JP2000195645A - Discharging electrode and ozonizer with it - Google Patents

Discharging electrode and ozonizer with it

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Publication number
JP2000195645A
JP2000195645A JP10367676A JP36767698A JP2000195645A JP 2000195645 A JP2000195645 A JP 2000195645A JP 10367676 A JP10367676 A JP 10367676A JP 36767698 A JP36767698 A JP 36767698A JP 2000195645 A JP2000195645 A JP 2000195645A
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JP
Japan
Prior art keywords
electrode
discharge
ozone
electrodes
metal electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10367676A
Other languages
Japanese (ja)
Inventor
Shigeru Nagata
茂 永田
Souhei Suga
創平 須賀
Hideo Kameyama
秀雄 亀山
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Individual
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Individual
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Priority to JP10367676A priority Critical patent/JP2000195645A/en
Publication of JP2000195645A publication Critical patent/JP2000195645A/en
Pending legal-status Critical Current

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  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide electrodes stably controlling a gas electric discharge and having a long life and to provide a device stably generating a large quantity of ozone and easily controlling the generation quantity by using a metal electrode having a porous surface made by anodization for at least one electrode. SOLUTION: The other electrode of gas discharging electrodes may be a metal electrode having the same anodization film, and it preferably has a surface made of a high-dielectric constant material is particular. Al2O3, TiBaO3, TiSrO3 can be used for the high-dielectric constant material, for example. The anodization surface of the metal electrode having the anodization surface is preferably applied with a hydration process and a baking process to obtain a finer diameter. The hydration process can be easily applied when the metal electrode is immersed in water of 5 deg.C or above for 5 min or longer, preferably in water of 50-80 deg.C for about 5-10 min in particular. The metal electrode is preferably air-baked at 300-500 deg.C after the hydration process.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は放電用電極に関し、
特に放電安定性に優れる共に、寿命の長い放電用電極、
及び該電極を用いたオゾン発生装置に関する。
TECHNICAL FIELD The present invention relates to a discharge electrode,
Particularly excellent discharge stability and long life electrode for discharge,
And an ozone generator using the electrode.

【0002】[0002]

【従来技術】オゾンは毒性が強いために、高速のppc
複写機等における帯電工程で発生するオゾンについては
回収装置が設けられている程である。一方、オゾンの活
性を積極的に消臭装置や殺菌装置に利用することも行わ
れている。更に、オゾンの活性を利用して他の有害物質
を酸化し、それを無害化することも可能であるが、この
場合には、多量のオゾン量を必要とする場合が多い。
2. Description of the Related Art Since ozone is highly toxic, high speed ppc
As for ozone generated in a charging process in a copying machine or the like, a recovery device is provided. On the other hand, the activity of ozone is also actively used in deodorizing devices and sterilizing devices. Further, it is possible to oxidize other harmful substances by using the activity of ozone and detoxify it, but in this case, a large amount of ozone is often required.

【0003】しかしながら、例えば、空気放電によって
1%以上のオゾンを含有させることは困難であるので、
このような高濃度のオゾンを必要とする場合には、従
来、空気の代りに酸素ガスを用いる必要があり煩雑であ
った。また、放電電極の寿命が短くなるという欠点があ
った。更に、このように多量のオゾンを積極的に利用す
る場合には、安全性を確保するためにその排出濃度が厳
しく管理されなければならないばかりでなく、オゾンを
反応原料として使用するので、その発生を安定化する必
要がある。しかしながら、オゾン発生量を増大させよう
とすると、コロナ放電が不均一となり易く、オゾンの発
生量も不安定となり易い。
However, for example, it is difficult to contain more than 1% of ozone by air discharge.
Conventionally, when such a high concentration of ozone is required, it is necessary to use oxygen gas instead of air, which is complicated. Further, there is a disadvantage that the life of the discharge electrode is shortened. Furthermore, when such a large amount of ozone is actively used, not only must the emission concentration be strictly controlled in order to ensure safety, but also ozone is used as a reaction raw material. Needs to be stabilized. However, if an attempt is made to increase the amount of ozone generated, corona discharge tends to be non-uniform, and the amount of ozone generated tends to be unstable.

【0004】[0004]

【発明が解決しようとする課題】そこで、本発明者は気
体放電の安定化方法について鋭意検討した結果、陽極酸
化によって多孔質化した表面を有する金属電極を少なく
とも一方の電極とすることにより、気体放電を極めて安
定化させることができること、及び、この放電電極を長
寿命化することができることを見出すとともに、この電
極をオゾン発生装置に使用して空気放電させることによ
り、多量のオゾンを安定に供給することができることを
見出し、本発明に到達した。
The inventors of the present invention have conducted intensive studies on a method of stabilizing gas discharge, and as a result, have determined that at least one metal electrode having a porous surface by anodic oxidation is used as a gas electrode. It has been found that the discharge can be extremely stabilized and that the life of the discharge electrode can be prolonged, and that a large amount of ozone can be stably supplied by using this electrode in an ozone generator to discharge air. They have found that they can do so and arrived at the present invention.

【0005】従って本発明の第1の目的は、気体放電を
安定に制御するのに好適である上、寿命の長い放電用電
極を提供することにある。本発明の第2の目的は、多量
のオゾンを安定に発生させることができると共に、発生
量の制御も容易なオゾン発生装置を提供することにあ
る。
Accordingly, a first object of the present invention is to provide a discharge electrode which is suitable for stably controlling gas discharge and has a long life. A second object of the present invention is to provide an ozone generator capable of stably generating a large amount of ozone and easily controlling the amount of ozone generated.

【0006】[0006]

【課題を解決するための手段】本発明の上記の諸目的
は、気体放電用の一対の電極であって、少なくとも一方
の電極が陽極酸によって多孔質化された表面を有する金
属電極であることを特徴とする放電用電極、該電極を用
いたオゾン発生装置、並びに、前記電極間の間隔と電圧
を一定範囲に調節して、多量のオゾンを安定に発生させ
ることを特徴とするオゾン製造方法によって達成され
た。
The above objects of the present invention are to provide a pair of electrodes for gas discharge, wherein at least one of the electrodes is a metal electrode having a surface made porous by anodic acid. An electrode for discharge, an ozone generator using the electrode, and a method for producing ozone, wherein a large amount of ozone is stably generated by adjusting the interval and the voltage between the electrodes to a certain range. Achieved by

【0007】[0007]

【発明の実施の形態】本発明における気体放電は、気体
の存在下における2電極間に、通常は交流電圧を印加し
て放電を発生させる通常の気体放電であるが、直流放電
を採用することも可能である。この場合に用いる気体は
特に限定されるものではなく、目的に応じて適宜選択す
ることができる。例えば、オゾンを発生させたい場合に
は、空気又は酸素を用いれば良い。
BEST MODE FOR CARRYING OUT THE INVENTION A gas discharge in the present invention is a normal gas discharge in which an AC voltage is normally applied between two electrodes in the presence of a gas to generate a discharge. Is also possible. The gas used in this case is not particularly limited, and can be appropriately selected according to the purpose. For example, when it is desired to generate ozone, air or oxygen may be used.

【0008】本発明の気体放電用電極は、一対の電極の
うち少なくとも一方の電極が陽極酸化によって多孔質化
された表面(以下陽極酸化皮膜とする)を有する金属電
極である。他方の電極は特に限定されず、同じ陽極酸化
皮膜を有する金属電極であっても良いが、特に、誘電率
の高い物質からなる表面を有する電極であることが好ま
しい。このような誘電率の高い物質としては、例えば、
Al,TiBaO,TiSrO等を挙げるこ
とができる。
The gas discharge electrode of the present invention is a metal electrode having at least one of a pair of electrodes having a surface made porous by anodic oxidation (hereinafter referred to as an anodic oxide film). The other electrode is not particularly limited, and may be a metal electrode having the same anodic oxide film, but is particularly preferably an electrode having a surface made of a substance having a high dielectric constant. As such a substance having a high dielectric constant, for example,
Al 2 O 3 , TiBaO 3 , TiSrO 3 and the like can be mentioned.

【0009】陽極酸化皮膜を有する金属電極の素材は、
例えば、アルミニウム単体、クラッド法や溶射法によっ
て表面にアルミニウム層を設けた金属、60重量%以上
のアルミニウムを含有するジュラルミン、等の金属を挙
げることができる。これらの金属に対する陽極酸化は公
知の方法によって容易に行うことができる。
The material of the metal electrode having the anodic oxide film is as follows:
For example, a metal such as aluminum alone, a metal having an aluminum layer provided on the surface by a cladding method or a thermal spraying method, and a duralumin containing 60% by weight or more of aluminum can be used. Anodization of these metals can be easily performed by a known method.

【0010】本発明における電極の構造は特に限定され
ず、互いに平行な線と面、面と面である場合のみなら
ず、円筒内面とその中心に配する線状又は棒状電極等で
あっても良い。また、円筒内面にはフィン状突起を形成
させても良い。本発明の電極を内蔵する筐体に空気又は
酸素を流しながら交流電圧を印加することにより、容易
にオゾンを発生させることができるので、これをオゾン
発生装置とすることができる。
[0010] The structure of the electrode in the present invention is not particularly limited, and may be not only a parallel line and a plane, a plane and a plane, but also a linear or rod-shaped electrode disposed at the center of the cylindrical inner surface and the center thereof. good. Further, fin-shaped projections may be formed on the inner surface of the cylinder. Since ozone can be easily generated by applying an AC voltage while flowing air or oxygen to the housing containing the electrode of the present invention, the ozone can be used as an ozone generator.

【0011】この装置における放電は極めて安定してい
るので、オゾン発生量も安定し、量的制御も容易且つ確
実に行うことが可能となる。また、上記空気や酸素と共
に臭い物質や揮発性有機化合物を含有する排気ガス等を
流すことにより、上記臭い物質や揮発性有機化合物を効
率良く酸化し、除去することができる。更に、ゴミの焼
却で発生するダイオキシン等を含有する排気ガスを処理
し、ダイオキシン等を除去することもできる。
Since the discharge in this device is extremely stable, the amount of generated ozone is stable, and the quantitative control can be easily and reliably performed. Further, by flowing an exhaust gas containing an odorous substance or a volatile organic compound together with the air or oxygen, the odorous substance or the volatile organic compound can be efficiently oxidized and removed. Further, exhaust gas containing dioxin and the like generated by incineration of garbage can be treated to remove dioxin and the like.

【0012】放電電極の間隔は、使用する気体、気体圧
力、印加電圧等により適宜調節できるように設計してお
くことが好ましい。特に、大気圧下で放電させて、安定
に多量のオゾンを発生させるという観点からは、放電電
極の間隔を0.5〜2mm程度とすることが好ましい。
このときの電極間の印加電圧は4〜10kvとすること
が好ましい。
It is preferable that the distance between the discharge electrodes is designed so that it can be appropriately adjusted depending on the gas to be used, the gas pressure, the applied voltage and the like. In particular, from the viewpoint of stably generating a large amount of ozone by discharging under atmospheric pressure, it is preferable to set the interval between the discharge electrodes to about 0.5 to 2 mm.
The voltage applied between the electrodes at this time is preferably 4 to 10 kv.

【0013】また、陽極酸化表面を有する金属電極の陽
極酸化表面には、更に水和処理と焼成処理を施して、よ
り細孔化することが好ましい。上記水和処理は5℃以上
の水中に5分以上浸漬することによって容易に行うこと
ができるが、特に、50〜80℃の水に5〜10分程度
浸漬することが好ましい。水和処理の後には、300℃
〜500℃で空気焼成することが好ましい。
Further, it is preferable that the anodic oxidation surface of the metal electrode having the anodic oxidation surface is further subjected to hydration treatment and calcination treatment to make pores more fine. The hydration treatment can be easily performed by immersing in water at 5 ° C. or more for 5 minutes or more, and particularly preferably immersed in water at 50 to 80 ° C. for about 5 to 10 minutes. After the hydration treatment,
It is preferable to perform air calcination at ~ 500 ° C.

【0014】[0014]

【発明の効果】本発明の放電電極は、少なくとも一方に
陽極酸化によって均一に多孔質化された表面を有する電
極を用いるので、スパークの発生がなく極めて安定に放
電させることができる上、陽極酸化皮膜を有するので長
寿命である。従って、この電極をオゾン発生器に使用す
ることにより、多量のオゾンを安定に供給することがで
き、有害物質の酸化分解反応等に好適である。
As the discharge electrode of the present invention uses at least one electrode having a surface which is uniformly porous by anodic oxidation, it is possible to discharge extremely stably without generating sparks and to perform anodic oxidation. Long life due to having a film. Therefore, by using this electrode for an ozone generator, a large amount of ozone can be stably supplied, which is suitable for the oxidative decomposition reaction of harmful substances.

【0015】[0015]

【実施例】以下、実施例によって本発明を更に説明する
が、本発明はこれによって限定されるものではない。
EXAMPLES The present invention will be further described below with reference to examples, but the present invention is not limited thereto.

【0016】実施例1及び2並びに比較例1.電極材料
として、厚みが0.5mmで5cm×5cmのヒートシ
ンクアルミニウムを用いた。4重量%の蓚酸中で、2
5℃1時間、50A/mの電流を流して陽極酸化し、
これを両側の電極に用いた場合(実施例1)、全く同
様にして陽極酸化した後、80℃で1時間水和処理し、
400℃で1時間焼成したものを両側の電極として用い
た場合(実施例2)、及び無処理のヒートシンクアルミ
ニウムを両側の電極に用いた場合(比較例1)につい
て、空気放電を行ったときのオゾン濃度は図1に示した
通りである。尚、放電は、電極間距離を0.5mmと一
定にし、電極間の電圧を3〜7kvの範囲で変化させ、
大気圧下で空気放電を行わせた。
Examples 1 and 2 and Comparative Example 1. As the electrode material, a heat sink aluminum having a thickness of 0.5 mm and a size of 5 cm × 5 cm was used. In 4% by weight oxalic acid, 2
Anodize by passing a current of 50 A / m 2 at 5 ° C. for 1 hour,
When this was used for the electrodes on both sides (Example 1), after anodic oxidation in exactly the same manner, hydration treatment was performed at 80 ° C. for 1 hour,
The air discharge was performed for the case where the material fired at 400 ° C. for 1 hour was used as the electrodes on both sides (Example 2) and the case where untreated heat sink aluminum was used for the electrodes on both sides (Comparative Example 1). The ozone concentration is as shown in FIG. In addition, for the discharge, the distance between the electrodes was fixed at 0.5 mm, and the voltage between the electrodes was changed in a range of 3 to 7 kv.
An air discharge was performed at atmospheric pressure.

【0017】図1から明らかな如く、陽極酸化のみの処
理を行った実施例1の場合には、4kv以上の電圧を印
加した場合に無処理の比較例1の場合よりオゾンの発生
量が多くなり、陽極酸化処理及び水和処理を行って、よ
り小さな細孔を表面に設けた実施例2の場合には、約
3.2kv以上の印加電圧で、無処理の比較例1の場合
よりオゾンの発生量が多くなること、即ち、放電効率が
良いことが実証された。尚、比較例1の場合には、放電
も不安定であったが、実施例1及び2の場合には極めて
安定した放電であることが確認された。
As is apparent from FIG. 1, the amount of ozone generated in Example 1 in which only the anodic oxidation treatment was performed was larger than that in Comparative Example 1 in which no voltage was applied when a voltage of 4 kV or more was applied. In the case of Example 2 in which anodizing treatment and hydration treatment were performed to provide smaller pores on the surface, the applied voltage was not less than about 3.2 kv, and the ozone concentration was higher than that in the case of the untreated comparative example 1. It has been proved that the amount of generation of the gas increases, that is, the discharge efficiency is good. In addition, in the case of Comparative Example 1, the discharge was also unstable, but in Examples 1 and 2, it was confirmed that the discharge was extremely stable.

【0018】また、6kv程度で放電を続けると無処理
の場合には1時間程度で放電状態が著しく不安定になる
のに対し、実施例1の場合には15時間を経過すると、
若干不安定になるという程度であり、実施例2の場合に
は、24時間連続放電させても全く安定に放電すること
が確認された。
Further, if the discharge is continued at about 6 kv, the discharge state becomes remarkably unstable in about 1 hour in the case of no treatment, whereas in the case of Example 1, after 15 hours,
It was only a little unstable, and in the case of Example 2, it was confirmed that the discharge was completely stable even after continuous discharge for 24 hours.

【0019】実施例3.実施例2で使用した電極を直列
に4個緊密に並べた中型反応器を用い、各電極に同一の
電圧を印加して空気の放電を行わせたところ、図2に示
す結果が得られた。
Embodiment 3 FIG. When the same voltage was applied to each electrode to discharge air using a medium-sized reactor in which four electrodes used in Example 2 were closely arranged in series, the results shown in FIG. 2 were obtained. .

【0020】比較例2.実施例2で使用した電極の代り
に比較例1で用いた電極を使用した他は、実施例3と全
く同様にして図2に示す結果を得た。
Comparative Example 2 The result shown in FIG. 2 was obtained in exactly the same manner as in Example 3, except that the electrode used in Comparative Example 1 was used instead of the electrode used in Example 2.

【0021】以上の実施例・比較例の結果は、陽極酸化
皮膜を有する電極を使用することにより、気体を安定に
放電させることができ、その結果、例えばオゾン等の放
電による化学種の濃度を従来以上に高めることができる
ことを実証するものである。
The results of the above Examples and Comparative Examples show that the use of an electrode having an anodic oxide film enables a stable discharge of gas. As a result, the concentration of chemical species caused by discharge of ozone or the like can be reduced. This demonstrates that it can be increased more than before.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例1、2及び比較例1に対応する、放電に
より発生したオゾン濃度の印加電圧依存性を示すグラフ
である。
FIG. 1 is a graph showing the applied voltage dependence of the concentration of ozone generated by discharge, corresponding to Examples 1 and 2 and Comparative Example 1.

【図2】実施例3及び比較例2に対応する、放電により
発生したオゾン濃度の印加電圧依存性を示すグラフであ
る。
FIG. 2 is a graph showing the applied voltage dependence of the concentration of ozone generated by discharge, corresponding to Example 3 and Comparative Example 2.

【符号の説明】[Explanation of symbols]

〇 無処理のヒートシンクアルミニウム電極 □ 陽極酸化処理のみを施したヒートシンクアルミニウ
ム電極 ◇ 陽極酸化処理の後水和処理を施したヒートシンクア
ルミニウム電極 整理番号 P98−798
ヒ ー ト シ ン ク Untreated heatsink aluminum electrode □ Heatsink aluminum electrode treated only by anodic oxidation treatment ヒ ー ト シ ン ク Heatsink aluminum electrode treated by hydration treatment after anodizing treatment Reference No. P98-798

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4D002 AA21 AB02 AB03 AC04 BA05 BA07 CA20 DA51 GA01 GA02 GB02 GB20 4G042 CA01 CC06 CC20  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4D002 AA21 AB02 AB03 AC04 BA05 BA07 CA20 DA51 GA01 GA02 GB02 GB20 4G042 CA01 CC06 CC20

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】気体放電用の一対の電極であって、少なく
とも一方の電極が陽極酸化によって多孔質化された表面
を有する金属電極であることを特徴とする放電用電極。
1. A discharge electrode comprising a pair of electrodes for gas discharge, wherein at least one electrode is a metal electrode having a surface made porous by anodic oxidation.
【請求項2】誘電率の高い電極と陽極酸化によって多孔
質化された表面を有する金属電極を一対とする、請求項
1に記載された放電用電極。
2. The discharge electrode according to claim 1, wherein a pair of an electrode having a high dielectric constant and a metal electrode having a surface made porous by anodic oxidation are paired.
【請求項3】陽極酸化によって多孔質化された表面が、
水和処理と焼成処理によって更に細孔化された表面であ
る、請求項1又は2に記載された放電用電極。
3. The surface made porous by anodic oxidation,
The discharge electrode according to claim 1, wherein the electrode is a surface that has been made more porous by a hydration treatment and a baking treatment.
【請求項4】少なくとも、空気又は酸素気体供給口並び
に排気口を有する筐体内に設置された少なくとも一対の
電極からなるオゾン発生装置であって、前記電極が請求
項1〜3に記載された何れかの電極であることを特徴と
するオゾン発生装置。
4. An ozone generator comprising at least a pair of electrodes installed in a housing having at least an air or oxygen gas supply port and an exhaust port, wherein the electrodes are any one of the above-described electrodes. An ozone generator characterized in that it is such an electrode.
JP10367676A 1998-12-24 1998-12-24 Discharging electrode and ozonizer with it Pending JP2000195645A (en)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
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Family

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101928905B1 (en) * 2018-07-23 2018-12-13 재단법인 한국환경산업연구원 Method for purifying contaminated water and facility using the same
KR101935011B1 (en) * 2018-06-27 2019-01-03 재단법인 한국환경산업연구원 ozone generator

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Publication number Priority date Publication date Assignee Title
JPS6065705A (en) * 1983-09-16 1985-04-15 Senichi Masuda Ozone generator
JPS63291803A (en) * 1987-05-26 1988-11-29 Sumitomo Heavy Ind Ltd Ozone generator
JPS63291804A (en) * 1987-05-26 1988-11-29 Sumitomo Heavy Ind Ltd Ozone generator
JPS6472902A (en) * 1987-09-16 1989-03-17 Asahi Glass Co Ltd Electrode for ozonizer
JPH01160805A (en) * 1987-12-15 1989-06-23 Teru Kyushu Kk Generation of ozone
JPH0733405A (en) * 1993-07-15 1995-02-03 Fuji Electric Co Ltd Ozone generator
JPH09234361A (en) * 1996-03-01 1997-09-09 Hideo Kameyama Catalytic reactor and catalytic reaction method using the same
JPH11128729A (en) * 1997-10-29 1999-05-18 Unipulse Kk Box type reactor and reaction apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065705A (en) * 1983-09-16 1985-04-15 Senichi Masuda Ozone generator
JPS63291803A (en) * 1987-05-26 1988-11-29 Sumitomo Heavy Ind Ltd Ozone generator
JPS63291804A (en) * 1987-05-26 1988-11-29 Sumitomo Heavy Ind Ltd Ozone generator
JPS6472902A (en) * 1987-09-16 1989-03-17 Asahi Glass Co Ltd Electrode for ozonizer
JPH01160805A (en) * 1987-12-15 1989-06-23 Teru Kyushu Kk Generation of ozone
JPH0733405A (en) * 1993-07-15 1995-02-03 Fuji Electric Co Ltd Ozone generator
JPH09234361A (en) * 1996-03-01 1997-09-09 Hideo Kameyama Catalytic reactor and catalytic reaction method using the same
JPH11128729A (en) * 1997-10-29 1999-05-18 Unipulse Kk Box type reactor and reaction apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101935011B1 (en) * 2018-06-27 2019-01-03 재단법인 한국환경산업연구원 ozone generator
KR101928905B1 (en) * 2018-07-23 2018-12-13 재단법인 한국환경산업연구원 Method for purifying contaminated water and facility using the same

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