driving voltage applying means 45 for generating the above driving voltage waveform. This driving voltage applying means 45
Fundamental wave generation circuit 10 for generating a fundamental wave serving as a frequency signal
1 and a waveform generating circuit 102 for generating a waveform serving as a second frequency signal. These generating circuits 101 and 10
2 are connected to control circuits 103 and 104, respectively, so that the frequency, waveform, wave height, and the like of the fundamental wave serving as the first frequency signal and the waveform serving as the second frequency signal can be adjusted. The fundamental wave serving as the first frequency signal and the waveform serving as the second frequency signal are combined by the arithmetic circuit 105, amplified by the power amplifier 106, and supplied to the vibration actuator 40.

It should be noted that the present invention is not limited to the above embodiment, and various modes are possible. For example, in the above-described embodiment, a cone-shaped or pyramid-shaped cutter is used. However, as shown in FIG.
(Abutment member) may be used. The peripheral edge 31 of the cutter 30 'is provided as a sharp tip that hits the work.
The cutter 30 'is connected to the holder 2 via the bracket 70'.
It is held at 0 '. The bracket 70 'is attached to the holder 2
It is rotatable around the vertical axis at 0 ', and the cutter 30'
Is rotatable about a horizontal axis on the bracket 70 '. The cutter 30 ′ having the above shape does not catch the work 100 when the work 100 enters the coating layer 102,
The cutter 30 'can be moved smoothly.

The scribing device of the present invention is also effective when the plate glass is a work. This is because, in the process of melting and solidifying a normal sheet glass, a portion close to the surface is rapidly cooled to form a high hardness compression layer, and the inside is relatively slowly cooled to form a low hardness tension layer. Further, the scribe device of the present invention can perform a good scribe even on a work having a uniform hardness. This is because a vertical crack generated by a low-frequency signal can be expected to grow with a high-frequency signal.

The air cylinder may be fixed indirectly to the support base 1, and the tip of the rod may be connected or contacted with the slider 6. The air cylinder biases the slider 6 and the body 10 toward the work surface. In this case, FIG.
The scribing can be performed with the scribe body A shown in FIG.

The support table 1 for supporting the body 10 is fixed at a predetermined position without moving horizontally, and the moving mechanism 2 is connected to the installation table 90 to move the work 100 installed on the installation table 90. Good. Also in this case, the cutter is
It moves relatively along the zero plane.

[0040]

As described above, according to the present invention,
By utilizing the vibration obtained by a plurality of specific frequency signals, it is possible to form a scored line having a good vertical crack on a work having a plurality of layers having different hardnesses, and a single-layer work. , A good score line including a deep vertical crack can be formed.

[Brief description of the drawings]

FIG. 1 is a front view of a scribe device according to an embodiment of the present invention.

FIG. 2 is a side view of the scribe device.

FIG. 3 is a plan view of the scribe device.

FIG. 4 is a longitudinal sectional view of the scribe device taken along line IV-IV in FIG. 2;

FIG. 5 is an enlarged sectional view showing the structure of a work.

FIG. 6 is a diagram illustrating one mode of a drive voltage applied to a vibration actuator.

FIG. 7 is a diagram showing another aspect of the drive voltage applied to the vibration actuator.

FIG. 8 is a diagram showing still another mode of the drive voltage applied to the vibration actuator.

FIG. 9 is a diagram showing still another mode of the drive voltage applied to the vibration actuator.

FIG. 10 is a diagram showing still another mode of the drive voltage applied to the vibration actuator.

FIG. 11 is a circuit block diagram illustrating a basic configuration of a driving voltage applying unit.

FIG. 12 shows another embodiment of the cutter, wherein (A) is a side view,
(B) is a front view.

[Explanation of symbols]

A Scribing body 2 Moving mechanism 30 Cutter (contact member) 40 Vibration actuator 45 Drive voltage applying means X, Y, Y ', Y ", Z, Z' Frequency signal of drive voltage (vibration)

Claims (7)

[Claims] 1. A scribing method for forming a score line on a work surface by moving the contact member relatively along the work surface while pressing the contact member against the work surface in a state in which vibration is applied to the contact member. 2. The scribing method according to claim 1, wherein the vibration applied to the contact member is constituted by a plurality of specific frequency signals. 2. The scribing method according to claim 1, wherein the plurality of specific frequency signals are selected to have a frequency at which a crack is formed for each layer of a work having a plurality of layers. 3. A scribe body having a contact member and a vibration actuator for applying vibration to the contact member;
(B) a moving mechanism for moving at least one of the scribe main body or the work and relatively moving the contact member along the work surface; and (c) a drive voltage applying means for applying a drive voltage to the vibration actuator. A driving voltage applied by the driving voltage applying means is constituted by a plurality of specific frequency signals. 4. The method according to claim 1, wherein the plurality of specific frequency signals include a first specific frequency signal and a second specific frequency signal formed by an envelope connecting peak values of the first specific frequency signal. The scribe device according to claim 3, wherein the scribe device is constituted by: 5. The method of claim 1, wherein the plurality of specific frequency signals form a first specific frequency signal and a higher peak value for each predetermined number of peak values in the first specific frequency signal. The scribing device according to claim 3, wherein the scribing device is configured by a specific frequency signal of: 6. The plurality of specific frequency signals are constituted by a first specific frequency signal and a second specific frequency signal for level-shifting a reference level of the first specific frequency signal. The scribing device according to claim 3. 7. A crack is formed in each layer of a two-layered work in which a coating layer is formed on a base layer by the first specific frequency signal and the second specific frequency signal. Claim 4 constituted in
A scribe device according to any one of claims 1 to 6.