JP2000218801A - Printer head manufacturing method and apparatus, and hole processing apparatus - Google Patents

Abstract

(57) Abstract: An object of the present invention is to provide a printer head manufacturing apparatus in which a mask used for forming an orifice hole in an orifice plate is prevented from being thermally deformed. SOLUTION: In a printer head manufacturing apparatus for forming an ink ejection hole 2 in an orifice plate 3 provided in a printer head housing, forming optical systems 32 and 35 for forming a laser beam into a predetermined beam shape, and the forming optical system. A mask 36 disposed on the optical path of the laser light from the optical system and having a hole pattern corresponding to the shape of the ink ejection hole formed thereon; and a mask disposed on the incident side of the mask where the laser light is incident and irradiating the mask. A regulating member 61 for limiting the amount of laser light to be irradiated and an imaging optical system 37 for imaging the laser light passing through the mask on the orifice plate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a printer head for forming an orifice hole of an ink jet printer by forming a hole in a reverse taper shape with respect to a laser irradiation direction, an apparatus therefor, and a hole processing apparatus used therefor. About.

[0002]

2. Description of the Related Art As shown in FIG. 8, a metal orifice plate 3 having a plurality of orifice holes 2 is bonded to a plurality of ink chambers 1 in a head portion of the above-mentioned ink jet printer. Each ink chamber 1 is partitioned by a partition wall 4, and an ink droplet is ejected from an orifice hole 2 as shown in FIG. 9 by an ejection mechanism (not shown) for ejecting predetermined ink. As the ejection mechanism, for example, a bubble jet method, a Kaiser method including a piezoelectric vibrating plate, and the like are known.

The orifice hole 2 of such an ink-jet printer is formed to have a diameter of about 30 μm, and the metal orifice plate 3 has a thickness of about 50 μm.
A plate such as Kovar is used.

The metal orifice plate 3 is usually manufactured by a plating method called an electroforming method. In a subsequent printer head manufacturing process, the metal orifice plate 3 is bonded to a head portion of the printer. In this case, it is difficult to ensure the positioning accuracy between each orifice hole 2 of the metal orifice plate 3 and each ink chamber 1 with high accuracy, and there is a problem that the orifice hole 2 is closed by the adhesive 5.

In order to avoid such a problem, there has been proposed a processing method in which an orifice plate is adhered to a head portion of a printer, and then the orifice hole 2 is opened using a laser beam. In this case, a hole pattern is formed. The used mask is used.

[0006]

When machining an orifice hole using a mask, a laser beam irradiates not only the hole pattern of the mask but also almost the entire surface of the mask, and the laser beam transmitted through the hole pattern. Light is imaged on the orifice plate to process the orifice hole.

Since the precision of the diameter of the orifice hole is determined by the precision of the mask, it is required that the mask be manufactured with high precision. In order to ensure the precision, a thin metal plate having a thickness of 50 μm or less is used. You.

When a mask formed by a thin metal plate is irradiated with laser light, thermal deformation occurs. FIG. 10 shows the amount of deformation of a mask having a length of 50 mm. The measured value is the amount of residual deformation after laser light irradiation, and it is assumed that the amount of deformation is larger during irradiation.

The deformation amount of the mask in the optical axis direction is Z ₁ μm,
Assuming that the amount of deformation in the direction perpendicular to the optical axis is R ₁ μm and the magnification of the projection lens that forms the hole pattern of the mask is m, the displacement Z ₂ in the optical axis direction at the processing point is Z ₂ = Z ₁ / m ² , and the deviation R ₂ in the direction perpendicular to the optical axis is R ₂ = R ₁ / m. Accordingly, since the deviation causes an error in the diameter of the orifice hole to increase, it is required to prevent the mask from being deformed by the heat of the laser beam.

In order to prevent the mask from being deformed by the irradiation of the laser beam, see Japanese Patent Application Laid-Open No. 4-187392.
There is a prior art disclosed in Japanese Patent Publication No. In this prior art, a mask in which a mask hole is formed is sandwiched between a mask holder having windows formed therein and a mask holder, and a passage through which cooling water passes is formed in the mask holder, thereby cooling the mask. To prevent thermal deformation.

[0011] Therefore, in order to cool the mask, not only a mask holder or a mask holder is required, but also a passage must be formed in the mask holder to allow cooling water to flow, resulting in an increase in the size and complexity of the configuration. There was that.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method of manufacturing a printer head capable of preventing thermal deformation of a mask without increasing the size and complexity of the apparatus, an apparatus therefor, and a hole processing apparatus.

[0013]

According to the first aspect of the present invention, there is provided a printer head housing having a plurality of ink grooves formed thereon, wherein a process plate made of a polymer material is bonded to the printer head housing;
A step of shaping the laser beam into a predetermined beam shape, a step of passing the laser beam through a mask in which a hole pattern is created corresponding to a shape of the plate to be processed, and a step of passing the laser beam. Limiting the irradiation amount of the laser beam incident on the mask, and forming an image of the laser beam passing through the mask on the plate to be processed by an imaging optical system to open the plate for processing. And a process for manufacturing a printer head.

According to a second aspect of the present invention, there is provided a printer head manufacturing apparatus for forming an ink ejection hole in a plate to be processed provided in a printer head housing, wherein a shaping optical system for shaping a laser beam into a predetermined beam shape is provided. A mask disposed on an optical path of laser light from the shaping optical system and having a hole pattern corresponding to the shape of the ink ejection hole, and the mask disposed on an incident side of the mask where the laser light is incident. A regulating member for limiting the irradiation amount of the laser beam for irradiating the laser beam, and an imaging optical system for forming an image of the laser beam passing through the mask on the plate to be processed.

Accordingly, the amount of heat input to the mask is reduced, so that deformation of the mask is suppressed.

According to a third aspect of the present invention, in the second aspect of the present invention, the regulating member has a regulating hole larger than the hole pattern without reducing the amount of laser light passing through the hole pattern of the mask. Is formed.

Accordingly, the processing accuracy of the ink ejection holes formed in the orifice plate is not reduced,
Deformation of the mask can be suppressed.

According to a fourth aspect of the present invention, in the second aspect of the present invention, the restricting member has a structure that is less thermally deformed than the mask.

Thus, it is possible to prevent the regulating member from being damaged early.

According to a fifth aspect of the present invention, there is provided a hole forming apparatus for forming an orifice hole in a workpiece, a forming optical system for forming a laser beam into a predetermined beam shape, and an optical path of the laser light from the forming optical system. A mask in which a hole pattern corresponding to the shape of the orifice hole is formed, and a restricting member disposed on an incident side of the mask where the laser light is incident and for limiting an irradiation amount of the laser light for irradiating the mask When,
An image forming optical system for forming an image of the laser beam passing through the mask on the workpiece.

As a result, the amount of heat input to the mask is reduced, so that deformation of the mask is suppressed.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a printer head manufacturing apparatus which is a hole processing apparatus for forming an orifice hole of an ink jet printer.

In the figure, reference numeral 30 denotes an excimer laser oscillator which outputs a pulsed laser beam having a wavelength of 400 nm or less. Excimer laser oscillator 30
A variable attenuator 31, an up collimator 32, an image rotator 33, and a mirror 34 are arranged on the optical path of the laser light output from the
On the reflection optical path of No. 4, an array lens illumination system 35, a relay lens 39, a mask 36, and a projection lens (imaging lens)
37 are arranged.

On the other hand, the x-stage 38a, the y-stage 38b and the z-stage 3
8c is provided, and the orifice plate 20 as a workpiece is placed on the z stage 38c.

Here, a specific configuration of an optical system from the array lens illumination system 35 to the relay lens 39, the mask 36, and the projection lens 37 will be described with reference to FIG. As shown in the figure, an array lens illumination system 35, a relay lens 39, a mask 36, and a projection lens 37 are arranged on the optical path of the laser light.

As shown in FIGS. 2 and 3, the array lens illumination system 35 includes two cylindrical array lenses 35a,
35b in the mutually direction intersecting perpendicularly and is obtained by spaced L _0.

These cylindrical array lenses 35
a, each of 35b condensing surface 40 (shown in FIG. 2) is adapted to match the cylindrical array lens 35b on the same surface where the distance L _1.

Further, these cylindrical array lenses 3
The condensing surfaces 40 of the lenses 5a and 35b are imaged on the surface of the entrance pupil (aperture) 41 of the projection lens 37 by the relay lens 39, whereby the telecentric condition for the projection lens 37 is established. 35, a relay lens 39, an entrance pupil 41, and a mask 3 for the projection lens 37.
6 are arranged.

With such a telecentric optical system, a reverse tapered orifice hole having an axis perpendicular to the plate surface of the orifice plate 20 is formed. The mask 36 is formed in an elongated rectangular shape as shown in FIGS. 4 (a) and 5 and a plurality of circular openings 36a are arranged in a line at a predetermined pitch to form an orifice hole of the ink jet printer in the longitudinal direction. Is formed.

The circular opening 3 formed in the mask 36
6a may not be in a line but may be in a staggered shape, and the point is not limited.

In order to irradiate the mask 36 with laser light with a uniform intensity distribution, the up collimator 32
Has a function of converting the laser light output from the excimer laser oscillator 30 into a band-like beam shape for irradiating all the circular openings 36 a on the mask 36.

The beam size of the laser beam on the mask 36 is determined by the focal length of the array lens illumination system 35 and the relay lens 39 and the width of the array lens illumination system 35 as shown in FIG.
The XY size is determined as shown in FIG.

The relationship between the distance and the focal length of the array lens illumination system 35, the relay lens 39, the mask 36 and the projection lens 37 is specifically shown as follows.

Each cylindrical array lens 35a, 3
_F 0 The respective focal lengths of 5b, _{f 1,} a focal length of _{f 2} of the relay lens 39, the focal distance _{f 3} of the projection lens, width W of each cylindrical array lenses 35a, 35b units array lenses, these cylindrical array Assuming that the number of columns of the lenses 35a and 35b is N, the size of the laser beam projected onto the mask 36 is XY as shown in FIG. 4A, and the magnification of the projection lens 37 is M, each cylindrical array as shown in FIG. lens 35a, 35b interval _{L 0} of the distance _{L 0 = f 0 -f 1 ...} (1) becomes, from the array lens illumination system 35 to its focal point becomes _{L 1 = f 1 ... (2} ) .

[0035] Also, the diameter d of the relay lens _{39, d = W (N + L} 2 / L 1 -1) ... (3) become.

Each cylindrical array lens 35a, 3
The focal lengths f ₀ and f ₁ of 5b are as follows: f ₀ = f ₂ / X · W (4) f ₁ = f ₂ / Y · W (5)

Further, L ₃ = f ₂ (6) f ₂ = W (N−1) / NA _in / 2 (7) L ₂ = f ₂ (f ₂ / L ₄ +1) (8) NA _in = NA _out / M (9)

The pupil diameter EPD of the entrance pupil 41 of the projection lens 37
Is represented by EPD = L ₄ · NA _in · 2 (10)

Further, f ₃ = L (2 + M + 1 / M) (11) L ₆ = (1 + M) · f ₃ (12) L ₅ = f ₃ (13) L ₄ = (1 + 1 / M) · f _{3 -f 3 = f 3 / M} ... has become a relationship of (14).

Here, the mask 36 is disposed so as to have a conjugate positional relationship with the orifice plate 20 and the projection lens 37. Thus, the hole shape of the mask 36 is formed on the orifice plate 20 with high accuracy.

On the side of the mask 36 on which the laser beam is incident, as shown in FIGS. 4B and 5, a regulating member 61 for limiting the amount of the laser beam irradiating the mask 36 is provided on the mask 36. They are arranged at a predetermined distance from each other.
That is, the restricting member 61 is made of a plate material thicker than the mask 36 such as Al (aluminum) or W (tungsten) or Mo (molybdenum), which is a high-reflectance metal in the wavelength region of excimer laser light, or a refractory metal. 36
It is formed in approximately the same size as.

Further, in the regulating member 61, a plurality of regulating holes 61a slightly larger in diameter than the circular openings 36a are formed at the same pitch as the circular openings 36a formed in the mask 36.

The inner diameter D of the regulating hole 61a formed in the regulating member 61 is determined by the distance X between the mask 36 and the regulating member 61 and the NA of the illumination system. That is, D is expressed as follows: D = X · tan {sin ⁻¹ (NA)} · 2 + d + α (15) Here, d is the inner diameter of the circular opening 36a of the mask 36, and α is the error in the superposition of the mask 36 and the regulating member 61.

When the laser beam is directly irradiated on the mask 36 without the provision of the regulating member 61, the laser beam is applied to the mask 36 as shown in FIG.
Assuming that the irradiation is performed with the same width as the hole diameter of the mask 1a, the irradiation area A of the laser beam irradiated on the mask 36 is assumed.
_{1, A} 1 = a {L · D- (d / 2 ) 2 · π} · n ... (16). Here, L is the pitch interval of the circular openings 36a, n
Is the circular numerical aperture.

On the other hand, when the regulating member 61 is provided on the incident side of the mask 36, as shown in FIG.
Irradiation area _{A 2} of the laser light irradiating the mask 36 becomes _{A 2 = {(D / 2} ) 2 · π- (d / 2) 2 · π} · n ... (1 7). Here, A ₁ = A ₂₂ + A ₂₃ +... A _2n . Therefore, L = 2 mm, D = 0.5 mm, d =
If the distance is 0.3 mm, A ₁ : A ₂ = 7.4: 1 (18).
Is reduced to about one-seventh as compared with the case where the regulating member 61 is not provided.

That is, on the side of the mask 36 on which the laser beam is incident, the restriction hole 6 slightly larger than the circular opening 36a of the mask 36 whose inner diameter D is set by the above equation (15).
By arranging the regulating member 61 in which the mask 1a is formed, the size of the laser beam passing through the circular opening 36 of the mask 36a is not lost with respect to the circular opening 36a.
Since the size of the laser beam incident on the plate surface of the mask 36 can be made smaller than that of the circular aperture 36a, the thermal deformation of the mask 36 can be reduced accordingly. .

Since the regulating member 61 is formed of a plate material thicker than the mask 36, even if the irradiation amount of the laser beam to the regulating member 61 is larger than that of the mask 36, the regulating member 61 is less likely to be thermally deformed. Is formed of a material having a high reflectance of laser light or a material having a high melting point, heat deformation and heat loss are less likely to occur.

If a cooling gas such as dry air or nitrogen is allowed to flow through the gap formed between the regulating member 61 and the mask 36, the temperature rise between the mask 36 and the regulating member 61 is suppressed. The mask 36 and the regulating member 61
Can be prevented from heat deformation and heat loss.

On the other hand, the fine processing controller 4 shown in FIG.
Numeral 8 controls the entire hole drilling apparatus, and has the following functions. That is, the micromachining controller 48
It has a function of transmitting a laser control signal (trigger signal) to the excimer laser oscillator 30 and controlling the operation of the excimer laser oscillator 30.

The micro-machining controller 48 sends a rotation speed control signal to the rotation mechanism 44 of the image rotator 33, for example, during the irradiation of about 200 pulses of laser light necessary for drilling the orifice plate 20. Has a function of continuously rotating the image rotator 33.

The micro-machining controller 48 has a function of sending a fluence control signal to the variable attenuator 31 and adjusting the output intensity of the laser beam according to the number of pulses of the laser beam output from the excimer laser oscillator 30. Have.

The micromachining controller 48 has a function of transmitting a focus control signal to the autofocus unit 48 to form a mask image on the orifice plate 20.

The auto focus unit 48 includes
A camera 50 is connected, and has a function of calculating a focus shift based on a mask image on the orifice plate 20 captured by the camera 50 and transmitting a drive signal for eliminating the focus shift to the driver 51. The driver 51 has a function of operating the z stage 38c according to a drive signal from the autofocus unit 48.

The micro-machining controller 48 has a function of sending a position control signal to the xy driver 52 and operating the xy tables 38a and 38b so that the mask image is projected on the orifice plate 20. .

Next, the operation of the device configured as described above will be described.

The pulsed laser light output from the excimer laser oscillator 30 first enters the variable attenuator 31 and the output intensity is adjusted. Next, the up collimator 32 shapes the laser light emitted from the variable attenuator 31 so as to match (cover) the rectangular apertures of the array lenses 35a and 35b, and sends the laser light to the image rotator 33.

The image rotator 33 has a non-uniform intensity distribution of the laser beam output from the excimer laser oscillator 30.
Are continuously rotated during the irradiation of, for example, about 200 pulses of laser light required for drilling a hole in the orifice plate 20 to form a rotationally symmetric intensity distribution of the laser light on the incident surface of the array lens illumination system 35.

The laser light emitted from the image rotator 33 is reflected by the mirror 34 and enters the array lens illumination system 35. This laser light is transmitted to two cylindrical array lenses 35a, 3a of the array lens illumination system 35.
The light is condensed on the light condensing surface 40 by 5b, and is further irradiated on the mask 36 by the relay lens 39.

Then, since the light-collecting surface 40 of the array lens illumination system 35 is imaged on the surface of the entrance pupil 41 of the projection lens 37 by the relay lens 39, the laser light is
The orifice plate 20 is projected through the orifice plate 20 to form an orifice hole 15 in the orifice plate 20.

On the incident side of the mask 36, a regulating member 61 for regulating the amount of light incident on the mask 36 is arranged. Therefore, the mask 36 is not irradiated with laser light more than necessary, and thermal deformation and thermal damage are less likely to occur, so that the accuracy of the shape of the orifice hole 15 formed in the orifice plate 20 is prevented from lowering. Will be done.

Since the regulating member 61 provided on the upstream side of the mask 36 is formed of a plate material thicker than the mask 36, even if it is irradiated with a larger amount of laser light than the mask 36, it is less likely to be thermally deformed, and furthermore, the laser light The heat resistance can also be improved by using a material having a high reflectance with respect to the material or by using a material having a high melting point.

Further, since the regulating member 61 and the mask 36 are arranged with a predetermined gap therebetween, even if the regulating member 61 is irradiated with a laser beam and its temperature rises, the heat is not transferred to the mask 36.
However, when the power of the laser beam irradiating the regulating member 61 is large, the thermal effect on the regulating member 61 increases.

In such a case, by flowing a cooling gas through the gap between the regulating member 61 and the mask 36, the temperature rise of the regulating member 61 can be suppressed, and the heat deformation and heat loss thereof can be reduced.

A regulating hole 61 formed in the regulating member 61
The accuracy of a may be lower than that of the circular opening 36a of the mask 36. Therefore, since the regulating member 61 can be manufactured at a lower cost than the mask 36, even if the regulating member 61 is damaged by heat, the replacement cost can be reduced as compared with the case where the mask 36 is replaced.

FIG. 7 is a process chart showing a method for manufacturing a printer head according to the present invention.

First, after the adhesive 111 is applied to the head 101 of the ink jet printer as shown in FIG. 7A, the polymer material as a plate to be processed is applied thereto as shown in FIG. Polyimide sheet 112 made of
Glue. The plate to be processed is not limited to the polyimide sheet 112, but may be polysulfone or the like.

Next, the head 101 is moved to z shown in FIG.
After positioning and mounting on the stage 38c, FIG.
As shown in FIG.
A, 36B and projection lens 37 (both shown in FIG. 1)
Is irradiated with the laser beam that has passed through. Thereby, the orifice hole 112a having a desired shape can be formed in the polyimide sheet 112 with high precision as shown in FIG.

The present invention is not limited to the above embodiment, but may be modified as follows.

For example, although only one regulating member is provided on the incident side of the mask, a plurality of regulating members may be provided to reduce the thermal effect on the mask.

[0070]

As described above in detail, according to the present invention, a restricting member for limiting the irradiation amount of the laser beam for irradiating the mask is provided on the incident side of the mask. It is possible to provide a method of manufacturing a printer head, an apparatus for manufacturing the same, and a hole processing apparatus capable of preventing thermal deformation and damage due to excessive irradiation.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of a hole drilling apparatus according to the present invention.

FIG. 2 is a specific configuration diagram from the array lens illumination system to the mask and the projection lens.

FIG. 3 is a configuration diagram of a part of an array lens illumination system.

FIG. 4 is a view showing the shapes of a mask and a regulating member.

FIG. 5 is a perspective view of the mask and a regulating member arranged on the incident side.

FIG. 6 is a diagram comparing an irradiation area between a case where laser light is directly irradiated on a mask and a case where irradiation is performed via a regulating member.

FIG. 7 is a process chart for manufacturing the printer head of the present invention.

FIG. 8 is a view for explaining a method of processing an orifice hole of a conventional ink jet printer.

FIG. 9 is a view for explaining conditions necessary for ink ejection from the orifice hole.

FIG. 10 is a diagram showing a deformation amount of a mask.

[Explanation of symbols]

 Reference Signs List 20: orifice plate, 30: excimer laser oscillator, 31: variable attenuator, 32: up collimator, 33: image rotator, 35: array lens illumination system, 36: mask, 37: projection lens, 61: regulating member, 61a: regulation Hole

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Isao Suzuki 6-78, Minamicho, Mishima-shi, Shizuoka Toshiba Tec Co., Ltd. Mishima Plant (72) Inventor Masashi Shimozato 6-78, Minami-cho, Mishima-shi, Shizuoka Toshiba Tec F-term in Mishima Plant (reference) 2C057 AF93 AG05 AG12 AP02 AP13 AP23 AQ03 AQ06 BA03

Claims (5)

[Claims] A step of bonding a processing plate made of a polymer material to a printer head housing having a plurality of ink grooves formed therein; a step of shaping a laser beam into a predetermined beam shape; Passing the laser light through a mask in which a hole pattern is created corresponding to the shape of the opening of the processing plate; and limiting the irradiation amount of the laser light incident on the mask before the step of passing the laser light. And a step of forming an image of the laser beam passing through the mask on the plate to be processed by an imaging optical system and opening the plate to be processed. . 2. A shaping optical system for shaping a laser beam into a predetermined beam shape, the shaping optical system comprising: a printer head manufacturing apparatus for forming an ink ejection hole in a work plate provided in a printer head housing; A mask having a hole pattern corresponding to the shape of the ink ejection hole formed on the optical path of the laser beam from the laser beam, and a laser beam disposed on the incident side of the mask where the laser light is incident and irradiating the mask An apparatus for manufacturing a printer head, comprising: a regulating member for limiting an irradiation amount of the laser beam; and an image forming optical system for forming an image of the laser beam passing through the mask on the plate to be processed. 3. The regulating member has a regulating hole larger than the hole pattern, which does not reduce the amount of laser light passing through the hole pattern of the mask. 3. The printer head manufacturing apparatus according to 2. 4. The apparatus according to claim 2, wherein the restricting member has a structure that is less thermally deformed than the mask. 5. A hole forming apparatus for forming a hole in a workpiece, comprising: a shaping optical system for shaping a laser beam into a predetermined beam shape; and a shaping optical system arranged on an optical path of laser light from the shaping optical system. A mask on which a hole pattern corresponding to the shape is formed; a regulating member disposed on an incident side of the mask where the laser light is incident; a regulating member for limiting an irradiation amount of the laser light for irradiating the mask; An image forming optical system for forming an image of the laser beam on the workpiece.