JP2000173517A - Rotating anode x-ray tube, x-ray device with it, and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotating anode X-ray tube preventing enlargement of an effective focal spot, a X-ray device with the tube, and a manufacturing method thereof. SOLUTION: This rotating anode X-ray tube has disc-shaped rotor 21 provided with a X-ray radiating surface 22 which emits X-ray when irradiated by an electron beam, a rotator 25 connected with the disc-shaped rotor 21, a fixing body 31 fitted with the rotor 25 maintaining a bearing gap, a vacuum envelope 41 which houses the disc-shaped rotor 21, the rotator 25, and the fixing body 31. Spiral grooves 32a, 32b are formed on the side of the fixing body 31, between them and the rotating body 25 a dynamic sliding bearing in radial direction is formed. And, spiral grooves 33a, 33b are also formed on the upper and lower end surfaces of the fixing body 31, between them and the rotating body 25 a dynamic sliding bearing in thrust direction is formed, and finish machining of the X-ray radiating surface 22 is carried out in a situation that the disc- shaped rotor 21 and the rotator are connected spiral grooves 32a, 32b are formed on a side face of the fixing body 31 and a dynamic sliding bearing in a radial direction is formed between the fixing body and the rotator.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotating anode type X-ray tube with reduced deflection in the X-ray emission direction, an X-ray apparatus equipped with the same, and a method of manufacturing the same.

[0002]

2. Description of the Related Art As one of inspection apparatuses utilizing X-rays, there is an apparatus for inspecting a broken wiring pattern of an integrated circuit.
This apparatus irradiates a circuit board on which a wiring pattern is formed with X-rays, and inspects a wiring pattern for disconnection based on an X-ray image transmitted through the circuit board. In the case of such a disconnection inspection apparatus, an X-ray tube having a small effective focus is used because the wiring pattern of the integrated circuit has a fine structure.

[0003] Conventionally, as an X-ray tube having a small effective focus,
A microfocus X-ray tube is used. here,
The microfocus X-ray tube will be described with reference to FIG.

[0004] Reference numeral 51 denotes a vacuum envelope constituting a microfocus X-ray tube, and an anode 52 is disposed in the vacuum envelope 51. The tip of the anode 52 is a cylindrical portion 52a, and an opening 52b is provided in a part of the cylindrical portion 52a. An inclined X-ray emitting surface 52c is provided inside the cylindrical portion 52a. The cathode 53 is arranged at a position facing the opening 52b of the cylindrical portion 52a. A heater 54 is provided behind the cathode 53, and a grid 55 for controlling an electron beam is arranged between the cathode 53 and the opening 52b. In the configuration described above, the electron beam e is emitted from the cathode 53 by heating by the heater 54. The electron beam e is applied to the X-ray emitting surface 52c through the opening 52b, and X-rays are emitted from the X-ray emitting surface 52c. The emitted X-ray is output to the outside through an output window 51a of the envelope 51.

[0005]

SUMMARY OF THE INVENTION Microfocus X
The effective focal point of the tube is as small as about 10 μm. However, since the anode is fixed, a large output cannot be obtained, and the output of the X-ray is limited. Therefore, it is not suitable for photographing a moving subject that irradiates a large output X-ray in a short time.

Therefore, in order to solve the drawback of the microfocus X-ray tube having the fixed anode, the anode is rotated using a ball bearing and the X-ray having a small effective focal point is used.
A wire tube was prototyped and evaluated. As a result, the structure of the conventional rotating anode type X-ray tube, for example, the disk-shaped rotating body on which the X-ray emitting surface is formed and the rotating body supporting the disk-shaped rotating body are processed independently, and thereafter, the disk is rotated. In the structure in which the rotating body and the rotating body are integrated, the coaxial relationship between the X-ray emitting surface that emits X-rays and the rotating shaft of the rotating body cannot be sufficiently ensured, and the X-rays are generated along with the rotation of the anode. It was found that a run-out occurred in the release direction.

When the X-ray emission direction is deflected in a certain angle range, the effective focal point is substantially increased, and the effective focal point of about 10 μm becomes, for example, about 30 μm. For this reason, the conventional rotary anode type X-ray tube cannot obtain an effective focus of a size of about 10 μm required for inspection such as disconnection of a wiring pattern of an integrated circuit.

The rate at which the effective focal point increases due to the fluctuation of the X-ray emission direction increases as the focal point size decreases. For example, when the focal size is about 100 μm, the deviation becomes a size that cannot be ignored. Also, if the focal size is 50
When the thickness is less than μm, the shift becomes remarkable. In the case of operating for a long time, the average output power is lower than that of a conventional fixed anode microfocus X-ray tube in which the anode is water-cooled.

SUMMARY OF THE INVENTION An object of the present invention is to provide a rotary anode type X-ray tube in which an increase in effective focal point is suppressed, an X-ray apparatus equipped with the same, and a method of manufacturing the same.

[0010]

SUMMARY OF THE INVENTION The present invention provides an X-ray radiating surface that emits microfocus X-rays for photographing a subject, a rotating body to which the X-ray radiating surface is coupled, and a bearing gap. A rotating body fitted with the rotating body, a rotating anode type X-ray tube having a vacuum envelope accommodating the X-ray radiating surface, the rotating body, and the fixed body, and a rotating force applied to the rotating body. An X-ray apparatus comprising: a coil for generating a rotating magnetic field for applying the object; and an imaging device for projecting the subject and converting an enlarged X-ray image into an electric image or an optical image. It is characterized in that the wire tube has a hydrodynamic slide bearing having a spiral groove.

Further, according to the present invention, an X-ray radiating surface for emitting X-rays by irradiating an electron beam, a rotating body coupled to the X-ray radiating surface, and the rotating body fitted to the rotating body while maintaining a bearing gap. In a rotating anode X-ray tube including a fixed body, the X-ray emitting surface, the rotating body, and a vacuum envelope accommodating the fixed body, finishing of the X-ray emitting surface is performed by the X-ray. It is characterized in that the irradiation is performed in a state where the radiation surface and the rotating body are connected.

Further, according to the method of manufacturing a rotary anode type X-ray tube of the present invention, a step of forming an X-ray emitting surface for emitting X-rays by irradiating an electron beam, and combining the X-ray emitting surface and the rotating body. Performing the finishing of the X-ray radiating surface in a state where the X-ray radiating surface and the rotating body are coupled to each other. The method comprises a step of fitting a fixed body to a body, and a step of housing the X-ray emitting surface, the rotating body, and the fixed body in a vacuum envelope, respectively.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. 1 by taking as an example a case where the present invention is applied to a disconnection inspection apparatus for inspecting a disconnection of a wiring pattern of an integrated circuit.

Reference numeral 11 denotes a housing constituting the disconnection inspection apparatus, and a lead shield layer 11a is provided on the inner surface of the housing 11. An X-ray tube 12 that emits X-rays of a minute focus is arranged below the inside of the housing 11. Above the X-ray tube 12, an object to be inspected 13 such as a circuit board for inspecting the presence or absence of disconnection of the wiring pattern is arranged.
Above the object 13 to be inspected, an X-ray intensifier 14 and an imaging tube 15 are sequentially arranged. A viewing window 16 is provided in a part of the housing 11 so that the inside can be monitored.

In the above-described configuration, the X-ray emitted from the X-ray tube 12 is irradiated on the inspection object 13. And
The X-ray image projected on the inspected object 13 is input to the X-ray multiplier 14 and amplified. The X-ray image amplified by the X-ray intensifier tube 14 is converted into an enlarged electric image by projecting the subject in the imaging tube 15. Further, the electric image output from the image pickup tube 15 is converted into a visible image by a picture tube (not shown) or the like, and the wiring pattern of the inspection object 13 is inspected for disconnection.

Here, the X-ray tube 12 used in the above-described disconnection detecting device will be described with reference to the sectional views of FIGS. 2 to 4, corresponding parts are denoted by the same reference numerals, and duplicate description will be partially omitted.

First, as shown in FIG. 2, the rotating part 20 of the X-ray tube is assembled. Reference numeral 21 denotes a disk-shaped rotating body.
An X-ray radiating surface 22 that emits X-rays by irradiating an electron beam is provided on the upper surface of the disc-shaped rotator 21. On the lower surface of the disk-shaped rotator 21, a blackening film 23 is formed to enhance the heat radiation effect.

The disk-shaped rotator 21 provided with the X-ray radiating surface 22 is mechanically coupled to a bottomed cylindrical rotator 25 via a rotary shaft 24. The rotating body 25 has, for example, a three-layer structure of an outer cylinder 25a, an intermediate cylinder 25b, and a bottomed inner cylinder 25c, and a part of the intermediate cylinder 25b is connected to the rotating shaft 24. Outer cylinder 25a
Is made of copper, and has an intermediate cylinder 25b and a bottomed inner cylinder 25c.
Are contacted by a plurality of protrusions 26, and a heat insulating gap 27 is provided between the two.

As described above, the disk-shaped rotator 21 provided with the X-ray emission surface 22 and the like and the rotator 25 having a three-layer structure are integrated via the rotary shaft 24. Then, the finish processing of the X-ray emission surface 22 is performed in a state where the disk-shaped rotating body 21 and the rotating body 25 are integrated. At this time, the processing is performed so that the X-ray emission surface 22 and the rotation axis of the rotating body 25 have a coaxial relationship. That is, when the X-ray emitting surface 22 is rotated, the entire annular region on the X-ray emitting surface irradiated with the electron beam is processed so as to have the same angle with respect to the rotation axis of the rotating body.

By such processing, the deflection in the X-ray emission direction, that is, the deflection in the extension direction of the rotating shaft (the vertical direction in the drawing) is reduced. For example, the disk-shaped rotator 21 and the rotator 25 are individually processed, and then compared with a conventional structure in which the two are connected by a rotary shaft 24, and the X-ray emission surface 2
2 and the coaxiality of the rotating shaft of the rotating body 25 are improved.

Next, as shown in FIG. 3, the rotating mechanism portion 30 of the X-ray tube is assembled using the integrated disk-shaped rotating body 21 and rotating body 25. At this time, the fixed body 31 is fitted into the internal space of the rotating body 25 while keeping a narrow bearing gap.

A spiral groove 32 is formed on the side surface of the fixed body 31.
a and 32b are formed, and a radial dynamic sliding bearing is formed between the bearing and the rotating body 25. In addition, the fixed body 31
Spiral grooves 33a, 33b are also formed on the upper and lower end faces of
A dynamic pressure type sliding bearing in the thrust direction is formed between the bearing and the rotating body 25. Further, a lubricant accommodating chamber 34 is provided at a central portion of the fixed body 31. The lubricant storage chamber 34 stores a liquid metal lubricant. Further, a passage 35 is provided between the lubricant accommodating chamber 34 and the dynamic slide bearing, and the liquid metal lubricant accommodated in the lubricant accommodating chamber 34 is supplied to the dynamic slide bearing through the passage 35. ing. The lower end of the rotating body 25 is sealed with a sealing body 36.

Next, as shown in FIG. 4, the rotating mechanism of the X-ray tube is housed in a vacuum envelope, and a rotating anode type X-ray tube is assembled.

Reference numeral 41 denotes a vacuum envelope constituting an X-ray tube. The vacuum envelope 41 is composed of a large-diameter portion 41a having a large diameter and a small-diameter portion 41b having a small diameter. An output window 42 is provided in a part of the large-diameter portion 41a. And
The rotating mechanism portion (FIG. 3) is housed such that the disk-shaped rotating body 21 is located at the large-diameter portion 41a and the fitting portion between the rotating body 25 and the fixed body 31 is located at the small-diameter portion 41b. . Further, a cathode 43 is arranged at a position facing the X-ray emission surface 22 of the disc-shaped rotator 21.

In this case, the end of the fixed body 31 is formed by the auxiliary metal ring 44 and the metal sealing 45 by the small diameter portion 4.
1b. A coil 46 for generating a rotating magnetic field is arranged outside the small diameter portion 41b.

When operating the rotating anode type X-ray tube having the above-described structure, a high voltage is applied to the anode constituted by the disk-shaped rotating body 21 and the like. In addition, a current is supplied to the coil 46 to generate a rotating magnetic field. The rotating body 25 is rotated by the rotating magnetic field. By the rotation of the rotator 25, the disc-shaped rotator 21 rotates, and the X-ray emission surface 22 rotates. In this state, the cathode 43
Irradiates the X-ray emission surface 22 with an electron beam, and the X-ray emission surface 22 emits X-rays. The emitted X-ray is output to the outside through the output window 42.

According to the above-described configuration, the disk-shaped rotating body 21
After integrating the rotating body 25 with the X-ray emitting surface 22, the X-ray emitting surface 22 on the disk-shaped rotating body 21 is finished so that the X-ray emitting surface 22 and the rotation axis of the rotating body 25 have a coaxial relationship. . Therefore, a good coaxial relationship is obtained between the X-ray emission surface 22 and the rotation axis of the rotating body 25.

For this reason, even if the anode rotates, the fluctuation of the emitted X-rays becomes small. As a result, an X-ray tube having a small effective focus, that is, a so-called effective focus as viewed from the output window 42 side is realized. In addition, since the anode is configured to rotate, a large output can be obtained, which is effective for photographing a moving subject that takes a short time using the large output.

For example, the effective focal point on the X-ray emitting surface that emits X-rays is 10 mm in the vertical and horizontal directions, respectively.
Even when the size is 0 μm or less, the increase in the effective focus is small. In the case where the fitting portion between the rotating body and the fixed body is constituted by a dynamic pressure type sliding bearing, the effective focal point on the X-ray emission surface is 50 μm in each of the vertical and horizontal directions.
Even with the following size, the increase in the effective focus is kept small.

Next, another example of the X-ray tube 12 used in the disconnection detecting device and the like will be described with reference to the sectional views of FIGS. In FIGS. 5 to 7, corresponding parts are denoted by the same reference numerals, and duplicate description is partially omitted.

First, the rotating part 61 of the X-ray tube having the structure shown in FIG. 5 is assembled. In the rotating part 61, for example, an anode target part 62 and a bottomed cylindrical part 63 are directly connected integrally. The upper surface of the anode target portion 62 has a flat center and a slanted periphery. An X-ray emission surface 62a that emits X-rays by irradiating an electron beam is provided on the slope of the anode target portion 62. In addition, on the outer peripheral side wall portion of the bottomed cylindrical portion 63,
An outer cylinder 64 made of copper is attached.

Then, in the state where the anode target portion 62 and the bottomed cylindrical portion 63 are integrated, the finish processing of the X-ray emission surface 62a is performed. At this time, the processing is performed so that the X-ray emission surface 62a and the rotation axis of the bottomed cylindrical portion 63 have a coaxial relationship. For example, when the X-ray emitting surface 62a rotates, the entire annular region on the X-ray emitting surface 62a to be irradiated with the electron beam has the same angle with respect to the rotation axis mm of the bottomed cylindrical portion 63. Processed into By such processing, the deflection in the X-ray emission direction, that is, the deflection in the extension direction (vertical direction in the drawing) of the rotation axis mm is reduced. Therefore, compared to the conventional structure in which the anode target portion and the bottomed cylindrical portion are joined by a rotating shaft or the like after processing the X-ray emitting surface, the coaxiality between the X-ray emitting surface and the rotating axis mm is improved. I do.

Next, as shown in FIG. 6, the rotating portion 6 in which the anode target portion 62 and the bottomed cylindrical portion 63 are integrated.
1 is used to assemble the rotating mechanism portion 71 of the X-ray tube. At this time, the fixed body 72 is fitted into the inner space of the bottomed cylindrical portion 63 while keeping a narrow bearing gap. Fixed body 72
Has a bottomed cylindrical shape, and has a columnar space 72a provided therein. Also, the lower end of the bottomed cylindrical portion 63 is a sealing body 73.
Is sealed.

Helical grooves 73a and 73b are provided in pairs on the side surface of the fixed body 72, for example, at two upper and lower positions, and a radial dynamic sliding bearing is formed between the fixed body 72 and the bottomed cylindrical portion 63. ing. Further, spiral grooves 74a and 74b are provided on the end surface on the fixed body 72 and the sealing body 73, and a dynamic pressure type sliding bearing in the thrust direction is formed.

Next, as shown in FIG. 7, the rotating mechanism portion 71 of the X-ray tube is housed in a vacuum envelope and assembled into a rotating anode type X-ray tube.

Reference numeral 81 denotes a vacuum envelope constituting an X-ray tube. The vacuum envelope 81 is composed of a large-diameter portion 81a having a large diameter and a small-diameter portion 81b having a small diameter. An output window 82 is provided in a part of the large-diameter portion 81a. And
The rotating mechanism portion 71 (FIG. 6) is housed such that the anode target portion 62 is located at the large-diameter portion 81a and the fitting portion between the rotating portion 61 and the fixed body 72 is located at the small-diameter portion 81b. . Further, a cathode 83 is arranged at a position facing the X-ray emission surface 62a of the anode target portion 62.

In this case, the end 72b of the fixed body 72 is sealed to the small-diameter portion 81b by the auxiliary metal ring 84 and the metal sealing 85. A coil 86 for generating a rotating magnetic field is arranged outside the small diameter portion 81b. A cylindrical member 87 for forming a cooling path is arranged in a space 72a inside the fixed body 72. Cylindrical member 87
The lower end of the drawing extends outside the vacuum envelope 81.
Then, a cooling medium, for example, cooling water is introduced from the central portion of the lower end of the cylindrical member 87 in the direction of arrow Y1. The cooling water proceeds upward, and at the upper end in the direction of arrow Y2, the cylindrical member 87
, And into the child gap with the fixed body 72, and is led out in the arrow Y3 direction.

When operating the rotating anode type X-ray tube having the above-described structure, a high voltage is applied to the anode constituted by the anode target portion 62 and the like. In addition, a current is supplied to the coil 86 to generate a rotating magnetic field. The rotating portion 61 is rotated by the rotating magnetic field. By the rotation of the rotating portion 61, the anode target portion 62 rotates, and the X-ray emission surface 62a rotates. In this state, the electron beam is emitted from the cathode 83 to the X-ray emission surface 62a.
And X-rays are emitted from the X-ray emitting surface 62a.
The emitted X-ray is output to the outside through the output window 82.

According to the above configuration, the X-ray emitting surface 62a
Target portion 62 formed with a hollow and cylindrical portion 6 having a bottom
After integrating the X-ray emitting surface 62a and the rotating portion 6
The X-ray emission surface 62a is finished so as to be coaxial with one of the rotation axes mm. Therefore, a good coaxial relationship is obtained between the X-ray emitting surface 62a and the rotation axis mm of the rotating part 61.

For this reason, even if the X-ray emission surface 62a rotates, the deflection of the emitted X-rays is reduced. As a result, an X-ray tube having a small effective focus, that is, a so-called effective focus as viewed from the output window 82 side is realized. In addition, since the anode rotates, such as the X-ray emitting surface 62a, a large output can be obtained. Therefore, the present invention is effective for photographing a moving subject that photographs in a short time by using a large output.

For example, the effective focal point on the X-ray emitting surface that emits X-rays is 10 mm in the vertical and horizontal directions, respectively.
Even when the size is 0 μm or less, the increase in the effective focus is small. In the case where the fitting portion between the rotating body and the fixed body is constituted by a dynamic pressure type sliding bearing, the effective focal point on the X-ray emission surface is 50 μm in each of the vertical and horizontal directions.
Even with the following size, the increase in the effective focus is kept small.

Further, since the anode rotates, the maximum output increases. Therefore, it is effective for photographing a moving subject requiring a large output or enlarging a fine structure. For example, it is suitable for a disconnection inspection apparatus that inspects in-line whether or not a wiring pattern of an integrated circuit is disconnected.

Further, the heat of the X-ray emitting surface is transmitted to the fixed body via the liquid metal lubricant, and is radiated by the cooling medium flowing inside the fixed body. For this reason, even when the device is operated for a long time, it is possible to obtain an average output required for practical use.

Next, the X-ray tube 1 used in the disconnection detecting device
Another example of FIG. 2 (FIG. 1) will be described with reference to FIG. In FIG. 8, portions corresponding to FIGS. 5 to 7 are denoted by the same reference numerals, and duplicate description will be partially omitted.

In this embodiment, as compared with the embodiment shown in FIGS. 5 to 7, a flat portion at the center of the upper surface of the rotating portion 61 is formed wider, and an X-shaped slope located around the rotating portion 61 is formed.
The line emitting surface 62a is directly provided integrally. Also, X
The angle θ between the line radiation surface 62a and the rotation axis mm is shown in FIGS.
Is smaller than that of the embodiment. For example,
Is set to 45 ° or less. And the X-ray emitting surface 6
For 2a, an output window 82 is provided in the direction of its rotation axis mm, and a cathode 83 is arranged in a direction substantially orthogonal to the rotation axis mm.

In this case, the electron beam emitted from the cathode 83 travels in a direction substantially perpendicular to the rotation axis mm, and is irradiated on the X-ray emission surface 62a. Then, X-rays are emitted from the X-ray emission surface 62a, and the emitted X-rays are output to the outside through the output window 82.

In the case of the embodiment shown in FIG. 8, the X-ray emitting surface 62a
And the distance between the output window 82 can be reduced. Therefore, X
It is possible to make the distance between the focus on the radiation surface 62a and the subject closer, and to obtain an enlarged and higher definition X-ray transmission image.

In each of the above-described embodiments, when the X-ray emitting surface emits X-rays, a current is applied to the coil to generate a rotating magnetic field to apply a rotating force to the rotating portion. But,
A switch circuit is connected to the coil, and for example, the switch circuit is opened during at least a part of the period of emitting X-rays, current flowing through the coil is cut off, and a rotating part such as an X-ray emission surface rotates by inertia. You can also do so.
In this case, since there is no influence by the rotating magnetic field, the fluctuation in the X-ray emission direction is reduced, and a smaller effective focus can be realized.

When the current flowing through the coil is cut off and the generation of the rotating magnetic field by the coil is stopped, the rotating force of the rotating portion gradually decreases. Therefore, when the rotational force of the rotating part falls below a certain value, a current is again supplied to the coil, and control is performed so that the rotational force of the rotating part increases. Such control is sequentially repeated. For example, during the period in which the generation of the rotating magnetic field by the coil is stopped, the X-ray emission surface
A line is emitted.

In the above-described embodiment, a helical groove is formed in the fixed body in order to form a dynamic pressure type sliding bearing. However, a spiral groove may be formed on the rotating body,
Alternatively, spiral grooves may be formed on both the rotating body and the fixed body.

As described above, according to the present invention, it is possible to realize a rotating anode type X-ray tube in which the deflection of the X-ray emission direction is small. In addition, since the anode rotates, a large output can be obtained. Therefore, it is effective for photographing a moving subject or a fine structure that requires a large output, and is suitable for, for example, a disconnection inspection apparatus that inspects a disconnection of a wiring pattern of an integrated circuit. Further, when a cooling device is provided in the internal space of the fixed body, the heat of the X-ray emission surface can be easily released, and the average output power increases.

[0052]

According to the present invention, it is possible to realize a rotating anode type X-ray tube having a small deflection in the X-ray emission direction, an X-ray apparatus equipped with the same, and a method of manufacturing the same.

[Brief description of the drawings]

FIG. 1 is a schematic structural diagram for explaining a disconnection inspection apparatus to which the present invention is applied.

FIG. 2 is a schematic structural view for explaining an embodiment of the present invention, showing a rotating part.

FIG. 3 is a schematic structural view for explaining an embodiment of the present invention, showing a rotating mechanism portion.

FIG. 4 is a schematic structural view for explaining an embodiment of the present invention, and shows a state where the X-ray apparatus is assembled.

FIG. 5 is a schematic structural view for explaining another embodiment of the present invention, showing a rotating part.

FIG. 6 is a schematic structural view for explaining another embodiment of the present invention, showing a rotating mechanism portion.

FIG. 7 is a schematic structural view for explaining another embodiment of the present invention, and shows a state where the X-ray apparatus is assembled.

FIG. 8 is a schematic structural view for explaining another embodiment of the present invention, and shows a state where the X-ray apparatus is assembled.

FIG. 9 is a schematic structural diagram for explaining a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 21 ... Disc-shaped rotating body 22 ... X-ray emission surface 23 ... Blackening film 24 ... Rotating shaft 25 ... Rotating body 31 ... Fixed body 41 ... Vacuum envelope 42 ... Output window 43 ... Cathode 46 ... Coil

Claims (14)

[Claims] 1. An X-ray radiating surface for emitting microfocus X-rays for photographing a subject, a rotating body to which the X-ray radiating surface is coupled, and a fixed body fitted to the rotating body while maintaining a bearing gap. Body and a rotating anode type X having a vacuum envelope accommodating the X-ray emitting surface, the rotating body, and the fixed body, respectively.
A wire tube, a coil that generates a rotating magnetic field for applying a rotating force to the rotating body, and an X that is enlarged by projecting the subject.
An X-ray apparatus comprising: an imaging device for converting a line image into an electric image or an optical image, wherein the rotary anode type X-ray tube has a dynamic pressure type sliding bearing having a spiral groove. . 2. Stopping the generation of a rotating magnetic field by the coil,
2. The X-ray apparatus according to claim 1, further comprising a control device for emitting X-rays from the X-ray emission surface during the inertial rotation of the rotating body. 3. A control device for repeating generation of a rotating magnetic field by a coil and stopping generation of a rotating magnetic field by a coil to emit X-rays from an X-ray emitting surface during inertial rotation of the rotating body. X-ray equipment. 4. An X-ray emitting surface that emits X-rays by irradiation with an electron beam, a rotating body coupled to the X-ray emitting surface, a fixed body fitted to the rotating body while maintaining a bearing gap,
In the rotating anode type X-ray tube including the X-ray emitting surface, the rotating body, and a vacuum envelope accommodating the fixed body, finishing of the X-ray emitting surface includes the X-ray emitting surface and the X-ray emitting surface. A rotating anode type X-ray tube, which is performed in a state where the rotating anode is connected to the rotating body. 5. An X-ray emitting surface that emits X-rays by irradiation of an electron beam, a rotating body to which the X-ray emitting surface is coupled, a fixed body fitted to the rotating body while maintaining a bearing gap,
An X-ray apparatus comprising: a vacuum envelope accommodating the X-ray emission surface, the rotating body, and the fixed body; and a coil for generating a rotating magnetic field for applying a rotating force to the rotating body. The finishing process of the X-ray emitting surface is performed in a state where the X-ray emitting surface and the rotating body are connected to each other, and the X-ray emitting surface emits X-rays during at least a part of the period. An X-ray apparatus comprising a control unit for stopping generation of a rotating magnetic field. 6. The X-ray apparatus according to claim 4, wherein the effective focal point on the X-ray emitting surface that emits X-rays has a vertical dimension and a horizontal dimension each of 100 μm or less. 7. The finish processing of the X-ray emitting surface is performed such that the entire area of the X-ray emitting surface irradiated with the electron beam has the same angle with respect to the rotation axis of the rotating body. Item 7. An X-ray apparatus according to Item 5. 8. The X-ray apparatus according to claim 4, wherein a sliding bearing is formed at a fitting portion between the rotating body and the fixed body, and a liquid metal lubricant is supplied to the sliding bearing. 9. An effective focal point on an X-ray emitting surface which emits X-rays has a vertical dimension and a horizontal dimension of 50 μm or less, respectively, and a clearance of the slide bearing is 50 μm or less. The X-ray apparatus according to claim 1. 10. A step of forming an X-ray emitting surface that emits X-rays by irradiation of an electron beam, a step of combining the X-ray emitting surface and a rotating body, and a step of combining the X-ray emitting surface and the rotating body. Performing a finishing process on the X-ray radiating surface in a state where the X-ray radiating surface is joined; a step of fitting a fixed body to the rotating body while maintaining a bearing gap after the finishing process on the X-ray radiating surface;
A step of accommodating the radiation emitting surface, the rotating body, and the fixed body in a vacuum envelope, respectively. 11. A step of forming an X-ray emitting surface that emits X-rays by irradiating an electron beam, a step of combining the X-ray emitting surface and a rotating body, and a step of combining the X-ray emitting surface and the rotating body. Performing a finishing process on the X-ray radiating surface in a state where the X-ray radiating surface is joined; a step of fitting a fixed body to the rotating body while maintaining a bearing gap after the finishing process on the X-ray radiating surface;
A step of housing the line radiating surface, the rotating body, and the fixed body in a vacuum envelope, and providing a coil for generating a rotating magnetic field for applying a rotational force to the rotating body outside the vacuum envelope; And a step of adding control means for stopping generation of a rotating magnetic field to the coil during at least a part of a period during which the X-ray emitting surface emits X-rays.
Manufacturing method of wire device. 12. The X-ray apparatus according to claim 1, wherein a cooling medium passage is provided in a space inside the fixed body. 13. The rotary anode X-ray tube according to claim 4, wherein a passage for a cooling medium is provided in a space inside the fixed body. 14. A sliding bearing is formed at a fitting portion between a rotating body and a fixed body, a liquid metal lubricant is supplied to the sliding bearing portion, and a vertical and horizontal dimension of an effective focal point is 50 microns. 14. The rotary anode X-ray tube according to claim 4, wherein the bearing gap of the plain bearing is 50 microns or less.