JP2000234923A - Surface profile measuring device and part measuring method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a low-cost surface profile measuring device wherein no stick-slip or sucking occurs while objects of various profiles are easily coped with. SOLUTION: A sphere 3 is provided on a surface 2a of a surface plate 2 which is a reference surface, and an object 1 to be measured is placed on the sphere 3. In order to measure a surface profile of a surface 1a of the object 1 relative to the reference surface 2a, the object 1 is moved on the sphere 3, and the changes in the distance between the surface 1a and the surface 2a is detected with an electric micrometer 5. The sphere 3 is arranged at a hole part of a washer 4 provided on the surface 2a, which regulates the sphere 3 from moving on the surface 2a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface profile measuring apparatus and a component manufacturing method for detecting a surface profile of an object to be measured when measuring flatness, parallelism, surface roughness, and the like.

[0002]

2. Description of the Related Art Machine parts constituting a machine tool or a processing machine are machined with an accuracy corresponding to the function of each part. Among the various types of processing accuracy, the most basic accuracy is increased flatness and parallelism. The measurement of flatness and parallelism is performed by various methods according to the required accuracy, material, and shape of a part. The most basic and commonly used method is to measure the change in the height of the surface to be measured relative to the reference surface with a displacement meter by sliding the object to be measured on a surface plate with good flatness as a reference. I do. There is also a method in which a linear guide or a rotary table is used in place of the surface plate, and the measurement is performed by moving the object to be measured in parallel or rotationally with respect to the displacement meter. As the displacement meter, a contact type displacement meter such as a dial gauge or an electric micrometer, or a non-contact type displacement meter such as a capacitance type displacement meter, a laser displacement meter, and a displacement meter using a CCD are used. Can be

[0003]

However, in the method in which the object to be measured is slid on the surface plate, the contact area between the surface plate and the object to be measured increases when the contact portion of the object to be measured has a planar shape. , Increased friction and stick-slip (stick sl
ip) is more likely to occur. If such a stick-slip occurs or foreign matter such as dust is mixed between the surface plate and the object to be measured, an error tends to occur in the measurement, and when measuring with high accuracy or reproducibility of the measured value is required. In the case of measurements taken, it was a problem.

When a cutting fluid such as water or oil or a grinding fluid is used at the time of processing a part, water or oil adheres to the part. Sticking occurs, which affects measurement accuracy. Therefore, conventionally, measurement is performed after wiping the moisture of the object to be measured with a cloth or the like.For example, in the case of a member having minute pores such as a ceramic material, the moisture is wiped before measurement. In some cases, moisture remaining inside the pores may seep out during measurement.

[0005] Therefore, it is necessary to dry not only the moisture of the object to be measured but also to dry it before performing the measurement, and there is a problem that the measuring operation time is increased. In particular, in the case of a high-precision part, since processing and measurement are repeated many times to improve the accuracy, there is a disadvantage that the working time becomes extremely long due to the drying time. In order to shorten the drying time, it is conceivable to apply heat from the outside by blowing warm air on the object to be measured, but in this case, the object to be measured expands and contracts due to the influence of the heat during drying. It has the disadvantage that it affects measurement accuracy.

On the other hand, when measurement is performed using a linear guide or a rotary table, the above-described problems such as stick-slip and sticking of an object to be measured do not occur, but have the following disadvantages. That is, it is difficult to respond to parts having various sizes, shapes, and weights with a single linear guide or rotary table.
In the case where there is one that measures by rotating and one that measures by moving in parallel, it is necessary to prepare both a linear guide and a rotary table, which results in an increase in cost. Further, when the processed part is wet, the water may enter the linear guide or the bearing portion of the rotary table, causing rust or the like, which may cause a problem.

SUMMARY OF THE INVENTION An object of the present invention is to provide an inexpensive planar shape measuring apparatus and a component manufacturing method which do not generate stick-slip or sticking and can easily cope with various types of objects to be measured. It is in.

[0008]

An embodiment of the present invention will be described with reference to FIG. (1) In the planar shape measuring device according to the first aspect of the present invention, the plurality of rolling elements 3 rolling on the reference surface 2a serving as a measurement reference.
And a detector 5 for detecting a change in the distance between the measured surface 1a of the DUT 1 moving on the reference surface 2a via the rolling elements 3 and the reference surface 2a, thereby achieving the above object. (2) According to a second aspect of the present invention, in the planar shape measuring device according to the first aspect, a regulating member 4 for regulating the rolling element 3 so as not to move from a predetermined position is provided. (3) The invention according to claim 3 is applied to a component manufacturing method for processing the flatness or parallelism of a component to a predetermined accuracy.
The first step of performing the planar processing of step (a) and the second step of measuring the planar form of the surface 1a on which the planar processing has been performed by the planar characteristic measuring apparatus according to claim 1 or 2 are alternately and repeatedly performed. The above object is achieved by processing to a predetermined accuracy.

In the section of the means for solving the above-mentioned problems, which explains the configuration of the present invention, the drawings of the embodiments of the present invention are used to make the present invention easy to understand. However, the present invention is not limited to the embodiment.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. -First Embodiment- Fig. 1 is a view showing a first embodiment of a planar shape measuring device according to the present invention, wherein (a) is a plan view and (b) is A in (a).
It is -A sectional drawing. FIG. 1 shows a case in which a parallelism measurement is performed on a DUT 1 which is a flat disk, that is, a circular parallel plate, and the DUT 1 is disposed on a surface 2 a of a surface plate 2.
Are placed on the three spheres 3. The spheres 3 have the same radius and the same accuracy. For example, steel balls used for ball bearings are used. In the case where a wet part is frequently measured, if a steel ball is used for the spherical body 3, rust may be generated, so a spherical body such as ceramics is used. Since the sphericity of the sphere 3 affects the measurement accuracy, it is preferable to use different spheres 3 having different accuracy in accordance with the required measurement accuracy.

Each sphere 3 is disposed in a hole of a cylindrical washer 4 placed on the surface 2a. The washer 4 is provided so as to prevent the sphere 3 from moving on the surface 2a and deviating from a predetermined position, and to enable measurement with good reproducibility. Absent. In FIG. 1, the spheres 3 are arranged on the vertices of an equilateral triangle T on the surface plate 2, and the object 1 is placed on the sphere 3 so that the three spheres 3 are equidistant from the center O of the object 1. Place on. The surface 2a of the surface plate 2 is a reference surface for measurement, and the electric micrometer 5 used for the parallelism measurement is fixed to a stand 6 mounted on the surface 2a.

The electric micrometer 5 is of a contact type displacement type, and when measuring the parallelism of the DUT 1, an operator contacts the probe 5 a with the upper surface 1 a of the DUT 1. The device under test 1 is rotated by one rotation about its center O by hand. The electric micrometer 5 detects a change in the height of the surface 1a with respect to the surface 2a while the device under test 1 makes one rotation. The detection signal is sent to a controller (not shown), and the parallelism is calculated based on the detection result output from the controller.

FIG. 2 is a diagram for explaining the operation of the sphere 3 during measurement. When the device under test 1 is rotated on the sphere 3, the sphere 3 rotates in the hole of the washer 4 as shown by the arrow in FIG. Therefore, the DUT 1 rotates while maintaining contact with the virtual plane 10 including the contact point between the sphere 3 and the DUT 1. Further, since all the spheres 3 have the same radius, the virtual plane 10 is parallel to the plane 2a which is the reference plane, and the change in the height of the plane 1a obtained by using the apparatus of the present embodiment is different from the conventional one. This is equal to the change in height obtained by sliding the DUT 1 on the surface 2a.

By the way, since the washer 4 and the sphere 3 are merely placed on the surface plate 2, when the size of the DUT 1 is variously different, the washer 4 and the sphere 3 are changed according to the size of the DUT 1. The measurement may be performed by changing the position of. The DUT 11 shown in FIG. 3 is smaller than the DUT 1. In this case, the washer 4 and the sphere 3 are moved as shown by the arrow B to dispose the DUT 11 on the sphere 3.

Compared with a conventional measuring device, the planar shape measuring device of the present embodiment has the following advantages. (A) Since the sphere 3 is interposed between the DUT 1 and the surface 2a, the DUT 1 does not stick to the surface 2a even if the DUT 1 is wet. It is possible to avoid the occurrence of a measurement error due to the entry of foreign matter. Further, when the DUT 1 is moved with respect to the reference plane (surface 2a), the sphere 3 rotates as shown in FIG.
Can easily and smoothly move on the plane 10 with a small force, and can prevent occurrence of stick-slip as in the related art. As a result, measurement with good reproducibility can be performed, and a drying step before measurement, which has been conventionally performed, can be omitted, and the measurement time can be significantly reduced. In particular, it is effective for high-precision parts in which measurement and processing are repeated many times. Even if the rotation of the sphere 3 is hindered for some reason (for example, by friction with the edge of the washer 4), the contact area between the DUT 1 and the sphere 3 is very small. It is slippery and does not cause stick-slip.

(B) In the embodiment described above, since the sphere 3 and the washer 4 are mounted on the surface plate 2, it is compared with a conventional product using a linear guide or a rotary table which has been commercialized. Thus, the configuration becomes very simple, and the cost can be reduced. Further, as shown in FIG. 3, only by changing the arrangement of the sphere 3 and the washer 4,
It is possible to correspond to the DUT 1 of various sizes.

When the measurement is performed by rotating the DUT 1 as shown in FIG. 1, a V-block 12 as shown in FIG. Good. At the time of measurement, the DUT 1 is rotated while lightly pressing the side surfaces of the DUT 1 against the surfaces 12a and 12b of the V-block 12.

Second Embodiment FIGS. 5A and 5B are diagrams showing a second embodiment of the planar shape measuring device according to the present invention, wherein FIG. 5A is a plan view, and FIG.
It is -D sectional drawing. In the present embodiment, a case will be described in which the flatness of the DUT 21 which is a rectangular parallel plate is measured. Washers 4 are attached to the lower surface 21b of the DUT 21, and the three washers 4 are arranged at each vertex of the triangle as shown in FIG. When placing the DUT 21 on the surface plate 2, the three spheres 3 on the surface 2 a are placed so as to fit into the holes of the washers 4 attached to the DUT 21, respectively. At the time of measurement, the object to be measured 21 is moved straight in the horizontal direction in the figure, a change in the height of the surface 21a is detected by the electric micrometer 5, and the flatness of the surface 21a is determined based on the detection result.

Also in the case of the present embodiment, the device under test 21 is mounted on the surface 2a via the sphere 3, and the same effects as in the first embodiment can be obtained. further,
In the present embodiment, since the washer 4 is attached to the lower surface 21b of the DUT 21, the DUT 2 is attached as shown in FIG.
When the object 1 moves in parallel, the sphere 3 also moves together with the object 21, so that the sphere 3 does not always intervene between the object 21 and the surface 2 a and does not come off.

In the above-described embodiment, the washer 4 is provided on the object 21 to regulate the sphere 3 to a predetermined value of the object 21. For example, as shown in FIG. The sphere 3 may be laid on the surface 2a, and the sphere 3 may be regulated to a predetermined value of the surface 2a by the regulating member 22 provided on the surface 2a. In this way, even when the object 21 is moved in parallel, the object 21 does not come off the sphere 3. In addition, if the area where the spheres 3 are spread is set large, it is possible to cope with both large and small objects without changing the arrangement of the spheres 3. Further, it is possible to cope with the case where the device to be measured is rotated as in the first embodiment. However, when the spheres 3 are laid in this manner, a large number of the spheres 3 are required, and a dedicated regulating member 22 is required, which causes an increase in cost.

In the first and second embodiments described above, the spherical body 3 is used as the rolling element, but a cylindrical roller may be used. FIGS. 7 and 8 are views showing an apparatus using the roller 30. FIG. 7 shows an apparatus in which the measurement is performed by rotating the DUT 1, and FIG. The devices in each case are shown. In both cases, the regulating member 31 was attached to the lower surface of the measured object. Further, the apparatus of the present embodiment can be applied to measurement of not only the parallelism and flatness of an object to be measured but also surface roughness.

[0022]

EXAMPLE The parallelism was measured with the configuration shown in FIG. As the surface plate 2, a glass surface plate having dimensions of 500 mm × 500 mm is used, and the flatness of the surface 2a has an accuracy of 1 μm or less. DUT 1 is 200mm in diameter and 5mm in thickness
The polishing was repeated on both surfaces of the DUT 1 and the parallelism was measured so that the final accuracy was lower than the required accuracy. The degree of parallelism required as a part of the DUT 1 was 1 μm, while the degree of parallelism of the DUT 1 before polishing was 5 μm. By gradually increasing the precision of the parallelism while repeating the polishing and the measurement several times, the parallelism could be processed to 0.4 μm.

In a conventional apparatus for measuring by sliding on a surface plate, the above-mentioned sticking is likely to occur due to the moisture adhering to the parts, and the measured values are likely to vary on the order of several μm. For this reason, a drying step was performed before each measurement to perform the operation, and it took about 3 hours to process the parallelism from 5 μm to 2 μm. On the other hand, about 30
It could be processed to a parallelism of 0.4 μm in minutes. The reason why the time can be shortened in this way is that there is no need to dry the parts and that the reproducibility of the measurement accuracy has been improved.

In the correspondence between the embodiment described above and the elements of the claims, the sphere 3 and the roller 30 are rolling elements, the surface 2a is a reference surface, the washer 4 is a regulating member,
The electric micrometers 5 each constitute a detector.

[0025]

As described above, according to the present invention,
Since the object to be measured moves on the reference plane via the rolling element rolling on the reference plane, the object to be measured does not stick to the reference plane or cause stick-slip during measurement. As a result, the measurement can be performed with good reproducibility and high accuracy, and the measurement operation time can be reduced. Further, since the configuration is simpler than the conventional configuration using a linear guide or a rotary table, the cost of the apparatus can be reduced. Further, by changing the arrangement of the rolling elements on the reference plane, it is possible to easily cope with objects to be measured having different sizes. In particular, since the rolling element is prevented from moving from the predetermined position by using the regulating member in the invention of claim 2, stable measurement with good reproducibility and workability can be performed.

[Brief description of the drawings]

FIG. 1 is a view showing a first embodiment of a planar shape measuring apparatus according to the present invention, wherein (a) is a plan view and (b) is a cross-sectional view taken along line AA of (a).

FIG. 2 is a view for explaining the operation of a sphere 3;

FIG. 3 is a diagram illustrating a case in which an object to be measured 11 is measured.

FIG. 4 is a diagram showing a measurement using a V block 12,
(A) is a top view, (b) is CC sectional view of (a).

FIGS. 5A and 5B are diagrams showing a second embodiment of the planar shape measuring device according to the present invention, wherein FIG. 5A is a plan view and FIG.

FIG. 6 is a view showing a modification of the planar shape measuring device;
(A) is a top view, (b) is EE sectional drawing.

7A and 7B are diagrams showing another example of the planar shape measuring device using the rollers 30 as rolling elements, wherein FIG. 7A is a plan view and FIG.
-F sectional drawing.

8A and 8B are diagrams showing a planar shape measuring device using a roller 30 as a rolling element, wherein FIG. 8A is a plan view and FIG. 8B is a front view.

[Explanation of symbols]

 1,11,21 DUT 2 surface plate 3 sphere 4 washer 5 electric micrometer 30 roller 22,31 regulating member

Claims (3)

[Claims] 1. A plurality of rolling elements rolling on a reference plane serving as a measurement reference, and a distance between a measured surface of an object to be measured moving on the reference plane via the rolling elements and the reference plane. And a detector for detecting a change in the surface profile. 2. The planar shape measuring device according to claim 1, further comprising a regulating member that regulates the rolling element from moving from a predetermined position. 3. A component manufacturing method for processing the flatness or parallelism of a component with a predetermined accuracy, wherein: a first step of performing the flat processing of the component; and a surface feature of the surface on which the flat processing is performed. 3. A method for manufacturing a component, comprising: alternately and repeatedly performing the second step of measuring with the planar shape measuring device according to claim 1 or 2 to perform processing with the predetermined accuracy.