JP2000158265A - Straightness correcting jig, machine, and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a straightness correcting jig, machine and method implementing extremely highly precise lapping and polishing even in case of having warp in a work. SOLUTION: This jig for sticking and fixing bar-shaped work 2 to be polished holds the work in polishing, has a cantilever structure constituted of a block- shaped base part 11 and a support part 13 integrally extended from one end side of the base part along the base part via a connecting part 12 in a space toward the base part with a slit-shaped interval apart therefrom, a fitting face 13 for the work is formed in the support part in an opposite face to the slit side, and an adjustment member 16 for adjusting the interval between the base part and the support part and adjusting the bending state of the support part is fitted between the base part and the support part.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a straightness correcting jig and a straightness correcting jig which enable high-precision polishing when a workpiece such as a slider of a floating magnetic head used in a magnetic disk drive is polished. The present invention relates to a straightness correcting machine provided with a straightness correcting jig.

[0002]

2. Description of the Related Art A flying type magnetic head slider used in a magnetic disk drive is becoming smaller and lighter year by year as the recording density of a magnetic disk is increased. The size of the magnetic head mounted on the device is also being reduced, and at present the thin film magnetic head is mainly used. In this type of thin-film magnetic head, the magnetic gap portion has an extremely fine structure, and polishing accuracy in the manufacturing stage is a major factor in determining product quality.

That is, in this type of manufacturing method of a magnetic head slider, a number of films are deposited on a single wafer by a film forming method, and necessary films are formed by photolithography during the film deposition process. A large number of thin-film magnetic head elements are simultaneously formed on a wafer by writing a circuit, and a large number of thin-film magnetic head elements are sliced and cut out from a single wafer. If the processing accuracy in slicing and cutting the thin film head is poor, the yield is likely to be significantly reduced.

In the case where a thin film magnetic head is mass-produced by cutting a thin film magnetic head by slicing a wafer, polishing of a magnetic gap portion of the thin film magnetic head has conventionally been performed by a method described below. . First, as shown in FIG. 8, a number of thin-film magnetic head elements are aligned on the wafer 1, and the wafer 1 is sliced along the horizontal direction in FIG. 8, and a cutting bar (workpiece) shown in FIG. Get 2. In this cutting bar 2, FIG.
A plurality of thin-film magnetic head elements 5 are arranged and formed as shown in an enlarged manner to zero. This thin-film magnetic head element 5 has a coil portion 6 in this example, and four electrode pads 7 are provided on its side.
And a lead wire from the coil section 6 and a lead wire from the internal circuit of the thin-film magnetic head element are connected to the respective electrode pads 7. In FIG. 10, portions other than the coil portion 6 in the thin-film magnetic head element 5 are omitted. Also, a marker MK is formed on the side of the electrode pad 7 as a guide for the polishing position of the thin-film magnetic head element 5.

[0005]

FIG. 11 shows an enlarged portion of the thin film magnetic head element 5 of this embodiment. In the structure of the thin film magnetic head, the magnetic gap g formed on the tip end side of the coil portion 6 is formed. Since the gap depth processing is a very important processing that directly affects the performance of the thin-film magnetic head, the cutting bar 2 is specially attached to a lapping device, and the upper surface of the cutting bar 2 is precisely ground, that is, lapping is performed. It is done in. Further, the thin film magnetic head is a giant magnetoresistive element (G
In the case of a GMR head utilizing an MR element, the depth of the gap of the write head for writing a magnetic signal, the throat height corresponding to the length of the tip of the magnetic pole of the write head, and the gap of the read head for reading the magnetic signal Since the MR height corresponding to the depth of the portion depends on the accuracy of the lapping surface, and both gaps are collectively lapped, it is required that lapping can be performed with higher accuracy.

Meanwhile, a conventional lapping apparatus generally has a lapping plate to which a polishing liquid is supplied, and performs lapping by rotating the lapping plate while pressing a workpiece against the lapping plate. However, there is a problem that the lapping precision when the member in which the plurality of thin film magnetic head elements 5 are formed on the cutout bar 2 is precisely wrapped is not always sufficient. In particular, in this type of thin-film magnetic head, recently, there has been a tendency to require extremely high processing accuracy of about ± 0.1 μm or less.

Further, the plurality of thin film magnetic head elements 5 formed on the cutting bar 2 are formed by a film forming method, and are aligned and formed on the wafer 1 with extremely high precision. Since the cutting bar 2 sliced and cut from the wafer 1 has a warp, there is a problem that it is difficult to perform high-precision lapping when performing lapping with a lapping device. That is, when the cutting bar 2 is slightly warped when processing with the lapping device, the gap portion of the thin-film magnetic head element 5 located at the warped portion is excessively polished or insufficiently polished. There was a problem.

Therefore, a straightness correcting jig shown in FIG. 12 is conventionally known. In the straightness correcting jig 8 of this example, a block-shaped support portion 8c is integrally connected to the center of a horizontally long block-shaped base portion 8a in parallel with the base portion 8a via a connecting portion 8b. This is an H-shaped side-down type, and is provided with an adjusting screw 8d (abbreviated by an arrow in the drawing) connecting the base 8a and the support 8c.
Further, as another example of the straightness correcting jig, as shown in FIG. 13, a hollow block shape including a top plate 9a, a bottom plate 9b and a side plate 9c is formed, and the support 9a and the bottom plate 9b are formed. There is known a straightness correcting jig 9 provided with an adjusting screw 9d (noted by an arrow in the drawing) for connecting central portions.

The straightness correcting jig 8 shown in FIG. 12 adjusts the distance between the base 8a and the supporting portion 8c with the adjusting screw 8d and adjusts the amount of bending of the supporting portion 8c. This is a jig that bends the bonded cutting bar 2 and thereby corrects the warpage of the cutting bar 2. The straightness correcting jig 9 shown in FIG. 13 adjusts the distance between the base 9a and the support 9c with the adjusting screw 9d, adjusts the amount of bending of the support 9c, and cuts out the adhesive bonded to the support 9a. This is a jig that bends the bar 2 and thereby corrects the warpage of the cutting bar 2.

However, the straightness correcting jig 8 shown in FIG.
In the above, there is a problem that the connecting portion 8b is provided at the center of the support portion 8c and the center portion of the support portion 8c cannot be deformed. In other words, even if the support portion 8c is curved, an inflection point where the flexure rate of the support portion 8c is greatly different at the connection portion with the connection portion 8b is generated. There was a problem that could not be resolved.

Next, in the straightness correcting jig 9 shown in FIG. 13, since the deformation at both ends of the support portion 9a is restrained by the side wall portion 9c, the amount of bending is regulated at both end portions of the support portion 9a. As a result, the inflection point of the amount of bending occurs, so that there is a problem that the warpage of the cutting bar 2 cannot be completely eliminated.

Therefore, the present invention provides an extremely accurate lapping process even when the workpiece has a warp.
An object of the present invention is to provide a straightness correcting jig that enables polishing. Another object of the present invention is to provide a straightness correcting jig which corrects and eliminates the warp even when the workpiece is warped, thereby facilitating precision machining with a lap device or a polishing device. . Furthermore, the present invention precisely grasps and measures the state of warpage of the workpiece, and adjusts the amount of bending of the support portion of the straightness correction jig based on the measurement result to eliminate precise warpage,
As a result, an object of the present invention is to provide a straightness correcting machine capable of performing extremely high-precision lapping and polishing.

[0013]

According to the present invention, there is provided a bar-shaped workpiece to be polished, which is bonded and fixed, and holds the workpiece during polishing.
A block-like base portion, and a support portion integrally extended with a slit-shaped gap between the base portion along the base portion via a connecting portion on one end side of the base portion. A mounting surface for a workpiece is formed on a surface of the support portion opposite to the slit side, and is connected between the base portion and the support portion. An adjustment member is attached to adjust the distance between the base and the support to adjust the bending state of the support.

In order to solve the above-mentioned problems, the present invention provides an image forming apparatus, wherein the adjusting member is attached to a base portion so as to be able to approach and separate from the supporting portion, and a tip portion of the adjusting member presses the supporting portion to form the supporting portion. It is characterized in that it can be bent and deformed almost entirely. In order to solve the above-described problem, the present invention provides a rectangular parallelepiped block in which a slit is formed in an oblique direction along a side surface of the block, and the support portion is tapered so that a tip portion side is thinner than a base end portion thereof. It is characterized by being formed.

In order to solve the above-mentioned problems, the present invention provides a slit which is formed at a diagonal position on a side surface of a horizontally long rectangular parallelepiped block and penetrates in a direction crossing the block except for one end of the block. The bottom side of the block is on the base,
The upper part of the block is a supporting part, and the end part of the block is a connecting part.

According to the present invention, a block-shaped base portion is integrated with a base portion along one of the base portions via a connecting portion on one end side of the base portion with a slit-shaped gap therebetween. A cantilever structure consisting of a support portion extending to the base portion, a mounting surface for a workpiece is formed on a surface of the support portion opposite to the slit side, and a gap between the base portion and the support portion is provided. A straightness correction jig having an adjustment member connected thereto for adjusting the distance between the base portion and the support portion and adjusting the bending state of the support portion, and adhered on the straightness correction jig. A measuring device for measuring the positions of a plurality of markers formed on a bar-shaped workpiece, and operating the adjusting member in accordance with the state of warpage of the workpiece measured by the measuring device, and bending the support portion. And a control unit for controlling a state.

Further, according to the present invention, a bar-shaped workpiece is formed by arranging a plurality of thin-film magnetic head elements on its side surface, and the measuring device is provided with a marker near the thin-film magnetic head element on the side face of the workpiece. A means for optically measuring the position may be provided. Further, in the method of the present invention, when correcting a bar-shaped workpiece in which a plurality of thin-film magnetic head elements are aligned on a side surface using the straightness correcting jig according to any of the above, the support portion The work piece is bonded and fixed along the mounting surface, and the height position of the marker provided near each thin-film magnetic head element is detected along the length direction of the work piece, and the height of the marker is shifted. The straightness of the workpiece is adjusted by adjusting the amount of deflection of the support portion of the straightness correcting jig by an adjusting member.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings, but the present invention is not limited to the following embodiment. FIG. 1 shows an embodiment of a straightness correcting jig according to the present invention. A straightness correcting jig S of this embodiment is formed in a horizontally long block shape as a whole, and has a diagonal position on a side surface thereof. Is formed with a slit 10 crossing the whole obliquely. The straightness correcting jig S of this embodiment includes a horizontally long block-shaped base portion 11 located below the slit 10, a connecting portion 12 continuously provided at one end of the base portion 11, and the connection. It has a block-shaped support portion 13 which is connected to the portion 12 and extends through the slit 10 along the base portion 11.

The base 11 has a tip 1
1a side is formed thicker at the base end portion 11b side, and the support portion 13 is formed such that the front end portion 13a side is formed thinner and the base end portion 13b side is formed thicker, and the base 11 has a flat bottom surface. In addition to the surface 11A, the upper surface of the support portion 13 is a planar mounting surface 13A parallel to the fixing surface 11A. The reason why the base end portion 13b of the support portion 13 is formed thicker than the distal end portion side is that the support portion 13 has a cantilever structure, so that rigidity at the base end portion 13b is required. The inclination angle of the slit 10 (the inclination angle of the base 11 with respect to the fixed surface 11A) is, for example, in the range of 5 to 10 ° and preferably about 7 °.

A recess 14 is formed on the bottom side of a portion between the center and the tip of the base 11,
A mounting hole 15 that penetrates the base 11 up and down is formed at a portion from the center of the base 11 to the recess 14, and an upper portion of the mounting hole 15 has a small diameter portion 15 formed of a screw hole.
The small diameter portion 15a is open to the upper surface of the base 11 and communicates with the slit 10. A cylindrical adjusting member 16 having a screw shaft portion 16a having a round head at its tip is provided inside the mounting hole 15.
6a is screwed into the screw hole-shaped small diameter portion 15a and inserted. The above-mentioned recess 14 is formed for positioning the straightness correcting jig S.

Therefore, in the straightness correcting jig S of the present embodiment, the support portion 13 has a cantilever structure joined to the base portion 11 via the connecting portion 12, and the support portion 13 is bent upward and deformed. The warp of the workpiece 2 can be corrected by warping.

Next, the fixing surface 13A of the support portion 13 is formed in a flat shape from the base end side of the support portion 13 to the vicinity of the upper portion of the receiving surface 13c. The operation surface 13B is one step lower than the operation surface 13A, and a horizontally long bar-shaped workpiece (cutout bar) 2 is fixed on the fixing surface 13A by bonding as shown by a two-dot chain line in FIG. Has become. In addition, the base end portion 13b of the support portion 13
Thickness S1 (from the innermost part of the slit 10 to the fixing surface 13A)
Is preferably about the same as the width S2 of the connecting portion 12 (the width from the innermost portion of the slit 10 to the left end face of the connecting portion 12), or a relationship of S1 <S2. Further, the thickness of the base end portion 11b of the base portion 11 is necessary to the extent that the rigidity of the base portion 11 is not reduced, and therefore, it is preferable that the base end portion 11b is not made thinner than necessary. In addition, an insertion hole 11 </ b> D that penetrates vertically through the tip of the base portion is formed in the tip portion of the base portion 11.

Next, a straightness correcting machine including the straightness correcting jig S having the above-described configuration will be described below.
FIGS. 5 and 6 show the configuration of the straightness correcting machine M according to the present embodiment. The straightness correcting machine M according to the present embodiment includes a slide plate 20 that supports the base 11 of the straightness correcting jig S. And a support plate 19 that supports the slide plate 20 so as to be movable in the horizontal direction by a predetermined distance in the horizontal direction, and is connected to the adjustment member 16 of the straightness correction jig S provided below the straightness correction jig S. An adjusting gear 22 having a rotating shaft 21
A driving pulse motor (drive source) 23 and a camera for photographing the positions of the markers MK of the thin-film magnetic head elements 5 on the side surface of the workpiece 2 adhered on the straightness correcting jig S. (Measuring device) 24, an image analyzing device 25 for analyzing marker position information of the thin-film magnetic head elements 5... Taken by the camera 24, and a rotation control of the pulse motor 23 based on the analysis result of the image analyzing device 25. Control device 2 for performing
6 as a main component.

The control device 26 controls the rotation of the pulse motor 23 based on the marker position information of the thin film magnetic head elements 5...
Are adjusted by adjusting the rotational position of the support member 13 to adjust the distance between the support portion 13 and the base portion 11 of the straightness correcting jig S, thereby controlling the flexure of the support portion 13. M
The warp of the workpiece 2 is corrected by controlling the bending of the workpiece 2 so that K is positioned almost horizontally. Here, the positions of the markers MK of the thin-film magnetic heads 5 arranged in a row on the side surface of the workpiece 2 can be, for example, five points A1, A2, A3, A4, and A5 in FIG.

As described above, to measure the marker height position of the thin-film magnetic head 5 at a plurality of positions on the side surface of the workpiece 2, the slide plate 20 is moved along the support plate 19 as shown by arrows in FIG. While moving at regular intervals, when it moves, the camera 24 observes the side surface of the workpiece 2 at a fixed point,
The height positions of the rows of markers MK may be measured individually. Then, if the marker position is displaced in advance and how much correction can be made most efficiently, data is accumulated through multiple preliminary experiments and adjusted based on the preliminary data in actual production. What is necessary is just to adjust the screwing amount of the member 16, adjust the bending amount of the support member 13, and correct the workpiece 2.

As described above, the support 13 by the adjusting member 16
If the warpage of the workpiece 2 is corrected by adjusting the amount of deflection of the workpiece 2, the height positions of the plurality of fine thin film magnetic head elements 5 formed on the side surface of the workpiece 2 can be precisely aligned. If the straightness correcting jig S according to the present invention is used, the support portion 13 has a cantilever structure.
Unlike the straightness correction jigs 8 and 9 shown in FIG. 5, the inflection point of the amount of bending does not occur at the workpiece mounting portion of the support portion 13, and the support portion 13 can be bent smoothly. Therefore, it is possible to smoothly cope with the warpage of the workpiece 2. Therefore, as a result of being able to correct the warpage of the workpiece 2 more precisely, it is possible to accurately perform the polishing of the workpiece 2 in a later step.

The case of lapping the front end surface 2a of the workpiece 2 having the above configuration will be described below. The workpiece 2 to be wrapped using the lapping apparatus is an elongated bar-shaped workpiece 2 sliced and cut from the wafer 1 shown in FIG. The thin-film magnetic head elements 5 are arranged and formed. Therefore, when the workpiece 2 is arranged in a horizontally long and horizontal arrangement, the magnetic gap g in the thin-film magnetic head element 5 is located on the upper surface side, and these magnetic gaps g are gradually polished by the above-described lapping apparatus A by lapping. Thus, the gap depth of each thin-film magnetic head element 5 is intended to be processed within a specified range.

Therefore, in order to machine the front end surface 2a of the workpiece 2, it is necessary to perform extremely high precision lapping. Here, as described above, if the workpiece 2 in a state where the warp has been corrected in advance by the straightness correction jig S is wrapped, the lapping processing can be performed with extremely high precision.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A cutting bar serving as a workpiece having a length of 50 mm, a width of 4 mm, and a thickness of 3 mm is sliced from a wafer made of Al ₂ O ₃ —TiC and cut out, and the cut bar is used as a wax-based adhesive. And fixed to the straightness correction jig. The cutout bar used had a thin-film magnetic head element formed on the side surface and nine position adjustment markers formed near each thin-film magnetic head element. FIG. 7 shows a state in which the support portion of the straightness correction jig is adjusted to adjust the screw portion of the adjustment member of the straightness correction jig so that the support portion of the straightness correction jig is appropriately bent to correct the warpage of the workpiece, and a state before the correction.

In FIG. 7, the horizontal axis indicates the number of elements, and the vertical axis indicates the MR height of the GMR element of the thin-film magnetic head. The results of measurement of the sample and the sample are shown. Is corrected, the correction marker position can be corrected as shown in the data of the sample 'and the sample'. As a result, the M of a plurality of thin film magnetic head elements can be corrected.
It became clear that the error of the R height could be corrected to 0.1 μm or less.

[0031]

As described above, according to the present invention, the workpiece is fixed to the mounting surface of the support of the cantilever structure by bonding or the like, and the amount of deflection of the support of the cantilever structure is adjusted. Therefore, the warpage of the workpiece fixed to the support portion can be accurately corrected. Therefore, it is possible to obtain a state in which the warpage of the workpiece is corrected, and it is possible to greatly improve the processing accuracy when processing the processed surface of the workpiece. Also,
Since the support portion has a cantilever structure, no inflection point of the amount of bending is generated in the portion where the work is fixed in the support portion, so that the warpage of the work can be more precisely removed. it can. Particularly when the workpiece is a substrate on which a thin film magnetic head having a GMR element is formed, a write head which affects the performance of the GMR element after straightness is corrected using the straightness correction jig of the present invention. Since both the gap portion of the read head and the gap portion of the read head are machined, high-precision machining can be performed, so that the gap depth of both the read head and the write head and the throat height of the tip of the write magnetic pole are increased. Can be accurately processed.

The slit is formed in the oblique direction of the block,
By making the base end side of the support part thicker and the tip part side thinner, the bending state of the support part can be smoothly continued from the base end side to the tip end side, and the amount of bending in the support part changes. Since the workpiece can be deformed so as not to generate a curved point, a smooth and precise straightening effect having no inflection point can be obtained in correcting the amount of warpage when correcting the warpage of the workpiece fixed to the support portion.

Next, the straightness correcting jig, a measuring device for measuring a straightness marker of a workpiece on the straightness correcting jig, and an adjusting member of the straightness correcting jig are operated based on the measurement result. A straightness correction machine having a control unit that adjusts the bending state of the support unit by correcting the warpage of the workpiece based on the measurement result of the straightness marker of the workpiece. Accuracy can be improved.

Further, using the straightness correcting jig having the above-described configuration, the marker positions of a plurality of thin-film magnetic head elements formed on the side surface of the bar-shaped workpiece are measured, and the workpiece is processed based on the measurement results. By adjusting the amount of deflection of the fixed support portion with an adjusting member, correcting the warpage of the workpiece and correcting the straightness of the workpiece, the warpage of the workpiece can be corrected with extremely high precision. . Therefore, when the workpiece is polished, there is an effect that highly accurate polishing and post-processing can be performed.

[Brief description of the drawings]

FIG. 1 is a side view of an embodiment of a straightness correcting jig according to the present invention.

FIG. 2 is a partially enlarged sectional view of the straightness correcting jig shown in FIG.

FIG. 3 is a front view of the straightness correcting jig shown in FIG. 1;

FIG. 4 is a perspective view showing a fixed state of a workpiece to the straightness correcting jig shown in FIG. 1;

FIG. 5 is a configuration diagram showing an example of a straightness correcting machine according to the present invention.

FIG. 6 is a schematic diagram showing a main part of the straightness correcting machine shown in FIG. 5;

FIG. 7 is a diagram showing straightness correction data when the straightness correction jig shown in FIG. 1 corrects the warpage of a workpiece;

FIG. 8 is a schematic diagram showing a number of magnetic head elements formed on a general wafer.

FIG. 9 is a perspective view showing a cutting bar cut from the wafer shown in FIG. 8;

FIG. 10 is an enlarged view of a thin-film magnetic head element at a corner of the cutting bar shown in FIG. 9;

11 is an enlarged view of the thin-film magnetic head element shown in FIG.

FIG. 12 is a view showing an example of a conventional straightness correcting jig.

FIG. 13 is a view showing another example of a conventional straightness correcting jig.

[Explanation of symbols]

S: straightness correction jig, MK: marker, 2: workpiece, 2a: tip surface (working surface), 5: thin-film magnetic head element, 10: slit, Reference numeral 11: base portion, 11a: distal end portion, 11b: base end portion, 12: connecting portion, 13: support portion, 13A: mounting surface, 13a: distal end portion , 13b ... base end, 13c ... receiving surface, 16 ... adjustment member, 16a ...
Screw shaft part, 24 ... Camera (measuring device), 26 ... Control part.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shigeru Ishida 1-7 Yukitani Otsukacho, Ota-ku, Tokyo Alps Electric Co., Ltd. (72) Inventor Isao Nakabayashi 1-7 Yukitani Otsukacho, Ota-ku, Tokyo F-term in Alps Electric Co., Ltd. (Reference) 3C016 AA01 BA06 CA07 CB03 CB13 CC01 CE05 DA15 EA02 3C058 AA07 AB04 AB09 AC01 AC02 BA07 BC01 CB01 DA15 5D033 BB43 DA01 DA13

Claims (8)

[Claims] 1. A bar-shaped workpiece to be polished is adhered and fixed, and holds the workpiece during polishing. A base portion and a connecting portion are provided on one end side of the base portion. A cantilever structure consisting of a support portion integrally extended with a slit-shaped gap between the base portion and the base portion along the base portion,
A mounting surface for the workpiece is formed on the surface opposite to the slit side in the support portion, and the distance between the base portion and the support portion is adjusted between the base portion and the support portion, and the support portion is bent. A straightness correction jig for a workpiece, wherein an adjustment member for adjusting a state is attached. 2. The method according to claim 1, wherein the adjusting member is attached to the base portion so as to be able to approach and separate from the supporting portion, and a distal end portion of the adjusting member presses the supporting portion so that substantially the entire supporting portion can be flexibly deformed. The straightness correcting jig according to claim 1, wherein: 3. A slit is formed in the side surface along an oblique direction, and the support portion is formed so as to be tapered so that a tip end side is thinner than a base end side thereof. Or the straightness correcting jig according to 2. 4. A slit penetrating in a direction crossing the block except one end of the block is formed at a diagonal position of a side surface of the horizontally long rectangular parallelepiped block, and a bottom side of the block is formed on a base portion. The straightness correcting jig according to any one of claims 1 to 3, wherein an upper side of the block is a supporting portion, and an end side of the block is a connecting portion. 5. A bar-shaped workpiece is formed by aligning one or more rows of magnetic head elements on a side surface thereof, and the upper surface of the workpiece is defined as a medium facing surface of each magnetic head element, and the bottom surface of the workpiece is formed. The straightness correcting jig according to any one of claims 1 to 4, wherein the straightness correcting jig is configured to be adhered and fixed to a support portion. 6. A base portion and one end of the base portion are integrally extended with a slit-shaped gap between the base portion along the base portion via a connecting portion via a connecting portion. The support portion has a cantilever structure, a mounting surface of a workpiece is formed on a surface of the support portion opposite to the slit side, and a base portion between the base portion and the support portion. A straightness correction jig to which an adjustment member for adjusting a distance between the support portion and the bending state of the support portion is attached, and a plurality of bar-shaped workpieces adhered on the straightness correction jig are aligned. A measuring device for measuring the position of the formed straightness marker, and a supporting portion which operates the adjusting member in accordance with the state of the warpage of the workpiece determined according to the position of the straightness marker measured by the measuring device. And a control unit for controlling a bending state of the straightness. 7. A bar-shaped workpiece is formed by arranging a plurality of thin-film magnetic head elements on a side surface thereof, and the measuring device optically determines a position of a marker in the vicinity of the thin-film magnetic head element on the side face of the workpiece. 7. The straightness correcting machine according to claim 6, further comprising means for measuring the straightness. 8. A support portion for correcting a bar-shaped workpiece having a plurality of thin-film magnetic head elements aligned on a side surface by using the straightness correcting jig according to any one of claims 1 to 5. The workpiece is bonded and fixed along the mounting surface, and the height of the marker provided near each thin-film magnetic head element is detected along the length of the workpiece, and the height of the marker is shifted. A straightness adjustment method for a workpiece, wherein the straightness of the workpiece is adjusted by adjusting the amount of deflection of the support portion of the straightness correcting jig using an adjusting member.