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Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜とA base film made of a nonmagnetic alloy containingCo-Cr-Pt-Ta Co-Cr-Pt-Ta系合金から成る磁性膜との間にBetween magnetic films made of alloyCo-Cr-Pt Co-Cr-Pt合金から成る中間膜が存在し、上記There is an interlayer film made of an alloy,Co-Cr-Pt Co-Cr-Pt合金から成る磁性中間膜の組成が、The composition of the magnetic intermediate film made of an alloy isCr Cr濃度：concentration:1818〜~24 at.%24 at.%、,Pt Pt濃度：concentration:88〜~20 at.%20 at.%、残部がThe restCo Coであることを特徴とする磁気記録媒体。A magnetic recording medium characterized by the above.Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜とA base film made of a nonmagnetic alloy containingCo-Cr-Pt-Ta Co-Cr-Pt-Ta系合金から成る磁性膜との間にBetween magnetic films made of alloyCo-Cr-Pt Co-Cr-Pt合金から成る中間膜が存在し、上記下地膜と中間膜の間にThere is an interlayer film made of an alloy, and the gap between the base film and the interlayer filmCrCrを主成分として、As the main component,MoMo、,WWからなる群より選ばれた少なくとも１種の元素を含む第２の下地膜を形成したことを特徴とする磁気記録媒体。A magnetic recording medium comprising a second underlayer containing at least one element selected from the group consisting of:上記the aboveCo-Cr-Pt-Ta Co-Cr-Pt-Ta系合金から成る磁性膜に含まれるIncluded in magnetic films made of alloysPtPtの濃度がConcentration of1212〜~20 at.%20 at.%の範囲にあり，かつ，上記第And in the above22の下地膜に含まれるIncluded in the underlying filmMoMoとWhenWWの濃度の合計がThe total concentration of1616〜~50 at.%50 at.%の範囲にあることを特徴とする請求項２に記載の磁気記録媒体。The magnetic recording medium according to claim 2, wherein the magnetic recording medium is in the range.Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜とA base film made of a nonmagnetic alloy containingCo-Cr-Pt-B Co-Cr-Pt-B系合金から成る磁性膜との間にBetween magnetic films made of alloyCo-Cr-Pt Co-Cr-Pt合金から成る中間膜が存在し、上記There is an interlayer film made of an alloy,Co-Cr-Pt Co-Cr-Pt合金から成る磁性中間膜の組成が、The composition of the magnetic intermediate film made of an alloy isCr Cr濃度：concentration:1818〜~24 at.%24 at.%、,PtPt濃度：concentration:88〜~20 at.%20 at.%、残部がThe restCo Coであることを特徴とする磁気記録媒体。A magnetic recording medium characterized by the above.Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜とA base film made of a nonmagnetic alloy containingCo-Cr-Pt-B Co-Cr-Pt-B系合金から成る磁性膜との間にBetween magnetic films made of alloyCo-Cr-Pt Co-Cr-Pt合金から成る中間膜が存在し、上記下地膜と中間膜の間にThere is an interlayer film made of an alloy, and the gap between the base film and the interlayer filmCrCrを主成分として、As the main component,MoMo、,WWからなる群より選ばれた少なくとも１種の元素を含む第２の下地膜を形成したことを特徴とする磁気記録媒体。A magnetic recording medium comprising a second underlayer containing at least one element selected from the group consisting of:Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜とA base film made of a nonmagnetic alloy containingCo-Cr-Pt-Ta Co-Cr-Pt-Ta系合金から成る磁性膜との間にBetween magnetic films made of alloyCo-Cr-Pt Co-Cr-Pt合金から成る中間膜が存在し、上記磁性膜は、An intermediate film made of an alloy exists, and the magnetic film isNbNb、,BB、,TiTiからなる群より選ばれた少なくとも１種の元素を有することを特徴とする磁気記録媒体。A magnetic recording medium comprising at least one element selected from the group consisting of:上記磁性膜は、上記１種の元素をThe magnetic film contains the one element described above.11〜~3 at.%3 at.%有することを特徴とする請求項６に記載の磁気記録媒体。The magnetic recording medium according to claim 6, further comprising:上記the aboveCo-Cr-Pt Co-Cr-Pt合金から成る磁性中間膜の組成が、The composition of the magnetic intermediate film made of an alloy isCr Cr濃度：concentration:1818〜~24 at.%24 at.%、,Pt Pt濃度：concentration:88〜~20 at.%20 at.%、残部がThe restCo Coであることを特徴とする請求項７に記載の磁気記録媒体。The magnetic recording medium according to claim 7, wherein:Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜と、該下地膜上に形成されたAnd a base film made of a nonmagnetic alloy containingCo-Cr-Pt-Ta Co-Cr-Pt-Ta系合金から成る磁性膜と、該下地膜と該磁性膜との間にA magnetic film made of an alloy, and between the base film and the magnetic filmCo-Cr-Pt Co-Cr-Pt合金から成る中間膜とを有する磁気記録媒体において、該In a magnetic recording medium having an intermediate film made of an alloy,Co-Cr-Pt-TaCo-Cr-Pt-Ta系磁性膜のMagnetic filmTaTa濃度が該下地膜表面近傍から膜の成長方向に向かって高くなっていることを特徴とする磁気記録媒体。A magnetic recording medium characterized in that the concentration increases from the vicinity of the surface of the underlying film toward the growth direction of the film.Cr CrとWhenTi Tiを含む非磁性合金から成る下地膜と、該下地膜上に形成されたAnd a base film made of a nonmagnetic alloy containingCo-Cr-Pt-B Co-Cr-Pt-B系合金から成る磁性膜と、該下地膜と該磁性膜との間にA magnetic film made of an alloy, and between the base film and the magnetic filmCo-Cr-Pt Co-Cr-Pt合金から成る中間膜とを有する磁気記録媒体において、該In a magnetic recording medium having an intermediate film made of an alloy,Co-Cr-Pt-B Co-Cr-Pt-B系磁性膜のMagnetic filmB B濃度が該下地膜表面近傍から膜の成長方向に向かって高くなっていることを特徴とする磁気記録媒体。A magnetic recording medium characterized in that the concentration increases from the vicinity of the surface of the underlying film toward the growth direction of the film.
JP11327763A1998-11-201999-11-18Magnetic recording medium and magnetic disk device
PendingJP2000215438A
(en)
High density magnetic recording medium having homogeneous coercive force distribution of local region, fine crystal grain, and homogeneous crystal grain size distribution, and its manufacturing method
