JP2000234646A - Vibration control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vibration control device synthetically improving vibration suppressing performance though providing basically an active type to be capable of sufficiently suppressing even fine vibration and low frequency vibration further with a point of advantage provided of a passive type. SOLUTION: This device, provided with a basement 2 elastically supported to a fixed part 19 through an air spring 1, total six of upper/lower front/rear right/left electromagnets 7 to 12 supporting a mass body 3 in a levitation condition relatively movably to the basement also forcedly moving the mass body 3, and a vibration sensor 6 detecting vibration of the basement 2 relating to the fixed part 19 to output a vibration signal, operates the electromagnets 7 to 12 based on an output signal of the vibration sensor 6, and a controller 5 linking the vibration sensor 6 and the electromagnets 7 to 12, so as to move the mass body 3 relating to the basement 2 in a direction suppressing its vibration, is provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called active vibration damping device for positively suppressing vibration, and more particularly to a vibration suppression device capable of improving the level of suppression of micro-vibration at low frequencies and having a better vibration-damping performance. Related to the technology to obtain.

[0002]

2. Description of the Related Art As a general vibration isolator, a vibration isolating support structure in which a movable portion is supported on a fixed portion such as a base via an elastic mechanism such as air, a coil spring, or a rubber support is used. There is a so-called passive type anti-vibration device for isolating the movable part by blocking the vibration. This device has a relatively simple structure and can provide an anti-vibration effect, but disturbances near the low-frequency natural frequency determined by the mass of the fixed part and the rigidity of the elastic mechanism are amplified rather. Tend.

For example, in the case of using an air spring as an elastic mechanism, an orifice, a valve or the like is provided to attenuate low-frequency vibration, but a sufficient effect has not been obtained. In addition, a sandwich-type fixed portion in which an oil damper or the like having a damping property is interposed between the fixed portion (the pedestal) and the base has been tried. Disturbance vibration is easily transmitted, and there is a problem that the vibration blocking characteristics are deteriorated.

[0004]

Therefore, in order to suppress low-frequency vibration without impairing the cutoff characteristics, an actuator and a mass body are arranged on a base, and the actuator is mounted on the basis of the detection result of the base vibration. A so-called active vibration isolator, which is operated to move the mass body in a direction to suppress the vibration of the base, so as to perform vibration isolation (vibration suppression), is also known (for example, JP-A-6-307494).

The active vibration isolator is a means that has been widely used in recent years. However, since the operation amplitude is very small and the influence of the operation accuracy of an actuator or a mass body is likely to occur, a precise vibration isolation device is used. There is room for improvement if the device is used to suppress low-frequency vibrations. In other words, with air or hydraulic cylinders or linear motors used as general actuators, to operate at a low frequency and with a small amplitude, the sliding resistance of the seal or linear guide, or the sliding of the mass Due to the non-linear characteristics generated by the resistance and the like, it is difficult to make a smooth movement corresponding to the control signal appear, and in some cases, there is a possibility that extra vibration may be generated as a disturbance.

In view of the above-mentioned circumstances, the present invention is basically of the active type, can sufficiently suppress minute vibrations and low-frequency vibrations, and has the advantages of the passive type, so that the overall vibration suppression performance is improved. It is an object of the present invention to obtain a vibration isolator that has been manufactured.

[0007]

According to a first aspect of the present invention, in a vibration damping device, a movable portion elastically supported by a fixed portion via an elastic member and a mass member are supported by the movable portion so as to be relatively movable in a non-contact state. Non-contact support means, an actuator provided on the movable part for forcibly moving the mass body, and a vibration sensor for detecting vibration of the movable part with respect to the fixed part and outputting a vibration signal, the output of the vibration sensor The vibration sensor and the actuator are linked so that the actuator is operated based on the signal and the mass body is moved relative to the movable part in a direction in which the vibration of the movable part is suppressed.

According to a second aspect of the present invention, the vibration isolator includes a movable portion elastically supported by a fixed portion via an elastic member, and an elastic member extending over at least the mass body and the movable portion. Support means for supporting the body on the movable part so as to be relatively movable, non-sliding type actuator without a sliding part provided on the movable part for forcibly moving the mass body, and detection of vibration of the movable part with respect to the fixed part A vibration sensor that outputs a vibration signal by operating the non-sliding type actuator based on the output signal of the vibration sensor to move the mass body to the movable part in a direction in which the vibration of the movable part is suppressed. The vibration sensor and the non-sliding type actuator are linked so as to move.

A third invention is characterized in that, in the first invention, the mass body is made of a magnetic material, and the non-contact support means and the actuator are both made of electromagnets.

According to a fourth aspect of the present invention, in the second aspect, the mass body is made of a magnetic material, and the supporting means and the non-sliding type actuator except for the elastic member are both made of an electromagnet. I do.

According to the structure of the first invention, since the mass body is supported by the movable portion so as to be relatively movable in a non-contact state, the vibration suppressing direction can be achieved in a state where there is no sliding resistance between the mass body and the movable portion. The mass body can be moved with a sufficient amount of movement. Therefore, the sliding resistance is smaller than that of the conventional means supported by the slide structure or the roller support structure so as to be relatively movable, and the operating characteristics of the mass body at low frequency and small amplitude are close to linear, and It is possible to obtain quick response. Further, since the movable portion is elastically supported by the fixed portion, it is possible to exert the effect of the passive vibration damping device, that is, it is possible to suppress disturbance vibration over almost the entire region other than the natural frequency at low cost.

According to the configuration of the second invention, the actuator provided on the movable portion for forcibly moving the mass body is provided with:
Since the structure is a non-sliding type having no sliding portion, the mass body can be moved with a sufficient movement amount in the vibration suppression direction without the operation resistance of the actuator. Therefore, the sliding resistance is smaller than that of the conventional means for moving the mass body by a hydraulic pressure, an air cylinder, or a linear motor, and the operating characteristics of the mass body at a low frequency and minute amplitude are close to those of a linear type.
In addition, quick response can be obtained. Further, since the movable portion is elastically supported by the fixed portion, it is possible to exert the effect of the passive vibration damping device, that is, it is possible to suppress disturbance vibration over almost the entire region other than the natural frequency at low cost. Furthermore, since an elastic mechanism such as a winding spring is provided between the mass body and the movable body, even when the mass body itself becomes large and heavy when applied to a large-sized device, the Excluding the elastic members, that is, non-contact support means such as electromagnets and air blowing, support means such as sliding structures, and non-sliding actuators such as electromagnets and air blowing, load acting on large-sized mass bodies described above. Can be reduced, and they can be made small and lightweight.

According to the third or fourth aspect of the present invention, the mass can be floated and supported by the attraction or repulsion of the magnetic force, and the mass can be sufficiently moved by adjusting the magnetic force of the electromagnet such as changing the current value. Because it can be moved by the amount
A state in which neither the sliding resistance between the mass body and the movable part nor the operating resistance of the actuator can be realized. Therefore, the operating characteristics of the mass body at low frequency and minute amplitude can be made linear or almost linear, a quicker response can be obtained, and the function of the passive vibration isolator described above can be exhibited.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, an air spring 1 as an elastic member is attached to each of the four cradles 19 as fixing portions.
Elastically supports the base 2 which is a movable part through
An active mass damper 4, a controller 5, and a vibration sensor 6 are mounted on the base 2 to constitute a vibration isolation device.

As shown in FIG. 2, the active mass damper 4 includes a casing 1 placed on a base 2 via a receiving plate 4a.
3, a cubic mass body 3 made of a magnetic material such as steel.
Are arranged at a total of six positions, that is, up, down, front, rear, left and right (an example of a non-contact support means and a non-sliding actuator)
Reference numerals 7 to 12 support the casing 13, that is, the base 2, in a non-contact manner so as to be relatively movable up and down, front and rear, and left and right.

The upper and lower electromagnets 7 and 8 are rod-shaped with a coil wound around a cylindrical iron core.
Numerals 10, 11, and 12 are configured in a horseshoe shape in which a coil is wound around a U-shaped iron core. The magnetic poles of the electromagnets 7 to 12 that appear at the end of the mass body 3 on the opposite side of the mass body 3 are excited in advance. And the same magnetic pole
In a non-contact state in which the mass body 3 is suspended in the air by the magnetic repulsive force of the individual electromagnets 7 to 12, the casing 13 is supported at a position substantially at the center of the casing 13 in the three-dimensional directions of up, down, front, rear, left and right.

The method of supporting the mass body 4 using the electromagnetic force includes, in addition to the method using the repulsive force described in this embodiment, a method using a suction force, and both a repulsive force and a suction force. The method is also applicable.

The mass body 3 may be a magnetic body having a predetermined magnetization in a magnetic field, and may be other than steel.
Further, as the shape of the mass body 3, it is convenient to have a flat surface in view of the easiness of position measurement by a displacement sensor described later, and from this point, a cubic or cylindrical shape is preferable. But you can.

In order to always detect the position of the mass 3 with respect to the casing 13 in the three-dimensional direction,
In any of the pair of electromagnets 7 to 12 on the front, rear, left and right,
A displacement sensor 14 for detecting a distance from the surface of the opposing mass body 3 is provided. The displacement sensor 14 may be of any type as long as it can detect the relative position with respect to the mass body 3. However, since the movement of the mass body 3 is very small, an optical displacement meter is preferable in consideration of the measurement accuracy.

For example, to move the mass body 3 forward,
By increasing the supply current to the rear electromagnet 10 or decreasing the supply current to the front electromagnet 9 in addition to this,
This is performed by shifting the balance position of the repulsive force forward. Since the mass body can be moved in the vertical and horizontal directions in the same manner, the mass body can be moved in a non-contact state in which the mass body is suspended in the air in a three-dimensional direction such as obliquely upward and forward.

As shown in FIG. 3, the controller 5 includes:
A phase adjustment circuit 15, a position holding circuit 16, and an amplifier 17 are provided, three displacement sensors 14, and six electromagnets 7-1.
2, and the vibration sensor are connected by a lead wire or the like. The vibration sensor 6 can detect the three-dimensional movement and direction of the base 2, and the “motion” of the base 2 includes a moving speed, a moving acceleration, and the like.

The principle of operation of the vibration isolator will be described. The signals detected by the vibration sensor 6 and the displacement sensors 14 on the base 2 are processed by the controller 10 and the mass 3 is moved in the direction of canceling the vibration of the base 2. It outputs the coil current necessary to move. When the balance position of the repulsive force shifts with the change in the coil current, the mass body 3 moves without sliding resistance, and the vibration of the base 2 is quickly suppressed or eliminated without a response delay.

[Another Embodiment] As shown in FIG. 4, a pair of winding springs (an example of an elastic mechanism) 18 extend over the upper and lower surfaces and the front, rear, left and right surfaces of the mass body 3 and the opposing surface portions of the casing 13. And a structure having resistance to the movement of the mass body 3 may be used. In other words, in the case of a large anti-vibration device, the mass body 3 itself becomes large. Therefore, by giving a part of the load to the winding spring 18, the capacity (output) of each of the electromagnets 7 to 12 is increased. ) Can be reduced.

The active mass damper 4 includes a mass body 3 supported by six electromagnets 7 to 12 in a non-contact state.
Hydraulic, electric, pneumatic, or other cylinders that move by a push-pull drive in a three-dimensional direction, or a mass body 3 that is supported by slide support means that is freely movable in a three-dimensional direction and that is supported by rails. That is, a structure of pushing and pulling by a non-sliding type actuator may be used. Further, a combination of the air pressure and the magnetic force may serve as the supporting means and the moving means of the mass body 3.

[0025]

As described above, according to the vibration isolator according to the present invention, the problem when applying the active mass damper according to the prior art to the precise vibration isolation is the sliding resistance, that is, the mass resistance of the mass body. Deterioration of operability due to movement and the effect of sliding resistance due to the operation of the actuator itself can be overcome, enabling smooth operation in response to control signals, and good vibration isolation characteristics over a wide range up to low frequencies. Is obtained.

In the vibration damping device according to the first aspect of the present invention, the low frequency of the low frequency is obtained by combining the active type in which the mass body can be moved without any sliding resistance and the passive type in which the movable portion is elastically supported. The micro-vibration suppression effect was enhanced, and it was possible to achieve excellent overall performance in which vibration at all frequencies could be suppressed at a high level.

In the vibration damping device according to the second aspect of the present invention, the low frequency is reduced by a combination of an active type in which the mass body can be moved without the operation resistance of the actuator and a passive type in which the movable portion is elastically supported. The micro vibration suppression effect is enhanced, and the overall performance of suppressing vibrations at all frequencies is high-level. It is possible to obtain a vibration suppression effect using a large mass while using small supporting means and actuators. It was made advantageous in terms of sex and economy.

In the vibration damping device according to the third or fourth invention,
The combination of the active type, which allows the mass body to move lightly and quickly without the sliding resistance of the mass body and the movement resistance of the actuator, and the passive type, which elastically supports the movable part, is devised. In addition, the effect of suppressing low-frequency micro-vibrations is further enhanced, and the overall performance of suppressing vibrations of all frequencies at a higher level can be further improved.

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a vibration isolator.

FIG. 2 is a principle view showing an internal structure of an active mass damper.

FIG. 3 is a block diagram showing a control device for suppressing vibration.

FIG. 4 is a principle view showing another internal structure of the active mass damper.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Elastic tool 2 Movable part 3 Mass body 6 Vibration sensor 7-12 Non-contact support means, Non-sliding type actuator 19 Fixed part

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Eijiro Imanishi 1-5-5 Takatsukadai, Nishi-ku, Kobe City, Hyogo Prefecture Inside Kobe Research Institute, Kobe Steel Ltd. (72) Inventor Koichi Honke Takatsuka, Nishi-ku, Kobe City, Hyogo Prefecture No. 1-5-5 Kobe Steel Works, Ltd. Kobe Research Institute F-term (reference) 3J048 AA02 AB08 AB09 AB11 AD03 BE02 BE09 BF09 DA01

Claims (4)

[Claims] A movable portion elastically supported by a fixture via an elastic member; non-contact support means for supporting the mass body on the movable portion so as to be relatively movable in a non-contact state; and forcibly moving the mass body. An actuator provided on the movable portion to detect the vibration of the movable portion with respect to the fixed portion and outputting a vibration signal, and activating the actuator based on the output signal of the vibration sensor A vibration isolator in which the vibration sensor and the actuator are linked so that the mass body is moved relative to the movable part in a direction in which the vibration of the movable part is suppressed. A movable portion elastically supported by a fixed portion via an elastic member, and an elastic member spanning at least the mass body and the movable portion, wherein the mass body is relatively movable. A supporting means for supporting the movable portion, a non-sliding type actuator having no sliding portion provided on the movable portion for forcibly moving the mass body, and detecting vibration of the movable portion with respect to the fixed portion to detect vibration A vibration sensor that outputs a signal,
Comprising, by operating the non-sliding actuator based on the output signal of the vibration sensor, to move the mass relative to the movable unit in a direction in which the vibration of the sliding unit is suppressed, An anti-vibration device in which the vibration sensor and the non-sliding type actuator are linked. 3. The anti-vibration apparatus according to claim 1, wherein the mass body is made of a magnetic material, and the non-contact support means and the actuator are both made of electromagnets. 4. The anti-vibration apparatus according to claim 2, wherein the mass body is formed of a magnetic material, and the supporting means and the non-sliding type actuator except for the elastic member are both formed of electromagnets.