JP2000180727A - Objective lens and observing method - Google Patents

Objective lens and observing method

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Publication number
JP2000180727A
JP2000180727A JP10352798A JP35279898A JP2000180727A JP 2000180727 A JP2000180727 A JP 2000180727A JP 10352798 A JP10352798 A JP 10352798A JP 35279898 A JP35279898 A JP 35279898A JP 2000180727 A JP2000180727 A JP 2000180727A
Authority
JP
Japan
Prior art keywords
objective lens
lens
sample
liquid
optical member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10352798A
Other languages
Japanese (ja)
Inventor
Yasushi Oki
裕史 大木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10352798A priority Critical patent/JP2000180727A/en
Publication of JP2000180727A publication Critical patent/JP2000180727A/en
Pending legal-status Critical Current

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  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a high-resolution objective lens for a microscope in which liquid crystal is not attached to a sample by sticking an optical member, having an almost equal refractive index to that of the liquid crystal to the tip of the lens and substituting the optical member for a part formed between the tip of the lens and the sample and filled with the liquid crystal. SOLUTION: This objective lens A is used by filling a gap between the tip of lens, that is, a front lens 1 of the liquid immersed type objective lens and the sample 2 with liquid. Then, a glass-made parallel flat plate 3 which the optical member having the almost equal refractive index to that of the liquid is stuck to the lens 1 of the objective lens. Moreover, the transparent plate 3 is substituted for the part of the gap formed between the lens 1 of the objective lens and the sample 2 and filled with the liquid. When the sample 2 side of the lens 1 of the objective lens is not flat, a plano-convex lens is used in place of the plate 3. Additionally, the thickness of the plate 3 is set to be identical to that of an oil layer. At this time, it is preferable that the sample 2 be arranged as near to the plate 3 as possible.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、主に光学顕微鏡を
用いて標本を観察する観察方法に関し、また、その光学
顕微鏡で用いる対物レンズに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an observation method for observing a specimen mainly using an optical microscope, and also relates to an objective lens used in the optical microscope.

【0002】[0002]

【従来の技術】対物レンズの分解能は、波長及び開口数
(以下、NAとする)で決まる。通常、対物レンズの標
本側の媒質が空気である場合、対物レンズのNAの上限
は1である。従来では、NAが1であることを超えるた
めに、対物レンズと標本との間を液体で満たす所謂液型
浸対物レンズを用いる必要があった。
2. Description of the Related Art The resolution of an objective lens is determined by the wavelength and the numerical aperture (hereinafter referred to as NA). Usually, when the medium on the sample side of the objective lens is air, the upper limit of the NA of the objective lens is 1. Conventionally, in order to exceed the NA of 1, it has been necessary to use a so-called liquid immersion objective that fills the space between the objective lens and the sample with liquid.

【0003】[0003]

【発明が解決しようとする課題】ところが、液浸型対物
レンズは、標本に液体を付着させねばならず、用途が甚
だしく限定されてしまう。そこで、本発明では、上記問
題点に鑑み、標本に液体を付着させず、且つ、高分解能
な顕微鏡用の対物レンズ及び観察方法を提供することを
目的とする。
However, the liquid immersion type objective lens has to adhere a liquid to the sample, and its use is extremely limited. In view of the above problems, it is an object of the present invention to provide a high-resolution microscope objective lens and an observation method that do not allow liquid to adhere to a specimen.

【0004】[0004]

【課題を解決するための手段】上記問題点を解決するた
め、本発明では、レンズ先端と標本との間に液体を満た
して用いる対物レンズにおいて、前記レンズ先端に前記
液体とほぼ等しい屈折率を有する光学部材を接着し、前
記レンズ先端と前記標本との間の液体の満たされた部分
を前記透明な光学部村で置き換えたことを特徴とする対
物レンズを提供する。
In order to solve the above-mentioned problems, according to the present invention, in an objective lens used by filling a liquid between a lens tip and a sample, a refractive index substantially equal to the liquid is provided at the lens tip. An objective lens is provided, wherein an optical member is adhered, and a portion filled with liquid between the lens tip and the specimen is replaced with the transparent optical part.

【0005】また、本発明では、対物レンズにより標本
の像を拡大し、該標本の像を接眼レンズにより更に拡大
して観察する観察方法において、前記対物レンズは、レ
ンズ先端と標本との間に液体を満たして使用する液浸型
対物レンズであり、前記対物レンズの前記レンズ先端
に、前記液体とほぼ等しい屈折率を有する光学部材を接
着し、該光学部材と前記標本とは、エバネッセント波の
影響がある距離分だけ離されていることを特徴とする観
察方法も提供する。
According to the present invention, in an observation method in which an image of a sample is enlarged by an objective lens and the image of the sample is further enlarged and observed by an eyepiece, the objective lens is provided between the lens tip and the sample. An immersion type objective lens used by filling with a liquid, an optical member having a refractive index substantially equal to that of the liquid is adhered to the lens tip of the objective lens, and the optical member and the specimen are formed of an evanescent wave. An observation method characterized by being separated by an affected distance is also provided.

【0006】[0006]

【発明の実施の形態】液浸型対物レンズの先玉に接着す
る透明光学部材によって、本来液体で満たされているは
ずの領域が同じ屈折率を有する透明光学部材で置き換え
られる。従って、この部分を通過する光線になんら変化
は無く、液浸にすること無しに液浸相当のNAを達成す
ることができる。ただしこの場合、NAが1を超える領
域を形成する光束は、透明光学部材の表面で全反射し、
空気中に出ることができない。しかし、標本が透明光学
部材に極めて近接して設置されているとき、エバネッセ
ント波が結像に関与することにより、実質的にNAが1
を超える、ほぼ液浸型対物レンズと同等な分解能を得る
ことができる。ここで、エバネッセント波は、NAが1
を超える領域を形成する光束が空気中に浸み出したもの
である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A transparent optical member adhered to the front lens of an immersion objective lens replaces a region that should be originally filled with liquid with a transparent optical member having the same refractive index. Accordingly, there is no change in the light passing through this portion, and an NA equivalent to immersion can be achieved without immersion. However, in this case, the luminous flux forming the area where the NA exceeds 1 is totally reflected on the surface of the transparent optical member,
Can't get into the air. However, when the specimen is placed very close to the transparent optical member, the NA is substantially 1 due to the evanescent wave participating in the imaging.
And a resolution substantially equivalent to that of an immersion type objective lens can be obtained. Here, the evanescent wave has an NA of 1
The luminous flux forming the region exceeding oozes into the air.

【0007】この分解能向上は、また、照明された標本
からの回折光がエバネッセント光であっても、極めて近
接した透明光学部材内に入射し、進行波となって後面に
到達する、と考えても良い。こうして、通常は集めるこ
とのできないエバネッセントモードの回折光まで結像に
含めることで、より高い分解能を実現できる。当然の事
ではあるが、標本と透明光学部材は離れているので、標
本に液体を付着させることは無くなる。
[0007] This improvement in resolution is considered that even if the diffracted light from the illuminated specimen is evanescent light, it enters the extremely close transparent optical member and travels as a traveling wave to reach the rear surface. Is also good. In this manner, higher resolution can be realized by including in the image even diffracted light in the evanescent mode, which cannot be collected normally. As a matter of course, since the sample and the transparent optical member are separated from each other, the liquid does not adhere to the sample.

【0008】[0008]

【実施例】〔第1実施例〕図1は、本発明による対物レ
ンズの第1実施例を示す図である。液浸型対物レンズの
先玉1の先端と標本2との間のオイルの部分を、透明光
学部材であるガラス製の平行平面板3で置き換えたもの
である。先玉1の標本側が平面でないときは、もちろん
平行平面板の代わりに平凸レンズを用いる。また、平行
平面板3の厚みは、オイル層の厚さDと同じとする。こ
のとき、標本2は、平行平面板3にできるだけ近接して
いることが望ましいが、使用波長λ程度まで離れていて
も良い。ただし、エバネッセント光でも一般にNAの高
い光ほど空気中での減衰が早いので、高分解能で観察す
るためには標本は、近づける方がよい。このことを、条
件式化して表現すると、平行平面板3と標本2との間隔
δdは、0<δd≦λであることが望ましい。δd=0
では、先玉1の先端が標本2とくっついてしまうので、
意味がない。また、δdがλより大きいと、エバネッセ
ント光の効果が薄れてしまい、好ましくない。
FIG. 1 is a view showing a first embodiment of an objective lens according to the present invention. The oil portion between the tip of the front lens 1 of the immersion type objective lens and the specimen 2 is replaced by a glass parallel plane plate 3 which is a transparent optical member. When the specimen side of the front lens 1 is not flat, a plano-convex lens is used instead of the parallel plane plate. The thickness of the parallel plane plate 3 is the same as the thickness D of the oil layer. At this time, the sample 2 is desirably as close as possible to the plane-parallel plate 3, but may be as far as the used wavelength λ. However, even with evanescent light, the light having a higher NA generally attenuates faster in the air. Therefore, in order to observe with high resolution, it is better to bring the sample closer. If this is expressed as a conditional expression, it is desirable that the distance δd between the parallel plane plate 3 and the specimen 2 is 0 <δd ≦ λ. δd = 0
Then, the tip of the front lens 1 will stick to the sample 2,
meaningless. On the other hand, if δd is larger than λ, the effect of the evanescent light is undesirably reduced.

【0009】本実施例で用いた液浸型対物レンズは、同
一出願人による特開昭61−240218号に開示され
たものであり、表1の諸元を有する。尚、屈折率及びア
ッベ数はd線に対する値であり、焦点距離は1に規格化
してある。
The immersion type objective lens used in the present embodiment is disclosed in Japanese Patent Application Laid-Open No. 61-240218 by the same applicant, and has the specifications shown in Table 1. The refractive index and Abbe number are values for the d-line, and the focal length is normalized to 1.

【0010】[0010]

【表1】 [Table 1]

【0011】〔第2実施例〕図2は、本発明による対物
レンズの第2実施例を示す図である。本実施例で用いた
液浸型対物レンズは、同一出願人による特開平9−25
8107号に開示されたものであり、表2の諸元を有す
る。尚、屈折率及びアッベ数はd線に対する値であり
る。
[Second Embodiment] FIG. 2 is a view showing a second embodiment of the objective lens according to the present invention. The immersion type objective lens used in the present embodiment is disclosed in
No. 8107, and has the specifications of Table 2. The refractive index and Abbe number are values for d-line.

【0012】[0012]

【表2】 [Table 2]

【0013】本実施例で用いた液浸型対物レンズは、所
謂補正環付き対物レンズであって、構成レンズのうちの
一部を光軸方向に動かすことでオイル層の厚さDが変化
しても球面収差の変化を修正することが可能な対物レン
ズである。この様な対物レンズを用いることで、平行平
面板3の製造公差を緩くすることが可能になる。つま
り、平行平面板3の厚みにばらつきがあっても、構成レ
ンズのうちの一部を光軸方向に動かすことで、球面収差
を修正することができるようになる。 〔第3実施例〕図3は、本発明による顕微鏡の実施例を
示す図である。本実施例の顕微鏡は、所謂無限系の顕微
鏡である。
The immersion type objective lens used in the present embodiment is a so-called objective lens with a correction ring, and the thickness D of the oil layer changes by moving a part of the constituent lenses in the optical axis direction. This is an objective lens that can correct a change in spherical aberration. By using such an objective lens, the manufacturing tolerance of the parallel flat plate 3 can be reduced. That is, even if the thickness of the parallel plane plate 3 varies, the spherical aberration can be corrected by moving a part of the constituent lenses in the optical axis direction. [Third Embodiment] FIG. 3 is a view showing an embodiment of a microscope according to the present invention. The microscope of this embodiment is a so-called infinite microscope.

【0014】無限系の顕微鏡なので、対物レンズは、第
2実施例を用いたものを使用する。対物レンズAの約9
0mm後方に第2対物レンズBを配置している。これに
より、標本2の実像が形成される。この実像を接眼レン
ズCによって拡大し、観察する。ここで、対物レンズA
の先玉1には、接着剤によって、平行平面板3が接着さ
れている。また、平行平面板3と標本2との間隔はδd
であり、対物レンズAの先玉1と標本2との間隔はD+
δdである。尚、平行平面板3の接着には、水貼りを行
ってもよい。
Since it is an infinite microscope, the objective lens used in the second embodiment is used. About 9 of objective lens A
The second objective lens B is disposed 0 mm behind. Thereby, a real image of the specimen 2 is formed. This real image is enlarged by the eyepiece C and observed. Here, the objective lens A
A parallel flat plate 3 is bonded to the front lens 1 by an adhesive. The distance between the parallel plane plate 3 and the sample 2 is δd
And the distance between the front lens 1 of the objective lens A and the specimen 2 is D +
δd. The parallel flat plate 3 may be bonded with water.

【0015】このように、上記の各実施例によれば、液
浸にすることなく液浸相当の分解能を得ることができ、
工業用途などで有用である。さらに、もととなる液浸型
対物レンズに先玉加を行うだけでよいので、新たな設
計、製造も不要であり、コストダウンにつながる。
As described above, according to the above embodiments, resolution equivalent to immersion can be obtained without immersion.
Useful for industrial applications. Further, since it is only necessary to add a front lens to the original liquid immersion type objective lens, new design and manufacturing are unnecessary, leading to cost reduction.

【0016】[0016]

【発明の効果】以上のように、本発明によって、標本に
液体を付着させず、且つ、高分解能な顕微鏡用の対物レ
ンズ及び観察方法を提供することが可能となった。
As described above, according to the present invention, it has become possible to provide an objective lens for a microscope and an observation method which does not cause liquid to adhere to a specimen and has a high resolution.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明による対物レンズの第1実施例
を示す図である。
FIG. 1 is a diagram showing a first embodiment of an objective lens according to the present invention.

【図2】図2は、本発明による対物レンズの第2実施例
を示す図である。
FIG. 2 is a diagram showing a second embodiment of the objective lens according to the present invention.

【図3】図3は、本発明による顕微鏡を示す図である。FIG. 3 is a diagram showing a microscope according to the present invention.

【符号の説明】[Explanation of symbols]

A 対物レンズ B 第2対物レンズ C 接眼レンズ 1 対物レンズの先玉 2 標本 3 平行平面板 A Objective lens B Second objective lens C Eyepiece 1 Front lens of objective lens 2 Specimen 3 Parallel plane plate

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】レンズ先端と標本との間に液体を満たして
用いる対物レンズにおいて、 前記レンズ先端に前記液体とほぼ等しい屈折率を有する
光学部材を接着し、前記レンズ先端と前記標本との間の
液体の満たされた部分を前記透明な光学部村で置き換え
たことを特徴とする対物レンズ。
1. An objective lens which is used by filling a liquid between a lens tip and a sample, wherein an optical member having a refractive index substantially equal to that of the liquid is adhered to the lens tip, and an optical member is provided between the lens tip and the sample. An objective lens, wherein a portion filled with a liquid is replaced by the transparent optical part.
【請求項2】対物レンズにより標本の像を拡大し、該標
本の像を接眼レンズにより更に拡大して観察する観察方
法において、 前記対物レンズは、レンズ先端と標本との間に液体を満
たして使用する液浸型対物レンズであり、 前記対物レンズの前記レンズ先端に、前記液体とほぼ等
しい屈折率を有する光学部材を接着し、 該光学部材と前記標本とは、エバネッセント波の影響が
ある距離分だけ離されていることを特徴とする観察方
法。
2. An observation method in which an image of a specimen is enlarged by an objective lens and the image of the specimen is further enlarged and observed by an eyepiece, wherein the objective lens is filled with a liquid between a lens tip and the specimen. An immersion type objective lens to be used, wherein an optical member having a refractive index substantially equal to that of the liquid is adhered to the lens tip of the objective lens, and the optical member and the sample are at a distance affected by an evanescent wave. An observation method characterized by being separated by an amount.
JP10352798A 1998-12-11 1998-12-11 Objective lens and observing method Pending JP2000180727A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10352798A JP2000180727A (en) 1998-12-11 1998-12-11 Objective lens and observing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10352798A JP2000180727A (en) 1998-12-11 1998-12-11 Objective lens and observing method

Publications (1)

Publication Number Publication Date
JP2000180727A true JP2000180727A (en) 2000-06-30

Family

ID=18426517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10352798A Pending JP2000180727A (en) 1998-12-11 1998-12-11 Objective lens and observing method

Country Status (1)

Country Link
JP (1) JP2000180727A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009134250A (en) * 2007-11-02 2009-06-18 Nikon Corp Immersion microscope objective lens

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009134250A (en) * 2007-11-02 2009-06-18 Nikon Corp Immersion microscope objective lens
EP2211220A1 (en) * 2007-11-02 2010-07-28 Nikon Corporation Immersion microscope objective
EP2211220A4 (en) * 2007-11-02 2013-11-06 Nikon Corp Immersion microscope objective

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