JP2000231073A - Optical scanning optical system having plate tilt correcting function and optical scanner using the system - Google Patents

Optical scanning optical system having plate tilt correcting function and optical scanner using the system

Info

Publication number
JP2000231073A
JP2000231073A JP3382199A JP3382199A JP2000231073A JP 2000231073 A JP2000231073 A JP 2000231073A JP 3382199 A JP3382199 A JP 3382199A JP 3382199 A JP3382199 A JP 3382199A JP 2000231073 A JP2000231073 A JP 2000231073A
Authority
JP
Japan
Prior art keywords
lens
optical system
cross
scanning direction
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3382199A
Other languages
Japanese (ja)
Inventor
Hiromitsu Yamakawa
博充 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fuji Photo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Optical Co Ltd filed Critical Fuji Photo Optical Co Ltd
Priority to JP3382199A priority Critical patent/JP2000231073A/en
Priority to US09/547,990 priority patent/US6178030B1/en
Publication of JP2000231073A publication Critical patent/JP2000231073A/en
Withdrawn legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To cope with a system whose scanning length is long by providing an image-formation optical system consisting of three lenses including a lens having positive power only on its cross section in a subscanning direction on a side nearest to a surface to be scanned between a light deflecting reflection surface and the surface to be scanned and setting the absolute value of image- formation magnification of the cross section in the subscanning direction between them to 1 to 2. SOLUTION: This optical scanning optical system consists of a laser beam source 11, a collimating lens 12, a 1st image-formation optical system 1, a polygon mirror 14, a 2nd image-formation optical system 2 and the surface to be scanned 19. The optical system 2 consists of a 1st lens 16 being a toric lens having positive power on both surfaces, a 2nd lens 17 whose both surfaces are aspherical, and a 3rd lens 18 having the positive power only on its cross section in the subscanning direction in that order from the side of the light deflecting reflection surface.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、感材面上に集光さ
せたレーザビームを走査し画像を形成する面倒れ補正機
能を有する光走査光学系およびこれを用いた光走査装置
に関し、特に、A3判短辺を超える走査長の長い系に対
応する面倒れ補正機能を有する光走査光学系およびこれ
を用いた光走査装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanning optical system having a surface tilt correcting function for forming an image by scanning a laser beam focused on a light-sensitive material surface, and an optical scanning apparatus using the same. The present invention relates to an optical scanning optical system having a surface tilt correction function corresponding to a system having a long scanning length exceeding the short side of the A3 size, and an optical scanning device using the same.

【0002】[0002]

【従来の技術】従来より、感材面上に集光させたレーザ
ビームを走査し、画像を形成するレーザ走査光学系およ
び該光学系を用いたレーザプリンタ装置や、レーザ製版
装置は各種のものが知られている。
2. Description of the Related Art Conventionally, a laser scanning optical system for forming an image by scanning a laser beam focused on a photosensitive material surface, a laser printer device using the optical system, and a laser plate making device are various types. It has been known.

【0003】そのうち、いわゆる面倒れ補正機能を有す
る光走査光学系としては、例えば、本出願人が既に開示
した特開平4−141619号公報記載のものや特開平5−21
5986号公報記載のものが知られている。ここで、面倒れ
補正機能を有する光走査光学系とは、光源からの光束を
光偏向手段の光偏向反射面上またはその近傍に線状に結
像させる第1の結像光学系と、前記光偏向手段により偏
向された光束を被走査面上に結像させる第2の結像光学
系とを備え、副走査方向断面に関して前記光偏向反射面
と前記被走査面とが光学的に略共役となるように構成さ
れたものである。
[0003] Among them, as an optical scanning optical system having a so-called surface tilt correction function, for example, those described in Japanese Patent Application Laid-Open No. Hei 4-141819 and Japanese Patent Application Laid-Open No.
What is described in 5986 is known. Here, an optical scanning optical system having a surface tilt correction function is a first imaging optical system that linearly forms an image of a light beam from a light source on or near a light deflection reflection surface of a light deflection unit, and A second imaging optical system for forming an image of the light beam deflected by the light deflecting means on the surface to be scanned, wherein the light deflection reflecting surface and the surface to be scanned are optically substantially conjugated with respect to a cross section in the sub-scanning direction. It is configured so that

【0004】上記公報記載の面倒れ補正機能を有する光
走査光学系は、第2の結像光学系が2枚構成のレンズか
らなり、像面湾曲量が小さく装置のコンパクト化が実現
されたものである。
In the optical scanning optical system having the surface tilt correcting function described in the above-mentioned publication, the second imaging optical system is composed of two lenses, and the field curvature is small and the apparatus is compact. It is.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、これら
の面倒れ補正機能を有する光走査光学系およびこれを用
いた光走査装置は、走査長がA4判短辺(210mm)程
度の比較的短い系にしか対応できないという問題があ
る。
However, the optical scanning optical system having the surface tilt correcting function and the optical scanning device using the optical scanning system have a relatively short scanning length of about A4 short side (210 mm). There is a problem that can only deal with.

【0006】また、走査長がこの程度の長さで十分な場
合であっても、高解像度を要求される系には採用するこ
とができない。
[0006] Even if the scanning length is sufficiently long, it cannot be adopted in a system requiring high resolution.

【0007】すなわち、上述した面倒れ補正機能を有す
る光走査光学系およびこれを用いた光走査装置において
は、副走査方向断面における光偏向反射面と被走査面と
の間の結像倍率の絶対値が5倍前後と大きくなってい
る。そのため、走査長の長い系や解像度の高い系に用い
るには、副走査方向成分(SAGITTAL)の像面湾
曲が大きくなりすぎることにより被走査面上で均質な光
スポットを形成することが困難となる。また、光偏向反
射面に対して光が斜めに入射するために生じる像面湾曲
の非対称性も被走査面においてさらに拡大されてしまう
ため、光スポットの均質性が低下する。
That is, in the above-described optical scanning optical system having the surface tilt correction function and the optical scanning device using the same, the absolute value of the imaging magnification between the light deflection reflecting surface and the surface to be scanned in the cross section in the sub-scanning direction. The value is about 5 times larger. Therefore, when used in a system having a long scanning length or a system having a high resolution, it is difficult to form a uniform light spot on the surface to be scanned due to excessively large field curvature of the sub-scanning direction component (SAGITTAL). Become. Further, the asymmetry of the curvature of field caused by the oblique incidence of light on the light deflecting / reflecting surface is further enlarged on the surface to be scanned, so that the homogeneity of the light spot is reduced.

【0008】また、光偏向反射面付近のずれが拡大され
るため、光偏向手段の位置精度を高度に維持しなくては
ならない。
Further, since the displacement near the light deflecting / reflecting surface is enlarged, the position accuracy of the light deflecting means must be maintained at a high level.

【0009】光偏向反射面と被走査面との間において第
2の結像光学系を光偏向反射面から遠ざけて配置するこ
とができれば、この倍率を小さくすることは可能であ
る。しかしこの場合、A4判短辺より大きな走査長に対
応させようとすると第2の結像光学系の各レンズが大型
化してしまうので、必要な精度のレンズの製作が非常に
困難になりコストも上昇する。
If the second imaging optical system can be arranged at a distance from the light deflecting and reflecting surface and the surface to be scanned, the magnification can be reduced. However, in this case, if an attempt is made to correspond to a scanning length larger than the short side of the A4 size, each lens of the second imaging optical system becomes large. To rise.

【0010】本発明はこのような事情に鑑みなされたも
ので、レンズ製作の容易性とコスト性を勘案しつつ、副
走査方向の像面湾曲を小さくし、また、光偏向反射面に
おける像面湾曲の非対称性による影響を小さくして、A
3判短辺(297mm)を超える系にも対応できるような
面倒れ補正機能を有する光走査光学系およびこれを用い
た光走査装置を提供することを目的とするものである。
The present invention has been made in view of the above circumstances, and reduces the curvature of field in the sub-scanning direction while considering the ease and cost of manufacturing a lens. By reducing the influence of the asymmetry of the curvature, A
An object of the present invention is to provide an optical scanning optical system having a surface tilt correction function capable of coping with a system exceeding a short side of three dimensions (297 mm) and an optical scanning device using the same.

【0011】[0011]

【課題を解決するための手段】本発明による面倒れ補正
機能を有する光走査光学系は、光源からの光束を光偏向
手段の光偏向反射面上またはその近傍に線状に結像させ
る第1の結像光学系と、前記光偏向手段により偏向され
た光束を被走査面上に結像させる第2の結像光学系とを
備え、副走査方向断面に関して前記光偏向反射面と前記
被走査面とが光学的に略共役となるように構成された、
面倒れ補正機能を有する光走査光学系において、前記第
2の結像光学系は前記光偏向手段側から順に、両面とも
に、主走査方向断面形状および副走査方向断面形状が互
いに異なり、かつ主走査方向断面および副走査方向断面
においてともに正のパワーを有する第1のレンズと、両
面ともに主走査方向断面形状が非円弧である第2のレン
ズと、主走査方向断面においてほとんどパワーを有さ
ず、副走査方向断面において正のパワーを有する第3の
レンズとから構成されることを特徴とするものである。
According to the present invention, there is provided an optical scanning optical system having a surface tilt correcting function, wherein a light beam from a light source is linearly imaged on or near a light deflecting reflection surface of a light deflecting means. And a second imaging optical system for forming an image of the light beam deflected by the light deflecting means on the surface to be scanned. The surface and the optically configured to be approximately conjugate,
In an optical scanning optical system having a surface tilt correction function, the second imaging optical system has a cross-sectional shape in the main scanning direction and a cross-sectional shape in the sub-scanning direction that are different from each other on both surfaces in order from the side of the light deflecting means. A first lens having a positive power in both the directional section and the sub-scanning direction section, a second lens having a non-circular sectional shape in the main scanning direction on both sides, and having substantially no power in the main scanning direction section, And a third lens having a positive power in the cross section in the sub-scanning direction.

【0012】なお、前記第1のレンズは前記光偏向手段
側の面の主走査方向断面形状が非円弧であり、前記第2
のレンズは両面が回転対称な非球面であり、前記第3の
レンズは両面ともに主走査方向断面形状が光軸に対して
直交する直線となるようなシリンドリカルレンズである
ことが好ましい。
The first lens has a non-circular cross-sectional shape in the main scanning direction on the surface on the side of the light deflecting means, and the second lens has a second circular shape.
It is preferable that both surfaces of the third lens are rotationally symmetric aspherical surfaces, and that the third lens is a cylindrical lens in which the cross-sectional shape in the main scanning direction is a straight line orthogonal to the optical axis on both surfaces.

【0013】また、前記第1から第3の各レンズの材質
が樹脂であることが好ましい。
Preferably, the material of each of the first to third lenses is a resin.

【0014】また、下記の条件式を満足することが好ま
しい。
It is preferable that the following conditional expression is satisfied.

【0015】1.0 < f3V/f < 1.6 ただし、 f:第2の結像光学系の副走査方向断面における焦
点距離 f3V:第3のレンズの副走査方向断面における焦点距
[0015] 1.0 <f 3V / f V < 1.6 However, f V: focal length in the sub scanning cross section of the second imaging optical system f 3V: focal length in the sub scanning cross section of the third lens

【0016】本発明による光走査装置は、本発明による
面倒れ補正機能を有する光走査光学系を使用したことを
特徴とするものである。
An optical scanning device according to the present invention is characterized by using an optical scanning optical system having a surface tilt correcting function according to the present invention.

【0017】ここで、上記「主走査方向」とは偏向され
た光ビームの被走査面上での軌跡に平行な方向を意味
し、上記「副走査方向」とは被走査面上で主走査方向と
略直交する方向を意味する。また、上記「主走査方向断
面」とは光軸を含む主走査方向の断面を意味し、上記
「副走査方向断面」とは主走査方向断面に垂直で光軸を
含む断面を意味する。
Here, the "main scanning direction" means a direction parallel to the trajectory of the deflected light beam on the surface to be scanned, and the "sub-scanning direction" means the main scanning direction on the surface to be scanned. Means a direction substantially perpendicular to the direction. The “section in the main scanning direction” means a section in the main scanning direction including the optical axis, and the “section in the sub-scanning direction” means a section perpendicular to the section in the main scanning direction and including the optical axis.

【0018】また、上記「非円弧」とは所定の断面にお
いて円弧でない線の形状を意味し、上記「非球面」とは
上記非円弧を光軸を回転軸として回転させた回転対称な
面の形状を意味する。
The above-mentioned "non-circular arc" means a line shape which is not a circular arc in a predetermined cross section, and the above-mentioned "aspherical surface" means a rotationally symmetric surface obtained by rotating the non-circular arc about the optical axis as a rotation axis. Mean shape.

【0019】[0019]

【発明の実施の形態】以下図面を参照して本発明の実施
形態について説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0020】図1は本発明の実施形態に係る光走査光学
系の構成を示す概略図である。
FIG. 1 is a schematic diagram showing the configuration of an optical scanning optical system according to an embodiment of the present invention.

【0021】図1に示すように、この光走査光学系は、
レーザ光源11から発せられた光ビームを略平行光とす
るコリメーティングレンズ12と、この略平行光を主走
査方向に線状に結像させる第1の結像光学系1と、第1
の結像光学系1による結像位置近傍に光偏向反射面15
を有し、光ビームを反射偏向して被走査面19上に走査
する光偏向手段であるポリゴンミラー14と、ポリゴン
ミラー14により反射偏向された光ビームを被走査面1
9上に結像させ、この光ビームを略等速に被走査面19
上に走査させるように作用する第2の結像光学系2とか
らなる。
As shown in FIG. 1, this optical scanning optical system comprises:
A collimating lens 12 that converts a light beam emitted from a laser light source 11 into substantially parallel light, a first imaging optical system 1 that linearly forms the substantially parallel light into an image in the main scanning direction,
The light deflecting / reflecting surface 15 is located near the image forming position of the image forming optical system 1.
A polygon mirror 14 which is a light deflecting means for reflecting and deflecting the light beam to scan on the surface to be scanned 19, and for reflecting the light beam reflected and deflected by the polygon mirror 14 on the surface to be scanned 1
The light beam is focused on the surface to be scanned 19 at a substantially constant speed.
And a second imaging optical system 2 acting to scan upward.

【0022】ここで、第1の結像光学系1は、光ビーム
を線状に結像させる副走査方向に正の屈折力を有するシ
リンドリカルレンズ13からなる。
Here, the first image forming optical system 1 includes a cylindrical lens 13 having a positive refractive power in the sub-scanning direction for forming a light beam into a linear image.

【0023】つぎに、図2を用いて第2の結像光学系に
ついて説明する。図2は本発明の実施形態に係る光走査
光学系の第2の結像光学系の構成を示すものであり、
(A)は光軸を含む主走査方向の断面(以下、主走査方
向断面と称する)における概略図、(B)は主走査方向
断面に垂直で光軸を含む断面(以下、副走査方向断面と
称する)における概略図である。
Next, the second imaging optical system will be described with reference to FIG. FIG. 2 shows a configuration of a second imaging optical system of the optical scanning optical system according to the embodiment of the present invention,
(A) is a schematic view in a section in the main scanning direction including the optical axis (hereinafter, referred to as a section in the main scanning direction), and (B) is a section perpendicular to the section in the main scanning direction and including the optical axis (hereinafter, a section in the sub-scanning direction). FIG.

【0024】図2に示すとおり、第2の結像光学系2は
光偏向反射面側から順に、光偏向手段側の面の主走査方
向断面形状が非円弧であり、両面ともに主走査方向断面
形状および副走査方向断面形状が互いに異なるトーリッ
ク様のレンズであり、かつ両面ともに主走査方向断面お
よび副走査方向断面においてともに正のパワーを有する
第1レンズ16と、両面が回転対称な非球面からなる第
2レンズ17と、両面ともに主走査方向断面形状が光軸
に対して直交する直線となるようなシリンドリカルレン
ズで、主走査方向断面においてほとんどパワーを有さ
ず、副走査方向断面において正のパワーを有する第3レ
ンズ18とから構成されている。
As shown in FIG. 2, the second imaging optical system 2 has a non-circular cross section in the main scanning direction on the surface on the light deflecting means side in the order from the light deflecting / reflecting surface side. The first lens 16 is a toric-like lens having different shapes and cross-sectional shapes in the sub-scanning direction from each other, and both surfaces have positive power in both the main-scanning direction cross-section and the sub-scanning direction cross-section. A second lens 17 and a cylindrical lens whose main surface in the main scanning direction has a straight line perpendicular to the optical axis on both surfaces. The second lens 17 has almost no power in the main scanning direction and has a positive power in the sub-scanning direction. And a third lens 18 having power.

【0025】ここで、第1から第3レンズ16〜18の
材質は樹脂であり、第2の結像光学系2において下記の
条件式を満足する。
Here, the first to third lenses 16 to 18 are made of resin, and the second imaging optical system 2 satisfies the following conditional expression.

【0026】1.0 < f3V/f < 1.6 ただし、 f:第2の結像光学系2の副走査方向断面における
焦点距離 f3V:第3レンズ18の副走査方向断面における焦点
距離
[0026] 1.0 <f 3V / f V < 1.6 However, f V: second focal length in the sub scanning cross section of the imaging optical system 2 f 3V: focal length in the sub scanning cross section of the third lens 18

【0027】なお、図1において、レーザ光源11から
発せられた光ビームは、ポリゴンミラー14が矢印A方
向に回転し、第2の結像光学系2を透過することによ
り、被走査面19上に結像されるとともに被走査面19
上において略等速に主走査される。さらに、被走査面1
9を副走査方向(矢印B方向)に移動し、光を変調する
ことにより画像を形成する。光偏向反射面15と被走査
面19は、副走査方向断面において、第2の結像光学系
2に対して共役な関係にあり、これにより光偏向反射面
15の面倒れに関して光学的に補正機能を得ることがで
きる。
In FIG. 1, the light beam emitted from the laser light source 11 is transmitted to the second imaging optical system 2 by the polygon mirror 14 rotating in the direction of arrow A, so that the light beam And the scanned surface 19
The main scanning is performed at a substantially constant speed. Further, the scanned surface 1
9 is moved in the sub-scanning direction (the direction of arrow B), and an image is formed by modulating light. The light deflecting / reflecting surface 15 and the surface to be scanned 19 have a conjugate relationship with the second imaging optical system 2 in the cross section in the sub-scanning direction, thereby optically correcting the inclination of the light deflecting / reflecting surface 15. Function can be obtained.

【0028】なお、副走査の方向は被走査面19と走査
光ビームとの相対的な移動方向であり、被走査面19を
固定し、走査光ビームを移動させるようにしてもよい。
Note that the direction of sub-scanning is the relative movement direction between the surface to be scanned 19 and the scanning light beam, and the surface to be scanned 19 may be fixed and the scanning light beam may be moved.

【0029】第2の結像光学系2を上述のような3枚構
成としたことにより、副走査方向断面における各レンズ
のパワーを第3レンズ18にも分担させることができ
る。第3レンズ18は、他の2枚のレンズよりも被走査
面19に近い位置にあるので、副走査方向断面における
パワーをこの第3レンズ18に分担させることにより、
第2の結像光学系2としては副走査方向断面に関し光偏
向反射面15と被走査面19との間の結像倍率βの絶対
値を1〜2倍程度に小さくすることができる。
Since the second imaging optical system 2 has the above-described three-element configuration, the power of each lens in the cross section in the sub-scanning direction can be shared by the third lens 18. Since the third lens 18 is located closer to the surface to be scanned 19 than the other two lenses, by sharing the power in the cross section in the sub-scanning direction to the third lens 18,
The second imaging optical system 2 can reduce the absolute value of the imaging magnification β between the light deflecting reflection surface 15 and the surface to be scanned 19 with respect to the cross section in the sub-scanning direction to about 1 to 2 times.

【0030】これにより、副走査方向成分(SAGIT
TAL)の像面湾曲を小さくすることができ、また、光
偏向反射面15における像面湾曲の非対称性が拡大し難
くなるので、A3判短辺(297mm)を超える走査長の
長い光走査装置に対しても被走査面上で均質な光スポッ
トを形成することができる。
Thus, the sub-scanning direction component (SAGIT
TAL) can be reduced, and the asymmetry of the curvature of field on the light deflecting / reflecting surface 15 is less likely to expand. Therefore, the optical scanning device having a longer scanning length than the short side of A3 size (297 mm). A uniform light spot can be formed on the surface to be scanned.

【0031】また、高解像度を要望される光走査装置に
対しても採用が可能となる。
Further, the present invention can be applied to an optical scanning device requiring high resolution.

【0032】また、光偏向反射面付近のずれが拡大され
難くなるため、光偏向手段の位置精度に対する許容度を
大きくすることができる。
Further, since the displacement near the light deflecting / reflecting surface is unlikely to be enlarged, the tolerance for the positional accuracy of the light deflecting means can be increased.

【0033】このように第2の結像光学系2を3枚構成
とすることにより、部品点数は増えることになるが、第
1レンズ16および第2レンズ17を大きなレンズとす
る必要がないので、レンズ製作の容易性を保ちコストの
上昇を抑えることができる。また、第3レンズ18は副
走査方向断面においてのみ正のパワーを有するシリンド
リカルレンズであり、レンズ製作の容易性およびコスト
性に優れている。また、3枚のレンズの材質を樹脂とす
ることにより、軽量、安価なレンズを得ることができ
る。
Although the number of components is increased by forming the three second imaging optical systems 2 in this manner, the first lens 16 and the second lens 17 do not need to be large lenses. Further, it is possible to maintain the ease of manufacturing the lens and suppress an increase in cost. Further, the third lens 18 is a cylindrical lens having a positive power only in the cross section in the sub-scanning direction, and is excellent in ease of lens production and cost. In addition, a lightweight and inexpensive lens can be obtained by using a resin material for the three lenses.

【0034】さらに、上記f3V/fに関する条件式
は、副走査方向断面における第2の結像光学系2と第3
レンズ18との焦点距離の比を規定している。上述した
ように、第2の結像光学系2のパワーを第3レンズ18
に配分することにより、光偏向反射面15と被走査面1
9との間の副走査方向の結像倍率βの絶対値を1〜2倍
とすることができるので、第3レンズ18へのパワー配
分比は所定の条件が設定されることが望ましい。この条
件式の下限値を下回ると第3レンズ18の位置が被走査
面19に近づきすぎ、第2の結像光学系2を光走査光学
系内に配設することが難しくなってしまうとともに、第
3レンズ18が主走査方向に長尺化してしまう。この条
件式の上限値を上回ると、上記結像倍率βが大きくなり
すぎる。
Further, the conditional expression relating to f 3V / f V is defined by the second imaging optical system 2 and the third imaging optical system in the section in the sub-scanning direction.
The ratio of the focal length to the lens 18 is specified. As described above, the power of the second imaging optical system 2 is transferred to the third lens 18.
To the light deflecting / reflecting surface 15 and the surface 1 to be scanned.
9, the absolute value of the imaging magnification β in the sub-scanning direction in the sub-scanning direction can be made 1 to 2 times, so that a predetermined condition is preferably set for the power distribution ratio to the third lens 18. If the lower limit of this conditional expression is exceeded, the position of the third lens 18 will be too close to the surface to be scanned 19, making it difficult to dispose the second imaging optical system 2 in the optical scanning optical system. The third lens 18 becomes longer in the main scanning direction. When the value exceeds the upper limit of this conditional expression, the above-mentioned imaging magnification β becomes too large.

【0035】[0035]

【実施例】以下、本発明の面倒れ補正機能を有する光走
査光学系およびこれを用いた光走査装置について、特に
その特徴となる第2の結像光学系2について詳細に、そ
の実施例を具体的数値を用いて説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an optical scanning optical system having a surface tilt correcting function and an optical scanning device using the same according to the present invention, and in particular, a second imaging optical system 2 which is a feature of the optical scanning optical system will be described in detail. This will be described using specific numerical values.

【0036】〈実施例1〉本実施例1に係る面倒れ補正
機能を有する光走査光学系の構成は実施形態にて上述し
たとおりであるが、コリメーティングレンズ12の焦点
距離は17mm、シリンドリカルレンズ13の焦点距離は
59mmとされている。
<Embodiment 1> The configuration of an optical scanning optical system having a surface tilt correction function according to Embodiment 1 is as described above in the embodiment, but the focal length of the collimating lens 12 is 17 mm, The focal length of the lens 13 is
It is 59 mm.

【0037】本実施例1における第2の結像光学系2の
各レンズ面の曲率半径R、R(Rは主走査方向断
面における曲率半径、Rは副走査方向断面における曲
率半径であり、曲率半径の単位はmmである。以下の実
施例においても同様とする。)、各レンズのレンズ間隔
(もしくはレンズ厚)D(mm)、および各レンズの波
長780nmにおける屈折率Nを表1の上段に示す。ただ
し、この表1および後述する表において、各記号R、
D、Nに対応させた数字は光偏向反射面側から順次増加
するようになっている。また、曲率半径R、Rは、
後述するようにレンズ面が、主走査方向断面形状が非円
弧となる面、または非球面の場合は光軸近傍の曲率半径
の数値である。
The radii of curvature R H and R V of each lens surface of the second imaging optical system 2 in the first embodiment (where R H is the radius of curvature in the cross section in the main scanning direction, and R V is the radius of curvature in the cross section in the sub scanning direction) And the unit of the radius of curvature is mm. The same applies to the following embodiments.), The lens interval (or lens thickness) D (mm) of each lens, and the refractive index N of each lens at a wavelength of 780 nm. It is shown in the upper row of Table 1. However, in Table 1 and the tables described later, each symbol R,
The numbers corresponding to D and N are sequentially increased from the light deflection reflection surface side. Also, the radii of curvature RH and RV are
As will be described later, when the lens surface is a surface having a non-circular cross section in the main scanning direction or an aspheric surface, it is a numerical value of a radius of curvature near the optical axis.

【0038】[0038]

【表1】 [Table 1]

【0039】ここで、各レンズ面について説明する。Here, each lens surface will be described.

【0040】各レンズ面において、所定断面における形
状が非円弧となる面の非円弧形状、または非球面形状
は、下記の非円弧/非球面式により表される。なお、こ
の非円弧/非球面式は、以下の実施例における非円弧形
状および非球面形状においても同様である。
In each lens surface, the non-circular shape or the aspherical shape of the surface having a non-circular shape in a predetermined cross section is represented by the following non-circular / aspherical expression. This non-circular arc / aspherical surface expression is the same in the non-circular arc shape and the aspherical surface shape in the following embodiments.

【0041】[0041]

【数1】 (Equation 1)

【0042】上記表1の中段に、この実施例1における
上記非円弧/非球面式に示される各非円弧/非球面の各
係数1/R、K、A、A、A、A10の値を示
す。
In the middle part of Table 1 above, each coefficient 1 / R, K, A 4 , A 6 , A 8 , A of each non-circular arc / aspheric surface shown in the non-circular arc / aspheric surface formula in the first embodiment. A value of 10 is shown.

【0043】第1面、すなわち第1レンズ16の光偏向
反射面側の面は、上記非円弧/非球面式および各係数に
より表される主走査方向断面上の非円弧を、この非円弧
が光軸と交わる点から光軸上に曲率半径RV1だけ離れ
た点を含み同断面内において光軸に垂直な直線を回転軸
とし、回転して形成される形状をなす。
The first surface, that is, the surface of the first lens 16 on the light deflecting / reflecting surface side is a non-circular arc on the cross section in the main scanning direction represented by the above-mentioned non-circular / aspherical expression and each coefficient. A rotation axis is a straight line perpendicular to the optical axis in the same cross section including a point separated by a radius of curvature R V1 on the optical axis from a point intersecting with the optical axis, and has a shape formed by rotation.

【0044】第2面、すなわち第1レンズ16の被走査
面側の面は、曲率半径RV2なる円弧を、この円弧が光
軸と交わる点から光軸上に曲率半径Rだけ離れた点を
含む主走査方向断面に垂直な直線を回転軸とし、回転し
て形成される形状をなす。
The second surface, that is, the surface of the first lens 16 on the side to be scanned has a circular arc having a radius of curvature R V2 and a point separated from the point where the circular arc intersects the optical axis by a radius of curvature R 2 on the optical axis. And a straight line perpendicular to the cross section in the main scanning direction is used as a rotation axis, and has a shape formed by rotation.

【0045】第2レンズ17の両面、すなわち第3面お
よび第4面は、上記非円弧/非球面式および各係数に示
される、光軸に対して回転対称な非球面形状をなす。
Both surfaces of the second lens 17, that is, the third surface and the fourth surface have an aspherical shape which is rotationally symmetric with respect to the optical axis as shown in the above-mentioned aspherical / aspherical expression and each coefficient.

【0046】第3レンズ18は、副走査方向断面におい
てのみパワーを有するシリンドリカルレンズからなり、
光偏向反射面側の面(第5面)は副走査方向にのみ正の
パワーを有する円筒面であり、被走査面側の面(第6
面)は平面である。
The third lens 18 is a cylindrical lens having power only in the section in the sub-scanning direction.
The surface (fifth surface) on the light deflection / reflection surface side is a cylindrical surface having a positive power only in the sub-scanning direction,
Plane) is a plane.

【0047】上記表1の下段に、本実施例1の光偏向反
射面15から第1レンズ16の光偏向反射面側の面まで
の距離D(mm)、第2の結像光学系2の焦点距離f
(mm)、本実施例1による光走査光学系の半画角θ、
レーザ光源11の波長λ(nm)、光偏向反射面15と
被走査面19との間の副走査方向断面の倍率β、条件
式の値f3V/fの各値を示す。
The lower part of Table 1 shows the distance D 0 (mm) from the light deflecting reflection surface 15 of the first embodiment to the light deflecting reflection surface side of the first lens 16, and the second imaging optical system 2. Focal length f
(Mm), the half angle of view θ of the optical scanning optical system according to the first embodiment,
The wavelength λ (nm) of the laser light source 11, the magnification β V of the cross section in the sub-scanning direction between the light deflection reflecting surface 15 and the surface to be scanned 19, and the value f 3V / f V of the conditional expression are shown.

【0048】〈実施例2〉本実施例2に係る面倒れ補正
機能を有する光走査光学系の構成は、実施例1と略同様
であるが、シリンドリカルレンズ13の焦点距離は33m
mとされている。
Embodiment 2 The configuration of an optical scanning optical system having a surface tilt correcting function according to Embodiment 2 is substantially the same as that of Embodiment 1, except that the focal length of the cylindrical lens 13 is 33 m.
m.

【0049】本実施例2において第2の結像光学系2の
第1〜第6の各レンズ面の形状は実施例1と同様に形成
される。
In the second embodiment, the shapes of the first to sixth lens surfaces of the second imaging optical system 2 are formed in the same manner as in the first embodiment.

【0050】本実施例2における第2の結像光学系2の
各レンズ面の曲率半径R、R、各レンズのレンズ間
隔(もしくはレンズ厚)D(mm)、および各レンズの
波長780nmにおける屈折率Nを表2の上段に示す。た
だし曲率半径R、Rは、レンズ面が、主走査方向断
面形状が非円弧となる面、または非球面の場合は光軸近
傍の曲率半径の数値である。
In the second embodiment, the radii of curvature R H and R V of each lens surface of the second imaging optical system 2, the lens interval (or lens thickness) D (mm) of each lens, and the wavelength 780 nm of each lens Are shown in the upper part of Table 2. However, the radii of curvature R H and R V are numerical values of the radii of curvature near the optical axis when the lens surface is a surface having a non-circular cross section in the main scanning direction or an aspheric surface.

【0051】また、表2の中段に、この実施例2におけ
る上記非円弧/非球面式に示される各非円弧/非球面の
各係数1/R、K、A、A、A、A10の値を示
し、表2の下段に、本実施例2の光偏向反射面15から
第1レンズ16の光偏向反射面側の面までの距離D
(mm)、第2の結像光学系2の焦点距離f(m
m)、本実施例2による光走査光学系の半画角θ、レー
ザ光源11の波長λ(nm)、光偏向反射面15と被走
査面19との間の副走査方向断面の倍率β、条件式の
値f3V/fの各値を示す。
In the middle part of Table 2, each coefficient 1 / R, K, A 4 , A 6 , A 8 , of each aspherical arc / aspherical surface shown in the aspherical / aspherical surface equation in the second embodiment is shown. indicates the value of the a 10, the lower part of Table 2, the distance D from the light deflection reflecting surface 15 of the second embodiment to the surface of the light deflection reflecting surface of the first lens 16
0 (mm), the focal length f (m) of the second imaging optical system 2
m), the half angle of view θ of the optical scanning optical system according to the second embodiment, the wavelength λ (nm) of the laser light source 11, and the magnification β V of the cross section in the sub-scanning direction between the light deflection reflecting surface 15 and the surface to be scanned 19. And the value of the conditional expression f 3V / f V are shown below.

【0052】[0052]

【表2】 [Table 2]

【0053】〈実施例3〉本実施例3に係る面倒れ補正
機能を有する光走査光学系の構成は、実施例1と略同様
である。
Embodiment 3 The configuration of an optical scanning optical system having a surface tilt correcting function according to Embodiment 3 is substantially the same as that of Embodiment 1.

【0054】本実施例3において第2の結像光学系2の
第1〜第6の各レンズ面の形状は実施例1と同様に形成
される。
In the third embodiment, the first to sixth lens surfaces of the second imaging optical system 2 are formed in the same manner as in the first embodiment.

【0055】本実施例3における第2の結像光学系2の
各レンズ面の曲率半径R、R、各レンズのレンズ間
隔(もしくはレンズ厚)D(mm)、および各レンズの
波長780nmにおける屈折率Nを表3の上段に示す。た
だし曲率半径R、Rは、レンズ面が、主走査方向断
面形状が非円弧となる面、または非球面の場合は光軸近
傍の曲率半径の数値である。
In Embodiment 3, the radii of curvature R H and R V of each lens surface of the second imaging optical system 2, the lens interval (or lens thickness) D (mm) of each lens, and the wavelength 780 nm of each lens Are shown in the upper part of Table 3. However, the radii of curvature R H and R V are numerical values of the radii of curvature near the optical axis when the lens surface is a surface having a non-circular cross section in the main scanning direction or an aspheric surface.

【0056】また、表3の中段に、この実施例3におけ
る上記非円弧/非球面式に示される各非円弧/非球面の
各係数1/R、K、A、A、A、A10の値を示
し、表3の下段に、本実施例3の光偏向反射面15から
第1レンズ16の光偏向反射面側の面までの距離D
(mm)、第2の結像光学系2の焦点距離f(m
m)、本実施例3による光走査光学系の半画角θ、レー
ザ光源11の波長λ(nm)、光偏向反射面15と被走
査面19との間の副走査方向断面の倍率β、条件式の
値f3V/fの各値を示す。
In the middle part of Table 3, each coefficient 1 / R, K, A 4 , A 6 , A 8 , of each aspherical arc / aspherical surface shown in the aspherical / aspherical surface equation in the third embodiment is shown. indicates the value of the a 10, the lower part of Table 3, the distance D from the light deflection reflecting surface 15 of the third embodiment to the surface of the light deflection reflecting surface of the first lens 16
0 (mm), the focal length f (m) of the second imaging optical system 2
m), the half angle of view θ of the optical scanning optical system according to the third embodiment, the wavelength λ (nm) of the laser light source 11, and the magnification β V of the cross section in the sub-scanning direction between the light deflection reflecting surface 15 and the surface to be scanned 19. And the value of the conditional expression f 3V / f V are shown below.

【0057】[0057]

【表3】 [Table 3]

【0058】図3〜図5に本実施例1〜3に係る面倒れ
補正機能を有する光走査光学系の各収差図(像面湾曲お
よび歪曲収差の図)を示す。図3〜図5に明らかなよう
に、各実施例1〜3によれば、副走査方向の像面湾曲を
はじめ各収差が良好であることが明らかである。
FIGS. 3 to 5 show aberration diagrams (views of field curvature and distortion) of the optical scanning optical system having the surface tilt correcting function according to the first to third embodiments. As apparent from FIGS. 3 to 5, according to each of Examples 1 to 3, it is apparent that each aberration including the curvature of field in the sub-scanning direction is good.

【0059】なお、本発明の面倒れ補正機能を有する光
走査光学系およびこれを用いた光走査装置としては、上
記実施例のものに限られるものではなく種々の態様の変
更が可能であり、例えば各レンズの曲率半径R、R
およびレンズ間隔(もしくはレンズ厚)Dを適宜変更す
ることが可能である。
The optical scanning optical system having the surface tilt correcting function of the present invention and the optical scanning device using the optical scanning optical system are not limited to those of the above-described embodiment, but various modifications can be made. For example, the radii of curvature R H and R V of each lens
In addition, the lens interval (or lens thickness) D can be appropriately changed.

【0060】また、上記第2の結像光学系2における第
1レンズ16は、光偏向手段側の面の主走査方向断面形
状が非円弧であり、両面ともに主走査方向断面形状およ
び副走査方向断面形状が異なるトーリック様のレンズで
あり、かつ主走査方向断面および副走査方向断面におい
てともに正のパワーを有するレンズとされているが、光
偏向手段側の面の主走査方向断面形状は非円弧でなくと
もよい。
The first lens 16 of the second imaging optical system 2 has a non-circular cross section in the main scanning direction on the surface on the side of the light deflecting means. It is a toric-like lens having a different cross-sectional shape, and has a positive power in both the main scanning direction cross-section and the sub-scanning direction cross-section. It is not necessary.

【0061】また、上記第2の結像光学系2における第
2レンズ17は、両面が回転対称な非球面からなるレン
ズとされているが、一方の面あるいは両面が主走査方向
断面形状が非円弧であるレンズであってもよい。
The second lens 17 in the second imaging optical system 2 is a lens having both surfaces formed of rotationally symmetric aspherical surfaces, but one or both surfaces have a non-sectional shape in the main scanning direction. The lens may be an arc.

【0062】また、上記第2の結像光学系2における第
3レンズ18は、シリンドリカルレンズとされている
が、シリンドリカルレンズに限らず、主走査方向断面に
おいてほとんどパワーを有さず、副走査方向断面におい
て正のパワーを有するレンズであってもよく、さらに、
主走査方向断面においてほとんどパワーを有さず、副走
査方向断面において正のパワーを有する凹のシリンドリ
カル状のミラーであってもよい。
The third lens 18 in the second imaging optical system 2 is a cylindrical lens. However, the third lens 18 is not limited to a cylindrical lens, has almost no power in a cross section in the main scanning direction, and has no power in the sub scanning direction. A lens having a positive power in the cross section may be used.
A concave cylindrical mirror having little power in the cross section in the main scanning direction and having positive power in the cross section in the sub scanning direction may be used.

【0063】[0063]

【発明の効果】以上説明したように、本発明の面倒れ補
正機能を有する光走査光学系によれば、光偏向反射面と
被走査面の間に配した第2の結像光学系の構成を、光偏
向反射面側から順に、両面ともに主走査方向断面形状お
よび副走査方向断面形状が互いに異なり、かつ主走査方
向断面および副走査方向断面においてともに正のパワー
を有する第1のレンズと、両面ともに主走査方向断面形
状が非円弧である第2のレンズと、主走査方向断面にお
いてほとんどパワーを有さず、副走査方向断面において
正のパワーを有する第3のレンズという3枚構成とする
ことにより、副走査方向断面に関する光偏向反射面15
と被走査面19との間の結像倍率βの絶対値を1〜2倍
程度と小さくすることができる。
As described above, according to the optical scanning optical system having the surface tilt correcting function of the present invention, the configuration of the second imaging optical system disposed between the light deflection reflecting surface and the surface to be scanned. A first lens having a cross section in the main scanning direction and a cross section in the sub scanning direction that are different from each other on both sides in order from the light deflection reflection surface side, and both having a positive power in the cross section in the main scanning direction and the sub scanning direction. A three-lens configuration has a second lens having a non-circular cross section in the main scanning direction on both surfaces, and a third lens having almost no power in the main scanning direction cross section and having positive power in the sub scanning direction cross section. Thus, the light deflection / reflection surface 15 with respect to the section in the sub-scanning direction
The absolute value of the imaging magnification β between the image and the scanned surface 19 can be reduced to about 1 to 2 times.

【0064】そのため、レンズ製作の容易性とコスト性
を確保しつつ、副走査方向成分の像面湾曲を小さくする
ことができ、また、光偏向反射面における像面湾曲の非
対称性が拡大し難くなるので、A3判短辺(297mm)
を超える走査長の長い光走査装置に対しても適用が可能
になる
Therefore, it is possible to reduce the curvature of field of the component in the sub-scanning direction while securing the ease and cost of manufacturing the lens, and it is difficult to increase the asymmetry of the curvature of field on the light deflection reflecting surface. A3 short side (297mm)
It can be applied to optical scanning devices with long scanning lengths

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施形態に係る光走査光学系の構成を
示す図
FIG. 1 is a diagram showing a configuration of an optical scanning optical system according to an embodiment of the present invention.

【図2】本発明の実施形態に係る光走査光学系の第2の
結像光学系の構成を示す主走査方向断面図(A)および
副走査方向断面図(B)
FIGS. 2A and 2B are a sectional view in a main scanning direction and a sectional view in a sub-scanning direction showing a configuration of a second imaging optical system of the optical scanning optical system according to the embodiment of the present invention;

【図3】実施例1に係る光走査光学系の収差曲線図FIG. 3 is an aberration curve diagram of the optical scanning optical system according to the first embodiment.

【図4】実施例2に係る光走査光学系の収差曲線図FIG. 4 is an aberration curve diagram of the optical scanning optical system according to the second embodiment.

【図5】実施例3に係る光走査光学系の収差曲線図FIG. 5 is an aberration curve diagram of the optical scanning optical system according to the third embodiment.

【符号の説明】[Explanation of symbols]

H1〜RH6 レンズ面の主走査方向曲率半径 RV1〜RV6 レンズ面の副走査方向曲率半径 D 〜D レンズ面間隔(レンズ厚) 1 第1の結像光学系 2 第2の結像光学系 11 レーザ光源 12 コリメーティングレンズ 13 シリンドリカルレンズ 14 ポリゴンミラー 15 光偏向反射面 16 第1レンズ 17 第2レンズ 18 第3レンズ 19 被走査面R H1 to R H6 The radius of curvature of the lens surface in the main scanning direction R V1 to R V6 The radius of curvature of the lens surface in the sub scanning direction D 0 to D 5 Lens surface spacing (lens thickness) 1 First imaging optical system 2 Second Imaging optical system 11 Laser light source 12 Collimating lens 13 Cylindrical lens 14 Polygon mirror 15 Light deflection / reflection surface 16 First lens 17 Second lens 18 Third lens 19 Scanned surface

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 光源からの光束を光偏向手段の光偏向反
射面上またはその近傍に線状に結像させる第1の結像光
学系と、前記光偏向手段により偏向された光束を被走査
面上に結像させる第2の結像光学系とを備え、副走査方
向断面に関して前記光偏向反射面と前記被走査面とが光
学的に略共役となるように構成された、面倒れ補正機能
を有する光走査光学系において、 前記第2の結像光学系は前記光偏向手段側から順に、 両面ともに、主走査方向断面形状および副走査方向断面
形状が互いに異なり、かつ主走査方向断面および副走査
方向断面においてともに正のパワーを有する第1のレン
ズと、 両面ともに主走査方向断面形状が非円弧である第2のレ
ンズと、 主走査方向断面においてほとんどパワーを有さず、副走
査方向断面において正のパワーを有する第3のレンズと
から構成されることを持徴とする面倒れ補正機能を有す
る光走査光学系。
1. A first imaging optical system for linearly forming an image of a light beam from a light source on or near a light deflecting reflection surface of a light deflecting device, and scanning the light beam deflected by the light deflecting device. A second image-forming optical system for forming an image on a surface, wherein the light deflection reflecting surface and the surface to be scanned are optically substantially conjugate with respect to a cross section in the sub-scanning direction, In the optical scanning optical system having a function, the second imaging optical system has a main scanning direction cross-sectional shape and a sub-scanning direction cross-sectional shape different from each other, and A first lens having a positive power in both cross sections in the sub-scanning direction, a second lens having a non-circular cross-sectional shape in the main scanning direction on both surfaces; Positive in section Tilt the optical scanning optical system having a correction function to Jicho to be composed of a third lens having a word.
【請求項2】 前記第1のレンズは前記光偏向手段側の
面の主走査方向断面形状が非円弧であり、前記第2のレ
ンズは両面が回転対称な非球面であり、前記第3のレン
ズは両面ともに主走査方向断面形状が光軸に対して直交
する直線となるようなシリンドリカルレンズであること
を特徴とする請求項1記載の面倒れ補正機能を有する光
走査光学系。
2. The first lens has a non-circular cross section in the main scanning direction on a surface on the side of the light deflecting means, the second lens has an aspheric surface whose both surfaces are rotationally symmetric, and the third lens has a third surface. 2. The optical scanning optical system having a surface tilt correcting function according to claim 1, wherein the lens is a cylindrical lens having a cross section in the main scanning direction on both surfaces thereof being a straight line orthogonal to the optical axis.
【請求項3】 前記第1〜第3のレンズの材質が樹脂で
あることを特徴とする請求項1または2記載の面倒れ補
正機能を有する光走査光学系。
3. The optical scanning optical system according to claim 1, wherein the first to third lenses are made of resin.
【請求項4】 下記の条件式を満足することを特徴とす
る請求項1〜3のうちいずれか1項記載の面倒れ補正機
能を有する光走査光学系。 1.0 < f3V/f < 1.6 ただし、 f:第2の結像光学系の副走査方向断面における焦
点距離 f3V:第3のレンズの副走査方向断面における焦点距
4. An optical scanning optical system having a surface tilt correction function according to claim 1, wherein the following conditional expression is satisfied. 1.0 <f 3V / f V < 1.6 However, f V: focal length in the sub scanning cross section of the second imaging optical system f 3V: focal length in the sub scanning cross section of the third lens
【請求項5】 請求項1〜4のうちいずれか1項記載の
面倒れ補正機能を有する光走査光学系を使用したことを
特徴とする光走査装置。
5. An optical scanning device using the optical scanning optical system having a surface tilt correction function according to claim 1. Description:
JP3382199A 1999-02-12 1999-02-12 Optical scanning optical system having plate tilt correcting function and optical scanner using the system Withdrawn JP2000231073A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3382199A JP2000231073A (en) 1999-02-12 1999-02-12 Optical scanning optical system having plate tilt correcting function and optical scanner using the system
US09/547,990 US6178030B1 (en) 1999-02-12 2000-04-12 Light-scanning optical system having wobble-correcting function and light-scanning apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3382199A JP2000231073A (en) 1999-02-12 1999-02-12 Optical scanning optical system having plate tilt correcting function and optical scanner using the system

Publications (1)

Publication Number Publication Date
JP2000231073A true JP2000231073A (en) 2000-08-22

Family

ID=12397159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3382199A Withdrawn JP2000231073A (en) 1999-02-12 1999-02-12 Optical scanning optical system having plate tilt correcting function and optical scanner using the system

Country Status (1)

Country Link
JP (1) JP2000231073A (en)

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