JP2000251817A - Electron microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electron microscope, having a structure of a frame casing improved in vibrations to a lens-barrel part with regard to the floor fluctuation of an installation room of the electron microscope. SOLUTION: In this electron microscope composed of a frame casing and a base plate 3 mounted with a lens-barrel part 4, an observation chamber 5, a camera chamber 15, and a lens-barrel evacuation system device 13, the frame casing is composed of a center frame casing 10 and side frame casings 11 and 12 provided on right and left of the center frame casing 10, provided with vibration control mounts 2 on upper faces of the side frame casings 11 and 12, and the base plate 3 is supported on the frame casing via a base plate placing plate 14 on upper parts of the vibration control mounts 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron microscope and, more particularly, to a structure of a gantry housing in which vibration to a lens barrel is improved.

[0002]

2. Description of the Related Art FIG. 3 is a front view for explaining a conventional electron microscope, for example, a lens barrel of a transmission electron microscope and a mount for supporting the same. In the figure, reference numeral 1 denotes a gantry housing, a base plate 3 is provided on four anti-vibration mounts 2 arranged on the upper surface of the gantry housing 1, and a mirror provided with an observation room 5 on the base plate 3. The tube part 4 is mounted.

[0003] Generally, the frontage of the entrance of the installation room is 850.
mm to 900 mm. Therefore, the width W of the gantry housing is usually about 800 m, which is slightly smaller than the width of the entrance of the installation room in consideration of workability at the time of carrying in.
m.

In this structure, floor vibrations in the installation room are transmitted to the base plate 3 via the gantry housing 1 and the anti-vibration mount 2.
And rocking mode swings as indicated by the broken line in the figure. The rocking mode has a characteristic of the second-order natural mode of the anti-vibration mount 2, a vibration energy transmitted to the anti-vibration mount 2, a magnitude of shaking due to a distance between the anti-vibration mounts 2, a weight of the lens barrel 4, a center of gravity, and the like. Is determined.

[0005]

However, such a fluctuation of the locking mode of the lens barrel 4 causes a relative displacement between the electron beam, the sample, and each lens system, and blurring of the observed image due to the vibration occurs. As a result, the sharpness of the entire image is impaired and the resolution is reduced. On the other hand, the rocking mode has a characteristic that the shaking becomes smaller as the installation distance of the anti-vibration mount 3 is increased. However, as described above, the width W of the gantry housing is limited to about 800 mm or less, so that the distance between the conventional anti-vibration mounts is further reduced to about 700 m.
m or less.

The present invention solves the above-mentioned problem. When the apparatus is installed in an installation room, the distance between the anti-vibration mounts is reduced when the apparatus is installed within the installation room. An object of the present invention is to provide an electron microscope that is resistant to vibration in a rocking mode by a structure that can be wider than that at the time of loading.

[0007]

According to the present invention, there is provided a base plate on which a lens barrel, an observation room, a camera room, a lens barrel exhaust system are mounted, and a frame housing. In the electron microscope configured by the above, the gantry housing is composed of a central gantry housing, and side gantry housings provided on the left and right of the central gantry housing, and is provided on the upper surface of the side gantry housing. A vibration mount is provided, on top of the vibration isolation mount,
It is characterized by being supported by a gantry housing via a base plate mounting plate on which the base plate is mounted.

[0008]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a structural view showing an embodiment of a gantry housing for supporting a lens barrel according to the present invention. FIG. 2 is a configuration diagram showing the lens barrel and the gantry housing at the time of carry-in. 1 and 2, the same numbers as those in the explanatory diagram of FIG. 3 indicate the same components. In addition,
1 and 2, reference numeral 10 denotes a central gantry housing in which a front width W is selected to be equal to or less than a frontage limit width (for example, about 800 mm), and side gantry housings 11 on right and left sides of the central gantry housing 10.
Reference numeral 12 is fixed, 14 is a base plate mounting plate for fixing the base plate 3, and 15 is a camera room. In FIG. 2, reference numeral 20 denotes a transportation fixing base for fixing the center frame housing 10 and the base plate 3 during transportation, and reference numeral 21 denotes a fixing screw thereof. The operation of such a configuration will now be described.

First, an arrangement according to an embodiment of the present invention shown in FIG. 1 will be described. Side frame housings 11 and 12 are arranged on the left and right of the center frame housing 10, and are fixed to the center frame housing 10 with fixing screws (not shown). A base plate mounting plate 14 is provided on four (two are not shown by shading) anti-vibration mounts 2 disposed on the upper surfaces of the side frame housings 11 and 12. The lens barrel unit 4 including the lens barrel exhaust system device 13 is mounted on the base plate 3, and the base plate 3 is fixed to the base plate mounting plate 14, and is attached to the side frame housings 11 and 12 via the anti-vibration mount 2. Supported. A camera room is provided below the base plate 3.

The distance between the vibration isolating mounts 2 according to the embodiment of the present invention is set by the side frame housings 11 and 12 so that the distance between the vibration mount 2 and the vibration isolation mount 2 is smaller than that by the conventional center frame housing 10. The transition distance can be increased.
Therefore, in the electron microscope according to the present structure, the interval between the anti-vibration mounts 2 can be made larger than the width W800 mm of the central gantry housing 10 (for example, about 1000 mm or more), and transmission of vibration from the floor can be suppressed more than before. it can. As described above, the rocking mode of the second-order eigenmode of the anti-vibration mount 2 has a characteristic that as the distance between the anti-vibration mounts 2 is increased, the vibration is reduced. This makes it possible to improve the effect of suppressing the vibration in the locking mode of the vibration with respect to the lens barrel 4 as compared with the related art.

On the other hand, the electron microscope according to the present structure can be divided into three housings by removing fixing screws for fixing the center mounting housing 10 and the side mounting housings 11 and 12 at the time of loading. At the time of loading, as shown in FIG. 2, four transport fixing brackets 2 arranged on the upper surface of the central gantry housing 10.
The base plate 3 is fixed with fixing screws 21 via 0 (two are not shown by shadow). The width of the base plate 3 is equal to or smaller than the frontage limited width (for example, 800 mm), similarly to the width W of the center frame housing. Therefore, in the form at the time of carrying in,
As shown in FIG. 2, the width W can be 800 mm or less, and the width of the frontage of the installation room can be within 850 mm.
A carrying-in operation similar to the conventional one can be performed.

Although the embodiment of the present invention has been described above, the present invention is not limited to the above, and various modifications are possible. For example, a side frame housing may be provided on one of the left and right sides of the center frame housing 10, and a mechanism for sliding the side frame housings 11 and 12 into the center frame housing 10 may be used. Instead of the side frame housings 11 and 12, the left and right operation unit frame housings of the normal center frame housing may be used.

[0014]

As is apparent from the above description, according to the present invention, a base plate on which a lens barrel, an observation room, a camera room, a lens barrel exhaust system is mounted, a gantry housing, Wherein the gantry housing is composed of a central gantry housing and side gantry housings provided on the left and right of the central gantry housing, and a vibration isolator is provided on an upper surface of the side gantry housing. A mount is provided on top of the anti-vibration mount,
The base plate is supported on the gantry housing via the base plate mounting plate. As a result, the installation distance between the anti-vibration mounts can be increased without being restricted by the width limit of the opening at the time of carrying in, and a mechanism that is resistant to vibration in the locking mode can be provided. Can be carried out in the same manner as in the related art by making the size of the width smaller than the width of the frontage.

[0015]

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of a gantry housing for supporting a lens barrel according to the present invention.

FIG. 2 is a configuration diagram showing a lens barrel unit and a gantry housing during loading according to the present invention.

FIG. 3 is a front view for explaining a conventional lens barrel and a gantry housing.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Stand housing, 2 ... Anti-vibration mount, 3 ... Base plate, 4 ... Lens barrel part, 5 ... Observation room, 10 ... Central mount housing, 1
1, 12 ... side frame housing part, 13 ... lens barrel exhaust system device, 1
4 ... Base plate mounting plate, 15 ... Camera room, 20 ... Transportation fixing stand, 21 ... Fixing screw

Claims (3)

[Claims] 1. An electron microscope comprising a lens barrel, an observation room, a camera room, a base plate on which a lens barrel exhaust system is mounted, and a frame housing, wherein the frame housing includes: A central gantry housing, and a side gantry housing provided on the left and right of the central gantry housing, a vibration proof mount is provided on an upper surface of the side gantry housing, and an upper part of the vibration proof mount is provided,
An electron microscope, wherein the base plate is supported by a gantry housing via a base plate mounting plate. 2. The gantry case is characterized in that the center gantry case and the side gantry case are fixed by a fixing mechanism, and are separated into three parts by removing the fixing mechanism. The electron microscope according to claim 1. 3. The electron microscope according to claim 1, wherein the central gantry housing and the base plate are formed within a front width of 800 mm.