JP2000239828A - Production of ceramics coating and ceramics-coated member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing ceramics coating free from difference in mechanical properties and thermal characteristics between each part in a member having a three-dimensional shape and excellent characteristics. SOLUTION: In a producing method in which a member 5 having a side wall part 5a and an effective part 5b is coated with ceramics, a stage in which the side wall part is coated with ceramics, a stage in which the effective part is coated with ceramics and a driving device 7 separately driving the side wall part and the effective part are provided, and, by controlling the surface roughness of the side wall part and the effective part, the collision angle between the coated part in the member and the ceramics particles, the method for moving the member, the driving rate of the member, or the like, respectively in the side wall part and the effective part, the member is coated with the ceramics. There is no difference between each part in the member, and the ceramics film characteristics of the side wall part and the effective part can remarkably be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a ceramic coating having excellent mechanical and thermal characteristics and a ceramic coated member.

[0002]

2. Description of the Related Art Generally, TiN, TiN, and the like are used for driving devices requiring abrasion resistance and corrosion resistance and high-temperature components requiring heat resistance.
Members coated with a ceramic film such as TiC, Al ₂ O ₃ , ZrO ₂ , and CrN are often used. In order to realize such a ceramic covering member, a physical vapor deposition method such as vacuum deposition or ion plating, or a coating method using a thermal spraying method or the like is used.

[0003] For example, when a ceramic film of TiN or Al ₂ O ₃ is formed by physical vapor deposition, metal Ti or Al is evaporated by resistance heating, high frequency heating, electron beam heating, or the like. simultaneously introducing N ₂ gas or O ₂ gas into the vacuum chamber, the low temperature member surface below 500 ℃, which were formed to cover the TiN or Al ₂ O _3. In addition, ZrO
_{When 2} is formed by a physical vapor deposition method, the zirconia target material is evaporated with an electron beam, and the surface of the member is coated with zirconia. On the other hand, when a coating is formed by a thermal spraying method, ceramic spray powder is introduced into a thermal spray frame to form a ceramic coating on the surface of the member.

[0004] By the way, the shape of a member coated with ceramics is generally a three-dimensional complicated shape, and ceramic coating by physical vapor deposition or thermal spraying is almost always applied to the outer peripheral surface.

In the coating of the outer peripheral surface as well, since the ceramic coating of the member 5 having the side wall 5a and the effective portion 5b as shown in FIG. The condition for coating the ceramics is different between the effective portion 5b and as a result, the properties of the ceramic film formed between the side wall portion 5a and the effective portion 5b are superior.
For example, FIG. 5 is a view schematically showing a ceramic coating by a vacuum deposition method which is generally performed. An electron beam generated from an electron gun chamber 3 in a vacuum chamber 1 evacuated by a vacuum exhaust device 2 is shown. The target material 4 is evaporated by EB, and the member 5 having the side wall portion 5a and the effective portion 5b is coated with ceramics.

[0006]

In the member 5 manufactured as described above, the adhesion and heat cycle characteristics of the ceramic film inside the side wall 5a may be significantly inferior to those of the effective portion 5b. There was a problem.

The present invention (corresponding to claims 1 to 8) provides:
The purpose of the present invention is to solve the above-mentioned problem. The purpose is to make the mechanical and thermal properties of the ceramic film comparable to those of the three-dimensional member at each part, and to achieve much better properties than before. An object of the present invention is to provide a method for producing a ceramic coating having the same.

Another object of the present invention (corresponding to claims 9 and 10) is to provide a ceramic coating member which is excellent in mechanical and thermal properties of a ceramic film and can be applied to high-temperature turbine components. It is in.

[0009]

In order to achieve the above object, a first aspect of the present invention is to provide a method of coating a member having a side wall and an effective portion with a ceramic, wherein the side wall is coated with a ceramic. A step of coating the effective portion with ceramics; and providing a driving device for separately driving the side wall portion and the effective portion, the surface roughness of the side wall portion and the effective portion, the coating portion of the member and the ceramics. The member is coated with ceramics by controlling a collision angle with particles, a method of moving the member, a driving speed of the member, and the like in each of the side wall portion and the effective portion.

According to a second aspect of the present invention, there is provided a manufacturing method for coating a member having a side wall portion and an effective portion with ceramics by physical vapor deposition. It is characterized by being relatively rough.

According to a third aspect of the present invention, in the step of coating the inside of the side wall with the ceramic by physical vapor deposition, the members are arranged such that most of the evaporated particles of the ceramic collide with the inside of the side wall at an angle of 45 ° or more. It is characterized by the following.

According to a fourth aspect of the present invention, in the step of coating ceramics on the effective portion by physical vapor deposition, the member is arranged such that most of the evaporated particles of the ceramic collide with the surface of the effective portion at an angle of 90 °. Features.

A fifth aspect of the present invention is characterized in that the step of coating the inside of the side wall with the ceramic by physical vapor deposition is performed until the ceramic coating is completed by the step of rotating and fixing the member.

According to a sixth aspect of the present invention, in the step of fixing a member having a side wall portion and an effective portion and coating the inside of the side wall portion with ceramics by physical vapor deposition, the depth L of the side wall portion and the effective portion The fixed angle of the member is determined so that most of the ceramic evaporation particles directly collide with a portion where the aspect ratio (L / W), which is the ratio of the width W, is the largest.

According to a seventh aspect of the present invention, in the step of coating the inside of the side wall with the ceramic by physical vapor deposition, the rotation driving and the fixing operation are controlled until the ceramic coating is completed by the step of rotating the member and the step of fixing the member. It is characterized by continuous automatic control by the device.

According to an eighth aspect of the present invention, there is provided a method for coating a member having a side wall portion with a ceramic by thermal spraying, wherein the method for manufacturing a ceramic coated member according to any one of the second to seventh aspects is used. Features.

According to the first to eighth aspects, the surface roughness of the side wall portion and the effective portion, the collision angle between the coated portion and the ceramic particles, the driving method of the member or the driving speed of the member are determined by changing the side wall portion and the effective portion. Since the control is performed in each part, there is no difference in each part of the three-dimensionally shaped member, and the ceramic film characteristics of the side wall part and the effective part can be greatly improved.

According to a ninth aspect of the present invention, a member having a side wall portion and an effective portion is formed with a ceramic coating by any one of the manufacturing methods according to the first to seventh aspects so that the member can be applied to a turbine high-temperature component. It is characterized by the following.

According to a tenth aspect of the present invention, in a member for coating a ceramic, a ceramic coating is formed by the manufacturing method according to the eighth aspect, so that the member can be applied to a turbine high-temperature component. According to the ninth and tenth aspects, it is possible to provide a ceramic coating member which has excellent mechanical properties and thermal properties of a ceramic film and can be applied to a turbine high-temperature component.

[0020]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a first embodiment (corresponding to claims 1 to 6, and claims 8 to 10) of the present invention.

As shown in the figure, the vacuum chamber 1 is evacuated by a vacuum exhaust device 2.
An electron gun chamber 3 for generating an electron beam is provided in a lower part of the inside. In a lower part of the vacuum chamber 1, a target material 4 made of zirconia, which is a ceramic ingot of the same type as the ceramic film, is placed in a crucible (not shown).
Is housed.

On the other hand, on the upper part of the vacuum chamber 1, a member 5 for performing ceramic coating is mounted via a mounting jig 6 to a member driving device 7 installed outside the chamber.
This member 5 has a side wall portion 5a and an effective portion 5b,
The member driving device 7 can perform horizontal operation and rotational operation.
Further, a heating device 8 for heating the member 5 to 500 ° C. or higher is provided near the upper portion of the member 5.

Next, a method of manufacturing a ceramic covering member using the manufacturing apparatus of this embodiment will be described. When the effective portion 5b of the member 5 is coated with zirconia, the side wall 5
a is covered with a mask such as a stainless steel plate, and the effective portion 5b
The member 5 is mounted by the mounting jig 6 so that the target member 4 and the target material 4 face each other. Thereafter, the vacuum chamber 1 is evacuated to a degree of vacuum of about 10 @ -4 Pa by the evacuation device 2. Next, the member 5 is heated to 500 ° C. by the heating device 8.
The heating is performed as described above, and the target material 4 is irradiated with an electron beam from the electron gun chamber 3. The target material 4 is melted and evaporated by the electron beam irradiation, and most of the evaporated zirconia particles collide with the effective portion 5b at an angle of 90 ° to form a film.

In general, in the shape of the member 5, the inside of the side wall 5a is coated with the ceramics simultaneously with the effective portion 5b. In this case, the evaporated zirconia particles are formed on the side wall 5a.
It collides obliquely inward from below to form a film.

Table 1 below shows the contents of samples manufactured by simulating zirconia coating on the inside of the side wall portion and the effective portion with a flat plate test piece. That is, the collision angle between the zirconia evaporated particles and the flat plate test piece, and the flat plate surface roughness Ra (μm) before zirconia coating were changed. These samples were subjected to a thermal cycle test between 1100 ° C. and 150 ° C. in the atmosphere used as a method for evaluating turbine high-temperature parts, and the life until the coating was peeled was evaluated. The result is shown in FIG.

[0026]

[Table 1]

In the general method described above, the coating on the inner side of the side wall corresponds to sample A, and the coating on the effective portion corresponds to sample E. Assuming that the peeling life of this sample A is 1, the peeling life of the sample E is ten times that of the sample A, and the adhesion of the film on the inner side of the side wall portion and the thermal characteristics are greatly inferior to the effective portion. Samples B and C are materials in which the collision angle with the evaporating particles and the surface roughness Ra were changed in order to improve this defect. Sample B having a surface roughness Ra of 1 μm or more (2 to 4 μm) has a peeling life approximately eight times that of Sample A, and Sample C having a large collision angle of 45 ° to 90 ° has approximately The peel life was 9 times longer, and a film characteristic close to that of Sample E simulating the effective portion was obtained.

In particular, high temperature parts for turbines are required to have members excellent in such heat cycle characteristics. For comparison, Sample D, which simulated the effective portion with a surface roughness of 1 μm or more, has a peeling life of about １ ／ of Sample E.

Based on these evaluation results, in the case of a member having a side wall portion, when the inside of the side wall portion is coated with ceramics by physical vapor deposition, the surface roughness inside the side wall portion is relative to the effective portion surface roughness. By making the surface rough, the film characteristics inside the side wall portion can be made much closer to the film characteristics of the effective portion. Preferably, the surface roughness Ra on the inner side of the side wall is 1 μm.
m or more, and the effective part surface roughness is preferably 1 μm.

Further, as the collision angle between the inside of the side wall portion and the evaporating particles approaches 45 ° or more and approaches 90 °, the film characteristics become better. Therefore, the ceramic coating on the inside of the side wall portion and the effective portion is preferably changed in the arrangement of the members so that a collision angle close to 90 ° can be obtained.

Next, when the side wall portion of the member protrudes greatly around the effective portion, the ceramic coating on the inside of the side wall portion is performed while rotating the member. In particular, as shown in FIG. 3, when the aspect ratio L / W, which is the ratio of the depth L of the side wall portion to the width W of the effective portion, is large, a sufficient film thickness cannot be obtained in the deep portion inside the side wall portion. Sometimes. In such a case, in addition to the rotational driving of the member, a step of fixing the member at an angle such that the ceramic evaporation particles directly collide with the deep portion inside the side wall portion may be provided. By this step, a sufficient coating can be performed even on the deep portion inside the side wall portion, and a uniform film can be obtained on the entire inside of the side wall portion by combining with the rotation driving. In particular,
These methods are effective when the aspect ratio is 0.5 or more.

FIG. 4 shows a second embodiment of the present invention.
It is a block diagram of Claim 9 and Claim 10). As shown in the drawing, in this embodiment, the inside of the side wall 5a of the member 5 is covered with zirconia, but the member 5 is attached to the mounting jig 6 so that the side wall 5a faces the target material 4.
Mounted on In order to uniformly coat the inside of the side wall 5a with zirconia, the step of coating while rotating the member 5 and the step of fixing and covering the member 5 are performed in combination, so that the zirconia with the extremely excellent film characteristics inside the side wall is provided. A coated turbine hot component could be obtained.

Further, as shown in FIG. 4, since the NC control device 9 is connected to the drive device 7 in the present device, the above-described rotational drive, rotational speed, fixed operation, and fixed time can be freely combined and controlled. . In addition, a ceramic film having excellent characteristics can be uniformly coated by continuous automatic control.

The method performed in each of the above-described embodiments can be applied to ceramic coating by a thermal spraying method as it is, and also has excellent thermal spray coating characteristics on the side wall by using the same in the manufacturing method. A member can be obtained.

[0035]

As described above, according to the method for producing a ceramic coating of the present invention (corresponding to claims 1 to 8), the step of coating the side wall with the ceramic in the member having the side wall and the effective portion The side wall and the effective portion are separately coated by providing a step of coating the ceramic on the surface, the surface roughness of the side wall and the effective portion, the collision angle between the coated portion and the ceramic particles, the driving method of the member or the driving speed of the member Is controlled in each of the side wall portion and the effective portion, so that there is no difference between the respective portions of the three-dimensionally shaped member, and the ceramic film characteristics of the side wall portion and the effective portion can be greatly improved. Further, according to the ceramic-coated member of the present invention (corresponding to claims 9 and 10), the coating characteristics are excellent, and it can be applied to turbine high-temperature members.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a ceramic coating method according to a first embodiment of the present invention.

FIG. 2 is a bar graph showing the results of a thermal cycle test of the ceramic-coated test piece of FIG.

FIG. 3 is a schematic diagram of ceramic coating on the inside of a side wall according to the present invention.

FIG. 4 is a schematic configuration diagram of a ceramic coating method according to a second embodiment of the present invention.

FIG. 5 is a schematic configuration diagram of a general method of forming a ceramic coating by physical vapor deposition.

FIG. 6 is a perspective view of a member having a side wall portion for performing ceramic coating.

[Explanation of symbols]

1: vacuum chamber, 2: vacuum pumping device, 3: electron gun chamber,
4 target material, 5 member, 5a side wall portion, 5b effective portion, 6 mounting jig, 7 member driving device, 8 heating device, 9 NC control device.

Claims (10)

[Claims] 1. A manufacturing method for coating a member having a side wall portion and an effective portion with ceramics, wherein the step of coating the side wall portion with ceramics, the step of coating the effective portion with ceramics, and the steps of: Provide a driving device to separately drive the portion, the surface roughness of the side wall portion and the effective portion, the collision angle between the coating portion of the member and the ceramic particles, the method of moving the member, the driving speed of the member, A method for manufacturing a ceramic-coated member, wherein the member is coated with ceramics by controlling each of the side wall portion and the effective portion. 2. A manufacturing method of coating a member having a side wall portion and an effective portion with ceramics by physical vapor deposition, wherein a surface roughness inside the side wall portion is made relatively larger than a surface roughness of the effective portion. The method for producing a ceramic-coated member according to claim 1, wherein: 3. The method according to claim 1, wherein in the step of coating the inside of the side wall with the ceramic by physical vapor deposition, the member is arranged such that most of the evaporated particles of the ceramic collide with the inside of the side wall at an angle of 45 ° or more. Item 3. A method for producing a ceramic coated member according to Item 2. 4. The method according to claim 2, wherein, in the step of coating the effective portion with the ceramic by physical vapor deposition, the member is arranged such that most of the evaporated particles of the ceramic collide with the surface of the effective portion at an angle of 90 °. The method for producing a ceramic-coated member according to the above. 5. The ceramic coating member according to claim 2, wherein the step of coating the inside of the side wall portion with the ceramic by physical vapor deposition is performed until the ceramic coating is completed by a rotating step and a fixing step of the member. Production method. 6. A step of fixing a member having a side wall portion and an effective portion and coating the inside of the side wall portion with ceramic by physical vapor deposition, wherein the ratio is a ratio of a depth L of the side wall portion to a width W of the effective portion. 6. The method according to claim 5, wherein the fixed angle of the member is determined such that most of the ceramic evaporated particles directly collide with a portion having the largest aspect ratio (L / W). 7. In the step of coating the inside of the side wall with the ceramic by physical vapor deposition, the rotation drive and the fixing operation are continuously and automatically controlled by the control device until the ceramic coating is completed by the step of rotating the member and the step of fixing the member. The method for producing a ceramic-coated member according to claim 5, wherein: 8. A manufacturing method in which a member having a side wall is coated with ceramics by thermal spraying.
A method for manufacturing a ceramic-coated member, comprising using the method for manufacturing a ceramic-coated member according to any one of the claims. 9. A member having a side wall portion and an effective portion.
A ceramic coating member, wherein a ceramic coating is formed by any one of the manufacturing methods according to any one of claims 7 to 7, so that the ceramic coating member can be applied to a turbine high-temperature component. 10. A ceramic-coated member, wherein the ceramic-coated member is formed by the manufacturing method according to claim 8 so as to be applicable to a turbine high-temperature component.