JP2000159505A5 - - Google Patents

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JP2000159505A5
JP2000159505A5 JP1998330953A JP33095398A JP2000159505A5 JP 2000159505 A5 JP2000159505 A5 JP 2000159505A5 JP 1998330953 A JP1998330953 A JP 1998330953A JP 33095398 A JP33095398 A JP 33095398A JP 2000159505 A5 JP2000159505 A5 JP 2000159505A5
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fluorinated
halogen
fluorine
fluorinated halogen
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【0003】
【課題を解決するための手段】
本発明の目的は、安全にかつ容易に連続的に七フッ化ヨウ素、五フッ化臭素、三フッ化塩素、一フッ化塩素等のフッ素化ハロゲン化合物を効率良く製造することにある。
本発明は、上述の課題を解決すべくなされた発明である。
即ち本発明は、以下の(1)〜(10)に述べるフッ素化ハロゲン化合物の製造方法である。
(1)フッ素ガス気流中にフッ素以外のハロゲンを加え蒸発・混合させた後、フッ素ガスとフッ素以外のハロゲンとの反応温度以上の温度に加熱された反応器に導入し、フッ素ガスとフッ素以外のハロゲンとを反応させることを特徴とするフッ素化ハロゲン化合物の製造方法。
(2)フッ素ガス気流中にフッ素化ハロゲンを加え蒸発・混合させた後、フッ素ガスとフッ素化ハロゲンとの反応温度以上の温度に加熱された反応器に導入し、フッ素ガスとフッ素化ハロゲンとを反応させることを特徴とするフッ素化ハロゲン化合物の製造方法。
(3)フッ素ガス気流中にフッ素以外のハロゲン及びフッ素化ハロゲンを加え蒸発・混合させた後、フッ素ガスとフッ素以外のハロゲン及びフッ素化ハロゲンとの反応温度以上の温度に加熱された反応器に導入し、フッ素ガスとフッ素以外のハロゲン及びフッ素化ハロゲンとを反応させることを特徴とするフッ素化ハロゲン化合物の製造方法。
(4)フッ素以外のハロゲンが塩素であり、フッ素化ハロゲン化合物が一フッ化塩素又は三フッ化塩素であることを特徴とする上記(1)記載のフッ素化ハロゲン化合物の製造方法。
(5)フッ素以外のハロゲンが臭素であり、フッ素化ハロゲン化合物が五フッ化臭素であることを特徴とする上記(1)記載のフッ素化ハロゲン化合物の製造方法。
(6)フッ素以外のハロゲンがヨウ素であり、フッ素化ハロゲン化合物が七フッ化ヨウ素であることを特徴とする上記(1)記載のフッ素化ハロゲン化合物の製造方法。
(7)フッ素化ハロゲンが一フッ化塩素であり、フッ素化ハロゲン化合物が三フッ化塩素であることを特徴とする上記(2)記載のフッ素化ハロゲン化合物の製造方法。
(8)フッ素化ハロゲンが三フッ化臭素であり、フッ素化ハロゲン化合物が五フッ化臭素であることを特徴とする上記(2)記載のフッ素化ハロゲン化合物の製造方法。
(9)フッ素化ハロゲンが五フッ化ヨウ素であり、フッ素化ハロゲン化合物が七フッ化ヨウ素であることを特徴とする上記(2)記載のフッ素化ハロゲン化合物の製造方法。
(10)蒸発器内のフッ素ガスの線速度を30cm/sec.以下とし、反応器内のガス線速度を10cm/sec.以下とすることを特徴とする上記(1)、(2)又は(3)記載のフッ素化ハロゲン化合物の製造方法。
本発明では、緩やかに流れ、かつ原料(フッ素以外のハロゲン元素またはフッ素化ハロゲン)の沸点付近まで加熱されたフッ素ガス気流中に五フッ化ヨウ素等の反応原料を加え、蒸発・混合させた後に、これらのガスを高温の反応器に導入し、反応させることによって、効率良く、連続的に七フッ化ヨウ素等の目的物を得ることができる。これにより、原料とフッ素ガスの混合部の温度を原料の沸点付近程度(100 〜130 ℃)に抑えることができ、混合部の腐食を大幅に低減することができる。また、原料とフッ素ガスの混合部と反応部を分離し、十分に攪拌・混合および緩やかに加熱された化学量論量の原料を反応器に供給することによって爆発的な反応を防止することができる。
0003
[Means for solving problems]
An object of the present invention is to safely and easily and continuously continuously produce a fluorinated halogen compound such as iodine hepta, bromine pentafluoride, chlorine trifluoride, and chlorine monofluoride.
The present invention is an invention made to solve the above-mentioned problems.
That is, the present invention is the method for producing a fluorinated halogen compound described in the following (1) to (10).
(1) Halogen other than fluorine is added to the flow of fluorine gas, evaporated and mixed, and then introduced into a reactor heated to a temperature higher than the reaction temperature of fluorine gas and halogen other than fluorine, and other than fluorine gas and fluorine. A method for producing a fluorinated halogen compound, which comprises reacting with the halogen of fluorinated halogen.
(2) After fluorinated halogen is added to the fluorinated gas stream to evaporate and mix, it is introduced into a reactor heated to a temperature higher than the reaction temperature of fluorinated gas and fluorinated halogen, and fluorinated gas and fluorinated halogen are combined. A method for producing a fluorinated halogen compound, which comprises reacting.
(3) After adding a halogen other than fluorine and a fluorinated halogen to the fluorine gas stream, evaporating and mixing them, the reactor is heated to a temperature equal to or higher than the reaction temperature of the fluorine gas and the halogen other than fluorine and the fluorinated halogen. A method for producing a fluorinated halogen compound, which is introduced and is characterized by reacting fluorine gas with a halogen other than fluorine and a fluorinated halogen.
(4) The method for producing a fluorinated halogen compound according to (1) above, wherein the halogen other than fluorine is chlorine, and the fluorinated halogen compound is chlorine monofluoride or chlorine trifluoride.
(5) The method for producing a fluorinated halogen compound according to (1) above, wherein the halogen other than fluorine is bromine and the fluorinated halogen compound is bromine pentafluoride.
(6) The method for producing a fluorinated halogen compound according to (1) above, wherein the halogen other than fluorine is iodine and the fluorinated halogen compound is iodine heptafluoride.
(7) The method for producing a fluorinated halogen compound according to (2) above, wherein the fluorinated halogen is chlorine monofluoride and the fluorinated halogen compound is chlorine trifluoride.
(8) The method for producing a fluorinated halogen compound according to (2) above, wherein the fluorinated halogen is bromine trifluoride and the fluorinated halogen compound is bromine pentafluoride.
(9) The method for producing a fluorinated halogen compound according to (2) above, wherein the fluorinated halogen is iodine pentafluoride and the fluorinated halogen compound is iodine heptafluoride.
(10) The linear velocity of fluorine gas in the evaporator is 30 cm / sec. Or less, and the gas linear velocity in the reactor is 10 cm / sec. Or less. 3) The method for producing a fluorinated halogen compound according to the above method.
In the present invention, a reaction raw material such as iodine pentafluoride is added to a fluorine gas stream that flows gently and is heated to near the boiling point of the raw material (halogen element other than fluorine or fluorinated halogen), and after evaporation and mixing. By introducing these gases into a high-temperature reactor and reacting them, a target product such as iodine pentafluoride can be efficiently and continuously obtained. As a result, the temperature of the mixed portion of the raw material and the fluorine gas can be suppressed to about the boiling point of the raw material (100 to 130 ° C.), and the corrosion of the mixed portion can be significantly reduced. In addition, it is possible to prevent an explosive reaction by separating the mixing part and the reaction part of the raw material and the fluorine gas, and supplying the reactor with a stoichiometric amount of the raw material that has been sufficiently agitated / mixed and gently heated. it can.

Claims (10)

フッ素ガス気流中にフッ素以外のハロゲンを加え蒸発・混合させた後、フッ素ガスとフッ素以外のハロゲンとの反応温度以上の温度に加熱された反応器に導入し、フッ素ガスとフッ素以外のハロゲンとを反応させることを特徴とするフッ素化ハロゲン化合物の製造方法。 After the halogen other than fluorine was added and evaporated and mixed into the fluorine gas stream is introduced into the fluorine gas and the reactor heated to a reaction temperature above the temperature of the halogen other than fluorine, a halogen other than a fluorine gas and fluorine And a method for producing a fluorinated halogen compound. フッ素ガス気流中にフッ素化ハロゲンを加え蒸発・混合させた後、フッ素ガスとフッ素化ハロゲンとの反応温度以上の温度に加熱された反応器に導入し、フッ素ガスとフッ素化ハロゲンとを反応させることを特徴とするフッ素化ハロゲン化合物の製造方法。After fluorinated halogen is added to the fluorine gas stream and evaporated and mixed, it is introduced into a reactor heated to a temperature equal to or higher than the reaction temperature of the fluorine gas and fluorinated halogen to react the fluorine gas and fluorinated halogen. A method for producing a fluorinated halogen compound. フッ素ガス気流中にフッ素以外のハロゲン及びフッ素化ハロゲンを加え蒸発・混合させた後、フッ素ガスとフッ素以外のハロゲン及びフッ素化ハロゲンとの反応温度以上の温度に加熱された反応器に導入し、フッ素ガスとフッ素以外のハロゲン及びフッ素化ハロゲンとを反応させることを特徴とするフッ素化ハロゲン化合物の製造方法。After adding halogen other than fluorine and fluorinated halogen to the fluorine gas stream and evaporating and mixing them, they are introduced into a reactor heated to a temperature equal to or higher than the reaction temperature between fluorine gas and halogen other than fluorine and fluorinated halogen, A method for producing a fluorinated halogen compound, comprising reacting a fluorine gas with a halogen other than fluorine and a fluorinated halogen. フッ素以外のハロゲンが塩素であり、フッ素化ハロゲン化合物が一フッ化塩素又は三フッ化塩素であることを特徴とする請求項1記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 1, wherein the halogen other than fluorine is chlorine, and the fluorinated halogen compound is chlorine monofluoride or chlorine trifluoride. フッ素以外のハロゲンが臭素であり、フッ素化ハロゲン化合物が五フッ化臭素であることを特徴とする請求項1記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 1, wherein the halogen other than fluorine is bromine, and the fluorinated halogen compound is pentafluorobromide. フッ素以外のハロゲンがヨウ素であり、フッ素化ハロゲン化合物が七フッ化ヨウ素であることを特徴とする請求項1記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 1, wherein the halogen other than fluorine is iodine, and the fluorinated halogen compound is iodine heptafluoride. フッ素化ハロゲンが一フッ化塩素であり、フッ素化ハロゲン化合物が三フッ化塩素であることを特徴とする請求項2記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 2, wherein the fluorinated halogen is chlorine monofluoride and the fluorinated halogen compound is chlorine trifluoride. フッ素化ハロゲンが三フッ化臭素であり、フッ素化ハロゲン化合物が五フッ化臭素であることを特徴とする請求項2記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 2, wherein the fluorinated halogen is bromine trifluoride and the fluorinated halogen compound is bromine pentafluoride. フッ素化ハロゲンが五フッ化ヨウ素であり、フッ素化ハロゲン化合物が七フッ化ヨウ素であることを特徴とする請求項2記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 2, wherein the fluorinated halogen is iodine pentafluoride and the fluorinated halogen compound is iodine heptafluoride. 蒸発器内のフッ素ガスの線速度をFluorine gas linear velocity in the evaporator 30cm30cm / sec.sec. 以下とし、反応器内のガス線速度をThe gas linear velocity in the reactor is 10cm10cm / sec.sec. 以下とすることを特徴とする請求項1、2又は3記載のフッ素化ハロゲン化合物の製造方法。The method for producing a fluorinated halogen compound according to claim 1, 2 or 3, wherein:
JP33095398A 1998-11-20 1998-11-20 Method for producing fluorinated halogen compound Expired - Lifetime JP4197783B2 (en)

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JP4693823B2 (en) * 2007-06-18 2011-06-01 セントラル硝子株式会社 Production method of iodine heptafluoride
JP5163190B2 (en) 2008-03-10 2013-03-13 セントラル硝子株式会社 Method for producing oxygen-containing halogenated fluoride
JP2010116280A (en) * 2008-11-12 2010-05-27 Central Glass Co Ltd Method for synthesizing interhalogen compound
WO2010055769A1 (en) * 2008-11-12 2010-05-20 セントラル硝子株式会社 Inter-halogen compound synthesis method
JP2010116281A (en) * 2008-11-12 2010-05-27 Central Glass Co Ltd Method for producing interhalogen compound
JP6201496B2 (en) * 2013-08-02 2017-09-27 セントラル硝子株式会社 IF7-derived iodine fluoride compound recovery method and recovery device
JP6210039B2 (en) 2014-09-24 2017-10-11 セントラル硝子株式会社 Deposit removal method and dry etching method
JP6467955B2 (en) * 2015-01-30 2019-02-13 セントラル硝子株式会社 Method for producing iodine pentafluoride
CN112537755A (en) * 2020-12-16 2021-03-23 中船重工(邯郸)派瑞特种气体有限公司 Preparation method and device of iodine pentafluoride
CN114314513B (en) * 2021-12-31 2023-05-12 四川红华实业有限公司 Method for fluoridation of low-valence fluoride by using chlorine trifluoride
CN115448256B (en) * 2022-09-16 2023-03-21 福建德尔科技股份有限公司 Method and reaction device for synthesizing chlorine trifluoride by one-step method

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