JP2000184757A - Vibrating wave driver and driver for vibration type motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrating wave driver capable of being effectively started. SOLUTION: In the vibrating wave driver comprising a driving circuit, an exciter to be excited at a driving vibration by applying a driving frequency signal from the circuit, and a contactor brought into pressure contact with a vibrator so that the vibrator and the contactor are relatively moved by the driving vibration, the circuit is swept up from a driving starting frequency toward higher frequency for driving at initration (S1 to S4).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration wave driving device and a driving device for a vibration type motor, for example, exciting a vibration wave to a vibrating body and forcing a vibrating body into contact with the vibrating body. The present invention relates to a vibration-wave driving device such as a vibration-type (vibration-wave) motor and the like, and a vibration-type motor driving device.

[0002]

2. Description of the Related Art As is well known, a vibration type (vibration wave) motor applies a high frequency vibration to an electro-mechanical energy conversion element such as a piezoelectric element or an electrostriction element by applying an alternating voltage to the element. This is a new type of non-electromagnetic drive type motor configured to generate the vibration energy as continuous mechanical motion.

FIG. 10 is a sectional view showing the configuration of a conventional vibration wave motor.

In FIG. 1, one end surface of a ring-shaped metal elastic body 1 made of, for example, stainless steel or phosphor bronze having flexibility is attached to one end surface.
A piezoelectric element group 2 in which a plurality of polarized piezoelectric elements 2 are formed in a ring shape is adhered concentrically, and is made of resin, metal, ceramic, or the like, which is bonded to the other end surface of the elastic body 1. Electrodes are arranged on both end faces of the piezoelectric element group 2 and subjected to a polarization treatment so as to generate a traveling wave on the surface of the slider member 3. On the surface on the slider material 3 side, a plurality of comb-shaped grooves are regularly formed in the circumferential direction to increase the motor efficiency. A vibrating body (stator) is constituted by the elastic body 1, the piezoelectric element group 2, and the slider material 3.

A flexible substrate 4 for taking out a drive signal and a signal from a sensor unit for detecting a vibration state of a motor provided on the piezoelectric element is fixed to a surface opposite to the piezoelectric element group 2. The inner peripheral portion of the elastic body 1 has a thin disk shape, and is fixed to the base 5 on the inner peripheral side by bonding or screws.

A moving body 6 is brought into pressure contact with the surface of the slider member 3 via a vibration isolating rubber 7 on the same axis as the elastic body 1 by a leaf spring 8, and the inner diameter of the leaf spring 8 is a shaft 10.
It is fixed by a tightly fitted disc flange 9.

The shaft 10 is fitted and inserted into bearings 11 and 12 fitted to the base 5,
To maintain the pressing force. The spacer 14 applies a preload to the bearing 11 to reduce the amount of whirling of the shaft 10.

FIG. 11 shows a driving circuit for such a vibration wave motor. A driving A-phase signal and a B-phase signal from the driving circuit are transmitted via a flexible substrate 4 to an A-phase piezoelectric element and a B-phase signal. The voltage is applied to the piezoelectric element.

Reference numeral 21 denotes a control circuit for driving and controlling the motor (hereinafter referred to as a control microcomputer). Reference numeral 22 denotes a four-phase oscillator that generates four-phase alternating voltages.
26 is a switching element for switching the power supply voltage by the alternating voltage from the oscillator 22, and 27 and 28 are transformers for boosting the power supply voltage while matching the impedance with the motor.

Reference numeral 40 denotes a capacitor for smoothing the voltage of the power supply, and reference numerals 41 to 48 denote resistance elements for controlling the drive current of the switching element.

By driving with such a circuit, a high alternating voltage is applied to the vibration wave motor, and the motor is driven.

FIG. 12 shows the relationship between the frequency and the number of revolutions when a vibration wave motor is driven using such a drive circuit.

Usually, when starting the vibration wave motor, first, the start frequency is set to a frequency f ₀ sufficiently higher than the resonance frequency.
Set to.

[0014] Then, when gradually lowering the frequency from the frequency, the motor starts to move at a frequency f _1. When the frequency is further reduced, the rotation speed gradually increases.

The rotation speed of the motor is detected by rotation detection means (not shown) provided in the drive circuit, and its value is set to a target value N.
The sweep is stopped at the frequency fstop that has reached stop, and the drive is performed at the target rotation speed.

On the other hand, when stopping, the frequency is gradually increased, the rotation speed is decreased, and then the rotation is stopped, thereby achieving a smooth stop.

[0017]

When such a vibration wave motor is used in various environments, the coupling force of the friction surface between the vibrating body and the moving body may increase in some cases. A phenomenon occurs in which the motor cannot be started even if control is performed to gradually lower the frequency.

An object of the invention according to the present application is to provide a vibration wave drive device and a drive device for a vibration type motor that can reliably start.

[0019]

A first configuration of a vibration wave driving device for realizing the object of the present invention according to the present application is that a driving circuit is driven by applying a driving frequency signal from the driving circuit. A vibration wave driving device having a vibrating body in which vibration is excited, and a contact body which is brought into pressure contact with the vibrating body, wherein the driving body relatively moves the vibrating body and the contact body. At the time of startup, the startup is performed by sweeping up from the startup start frequency to a higher frequency.

According to a second configuration of the vibration wave driving device for realizing the object of the invention according to the present application, the driving circuit has a startup start frequency for starting a sweep-up operation higher than a resonance frequency.

According to a third configuration of the vibration wave driving device for realizing the object of the invention according to the present application, the driving circuit has a startup start frequency at which the sweep-up is started is lower than a driving frequency at the time of stop. .

According to a fourth configuration of the vibration wave driving device for realizing the object of the invention according to the present application, the driving circuit raises the voltage of the driving frequency signal when the driving circuit cannot be started even with the upper limit value of the sweeping frequency. And perform the sweep-up again.

According to a fifth configuration of the vibration wave driving device for realizing the object of the invention according to the present application, when the driving circuit is activated, the driving circuit starts sweeping down to lower the driving frequency.

According to a sixth configuration of the vibration wave driving device for realizing the object of the invention according to the present application, when the driving circuit is activated, the driving circuit temporarily holds the driving frequency and then lowers the frequency. This is to start sweeping down.

According to a seventh configuration of the vibration wave driving device for realizing the object of the invention according to the present application, in the fifth or sixth configuration, the driving circuit detects a pulse from rotation detection means. It is determined that the activation has been performed, the frequency sweep is once stopped at the drive frequency at that time, and it is confirmed that pulses continue to be emitted in that state, and then the operation proceeds to the sweep-down operation.

According to an eighth configuration of the vibration wave driving device for realizing the object of the invention according to the present application, the starting circuit sets the phase difference between the two-phase driving frequency signals to zero and then sweeps up the frequency. After the start, the original phase difference is restored.

A first configuration of the driving apparatus for a vibration-type motor according to the present application is a vibration-type motor that obtains a driving force by applying a frequency signal to an electro-mechanical energy conversion element disposed on a vibrating body. In the driving device, when the motor is started, the frequency signal is swept in a high direction, and then swept in a low direction to start the motor.

According to a second configuration of the vibration type motor driving device according to the present application, in the above-described first configuration, the sweep in the high direction is started by a detecting means for detecting the start of rotation of the motor. This is performed until the rotation is detected, and when the rotation start is detected, the sweep in the lower direction is started.

A third configuration of the vibration type motor driving device according to the present application is such that, in the second configuration described above, when rotation does not start even after sweeping to a predetermined high frequency, a start error is indicated. It was done.

The fourth configuration of the vibration motor drive device according to the present application is the same as the above-described second configuration, except that when the rotation does not start even after sweeping to a predetermined high frequency, the drive is again performed in the high direction. Is performed.

The fifth configuration of the vibration type motor driving device according to the present application is the same as the above-described second configuration, except that when the rotation does not start even after sweeping to a predetermined high frequency, the driving voltage is increased. To return the frequency to a predetermined low frequency, and the sweep in the high direction is performed again.

A sixth configuration of the vibration motor driving apparatus according to the present application is the same as the second configuration described above, except that a monitor for monitoring the vibration state of the vibrating body is provided, and the sweep in the direction of higher frequency is performed. If the rotation does not start even when the frequency reaches a predetermined high frequency, the motor is started at the frequency at which the monitor signal indicating the vibration state monitored by the monitoring means becomes maximum.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIG.
5 is a flowchart illustrating a driving operation of the vibration wave motor according to the embodiment. FIG. 2 shows the frequency and rotation speed characteristics including the case where the coupling force of the friction surface between the vibrating body and the moving body is increased.

The drive circuit according to the present embodiment is different only in the control algorithm of the microcomputer 21 shown in FIG. 11 and its illustration is omitted, and the vibration wave motor is the same as that of the conventional example shown in FIG. Is omitted.

This embodiment will be described with reference to the flowchart of FIG. 1 showing the driving operation.

[0036] S1: start frequency higher normal motor than the resonance frequency is set to a frequency f ₁ to start. The frequency f ₁ is a frequency lower than the driving frequency when the last drive stop.

S2: The frequency is gradually increased from the frequency (f ₁ ) to a higher frequency (this operation is called sweep-up).

S3: It is determined whether or not it has been started. If it has been started, the process proceeds to S4, and if not, the process proceeds to S7. Whether or not the vibration wave motor has started can be determined, for example, based on the output of a rotary encoder (not shown) connected to the shaft 10 of the vibration wave motor.

S4: The frequency is swept down, the frequency lowering operation is stopped at the target speed, and the steady driving operation is performed (S5). When stopping, the frequency is gradually increased, and after deceleration, the operation is stopped (S6).

On the other hand, if it is determined in S3 that it has not been started, the process proceeds to S7, where it is determined whether or not the frequency is the maximum frequency. If it is not started even at the maximum frequency, the drive control is stopped as a start error (S8). At this time, an error (not shown) is displayed on a display means.

Conventionally, the frequency is gradually lowered from the time of S2. However, when the vibration wave motor is used in a certain environment, the coupling force of the friction surface between the vibrating body and the moving body may become strong in some cases, Even if the control for gradually lowering the frequency as in the conventional example is performed, the FN. The frequency and rotation speed characteristics of 1 do not appear, and the motor cannot be started.

This is because the resonance frequency is increased because the coupling force of the friction surface between the vibrating body and the moving body of the vibration wave motor is increased. This is because the frequency and rotation speed characteristics as shown in FIG.

[0043] Therefore, when gradually increasing the frequency from f _1, it passes through the resonant frequency f ₂₀ when there is a strong coupling force of the friction surfaces between the moving entity and the vibrating body.

At this frequency (f ₂₀ ), the vibrating body and the moving body are separated from each other because the driving force for removing the coupling force of the friction surface is maximized.

At that moment, the characteristics of the motor are FN. Returning to the characteristic of FIG. 1, the frequency is gradually lowered as in the conventional example, and control is performed so as to reach the target rotational speed.

By performing such control, the motor can be started even if the coupling force of the friction surface between the vibrating body and the moving body is strong under a certain environment, and furthermore, the coupling force of the friction surface can be started. When is not strong, it can be started quickly.

(Second Embodiment) FIG. 3 shows a second embodiment.

FIG. 3 is a flowchart showing the driving operation of the vibration wave motor.

This embodiment will be described with reference to the flowchart of FIG.

The difference between the second embodiment and the first embodiment is that when the motor cannot be started even when the motor is swept up to the maximum value of the frequency movable range, the first embodiment is different from the first embodiment. However, in the present embodiment, the drive voltage is increased and a retry is performed (S18, S1).
9) When the activation is confirmed, the sweep is temporarily stopped at the activated frequency (S14). Other steps (S11 to S13, S15 to S17) are the same as S1 to S6 in FIG.

[0051] When describing the embodiments according to the flowchart of FIG. 3, higher than the resonant frequency of the start frequency in S11, the normal motor is set to a frequency f ₁ to be activated.

Next, the frequency is gradually increased from that frequency to a higher one (S12).

[0053] passing through the resonance frequency f ₂₀ of the case is strong coupling force of the friction surfaces between the vibrating body and the moving body.

At this time, if the driving force is lower than the coupling force of the friction surface, the vibrating body and the moving body go up to the maximum value of the movable frequency without moving while being coupled (S13 → S1).
8). In such a case, the transformer 27 of the circuit of FIG.
Increase the power supply voltage Vcc on the primary side of 28, or
Such as by increasing the pulse width of the switching pulse to FET23,24,25,26 raising the voltage applied to the motor, start sweep up from the initial frequency f _1.

When the driving force exceeds the coupling force of the friction surface, the moving body and the moving body separate. In the present embodiment, if the frequency sweepdown is started at the moment of separation, the frequency is not completely separated, that is, FN. Since the frequency is lowered before the characteristics of frequency 1 and rotation speed can be obtained, the frequency is fixed to the frequency activated for a certain time (predetermined time) (S14), and after confirming that the frequency has been activated, Then, the next operation is performed.

At this time, it is determined whether or not the motor is started based on whether or not the signal from the rotation detecting means (encoder) is continuously output. For example, the frequency sweep is once stopped at the frequency at which the pulse from the encoder is output, and after confirming that the pulse is still output, the operation proceeds to the sweep-down operation.

After the vibrating body and the moving body have separated, the characteristics of the motor are FN. Since the characteristic becomes 1, the frequency is gradually decreased from there, as in the first embodiment, and controlled so as to reach the target rotational speed (S15 to S17).

By controlling as described above, the motor can be started reliably and at a low voltage (ie, efficiently) even under a certain environment, even if the coupling force of the friction surface between the vibrating body and the moving body is strong. It is possible to start up quickly when the coupling force of the friction surface is not strong.

(Third Embodiment) FIG. 4 is a block diagram of a driving circuit of a vibration wave motor according to a third embodiment, and FIG. 5 is a flowchart showing a driving operation of the vibration wave motor according to the third embodiment. FIG. 6 shows the relationship between the drive frequency and the detection electrode voltage of the motor according to the third embodiment.

The difference between the third embodiment and the conventional drive circuit shown in FIG. 4 is that the motor is provided with a vibration detection electrode, and the drive circuit has a detection voltage obtained from the detection electrode. Is that a voltage amplitude detection means 50 for detecting the magnitude of the voltage amplitude is provided.

The value detected by the voltage amplitude detection means 50 is input to the microcomputer 21 so that the microcomputer 21 can know the magnitude of the voltage obtained from the detection electrode.

A flowchart showing the driving operation of FIG.
This embodiment will be described with reference to the characteristic diagram of FIG.

[0063] To explain the above embodiment in accordance with the flowchart of FIG. 5, first, higher normal motor than the resonance frequency start frequency in S231 is set to a frequency f ₁ to be activated. Next, in S22, the frequency is gradually increased from that frequency to a higher frequency.

At this time, whether or not the motor has started is detected in S23, and the detection voltage of the vibration state detected by the voltage detection means 50 is also monitored. The relationship between the frequency and the detection voltage at this time is FS. Draw a curve like 2.

[0065] resonance frequency when the bonding force is strong friction surfaces between the vibrating body and the moving body is f _20, since most vibration amplitude thereof is large, the largest detection voltage when passing through the frequency Become. Microcomputer stores the frequency at that time, when the motor even when the maximum frequency to sweep up the frequency does not start, the stored detection voltage is set to a frequency f ₂₀ becomes maximum (S29). In addition,
The resonance frequency and the detection voltage maximum frequency when coupling force of the friction surfaces is a strong substantially coincides with f _20.

When the motor is driven at that frequency, the force for removing the coupling of the friction surface between the vibrating body and the moving body is maximized, and the motor can be started. However, even in this case, if the motor cannot be started, the above operation is repeated by increasing the voltage applied to the motor as in the second embodiment (S30, S31). After the vibrating body and the moving body are separated from each other, the characteristics of the detected voltage are FS 1 characteristic.

Thereafter, as in the second embodiment, the frequency is gradually lowered to control the rotational speed to the target rotational speed (S21-S27).

As described above, once the frequency is swept up, the motor is driven at the maximum frequency of the detection voltage, so that the motor can be started at a low voltage without increasing the voltage applied to the motor.

(Fourth Embodiment) FIG. 7 is a flowchart showing a driving operation of a vibration wave motor according to a fourth embodiment.
FIG. 8 shows a pulse signal when the vibration wave motor used in the fourth embodiment is started.

In this embodiment, the phase A,
The difference from the above-described embodiment is that the frequency sweep is performed by setting the phase difference of the B-phase drive signal to zero.

Assuming that the wavelength of the traveling wave is λ, the two-phase piezoelectric elements of the vibration wave motor are arranged with a positional phase difference of an odd multiple of λ / 4. Phase, B
When a phase drive signal is applied, a traveling wave is formed by combining the standing waves formed on the elastic body by the two drive signals, and by using this, the relative movement between the vibrating body and the contact body is performed.

However, assuming that the phase difference between the A-phase and B-phase drive signals is zero, there is no temporal phase difference between the standing waves formed by the drive signals of each phase, so that no traveling wave is formed. Each standing wave only oscillates at the same time. In this case, the forces of both standing waves act in the axial direction, and the moving body is pushed with a large force in the axial direction.

This embodiment will be described with reference to the flowchart of FIG.

[0074] higher than the resonance frequency of the start frequency in S41, usually the motor is set to a frequency f ₁ to start.

In S42, the A-phase and B-phase drive signals when the motor is not started are set to the same phase.

In step S43, the pulse width of the drive pulse is gradually narrowed as shown by a region m-1 in FIG. 8, and the frequency is gradually increased from that frequency to a higher one. When the coupling of the friction surface between the vibrating body and the moving body is peeled off, the phase difference between the A-phase and B-phase drive signals having the same phase as in the present embodiment is due to the above-described reason. This is because it is known that the force for peeling the connection between the surfaces can be increased.

Then, as the frequency is swept up, assuming that the motor starts at a certain frequency (S4).
4) After the start of the motor is confirmed, for a while, the pulse width of the drive pulse is set to a constant interval as shown in a region m-2 in FIG. The connection is completely removed (S45).

After the motor has started, normal operation becomes possible. Therefore, the phase difference between the A phase and the B phase is set back to -90 ° or + 90 °, and is shown in the area m-3 in FIG. The pulse interval is gradually widened as described above to continue the driving (S46).
Thereafter, the frequency is stopped from decreasing at the target speed (S47),
When the driving is stopped, the frequency is gradually increased to decelerate and then stopped (S48).

As described above, the motors can be started at a lower voltage by setting the A-phase and B-phase drive signals to the same phase and starting the motor.

In this embodiment, if the algorithms of the second and third embodiments are added, the motor can be started at a lower voltage and more reliably.

(Fifth Embodiment) FIG. 9 is a schematic diagram of a paper feeder using the vibration wave motor of the above-described embodiment as a drive source.

Reference numeral 51 denotes a roller for feeding paper, and a bearing 5 having an appropriate preload applied to the end opposite to the side where the motor is connected.
2 is arranged. A pulse plate 53 for detecting the rotation speed and rotation angle of the motor, an optical detection element 54, and a detection element mounting case 55 are provided on the side opposite to the motor rollers. Since the pulse plate 53 is directly attached to the motor shaft, the accuracy is good.

For coupling the motor and the roller, the motor shaft 10 is lightly pressed into a hole provided in the roller, and is fixed from the side with a set screw 56. By using the drive circuit of the above-described embodiment with such a device configuration, a device with high circuit efficiency can be provided.

[0084]

As described above, according to the present invention, it is possible to solve the problem that the coupling force of the friction surface between the vibrating body and the contact body becomes strong, and the motor cannot be started. It became possible.

[Brief description of the drawings]

FIG. 1 is a flowchart illustrating a driving operation of a vibration wave motor according to a first embodiment.

FIG. 2 is a diagram illustrating frequency and rotation speed characteristics including a case where a coupling force of a friction surface between a vibrating body and a moving body according to the first embodiment is increased.

FIG. 3 is a flowchart illustrating a driving operation of the vibration wave motor according to the second embodiment.

FIG. 4 is a drive circuit of a vibration wave motor according to a third embodiment.

FIG. 5 is a flowchart illustrating a driving operation of a vibration wave motor according to a third embodiment.

FIG. 6 is a diagram illustrating a frequency and a detected voltage characteristic including a case where a coupling force of a friction surface between a vibrating body and a moving body according to the third embodiment is increased.

FIG. 7 is a flowchart illustrating a driving operation of a vibration wave motor according to a fourth embodiment.

FIG. 8 is a diagram showing a pulse signal at the time of starting a vibration wave motor used in a fourth embodiment.

FIG. 9 is a cross-sectional view of a paper feeder according to a fifth embodiment.

FIG. 10 is a sectional view of a conventional vibration wave motor.

FIG. 11 is a drive circuit of a conventional vibration wave motor.

FIG. 12 is a diagram showing frequency and rotation speed characteristics of a conventional vibration wave motor.

[Explanation of symbols]

 1: Elastic body 2: Piezoelectric element group 3: Slider material 4: Flexible board 5: Base 6: Moving body 7: Anti-vibration rubber 8: Leaf spring 9: Disk flange 10: Shaft 11, 12: Bearing 13: Retaining ring 14 : Spacer 21: microcomputer 22: four-phase oscillator 23, 24, 25, 26: switching element 27, 28: transformer 41-48: resistance element 49: resistance element 50: vibration amplitude detection circuit 51: roller 52: bearing 53: pulse Plate 54: Optical detection element 55: Case for mounting detection element 56: Set screw

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shinji Yamamoto 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Tadashi Hayashi 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon (72) Inventor Jun Ito 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term in Canon Inc. (reference) 5H680 AA09 BB03 CC07 DD01 DD03 DD15 DD23 DD35 DD40 DD53 DD55 DD66 DD75 DD92 EE03 EE23 EE24 FF04 FF08 FF25 FF27 FF33 FF35 FF38 GG23 GG27

Claims (14)

[Claims] 1. A driving circuit, comprising: a vibrating body in which driving vibration is excited by application of a driving frequency signal from the driving circuit; and a contacting body that is in pressure contact with the vibrating body. In the vibration wave driving device in which the vibrating body and the contact body relatively move by the driving vibration, at the time of start-up, the drive circuit starts up by sweeping up from a start start frequency to a higher frequency. Vibration wave driving device. 2. The vibration wave drive device according to claim 1, wherein the drive circuit has a start-up start frequency at which a sweep-up is started is a frequency higher than a resonance frequency. 3. The vibration wave drive according to claim 1, wherein the drive circuit has a start-up start frequency at which a sweep-up operation is started is lower than a drive frequency at the time of stopping the driving of the previous device. apparatus. 4. The drive circuit according to claim 1, wherein the drive circuit raises the voltage of the drive frequency signal and performs the sweep-up again if the drive circuit cannot be started even with the upper limit of the sweep-up frequency. The vibration wave driving device as described in the above. 5. The vibration wave driving device according to claim 1, wherein, when the driving circuit is activated, the driving circuit starts sweeping down to lower the driving frequency. 6. The driving circuit according to claim 1, wherein when the driving circuit is activated, the driving circuit once holds its driving frequency and then starts sweeping down toward a lower frequency.
6. The vibration wave driving device according to 2, 3, 4, or 5. 7. The drive circuit determines that the startup has been performed by detecting a pulse from the rotation detection means, stops the frequency sweep once at the drive frequency at that time, and outputs a pulse in that state. 7. The vibration wave driving device according to claim 5, wherein the operation shifts to a sweep-down operation after confirming that the operation is continued. 8. The starting circuit sweeps up the frequency after making the phase difference between the two-phase driving frequency signals zero,
8. The vibration wave driving device according to claim 1, wherein the phase difference is returned to the original after the start. 9. A driving apparatus for a vibration-type motor for obtaining a driving force by applying a frequency signal to an electro-mechanical energy conversion element disposed on a vibrating body, wherein the frequency signal is increased in a higher direction when the motor is started. A driving device for a vibration-type motor, which sweeps and then sweeps in a lower direction to start the motor. 10. The sweep in the high direction is performed until the start of rotation is detected by the detection means for detecting the start of rotation of the motor. When the start of rotation is detected, the sweep in the low direction is started. The driving device for a vibration type motor according to claim 9, wherein: 11. The vibration motor driving device according to claim 10, wherein a start error is instructed when rotation does not start even after sweeping to a predetermined high frequency. 12. The vibration type motor driving device according to claim 10, wherein if the rotation does not start even after sweeping to a predetermined high frequency, the sweep operation in the high direction is performed again. 13. When the rotation does not start even after sweeping to a predetermined high frequency, the frequency is returned to a low predetermined frequency with the drive voltage raised, and the sweep in the high direction is performed again. The driving device for a vibration type motor according to claim 10. 14. A monitoring means for monitoring a vibration state of the vibrating body, wherein when rotation is not started even when the frequency is swept to a predetermined high frequency, the vibration monitored by the monitoring means is provided. The driving device for a vibration-type motor according to claim 10, wherein the motor is started at a frequency at which a monitor signal indicating a state is maximized.