JP2000234646A - Vibration control device - Google Patents
Vibration control deviceInfo
- Publication number
- JP2000234646A JP2000234646A JP11036831A JP3683199A JP2000234646A JP 2000234646 A JP2000234646 A JP 2000234646A JP 11036831 A JP11036831 A JP 11036831A JP 3683199 A JP3683199 A JP 3683199A JP 2000234646 A JP2000234646 A JP 2000234646A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- mass body
- movable
- actuator
- movable portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
Description
【0001】[0001]
【発明が属する技術分野】本発明は、積極的に振動を抑
制させる所謂アクティブ型の除振装置に係り、詳しく
は、低周波での微振動の抑制レベルを向上させ、より優
れた除振性能を得る技術に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called active vibration damping device for positively suppressing vibration, and more particularly to a vibration suppression device capable of improving the level of suppression of micro-vibration at low frequencies and having a better vibration-damping performance. Related to the technology to obtain.
【0002】[0002]
【従来の技術】一般的な除振装置としては、空気、コイ
ルバネ、ゴム支柱等の弾性機構を介して基盤等の固定部
に可動部を支持させる防振支持構造により、固定部から
の外乱振動を遮断して可動部の除振を行う構造、所謂パ
ッシヴ型除振装置がある。この装置は、比較的構造が簡
単に除振効果が得られるものであるが、固定部の質量と
弾性機構の剛性等から決まる低周波の固有振動数付近の
外乱については、むしろ増幅されてしまう傾向がある。2. Description of the Related Art As a general vibration isolator, a vibration isolating support structure in which a movable portion is supported on a fixed portion such as a base via an elastic mechanism such as air, a coil spring, or a rubber support is used. There is a so-called passive type anti-vibration device for isolating the movable part by blocking the vibration. This device has a relatively simple structure and can provide an anti-vibration effect, but disturbances near the low-frequency natural frequency determined by the mass of the fixed part and the rigidity of the elastic mechanism are amplified rather. Tend.
【0003】例えば弾性機構として空気バネを用いたも
のでは、オリフィスやバルブ等を設けて低周波の振動を
減衰させるようにしたものがあるが、十分な効果が得ら
れるには至っていない。又、固定部(受台)と基盤との
間にオイルダンパ等の減衰特性を備えたものを介装した
サンドイッチ構造の固定部も試されているが、この構造
ではダンパ部を介して高周波の外乱振動が伝達され易く
なり、振動遮断特性が悪くなる難点があった。For example, in the case of using an air spring as an elastic mechanism, an orifice, a valve or the like is provided to attenuate low-frequency vibration, but a sufficient effect has not been obtained. In addition, a sandwich-type fixed portion in which an oil damper or the like having a damping property is interposed between the fixed portion (the pedestal) and the base has been tried. Disturbance vibration is easily transmitted, and there is a problem that the vibration blocking characteristics are deteriorated.
【0004】[0004]
【発明が解決しようとする課題】そこで、遮断特性を損
なうことなく低周波の振動を抑制するために、基盤上に
アクチュエータと質量体とを配置し、基盤の振動の検出
結果に基づいてアクチュエータを作動させて、基盤の振
動を抑制する方向に質量体を動かして除振(制振)させ
る装置、所謂アクティブ型除振装置も知られている(例
えば、特開平6−307494号公報)。Therefore, in order to suppress low-frequency vibration without impairing the cutoff characteristics, an actuator and a mass body are arranged on a base, and the actuator is mounted on the basis of the detection result of the base vibration. A so-called active vibration isolator, which is operated to move the mass body in a direction to suppress the vibration of the base, so as to perform vibration isolation (vibration suppression), is also known (for example, JP-A-6-307494).
【0005】前記アクティブ型除振装置は、近年では多
用されている手段であるが、作動振幅が非常に微小であ
り、アクチュエータや質量体の作動精度の影響が出易い
点で、精密な除振装置として低周波の振動抑制に用いる
には改善の余地がある。すなわち、一般的なアクチュエ
ータとして用いられるエア又は油圧シリンダやリニアモ
ータでは、低周波で、かつ、微小振幅で作動させるに
は、シール部やリニアガイド部の摺動抵抗、或いは、質
量体の摺動抵抗等から生じる非線型特性により、制御信
号に対応した滑らかな動きを現出させることが困難であ
るとともに、場合によっては余分な振動を外乱として発
生させてしまうおそれもあった。The active vibration isolator is a means that has been widely used in recent years. However, since the operation amplitude is very small and the influence of the operation accuracy of an actuator or a mass body is likely to occur, a precise vibration isolation device is used. There is room for improvement if the device is used to suppress low-frequency vibrations. In other words, with air or hydraulic cylinders or linear motors used as general actuators, to operate at a low frequency and with a small amplitude, the sliding resistance of the seal or linear guide, or the sliding of the mass Due to the non-linear characteristics generated by the resistance and the like, it is difficult to make a smooth movement corresponding to the control signal appear, and in some cases, there is a possibility that extra vibration may be generated as a disturbance.
【0006】上記実情に鑑みて本発明は、基本的にはア
クティブ型としながら、微小振動や低周波振動も十分に
抑制でき、しかもパッシヴ型の利点も備えて、総合的に
振動抑制性能が向上した除振装置を得ることを目的とす
るものである。In view of the above-mentioned circumstances, the present invention is basically of the active type, can sufficiently suppress minute vibrations and low-frequency vibrations, and has the advantages of the passive type, so that the overall vibration suppression performance is improved. It is an object of the present invention to obtain a vibration isolator that has been manufactured.
【0007】[0007]
【課題を解決するための手段】第1発明は、除振装置に
おいて、弾性具を介して固定部に弾性支持された可動部
と、質量体を非接触状態で相対移動可能に可動部に支持
する非接触支持手段と、質量体を強制移動させるべく可
動部に設けられたアクチュエータと、可動部の固定部に
対する振動を検出して振動信号を出力する振動センサ
と、を備え、振動センサの出力信号に基づいてアクチュ
エータを作動させて、可動部の振動が抑制される方向に
質量体を可動部に対して移動させるように、振動センサ
とアクチュエータとを連係してあることを特徴とする。According to a first aspect of the present invention, in a vibration damping device, a movable portion elastically supported by a fixed portion via an elastic member and a mass member are supported by the movable portion so as to be relatively movable in a non-contact state. Non-contact support means, an actuator provided on the movable part for forcibly moving the mass body, and a vibration sensor for detecting vibration of the movable part with respect to the fixed part and outputting a vibration signal, the output of the vibration sensor The vibration sensor and the actuator are linked so that the actuator is operated based on the signal and the mass body is moved relative to the movable part in a direction in which the vibration of the movable part is suppressed.
【0008】第2発明は、除振装置において、弾性具を
介して固定部に弾性支持させる可動部と、少なくとも質
量体と前記可動部とに亘って架設してなる弾性部材を含
み、前記質量体を相対移動可能に可動部に支持する支持
手段と、質量体を強制移動させるべく可動部に設けられ
た摺動部を持たない非摺動型アクチュエータと、可動部
の固定部に対する振動を検出して振動信号を出力する振
動センサと、を備え、振動センサの出力信号に基づいて
非摺動型アクチュエータを作動させて、可動部の振動が
抑制される方向に質量体を可動部に対して移動させるよ
うに、振動センサと非摺動型アクチュエータとを連係し
てあることを特徴とする。According to a second aspect of the present invention, the vibration isolator includes a movable portion elastically supported by a fixed portion via an elastic member, and an elastic member extending over at least the mass body and the movable portion. Support means for supporting the body on the movable part so as to be relatively movable, non-sliding type actuator without a sliding part provided on the movable part for forcibly moving the mass body, and detection of vibration of the movable part with respect to the fixed part A vibration sensor that outputs a vibration signal by operating the non-sliding type actuator based on the output signal of the vibration sensor to move the mass body to the movable part in a direction in which the vibration of the movable part is suppressed. The vibration sensor and the non-sliding type actuator are linked so as to move.
【0009】第3発明は、第1発明において、質量体が
磁性体で構成されるとともに、非接触支持手段及びアク
チュエータが共に電磁石で構成されていることを特徴と
する。A third invention is characterized in that, in the first invention, the mass body is made of a magnetic material, and the non-contact support means and the actuator are both made of electromagnets.
【0010】第4発明は、第2発明において、質量体が
磁性体で構成されるとともに、前記弾性部材を除く前記
支持手段及び非摺動型アクチュエータが共に電磁石で構
成されていることを特徴とする。According to a fourth aspect of the present invention, in the second aspect, the mass body is made of a magnetic material, and the supporting means and the non-sliding type actuator except for the elastic member are both made of an electromagnet. I do.
【0011】第1発明の構成によれば、質量体を非接触
状態で相対移動可能に可動部に支持してあるから、質量
体と可動部との摺動抵抗が無い状態で、振動抑制方向に
質量体を十分な移動量でもって動かせるようになる。従
って、スライド構造やローラ支持構造で相対移動可能に
支持されている従来手段に比べて摺動抵抗の少ない状態
となり、低周波で微小振幅での質量体の動作特性を、線
型に近く、かつ、素早い応答性として得ることが可能に
なる。そして、可動部は固定部に弾性支持されているの
で、コスト安に外乱振動を固有振動数以外のほぼ全域に
亘って抑制できるという、パッシヴ型除振装置の作用も
発揮できるものである。According to the structure of the first invention, since the mass body is supported by the movable portion so as to be relatively movable in a non-contact state, the vibration suppressing direction can be achieved in a state where there is no sliding resistance between the mass body and the movable portion. The mass body can be moved with a sufficient amount of movement. Therefore, the sliding resistance is smaller than that of the conventional means supported by the slide structure or the roller support structure so as to be relatively movable, and the operating characteristics of the mass body at low frequency and small amplitude are close to linear, and It is possible to obtain quick response. Further, since the movable portion is elastically supported by the fixed portion, it is possible to exert the effect of the passive vibration damping device, that is, it is possible to suppress disturbance vibration over almost the entire region other than the natural frequency at low cost.
【0012】第2発明の構成によれば、質量体を強制移
動させるために可動部に設けられたアクチュエータを、
摺動部を持たない非摺動型に構成したので、アクチュエ
ータの動作抵抗が無い状態で、振動抑制方向に質量体を
十分な移動量でもって動かせるようになる。従って、油
圧やエアシリンダ、或いはリニアモータ等で質量体を動
かす従来手段に比べて摺動抵抗の少ない状態となり、低
周波で微小振幅での質量体の動作特性を、線型に近く、
かつ、素早い応答性として得ることが可能になる。そし
て、可動部は固定部に弾性支持されているので、コスト
安に外乱振動を固有振動数以外のほぼ全域に亘って抑制
できるという、パッシヴ型除振装置の作用も発揮できる
ものである。更には、質量体と可動体とに亘って巻きバ
ネ等の弾性機構を架設したので、大型の装置に適用する
場合には質量体自体も大型化して重くなる場合において
も、支持手段のうちの弾性部材を除く構成、すなわち電
磁石やエアー吹出し等の非接触支持手段、スライド構造
等の支持手段、電磁石やエアー吹出し等の非摺動型アク
チュエータへの、前記した質量体の大型化に伴う作用負
荷を軽減でき、それらを小型、軽量のものにすることが
可能になる。According to the configuration of the second invention, the actuator provided on the movable portion for forcibly moving the mass body is provided with:
Since the structure is a non-sliding type having no sliding portion, the mass body can be moved with a sufficient movement amount in the vibration suppression direction without the operation resistance of the actuator. Therefore, the sliding resistance is smaller than that of the conventional means for moving the mass body by a hydraulic pressure, an air cylinder, or a linear motor, and the operating characteristics of the mass body at a low frequency and minute amplitude are close to those of a linear type.
In addition, quick response can be obtained. Further, since the movable portion is elastically supported by the fixed portion, it is possible to exert the effect of the passive vibration damping device, that is, it is possible to suppress disturbance vibration over almost the entire region other than the natural frequency at low cost. Furthermore, since an elastic mechanism such as a winding spring is provided between the mass body and the movable body, even when the mass body itself becomes large and heavy when applied to a large-sized device, the Excluding the elastic members, that is, non-contact support means such as electromagnets and air blowing, support means such as sliding structures, and non-sliding actuators such as electromagnets and air blowing, load acting on large-sized mass bodies described above. Can be reduced, and they can be made small and lightweight.
【0013】第3又は第4発明の構成によれば、磁力の
吸引又は反発力によって質量体を浮かして支持でき、か
つ、電流値を変更する等の電磁石の磁力調節によって質
量体を十分な移動量でもって動かすことができるので、
質量体と可動部との摺動抵抗、及びアクチュエータの動
作抵抗の双方共に無い状態が現出できるものとなる。従
って、低周波で微小振幅での質量体の動作特性を、線型
又はほぼ線型にでき、かつ、より素早い応答性が得られ
るようになるとともに、前述したパッシヴ型除振装置の
作用も発揮できる。According to the third or fourth aspect of the present invention, the mass can be floated and supported by the attraction or repulsion of the magnetic force, and the mass can be sufficiently moved by adjusting the magnetic force of the electromagnet such as changing the current value. Because it can be moved by the amount
A state in which neither the sliding resistance between the mass body and the movable part nor the operating resistance of the actuator can be realized. Therefore, the operating characteristics of the mass body at low frequency and minute amplitude can be made linear or almost linear, a quicker response can be obtained, and the function of the passive vibration isolator described above can be exhibited.
【0014】[0014]
【発明の実施の形態】以下に、本発明の実施の形態を図
面に基づいて説明する。図1に示すように、固定部とし
ての4個の受台19の夫々に、弾性具である空気バネ1
を介して可動部である基盤2を弾性支持するとともに、
その基盤2上に、アクティブマスダンパ4、コントロー
ラ5、及び振動センサ6を搭載して除振装置が構成され
ている。Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, an air spring 1 as an elastic member is attached to each of the four cradles 19 as fixing portions.
Elastically supports the base 2 which is a movable part through
An active mass damper 4, a controller 5, and a vibration sensor 6 are mounted on the base 2 to constitute a vibration isolation device.
【0015】図2に示すように、アクティブマスダンパ
4は、基盤2に受板4aを介して置かれたケーシング1
3内に、鋼鉄等の磁性体で成る立方体形状の質量体3
を、その上下及び前後左右の計6箇所に配置した電磁石
(非接触支持手段及び非摺動型アクチュエータの一例)
7〜12によって、ケーシング13に対して、すなわち
基盤2に対して上下及び前後左右に相対移動自在に非接
触状態で支持して構成されている。As shown in FIG. 2, the active mass damper 4 includes a casing 1 placed on a base 2 via a receiving plate 4a.
3, a cubic mass body 3 made of a magnetic material such as steel.
Are arranged at a total of six positions, that is, up, down, front, rear, left and right (an example of a non-contact support means and a non-sliding actuator)
Reference numerals 7 to 12 support the casing 13, that is, the base 2, in a non-contact manner so as to be relatively movable up and down, front and rear, and left and right.
【0016】上下の電磁石7,8は、円筒型鉄心にコイ
ルを巻いた棒状のものに、かつ、前後左右の電磁石9,
10,11,12は、U字型鉄心にコイルを巻いた馬蹄
形のものに夫々構成され、それら各電磁石7〜12にお
ける質量体3側端に表れる磁極は、質量体3の対向部分
に予め励磁された磁極と同極となるようにしてあり、6
個の電磁石7〜12との磁気反発力でもって質量体3を
宙に浮かした非接触状態で、ケーシング13の上下及び
前後左右の3次元方向のほぼ中心となる位置に支持させ
る構造である。The upper and lower electromagnets 7 and 8 are rod-shaped with a coil wound around a cylindrical iron core.
Numerals 10, 11, and 12 are configured in a horseshoe shape in which a coil is wound around a U-shaped iron core. The magnetic poles of the electromagnets 7 to 12 that appear at the end of the mass body 3 on the opposite side of the mass body 3 are excited in advance. And the same magnetic pole
In a non-contact state in which the mass body 3 is suspended in the air by the magnetic repulsive force of the individual electromagnets 7 to 12, the casing 13 is supported at a position substantially at the center of the casing 13 in the three-dimensional directions of up, down, front, rear, left and right.
【0017】なお、電磁力を用いた質量体4の支持方法
は、本例で挙げた反発力を利用した方法の他に、吸引力
を用いた方法、反発力と吸引力の両方を用いた方法でも
適用可能である。The method of supporting the mass body 4 using the electromagnetic force includes, in addition to the method using the repulsive force described in this embodiment, a method using a suction force, and both a repulsive force and a suction force. The method is also applicable.
【0018】質量体3は、磁界中では所定の磁化を伴う
磁性体であれば良く、前記の鋼鉄以外のものでも良い。
又、質量体3の形状としては、後述する変位センサによ
る位置測定のし易さからは平面の存在するものが便利で
あり、この点からは立方体や円筒形のものが良いが、他
の形状でも差し支えない。The mass body 3 may be a magnetic body having a predetermined magnetization in a magnetic field, and may be other than steel.
Further, as the shape of the mass body 3, it is convenient to have a flat surface in view of the easiness of position measurement by a displacement sensor described later, and from this point, a cubic or cylindrical shape is preferable. But you can.
【0019】そして、3次元方向での質量体3のケーシ
ング13に対する位置が常時検出できるように、上下、
前後、左右の各一対の電磁石7〜12のいずれかには、
対向する質量体3の表面との距離を検出する変位センサ
14が配備されている。変位センサ14は、質量体3と
の相対位置が検出可能なものであれば何でも良いが、質
量体3の動きの微小さ故、測定精度面を考慮すると光学
式の変位計が好適である。In order to always detect the position of the mass 3 with respect to the casing 13 in the three-dimensional direction,
In any of the pair of electromagnets 7 to 12 on the front, rear, left and right,
A displacement sensor 14 for detecting a distance from the surface of the opposing mass body 3 is provided. The displacement sensor 14 may be of any type as long as it can detect the relative position with respect to the mass body 3. However, since the movement of the mass body 3 is very small, an optical displacement meter is preferable in consideration of the measurement accuracy.
【0020】例えば、質量体3を前方向に動かすには、
後側電磁石10の供給電流を増加させるか、それに加え
て前側電磁石9への供給電流を減少させることにより、
反発力の釣り合い位置を前にずらすことで行われる。上
下や左右方向にも同様に移動できるので、前斜め上方
等、3次元方向に一挙に質量体を宙に浮かした非接触状
態で移動させることができる。For example, to move the mass body 3 forward,
By increasing the supply current to the rear electromagnet 10 or decreasing the supply current to the front electromagnet 9 in addition to this,
This is performed by shifting the balance position of the repulsive force forward. Since the mass body can be moved in the vertical and horizontal directions in the same manner, the mass body can be moved in a non-contact state in which the mass body is suspended in the air in a three-dimensional direction such as obliquely upward and forward.
【0021】図3に示すように、コントローラ5には、
位相調節回路15、位置保持回路16、アンプ17を備
えており、3個の変位センサ14、6個の電磁石7〜1
2、及び振動センサがリード線等で接続されている。振
動センサ6は、基盤2の3次元方向の動き及び方向を検
出できるものであり、基盤2の「動き」としては、移動
速度や移動加速度等である。As shown in FIG. 3, the controller 5 includes:
A phase adjustment circuit 15, a position holding circuit 16, and an amplifier 17 are provided, three displacement sensors 14, and six electromagnets 7-1.
2, and the vibration sensor are connected by a lead wire or the like. The vibration sensor 6 can detect the three-dimensional movement and direction of the base 2, and the “motion” of the base 2 includes a moving speed, a moving acceleration, and the like.
【0022】この除振装置の作動原理を説明すると、基
盤2上の振動センサ6及び各変位センサ14で検出され
た信号をコントローラ10で処理され、基盤2の振動を
キャンセルする方向に質量体3を移動させるに必要なコ
イル電流を出力する。コイル電流の変化に伴って反発力
の釣り合い位置がずれることで、質量体3が摺動抵抗無
く移動して応答遅れなく迅速に基盤2の振動を抑制又は
消滅される。The principle of operation of the vibration isolator will be described. The signals detected by the vibration sensor 6 and the displacement sensors 14 on the base 2 are processed by the controller 10 and the mass 3 is moved in the direction of canceling the vibration of the base 2. It outputs the coil current necessary to move. When the balance position of the repulsive force shifts with the change in the coil current, the mass body 3 moves without sliding resistance, and the vibration of the base 2 is quickly suppressed or eliminated without a response delay.
【0023】〔別実施形態〕図4に示すように、質量体
3の上下及び前後左右の各面と、ケーシング13の対向
する面部分とに亘って一対の巻きバネ(弾性機構の一
例)18を架設し、質量体3の移動に対する抵抗を持た
せた構造でも良い。つまり、大型の除振装置とした場合
には、質量体3自体が大型化するので、その荷重の一部
を巻きバネ18に持たせるようにすることで、各電磁石
7〜12の容量(出力)を小さくすることができる利点
がある。[Another Embodiment] As shown in FIG. 4, a pair of winding springs (an example of an elastic mechanism) 18 extend over the upper and lower surfaces and the front, rear, left and right surfaces of the mass body 3 and the opposing surface portions of the casing 13. And a structure having resistance to the movement of the mass body 3 may be used. In other words, in the case of a large anti-vibration device, the mass body 3 itself becomes large. Therefore, by giving a part of the load to the winding spring 18, the capacity (output) of each of the electromagnets 7 to 12 is increased. ) Can be reduced.
【0024】アクティブマスダンパ4は、6個の電磁石
7〜12によって非接触状態で支持された質量体3を、
油圧、電動、エア等のシリンダで3次元方向に押し引き
駆動によって移動させる構造や、3次元方向に自由移動
自在にレール支持されたスライド支持手段で支持された
質量体3を、エア吹き出しによる空気圧、すなわち非摺
動型アクチュエータで押し引き移動させる構造でも良
い。又、空気圧と磁力との組合わせで質量体3の支持手
段と移動手段とを受け持つものでも良い。The active mass damper 4 includes a mass body 3 supported by six electromagnets 7 to 12 in a non-contact state.
Hydraulic, electric, pneumatic, or other cylinders that move by a push-pull drive in a three-dimensional direction, or a mass body 3 that is supported by slide support means that is freely movable in a three-dimensional direction and that is supported by rails. That is, a structure of pushing and pulling by a non-sliding type actuator may be used. Further, a combination of the air pressure and the magnetic force may serve as the supporting means and the moving means of the mass body 3.
【0025】[0025]
【発明の効果】以上説明したように、本発明による除振
装置によれば、従来技術によるアクティブマスダンパを
精密除振に適用する際の問題点であって摺動抵抗、すな
わち、質量体の移動並びにそのためのアクチュエータ自
体の作動に伴う摺動抵抗等の影響による作動性悪化が克
服でき、制御信号に応じて滑らかに動作させることが可
能になり、低周波までの広域にわたって良好な除振特性
が得られる。As described above, according to the vibration isolator according to the present invention, the problem when applying the active mass damper according to the prior art to the precise vibration isolation is the sliding resistance, that is, the mass resistance of the mass body. Deterioration of operability due to movement and the effect of sliding resistance due to the operation of the actuator itself can be overcome, enabling smooth operation in response to control signals, and good vibration isolation characteristics over a wide range up to low frequencies. Is obtained.
【0026】第1発明に記載の除振装置では、質量体を
摺動抵抗の無い状態で動かせるようにしたアクティブ型
と、可動部を弾性支持したパッシヴ型との組合わせ工夫
により、低周波の微小振動抑制効果が高められて、あら
ゆる周波数の振動抑制を高次元で行える総合性能に優れ
るものにできた。In the vibration damping device according to the first aspect of the present invention, the low frequency of the low frequency is obtained by combining the active type in which the mass body can be moved without any sliding resistance and the passive type in which the movable portion is elastically supported. The micro-vibration suppression effect was enhanced, and it was possible to achieve excellent overall performance in which vibration at all frequencies could be suppressed at a high level.
【0027】第2発明に記載の除振装置では、アクチュ
エータの動作抵抗の無い状態で質量体を動かせるように
したアクティブ型と、可動部を弾性支持したパッシヴ型
との組合わせ工夫により、低周波の微小振動抑制効果が
高められて、あらゆる周波数の振動抑制を高次元で行え
る総合性能に優れ、且つ小型の支持手段及びアクチュエ
ータで構成しながら、大きな質量を用いて振動抑制効果
が得られ、コンパクト性や経済性の点で有利なものにで
きた。In the vibration damping device according to the second aspect of the present invention, the low frequency is reduced by a combination of an active type in which the mass body can be moved without the operation resistance of the actuator and a passive type in which the movable portion is elastically supported. The micro vibration suppression effect is enhanced, and the overall performance of suppressing vibrations at all frequencies is high-level. It is possible to obtain a vibration suppression effect using a large mass while using small supporting means and actuators. It was made advantageous in terms of sex and economy.
【0028】第3又は第4発明に記載の除振装置では、
質量体を摺動抵抗の無い状態で、かつ、アクチュエータ
の動作抵抗の無い状態として質量体を軽快、迅速に動か
せるようにしたアクティブ型と、可動部を弾性支持した
パッシヴ型との組合わせ工夫により、低周波の微小振動
抑制効果がより一層高められて、あらゆる周波数の振動
抑制をより高次元で行える総合性能に一段と優れるもの
にできた。In the vibration damping device according to the third or fourth invention,
The combination of the active type, which allows the mass body to move lightly and quickly without the sliding resistance of the mass body and the movement resistance of the actuator, and the passive type, which elastically supports the movable part, is devised. In addition, the effect of suppressing low-frequency micro-vibrations is further enhanced, and the overall performance of suppressing vibrations of all frequencies at a higher level can be further improved.
【図1】防振装置の全体斜視図FIG. 1 is an overall perspective view of a vibration isolator.
【図2】アクティブマスダンパの内部構造を示す原理図FIG. 2 is a principle view showing an internal structure of an active mass damper.
【図3】振動抑制用の制御装置を示すブロック図FIG. 3 is a block diagram showing a control device for suppressing vibration.
【図4】アクティブマスダンパの別の内部構造を示す原
理図FIG. 4 is a principle view showing another internal structure of the active mass damper.
1 弾性具 2 可動部 3 質量体 6 振動センサ 7〜12 非接触支持手段、非摺動型アクチュエータ 19 固定部 DESCRIPTION OF SYMBOLS 1 Elastic tool 2 Movable part 3 Mass body 6 Vibration sensor 7-12 Non-contact support means, Non-sliding type actuator 19 Fixed part
───────────────────────────────────────────────────── フロントページの続き (72)発明者 今西 悦二郎 兵庫県神戸市西区高塚台1丁目5番5号 株式会社神戸製鋼所神戸総合技術研究所内 (72)発明者 本家 浩一 兵庫県神戸市西区高塚台1丁目5番5号 株式会社神戸製鋼所神戸総合技術研究所内 Fターム(参考) 3J048 AA02 AB08 AB09 AB11 AD03 BE02 BE09 BF09 DA01 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Eijiro Imanishi 1-5-5 Takatsukadai, Nishi-ku, Kobe City, Hyogo Prefecture Inside Kobe Research Institute, Kobe Steel Ltd. (72) Inventor Koichi Honke Takatsuka, Nishi-ku, Kobe City, Hyogo Prefecture No. 1-5-5 Kobe Steel Works, Ltd. Kobe Research Institute F-term (reference) 3J048 AA02 AB08 AB09 AB11 AD03 BE02 BE09 BF09 DA01
Claims (4)
可動部と、質量体を非接触状態で相対移動可能に前記可
動部に支持する非接触支持手段と、前記質量体を強制移
動させるべく前記可動部に設けられたアクチュエータ
と、前記可動部の前記固定部に対する振動を検出して振
動信号を出力する振動センサと、を備え、前記振動セン
サの出力信号に基づいて前記アクチュエータを作動させ
て、前記可動部の振動が抑制される方向に前記質量体を
前記可動部に対して移動させるように、前記振動センサ
と前記アクチュエータとを連係してある除振装置。A movable portion elastically supported by a fixture via an elastic member; non-contact support means for supporting the mass body on the movable portion so as to be relatively movable in a non-contact state; and forcibly moving the mass body. An actuator provided on the movable portion to detect the vibration of the movable portion with respect to the fixed portion and outputting a vibration signal, and activating the actuator based on the output signal of the vibration sensor A vibration isolator in which the vibration sensor and the actuator are linked so that the mass body is moved relative to the movable part in a direction in which the vibration of the movable part is suppressed.
可動部と、少なくとも質量体と前記可動部とに亘って架
設してなる弾性部材を含み、前記質量体を相対移動可能
に前記可動部に支持する支持手段と、前記質量体を強制
移動させるべく前記可動部に設けられた摺動部の無い非
摺動型アクチュエータと、前記可動部の前記固定部に対
する振動を検出して振動信号を出力する振動センサと、
を備え、前記振動センサの出力信号に基づいて前記非摺
動型アクチュエータを作動させて、前記摺動部の振動が
抑制される方向に前記質量体を前記可動部に対して移動
させるように、前記振動センサと前記非摺動型アクチュ
エータとを連係してある除振装置。A movable portion elastically supported by a fixed portion via an elastic member, and an elastic member spanning at least the mass body and the movable portion, wherein the mass body is relatively movable. A supporting means for supporting the movable portion, a non-sliding type actuator having no sliding portion provided on the movable portion for forcibly moving the mass body, and detecting vibration of the movable portion with respect to the fixed portion to detect vibration A vibration sensor that outputs a signal,
Comprising, by operating the non-sliding actuator based on the output signal of the vibration sensor, to move the mass relative to the movable unit in a direction in which the vibration of the sliding unit is suppressed, An anti-vibration device in which the vibration sensor and the non-sliding type actuator are linked.
に、前記非接触支持手段及び前記アクチュエータが共に
電磁石で構成されている請求項1に記載の除振装置。3. The anti-vibration apparatus according to claim 1, wherein the mass body is made of a magnetic material, and the non-contact support means and the actuator are both made of electromagnets.
に、前記弾性部材を除く前記支持手段及び非摺動型アク
チュエータが共に電磁石で構成されている請求項2に記
載の除振装置。4. The anti-vibration apparatus according to claim 2, wherein the mass body is formed of a magnetic material, and the supporting means and the non-sliding type actuator except for the elastic member are both formed of electromagnets.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11036831A JP2000234646A (en) | 1999-02-16 | 1999-02-16 | Vibration control device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11036831A JP2000234646A (en) | 1999-02-16 | 1999-02-16 | Vibration control device |
Publications (1)
Publication Number | Publication Date |
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JP2000234646A true JP2000234646A (en) | 2000-08-29 |
Family
ID=12480702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP11036831A Pending JP2000234646A (en) | 1999-02-16 | 1999-02-16 | Vibration control device |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1318775C (en) * | 2005-01-18 | 2007-05-30 | 哈尔滨工业大学 | Air spring vibration isolation foundation with electromechanical damper |
JP2007205834A (en) * | 2006-02-01 | 2007-08-16 | Denso Corp | Angular velocity sensor |
JP2008174391A (en) * | 2008-04-04 | 2008-07-31 | Toshiba Elevator Co Ltd | Vibration damping device |
JP2009256056A (en) * | 2008-04-17 | 2009-11-05 | Toshiba Elevator Co Ltd | Elevator vibration control device |
KR20170102926A (en) * | 2015-01-07 | 2017-09-12 | 배 시스템즈 피엘시 | Further improvements in electromechanical actuators |
CN112201461A (en) * | 2020-10-30 | 2021-01-08 | 浙江大学 | Self-adaptive pressing device and method for oil-immersed reactor |
CN113864388A (en) * | 2021-09-17 | 2021-12-31 | 中国空间技术研究院 | Three-way variable rigidity vibration isolation device |
CN114087308A (en) * | 2021-11-22 | 2022-02-25 | 天津理工大学 | Electromagnetic type non-smooth vibration absorber |
-
1999
- 1999-02-16 JP JP11036831A patent/JP2000234646A/en active Pending
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1318775C (en) * | 2005-01-18 | 2007-05-30 | 哈尔滨工业大学 | Air spring vibration isolation foundation with electromechanical damper |
JP2007205834A (en) * | 2006-02-01 | 2007-08-16 | Denso Corp | Angular velocity sensor |
JP4682856B2 (en) * | 2006-02-01 | 2011-05-11 | 株式会社デンソー | Angular velocity sensor device |
JP2008174391A (en) * | 2008-04-04 | 2008-07-31 | Toshiba Elevator Co Ltd | Vibration damping device |
JP2009256056A (en) * | 2008-04-17 | 2009-11-05 | Toshiba Elevator Co Ltd | Elevator vibration control device |
JP2018503786A (en) * | 2015-01-07 | 2018-02-08 | ビ−エイイ− システムズ パブリック リミテッド カンパニ−BAE SYSTEMS plc | Improvements in and related to electromechanical actuators |
KR20170102926A (en) * | 2015-01-07 | 2017-09-12 | 배 시스템즈 피엘시 | Further improvements in electromechanical actuators |
AU2016205924B2 (en) * | 2015-01-07 | 2019-09-19 | Bae Systems Plc | Improvements in and relating to electromechanical actuators |
US10458502B2 (en) | 2015-01-07 | 2019-10-29 | Bae Systems Plc | Relating to electromechanical actuators |
KR102498082B1 (en) * | 2015-01-07 | 2023-02-08 | 배 시스템즈 피엘시 | Electromechanical actuators and improvements therewith |
CN112201461A (en) * | 2020-10-30 | 2021-01-08 | 浙江大学 | Self-adaptive pressing device and method for oil-immersed reactor |
CN113864388A (en) * | 2021-09-17 | 2021-12-31 | 中国空间技术研究院 | Three-way variable rigidity vibration isolation device |
CN114087308A (en) * | 2021-11-22 | 2022-02-25 | 天津理工大学 | Electromagnetic type non-smooth vibration absorber |
CN114087308B (en) * | 2021-11-22 | 2024-02-09 | 天津理工大学 | Electromagnetic non-smooth vibration absorber |
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