JP2000144068A - Pressure sensitive adhesive film for producing multi- layer wiring board with ivh - Google Patents

Pressure sensitive adhesive film for producing multi- layer wiring board with ivh

Info

Publication number
JP2000144068A
JP2000144068A JP31460698A JP31460698A JP2000144068A JP 2000144068 A JP2000144068 A JP 2000144068A JP 31460698 A JP31460698 A JP 31460698A JP 31460698 A JP31460698 A JP 31460698A JP 2000144068 A JP2000144068 A JP 2000144068A
Authority
JP
Japan
Prior art keywords
film
sensitive adhesive
pressure sensitive
ivh
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31460698A
Other languages
Japanese (ja)
Inventor
Yasushi Oyama
泰 大山
Kazunori Sakuma
和則 佐久間
Atsushi Inoue
敦史 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP31460698A priority Critical patent/JP2000144068A/en
Publication of JP2000144068A publication Critical patent/JP2000144068A/en
Pending legal-status Critical Current

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  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a film excellent in a releasing property suffering from no protrusion of a resin constituting an insulating adhesive layer by forming a barrier layer such as a resin film or a metal film between a support layer made of a polyester and a pressure sensitive adhesive, thereby preventing the migration of an oligomer to the pressure sensitive adhesive layer. SOLUTION: A pressure sensitive adhesive film comprises a support having a thickness of 12-125 μm made of a polyester film such as a polyethylene terephthalate or the like, a pressure sensitive adhesive coated on one side of the film and a barrier layer formed between the support and the pressure sensitive adhesive and composed of a resin film, a metal foil or a metalized film or the like. The pressure sensitive adhesive is obtained by compounding a copolymer having a wt. average mol.wt. of at least 500,000 and a glass transition temperature of -30 to -50 deg.C and comprising at least 50 wt.% of an acrylic monomer or methacrylic acid monomer and 1-50 wt.% of a functional group- containing monomer such as hydroxyalkyl methacrylate or the like with an isocyanate crosslinking agent such as triphenylmethane triisocyanate or the like.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、IVH(インタス
ティシャルバイアホール)付多層配線板の製造に用いら
れる粘着フィルムに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adhesive film used for manufacturing a multilayer wiring board having an IVH (interstitial via hole).

【0002】[0002]

【従来の技術】IVH(インタスティシャルバイアホー
ル)付多層配線板は、図1に示すように多層プリント配
線板の2層以上の導体層間を接続する、めっきスルーホ
ールであって、プリント配線板を貫通していない穴であ
る。インタスティシャルビアホール、インナバイアホー
ルとも称されている。図1に示したIVH付多層配線板
は、一般的に3枚の銅張り積層基板と2組みのプリプレ
グまたは接着フィルムを用いて製造される。製造方法と
しては種々あるが、例えば3枚の両面銅張り積層基板
A、B、Cを回路に応じてドリルで穴明け加工し、スル
ーホールめっきをしてIVHを形成する。そしてA、C
基板は、最外層となる銅箔を残しA、C基板の最外層反
対面とB基板の両面銅箔をエッチングにより配線加工し
配線を形成する。そしてB基板の両面にプリプレグを配
しA、C基板の配線を形成した側をプリプレグ側にして
積層し、プレスにより加熱加圧して多層積層板を作る。
その後ドリルにより穴明けを行いスルーホールめっきを
し、最外層の銅箔の配線加工を行う。
2. Description of the Related Art A multilayer wiring board with an IVH (interstitial via hole) is a plated through hole that connects two or more conductive layers of a multilayer printed wiring board as shown in FIG. Is a hole that does not penetrate. It is also called an interstitial beer hall or an inner via hole. The multilayer wiring board with IVH shown in FIG. 1 is generally manufactured using three copper-clad laminated substrates and two sets of prepregs or adhesive films. There are various manufacturing methods. For example, three double-sided copper-clad laminated substrates A, B, and C are drilled in accordance with a circuit by a drill, and plated through holes to form an IVH. And A, C
On the substrate, wiring is formed by etching and processing the copper foils on the opposite sides of the outermost layers of the A and C substrates and the B substrate by etching, while leaving the copper foil to be the outermost layer. Then, the prepregs are arranged on both sides of the B substrate, and the A and C substrates are laminated with the wiring side formed on the prepreg side, and heated and pressed by a press to form a multilayer laminate.
Thereafter, drilling is performed, through-hole plating is performed, and wiring processing of the outermost copper foil is performed.

【0003】このようして製造するIVH付多層配線板
は、図2に示すように層間絶縁と接着に用いたプリプレ
グの樹脂がプレス時にIVHのスルーホール部を通って
表面層にはみ出し最外層の銅箔に配線を形成しようとし
ても、はみ出した樹脂がエッチング時にレジストとして
作用し、エッチングできずに配線形成不良を生じる。こ
れを防止するため、プレスにより多層積層板を作った
後、最外層をベルトサンダーやバフ研磨等を行い、物理
的にまた剥離剤等の薬液と組み合わせて化学的な処理を
併用して、最外層にはみ出した樹脂を除去していた。と
ころがこの方法において、ベルトサンダーやバフ研磨で
は、研磨熱や研磨による機械的な応力が多層積層板に加
わり、基板の寸法変化や変形が生じてしまう問題があっ
た。また薬液を使用した場合、その除去や廃液処理の問
題があった。
[0003] In the multilayer wiring board with IVH manufactured in this manner, as shown in FIG. 2, the resin of the prepreg used for interlayer insulation and bonding protrudes into the surface layer through the through hole portion of the IVH at the time of pressing to form the outermost layer. Even if an attempt is made to form a wiring on a copper foil, the resin that has run out acts as a resist during etching, and the wiring cannot be etched, resulting in a wiring formation defect. To prevent this, after making a multilayer laminate by pressing, the outermost layer is subjected to a belt sander, buffing, etc., physically and in combination with a chemical solution such as a release agent, etc. The resin protruding into the outer layer was removed. However, in this method, in the belt sander or the buff polishing, there is a problem in that polishing heat or mechanical stress due to the polishing is applied to the multilayer laminate, which causes a dimensional change or deformation of the substrate. In addition, when a chemical solution is used, there is a problem of its removal and waste liquid treatment.

【0004】そこで本発明者等は、特開平7−2975
53号、特願平9−139457号で示す粘着フィルム
を用いる方法により、樹脂のはみ出しを防止する方法を
提案した。さらに本発明者らは、特願平10−1251
34号において支持体の材質がポリエステル、ポリプロ
ピレン、ポリカーボネート、ポリウレタン、ポリイミド
及びポリアミドを用いたIVH付多層配線板製造用粘着
フィルムを提案したが、耐熱性、ビア穴の平滑性及び経
済性の面からポリエステルフィルムが支持体として最適
であることがわかった。
Accordingly, the present inventors have disclosed in Japanese Patent Application Laid-Open No. 7-2975.
No. 53 and Japanese Patent Application No. 9-139457 have proposed a method of using a pressure-sensitive adhesive film to prevent the resin from protruding. Further, the present inventors have disclosed in Japanese Patent Application No. Hei 10-1251.
In No. 34, an adhesive film for manufacturing a multilayer wiring board with an IVH using a polyester, polypropylene, polycarbonate, polyurethane, polyimide and polyamide as the material of the support was proposed, but from the viewpoint of heat resistance, smoothness of via holes and economy. Polyester films have been found to be optimal as supports.

【0005】[0005]

【発明が解決しようとする課題】ところが、支持体にポ
リエステルフィルムを用いると、高温高圧のプレス条件
で処理されるためポリエステル樹脂に含まれる副生成物
であるオリゴマーが塗布された粘着剤を透過して基板に
転写したり、粘着剤の凝集力を低下させ基板への粘着剤
の移行、つまり糊残りを誘発したりする。プレス処理後
基板は、塩酸等の薬液で黒化処理を除去する場合がある
が、オリゴマーのような成分が基板に転写すると薬液が
濡れず除去性を低下させる原因となる。また、粘着剤が
基板に移行した場合糊残り等があると黒化処理の除去性
が低下するばかりか、ビア穴からしみ出した樹脂を研磨
除去する際に、研磨材のベルトやバフの目詰まりを起こ
し、その寿命を短くしたり研磨材の故障の原因となるこ
とがある。本発明はかかる状況に鑑みなされたもので、
IVH付多層配線板の製造に際し、支持体からでるオリ
ゴマーの粘着剤への移行を防止し、IVHとなるスルー
ホールから絶縁接着層となる樹脂のはみ出しがなく、剥
離性に優れたIVH付多層配線板用粘着フィルムを提供
することを目的とする。
However, when a polyester film is used as a support, the polyester film is processed under high-temperature and high-pressure pressing conditions, so that it passes through the pressure-sensitive adhesive coated with an oligomer which is a by-product contained in the polyester resin. To transfer the adhesive to the substrate, or to reduce the cohesive force of the adhesive, thereby causing the adhesive to migrate to the substrate, that is, to induce adhesive residue. After the press treatment, the substrate may be subjected to a blackening treatment with a chemical such as hydrochloric acid in some cases. However, when a component such as an oligomer is transferred to the substrate, the chemical is not wetted and causes a decrease in the removability. In addition, when the adhesive is transferred to the substrate, if there is adhesive residue or the like, not only does the removability of the blackening process deteriorate, but also when removing the resin exuded from the via hole by polishing, the belt or buff of the abrasive is removed. It can cause clogging, shortening its life and causing the abrasive to fail. The present invention has been made in view of such circumstances,
In the production of a multilayer wiring board with an IVH, the migration of the oligomer coming out of the support to the adhesive is prevented, and the resin as the insulating adhesive layer does not protrude from the through hole that becomes the IVH, and the multilayer wiring with the IVH is excellent in releasability. An object of the present invention is to provide an adhesive film for a board.

【0006】[0006]

【課題を解決するための手段】すなわち本発明は、ポリ
エステルフィルム製支持体の片面に粘着剤を塗布した粘
着フィルムであって、支持体と粘着剤の間に樹脂膜や金
属膜などのバリア層を設けたことを特徴とするIVH付
多層配線板製造用粘着フィルムに関する。
That is, the present invention relates to an adhesive film in which an adhesive is applied to one side of a support made of a polyester film, wherein a barrier layer such as a resin film or a metal film is provided between the support and the adhesive. And a pressure-sensitive adhesive film for manufacturing a multilayer wiring board with an IVH.

【0007】[0007]

【発明の実施の形態】本発明に係る粘着フィルムは、支
持体の表面にゴムまたは合成樹脂を主剤とする粘着剤を
塗布したものである。例えばポリイソブチレン、ブチル
ゴム、ポリブデン(メタ)アクリル系ポリマー等が挙げ
られ、更に粘着付与剤、安定剤、着色剤、充填剤、発泡
剤等を添加してもよい。IVH付多層配線板の製造方法
は、前記した通りであり、IVH基板に貼り付けるに
は、ロールラミネータ等一般的な方法が使用できる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The pressure-sensitive adhesive film according to the present invention is obtained by coating a surface of a support with a pressure-sensitive adhesive mainly composed of rubber or synthetic resin. For example, polyisobutylene, butyl rubber, polybutene (meth) acrylic polymer and the like can be mentioned, and a tackifier, a stabilizer, a coloring agent, a filler, a foaming agent and the like may be further added. The method for manufacturing the multilayer wiring board with an IVH is as described above, and a general method such as a roll laminator can be used for sticking to the IVH substrate.

【0008】粘着剤は、アクリル酸ポリマー又はメタク
リル酸ポリマーを主成分としてアクリル酸モノマー、メ
タアクリル酸モノマー、アクリル酸アルキルエステルモ
ノマー、メタアクリル酸アルキルエステルモノマー、架
橋のための官能基含有モノマーの共重合体及びその変性
物である。好ましくは、アクリル酸モノマー又はメタア
クリル酸モノマーが50重量%以上であり、共重合体の
重量平均分子量は、50万以上、更に好ましくは100
万以上である。50万以下では架橋しても流動性が良
く、成形時IVHの穴内に粘着剤が流動し、多層積層板
の外層面の平滑性が得られなくなる。分子量の測定は、
高速クロマトグラフ法、粘度法、超遠法、光散乱法、膜
滲透圧法等があるが、高速クロマトグラフ法が高速であ
り、一般的な方法として広く用いられる。また、流動性
に関し共重合体のガラス転移温度は、−30℃〜−50
℃が更に好ましい。−30℃以上では、粘着剤の流動性
が悪くIVHからの樹脂のはみ出しを防止出来なくな
る。また、−80℃以下では、粘着剤の流動性が良くI
VH部に粘着剤が浸入し多層積層板の最外層の平滑性が
悪くなる。
The pressure-sensitive adhesive is mainly composed of an acrylic acid polymer or a methacrylic acid polymer, and is composed of an acrylic acid monomer, a methacrylic acid monomer, an alkyl acrylate monomer, an alkyl methacrylate monomer, and a monomer having a functional group for crosslinking. Polymers and modified products thereof. Preferably, the content of the acrylic acid monomer or the methacrylic acid monomer is 50% by weight or more, and the weight average molecular weight of the copolymer is 500,000 or more, more preferably 100,000 or more.
More than ten thousand. If the molecular weight is 500,000 or less, the fluidity is good even when cross-linked, and the pressure-sensitive adhesive flows into the holes of the IVH during molding, and the outer layer surface of the multilayer laminate cannot have smoothness. The measurement of molecular weight
There are a high-speed chromatographic method, a viscosity method, an ultra-distant method, a light scattering method, a membrane osmotic pressure method, and the like. The high-speed chromatographic method is fast and widely used as a general method. Further, regarding the fluidity, the glass transition temperature of the copolymer is −30 ° C. to −50.
C is more preferred. At -30 ° C or higher, the flowability of the adhesive is so poor that it is impossible to prevent the resin from protruding from the IVH. At -80 ° C or lower, the flowability of the pressure-sensitive adhesive is good.
The pressure-sensitive adhesive enters the VH part, and the outermost layer of the multilayer laminate has poor smoothness.

【0009】官能基含有モノマーは、アクリルアミド、
メチロールアクリルアミド、ヒドロキシアルキルメタク
リレート、ビニルグリシジルエーテル等のアミノ基、ヒ
ドロキシ基、エポキシ基等のイソシアネートと反応し架
橋する官能基を有するモノマーである。官能基含有モノ
マー量は、1重量%以上50重量%以下、好ましくは3
重量%以上20重量%以下である。1重量%未満では十
分架橋せず、50重量%を超えると粘着剤に適度な弾性
がなくなり、樹脂のはみ出しを防止することが出来なく
なる。
The functional group-containing monomers include acrylamide,
It is a monomer having a functional group which reacts and crosslinks with isocyanate such as amino group, hydroxy group, epoxy group and the like such as methylol acrylamide, hydroxyalkyl methacrylate and vinyl glycidyl ether. The amount of the functional group-containing monomer is from 1% by weight to 50% by weight, preferably 3% by weight.
% By weight or more and 20% by weight or less. If the amount is less than 1% by weight, crosslinking will not be sufficiently performed, and if it exceeds 50% by weight, the pressure-sensitive adhesive will not have appropriate elasticity, and it will not be possible to prevent the resin from protruding.

【0010】架橋剤として用いるイソシアネートは、−
N=C=Oで表す官能基を持つ化合物であり、3官能以
上のイソシアネートである。トリス(4−フェニルイソ
シアネート)チオホスフィト、トリフェニルメタントリ
イソシアネート、トリレンジイソシアネート3量体、ト
リメチルプロパン−1−メチル2−イソシアノ−4−カ
ルバメート、ポリメチレンポリフェニルイソシアネー
ト、ジフェニルエーテル−2,4,4’−トリイソシア
ネート、多官能芳香族イソシアネート、芳香族ポリイソ
シアネート、多官能脂肪族イソシアネート、ブロック型
ポリイソシアネート、ポリイソシアネートプレポリマー
等を例示することが出来る。
The isocyanate used as a crosslinking agent is
It is a compound having a functional group represented by N = C = O, and is a trifunctional or higher isocyanate. Tris (4-phenylisocyanate) thiophosphite, triphenylmethane triisocyanate, tolylene diisocyanate trimer, trimethylpropane-1-methyl 2-isocyano-4-carbamate, polymethylene polyphenyl isocyanate, diphenyl ether-2,4,4 ' -Triisocyanate, polyfunctional aromatic isocyanate, aromatic polyisocyanate, polyfunctional aliphatic isocyanate, block-type polyisocyanate, polyisocyanate prepolymer and the like.

【0011】支持体となるのは、粘着フィルムに一般的
に用いられるポリエチレンテレフタレートポリブチレン
ナフタレートまたはポリエチレンナフタレート等のポリ
エステルフィルムが挙げられ、特に経済性及び粘着剤の
塗布作業性から厚みは12〜125μmが好ましい。更
に、これらは粘着剤との接着を良くするため、サンドブ
ラスト、コロナ処理、カップリング剤処理、酸化剤によ
る化学的処理等を施していても良い。支持体と粘着剤の
間のバリア層は、樹脂膜、金属箔や金属蒸着等により構
成される。ここで樹脂膜としてはポリ塩化ビニル、ポリ
塩化ビニリデン、ポリビニルアルコール等が例示できる
が、ガスバリア性、焼却処理等の観点からポリビニルア
ルコールが好ましい。
The support may be a polyester film such as polyethylene terephthalate polybutylene naphthalate or polyethylene naphthalate which is generally used for the adhesive film. ~ 125 µm is preferred. Further, these may be subjected to sandblasting, corona treatment, treatment with a coupling agent, chemical treatment with an oxidizing agent, or the like in order to improve the adhesion with the adhesive. The barrier layer between the support and the pressure-sensitive adhesive is composed of a resin film, a metal foil, a metal deposition, or the like. Here, examples of the resin film include polyvinyl chloride, polyvinylidene chloride, and polyvinyl alcohol, but polyvinyl alcohol is preferable from the viewpoint of gas barrier properties, incineration treatment, and the like.

【0012】また、ラミネートする金属箔としてアルミ
ニウム、ステンレス、銅等が挙げられるが、これに限ら
れるものではない。ここで金属箔の厚みは5〜35μm
が好ましく、5μm以下ではポリエステルフィルムとの
ラミネート時にしわが入りやすく、35μm以上では支
持体であるポリエステルフィルムのクッション性が失わ
れ樹脂もれを防止する機能が低下してしまう。さらに、
蒸着する金属はアルミニウム、酸化アルミニウム、ニッ
ケル、金等が挙げられるが、経済性等の点からアルミニ
ウムが好ましい。蒸着の厚みは50〜1000Åが好ま
しく、50Å以下ではバリアの効果が発現し難く、10
00Å以上では蒸着した金属が剥がれやすいといった欠
点がある。
Further, examples of the metal foil to be laminated include aluminum, stainless steel, and copper, but are not limited thereto. Here, the thickness of the metal foil is 5 to 35 μm
If it is 5 μm or less, wrinkles are likely to be formed during lamination with a polyester film, and if it is 35 μm or more, the cushioning property of the polyester film as a support is lost, and the function of preventing resin leakage is reduced. further,
Examples of the metal to be deposited include aluminum, aluminum oxide, nickel, and gold. Aluminum is preferable from the viewpoint of economy and the like. The thickness of the vapor deposition is preferably from 50 to 1000 °.
If it is more than 00 °, there is a disadvantage that the deposited metal is easily peeled off.

【0013】本発明は、粘着フィルムがIVHのスルー
ホール部を塞ぎ、そして粘着剤がスルーホール周辺と密
着し、加熱によりスルーホール部に栓をするように変形
して、プリプレグの流動を止めはみ出し防止できる。ま
た支持体フィルムや粘着剤が基板の厚みのバラツキや圧
力の偏りを吸収し、内層回路形状の表面への影響が少な
くなる。さらに、支持体のポリエステルフィルムから移
行するオリゴマーをバリアし、プレス後の基板への移行
物を防止する。
According to the present invention, the adhesive film closes the through-hole portion of the IVH, and the adhesive adheres to the periphery of the through-hole, deforms so as to plug the through-hole portion by heating, and stops the flow of the prepreg. Can be prevented. In addition, the support film and the pressure-sensitive adhesive absorb variations in the thickness of the substrate and bias in the pressure, and the influence of the inner layer circuit shape on the surface is reduced. In addition, it blocks oligomers migrating from the polyester film of the support and prevents migration to the substrate after pressing.

【0014】[0014]

【実施例】以下、本発明を実施例に基づいて説明する
が、本発明はこれらの実施例のみに限定されるものでは
ない。以下において部とあるのはすべて重量部を示す。 実施例1 アクリル酸ブチル、アクリル酸エチル及びアクリル酸−
2−ヒドロキシエチルを85部:10部:5部の配合で
開始剤として過酸化水素を用い、乳化剤としてノニオン
系界面活性剤を用い75℃で3時間乳化重合した後、水
洗、乾燥し重量平均分子量80万、ガラス転移温度(T
g)−47℃のアクリル酸共重合体を得た。次いで、こ
れをトルエンに10重量%になるように溶解し、この溶
液の固形分100部に対し3官能イソシアネートとして
コロネートL(日本ポリウレタン工業(株)商品名)を
10部添加して粘着剤溶液を調整した。これをサンドブ
ラスト加工25μmPETフィルム(帝人(株)製)の
加工していない面に、ポリビニルアルコールを10μm
厚みでコーティングして得られた面に、固形分で15μ
m厚みになるよう塗布し、100℃、5分間加熱乾燥し
粘着フィルムを得た。次いで、ガラス布基材エポキシ樹
脂両面銅張り積層基板を直径0.2mmのドリルで穴明
けしIVH用スルーホールを形成し、スルーホールめっ
きを施した後片面を回路形成し、他面(銅箔とめっき銅
の付いた側)に、得られた粘着フィルムをロールラミネ
ートした。ロールラミネートは、金属板に基板を乗せて
行った。そして直径0.2mmのIVH用スルーホール
をもちスルーホールをめっきした後、両面を回路加工し
た基板の両側に、厚み80μmのガラス布基材エポキシ
樹脂プリプレグを介し、更にその上にそれぞれ、粘着フ
ィルムをラミネートした基板を粘着フィルムが最外層と
なるように積層し、190℃で2時間加熱加圧して6層
基板を得た。得られた6層基板のビア穴から樹脂のはみ
出しを封止性、基板への移行性を評価してその結果を表
1に示す。
EXAMPLES The present invention will be described below with reference to examples, but the present invention is not limited to only these examples. In the following, all parts are parts by weight. Example 1 butyl acrylate, ethyl acrylate and acrylic acid-
Emulsion polymerization of 2-hydroxyethyl in a ratio of 85 parts: 10 parts: 5 parts using hydrogen peroxide as an initiator and a nonionic surfactant as an emulsifier at 75 ° C. for 3 hours, followed by washing with water, drying and weight average. Molecular weight 800,000, glass transition temperature (T
g) An acrylic acid copolymer at -47 ° C was obtained. Next, this was dissolved in toluene so as to be 10% by weight, and 10 parts of Coronate L (trade name of Nippon Polyurethane Industry Co., Ltd.) was added as a trifunctional isocyanate to 100 parts of the solid content of the solution, and the adhesive solution was added. Was adjusted. This was sandblasted to a non-processed surface of a 25 μm PET film (manufactured by Teijin Limited), and polyvinyl alcohol was coated to a thickness of 10 μm.
15μ in solid content on the surface obtained by coating with thickness
m and dried by heating at 100 ° C. for 5 minutes to obtain an adhesive film. Next, a glass cloth base epoxy resin double-sided copper-clad laminated board is drilled with a drill having a diameter of 0.2 mm to form a through hole for IVH, plated with a through hole, formed a circuit on one side, and formed the other side (copper foil). Then, the obtained adhesive film was roll-laminated on the side with the plated copper). Roll lamination was performed by placing a substrate on a metal plate. After plating through holes with IVH through holes with a diameter of 0.2 mm, an adhesive film is further placed on both sides of the circuit board on both sides of which via an 80 μm thick glass cloth base epoxy resin prepreg, Were laminated so that the adhesive film was the outermost layer, and heated and pressed at 190 ° C. for 2 hours to obtain a six-layer substrate. The protrusion of the resin from the via holes of the obtained six-layer board was evaluated for sealing properties and transferability to the board, and the results are shown in Table 1.

【0015】実施例2 実施例1において、支持体のサンドブラスト加工をして
いない面に、8μmのアルミ箔をラミネートしたPET
を用いた他は、実施例1と同様にして粘着フィルムを作
成し、6層基板を用いて評価した。その結果を表1に示
す。
Example 2 In Example 1, PET was obtained by laminating an 8 μm aluminum foil on the surface of the support that had not been sandblasted.
A pressure-sensitive adhesive film was prepared in the same manner as in Example 1 except for using, and evaluation was performed using a six-layer substrate. Table 1 shows the results.

【0016】実施例3 実施例1において、支持体のサンドブラスト加工をして
いない面に、600Åのアルミニウムを蒸着したPET
を用いた他は、実施例1と同様にして粘着フィルムを作
成し、6層基板を用いて評価した。その結果を表1に示
す。
Example 3 In Example 1, PET was formed by vapor-depositing 600 ° of aluminum on the non-sandblasted surface of the support.
A pressure-sensitive adhesive film was prepared in the same manner as in Example 1 except for using, and evaluation was performed using a six-layer substrate. Table 1 shows the results.

【0017】比較例1 実施例1として、支持体のサンドブラスト加工をしてい
ない面に、処理を何も施さないPETを用いた他は、実
施例1と同様にして粘着フィルムを作成し、6層基板を
作成し評価した。その結果を表1に示す。
Comparative Example 1 As Example 1, an adhesive film was prepared in the same manner as in Example 1 except that PET, which was not subjected to any treatment, was used on the surface of the support that had not been subjected to sandblasting. A layer substrate was prepared and evaluated. Table 1 shows the results.

【0018】比較例2 実施例2において、ラミネートするアルミ箔が50μm
である他は、実施例2と同様にして粘着フィルムを作成
し、6層基板を用いて評価した。その結果を表1に示
す。
Comparative Example 2 In Example 2, the aluminum foil to be laminated was 50 μm
Other than that, an adhesive film was prepared in the same manner as in Example 2 and evaluated using a six-layer substrate. Table 1 shows the results.

【0019】比較例3 実施例3において、蒸着したアルミニウムが20Åであ
る他は、実施例3と同様にして粘着フィルムを作成し、
6層基板を用いて評価した。その結果を表1に示す。
Comparative Example 3 An adhesive film was prepared in the same manner as in Example 3 except that the deposited aluminum was 20 °.
Evaluation was performed using a six-layer substrate. Table 1 shows the results.

【0020】[0020]

【表1】 (注1)φ0.2mmのIVHを持つ6層配線板成形後、ビア穴部の樹脂はみ出 しの有無。 ○:樹脂はみ出し100μm未満 ×:樹脂はみ出し100μm以上 (注2)6層配線板表面への移行 ○:基板への移行無し ×:基板への移行あり[Table 1] (Note 1) After molding a 6-layered wiring board with IVH of φ0.2mm, whether or not the resin protrudes from the via hole. ○: Resin protrusion less than 100 μm ×: Resin protrusion 100 μm or more (Note 2) Transfer to 6-layer wiring board surface ○: No transfer to substrate ×: Transfer to substrate

【0021】実施例1〜3のいずれも封止性、移行性を
満足することはできたが、比較例1ではバリア層がない
ため、また同様に比較例3では、蒸着層の厚みが薄いた
めバリア効果が低く基板への移行を防止できなかった。
さらに、比較例2では、ラミネートした金属箔の厚みが
厚すぎるため、クッション効果が低く樹脂もれの防止効
果が損なわれた。
In all of Examples 1 to 3, the sealing property and the migration property were satisfied. However, Comparative Example 1 did not have a barrier layer. Therefore, the barrier effect was low and transfer to the substrate could not be prevented.
Furthermore, in Comparative Example 2, since the thickness of the laminated metal foil was too large, the cushion effect was low and the effect of preventing resin leakage was impaired.

【0022】[0022]

【発明の効果】IVH付多層板製造時に、本発明の粘着
フィルムを用いることによりポリエステルフィルムから
の移行物の基板への転写を防止でき、様々な条件におい
て、プリプレグの樹脂はみ出しを防止でき、作業性に優
れたIVH付多層板の製造が可能になった。
According to the present invention, the use of the pressure-sensitive adhesive film of the present invention can prevent the transfer of the transferred matter from the polyester film to the substrate during the production of the multilayer board with IVH, and can prevent the prepreg from protruding under various conditions. This makes it possible to manufacture a multi-layer board with an IVH having excellent properties.

【図面の簡単な説明】[Brief description of the drawings]

【図1】IVH(インタスティシャルバイアホール)付
多層配線板の斜視断面図。
FIG. 1 is a perspective sectional view of a multilayer wiring board with an IVH (interstitial via hole).

【図2】IVH部よりはみ出した樹脂を示すIVH付多
層板の要部断面図。
FIG. 2 is a cross-sectional view of a main part of the multi-layer board with IVH, showing the resin protruding from the IVH section.

【符号の説明】[Explanation of symbols]

1 IVH部 2 スルーホールめっき 3 接着用樹脂(プリプレグ、接着フィルム) 4 回路加工した銅箔面 4’回路加工していない銅箔面 5 基板 6 樹脂はみ出し部 7 粘着フィルム 8 プラスチックフィルム支持体 9 粘着剤 A 両面銅張り基板を加工した基板(1、2層目とな
る) B 両面銅張り基板を加工した基板(3、4層目とな
る) C 両面銅張り基板を加工した基板(5、6層目とな
る)
DESCRIPTION OF SYMBOLS 1 IVH part 2 Through-hole plating 3 Adhesive resin (prepreg, adhesive film) 4 Copper foil surface with circuit processing 4 'Copper foil surface without circuit processing 5 Substrate 6 Resin protrusion 7 Adhesive film 8 Plastic film support 9 Adhesive Agent A Substrate processed double-sided copper-clad substrate (first and second layers) B Substrate processed double-sided copper-clad substrate (third and fourth layers) C Substrate processed double-sided copper-clad substrate (5, 6) Layer)

───────────────────────────────────────────────────── フロントページの続き (72)発明者 井上 敦史 茨城県下館市大字五所宮1150番地 日立化 成工業株式会社五所宮工場内 Fターム(参考) 4J004 AA05 AA07 AA10 AA14 AB01 CA03 CA05 CA06 CA08 CC03 CC04 CD01 CD05 FA05 4J040 DA131 DA141 DF011 EF181 GA05 GA07 GA11 GA22 JA09 JB09 LA01 LA02 NA20 PA15 5E346 CC41 DD02 EE02 EE06 EE09 EE12 GG02 GG28 HH21  ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Atsushi Inoue 1150 Goshomiya, Odate, Shimodate-shi, Ibaraki F-term in Goshonomiya Plant of Hitachi Chemical Co., Ltd. 4J004 AA05 AA07 AA10 AA14 AB01 CA03 CA05 CA06 CA08 CC03 CC04 CD01 CD05 FA05 4J040 DA131 DA141 DF011 EF181 GA05 GA07 GA11 GA22 JA09 JB09 LA01 LA02 NA20 PA15 5E346 CC41 DD02 EE02 EE06 EE09 EE12 GG02 GG28 HH21

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】ポリエステルフィルム製支持体の片面に粘
着剤を塗布した粘着フィルムであって、支持体と粘着剤
の間にバリア層を設けたことを特徴とするIVH付多層
配線板製造用粘着フィルム。
1. An adhesive film for producing a multilayer wiring board with IVH, wherein the adhesive film is obtained by applying an adhesive to one side of a support made of a polyester film, wherein a barrier layer is provided between the support and the adhesive. the film.
【請求項2】バリア層が樹脂膜である請求項1記載のI
VH付多層配線板製造用粘着フィルム。
2. The method according to claim 1, wherein the barrier layer is a resin film.
Adhesive film for manufacturing multilayer wiring boards with VH.
【請求項3】バリア層が金属膜である請求項1記載のI
VH付多層配線板製造用粘着フィルム。
3. The method according to claim 1, wherein the barrier layer is a metal film.
Adhesive film for manufacturing multilayer wiring boards with VH.
【請求項4】金属膜が厚みが50〜1000Åの金属蒸
着膜である請求項3記載のIVH付多層配線板製造用粘
着フィルム。
4. The pressure-sensitive adhesive film according to claim 3, wherein the metal film is a metal deposited film having a thickness of 50 to 1000 °.
【請求項5】金属膜が厚みが5〜35μmの金属箔であ
る請求項3記載のIVH付多層配線板製造用粘着フィル
ム。
5. The adhesive film according to claim 3, wherein the metal film is a metal foil having a thickness of 5 to 35 μm.
【請求項6】粘着剤がアクリル酸共重合体樹脂又はメタ
クリル酸共重合体樹脂であり重量平均分子量が50万以
上で、ガラス転移温度が−30℃〜−80℃、イソシア
ネートと反応する官能基含有モノマー量が1重量%以上
50重量%以下である請求項1乃至5のいずれかに記載
のIVH付多層配線板製造用粘着フィルム。
6. An adhesive which is an acrylic acid copolymer resin or a methacrylic acid copolymer resin, has a weight average molecular weight of 500,000 or more, a glass transition temperature of -30.degree. C. to -80.degree. The pressure-sensitive adhesive film for producing a multilayer wiring board with an IVH according to any one of claims 1 to 5, wherein the content of the monomer is 1% by weight or more and 50% by weight or less.
JP31460698A 1998-11-05 1998-11-05 Pressure sensitive adhesive film for producing multi- layer wiring board with ivh Pending JP2000144068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31460698A JP2000144068A (en) 1998-11-05 1998-11-05 Pressure sensitive adhesive film for producing multi- layer wiring board with ivh

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31460698A JP2000144068A (en) 1998-11-05 1998-11-05 Pressure sensitive adhesive film for producing multi- layer wiring board with ivh

Publications (1)

Publication Number Publication Date
JP2000144068A true JP2000144068A (en) 2000-05-26

Family

ID=18055329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31460698A Pending JP2000144068A (en) 1998-11-05 1998-11-05 Pressure sensitive adhesive film for producing multi- layer wiring board with ivh

Country Status (1)

Country Link
JP (1) JP2000144068A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171151A (en) * 2009-01-22 2010-08-05 Mitsubishi Plastics Inc Support for forming interlayer insulating material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171151A (en) * 2009-01-22 2010-08-05 Mitsubishi Plastics Inc Support for forming interlayer insulating material

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