JP2000183499A - Apparatus for exposing electrophotographic printed circuit board - Google Patents

Apparatus for exposing electrophotographic printed circuit board

Info

Publication number
JP2000183499A
JP2000183499A JP10359610A JP35961098A JP2000183499A JP 2000183499 A JP2000183499 A JP 2000183499A JP 10359610 A JP10359610 A JP 10359610A JP 35961098 A JP35961098 A JP 35961098A JP 2000183499 A JP2000183499 A JP 2000183499A
Authority
JP
Japan
Prior art keywords
charging
electrophotographic
scanning
exposure
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10359610A
Other languages
Japanese (ja)
Inventor
Masanori Takase
正範 高瀬
Munetoshi Irisawa
宗利 入沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Paper Mills Ltd
Original Assignee
Mitsubishi Paper Mills Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Paper Mills Ltd filed Critical Mitsubishi Paper Mills Ltd
Priority to JP10359610A priority Critical patent/JP2000183499A/en
Publication of JP2000183499A publication Critical patent/JP2000183499A/en
Pending legal-status Critical Current

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  • Electrostatic Charge, Transfer And Separation In Electrography (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To realize a uniformly charged state without depending upon performance of an exposure apparatus by providing a charger having a variable height and capable of scanning on a surface plate. SOLUTION: After an electrophotographic laminate 4 is mounted on a surface plate 3, a charger 5 applied by a voltage necessary for charging is scanned in a Y direction at a preset height and scanning speed to complete charging. Thereafter, exposure is finished, and a desired electrostatic latent image is obtained on the laminate 4. Accordingly, a charging step and an exposure step are separated, and since a charger scanning mechanism 6 and a moving mechanism of the plate 3 are separate, a scanning range of the charging condition is not narrowed according to the moving speed of the plate 3 of the apparatus, and the charging conditions of high degree of freedoms can be selected. When a thickness of the used laminate 4 is altered, a height of the charger 5 is changed to meet the thickness to obtain substantially similar charging state according to conventional charging conditions.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子写真法を利用
したプリント配線板を作製する工程に於いて、帯電及び
露光処理に用いる電子写真プリント配線板露光装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrophotographic printed wiring board exposure apparatus used for a charging and exposure process in a process of manufacturing a printed wiring board using electrophotography.

【0002】[0002]

【従来の技術】電子機器の軽薄短小化や多様化に伴い、
プリント配線板に於いても高密度化、工期の短縮化が要
求されている現在、従来のフォトマスクによる面露光描
画法に代わり、フラットベッド走査露光装置による直接
描画法の検討が進んでおり、これに対してレジスト材料
として電子写真感光体の応用が検討されている。
2. Description of the Related Art As electronic devices become lighter, thinner, smaller and more diversified,
At present, high density and shortened construction period are also required for printed wiring boards.Instead of the conventional surface exposure drawing method using a photomask, direct drawing method using a flatbed scanning exposure apparatus is being studied. On the other hand, application of an electrophotographic photosensitive member as a resist material has been studied.

【0003】電子写真法を利用したレジスト層の作製方
法は、絶縁性基板上に金属導電層を設けた絶縁性基板金
属導電層上に光導電層を設け、暗中で光導電層表面を一
様に帯電した後、露光により配線パターンに対応する静
電潜像を形成させる。この静電潜像をトナー現像処理及
び定着を行い、このトナー画像をレジストとして、トナ
ー画像非形成部の光導電層を溶解除去し、トナー画像と
光導電層とからなる金属導電層のレジスト画像が作製さ
れる。金属導電層の不要部の溶解除去及びそれ以降のプ
リント配線板の作製工程は、従来と同様にして行うこと
ができる。
A method of forming a resist layer using electrophotography is to provide a photoconductive layer on a metal conductive layer of an insulating substrate in which a metal conductive layer is provided on an insulating substrate, and to uniformly form the surface of the photoconductive layer in the dark. Then, an electrostatic latent image corresponding to the wiring pattern is formed by exposure. The electrostatic latent image is subjected to toner development processing and fixing, and the toner image is used as a resist to dissolve and remove the photoconductive layer in the toner image non-formed portion, and a resist image of a metal conductive layer including the toner image and the photoconductive layer is formed. Is produced. Dissolution and removal of the unnecessary portion of the metal conductive layer and the subsequent steps of manufacturing the printed wiring board can be performed in the same manner as in the related art.

【0004】電子写真法を利用した基材両面へのレジス
ト層の作製方法は、特開平6−224541号公報等に
開示されており、絶縁性基板の両面に金属導電層及び光
導電層を設けた電子写真積層板を両面同時現像して、両
面にトナー画像を形成させることが可能である。
A method of forming a resist layer on both sides of a substrate by using an electrophotographic method is disclosed in Japanese Patent Application Laid-Open No. Hei 6-224541 or the like. A metal conductive layer and a photoconductive layer are provided on both sides of an insulating substrate. It is possible to form a toner image on both sides by simultaneously developing the electrophotographic laminate on both sides.

【0005】プリント配線板に於いて、従来から適用さ
れているフォトポリマー、及びドライフィルムに挙げら
れるレジスト材料に於いては、ある膜厚をもって設けら
れたフォトポリマー、或いはドライフィルム層が紫外光
等により露光された部分が硬化もしくは可溶化してレジ
スト層が作製される。したがって、該レジスト材料に於
いては、帯電工程を必要としないため、フラットベッド
走査露光装置内、或いはそれ以前の工程に少なくとも帯
電を可能とする装置を設置する必要はなかった。このよ
うな帯電工程を不要とするレジスト材料に対して、電子
写真法を利用したレジスト材料を適用する場合に於いて
は、上記の様に描画装置に導入されるよりも前に光導電
層表面を帯電する工程を必要とする。
In a printed wiring board, a photopolymer conventionally used and a resist material mentioned in a dry film include a photopolymer provided with a certain film thickness, or a dry film layer formed of ultraviolet light or the like. The exposed portion is cured or solubilized to form a resist layer. Therefore, since the charging step is not required for the resist material, it is not necessary to install at least a device capable of charging in the flatbed scanning exposure apparatus or in a step before that. When a resist material utilizing electrophotography is applied to a resist material that does not require such a charging step, the surface of the photoconductive layer is introduced before being introduced into the drawing apparatus as described above. Requires a step of charging.

【0006】電子写真法を利用したレジスト層を作製す
る際に用いることのできるフラットベッド走査露光装置
としては、各種レーザー、もしくは発光ダイオードを光
源に用いたもの使用することが可能であり、少なくとも
露光中は光学系か被露光体の少なくとも何れか一方を移
動させながら行う。また、露光に際して光学系か被露光
体のどちらが移動する場合でも、少なくとも被露光体を
載置した定盤が露光部へ相対的に移動する過程を有する
ため、帯電装置を露光工程直前の部位に設置することに
より、露光装置内部で電子写真積層板表面の光導電層を
帯電することを可能とした電子写真プリント配線板露光
装置が開発されている。
[0006] As a flatbed scanning exposure apparatus which can be used when preparing a resist layer utilizing electrophotography, it is possible to use various lasers or those using light emitting diodes as light sources. The process is performed while moving at least one of the optical system and the object to be exposed. In addition, regardless of whether the optical system or the object to be moved during exposure, at least the surface plate on which the object to be exposed is mounted has a process of relatively moving to the exposure unit. An electrophotographic printed wiring board exposure apparatus has been developed which is capable of charging a photoconductive layer on the surface of an electrophotographic laminate within the exposure apparatus by being installed.

【0007】前記のような露光装置を含めて、帯電工程
にはコロナ帯電方式か接触帯電方式が用いられる。一般
に、コロナ帯電方式は5〜10kVの印加電圧が必要で
あり、ロール状帯電体やブラシ状帯電体を用いる接触帯
電方式の場合は0.5から2kV程度の印加電圧で良
い。前者ではその印加電圧の大きさから安全保守の問題
や光導電層の放電破壊による画像欠陥の問題が少なから
ず存在する。また、後者の場合でも、帯電体を接触させ
るという観点から、帯電体自体に付着したゴミや埃が影
響しやすいため、クリーナーブレード等による頻繁な帯
電体の清浄化が必要となる等の問題があり、一長一短で
ある。一般には適用するケースに従って両方の帯電方式
から選択されている。
In the charging step including the above exposure apparatus, a corona charging method or a contact charging method is used. In general, an applied voltage of 5 to 10 kV is required for the corona charging method, and an applied voltage of about 0.5 to 2 kV may be used for a contact charging method using a roll-shaped charging body or a brush-shaped charging body. In the former case, there are not a few problems of safety maintenance and a problem of image defects due to discharge breakdown of the photoconductive layer due to the magnitude of the applied voltage. Even in the latter case, from the viewpoint of contacting the charged body, dust and dirt adhering to the charged body itself are liable to be affected, so that there is a problem that frequent cleaning of the charged body by a cleaner blade or the like is necessary. There are advantages and disadvantages. Generally, both charging methods are selected according to the applicable case.

【0008】これまで、露光処理に関しては、最初に電
子写真積層板が帯電されながら露光部へ移動する際に同
時に露光も行う方法と、帯電を行いながら定盤の露光部
への移動が完了した後に、次工程として露光処理を帯電
処理とは切り離して行う方法との二通りがあった。両者
とも帯電装置は露光部入口手前の部位に固定されてお
り、前者では、露光処理に合わせた定盤の移動速度で帯
電工程も行う必要があるため、帯電条件に制約が課せら
れる。これに対して後者の場合は、帯電工程と露光工程
が別になっているため、フレキシブルに帯電条件を設定
することが可能である。したがって、帯電処理を含めた
露光処理の位置づけという点では後者の方が好ましい。
しかしながら、一部の露光装置に於いては、スペース的
な問題や装置のスペック上の問題から、帯電条件として
必要な定盤の移動速度、移動距離等の運転条件を満たす
ことが不可能な場合や制御の設計変更を要する場合があ
り、電子写真積層板全面への均一な帯電が困難になるこ
ともあった。
Heretofore, regarding the exposure processing, a method of simultaneously performing exposure when the electrophotographic laminate is first moved to the exposure section while being charged, and the movement of the surface plate to the exposure section while being charged have been completed. Later, there were two methods of performing the exposure process separately from the charging process as the next step. In both cases, the charging device is fixed at a position just before the entrance of the exposure unit. In the former case, it is necessary to perform the charging process at the moving speed of the surface plate in accordance with the exposure processing, and therefore, the charging conditions are restricted. On the other hand, in the latter case, the charging step and the exposure step are separate, so that the charging conditions can be set flexibly. Therefore, the latter is preferable in terms of positioning of the exposure processing including the charging processing.
However, in some exposure devices, it is not possible to satisfy the operating conditions such as the moving speed and moving distance of the surface plate required as charging conditions due to space problems and problems in the specifications of the device. In some cases, it may be necessary to change the design of control or control, and it may be difficult to uniformly charge the entire surface of the electrophotographic laminate.

【0009】また、コロナ帯電方式では帯電量の調整を
電極と積層板の距離、印加電圧、積層板の搬送速度で調
整する。従来行われている電子写真感光体のコロナ帯電
方式による帯電では、被帯電体の厚みがほぼ一定である
ために、上記の条件を固定することが可能であったが、
電子写真積層板は数十μm〜数mmと厚みの範囲が広い
ために、使用する電子写真積層板に合わせて該電子写真
積層板表面と帯電装置との距離、或いは他の条件の設定
をし直す必要があった。
In the corona charging method, the amount of charge is adjusted by the distance between the electrode and the laminate, the applied voltage, and the transport speed of the laminate. In the conventional charging of the electrophotographic photosensitive member by the corona charging method, the thickness of the member to be charged is almost constant, so that the above conditions can be fixed.
Since the thickness of the electrophotographic laminate is as large as several tens of μm to several mm, the distance between the surface of the electrophotographic laminate and the charging device or other conditions must be set according to the electrophotographic laminate to be used. I needed to fix it.

【0010】[0010]

【発明が解決しようとする課題】本発明は、電子写真法
により絶縁性基板の少なくとも片面に金属導電層及び光
導電層を設けた電子写真積層板を帯電及び露光するフラ
ットベッド型電子写真プリント配線板露光装置に於い
て、露光装置の性能によらず、一定の帯電条件により均
一な帯電状態を実現することが可能な電子写真プリント
配線板露光装置を提供することを課題とする。
SUMMARY OF THE INVENTION The present invention relates to a flatbed type electrophotographic printed wiring for charging and exposing an electrophotographic laminate having a metal conductive layer and a photoconductive layer provided on at least one surface of an insulating substrate by electrophotography. An object of the present invention is to provide an electrophotographic printed wiring board exposure apparatus capable of realizing a uniform charging state under a constant charging condition regardless of the performance of the exposure apparatus.

【0011】[0011]

【課題を解決するための手段】上記課題を解決するため
のプリント配線板のフラットベッド走査露光装置は、露
光機能を有する部位以外に、少なくとも帯電装置と、帯
電装置用の電源と、光導電層表面の帯電電位を検査する
ことを目的とする表面電位計と、電子写真積層板の帯電
面の接地を確保するための接地機構とが設けられてお
り、さらに帯電装置を主走査方向もしくは副走査方向へ
任意の一定速度で走査する機構(以下、帯電装置走査機
構)と、帯電装置高さ調節機構とを設ける。
In order to solve the above-mentioned problems, a flatbed scanning exposure apparatus for a printed wiring board includes at least a charging device, a power supply for the charging device, and a photoconductive layer in addition to a portion having an exposure function. A surface voltmeter for inspecting the charged potential of the surface is provided, and a grounding mechanism for ensuring grounding of the charged surface of the electrophotographic laminate is provided. A mechanism that scans at an arbitrary constant speed in the direction (hereinafter, charging device scanning mechanism) and a charging device height adjustment mechanism are provided.

【0012】したがって、本発明の電子写真プリント配
線板露光装置を用いれば、定盤上に載置された電子写真
積層板に対して、必要な電圧を印加した帯電装置を露光
工程とは別の駆動機構により走査させるため、任意の帯
電条件により帯電を行うことが可能になるばかりか、帯
電装置の高さを電子写真積層板の厚みに対して変動させ
ることにより、厚みの異なる電子写真積層板を使用する
場合にも大幅な帯電条件の変更を必要としなくなる。
Therefore, when the electrophotographic printed wiring board exposure apparatus of the present invention is used, a charging device to which a required voltage is applied is applied to the electrophotographic laminated board mounted on the surface plate separately from the exposure step. Since the scanning is performed by the driving mechanism, not only can charging be performed under any charging conditions, but the height of the charging device can be varied with respect to the thickness of the electrophotographic laminate, so that electrophotographic laminates having different thicknesses can be obtained. Also, when using, it is not necessary to change the charging condition drastically.

【0013】さらに、表面電位計による電子写真積層板
の帯電電位検査システムと、帯電装置走査機構、帯電装
置高さ調節機構、及び帯電装置への印加電圧の少なくと
も一つの帯電条件とのフィードバック制御により、最適
な帯電条件を容易に決定することが可能となる。
[0013] Further, a charging potential inspection system for an electrophotographic laminate by a surface voltmeter, a charging device scanning mechanism, a charging device height adjustment mechanism, and feedback control of at least one charging condition of a voltage applied to the charging device are performed by feedback control. In addition, it is possible to easily determine the optimal charging condition.

【0014】[0014]

【発明の実施の形態】以下、本発明の実施の電子写真プ
リント配線板露光装置について詳細に説明する。図1は
本発明による電子写真プリント配線板露光装置の一実施
例の斜視図である。図1に於いて、電子写真プリント配
線板露光装置は、帯電装置5と、帯電装置を露光の副走
査方向(Y方向)へ走査するための駆動装置(図示な
し)を備えた帯電装置走査機構6と、帯電装置高さ調節
機構7と、帯電後の光導電層の帯電電位を検査すること
を目的とする表面電位計測定プローブ8とが設置され
る。また、帯電装置5は図示しない直流電圧印加手段と
接続されており、帯電時に一定の電圧を印加できるよう
になっている。さらに、図示しない接地用部材により、
少なくとも電子写真積層板4の表面の光導電層が帯電さ
れている間は、該電子写真積層板4の金属導電層部位の
接地が確保されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an electrophotographic printed wiring board exposure apparatus according to an embodiment of the present invention will be described in detail. FIG. 1 is a perspective view of an embodiment of an electrophotographic printed wiring board exposure apparatus according to the present invention. In FIG. 1, the electrophotographic printed wiring board exposure apparatus includes a charging device 5 and a charging device scanning mechanism including a driving device (not shown) for scanning the charging device in a sub-scanning direction (Y direction) of exposure. 6, a charging device height adjusting mechanism 7, and a surface electrometer measuring probe 8 for inspecting the charged potential of the photoconductive layer after charging. In addition, the charging device 5 is connected to a DC voltage applying unit (not shown) so that a constant voltage can be applied during charging. Further, by a grounding member (not shown),
At least while the photoconductive layer on the surface of the electrophotographic laminate 4 is charged, the grounding of the metal conductive layer portion of the electrophotographic laminate 4 is ensured.

【0015】本発明に係わる帯電装置5は、一般的なコ
ロナ帯電装置か、或いはロール状帯電体を用いたロール
帯電装置、ブラシ状帯電体を用いたブラシ帯電装置を適
用する。
As the charging device 5 according to the present invention, a general corona charging device, a roll charging device using a roll charging member, and a brush charging device using a brush charging member are applied.

【0016】本発明による電子写真プリント配線板露光
装置に於いて、電子写真積層板4を定盤3上に載置した
後、予め設定した高さ及び走査速度で、帯電に必要な電
圧を印加した帯電装置5をY方向へ走査させることによ
り帯電を完了する。この後、従来の露光処理を終え、電
子写真積層板4に所望の静電潜像を得る。
In the electrophotographic printed wiring board exposure apparatus according to the present invention, after the electrophotographic laminate 4 is mounted on the surface plate 3, a voltage required for charging is applied at a preset height and scanning speed. The charging is completed by scanning the charged charging device 5 in the Y direction. Thereafter, the conventional exposure processing is completed, and a desired electrostatic latent image is obtained on the electrophotographic laminate 4.

【0017】したがって、帯電工程と露光工程が分離さ
れており、しかも帯電装置走査機構6と定盤の移動機構
が別であるため、露光装置の定盤の移動速度により帯電
条件の操作範囲が狭められること無く、自由度の高い帯
電条件を選択することが可能となる。
Therefore, the charging step and the exposing step are separated, and the charging device scanning mechanism 6 and the moving mechanism of the surface plate are separate. Therefore, the operating range of the charging condition is narrowed by the moving speed of the surface plate of the exposure device. This makes it possible to select a charging condition having a high degree of freedom without being performed.

【0018】また、使用する電子写真積層板4の厚みが
変更された場合は、それに合わせて帯電装置5の高さを
変更することにより従来の帯電条件でほぼ同様の帯電状
態を得ることが可能となる。必要に応じて、光学センサ
ーを用いて電子写真積層板4表面と帯電装置5の距離を
計測し、自動で帯電装置高さ調節機構7にフィードバッ
クするシステムを付加することも考えられる。
When the thickness of the electrophotographic laminate 4 to be used is changed, the same charging state can be obtained under the conventional charging conditions by changing the height of the charging device 5 in accordance with the change. Becomes If necessary, a system for measuring the distance between the surface of the electrophotographic laminate 4 and the charging device 5 using an optical sensor and automatically feeding back the measured result to the charging device height adjusting mechanism 7 may be added.

【0019】さらに、表面電位計測定プローブ8は、帯
電装置の背部の部位に設置されており、帯電装置5の走
査により帯電が行われると同時に直後に表面電位を測定
することが可能になっている。本実施例では該表面電位
測定プローブ8は1個であるが、主走査方向(X方向)
線上に複数個設けることにより、主走査方向の表面電位
の均一性を確認することが可能になる。該帯電電位検査
システムが付加されておれば、本発明による帯電装置走
査機構、及び帯電装置高さ調節機構による機能と併せる
ことにより、帯電装置走査速度、帯電装置と電子写真積
層板表面の距離、及び帯電装置への印加電圧の少なくと
も一つの帯電条件とのフィードバック制御を行えば、最
適な帯電条件を容易に決定することが可能となる。
Further, the surface potential meter measurement probe 8 is provided at a position behind the charging device, and the surface potential can be measured immediately after charging is performed by scanning the charging device 5. I have. In this embodiment, the number of the surface potential measuring probes 8 is one, but the main scanning direction (X direction)
By providing a plurality of lines on the line, it is possible to confirm the uniformity of the surface potential in the main scanning direction. If the charging potential inspection system is added, the charging device scanning mechanism according to the present invention, and in combination with the function of the charging device height adjustment mechanism, the charging device scanning speed, the distance between the charging device and the surface of the electrophotographic laminate, If the feedback control is performed with respect to at least one charging condition of the voltage applied to the charging device, it is possible to easily determine the optimum charging condition.

【0020】[0020]

【実施例】以下、本発明を実施例により詳説するが、本
発明はその趣旨を越えない限り、下記実施例に限定され
るものではない。また、電子写真法を用いたプリント配
線板の作成方法及び作製装置の詳細に関しては、特開平
10−209606号公報に記載されている。以下、特
に本発明の属する技術分野として位置づける帯電及び露
光工程について詳細に説明する。
EXAMPLES Hereinafter, the present invention will be described in detail with reference to examples, but the present invention is not limited to the following examples unless it departs from the gist. Further, details of a method and an apparatus for manufacturing a printed wiring board using electrophotography are described in JP-A-10-209606. Hereinafter, the charging and exposing steps, which are particularly regarded as a technical field to which the present invention belongs, will be described in detail.

【0021】実施例1 本実施例では、電子写真プリント配線板露光装置とし
て、赤色LEDアレイ型フラットベッド走査露光装置
(Lavenir製Pulsar9000)(以下、露
光装置)を適用した。該露光装置に於いては、定盤は2
0m/minの速度で移動する。該露光装置に於いて、
帯電装置として幅520mmのコロナ帯電装置を設置し
た。さらに、該コロナ帯電装置は定盤上を副走査方向
(Y方向)へ走査することが可能であり、且つコロナ帯
電装置のワイヤーと定盤面との距離を調整することが可
能である。走査速度、印加電圧、及びワイヤーと定盤面
との距離はそれぞれ、0から8.0m/min、0から
10kV、5から30mmまでの任意の値を設定するこ
とが可能になっている。また、表面電位計(GENTE
C製E.S.V.METER_CATE701)を使用
し、定盤の主走査方向(X方向)の中央部付近を走査す
るように、該表面電位計の測定プローブをコロナ帯電装
置の部位に装着した。
Example 1 In this example, a red LED array type flatbed scanning exposure apparatus (Pulsar 9000 manufactured by Lavenir) (hereinafter, exposure apparatus) was applied as an exposure apparatus for an electrophotographic printed wiring board. In the exposure apparatus, the surface plate is 2
It moves at a speed of 0 m / min. In the exposure apparatus,
A corona charging device having a width of 520 mm was installed as a charging device. Further, the corona charger can scan on the surface plate in the sub-scanning direction (Y direction), and can adjust the distance between the wire of the corona charger and the surface of the surface plate. The scanning speed, the applied voltage, and the distance between the wire and the platen surface can be set to arbitrary values from 0 to 8.0 m / min, from 0 to 10 kV, and from 5 to 30 mm, respectively. In addition, a surface electrometer (GENTE)
C. E. S. V. METER_CATE 701), and the measurement probe of the surface voltmeter was attached to the corona charger so as to scan near the center of the surface plate in the main scanning direction (X direction).

【0022】まず、両面銅張積層板(三菱ガス化学
(株)製、340×510×0.8mm、銅厚18μ
m)の両面に、浸漬法により5μm厚みで光導電層を形
成した電子写真積層板を作製した。次に、該電子写真積
層板を上記の露光装置の定盤上に載置及び固定した後、
暗中で帯電及び露光工程を経て、電子写真積層板の上面
に静電潜像を形成した。この際、帯電装置の走査速度、
印加電圧、及びワイヤーの高さはそれぞれ、5.5m/
min、6.0kV、15mmに設定することにより、
電子写真積層板の光導電層表面に於いて、270Vの帯
電電位を得た。
First, a double-sided copper-clad laminate (340 × 510 × 0.8 mm, copper thickness 18 μm, manufactured by Mitsubishi Gas Chemical Co., Ltd.)
An electrophotographic laminate having a 5 μm-thick photoconductive layer formed on both surfaces of m) by an immersion method was produced. Next, after placing and fixing the electrophotographic laminate on the surface plate of the exposure apparatus,
An electrostatic latent image was formed on the upper surface of the electrophotographic laminate through the charging and exposure steps in the dark. At this time, the scanning speed of the charging device,
The applied voltage and the height of the wire were 5.5 m /
min, 6.0 kV, and 15 mm,
A charging potential of 270 V was obtained on the surface of the photoconductive layer of the electrophotographic laminate.

【0023】この後、従来通りの液体トナー現像処理に
より良好なレジスト画像を得た。さらに、レジスト画像
を得なかった面を同様の工程により処理することにより
両面に所望のレジスト画像を形成することが可能であっ
た。さらに、非レジスト部光導電層の除去、Cuエッチ
ング処理、及びレジスト剥離処理を行い、所望のプリン
ト配線板を得た。得られた銅配線パターンには配線の欠
落、線幅の増加、非画像部の汚れ等の問題は確認されな
かった。
Thereafter, a good resist image was obtained by a conventional liquid toner developing process. Furthermore, a desired resist image could be formed on both surfaces by treating the surface on which no resist image was obtained by the same process. Furthermore, removal of the non-resist part photoconductive layer, Cu etching treatment, and resist peeling treatment were performed to obtain a desired printed wiring board. No problems were found in the obtained copper wiring pattern, such as missing wiring, increased line width, and contamination of the non-image area.

【0024】実施例2 実施例1と同様の露光装置を使用して、厚み0.1mm
の両面銅張積層板(三菱ガス化学(株)製、340×5
10×0.1mm、銅厚18μm)を用いて両面プリン
ト配線板の作製を試みた。光導電層の形成、液体トナー
現像以降の処理工程に関しては、実施例1と同様の操作
で行った。
Example 2 Using the same exposure apparatus as in Example 1, a thickness of 0.1 mm
Double-sided copper-clad laminate (Mitsubishi Gas Chemical Co., Ltd., 340 × 5
(10 × 0.1 mm, copper thickness: 18 μm) was attempted to produce a double-sided printed wiring board. The processing steps after the formation of the photoconductive layer and the development of the liquid toner were performed in the same manner as in Example 1.

【0025】該露光装置の帯電装置に関して、実施例1
と同様の帯電条件、すなわち、帯電装置の走査速度、印
加電圧、及びワイヤーの高さをそれぞれ、5.5m/m
in、6.0kV、15mmに設定して帯電を行ったと
ころ、電子写真積層板の光導電層表面に於いて240V
の帯電電位を得た。
Embodiment 1 concerning the charging device of the exposure apparatus
The charging conditions were the same as those described above, that is, the scanning speed of the charging device, the applied voltage, and the height of the wire were each 5.5 m / m.
in, 6.0 kV, 15 mm, and charged to 240 V on the surface of the photoconductive layer of the electrophotographic laminate.
Was obtained.

【0026】さらに、帯電条件に関して、帯電装置の走
査速度のみを5.5から5.2m/minへ減少させた
ところ、270Vの表面電位を得ることができた。ま
た、ワイヤーの高さを14.3mmに変更したところ、
同様に270Vの表面電位が得られた。したがって、電
子写真積層板の厚みの変化に対しても容易に対応するこ
とが可能である。
Further, regarding the charging conditions, when only the scanning speed of the charging device was reduced from 5.5 to 5.2 m / min, a surface potential of 270 V could be obtained. Also, when the height of the wire was changed to 14.3 mm,
Similarly, a surface potential of 270 V was obtained. Therefore, it is possible to easily cope with a change in the thickness of the electrophotographic laminate.

【0027】比較例 実施例1の露光装置に於いて、帯電装置を固定して定盤
の移動(移動速度20m/min)により電子写真積層
板の帯電を行うようにし、厚み0.8mmの両面プリン
ト配線板の作製を試みた。帯電装置の印加電圧、ワイヤ
ーの高さをそれぞれ、6.0kV、15mmとして帯電
を行ったところ、50Vの表面電位しか得られなかっ
た。さらに、印加電圧を10kVとしても、150Vの
表面電位であった。この状態からさらにワイヤーの高さ
を5mmまで減少させたところ、230Vまで表面電位
を増加することが可能であった。230Vの帯電量の場
合は、回路パターンを形成することが可能であった。
Comparative Example In the exposure apparatus of Example 1, the charging device was fixed, and the electrophotographic laminate was charged by moving the surface plate (moving speed: 20 m / min). We tried to make a printed wiring board. When charging was performed with the applied voltage of the charging device and the height of the wire set to 6.0 kV and 15 mm, respectively, only a surface potential of 50 V was obtained. Furthermore, the surface potential was 150 V even when the applied voltage was 10 kV. When the height of the wire was further reduced from this state to 5 mm, it was possible to increase the surface potential to 230 V. When the charge amount was 230 V, a circuit pattern could be formed.

【0028】しかしながら、印加電圧を増加していく
と、装置の安全保守上の問題があるばかりでなく、ワイ
ヤーの汚れによる帯電ムラを生じやすくなる、光導電層
の放電破壊を誘発しやすい等の問題があり、さらに、帯
電条件の自由度が極端に低下してしまうため、様々な仕
様の電子写真積層板に対応することが困難になる。
However, when the applied voltage is increased, not only there is a problem in safety maintenance of the device, but also it is easy to cause charging unevenness due to contamination of the wire, and it is easy to induce discharge breakdown of the photoconductive layer. There is a problem, and the degree of freedom of the charging conditions is extremely reduced, so that it is difficult to cope with electrophotographic laminates of various specifications.

【0029】[0029]

【発明の効果】以上のように、本発明に於いては、電子
写真法により絶縁性基板の少なくとも片面に金属導電層
及び光導電層をこの順で有する電子写真積層板からプリ
ント配線板を作製する工程に於いて、定盤上を走査する
ことが可能で、且つ高さを可変とする帯電装置を備える
電子写真プリント配線板露光装置を用いることにより、
露光装置の性能によらず、均一な帯電状態を実現するこ
とが可能となる。
As described above, in the present invention, a printed wiring board is manufactured from an electrophotographic laminate having a metal conductive layer and a photoconductive layer on at least one surface of an insulating substrate in this order by electrophotography. In the step of performing, by using an electrophotographic printed wiring board exposure apparatus having a charging device capable of scanning on the surface plate and having a variable height,
It is possible to realize a uniform charged state regardless of the performance of the exposure apparatus.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による電子写真プリント配線板露光装置
の一実施例の斜視図である。
FIG. 1 is a perspective view of an embodiment of an electrophotographic printed wiring board exposure apparatus according to the present invention.

【符号の説明】[Explanation of symbols]

1 電子写真プリント配線板露光装置本体 2 露光部入口 3 定盤 4 電子写真積層板 5 帯電装置 6 帯電装置走査機構 7 帯電装置高さ調整機構 8 表面電位計測定プローブ DESCRIPTION OF SYMBOLS 1 Electrophotographic printed wiring board exposure apparatus main body 2 Exposure part entrance 3 Surface plate 4 Electrophotographic laminate 5 Charging device 6 Charging device scanning mechanism 7 Charging device height adjustment mechanism 8 Surface electrometer measurement probe

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 絶縁性基板の少なくとも片面に金属導電
層及び光導電層を設けた電子写真積層板を帯電及び露光
するフラットベッド型電子写真プリント配線板露光装置
に於いて、静止した電子写真積層板上を走査することが
可能で、且つ該電子写真積層板表面からの距離を可変と
する帯電手段を有することを特徴とする電子写真プリン
ト配線板露光装置。
1. A stationary electrophotographic laminator in a flatbed type electrophotographic printed wiring board exposure apparatus for charging and exposing an electrophotographic laminate having a metal conductive layer and a photoconductive layer provided on at least one surface of an insulating substrate. An electrophotographic printed wiring board exposure apparatus, comprising: a charging means capable of scanning on a board and varying a distance from the surface of the electrophotographic laminated board.
JP10359610A 1998-12-17 1998-12-17 Apparatus for exposing electrophotographic printed circuit board Pending JP2000183499A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10359610A JP2000183499A (en) 1998-12-17 1998-12-17 Apparatus for exposing electrophotographic printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10359610A JP2000183499A (en) 1998-12-17 1998-12-17 Apparatus for exposing electrophotographic printed circuit board

Publications (1)

Publication Number Publication Date
JP2000183499A true JP2000183499A (en) 2000-06-30

Family

ID=18465380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10359610A Pending JP2000183499A (en) 1998-12-17 1998-12-17 Apparatus for exposing electrophotographic printed circuit board

Country Status (1)

Country Link
JP (1) JP2000183499A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007059715A (en) * 2005-08-25 2007-03-08 Sumitomo Heavy Ind Ltd Pattern forming method and pattern forming apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007059715A (en) * 2005-08-25 2007-03-08 Sumitomo Heavy Ind Ltd Pattern forming method and pattern forming apparatus

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