JP2000206089A - Solid electrolyte type carbon dioxide gas sensor - Google Patents

Solid electrolyte type carbon dioxide gas sensor

Info

Publication number
JP2000206089A
JP2000206089A JP11007918A JP791899A JP2000206089A JP 2000206089 A JP2000206089 A JP 2000206089A JP 11007918 A JP11007918 A JP 11007918A JP 791899 A JP791899 A JP 791899A JP 2000206089 A JP2000206089 A JP 2000206089A
Authority
JP
Japan
Prior art keywords
solid electrolyte
sensor element
electrode
carbon dioxide
counter electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP11007918A
Other languages
Japanese (ja)
Inventor
Hironori Hatano
博憲 波多野
Takayori Atsumi
孝依 渥美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yazaki Corp
Original Assignee
Yazaki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yazaki Corp filed Critical Yazaki Corp
Priority to JP11007918A priority Critical patent/JP2000206089A/en
Publication of JP2000206089A publication Critical patent/JP2000206089A/en
Abandoned legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To achieve stable measurement for a long time by equipping a sensor element consisting of a detection electrode, a solid electrolyte layer, a counted electrode, and a reference element consisting of a reference electrode, the solid electrolyte layer, and a counter electrode. SOLUTION: A composite sensor element is provided with a detection electrode 3, with a metal carbonate layer 2 at its periphery directly in direct contact with a solid electrolyte layer 1, a counter electrode 4, and a reference electrode 5. In the sensor element consisting of the detection electrode (a carbonate layer) 3, the solid electrolyte 1, and the counter electrode 4, and the reference element consisting of the reference electrode 5, the solid electrolyte layer 1, and the counter electrode 4, the solid electrolyte layer 1 and the counter electrode 4 are common. The detection electrode 3 and the reference electrode 4 of the sensor element A are of the same size. Also, the gas sensor is separately provided with a heater through a substrate. As a result, by correcting a potential difference or current due to the sensor element by the potential difference or current according to the reference element, the deterioration and aging as a solid electrolyte type carbon dioxide gas sensor can be canceled out.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、固体電解質型二酸
化炭素ガスセンサ技術に関する。
The present invention relates to a solid electrolyte type carbon dioxide gas sensor technology.

【0002】[0002]

【従来の技術】固体電解質型二酸化炭素ガスセンサは、
感度が良好で、コンパクト化が可能であるため、様々な
分野へ応用に向けて研究開発が行われている。図7に一
般的な固体電解質型二酸化炭素ガスセンサ素子のモデル
断面図を示す。
2. Description of the Related Art A solid electrolyte type carbon dioxide gas sensor is
Since it has good sensitivity and can be made compact, research and development are being conducted to apply it to various fields. FIG. 7 shows a model sectional view of a general solid electrolyte type carbon dioxide gas sensor element.

【0003】Na+イオン伝導性を有するNASICO
Nなどの固体電解質からなる層(固体電解質層α)を挟
んで、金属炭酸塩からなる層(金属炭酸塩層β)で覆わ
れた検知極γ及び対極δが配されていて、それぞれの電
極にはリード線が接続されている。なお、このセンサ素
子は使用時にヒータ(図示しない)により加熱されて固
体電解質層がイオン伝導を行う温度領域(400℃)に
保たれる。
[0003] NASICO having Na + ion conductivity
A detection electrode γ and a counter electrode δ covered with a layer made of a metal carbonate (metal carbonate layer β) are arranged with a layer made of a solid electrolyte such as N (solid electrolyte layer α) interposed therebetween. Is connected to a lead wire. In use, the sensor element is heated by a heater (not shown) during use, and is maintained in a temperature region (400 ° C.) where the solid electrolyte layer conducts ions.

【0004】このような従来技術に係るセンサ素子を用
い、各種濃度の二酸化炭素を含む空気に対する出力(E
MF(mV))の変化を図8に示す。センサ素子出力は
二酸化炭素濃度の対数値に対して良好な直線関係が得ら
れることが理解される。
Using such a sensor element according to the prior art, the output (E) to air containing various concentrations of carbon dioxide
MF (mV)) is shown in FIG. It is understood that a good linear relationship is obtained between the sensor element output and the logarithmic value of the carbon dioxide concentration.

【0005】しかし、このような固体電解質型二酸化炭
素ガスセンサ素子は経時変化が大きく、また不使用時に
非加熱の状態で放置した場合には感度特性が著しく損な
われると云った欠点を有する。
[0005] However, such a solid electrolyte type carbon dioxide gas sensor element has a drawback that the change with time is large and the sensitivity characteristic is significantly impaired when left unused and not heated.

【0006】図9にこのような従来技術に係るセンサ素
子の使用による経時変化を350ppmの二酸化炭素を
有する空気に対する出力値で調べた結果を、また図10
には30℃、RH(相対湿度)90%条件で未使用(ヒ
ータ加熱を行わない)状態で放置した場合の経時変化
を、350ppmの二酸化炭素を有する空気に対する出
力値で調べた結果を、それぞれ示す。
FIG. 9 shows the results of examining the change over time due to the use of such a sensor element according to the prior art using the output value with respect to air containing 350 ppm of carbon dioxide, and FIG.
The results of examining the changes over time when left unused (without heating the heater) at 30 ° C. and 90% RH (relative humidity) using the output value for air containing 350 ppm of carbon dioxide are shown in FIG. Show.

【0007】これら結果から、従来技術に係る固体電解
質型二酸化炭素ガスセンサでは、経時変化による劣化が
大きく、正確な測定を行うために何らかの補正を行う必
要があることが判る。
[0007] From these results, it can be seen that the solid electrolyte type carbon dioxide gas sensor according to the prior art is greatly deteriorated due to aging, and it is necessary to make some correction in order to perform accurate measurement.

【0008】このため、起電方向に対して逆方向の電圧
を印加し特性の回復をはかる方法が提案されているが、
この方法によってもセンサ素子の電位発生の核となる炭
酸塩の生成は難しく、実用的でない。
For this reason, there has been proposed a method of restoring characteristics by applying a voltage in a direction opposite to the direction of electromotive force.
Even with this method, it is difficult to generate a carbonate serving as a nucleus for generating a potential of the sensor element, which is not practical.

【0009】また、経時変化を少なくするために、素子
の参照極に酸素イオン伝導性の材料を付加すると云った
対策を行うことが提案されているが、検知極の炭酸塩は
比較的耐熱性が低いため、参照極の酸素イオン伝導性材
料が充分な導電性を有する温度近辺の高温での使用によ
り炭酸塩の劣化が生じ、結果的には短命なセンサになっ
てしまう。
It has been proposed to take measures such as adding an oxygen ion conductive material to the reference electrode of the element in order to reduce the change with time. However, the carbonate of the detection electrode has a relatively high heat resistance. , The use of a high temperature near the temperature at which the oxygen ion conductive material of the reference electrode has sufficient conductivity causes deterioration of the carbonate, resulting in a short-lived sensor.

【0010】一方、マイクロコンピュータなどにより、
センサ素子出力値に何らかの演算を行い補正を行うこと
も検討されているが、測定範囲の確保、精度(分解能を
含む)保証が必要なことからこれら補正回路のコストが
高く、また、センサ自体の小型化が困難となり、さら
に、これら補正回路に要する電力が大きいことからセン
サの電池駆動が不可能となり、あるいは、電池寿命が極
端に短くなると云った欠点があった。
On the other hand, a microcomputer or the like
It is also considered to perform some kind of calculation on the sensor element output value to perform correction, but the cost of these correction circuits is high because the measurement range must be secured and the accuracy (including resolution) must be guaranteed. It is difficult to reduce the size, and furthermore, the power required for these correction circuits is large, so that the sensor cannot be driven by a battery, or the battery life is extremely shortened.

【0011】[0011]

【発明が解決しようとする課題】本発明は、上記した従
来の問題点を改善する、すなわち、長期的に安定した測
定が可能で、また、不使用時などの常温放置による影響
の小さい固体電解質型二酸化炭素ガスセンサを提供する
ことを目的とする。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems, that is, a solid electrolyte which enables stable measurement over a long period of time and which is less affected by standing at room temperature when not in use. It is an object of the present invention to provide a carbon dioxide gas sensor.

【0012】[0012]

【課題を解決するための手段】本発明の固体電解質型二
酸化炭素ガスセンサは上記課題を解決するため、請求項
1に記載の通り、周囲に金属炭酸塩層を有する検知極、
固体電解質層及び対極からなるセンサ素子と、参照極、
固体電解質層及び対極とからなる参照素子とを有する構
成を有する。
According to a first aspect of the present invention, there is provided a solid electrolyte type carbon dioxide gas sensor according to the present invention.
A sensor element comprising a solid electrolyte layer and a counter electrode, a reference electrode,
It has a configuration having a solid electrolyte layer and a reference element comprising a counter electrode.

【0013】[0013]

【発明の実施の形態】本発明の固体電解質型二酸化炭素
ガスセンサは上記構成により、センサ素子による電位差
あるいは電流を、参照素子による電位差あるいは電流に
よって補正することにより、固体電解質型二酸化炭素ガ
スセンサとしての劣化、経時変化をキャンセルすること
ができ、そのため、常温放置による劣化の影響を排除
し、あるいは長期間に亘っての正確な測定が可能とな
る。
BEST MODE FOR CARRYING OUT THE INVENTION The solid electrolyte type carbon dioxide gas sensor of the present invention has the above-described structure, and corrects a potential difference or current caused by a sensor element by a potential difference or current caused by a reference element. Therefore, it is possible to cancel the change with the passage of time, so that the influence of deterioration due to standing at room temperature can be eliminated or accurate measurement can be performed over a long period of time.

【0014】なお、上記構成において、参照素子の参照
極には金属炭酸塩が接していないため、本来は参照素子
の参照極と対極との間に起電力が生じないはずである。
しかしながら、上記の参照素子の出力(電位差あるいは
電流)によって、センサ素子出力(電位差あるいは電
流)を補正すると、その詳細な理由は不明であるもの
の、上述のように正確で安定した測定が可能となる。
In the above configuration, since no metal carbonate is in contact with the reference electrode of the reference element, no electromotive force should be generated between the reference electrode and the counter electrode of the reference element.
However, when the output (potential difference or current) of the sensor element is corrected by the output (potential difference or current) of the reference element, accurate and stable measurement can be performed as described above, although the detailed reason is unknown. .

【0015】本発明の固体電解質型二酸化炭素ガスセン
サは、例えば、センサ素子と参照素子との固体電解質層
及び対極が共通とする、あるいは、センサ素子と参照素
子との対極が共通とする、いわゆる複合センサ素子から
なるものであっても良い。このとき、製造が容易にな
り、同時にコンパクトなセンサとすることが可能とな
る。
The solid electrolyte type carbon dioxide gas sensor of the present invention is, for example, a so-called composite in which the solid electrolyte layer and the counter electrode of the sensor element and the reference element are common, or the counter electrode of the sensor element and the reference element are common. It may be composed of a sensor element. At this time, manufacture becomes easy, and at the same time, a compact sensor can be obtained.

【0016】本発明において、検知極及び参照極の形
状、材質は同じものであることが望ましい。また、検知
極周囲に配される金属炭酸塩層としては、通常、炭酸リ
チウムを主とし、炭酸バリウム、炭酸カルシウム、炭酸
ストロンチウムを添加してさらに耐水性を向上させた炭
酸塩混合物ないし共晶混合物を、例えば溶融して形成す
るが、その他、固体電解質型二酸化炭素ガスセンサにお
いて用いられる金属炭酸塩すべてを用いることができ
る。
In the present invention, it is desirable that the shape and material of the detection electrode and the reference electrode are the same. Further, as the metal carbonate layer disposed around the sensing electrode, usually, a carbonate mixture or a eutectic mixture in which lithium carbonate is mainly used and barium carbonate, calcium carbonate, and strontium carbonate are added to further improve water resistance. Is formed by, for example, melting, but all other metal carbonates used in the solid electrolyte type carbon dioxide gas sensor can be used.

【0017】なお、参照極の履歴、熱特性を検知極と同
じにするため、炭酸ガスその他環境内に含まれるガスに
対して対極・参照極間に電位差を生じないような物質か
らなる層を参照極周囲に設けても良い。検知極、参照
極、対極は、金、白金等の貴金属、あるいは、これら貴
金属と各種セラミックからなるサーメットからなること
が、耐熱性、耐久性の点で好ましい。
In order to make the history and thermal characteristics of the reference electrode the same as those of the detection electrode, a layer made of a substance that does not cause a potential difference between the counter electrode and the reference electrode with respect to carbon dioxide gas and other gases contained in the environment. It may be provided around the reference electrode. The detection electrode, the reference electrode, and the counter electrode are preferably made of a noble metal such as gold or platinum, or a cermet made of these noble metals and various ceramics in terms of heat resistance and durability.

【0018】なお、上記センサ素子は固体電解質のナト
リウムイオン伝導に適した温度に保たれる必要がある。
そのためヒータを、例えば、アルミナ、ムライトからな
る基板を介して設けても良い。
The sensor element needs to be maintained at a temperature suitable for sodium ion conduction of the solid electrolyte.
Therefore, the heater may be provided via a substrate made of, for example, alumina or mullite.

【0019】[0019]

【実施例】以下に本発明の固体電解質型二酸化炭素ガス
センサについて具体的に説明する。なお、下記に用いた
各センサ素子は下記のようにして作製した。市販のリン
酸ナトリウム、ケイ酸ジルコニウム及び二酸化ケイ素を
所定量取り、ボールミルにて24時間粉砕した。この粉
体に圧力を加えて円形状に成形した後1200℃・48
時間の焼成し、次いで、0.5mm厚に研磨した後カッ
トして得たNASICONチップを固体電解質として用
いた。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The solid electrolyte type carbon dioxide gas sensor of the present invention will be specifically described below. In addition, each sensor element used below was produced as follows. A predetermined amount of commercially available sodium phosphate, zirconium silicate and silicon dioxide was taken and pulverized by a ball mill for 24 hours. After applying pressure to this powder and forming it into a circular shape,
A NASICON chip obtained by sintering for a time, polishing to a thickness of 0.5 mm, and then cutting was used as a solid electrolyte.

【0020】検知極、参照極及び対極は、金ペーストを
スクリーン印刷してして形成した。さらにチップにスパ
ッタ法で白金ヒータを製膜したアルミナ基板を白金ペー
ストを用いて焼き付けた。各電極には白金リード線を白
金ペーストを用いて接続した。なお、検知極周囲には溶
融した炭酸リチウムを用いて金属炭酸塩層を形成し、検
知極周囲を覆った。
The detection electrode, the reference electrode, and the counter electrode were formed by screen printing gold paste. Further, an alumina substrate having a platinum heater formed on the chip by sputtering was baked using a platinum paste. A platinum lead wire was connected to each electrode using a platinum paste. Note that a metal carbonate layer was formed around the sensing electrode using molten lithium carbonate to cover the sensing electrode.

【0021】(実施例1)図1に本発明に係る固体電解
質型二酸化炭素ガスセンサ(実施例1)のセンサ素子A
のモデル断面図を示す。
(Embodiment 1) FIG. 1 shows a sensor element A of a solid electrolyte type carbon dioxide gas sensor according to the present invention (Embodiment 1).
FIG.

【0022】このものは固体電解質層1に直接接して、
金属炭酸塩層2を周囲に有する検知極3、対極4、及
び、参照極5を有する複合センサ素子であって、検知極
(炭酸塩層)、固体電解質層及び対極からなるセンサ素
子と、参照極、固体電解質層及び対極の参照素子とにお
いて、固体電解質層及び対極がそれぞれ共通となってい
る。なお、このセンサ素子Aの検知極3及び参照極4は
同じ大きさである。また、別途基板を介してヒータを備
えているが図1では図示していない。
This is in direct contact with the solid electrolyte layer 1,
A composite sensor element having a sensing electrode 3, a counter electrode 4, and a reference electrode 5 having a metal carbonate layer 2 around the sensor element, the sensor element including a sensing electrode (carbonate layer), a solid electrolyte layer, and a counter electrode. The solid electrolyte layer and the counter electrode are common to the electrode, the solid electrolyte layer, and the reference element for the counter electrode, respectively. The detection electrode 3 and the reference electrode 4 of the sensor element A have the same size. Further, a heater is separately provided via a substrate, but is not shown in FIG.

【0023】この複合センサ素子を用い、各種濃度の二
酸化炭素を含む空気に対する出力(EMF(mV))の
変化を調べた結果を図2に示す。なお、測定に際し、セ
ンサ素子はヒータにより400℃に保った(以下同
じ)。
FIG. 2 shows the results of examining changes in the output (EMF (mV)) with respect to air containing various concentrations of carbon dioxide using the composite sensor element. In the measurement, the sensor element was kept at 400 ° C. by a heater (the same applies hereinafter).

【0024】図2により、このセンサ素子Aの測定可能
範囲は従来技術に係るセンサ素子と同じであり、センサ
素子出力と、二酸化炭素ガス濃度の対数値とは良好な直
線関係にあることが判る。
FIG. 2 shows that the measurable range of the sensor element A is the same as that of the sensor element according to the prior art, and that the output of the sensor element and the logarithmic value of the carbon dioxide gas concentration have a good linear relationship. .

【0025】次いで使用せずに非加熱の状態で放置した
場合での感度特性の変化について調べた。30℃、RH
(相対湿度)90%条件で未使用(ヒータ加熱を行わな
い状態)で放置した場合(高温多湿の夏季での放置を想
定)の経時変化を、350ppmの二酸化炭素を有する
空気に対する出力値で調べた結果を図3に示す。
Next, the change in the sensitivity characteristics when left unused and not used was examined. 30 ° C, RH
(Relative humidity) The change with time when left unused (without heating the heater) under the condition of 90% (assumed to be left in the hot and humid summer) is examined by the output value with respect to air containing 350 ppm of carbon dioxide. The results are shown in FIG.

【0026】これら図3により、本発明に係るセンサ素
子Aが常温放置によっても、正確な測定が可能であるこ
とが判る。なお、別途、センサ素子Aと同様に作製した
センサ素子を用いて、使用状態での経時変化を調べたと
ころ、その結果、このセンサ素子の出力は従来技術に係
るセンサ素子より安定し、ドリフトが遙かに小さいこと
が確認された。
FIG. 3 shows that the sensor element A according to the present invention can accurately measure even when left at room temperature. In addition, when a change with time in a use state was examined using a sensor element manufactured similarly to the sensor element A, the output of the sensor element was more stable than the sensor element according to the related art, and the drift was lower. It was confirmed that it was much smaller.

【0027】(実施例2)図4に本発明に係る固体電解
質型二酸化炭素ガスセンサ(実施例2)のセンサ素子B
のモデル断面図を示す。このものは固体電解質層1及び
1’に直接接して、金属炭酸塩層2を周囲に有する検知
極3、対極4、及び、参照極5を有する複合センサ素子
であって、検知極(炭酸塩層)、固体電解質層及び対極
からなるセンサ素子と、参照極、固体電解質層及び対極
の参照素子とにおいて、対極が共通となっている。さら
に、アルミナ基板を介してヒータを備えている。なお、
このセンサ素子Aの検知極3及び参照極4、固体電解質
素1及び1’はそれぞれ同じ大きさである。
(Embodiment 2) FIG. 4 shows a sensor element B of a solid electrolyte type carbon dioxide gas sensor (Embodiment 2) according to the present invention.
FIG. This is a composite sensor element having a sensing electrode 3, a counter electrode 4, and a reference electrode 5 directly surrounding the solid electrolyte layers 1 and 1 'and having a metal carbonate layer 2 around the sensing electrode (carbonate). The sensor element comprising the layer, the solid electrolyte layer and the counter electrode and the reference element for the reference electrode, the solid electrolyte layer and the counter electrode have a common counter electrode. Further, a heater is provided via an alumina substrate. In addition,
The detection electrode 3, the reference electrode 4, and the solid electrolyte elements 1 and 1 'of the sensor element A have the same size.

【0028】この複合センサ素子を用い、各種濃度の二
酸化炭素を含む空気に対する出力(EMF(mV))の
変化を調べた結果を図5に示す。図5により、このセン
サ素子Aの測定可能範囲は従来技術に係るセンサ素子と
同じであり、センサ素子出力と、二酸化炭素ガス濃度の
対数値とは良好な直線関係にあることが判る。
FIG. 5 shows the results of examining changes in the output (EMF (mV)) with respect to air containing various concentrations of carbon dioxide using this composite sensor element. From FIG. 5, it can be seen that the measurable range of the sensor element A is the same as that of the sensor element according to the related art, and the output of the sensor element and the logarithmic value of the carbon dioxide gas concentration have a good linear relationship.

【0029】次いで使用せずに非加熱の状態で放置した
場合でのセンサ素子出力の変化について調べた。30
℃、RH(相対湿度)90%条件で未使用(ヒータ加熱
を行わない状態)で放置した場合(高温多湿の夏季での
放置を想定)の経時変化を、350ppmの二酸化炭素
を有する空気に対する出力値で調べた結果を図6に示
す。
Next, the change in the sensor element output when not used and left unheated was examined. 30
The change with time when left unused (assuming high temperature and high humidity in the summer) when left unused (without heating the heater) under the conditions of ° C and RH (relative humidity) 90% is the output to air containing 350 ppm of carbon dioxide. FIG. 6 shows the results obtained by examining the values.

【0030】これら図6により、本発明に係るセンサ素
子Aが常温放置によっても、正確な測定が可能であるこ
とが判る。なお、センサ素子Aと同様にして別途作製し
たセンサ素子を用いて、使用状態での経時変化を調べた
ところ、その結果、このセンサ素子の出力は従来技術に
係るセンサ素子より安定し、ドリフトが遙かに小さいこ
とが確認された。
It can be seen from FIG. 6 that the sensor element A according to the present invention can perform accurate measurement even at room temperature. In addition, when a time-dependent change in use condition was examined using a sensor element separately manufactured in the same manner as the sensor element A, the output of this sensor element was more stable than the sensor element according to the related art, and the drift was lower. It was confirmed that it was much smaller.

【0031】[0031]

【発明の効果】本発明の固体電解質型二酸化炭素ガスセ
ンサは、周囲に金属炭酸塩層を有する検知極、固体電解
質層及び対極からなるセンサ素子と、参照極、固体電解
質層及び対極をからなる参照素子とを有するものであ
り、使用時の経時変化が少なく、さらに、不使用時の劣
化も少なく、さらに補正のための高価で複雑な回路が不
要で、その結果消費電力が少ないため、長期間の電池駆
動とコンパクト化が可能な優れた固体電解質型二酸化炭
素ガスセンサである。
The solid electrolyte type carbon dioxide gas sensor of the present invention has a sensor element comprising a sensing electrode, a solid electrolyte layer and a counter electrode having a metal carbonate layer around the sensor element, and a reference element comprising a reference electrode, a solid electrolyte layer and a counter electrode. The element has little change over time during use, furthermore, there is little deterioration when not in use, and no expensive and complicated circuit for correction is required. It is an excellent solid electrolyte type carbon dioxide gas sensor that can be driven by a battery and can be made compact.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る固体電解質型二酸化炭素ガスセン
サAのセンサ素子のモデル断面図である。
FIG. 1 is a model sectional view of a sensor element of a solid oxide carbon dioxide gas sensor A according to the present invention.

【図2】図1のセンサ素子を用い、各種濃度の二酸化炭
素を含む空気に対する出力(EMF(mV))の変化を
調べた結果を示す図である。
FIG. 2 is a diagram showing the results of examining changes in the output (EMF (mV)) of air containing various concentrations of carbon dioxide using the sensor element of FIG.

【図3】図1のセンサ素子を使用せずに非加熱の状態で
放置した場合でのセンサ素子出力の変化について調べた
結果を示す図である。
FIG. 3 is a diagram showing a result of examining a change in sensor element output when the sensor element of FIG. 1 is left in a non-heated state without being used.

【図4】本発明に係る固体電解質型二酸化炭素ガスセン
サBのセンサ素子のモデル断面図である。
FIG. 4 is a model sectional view of a sensor element of a solid oxide carbon dioxide gas sensor B according to the present invention.

【図5】図4のセンサ素子を用い、各種濃度の二酸化炭
素を含む空気に対する出力(EMF(mV))の変化を
調べた結果を示す図である。
5 is a diagram showing the results of examining changes in output (EMF (mV)) with respect to air containing various concentrations of carbon dioxide using the sensor element of FIG. 4;

【図6】図4のセンサ素子を使用せずに非加熱の状態で
放置した場合でのセンサ素子出力の変化について調べた
結果を示す図である。
FIG. 6 is a diagram showing a result of examining a change in sensor element output when the sensor element of FIG. 4 is left unheated without being used.

【図7】従来技術に係る固体電解質型二酸化炭素ガスセ
ンサのセンサ素子のモデル断面図である。
FIG. 7 is a model sectional view of a sensor element of a solid oxide carbon dioxide gas sensor according to the related art.

【図8】図7のセンサ素子を用い、各種濃度の二酸化炭
素を含む空気に対する出力(EMF(mV))の変化を
調べた結果を示す図である。
8 is a diagram showing the results of examining changes in output (EMF (mV)) with respect to air containing various concentrations of carbon dioxide using the sensor element of FIG. 7;

【図9】図7のセンサ素子を使用したときのセンサ出力
の安定性を調べた結果を示す図である。
9 is a diagram showing a result of examining stability of a sensor output when the sensor element of FIG. 7 is used.

【図10】図7のセンサ素子を使用せずに非加熱の状態
で放置した場合でのセンサ素子出力の変化について調べ
た結果を示す図である。
FIG. 10 is a diagram showing a result of examining a change in sensor element output when the sensor element of FIG. 7 is left in a non-heated state without being used.

【符号の説明】[Explanation of symbols]

A,B 本発明に係る固体電解質型二酸化炭素ガスセ
ンサのセンサ素子 1、1’ 固体電解質層 2 金属炭酸塩層 3 検知極 4 対極 5 参照極 6 アルミナ基板 7 ヒータ
A, B Sensor element of solid electrolyte type carbon dioxide gas sensor according to the present invention 1, 1 'solid electrolyte layer 2 metal carbonate layer 3 detection electrode 4 counter electrode 5 reference electrode 6 alumina substrate 7 heater

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 周囲に金属炭酸塩層を有する検知極、固
体電解質層及び対極からなるセンサ素子と、参照極、固
体電解質層及び対極とからなる参照素子とを有すること
を特徴とする固体電解質型二酸化炭素ガスセンサ。
1. A solid electrolyte comprising a sensor element comprising a sensing electrode having a metal carbonate layer around it, a solid electrolyte layer and a counter electrode, and a reference element comprising a reference electrode, a solid electrolyte layer and a counter electrode. Type carbon dioxide gas sensor.
【請求項2】 上記センサ素子と参照素子との固体電解
質層及び対極が共通であることを特徴とする請求項1に
記載の固体電解質型二酸化炭素ガスセンサ。
2. The solid electrolyte type carbon dioxide gas sensor according to claim 1, wherein a solid electrolyte layer and a counter electrode of the sensor element and the reference element are common.
【請求項3】 上記センサ素子と参照素子との対極が共
通であることを特徴とする請求項1に記載の固体電解質
型二酸化炭素ガスセンサ。
3. The solid electrolyte type carbon dioxide gas sensor according to claim 1, wherein a counter electrode of the sensor element and a reference element is common.
JP11007918A 1999-01-14 1999-01-14 Solid electrolyte type carbon dioxide gas sensor Abandoned JP2000206089A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11007918A JP2000206089A (en) 1999-01-14 1999-01-14 Solid electrolyte type carbon dioxide gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11007918A JP2000206089A (en) 1999-01-14 1999-01-14 Solid electrolyte type carbon dioxide gas sensor

Publications (1)

Publication Number Publication Date
JP2000206089A true JP2000206089A (en) 2000-07-28

Family

ID=11678918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11007918A Abandoned JP2000206089A (en) 1999-01-14 1999-01-14 Solid electrolyte type carbon dioxide gas sensor

Country Status (1)

Country Link
JP (1) JP2000206089A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009049091A3 (en) * 2007-10-09 2009-07-16 Univ Florida Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
CN101526494B (en) * 2009-03-31 2012-05-23 西安交通大学 Gas sensor and temperature compensation method based on Pt reaction electrode

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009049091A3 (en) * 2007-10-09 2009-07-16 Univ Florida Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
CN101889201B (en) * 2007-10-09 2013-11-13 佛罗里达大学研究基金公司 Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
US9027387B2 (en) 2007-10-09 2015-05-12 University Of Florida Research Foundation, Inc. Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
CN101526494B (en) * 2009-03-31 2012-05-23 西安交通大学 Gas sensor and temperature compensation method based on Pt reaction electrode

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