JP2000127021A - Groove polishing method for quartz glass rod - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate surface roughness of a polishing surface at low cost and to eliminate metal impurity generated by cutting groove working by a diamond blade by performing mirror finished surface polishing for a groove part of a quartz glass rod for which cutting groove working is performed by the diamond blade by a brush means for polishing. SOLUTION: After a polishing brush 22 is set to a quartz glass rod fixing base 34 at a desired angle by moving a rail for moving brush 16a on rails for moving rail 40a, 40b, a quartz glass rod in which a groove is formed by cutting groove working by a diamond blade is mounted and fixed on/to the quartz glass rod fixing base 34. By rotating a motor for rotating brush 24 and a motor for moving brush 30, the polishing brush 22 is rotated. By moving the polishing brush 22 along the rails for moving brush 16a, 16b, a groove part of a quartz glass rod 36 on the quartz glass rod fixing base 34 is polished by the polishing brush 22.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for polishing a groove portion of a grooved quartz glass rod used in a quartz wafer boat used for heat treatment of a silicon wafer for manufacturing ICs, VLSIs and the like. .

[0002]

2. Related Art Conventionally, groove processing of a grooved quartz glass rod used in a wafer boat has been performed by cutting a solid quartz glass rod with a diamond blade. However, when a cutting groove is machined by a diamond blade, a small amount of metal impurities contained in the blade remains in the groove portion of the quartz glass rod, and the wafer is contaminated during heat treatment of the wafer. .

[0003] Further, if the cut groove processed surface by the diamond blade is used as it is, particles are generated from the groove portion during the heat treatment of the wafer, which has an adverse effect on the wafer.

[0004] In order to prevent these drawbacks, the first means has been to enhance the cleaning of a quartz glass rod cut and grooved by a diamond blade.

[0005] As a second means, in order to prevent particles from being generated from the groove portion, a method of flame polishing the groove portion has been used.

[0006] However, in the above-mentioned first means for strengthening the cleaning of the quartz glass rod, an HF solution is used as the cleaning solution. However, if the cleaning with HF is strengthened, the cut surface becomes rough and the cleaning becomes severe. However, there is a disadvantage that the time required for the process is long.

When the groove portion of the second means is subjected to flame polishing, there arises a problem that the grooved quartz glass rod is bent and a problem that the degree of flame polishing varies. Also, in order to prevent bending of the rod due to flame polishing, it was necessary to weaken the flame and take time. Further, in order to correct the bending caused by the flame polishing, an annealing process is performed, and the operation time is greatly increased, and the cost is increased.

Moreover, it has been almost impossible to mechanically grind a groove having a narrow width and a depth, and even if possible, a special polishing suitable for the width, depth and pitch of the groove is required. A jig must be created, and moreover, a number of jigs must be prepared according to the shape of the boat, which has increased the cost of making the jig.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has no problem in that the polished surface is roughened, the work time is short, the cost is low, the width is small, and the depth is small. It is possible to mechanically polish grooves with grooves, all sizes and shapes of grooves can be easily polished, and it is possible to polish grooves at low cost without manufacturing a wide variety of polishing jigs. After the quartz glass rod is cut with a diamond blade, the cutting groove surface can be mirror-finished by performing mechanical polishing, and the removal of metal impurities remaining after cutting with the diamond blade can be performed at the same time. It is an object of the present invention to provide a method for polishing a groove of a quartz glass rod which can be performed.

[0010]

In order to solve the above-mentioned problems, a method of polishing a groove of a quartz glass rod according to the present invention comprises a grooved quartz glass rod having a large number of grooves formed by cutting grooves with a diamond blade. And polishing the groove portion with a polishing brush means. By mechanically polishing with a polishing brush means, the groove portion of the grooved quartz glass rod can be mirror-polished.

By setting the angle between the quartz glass rod and the polishing brush means within a range of 15 ° to 45 °, the polishing brush means performs the polishing process at an angle to the groove of the quartz glass rod. The polishing of the bottom surface of the groove and the polishing of the side surface of the groove are both performed favorably. If the quartz glass rod and the polishing brush means are parallel, the bottom portion of the groove portion of the quartz glass rod is polished, but the side portion is difficult to be polished.

If the angle between the quartz glass rod and the polishing brush means is less than 15 °, the bottom portion of the groove portion of the quartz glass rod is polished, but the side portions are not sufficiently polished. On the other hand, if the angle between the quartz glass rod and the polishing brush means exceeds 45 °, the polishing brush means cannot enter the bottom surface of the groove portion, and there is a disadvantage that polishing of the groove bottom becomes difficult.

[0013] If an abrasive such as cerium oxide or colloidal silica is used for polishing the groove portion of the quartz glass rod by the polishing brush means, better polishing can be performed.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One example of a polishing apparatus suitably used in the method of the present invention will be described below with reference to FIGS.
It goes without saying that the implementation of the method of the present invention is not limited to the illustrated example.

FIG. 1 is a plan view showing an example of a polishing apparatus used to carry out the method of the present invention. FIG. 2 is an illustrative view showing a state in which a groove portion of a quartz glass rod is polished by a polishing brush. FIG. 3 is an explanatory side view showing the pinching of the polishing brush.

In the figure, reference numeral 12 denotes a quartz glass rod groove polishing device having a base plate 14. Rails 16 for brush movement are provided on both left and right ends of the base plate 14.
a and 16b are provided opposite each other via the support legs 17a and 17b. The support legs 17a are connected to the base plate 14
Is not fixed and is movable. The support legs 17b are fixed to the base plate 14.

Moving plates 19a and 19b are slidably mounted on the brush moving rails 16a and 16b. Moving blocks 18a and 18b are rotatably provided on the upper surfaces of the moving plates 19a and 19b.
The moving block 18 is fixed using fixing means 44a and 44b.
a, 18b can be fixed to the moving plates 19a, 19b in a predetermined rotation state.

Reference numeral 20 denotes a brush shaft, whose both ends are rotatably inserted into the inner surfaces of the moving blocks 18a and 18b. Brush bristles 22a are implanted on the outer peripheral surface of the brush shaft 20. Reference numeral 22 denotes a polishing brush means or a polishing brush, which comprises the brush shaft 20 and brush bristles 22a. Reference numeral 24 denotes a brush rotation motor mounted on the outer surface side of the moving block 18a, and is connected to the brush shaft 20 described above. The rotation (forward rotation or reverse rotation) and stop of the brush shaft 20 and the polishing brush 22 are performed by turning on and off the brush rotation motor 24.

Reference numeral 26 denotes a ball screw, which is juxtaposed outside the brush moving rail 16b. The ball screw 26
Is screwably inserted into a ball screw receiving portion 28 provided on the outer surface side of the moving block 18b. One end of the ball screw 26 is connected to a brush moving motor 30 via a gear box 29.

When the brush moving motor 30 is turned on, the ball screw 26 rotates via the gear box 28, and the ball screw receiving portion 28 moves on the ball screw 26 by this rotation, and the moving block 18b
Moves on the brush moving rail 16b, and at the same time, the moving block 18a moves on the brush moving rail 16a.

As a result, the brush shaft 20 and the polishing brush 22 move. Reference numerals 32a and 32b denote upper and lower stoppers provided on the brush moving rail 16b, and serve to limit the moving range of the moving block 18b moving on the brush moving rail 16b.

Numeral 34 denotes a quartz glass rod fixing base attached to the upper surface of the center of the base plate 14, on which a plurality of grooved quartz glass rods 36 are mounted and fixed.

Reference numerals 40a and 40b denote rails 16 for brush movement.
A rail-moving rail provided on the upper surface of the base plate 14 and below the upper and lower ends of the brush-moving rails 16a, 16b so as to be orthogonal to the a and 16b. Both ends of the rail moving rails 40a, 40b are supported
It is fixed to the upper surface of the base plate 14 via c and 17d.

Guide plates 42a and 42b are fixed to the lower surfaces of both ends of the brush moving rail 16a. The guide plates 42a, 42b are slidably mounted on the rail moving rails 40a, 40b. Therefore, the brush moving rail 16a is movable on the rail moving rails 40a, 40b via the guide plates 42a, 42b, and the quartz glass rod is fixed by moving the brush moving rail 16a. The inclination angle θ of the polishing brush 22 with respect to the table 34, that is, the quartz glass rod 36, can be freely set.

This inclination angle θ is preferably set in the range of 15 ° to 45 °. As described above, when the polishing process is performed on the groove portion 36a of the quartz glass rod 36 in a state where the polishing brush 22 is inclined, both the bottom portion and the side portion of the groove 36a are satisfactorily polished.

If the inclination angle θ is less than 15 °, the bottom portion of the groove portion 36a of the quartz glass rod 36 is polished, but the side portion is not sufficiently polished. If the inclination angle θ exceeds 45 °, the polishing brush 2
2 cannot enter the bottom portion of the groove portion 36a, and there is a disadvantage that polishing of the groove bottom portion becomes difficult.

Reference numerals 44a and 44b denote moving blocks 18a and 1
8b to the moving plates 19a and 19b. When the inclination angle θ of the polishing brush 22 becomes a predetermined angle, the moving blocks 18a and 18b are fixed by using the fixing means 44a and 44b. The moving plate 19
a, 19b, the predetermined inclination angle θ can be maintained.

The groove portion 36 of the quartz glass rod 36
In actually polishing a, it is preferable to add cerium oxide, colloidal silica, or the like as a polishing agent to perform polishing. In FIG. 1, reference numeral 46 denotes an abrasive supply pipe;
An abrasive spray 48, which is a liquid made by dissolving cerium oxide or colloidal silica in water, is sprayed at the tip end of an abrasive supply pipe 46.
The liquid is sprayed from a and supplied onto a quartz glass rod 36 to be groove-polished.

According to this configuration, first, the brush moving rail 16a is moved on the rail moving rails 40a and 40b to set the inclination angle θ of the polishing brush 22 with respect to the quartz glass rod fixing base 34 to a desired angle. ,
Using the fixing means 44a, 44b, the moving block 18a,
18b is fixed to the movable plates 19a and 19b to maintain the inclination angle θ fixed. A grooved quartz glass rod 36 to be polished is placed and fixed on a quartz glass rod fixing stand 34.

Next, the brush rotation motor 24 and the brush movement motor 30 are rotated forward to rotate the polishing brush 22 forward, and the movement on the brush movement rails 16a and 16b (downward from the state of FIG. 6). Let it start. When the polishing brush 22 comes into contact with the quartz glass rod 36 mounted and fixed on the quartz glass rod fixing table 34, the polishing brush 2
2 is the groove portion 3 of the quartz glass rod 36
6a, and is polished to every corner of the groove portion 36a.

When the downward movement of the polishing brush 22 reaches and stops at the lower stopper 32b, the brush rotating motor 24 and the brush moving motor 30 are subsequently rotated in reverse to rotate the polishing brush 22 in reverse. The upward movement on the brush moving rails 16a and 16b is started. Similarly, when the polishing brush 22 comes into contact with the quartz glass rod 36 on the quartz glass rod fixing table 34, the tip brush portion of the polishing brush 22 enters the groove portion 36 a of the quartz glass rod 36 and removes the groove portion 36 a. Polish to every corner.

When the upward movement of the polishing brush 22 reaches the upper stopper 32a and stops, the brush rotating motor 24 and the brush moving motor 30 are again rotated forward to rotate the polishing brush 22 forward. At the same time, the downward movement on the brush moving rails 16a and 16b is performed again, and the groove portion 36a of the quartz glass rod 36 is polished. As described above, the groove portion 36a of the quartz glass rod 36 is polished by repeating the vertical movement of the polishing brush 22, and when the groove portion 36a of the quartz glass rod 36 reaches a predetermined polishing state, Motor 24
Then, the brush moving motor 30 is stopped.

In the example shown in FIG.
4 is fixed on the base plate 14,
The quartz glass rod fixing base 34 can be attached via an angle adjusting mechanism. In this case, various polishing modes can be adopted by adjusting the respective angles of the quartz glass fixing table 34 and the polishing brush 22.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments, but the present invention is not limited to these embodiments, and various modifications can be made without departing from the technical idea of the present invention. Of course.

(Example 1) Outer diameter 16 mm, length 100
2. A groove width of 30 mm from the end of a 0 mm quartz glass rod.
5mm, groove depth 8mm, pitch 5.5mm, number of grooves 170
Was cut with a diamond blade. Four quartz glass rods cut and grooved were arranged with the groove portions facing upward, and both ends of the rods were fixed to the polishing apparatus shown in FIG.

A roll-shaped brush in which a nylon brush having a hair thickness of 0.2 mm and a hair length of 20 mm was wound around a metal shaft having a diameter of 30 mm and a length of 1500 mm was mounted on the polishing apparatus shown in FIG. After adjusting the angle between the brush and the rod to 30 °, rotate the brush at a rotation speed of 1200 rpm, reciprocate at a moving speed of 5 mm / sec., Dissolve cerium oxide as a polishing agent in water and apply it to the groove.
The grooves were polished. After a lapse of 30 minutes, the angle of the brush was reset to 30 ° on the opposite side, and polishing was performed for 30 minutes.

After the polished rod was washed with pure water in an ultrasonic cleaning tank, the groove was visually observed. Each groove was polished to a mirror surface without any variation. Thereafter, the groove portion was observed with a scanning electron microscope, but no metal impurities mixed in from the diamond blade were observed.

(Example 2) Outer diameter 16 mm, length 100
2. A groove width of 30 mm from the end of a 0 mm quartz glass rod.
5mm, groove depth 8mm, pitch 5.5mm, number of grooves 170
Was cut with a diamond blade. Four quartz glass rods cut and grooved were arranged with the groove portions facing upward, and both ends of the rods were fixed to the polishing apparatus shown in FIG.

A roll-shaped brush in which a nylon brush having a hair thickness of 0.2 mm and a hair length of 20 mm was wound around a metal shaft having a diameter of 30 mm and a length of 1500 mm was mounted on the polishing apparatus shown in FIG. After adjusting the angle between the brush and the rod to 45 °, the brush was rotated at a rotational speed of 1200 rpm, and the moving speed was 5 mm / sec. Was reciprocated to dissolve cerium oxide as a polishing agent in water, and polished the groove portion while applying it to the groove portion. After a lapse of 25 minutes, the angle of the brush was reset to 45 ° on the opposite side, and polishing was performed for 25 minutes.

After the polished rod was washed with pure water in an ultrasonic cleaning tank, the groove was visually observed. Each groove was polished to a mirror surface without any variation. Thereafter, the groove portion was observed with a scanning electron microscope, but no metal impurities mixed in from the diamond blade were observed.

(Embodiment 3) The outer diameter is 16 mm and the length is 100
2. A groove width of 30 mm from the end of a 0 mm quartz glass rod.
5mm, groove depth 8mm, pitch 5.5mm, number of grooves 170
Was cut with a diamond blade. Four quartz glass rods cut and grooved were arranged with the groove portions facing upward, and both ends of the rods were fixed to the polishing apparatus shown in FIG.

A roll-shaped brush in which a nylon brush having a hair thickness of 0.2 mm and a hair foot of 20 mm was wound around a metal shaft having a diameter of 30 mm and a length of 1300 mm was mounted on the polishing apparatus shown in FIG. After adjusting the angle between the brush and the rod to 15 °, the brush was rotated at a rotational speed of 1200 rpm, and the moving speed was 5 mm / sec. Was reciprocated to dissolve cerium oxide as a polishing agent in water, and polished the groove portion while applying it to the groove portion. After a lapse of 35 minutes, the angle of the brush was set back to 15 ° on the opposite side, and polishing was performed for 35 minutes.

After the polished rod was washed with pure water in an ultrasonic cleaning tank, the groove was visually observed. Each groove was polished to a mirror surface without any variation. Thereafter, the groove portion was observed with a scanning electron microscope, but no metal impurities mixed in from the diamond blade were observed.

(Comparative Example 1) Outer diameter 16 mm, length 100
2. A groove width of 30 mm from the end of a 0 mm quartz glass rod.
5mm, groove depth 8mm, pitch 5.5mm, number of grooves 170
Was cut with a diamond blade. Four quartz glass rods cut and grooved were arranged with the groove portions facing upward, and both ends of the rods were fixed to the polishing apparatus shown in FIG.

A roll-shaped brush in which a nylon brush having a hair thickness of 0.2 mm and a hair length of 20 mm was wound around a metal shaft having a diameter of 30 mm and a length of 1300 mm was mounted on the polishing apparatus shown in FIG. After adjusting the angle between the brush and the rod to 10 °, the brush was rotated at a rotational speed of 1200 rpm, and the moving speed was 5 mm / sec. Was reciprocated to dissolve cerium oxide as a polishing agent in water, and polished the groove portion while applying it to the groove portion. After a lapse of 60 minutes, the angle of the brush was reset to 10 ° on the opposite side, and polishing was performed for 60 minutes.

After the polished rod was cleaned with pure water in an ultrasonic cleaning tank, the groove was visually observed. The bottom portion of each groove was polished to a mirror surface without variation, but the side portion of each groove showed variation in polishing. After that, when the groove was observed with a scanning electron microscope, metal impurities mixed in from the diamond blade were slightly observed on the side surface of the groove.

(Comparative Example 2) Outer diameter: 16 mm, length: 100
2. A groove width of 30 mm from the end of a 0 mm quartz glass rod.
5mm, groove depth 8mm, pitch 5.5mm, number of grooves 170
Was cut with a diamond blade. Four quartz glass rods cut and grooved were arranged with the groove portions facing upward, and both ends of the rods were fixed to the polishing apparatus shown in FIG.

A roll-shaped brush in which a nylon brush having a hair thickness of 0.2 mm and a hair length of 20 mm was wound around a metal shaft having a diameter of 30 mm and a length of 2600 mm was mounted on the polishing apparatus shown in FIG. After adjusting the angle between the brush and the rod to 60 °, the brush was rotated at a rotational speed of 1200 rpm, and the moving speed was 5 mm / sec. Was reciprocated to dissolve cerium oxide as a polishing agent in water, and polished the groove portion while applying it to the groove portion. After a lapse of 35 minutes, the angle of the brush was set back to 60 ° on the opposite side, and polishing was performed for 35 minutes.

After the polished rod was washed with pure water in an ultrasonic washing tank, the groove was visually observed. The upper half of each groove was polished to a mirror surface, while the lower half and the bottom of the groove were not polished.

[0050]

As described above, the method for polishing a groove of a quartz glass rod according to the present invention has no roughened surface, requires a short working time, is inexpensive, has a small width, and has a large depth. Grooves can be mechanically polished, they can be used for all sizes and shapes of grooves, and can be easily polished.The grooves can be polished at low cost without manufacturing a wide variety of polishing jigs. After the quartz glass rod is cut with a diamond blade, the surface of the cut groove can be made mirror-finished by mechanical polishing, and the removal of metal impurities remaining after cutting with a diamond blade can be performed simultaneously. This has the effect that it can be performed.

[Brief description of the drawings]

FIG. 1 is a plan view showing one example of a polishing apparatus used to carry out the method of the present invention.

FIG. 2 is an illustrative view showing a state in which a groove portion of a quartz glass rod is polished by a polishing brush.

FIG. 3 is an explanatory side view showing a pinching of a polishing brush.

[Explanation of symbols]

12: groove polishing device for quartz glass rod, 14: base plate, 16a, 16b: rail for brush movement, 17
a, 17b: support leg, 18a, 18b: moving block,
19a, 19b: moving plate, 20: brush shaft, 22: polishing brush, 24: brush rotating motor,
26: ball screw, 28: ball screw receiving part, 29: gear box, 30: brush moving motor, 32a, 32
b: stopper, 34: quartz glass rod fixing stand, 3
6: quartz glass rod, 40a, 40b: rail for moving rail, 42a, 42b: guide plate, 44a, 4
4b: fixing means, 46: abrasive supply pipe, 48: abrasive.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akihiko Sugama 88 Kawakubo, Kanaya, Tamura-cho, Koriyama-shi, Fukushima Prefecture Inside the Koriyama Plant, Shin-Etsu Quartz Co., Ltd. No. 3 Yamagata Shin-Etsu Quartz Co., Ltd. (72) Inventor Toru Mizuno 173 Kagamita-cho, Kagamiishi-cho, Iwase-gun, Fukushima Prefecture F-term in the Atok Fukushima Plant (reference) 3C049 AA06 AA07 AA09 AA13 AA14 AB08 AC04 CA01 CA03 CA06 CB01 CB03 CB05 CB10 3C058 AA06 AA07 AA13 AA14 AB08 AC04 CA01 CA03 CA06 CB01 CB03 CB05 CB10 DA02 4G014 AH00 4G059 AA08 AA09 AB03 AC30

Claims (4)

[Claims] 1. A method of polishing a groove portion of a grooved quartz glass rod having a large number of grooves formed by cutting grooves by a diamond blade, wherein the groove portion is mirror-polished by a polishing brush means. Polishing method for quartz glass rod. 2. The method according to claim 1, wherein an angle between said quartz glass rod and said polishing brush means is set in a range of 15 ° to 45 °. 3. The method of polishing a quartz glass rod groove according to claim 1, wherein an abrasive is used when polishing the groove portion of the quartz glass rod by the polishing brush means. 4. The method according to claim 3, wherein the polishing agent is cerium oxide or colloidal silica.