JP2000223462A - Treating equipment and treating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide treating equipment, capable of miniaturization and simplification of the equipment in the treating equipment treating an object to be treated by using a treatment liquid. SOLUTION: In this treating equipment which treats an object to be treated by using treating liquid, a treating tank 21 capable of storing the treating liquid inside, a circulating pipe 25 circulating the treating liquid stored in the treating tank and treating the object to be treated which is supplied in the treating tank 21, a drain pipe 24 discharging the treating liquid which is deteriorated by use from the treating tank, an adjusting tank 32 storing the treating liquid which is adjusted according to use conditions and not yet used, and a supply pipe 29 supplying the treating liquid which is stored in the adjusting tank and yet to be used to the treating tank, when the used treating liquid is discharged from the treating tank by the drain pipe are installed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a processing apparatus and a processing method for processing an object to be processed with a processing liquid.

[0002]

2. Description of the Related Art For example, in a liquid crystal manufacturing apparatus or a semiconductor manufacturing apparatus, there is a step of processing an object to be processed such as a liquid crystal glass substrate or a semiconductor wafer with a processing liquid such as an etching liquid, a developing liquid or a cleaning liquid.

When processing an object to be processed with a processing liquid, the object to be processed is supplied to a processing tank, and the processing object is processed by injecting the processing liquid onto the processing object. . The processing liquid deteriorates with use. Therefore, the processing liquid is replaced with a new processing liquid after being used for a predetermined period.

The processing solution is used by diluting a stock solution such as a chemical to a predetermined concentration with a diluting solution such as pure water and heating to a predetermined temperature in order to enhance a reaction (processing acceleration) effect at the time of use. You. Therefore, the treatment liquid must be adjusted according to the use conditions, and the adjustment may take time.

[0005] Therefore, in the conventional processing apparatus, if the processing liquid deteriorates with use, the processing liquid can be promptly replaced with an adjusted unused processing liquid. That is, the conventional processing apparatus has a first tank 2 and a second tank 3 in addition to the processing tank 1 as shown in FIG. A connection pipe 4 is provided at the bottom of the processing tank 1.
Is connected to a first three-way valve 5. The first three-way valve 5 has a first communication pipe 6 communicating with the first tank 2.
And a second communication pipe 7 communicating with the second tank 3.

The suction side of a first pump 8 is connected to the first tank 2, and the suction side of a second pump 9 is connected to the second tank 3. The discharge sides of the first pump 8 and the second pump 9 are respectively connected to a first circulation pipe 11.
And one end of the second circulation pipe 12 is connected, and the other ends of the circulation pipes 11 and 12 are connected to a second three-way valve 13. The other port of the second three-way valve 13 is connected to a nozzle 14 for injecting the processing liquid L toward the workpiece W supplied to the processing tank 1.

Further, the first tank 2 has an on-off valve 15a.
Is connected to the first drain pipe 15 having the
Is connected to a second drain pipe 16 having an on-off valve 16a.

In the processing apparatus having such a configuration, first, the first tank 2 contains a processing liquid L whose concentration and temperature are adjusted. In this state, to process the workpiece W supplied to the processing tank 1, the first pump 8 is operated. Thereby, the processing liquid L stored in the first tank 2 is supplied to the first circulation pipe 11 and the second three-way valve 1.
Since the liquid W is ejected from the nozzle 14 toward the workpiece W in the processing tank 1 through the nozzle 3, the workpiece W is subjected to predetermined processing by the processing liquid L.

The processing liquid L obtained by processing the workpiece W is supplied to the processing tank 1
Is returned from the first communication pipe 6 to the first tank 2 through a first three-way valve 5 connected to the bottom of the tank via a connection pipe 4.
Therefore, the processing liquid L processes the workpiece W while being circulated by the first pump 8.

While processing the workpiece W using the first tank 2, a new processing liquid L is adjusted in the second tank 3. If the processing liquid L in the first tank 2 is deteriorated by being used for a predetermined time, the first pump 8 is stopped, and the processing liquid L is accumulated in the first tank 2. By opening the on-off valve 15a provided in the first drainage pipe 15, the deteriorated processing liquid L is discharged.

At the same time, the first three-way valve 5 and the second three-way valve 13 are switched, and the second pump 9 is operated to supply the new processing liquid L adjusted in the second tank 3 to the nozzle 14. This processing target W is processed by spraying toward the processing target W supplied to the processing tank 1 from. At the same time, a new processing liquid L is adjusted in the first tank 2. Then, if the processing liquid L in the second tank 3 has deteriorated, the processing liquid L is discharged as in the previous case,
The new treatment liquid L adjusted in the first tank 2 is circulated and supplied.

By providing the first tank 2 and the second tank 3 as described above, if the processing liquid L in use is deteriorated, the processing liquid L is discarded, and the processing liquid L is newly added. Since it can be used, there is an advantage that productivity can be improved.

By the way, in the processing apparatus having such a configuration, two tanks 2 and 3 are required for circulating the processing liquid L and adjusting the processing liquid L. Since the tanks 2 and 3 used in the processing apparatus are relatively large, the provision of the two tanks 2 and 3 may increase the size and complexity of the processing apparatus and increase the cost.

[0014]

As described above, the conventional processing apparatus is provided with two tanks so that the deteriorated processing solution can be exchanged smoothly.
In some cases, the size and complexity of the device have been increased.

According to the present invention, there is provided a processing apparatus and a processing method capable of quickly replacing a processing liquid in use with a new processing liquid if the processing liquid deteriorates without using two tanks. Is to provide.

[0016]

According to a first aspect of the present invention, in a processing apparatus for processing an object to be processed with a processing liquid, a processing tank capable of storing the processing liquid therein, and a processing tank stored in the processing tank. A processing liquid circulating means for circulating the processing liquid and processing the workpiece supplied to the processing tank, and a draining means for discharging the processing liquid deteriorated with use from the processing tank,
An adjusting tank for storing an unused processing liquid adjusted according to use conditions, and an unused processing stored in the adjusting tank if the used processing liquid is discharged from the processing tank by the drainage means. A supply unit for supplying a liquid to the processing tank.

Accordingly, when the processing liquid is circulated, the processing tank can be used as a tank. Therefore, if only one adjusting tank is provided, and if the processing liquid being used is deteriorated, the processing liquid can be used. It is possible to quickly perform the work of replacing the processing liquid with the adjusted new processing liquid.

According to a second aspect of the present invention, in the first aspect of the present invention, the level of the processing liquid discharged by the drainage means and the level of the processing liquid supplied by the supply means are detected in the processing tank. Detecting means is provided.

This makes it possible to discharge the deteriorated processing liquid from the processing tank and supply a new processing liquid to the processing tank quickly and reliably.

According to a third aspect of the present invention, there is provided a processing method for processing an object to be processed supplied to a processing tank with a processing liquid, wherein the processing liquid stored in the processing tank is circulated and the processing liquid supplied to the processing tank is circulated. A processing step of processing the object, an adjustment step of adjusting the processing liquid according to the use conditions in the adjustment tank at the same time as the processing step, and a draining step of discharging the processing liquid deteriorated with use from the processing tank, A supplying step of supplying the unused processing liquid adjusted by the adjusting tank to the processing tank when the used processing liquid is discharged from the processing tank in the draining step.

Thus, when the processing liquid is circulated, the processing tank can be used as a tank. Therefore, the discharge of the deteriorated processing liquid and the supply of a new processing liquid can be achieved by using only one adjustment tank. Can be performed quickly.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show a processing apparatus according to a first embodiment of the present invention. This processing apparatus shown in FIG.
1 is provided. A processing object W such as a glass substrate for liquid crystal or a semiconductor wafer is supplied to the processing tank 21 by carrying-in means such as a conveying roller (not shown). The workpiece W carried into the processing tank 21 is transported while being sprayed with the processing liquid L, and is carried out of the processing tank 21 by the transport means.

One end of a drain pipe 24 having a drain valve 23 is connected to the bottom of the processing tank 21. This drain pipe 2
The other end of 4 is guided to a drain tank (not shown). further,
One end of a circulation pipe 25 is connected to the bottom of the processing tank 21. A circulation pump 26 is provided at an intermediate portion of the circulation pipe 25, and the other end is connected to a first port 2 of an electric three-way switching valve 27.
7a.

The second port 27b of the three-way switching valve 27
Is connected to a nozzle 28 for injecting the processing liquid L toward the workpiece W held in the processing tank 21, and one end of a supply pipe 29 is connected to the third port 27 c. The other end of the supply pipe 29 is connected to an adjustment tank 32 via a supply pump 31.

The drain pipe 24 is set to have a sufficiently larger diameter than the supply pipe 29. Thereby, the processing liquid L stored in the processing tank 21 can be discharged in a short time as described later.

The processing tank 21 is provided with a level switch 30. This level switch 30 is connected to the processing tank 21.
A lower contact 30a that detects that the processing liquid L in the inside has reached a predetermined level discharged, and an upper contact 30b that detects that the processing liquid L supplied from the adjustment tank 32 has reached a predetermined level. Is provided.

The adjusting tank 32 is supplied with a stock solution of the processing liquid L from a stock solution supply pipe 33 and a diluent for diluting the stock solution to a predetermined concentration from a dilution pipe 34. Further, the adjustment tank 32 is provided with an electrothermal heater 35 for heating the processing liquid L adjusted to a predetermined concentration to a predetermined temperature.

The drain valve 23, the circulation pump 26, the three-way switching valve 27, the level switch 30, the supply pump 31, and the heater 35 are electrically connected to a controller 36. The control device 36 controls the start and stop of the pumps 26 and 31 and controls the opening and closing of the valves 24 and 27 as described later.

Next, a description will be given of an operation in the case where the processing object W is processed by the processing apparatus having the above configuration.

First, when the processing liquid L is adjusted to a predetermined concentration and temperature in the adjusting tank 32, the supply pump 31 is operated to supply the processing liquid L in the adjusting tank 32 to the supply pipe 29 and the third pipe.
Is supplied to the processing tank 21 via the three-way switching valve 27 and the nozzle 28 which are switched to a state where the port 27c and the second port 27b communicate with each other. Since the drain valve 23 provided at the bottom of the processing tank 21 is closed, the processing tank 21 functions as a tank for storing the processing liquid L. The flow of the processing liquid L at this time is indicated by an arrow in FIG.

When the level of the processing liquid L to the processing tank 21 reaches the upper contact 30b of the level switch 30, the operation of the supply pump 31 is stopped by a detection signal from the level switch 30.

The workpiece W is supplied to the processing tank 21 in which the processing liquid L is stored. When the workpiece W is carried into the processing tank 21 by a transport device (not shown), the three-way switching valve 27 is switched so that the first port 27a and the second port 27b communicate with each other. Operates.
Thereby, the processing liquid L stored in the processing tank 21 is jetted from the nozzle 28 toward the processing target W through the circulation pipe 25, so that the processing target W is processed. The flow of the processing liquid at this time is shown in FIG.

As described above, the processed object W is carried out of the processing tank 21 by the transfer device, the unprocessed object W is carried in, and the processing steps are repeated.

If the processing liquid L stored in the processing tank 21 deteriorates due to the repetition of such processing,
The drain valve 23 is opened, and the processing liquid L in the processing tank 21 is discharged. When the level of the processing liquid L in the processing tank 21 decreases to a position detected by the lower contact 30a of the level sensor 30, the three-way switching valve 27 connects the third port 27c to the second port 27c.
Is switched to the state of communication with the port 27b, and at the same time, the supply pump 31 is operated, and the processing liquid L adjusted in the adjustment tank 32 is supplied from the nozzle 28 to the processing tank 21 through the supply pipe 29.

When the supply pump 31 operates, that is, when the processing liquid L in the processing tank 21 is
At the point of time when it is detected as 0a, the degraded processing liquid L remains in the processing tank 21.

However, since the drainage speed of the drainage pipe 24 is sufficiently higher than the supply speed of the supply pipe 29,
It is possible to prevent the unused processing liquid L supplied from the adjustment tank 32 to the processing tank 21 from being mixed with the deteriorated processing liquid L remaining in the processing tank 21. Then, a predetermined time after the lower contact point 30a of the level sensor 30 detects the level of the processing liquid L, that is, when the deteriorated processing liquid L is completely discharged from the processing tank 21, the drain valve 23 is closed and the adjustment tank is closed. The new processing liquid L supplied from 32 is stored in the processing tank 21.

That is, by setting the height of the lower contact 30a of the level sensor 30 in accordance with the supply speed and the discharge speed of the processing liquid L, all the deteriorated processing liquid L is discharged from the processing tank 21. Since the new processing liquid L can be supplied without waiting, the time required for discharging and supplying the processing liquid L can be reduced.

When the level of the processing liquid L supplied from the supply tank 32 to the processing tank 21 reaches a predetermined level and is detected by the upper contact 30b of the level sensor 30, the detection signal indicates that the supply pump 31 Is stopped. That is, a predetermined amount of the unused processing liquid L is supplied to the processing tank 21.

When the supply of the new processing liquid L to the processing tank 21 is completed, the unprocessed workpiece W is carried into the processing tank 21, and then the processing liquid L is circulated and circulated as described above. The processing of the workpiece W is performed.

As described above, since the processing liquid L for processing the workpiece W is stored in the processing tank 21, a tank for storing the processing liquid L becomes unnecessary. That is,
Conventionally, two tanks were required, but according to the present invention, only the adjustment tank 32 for adjusting the processing liquid L may be provided.

Therefore, not only can the device be miniaturized as compared with the conventional one, but also the structure can be simplified, so that it is possible to reduce the cost.

FIG. 3 shows a second embodiment of the present invention. In the second embodiment, a three-way switching valve 41 is provided in a drain pipe 24 provided at the bottom of a processing tank 21, and one end of a circulation pipe 25 is connected to the remaining port. Even with such a configuration, it is possible to reliably circulate and discharge the processing liquid L, similarly to the first embodiment. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

[0044]

According to the first and third aspects of the present invention, since the processing tank is used as a tank when circulating the processing liquid, the processing liquid can be circulated only by providing one adjusting tank. If the used processing solution is deteriorated, the processing solution can be replaced with a new processing solution prepared in advance in the adjustment tank.

That is, conventionally, a tank for circulating the processing liquid and a tank for adjusting the processing liquid in advance have been used. However, according to the present invention, only one tank is required. It is possible to reduce the size and simplify the configuration.

According to the second aspect of the present invention, the level when the processing liquid is discharged and the level when the new processing liquid is supplied are detected. For this reason, it is possible to quickly and reliably discharge the deteriorated processing liquid from the processing tank and supply a new processing liquid to the processing tank.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a view for explaining a flow of a processing liquid.

FIG. 3 is a schematic configuration diagram of a processing apparatus according to a second embodiment of the present invention.

FIG. 4 is a schematic configuration diagram showing a conventional processing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 21 ... Treatment tank 23 ... Drainage valve (drainage means) 24 ... Drainage pipe (drainage means) 25 ... Circulation pipe (treatment liquid circulation means) 26 ... Circulation pump (treatment liquid circulation means) 29 ... Supply pipe 31 ... Supply pump (supply means) 32 ... Adjustment tank (supply means)

Claims (3)

[Claims] 1. A processing apparatus for processing an object to be processed with a processing liquid, comprising: a processing tank capable of storing the processing liquid therein; a processing liquid stored in the processing tank being circulated and supplied to the processing tank. Processing liquid circulation means for processing the processed object, drainage means for discharging the processing liquid deteriorated due to use from the processing tank, and an adjustment tank for storing an unused processing liquid adjusted according to use conditions And supplying means for supplying unused processing liquid stored in the adjustment tank to the processing tank when used processing liquid is discharged from the processing tank by the drainage means. Processing equipment. 2. The apparatus according to claim 1, wherein said processing tank is provided with a detecting means for detecting a level of the processing liquid discharged by said discharging means and a level of the processing liquid supplied by said supplying means. The processing device according to claim 1. 3. A processing method for processing an object supplied to a processing tank with a processing liquid, wherein the processing liquid stored in the processing tank is circulated to process the object supplied to the processing tank. An adjusting step of adjusting the processing liquid according to the use conditions in the adjusting tank at the same time as the processing step; a draining step of discharging the processing liquid deteriorated due to use from the processing tank; Supplying the unused processing liquid adjusted by the adjustment tank to the processing tank when the used processing liquid is discharged from the processing tank.