JP2000173122A - Production of slider, slider and magneto-optical head using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a magneto-optical head which is capable of maintaining the positioning accuracy of solid immersion lenses and allows high-density recording. SOLUTION: A ceramic substrate 12a and jig 22 respectively having the coefficients of thermal expansion approximate to each other are prepd. Members 16a for lenses are fixed into recessed parts 26 of the jig 22 by a resin 30 and thereafter, the jig 22 and the ceramic substrate 12a are joined by a thermosetting resin in such a manner that the members 16a for lenses exist in fixing holes 14a. End-sealing members 31 are arranged in the apertures of the fixing holes 14a to form internal spaces 34 and are cured by heating. The thermosetting resin 20 is then infiltrated to the side parts of the members 16a for lenses by capillarity, by which the members 16 for lenses are adhered to the desired positions on the inner peripheral surfaces of the fixing holes 14a. The members 16a for lenses are thereafter processed from the jig 22 side until the solid immersion lenses 16 are formed and, further the substrate is subjected to cutting out of every slider, etc., by which sliders are formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slider manufacturing method, a slider and a magneto-optical head using the same.
Particularly, among magnetic heads for magnetic recording used in, for example, a computer, etc., a solid immersion lens (SIL:
The present invention relates to a method of manufacturing a slider for forming a floating type magneto-optical head using a solid immersion lens (solid lens obtained by cutting a sphere), a slider, and a magneto-optical head using the same.

[0002]

2. Description of the Related Art In recent years, the storage capacity of recording media has been increasing more and more, and techniques for further increasing the density of recording media have been actively developed. As one of the techniques attracting attention, there is a magneto-optical recording method using a solid immersion lens called NFR (Near Field Recording). In this magneto-optical recording system, a solid immersion lens focuses the laser beam to create an ultra-small optical spot, energy from this optical spot is sent to the outermost surface of the disk, and a magnetic coil embedded in the bottom of the head Write information to the heated spot. Therefore, maintaining the positional accuracy of the solid immersion lens is very important in manufacturing a magneto-optical head.

An example of a magneto-optical head using a solid immersion lens is disclosed in US Pat. No. 5,497,359. Here, diamond, cubic zirconia, or the like is processed into a solid immersion lens, and a solid immersion lens is adhered with an epoxy resin on a transparent slider having a refractive index similar to that of the solid immersion lens, or a solid immersion lens is formed by injection molding a resin. There is disclosed a technology in which a lens and a slider are integrally formed.

Another example of this type of magneto-optical head is disclosed in Japanese Patent Application Laid-Open No. 10-162444. Here, a technique is disclosed in which a through hole having substantially the same diameter as the outer periphery of the solid immersion lens is formed in the slider for transmitting a laser beam, and a solid immersion lens made of glass, diamond, or the like is fitted into the through hole. .

[0005]

However, US Pat.
In the technique disclosed in Japanese Patent No. 497359, in which a solid immersion lens is bonded to a slider with an epoxy resin, it is difficult to maintain the accuracy of the position of the solid immersion lens due to an adhesive (resin) entering between the solid immersion lens and the slider. become. This is because the tolerance in the vertical direction of the position of the solid immersion lens is ± 10 μm, and the positioning accuracy is extremely strict. Also, it becomes difficult to narrow down the laser due to the influence of the refractive index of the adhesive (resin) that has penetrated, and it is difficult to perform high density recording.

When a solid immersion lens and a slider disclosed in US Pat. No. 5,497,359 are integrally formed and used in an NFR type magneto-optical head,
Since the refractive index of the resin (polycarbonate: 1.58) is generally lower than that of diamond (2.4) or the like, and the laser spot diameter cannot be narrowed, high-density recording cannot be expected.
Further, in the NFR method, since the distance between the magneto-optical head and the recording medium is only about 0.15 μm, there is a problem with a slider made of resin due to frictional heat generated when sliding on the upper surface of the recording medium and dust generation due to friction. Occurs. Further, the solid immersion lens and the slider thermally expand due to the influence of heat generated inside the computer or heat received from the outside, causing a shift in focusing, making high-density recording difficult.

Japanese Patent Application Laid-Open No. 10-162444 discloses a technique in which a through hole is formed in a slider and a solid immersion lens is fitted in the through hole. No fixing / positioning means is disclosed.

Further, as shown in FIG. 16, a technique has been proposed in which a solid immersion lens 2 is fixed to a ceramic substrate 1 serving as a slider material by a glass 3. In this technique, a hemispherical lens is fitted into a fixing hole for fixing a lens formed in a ceramic substrate, and a step of fixing the lens to the ceramic substrate by welding glass is performed, but in this case, the curing temperature of the glass is high. Therefore, high heat treatment is required, and a stress is applied to the ceramic substrate due to a difference in thermal expansion coefficient between the ceramic substrate and the glass.

SUMMARY OF THE INVENTION It is, therefore, a primary object of the present invention to provide a slider manufacturing method, a slider and a magneto-optical head using the same, which can maintain the positioning accuracy of a solid immersion lens and enable high-density recording.

[0010]

According to a first aspect of the present invention, there is provided a method of manufacturing a slider, comprising: a first step of preparing a substrate having a fixing hole; A second step of preparing a jig having the first concave portion, a third step of fixing the lens member in the first concave portion of the jig, and fixing the lens member in the fixing hole with the thermosetting resin. A fourth step of joining the tool and the substrate, a fifth step of forming an internal space by arranging a sealing member for heat shielding or pressure adjustment in the opening of the fixing hole of the substrate, and a thermosetting resin. A sixth step of heating and curing to bring the thermosetting resin between the side portion of the lens member and the inner peripheral surface of the fixing hole and bonding the side portion of the lens member to the inner peripheral surface of the fixing hole; .

According to a second aspect of the invention, there is provided a method of manufacturing a slider.
In the method of manufacturing a slider according to the first aspect, the substrate and the jig are made of materials having thermal expansion coefficients close to each other.

According to a third aspect of the present invention, there is provided a method of manufacturing a slider.
In the method of manufacturing a slider according to claim 1 or 2, the first concave portion is obtained by forming a groove having a predetermined width orthogonal to one main surface of the jig.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a slider.
4. The method of manufacturing a slider according to claim 1, wherein the first recess has a step between an upper surface and a bottom surface of the first recess, and in the third step, the lens member has a step. Is supported by

According to a fifth aspect of the present invention, there is provided a method of manufacturing a slider.
In the method of manufacturing a slider according to any one of claims 1 to 4, the sealing member is made of a heat-resistant material.

According to a sixth aspect of the present invention, there is provided a method of manufacturing a slider.
In the method for manufacturing a slider according to any one of claims 1 to 5, the sealing member has adhesiveness.

According to a seventh aspect of the present invention, there is provided a method of manufacturing a slider.
7. The method for manufacturing a slider according to claim 1, wherein at least one of the sealing member and the substrate is provided with a gas vent hole, and when the thermosetting resin is heat-cured in the sixth step, The gas in the internal space is discharged to the outside through the vent hole.

According to a eighth aspect of the present invention, there is provided a method for manufacturing a slider.
In the method of manufacturing a slider according to any one of claims 1 to 7, the internal space includes an extra space formed between the lens member and the sealing member.

According to a ninth aspect of the present invention, there is provided a slider manufacturing method,
In the method of manufacturing a slider according to the eighth aspect, the extra space is formed by adjusting the thickness of the substrate.

According to a tenth aspect of the present invention, in the method for manufacturing a slider according to the eighth aspect, the sealing member has a second recess at a position corresponding to the fixing hole,
In the step, when the sealing member is arranged in the opening such that the second recess corresponds to the fixing hole, the second recess becomes a marginal space.

The slider according to the eleventh aspect has a slider body having a fixing hole, a solid immersion lens disposed in the fixing hole, and thermosetting for bonding an inner peripheral surface of the fixing hole to a side portion of the solid immersion lens. Equipped with conductive resin.

A magneto-optical head according to a twelfth aspect uses the slider according to the eleventh aspect.

In the method of manufacturing a slider according to the first aspect, a substrate and a jig are prepared, and the lens member is fixed to the first concave portion of the jig by, for example, resin, and then the lens member is placed in the fixing hole. The jig and the substrate are joined so that they are located.
At this time, for example, an appropriate amount of thermosetting resin is formed on the main surface of the substrate on the side of the bonding surface with the jig, and the substrate and the jig are bonded by the thermosetting resin. Then, a sealing member is arranged in the opening of the fixing hole of the substrate to form an internal space, and is heated and cured. Then, the thermosetting resin wraps around the side of the lens member due to the capillary action, and as a result, the lens member can be bonded to a desired position on the inner peripheral surface of the fixing hole.
Thereafter, processing is performed from the jig side until the lens member becomes a hemispherical, that is, a solid immersion lens, and further, mirror processing of both surfaces, formation of electrodes, embedding of magnetic coils, cutting out of each slider, etc., the slider is formed. You.

As described above, since the lens member is fixed and positioned in the first concave portion of the jig in advance, the positioning accuracy of the lens member inserted into the fixing hole of the substrate is improved. Also,
By utilizing the capillary phenomenon that occurs during heat curing of the thermosetting resin, the thermosetting resin can be evenly distributed between the inner peripheral surface of the fixing hole and the side of the lens member, and the The wraparound amount can be fine-tuned. Therefore, the positioning of the lens member can be performed with high accuracy. In addition, when the opening of the jig is sealed with a sealing member to seal the internal space, it is possible to prevent the thermosetting resin from being excessively wrapped around due to the internal pressure or temperature of the internal space that rises during heating. Therefore, even in the slider obtained through the above process, the solid immersion lens can be accurately positioned and fixed in the fixing hole,
A slider capable of high-density recording is obtained.

When the substrate and the jig are made of a material having similar thermal expansion coefficients to each other, separation of the substrate and the jig due to heating can be prevented.

In the method of manufacturing a slider according to the third aspect, a plurality of identical first recesses are formed on the main surface of the jig by forming grooves of a predetermined width to be orthogonal to one main surface of the jig. Can be formed. Therefore, since the positioning of the lens member arranged on the jig in the vertical direction can be performed with high accuracy, the positional relationship between the substrate joined to the jig and the lens member is also stabilized. As a result, the position accuracy of the solid immersion lens in the slider can be maintained.

According to the fourth aspect of the present invention, the lens member is supported by the step in the first recess without contacting the upper surface of the first recess. The curable resin does not rise unnecessarily, and the amount of the thermosetting resin flowing around can be adjusted.

Further, if a gas vent hole is provided as described in claim 7, the gas in the internal space in which the lens member is arranged can be passed through the gas vent hole during heat curing. Since it can be released to the outside, the pressure and temperature in the internal space can be finely adjusted, and the amount of the thermosetting resin flowing around the side of the lens member can be finely adjusted.

If an extra space is formed between the lens member and the sealing member as described in claim 8, the pressure and temperature in the internal space at the time of heat curing can be adjusted, and the thermosetting resin can be used. The wraparound amount can be adjusted. The extra space can be formed by adjusting the thickness of the substrate by, for example, stacking the substrates in two stages (claim 9) or by using a sealing member having a second concave portion (claim 10).

When a heat-resistant material is used for the sealing member as described in claim 5, the sealing member is not deformed at the time of heating and curing, and the state in which the opening of the substrate is sealed can be maintained. The use of an adhesive sealing member as described in claim 6 improves workability in sealing the opening of the substrate.

Further, in the slider according to the eleventh aspect,
Since the slider body and the solid immersion lens are bonded with a thermosetting resin, the displacement of the lens can be prevented, and the positioning accuracy of the lens can be maintained. Using this slider, a magneto-optical head capable of high-density recording can be constructed.

[0031]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a slider 10 according to one embodiment of the present invention.

The slider 10 is a slider body 1 in the form of a chip.
2 inclusive. A fixing hole 14 penetrating through the slider 12 is formed in the slider body 12, and a hemispherical solid immersion lens 16 is provided at a predetermined position in the fixing hole 14 with the thermosetting resin 2.
0 (see FIG. 5). Further, a magnetic coil 17 (see FIG. 15) is embedded in the slider body 12, and electrodes 18a and 18b connected to the magnetic coil 17 are formed on the upper surface of the slider body 12.

A method for manufacturing such a slider 10 will be described.

First, a ceramic substrate 12a made of, for example, alumina or the like as shown in FIGS. 2A and 3A is prepared as a slider material. Ceramic substrate 12
a has a plurality of fixing holes 14a formed by, for example, laser processing.
Are formed. The inner diameter of the fixing hole 14a is set slightly larger than the diameter of the lens member 16a (described later). In this embodiment, a total of 32 fixing holes 14a are formed in the ceramic substrate 12a, i.e., 4 in the vertical direction and 8 in the horizontal direction. Then, the surface of the ceramic substrate 12a is
(Vertical Grinding) A rough processing is performed by grinding, and a predetermined amount of the thermosetting resin 20 is formed on one main surface of the ceramic substrate 12a, that is, a bonding surface with the jig 22 (described later) by, for example, screen application or application using a dispenser or the like. .

Next, a jig 22 as shown in FIGS. 2B and 3B is prepared. The jig 22 is made of a material having a thermal expansion coefficient close to that of the ceramic substrate 12a. For example, when the ceramic substrate 12a is made of alumina, its thermal expansion coefficient is 70 × 10 ^-6 /
° C, the jig 22 has a coefficient of thermal expansion of 60 to 80 × 1
It is desirable to be made of a material of about 0 ⁻⁶ / ° C., for example, made of ceramics such as alumina titanium carbide.

A groove 24 having a predetermined width is provided on one main surface of the jig 22.
a and 24b are formed in the vertical and horizontal directions, that is, perpendicular to each other, and a portion where the grooves 24a and 24b are perpendicular to each other becomes a concave portion 26 for supporting the spherical lens member 16a (FIG. 4). reference). As shown in FIG. 4, the four corners 28 of the concave portion 26
6a is supported by point contact. The concave portions 26 are formed at positions corresponding to the fixing holes 14a of the ceramic substrate 12a, and in this embodiment, a total of 32 concave portions 26 are formed on the upper surface of the jig 22 similarly to the fixing holes 14a. The lens member 16a is fixed to the concave portion 26 by a resin 30 such as a thermosetting resin, so that the lens member 1
The positioning of the lens 6a in the vertical direction is accurate, and it is possible to prevent the lens member 16a from being displaced (especially, the lens member 16a from rising) in a heating step described later. For the lens member 16a, for example, glass, cubic gorcia, diamond, or the like is used. Also, the groove 24
a and 24b also function as vent holes.

Then, as shown in FIGS. 2C and 3C, the jig 22 and the ceramic substrate 12a are fixed with the thermosetting resin 20 so that the lens member 16a is located in the fixing hole 14a. Bonding, and further, the ceramic substrate 1
A sealing member 32 for heat shielding or pressure adjustment is arranged on the upper surface of 2a so as to cover the opening of the fixing hole 14a, and an internal space 34 is formed. As the sealing member 32, a heat-resistant member such as a heat-resistant tape that can maintain a sealed state without being deformed even during heating and curing is used, and it is more preferable that the sealing member 32 has adhesiveness in order to improve the workability of sealing. .

Thereafter, heating is performed in this state to cure the thermosetting resin 20. At this time, as shown by broken lines A1 and A2 in FIG. 5, the thermosetting resin 20 rises due to the capillary phenomenon and the side of the lens member 16a and the ceramic substrate 12a.
Around the fixing hole 14a, the lens member 16a and the ceramic substrate 12a are bonded, and the lens member 16a is fixed at a desired position. Further, at the time of heating, gas is generated from the thermosetting resin 20, and the pressure or temperature in the internal space 34 sealed by the lens member 16 a, the ceramic substrate 12 a, and the sealing member 32 rises, so that thermosetting Excessive wraparound of the resin 20 is suppressed.

Then, the lens member 16a is polished from the jig 22 side to a surface (indicated by a broken line B in FIG. 3C) where the lens member 16a becomes a hemispherical, that is, a solid immersion lens 16 by VG grinding using a precision cutting grindstone. Then, the sealing member 30 is peeled off and both surfaces are mirror-finished.

After processing to the state shown in FIG. 2 (d) and FIG. 3 (d), predetermined processing such as formation of electrodes 18a and 18b, embedding of magnetic coil 17, and cutting out is performed, as shown in FIG. As described above, the slider 10 in which the side of the solid immersion lens 16 is resin-bonded to the inner peripheral surface of the fixing hole 14 of the slider body 12 is obtained.

As described above, since the lens member 16a is previously fixed in the concave portion 26 of the jig 22 by the resin 30 and positioned, the positioning accuracy of the lens member 16a inserted into the fixing hole 14a of the ceramic substrate 12a is improved. I do.
Particularly, in this embodiment, by forming grooves 24a and 24b having a predetermined width orthogonally on the upper surface of the jig 22, a plurality of the same concave portions 26 are formed on the upper surface of the jig 22 (in this embodiment, 32), the vertical positioning of the lens member 16a disposed on the jig 22 can be performed with higher accuracy.

The amount of the thermosetting resin 20 applied is very small, so it is difficult to adjust the amount at the time of application.
By utilizing the capillary phenomenon that occurs when the thermosetting resin 20 is cured by heating, the thermosetting resin 20 can be evenly distributed between the inner peripheral surface of the fixing hole 14a and the side of the lens member 16a, and The amount of curling of the curable resin 20 can be finely adjusted. Therefore, the positioning of the lens member 16a in the horizontal direction can be performed with high precision, and the range of the resin-free portion 54 (see FIG. 10) on the upper surface of the lens member 16a can be adjusted. When the opening of the jig 22 is sealed with the sealing member 32 to seal the internal space 34, the excessive curling of the thermosetting resin 20 can be suppressed by the internal pressure and the temperature of the internal space 34 that rise during heating. .

Further, since the lens member 16a is supported by the four corners 28 of the concave portion 26 in point contact, a gap 35 suitable for raising the thermosetting resin 20 is formed in the lens member 1a.
6a can be provided at a portion where the corner 28 is not in contact (see FIG. 4). Therefore, when the thermosetting resin 20 rises due to the capillary phenomenon, a part of the thermosetting resin 20 flows down through the gap 35, but the lens member 16a is not pushed up by the thermosetting resin 20 at that time, and the lens Misalignment of the member 16a can be prevented.

Further, since the ceramic substrate 12a and the lens member 16a are bonded by the thermosetting resin 20 instead of the glass, the displacement of the lens member 16a can be prevented, and the positioning accuracy of the lens member 16a can be maintained. .

Therefore, in the slider 10 obtained through the above-described steps, the solid immersion lens 16 can be accurately positioned and fixed in the fixing hole 14, the yield can be improved, and the slider 10 capable of high-density recording can be obtained. can get.

Further, since the side of the solid immersion lens 16 is bonded to the inner peripheral surface of the fixing hole 14 with a resin, the slider main body 12 and the solid immersion lens 16 are different from the prior art.
There is no adverse effect due to the infiltration of the resin between them.

Further, the ceramic substrate 12a and the jig 22
Are made of materials having thermal expansion coefficients close to each other, so that separation of the ceramic substrate 12a and the jig 22 due to heating can be prevented.

As a jig, a jig 36 shown in FIG. 6A may be used.

The jig 36 is made of, for example, ceramic such as alumina titanium carbide, and has a concave portion 38 as shown in FIG. Recess 38
Is a step 4 formed between the top surface 39 and the bottom surface 40 thereof.
2 That is, a groove 44a having a stepped cross section (two steps in this embodiment) and a predetermined width is formed on one main surface of the jig 22.
And 44b are formed so as to be orthogonal to each other in the vertical and horizontal directions, respectively, and the portion where the grooves 44a and 44b are orthogonal to each other is formed by a recess 3 for supporting the lens member 16a.
It becomes 8. The concave portions 38 are formed at positions corresponding to the fixing holes 14a of the ceramic substrate 12a. In this embodiment, a total of 32 concave portions 38 are formed in the jig 3 similarly to the fixing holes 14a.
6 is formed on the upper surface. The lens member 16a is
8 without being in contact with the upper surface 39 of the step 4.
6 and is fixed at a predetermined position of the concave portion 40 by the resin 30. Thereby, the positioning of the lens member 16a in the vertical direction becomes accurate.

Then, as shown in FIG.
6 and the ceramic substrate 12a are joined by the thermosetting resin 20, and the sealing member 32 is arranged in the opening of the fixing hole 14a, and then is cured by heating. At this time, the thermosetting resin 20 does not easily rise only by the capillary phenomenon, but the thermosetting resin 20 accumulated in the step portion 42 rises along the surface of the lens member 16a. Therefore, the thermosetting resin 20 does not rise unnecessarily due to the capillary phenomenon at the time of heat curing, and the amount of the thermosetting resin 20 wrapping around the side of the lens member 16a can be adjusted (see FIG. 8). ).

Further, instead of the sealing member 32 shown in FIG. 6B, a sealing member 50 having a gas vent hole 48 as shown in FIG. 9 may be used. For example, when the diameter X of the lens member 16a is 1 mm, the diameter Y of the hole 48 is desirably set to approximately 0.30 mm to 0.35 mm.

By forming the gas vent hole 48 in this way, the gas in the internal space 52 can be released to the outside through the hole 48 during heat curing. Therefore, the pressure or temperature above the lens member 16a in the internal space 52 is finely adjusted, and the thermosetting resin 2 is applied to the side of the lens member 16a.
The wraparound amount of 0 can be further finely adjusted.

As shown by a dashed line in FIG. 9, a hole 53 for venting gas may be provided in the ceramic substrate 12a.

Next, for each of the embodiments shown in FIGS. 3, 6, and 9, the yield rate when the thermosetting resin 20 is cured by heating is shown in Table 1. Here, the lens member 16 is used.
The diameter X of a is 1 mm, and 250 ° C. to 300 ° C. in the atmosphere.
The experiment was conducted under resin curing conditions in which the temperature was maintained for 10 to 30 minutes.

In Table 1, "amount of resin: small" means that the amount of the thermosetting resin 20 flowing around the side of the lens member 16a is too small to stably fix the lens member 16a. , “Resin amount: large” means that the lens member 16
It means that the amount of the thermosetting resin 20 which goes around to the side of a is too large. Specifically, as shown in FIGS. 10A and 10B, when the diameter Z of the cross section of the resin-free portion 54 on the upper part of the lens member 16a is 0.95 mm or more, “the amount of resin: small”;
Those whose diameter Z is between 0.80 mm and 0.95 mm are "good",
Those having a diameter Z of less than 0.8 mm are judged as "resin amount: large". Further, the fractions in Table 1 indicate the corresponding number per 100 samples.

[0057]

[Table 1]

The phenomena of each embodiment are analyzed based on the experimental results in Table 1.

First, in the case of the embodiment shown in FIG. 3, during the curing process of the thermosetting resin 20, the viscosity of the thermosetting resin 20 decreases as the temperature rises. At this time, since the internal pressure at the upper part of the lens member 16a is large, the thermosetting resin 20 that is going to rise due to the capillary phenomenon is pushed down. In addition, the thermosetting resin 20 falls to a position where it cannot rise due to the capillary phenomenon, that is, a bottom surface of the concave portion 26 of the jig 22.

In the case of the embodiment shown in FIG. 6, in the course of curing the thermosetting resin 20, the viscosity of the thermosetting resin 20 decreases as the temperature rises. At this time, since the internal pressure above the lens member 16a is large, the thermosetting resin 20 is unlikely to rise only by the capillary phenomenon. However, since the thermosetting resin 20 accumulated in the step portion 42 rises along the surface of the lens member 16a, the amount of the resin increases and the number of “non-defective products” increases in the embodiment of FIG.

Further, in the case of the embodiment shown in FIG. 9, during the curing process of the thermosetting resin 20, the viscosity of the thermosetting resin 20 decreases as the temperature rises. In this embodiment, since the internal pressure in the upper part of the lens member 16a is small, more thermosetting resin 20 rises due to the capillary phenomenon, and the number of “resin amount: small” is smaller than in the embodiment of FIG. , "Good product"
Increase the number of

Therefore, among the three embodiments shown in FIGS. 3, 6, and 9, the embodiment of FIG. 9 has the highest yield rate.

As shown in FIG. 11, the thickness of the ceramic substrate is adjusted by stacking the ceramic substrates 12a in two stages so that the extra space 55 between the lens member 16a and the sealing member 50 is increased. The internal space 56 may be formed. By forming such a wide margin space 55, the internal pressure and the temperature of the internal space 56 can be adjusted, and the amount of the thermosetting resin 20 flowing around the side of the lens member 16a can be adjusted.

Further, a sealing member 58 as shown in FIG. 12 may be used as the sealing member.

The sealing member 58 has substantially the same thickness as the ceramic substrate 12a, and as shown in FIG.
12A, a recess 60 having substantially the same diameter as the fixing hole 14a is formed at a position corresponding to the fixing hole 14a. As shown in FIG. A communicating gas vent hole 62 is formed.

As shown in FIG. 13, the ceramic substrate 12
When the sealing member 58 is arranged on the upper surface of the ceramic substrate 12a so that the through hole 14a of the a corresponds to the concave portion 60 of the sealing member 58, the concave portion 60 The internal space 64 can be formed so that the extra space 63 between them can be widened. Therefore, also in this case, the internal pressure and the temperature of the internal space 64 can be adjusted, and the amount of the thermosetting resin 20 flowing around the side of the lens member 16a can be adjusted.

Further, a flying type magneto-optical head 116 (described later) can be formed by using the above-mentioned slider 10.
Data recording device 100 using the magneto-optical head 116
Are shown in FIGS. 14 and 15.

As shown in FIG. 14, the data recording device 10
0 includes the chassis 102. A spindle motor 104 is mounted on the chassis 102, and a clamping spindle 106 is connected to the spindle motor 104. A recording medium 108 such as a magneto-optical disk is detachably attached to the clamping spindle 106. An actuator 110 such as a voice coil motor is attached to the chassis 102, and an arm 112 is connected to the actuator 110. Arm 1
Reference numeral 12 also functions as an optical module, and a reflecting mirror 114 is disposed at an end of the arm 112. Also, the arm 112
The floating type magneto-optical head 116 is
Is attached.

That is, as shown in FIG. 15, the magneto-optical head 116 includes an objective lens 118, a support portion 120 for supporting the objective lens 118, a cylindrical portion 122 for connecting the support portion 120 to the arm 112, and a support portion 120. Includes a slider 10 mounted on the lower surface. The slider 10 is attached to the support 120 so as to float near the surface of the recording medium 108.

In such a data recording apparatus 100, the emitted laser beam 124 passes through the inside of the arm 112, is turned by the reflecting mirror 114, and is turned by the objective lens 11.
The focus is focused by 8 and further focused by the solid immersion lens 16 to create a very small optical spot. The energy from the optical spot is sent to the outermost surface of the recording medium 108, and the magnetic coil 17 writes information on the heated spot.

When the slider 10 is used for the magneto-optical head 116 of the data recording apparatus 100, the positioning accuracy of the solid immersion lens 16 can be stabilized, a stable laser beam can be given to the recording medium 108, and the Recording becomes possible.

The jig 22 is not limited to the alumina titanium carbide material, as long as it has a coefficient of thermal expansion close to that of the ceramic substrate 12a, good workability, and hardness enough to support the lens member 16a. Any material can be used, and for example, alumina or the like can be used.

The lens member 16a is not limited to the case where it is supported at the corners of the concave portion by point contact. If an appropriate gap can be provided between the lens member 16a and the concave portion 26, the lens member 16a becomes It may be supported by line contact.

Even when the sealing member does not have an adhesive property, if an adhesive is applied to the upper surface of the ceramic substrate 12a, for example, the same operation as when the sealing member has the adhesive property is performed. Performance can be improved.

[0075]

According to the present invention, it is possible to obtain a magneto-optical head capable of maintaining the positioning accuracy of the solid immersion lens and capable of high-density recording.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a slider according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a manufacturing process of the embodiment of FIG.

FIG. 3 is a sectional view showing a manufacturing process of the embodiment of FIG. 1;

4 is a plan view of a main part showing a state where a lens member is arranged in a concave portion of a jig used in the embodiment of FIG. 1;

FIG. 5 is a cross-sectional view of a main part showing a state in which the thermosetting resin has wrapped around the side of the lens member by heat curing in the embodiment of FIG. 1;

FIG. 6 is a sectional view showing another embodiment of the present invention.

7 is a plan view of a main part showing a state where a lens member is arranged in a concave portion of a jig used in the embodiment of FIG. 6;

FIG. 8 is a cross-sectional view of a main part showing a state in which a thermosetting resin has flowed into a side portion of a lens member by heat curing in the embodiment of FIG. 6;

FIG. 9 is a cross-sectional view showing another embodiment of the present invention.

FIG. 10 is an illustrative view showing only the lens member and the thermosetting resin when the lens member is fixed to the substrate with the thermosetting resin, and FIG. 10 (a) is a plan view,
(B) is a partially omitted front view.

FIG. 11 is a sectional view showing still another embodiment of the present invention.

FIG. 12 is an illustrative view showing a modified example of the sealing member;
(A) is a perspective view showing the upper surface of the sealing member, and (b) is a perspective view showing the lower surface of the sealing member.

13 is a sectional view showing an embodiment using the sealing member shown in FIG.

FIG. 14 is an illustrative view showing one example of a data recording device using a slider of the present invention;

FIG. 15 is an illustrative view showing a main part of the data recording device of FIG. 14;

FIG. 16 is a sectional view showing an example of a conventional slider.

[Explanation of symbols]

 Reference Signs List 10 slider 12 slider body 12a, 12b ceramic substrate 14, 14a fixing hole 16 solid immersion lens 16a lens member 20 thermosetting resin 22, 36 jig 24a, 24b, 44a, 44b groove 26, 38, 60 recess 28, 46 Corner portion 30 Resin 32, 50, 58 Sealing member 34, 52, 56, 64 Internal space 38 Step 39 Upper surface of recess 40 Lower surface of recess 42 Step 48, 53, 62 Gas vent holes 55, 63 Extra space Space 100 data recording device 108 recording medium 116 magneto-optical head 118 objective lens 124 laser beam

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Naoyuki Okamoto, Inventor 2-15-17 Egawa, Shimamoto-cho, Mishima-gun, Osaka Prefecture Inside the Yamazaki Works, Sumitomo Special Metals Co., Ltd. (72) Shingo Mukai 1 Minojima 1, Hakata-ku, Fukuoka City, Fukuoka Prefecture 2-8, Nippon Tungsten Co., Ltd. (72) Takayuki Matsuo, Inventor Takano Matsuo 1-82-8, Japan Incorporated Tungsten Co., Ltd. (72) Eiji Okuma, Inventor Eiji Okuma 1 Minojima, Hakata-ku, Fukuoka City, Fukuoka Prefecture F-term (reference), 2-8, Nippon Tungsten Co., Ltd. 5D075 CD17 CD20 5D119 AA11 AA22 JA44 JC03 JC05 MA06 NA01

Claims (12)

[Claims] A first step of preparing a substrate having a fixing hole; a second step of preparing a jig having a first concave portion at a position corresponding to the fixing hole of the substrate; the first concave portion of the jig To fix the lens member to the third
A fourth step of joining the jig and the substrate with a thermosetting resin such that the lens member is located in the fixing hole, and applying heat shielding or pressure to an opening of the fixing hole of the substrate. A fifth step of forming an internal space by arranging a sealing member for adjustment, and heating and curing the thermosetting resin so that the thermosetting resin is fixed to a side portion of the lens member and the fixing hole. A method for manufacturing a slider, comprising: a sixth step of adhering a side portion of the lens member to an inner peripheral surface of the fixing hole while being positioned between the inner peripheral surface of the slider and the inner peripheral surface of the slider. 2. The method of manufacturing a slider according to claim 1, wherein said substrate and said jig are made of materials having thermal expansion coefficients close to each other. 3. The method of manufacturing a slider according to claim 1, wherein the first concave portion is obtained by forming a groove having a predetermined width orthogonal to one main surface of the jig. 4. The first concave portion has a step between an upper surface and a bottom surface of the first concave portion, and in the third step, the lens member is supported by the step. 4. The method for manufacturing a slider according to any one of 1 to 3. 5. The method for manufacturing a slider according to claim 1, wherein said sealing member is made of a heat-resistant material. 6. The slider manufacturing method according to claim 1, wherein said sealing member has adhesiveness. 7. A gas vent hole is provided in at least one of the sealing member and the substrate, and when the thermosetting resin is heated and cured in the sixth step, the gas in the internal space is removed by the gas. 7. The method of manufacturing a slider according to claim 1, wherein the slider is discharged to the outside through a vent hole. 8. The method of manufacturing a slider according to claim 1, wherein the internal space includes an extra space formed between the lens member and the sealing member. 9. The method according to claim 8, wherein the extra space is formed by adjusting a thickness of the substrate. 10. The sealing member has a second concave portion at a position corresponding to the fixing hole, and in the fifth step, the sealing member is formed in the opening so that the second concave portion corresponds to the fixing hole. The method of manufacturing a slider according to claim 8, wherein when the stop member is disposed, the second recess becomes the extra space. 11. A slider main body having a fixing hole, a solid immersion lens disposed in the fixing hole, and a thermosetting resin for bonding an inner peripheral surface of the fixing hole to a side portion of the solid immersion lens. ,Slider. 12. A magneto-optical head using the slider according to claim 11.