JP2000127413A - Manufacture of ink-jet head device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the constant quality of printing by all ink-jet heads at a low cost without requring complicated control. SOLUTION: The following three cavity plates are prepared respectively: that is, a cavity plate 12 to be used for piezoelectric elements manufactured according to a specified level as shown in the Fig. (A), a cavity plate 12 in which pitches among ink pressure chambers 13 are narrowed in order to be used for piezoelectric elements contracted shorter than the specified level as shown in the Fig. (B), and a cavity plate 12 in which pitches among ink pressure chambers 13 are widened in order to be used for piezoelectric elements having a smaller degree of conraction than the specified level as shown in the Fig. (C). A pitch between electrodes for piezoelectric elements, which are manufactured through a burning process, is metered, and any of the cavity plates 12 is selected in accordance with the pitch between the electrodes and is bonded to the piezoelectric elements.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention belongs to the technical field of a method of manufacturing an ink jet head device used for an ink jet printer or the like.

[0002]

2. Description of the Related Art An ink jet head used in a conventional ink jet printer includes a ceramic cavity plate having an ink pressure chamber defined by a plurality of partition walls, and a piezoelectric element joined to the cavity plate. In addition, pressure fluctuations are generated in the ink pressure chamber by the piezoelectric element, and ink in the ink pressure chamber is discharged from nozzles formed in the cavity plate.

[0003] Various types of piezoelectric elements are used. One example is a laminated piezoelectric element. This laminated type piezoelectric element screen-prints positive and negative electrode patterns alternately arranged with a predetermined interval on a piezoelectric member formed in a sheet shape, and further superimposes the piezoelectric member on this electrode, Thereafter, the piezoelectric member and the electrode are laminated in the same manner, then subjected to a binder removal / sintering process, and then provided with a plurality of cutout recesses so as to make the deformed portions of the piezoelectric element independent from each other.

[0004] With such a configuration, a plurality of displacement portions of the piezoelectric element can be made to correspond to each of the plurality of ink pressure chambers, and good ink ejection can be performed for each ink pressure chamber.

[0005] On the other hand, various methods are used to manufacture the cavity plate. For example, a method of integrally molding a pressure chamber or an ink reservoir by injection molding of ceramic or resin, or an etching treatment on photosensitive glass. A method of forming a pressure chamber or an ink reservoir by performing the application is exemplified.

[0006]

However, the piezoelectric element shrinks due to the baking process, and the shrinkage ratio is not constant but varies from piezoelectric element to piezoelectric element. On the other hand, a cavity plate having good dimensional accuracy can be manufactured by using shot blasting or etching. Therefore, when the piezoelectric element is joined to the cavity plate having the uniform dimensional accuracy, the displacement between the position of the ink pressure chamber and the partition wall of the cavity plate and the position of the electrode of the piezoelectric element is reduced. It will be different every time. As a result, there has been a problem that the ink ejection performance varies for each nozzle or each inkjet head in one inkjet head.

Conventionally, in order to solve this problem, the voltage or waveform of a drive signal applied to a piezoelectric element is adjusted for each ink jet head or each nozzle, or only a piezoelectric element formed in a specified size is used. Used to select. Therefore, there is a problem that control becomes complicated and cost increases.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and does not require complicated control, and can keep the print quality of all ink jet heads constant at low cost. It is an object of the present invention to provide a manufacturing method.

[0009]

According to a first aspect of the present invention, there is provided a method of manufacturing an ink jet head device, comprising: storing ink in ink pressure chambers provided at predetermined intervals in a cavity plate; What is claimed is: 1. A method for manufacturing an ink jet head device in which a pressure change is applied to ink by a piezoelectric element to discharge the ink from a nozzle, wherein at least a firing step is performed to manufacture the piezoelectric element, and a dimension of the piezoelectric element in the firing step is reduced. Producing a plurality of types of cavity plates having different intervals of the ink pressure chambers in accordance with the variation, and selecting a cavity plate according to the size of the piezoelectric element from the plurality of types of cavity plates; Joining the selected cavity plate and the piezoelectric element. Method for manufacturing an ink jet head device that.

According to the method of manufacturing an ink jet head device according to the first aspect, since the piezoelectric element is manufactured through the firing step, the gap between the electrodes of the piezoelectric element varies due to an error in the contraction rate. A plurality of types of cavity plates having different intervals between the ink pressure chambers are manufactured in advance, and a cavity plate according to the variation of the piezoelectric element is selected from the plurality of types of cavity plates, and the piezoelectric elements are joined. Therefore, the positions of the ink pressure chambers and partition walls of the cavity plate and the electrodes of the piezoelectric element can be appropriately adjusted, and the ink ejection performance of each nozzle in one inkjet head device and the ink ejection performance in each inkjet head device can be improved. The ink ejection performance becomes uniform.

According to a second aspect of the present invention, there is provided a method of manufacturing an ink jet head device, wherein
In the method of manufacturing an ink jet head device described in the above, the step of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers is a step of manufacturing a cavity plate having the same nozzle intervals.

According to a second aspect of the present invention, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, the nozzle intervals are the same for all the cavity plates. Therefore, the ink ejection performance in each inkjet head device is uniform. Further, it is not necessary to prepare a plurality of types of nozzle plates.

According to a third aspect of the present invention, there is provided a method of manufacturing an ink-jet head device, wherein
In the method of manufacturing an ink jet head device according to the above, the step of manufacturing a plurality of types of cavity plates having different intervals of the ink pressure chambers, the cavity in which the ink flow path that connects the ink pressure chambers and the nozzles is smoothly bent It is a step of manufacturing a plate.

According to a third aspect of the present invention, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, the ink that allows the ink pressure chambers to communicate with the nozzles. Since the flow path is smoothly bent, even when the interval between the ink pressure chambers is changed, the nozzle pitch can be made uniform in all the cavity plates while maintaining good ink ejection performance.

According to a fourth aspect of the present invention, there is provided a method of manufacturing an ink jet head device, the first aspect of the present invention being provided in order to solve the above problem.
4. The method for manufacturing an ink jet head device according to claim 3, wherein the step of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers includes the step of connecting the ink pressure chambers with the nozzles. The method is characterized by a step of manufacturing a cavity plate in which a bending region of the flow path is provided outside a region corresponding to a deformation region of the piezoelectric element.

According to a fourth aspect of the present invention, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, the ink that allows the ink pressure chambers to communicate with the nozzles. Since the bending region of the flow path is provided outside the region corresponding to the deformation region of the piezoelectric element, the deformation of the piezoelectric element is not hindered in the bending region.

According to a fifth aspect of the present invention, there is provided a method of manufacturing an ink jet head device, the first aspect of the invention being provided in order to solve the above-mentioned problem.
4. The method of manufacturing an ink jet head device according to claim 3, wherein the step of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers includes a plurality of the ink pressure chambers and a plurality of the nozzles. 5. This is a step of manufacturing a cavity plate in which all the flow paths of a plurality of ink flow paths for making the ink flow paths have the same resistance.

According to the method of manufacturing an ink jet head device of the fifth aspect, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers,
Since the resistance of each of the plurality of ink flow paths for connecting the plurality of ink pressure chambers and the plurality of nozzles is made equal in one cavity plate or in all the cavity plates, each ink jet head device has The ink ejection performance becomes uniform.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS.

First, an outline of the ink jet head device of the present embodiment will be described with reference to FIG.

FIG. 2 is a perspective view showing a main part of a schematic configuration of the head 1 for a line type ink jet printer.
As shown in FIG. 2, the head 1 for a line-type inkjet printer of the present embodiment has a plurality of piezoelectric inkjet heads 2 arranged in parallel on the surface of a first ink flow path plate 3.

The first ink flow path plate 3 is a plate-like member made of aluminum or magnesium. A heater 4 having a stainless steel pattern sandwiched between polyimide films is attached to a front surface thereof. An outward path 5 of the ink supplied from the tank is formed. The first ink flow path plate 3 is formed with a through hole 7 penetrating from the front surface to the back surface and communicating with the outward path 5, and the ink supplied to the outward path 5 is directed to the front side by the through hole 7. Supplied. Further, the first ink channel plate 3 is bonded to the second ink channel plate 9.

The second ink flow path plate 9 is a plate-like member made of aluminum or magnesium, like the first ink flow path plate 3, and has a back path for discharging ink to the ink tank on the back surface. 8 are formed.

On the other hand, the piezoelectric ink jet head 2
It comprises a base plate 10, a cavity plate 12, a nozzle plate 16, and a piezoelectric element 17.

The base plate 10 is a plate-like member made of aluminum or magnesium. The base plate 10 has a through hole 11 communicating with the through hole 7 of the first ink flow path plate 3. The base plate 10 has a back surface adhered to the first ink flow path plate 3 by an adhesive, and a cavity plate 12 adhered to the front surface by the same adhesive.

The cavity plate 12 is a sintered body of ceramic, and has a plurality of ink pressure chambers 13 each having an open upper surface, a partition wall 14 for partitioning each ink pressure chamber 13,
An ink reservoir 15 that communicates with each ink pressure chamber 13 and communicates with the through hole 11 is formed on the back surface.

The nozzle plate 16 is a sheet-like member made of polyimide, and has a plurality of nozzles 16a penetrating from the front surface to the back surface. The front end side of the ink pressure chamber 13 opposite to the side of the ink reservoir 15 gradually becomes narrower, and an opening is formed in the front end surface.
The nozzle plate 16 is bonded by an adhesive so that the position of the opening and the position of the nozzle 16a coincide with each other on the front end surface.

The piezoelectric element 17 is a laminated piezoelectric element which is mounted so that the upper surface (open surface) of each ink pressure chamber 13 is closed, and is a lead zirconate titanate (PZT) system having a piezoelectric / electrostrictive effect. A plurality of piezoelectric ceramic layers made of the above ceramic material are laminated, and a pattern 18 of a positive electrode and a negative electrode such as silver palladium is formed between the piezoelectric ceramic layers by screen printing.

The electrode pattern 18 is connected to a power supply end (not shown). The power supply end is connected to a drive IC 21 via a flexible printed circuit board 20. Further, the drive IC 21 is connected via a flexible printed board 20 to a main board provided with a CPU and the like (not shown). Accordingly, the drive IC 21 is driven in accordance with the drive signal output from the main substrate, and the drive voltage is further supplied from the drive IC 21 to the electrode pattern 18, whereby the piezoelectric ceramic layer is displaced, and the pressure chamber sheet 12 is displaced. The pressure in the ink pressure chamber 13 of the cavity plate formed by the base plate 10 is changed, and ink is ejected from the nozzles 16 a formed in the nozzle plate 16.

This ink ejection operation is performed simultaneously by each of the piezoelectric ink jet heads 2 and
The entire head of the line type ink jet printer configured as described above swings in the direction of arrow A by a swing mechanism (not shown), so that high-speed printing is performed on the recording paper P in line units.

Next, a method of manufacturing the piezoelectric element 17 will be described in detail. First, a resin or binder is mixed with ceramic powder to form a sheet-like ceramic layer,
On the surface of the ceramic layer, a plus electrode divided into a plurality of pieces so as to correspond to the ink pressure chambers 13 of the cavity plate 12 in a one-to-one manner, and into a plurality of pieces so as to correspond one-to-one to the partition walls 14 of the cavity plate 12. The negative electrode thus formed is formed by screen printing. Similarly, on the back surface of the ceramic layer, a plus electrode and a minus electrode are formed at positions corresponding to the plus electrode and the minus electrode on the front surface by screen printing. Then, the sheet body having the electrodes formed on the ceramic layer is subjected to a binder removal and firing step.

Next, the sheet body is immersed in an oil bath (not shown) filled with an insulating oil such as silicone oil at about 130 ° C., and 2.5 kV / mm is applied by a polarizing electrode.
A degree of electric field is applied to perform polarization processing. The polarization direction is a direction from the front surface on the bonding side of the piezoelectric element 17 to the cavity plate 12 toward the back surface. The piezoelectric element 17 is obtained by the above method.

Next, a method for manufacturing the piezoelectric ink jet head 2 of the present embodiment will be described in detail.

In this embodiment, a plurality of types of cavity plates 12 having different pitches between the ink pressure chambers 13 are first manufactured as shown in FIG. The cavity plate 12 is formed by shot blasting using hard fine particles such as ceramic powder. First,
On the surface of the ceramic sheet, a resist mask (not shown) is formed in a portion left as the partition wall 14. By projecting hard fine particles on the surface at high speed, the ink chamber 1
3 and an ink reservoir 15 are formed.

The cavity plate 12 corresponds to a piezoelectric element 17 manufactured to a prescribed size as shown in FIG. 1A, and the contraction rate of the piezoelectric element 17 is +0.1 mm as shown in FIG. (C) that corresponds to a case where the electrode shrinks at a rate of 2% in a direction in which the pitch between the electrodes becomes narrower than a specified dimension.
As shown in (3), three types are prepared, each of which corresponds to the case where the contraction rate of the piezoelectric element 17 is -0.2% and the pitch between the electrodes is wider than a specified dimension.

However, in any of the cavity plates 12, the nozzle pitch is kept constant, so that the pitch between the ink pressure chambers differs from the specified value in FIGS.
In the cavity plate 12 shown in (C), a bent area Y1 in which the ink pressure chambers 13 and the partition walls 14 are bent is provided on the tip end side joined to the nozzle plate 16.

As shown in FIG. 3, which is an enlarged view of the circle B shown in FIG. 1B, the bending area Y1 is located between the inner bending start position P1 and the outer bending start position P2, and the inner bending start position P2. A predetermined interval w1 is provided between the bending end position P3 and the outer bending end position P4. With this configuration, the width w2 of the ink flow path perpendicular to the ink movement direction indicated by the arrow C in FIG. 3 is always kept constant regardless of the bent area Y1 and the other areas. . That is, the cross-sectional area of the ink flow path is constant in all regions of the ink flow path, and the flow path resistance of the ink flow path is uniform. Therefore, even when a plurality of types of cavity plates 12 having different pitches between the ink pressure chambers are prepared as shown in FIG. 1, the ink ejection performance is kept uniform in any of the cavity plates 12.

The interval between the bent regions Y1 in the short direction of the cavity plate 12 is set to be sufficiently larger than the interval Y3 of the ink flow paths in the short direction. Therefore, the bending angle of the ink flow path in the bending area Y1 becomes small, and the ink flow path in the straight traveling area smoothly continues. Therefore, even when the bent area Y1 is provided, the flow path resistance is not increased, and the cavity plate 12 having no bent area shown in FIG. 1A and the cavity plate 12 shown in FIGS. No difference occurs in the ink ejection performance between the cavity plate 12 having the bent region Y1 shown in FIG.

Further, as shown in FIG. 2, the deformation region Y2 in which the positive electrode and the negative electrode are alternately arranged in the piezoelectric element 17 is provided at a position which does not overlap with the bending region Y1, as shown in FIG. I have. Therefore, the bending area Y
1, the deformation of the piezoelectric element 17 is not prevented,
Good ink ejection performance is obtained in both the cavity plate 12 in which the bent region shown in FIG. 1A is not formed and the cavity plate 12 in which the bent region Y1 shown in FIGS. 1B and 1C are formed. Can be demonstrated.

In the present embodiment, a plurality of types of cavity plates 12 configured as described above are prepared, and one of the cavity plates 2 is selected in accordance with the degree of contraction of the piezoelectric element 17 in the firing step. The two are joined.
The degree of contraction of the piezoelectric element 17 is determined by measuring the pitch between the electrodes of the piezoelectric element 17 using, for example, a microscope.

The piezoelectric element 17 undergoes a sintering process, which causes a dimensional error due to shrinkage of about ± 0.2%.
Therefore, when the inter-electrode pitch of the piezoelectric element 17 is manufactured to substantially the specified value by the above measurement, the cavity plate 12 in which the bending region Y1 shown in FIG. 1A is not provided is selected. If the pitch between the electrodes of the piezoelectric element 17 has contracted by about + 0.2% from the specified value,
The cavity region Y1 shown in FIG. 1B is provided, and the cavity plate 12 in which the pitch of the ink pressure chamber 13 is shorter than a specified value is selected. When the inter-electrode pitch of the piezoelectric element 17 is wider than the specified value by about + 0.2%, the bending area Y1 shown in FIG. 1C is provided, and the pitch of the ink pressure chamber 13 is larger than the specified value. Long cavity plate 1
Select 2. And the selected cavity plate 1
2 and the piezoelectric element 17 are bonded by an adhesive, the nozzle plate 16 is bonded to the cavity plate 12 and the piezoelectric element 17 by the adhesive, and the cavity plate 12 and the base plate 10 are bonded to each other by an adhesive. The ink jet head 2 is completed.

As described above, according to the present embodiment, the ejection performance between all the nozzles and the ink jet head can be made uniform regardless of the error in the shrinkage rate due to the firing of the piezoelectric element 17. Also, one cavity plate 12
Since the flow resistance of each ink flow path in the inside is kept uniform, the ejection performance of all the nozzles can be made uniform. Further, since the bent area Y1 is provided so that the nozzle pitch is equal for all the cavity plates 12, the nozzle plate 16 is
It is not necessary to prepare a plurality of types based on the error of the shrinkage rate due to the firing of No. 7.

On the other hand, in the conventional ink jet head, as shown in FIG. 4A, no problem occurs when the pitch between the electrodes of the piezoelectric element 17 is equal to a specified value. Is smaller than the prescribed value, the positive electrode 1 is reduced as shown by a region D in FIG.
8a and the minus electrode 18b come to the boundary position between the ink pressure chamber 13 and the partition wall 14, and the predetermined ink ejection performance cannot be exhibited.

Further, even when the inter-electrode pitch of the piezoelectric element 17 becomes wider than the specified value, the positive electrode 18a and the negative electrode 18b as shown by the area E in FIG.
Comes to the boundary position between the ink pressure chamber 13 and the partition wall 14, and the predetermined ink ejection performance cannot be exhibited.
As described above, in the related art, since the ink ejection performance varies between nozzles in one inkjet head, complicated driving control of the piezoelectric element has to be performed for each nozzle. Further, conventionally, only the piezoelectric element manufactured with the specified size is used, so that there is a problem that waste occurs and the cost increases.

However, according to the present embodiment, the ink can be formed by a simple method of selecting an appropriate cavity plate from a plurality of types of cavity plates and joining them, regardless of an error in the shrinkage due to firing of the piezoelectric element. Since the ejection performance can be made uniform, complicated control as in the related art is unnecessary. Further, the cost is not increased because the piezoelectric element is not wasted.

Further, according to the present embodiment, since there is no variation in the ink ejection performance between the ink jet heads, complicated control is required especially when printing is performed using a plurality of ink jet heads as shown in FIG. It is possible to perform extremely high quality printing without performing.

In this embodiment, an example using three types of cavity plates has been described. However, the present invention is not limited to this, and more types of cavity plates may be prepared. good. For example, as the number of nozzles increases and the number of ink pressure chambers increases,
Since the influence of the error of the shrinkage rate due to the firing becomes large,
Many types of cavity plates that are finely classified according to the shrinkage ratio may be prepared.

In this embodiment, the case where the ceramic fired body is used for the cavity plate has been described. However, the present invention is not limited to this. For example, the cavity plate is formed using glass or silicon. May be. Also, in the present invention, shot blasting is used to form the ink pressure chambers and ink reservoirs, but etching and high-precision ceramic injection molding may be used. Other processing methods may be used as long as they can be processed.

Further, in this embodiment, a single-layer piezoelectric element is used, but the present invention is not limited to this, and can be applied to a case where a laminated piezoelectric element is used.

[0050]

According to the method of manufacturing an ink-jet head device according to the first aspect, a plurality of types of cavity plates having different intervals of the ink pressure chambers are manufactured in accordance with the variation in the size of the piezoelectric element in the firing step. Since a cavity plate is selected from the plurality of types of cavity plates according to the variation in the size of the piezoelectric element, and the selected cavity plate and the piezoelectric element are joined,
The positions of the ink pressure chambers and partition walls of the cavity plate and the electrodes of the piezoelectric element can be appropriately adjusted, and the ink ejection performance of each nozzle in one inkjet head device and the ink ejection performance of each inkjet head device Can be made uniform. Further, even if the piezoelectric element has a size outside the specified value, it is not wasted, so that the cost can be reduced.

According to the method of manufacturing an ink jet head device of the second aspect, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, the cavity plates having the same nozzle interval are all manufactured. Therefore, the ink ejection performance can be made uniform in each inkjet head device.

According to a third aspect of the present invention, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, the ink that allows the ink pressure chambers to communicate with the nozzles is manufactured. Since the cavity plate having the flow path smoothly bent is manufactured, even when the interval between the ink pressure chambers is changed, the nozzle pitch can be made uniform in all the cavity plates while maintaining good ink ejection performance.

According to a fourth aspect of the present invention, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, the ink that allows the ink pressure chambers to communicate with the nozzles. Since the bending region of the flow path is provided outside the region corresponding to the deformation region of the piezoelectric element, the deformation of the piezoelectric element is not hindered in the bending region.

According to the method of manufacturing an ink jet head device of claim 5, when manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, a plurality of the ink pressure chambers and a plurality of the nozzles are provided. Since a cavity plate is manufactured in which all the flow paths of a plurality of ink flow paths that communicate with each other have the same resistance, the ink ejection performance in each inkjet head device can be made uniform. Further, it is not necessary to prepare a plurality of types of nozzle plates.

[Brief description of the drawings]

1A and 1B are diagrams showing a configuration of a cavity plate according to an embodiment of the present invention, in which FIG. 1A is a diagram illustrating a cavity plate used for a piezoelectric element manufactured to a specified value, and FIG. FIG. 3C is a plan view showing a cavity plate used for a piezoelectric element, and FIG.

FIG. 2 is a perspective view illustrating a configuration of a head for a line-type inkjet printer according to an embodiment of the present invention.

FIG. 3 is an enlarged view showing a bending region in the cavity plate of FIG. 1;

4A and 4B are cross-sectional views showing a conventional inkjet head device, in which (A) uses a piezoelectric element manufactured to a specified value, and (B) uses a piezoelectric element contracted from a specified value. (C) is a cross-sectional view showing each using a piezoelectric element having a degree of contraction less than a specified value.

[Explanation of symbols]

 2 Piezoelectric inkjet head 10 Base plate 12 Cavity plate 13 Ink pressure chamber 14 Partition wall 15 Ink reservoir 16 Nozzle plate 16a Nozzle Y1 Bending area

Claims (5)

[Claims] 1. A method for manufacturing an ink jet head device for storing ink in an ink pressure chamber provided at a predetermined interval in a cavity plate, applying pressure fluctuation to the ink by a piezoelectric element, and discharging the ink from a nozzle. A step of manufacturing a piezoelectric element through at least a firing step, and a step of manufacturing a plurality of types of the cavity plates having different intervals of the ink pressure chambers in accordance with a variation in dimensions of the piezoelectric element in the firing step. An ink jet head device comprising: a step of selecting a cavity plate according to the size of the piezoelectric element from the plurality of types of cavity plates; and a step of joining the selected cavity plate and the piezoelectric element. Manufacturing method. 2. The ink-jet apparatus according to claim 1, wherein the step of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers is a step of manufacturing a cavity plate having the same nozzle intervals. Manufacturing method of head device. 3. The step of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers is a step of manufacturing a cavity plate in which an ink flow path connecting the ink pressure chambers and the nozzles is smoothly bent. 3. The method for manufacturing an ink jet head device according to claim 2, wherein: 4. The method of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, wherein a bent area of an ink flow path that connects the ink pressure chamber and the nozzle corresponds to a deformation area of the piezoelectric element. The method for manufacturing an ink jet head device according to any one of claims 1 to 3, further comprising a step of manufacturing a cavity plate provided outside the region. 5. The method of manufacturing a plurality of types of cavity plates having different intervals between the ink pressure chambers, wherein each of the flow path resistances of a plurality of ink flow paths that connect the plurality of ink pressure chambers and the plurality of nozzles is all set. The method for manufacturing an ink jet head device according to any one of claims 1 to 4, wherein the method is a step of manufacturing equal cavity plates.