JP2000126115A - Optical scanning probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanning probe device that provides an observed image following the depth direction of a part to be examined. SOLUTION: A confocal microscopic image is obtained by inserting an optical fiber 6b that transmits light from a light source and emits it from the tip into an optical probe to be inserted into a coelom, collecting and irradiating light to a part 13 to be examined through the optical system of an optical unit 11 provided in a top frame 10 forming the top portion 9 of the optical probe, and scanning the focuses 23 over a scanning surface 25 to be scanned by driving moving mirrors 17 and 18. The top cover 12 is made movable in the depth direction 29 of the examined part by mounting the top cover 12 on the tip frame 10 through a piezoelectric element 28, thereby moving the focuses 23 in the direction 29, and obtaining a confocal microscopic image at a desired depth.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention transmits light through a light transmitting means in an optical probe, scans light condensed and radiated from the tip to the portion to be inspected, and returns light from a focal position. The present invention relates to an optical scanning probe device that detects and obtains optical image information.

[0002]

2. Description of the Related Art In recent years, unlike ordinary optical microscopes for optically magnifying and observing a subject, scanning the focal point on the side of the subject in a state of being set in a confocal relationship allows optical information of the focal position to be obtained. The confocal microscope obtained is, for example, WO 90/00
754.

This prior art discloses an optical scanning microscope in which two types of objective lenses having different focal lengths are juxtaposed, and the optical system is moved to selectively use the two types of objective lenses so as to have different focal lengths. .

[0004]

However, in the above prior art, there is no means for changing the focal position on the optical axis of one objective lens, and for continuously moving the focal point in the depth direction on the same optical axis. There is no. That is, in the prior art, when the position of the focal point is moved in the depth direction with respect to the subject to be examined, if the objective lens as the light collecting means is changed from one to the other, the observation position is also changed. Therefore, it is inconvenient to check a desired portion along the depth direction.
In addition, since the focus cannot be moved continuously in the depth direction, it is not possible to obtain a tomographic image or three-dimensional information.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has as its object to provide an optical scanning probe device capable of obtaining an observation image along a depth direction of a portion to be examined.

Another object of the present invention is to provide an optical scanning probe device capable of continuously moving the focal point in the optical axis direction.

[0007]

An optical probe inserted into a body cavity, a light source for generating light for irradiating a test portion with light, and a light source for guiding light from the light source to a tip of the optical probe. A light transmitting means, a condensing means for converging and irradiating the light to the portion to be detected, and a focal point condensed on the portion to be detected by the condensing means in a direction perpendicular to the optical axis direction of the condensing means An optical scanning probe device comprising: an optical scanning device for scanning; a separating device for separating return light from the test portion from light from a light source; and a light detecting device for detecting the separated light. By providing changing means for changing the position of the focal point condensed on the side along the optical axis direction of the condensing means, the position of the focal point for the part to be examined can be changed in the optical axis direction, that is, The observation image can be obtained by changing the depth direction of the portion.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIGS. 1 to 5 relate to a first embodiment of the present invention. FIG. 1 shows the entire configuration of an optical scanning probe device according to the first embodiment, and FIG. FIG. 3 shows the configuration of the optical unit, FIG. 4 shows the configuration of the control unit, and FIG. 5 shows how the focus is scanned when the movable mirror is driven.

As shown in FIG. 1, an optical scanning probe device 1 according to a first embodiment of the present invention has a light source unit 2 for generating light.
A light transmitting portion 3 for transmitting the light, and a light transmitting portion 3 which is formed in an elongated shape so as to be inserted into a body cavity or the like, and emits the light having passed through the light transmitting portion 3 to the subject side from the distal end side and the return light. The optical probe 4 guides the light to the light transmitting section 3, and the signal processing for detecting the return light from the optical probe 4 via the light transmitting section 3 to form an image and controlling the optical scanning means provided in the optical probe 4. And a control unit 5 for performing the operation.

The light source unit 2 is composed of, for example, a laser oscillation device that outputs laser light. The laser light has a wavelength of 488 m
m argon laser is suitable for cell observation. The light transmitting unit 3 includes a light transmitting fiber (abbreviated simply as fiber) 6
a, 6b, 6c, and 6d and a four-terminal coupler 7 that bidirectionally branches and optically couples them. The fibers 6a, 6b, 6c, 6d are single mode fibers.

The end of the fiber 6a is connected to the light source unit 2, the end of the fiber 6c is connected to the control unit 5, and the end of the fiber 6d is connected to a non-reflective device or the like (closed). ).

The fiber 6b is elongate, and is guided to the distal end portion 9 through the inside of, for example, a flexible tube 8 constituting an outer tube of the optical probe 4. The light tube 4 can be inserted into a body cavity inserted into a treatment tool channel of an endoscope, for example.

As shown in FIG. 2, the distal end 9 is a tube 8
A rigid optical frame 10 having one end attached to the tip of the optical frame, an optical unit 11 attached to the inside of the optical frame 10, and attached to the tip of the optical frame 10 via a piezoelectric element 28 described later. (Transparent and hard) end cover 12 as a transparent window member pressed against the object to be pressed.

Optical fiber 6b inserted into tube 8
Is fixed to the optical unit 11, and the light emitted from the tip of the optical fiber 6b is scanned by an optical scanning mechanism (scanner).
The light is condensed and radiated on the test portion 13 side to be inspected through the device, and the return light is received.

FIG. 3 shows a detailed configuration of the optical unit 11. The optical unit 11 includes a substrate 14, a spacer 15 provided on the upper surface thereof, and an upper plate 16 provided on the upper surface of the spacer 15. The substrate 14 is provided with two movable mirrors (also referred to as rotating mirrors) 17 and 18 whose directions are variable in order to scan the object side with the laser light.

The two movable mirrors 17 and 18 are supported by two hinge portions 17a and 18a. The movable mirrors 17 and 18 are rotatably movable by electrodes (not shown) by electrostatic force.

A ground electrode (not shown) facing these electrodes is connected to the control unit 5 via a cable 19. The rotation axes of the two movable mirrors 17 and 18 are configured to be orthogonal. Further spacer 1
5 has a mirror 21 at a portion facing the end face of the fiber 6b.
However, the upper plate 16 is provided with a mirror 22 and a diffraction grating lens 24 for condensing the laser beam and focusing the laser beam on the portion 13 to be measured.

The diffraction grating lens 24 has a function corresponding to a lens having a very short focal length due to a diffraction phenomenon. Therefore, the focal point 23 is two-dimensionally scanned in a direction orthogonal to the depth direction of the test portion 19. By doing so, it is possible to obtain a microscopically enlarged image of the subject 13.

The optical fiber 6b of the four-terminal coupler 7 is fixed between the substrate 14 and the spacer 15, as shown in FIG. Then, a drive signal is applied to (the electrodes of) the movable mirrors 17 and 18 and the hinges 17 a and 18 a are rotated at an appropriate angle using the hinges 17 a and 18 a as their rotation axes, so that the focal point 23 is two-dimensionally scanned on the scanning surface 25. I can do it.

For example, when the movable mirror 17 is driven, light is scanned in the X direction 26 perpendicular to the plane of FIG.
When the movable mirror 18 is driven, the light is scanned in the horizontal Y direction 27 in FIG. That is, the movable mirror 17
And 18, the focal point 23 on the side of the subject 13 can be two-dimensionally scanned on a scanning surface 25 perpendicular to the depth direction (Z direction). It forms a confocal microscope that can obtain reflected light information.

One end of a small, plate-shaped or rod-shaped piezoelectric element 28 is bonded to the optical frame 10 at, for example, four orthogonal positions in the circumferential direction, and the other end of the piezoelectric element 28 is bonded to the base end of the front cover 12. ing. Further, the piezoelectric element 28 is connected to the control unit 5 via the cable 19.

By applying a drive signal to the piezoelectric element 25, the piezoelectric element 28 is contracted in the Z direction which is the depth direction of the test portion 13 as shown by reference numeral 29 in FIG. Can be changed in the Z direction on the cut surface 30 indicated by the reference numeral 30. Tip cover 1
Reference numeral 2 denotes a cover made of a transparent material, for example, a polycarbonate.

FIG. 4 shows the configuration of the control unit 5. The control unit 5 includes a laser driving circuit 31 for driving the light source unit 2.
And X for driving the movable mirrors 17 and 18 of the optical probe 4.
A Y drive circuit 32, a Z drive circuit 33, a photodetector 34 having a built-in amplifier, an image processing circuit 35 for performing image processing for generating a confocal image, and a monitor 36 for displaying the image processed image. And a recording device 37 for recording an image in accordance with the above. The inside of the control unit 5 is connected as shown in FIG.

The laser drive circuit 31 includes the light source unit 2 and
They are connected by a cable 38. XY control circuit 3
Numeral 2 is connected to the electrodes of the movable mirrors 17 and 18 and the ground electrode opposed thereto via cables 19 respectively.

Further, the Z drive circuit 33 is connected to the piezoelectric element 28 via the cable 19, and performs an operation of changing a focus position changing operation means (not shown) such as a joystick to reduce the amount of tilt operation. In response, the Z drive circuit 33 applies a drive signal to the piezoelectric element 28,
The piezoelectric element 28 is contracted by an amount corresponding to the operation amount for tilting.

Then, as shown in FIG.
When the piezoelectric element 28 is contracted in a state where is pressed against the test portion 13, the position of the focal point 23 when the light is converged and irradiated on the test portion 13 side is set along the optical axis direction of the light condensing means. (That is, along the depth direction of the test portion 13).

That is, in the present embodiment, the optical probe 4
The distal end 9 is condensed and irradiated so that a focal point 23 is formed on the part to be inspected 13, and the focal point 23 is scanned on a scanning surface 25 orthogonal to the depth direction of the inspected part 13 to obtain a confocal microscope. In addition to obtaining image information, the position of the focal point 23 is
3, a moving means for continuously moving in the depth direction, more broadly, means for changing the position of the focal point 23 in the optical axis direction of the diffraction grating lens 24 as a condensing means is provided. Has become.

Next, the operation of the present embodiment will be described. When the optical probe 4 is used, the distal end surface of the distal end cover 12 at the distal end of the optical probe 4 is pressed against a portion to be inspected.
At this time, the test portion 13 is fixed to the distal end portion 9 of the optical probe 4, and image blur can be reduced.

The laser device forming the light source unit 2 driven by the laser drive circuit 31 generates laser light, and this light is incident on the optical fiber 6a. This light is split into two by a four-terminal coupler 7, one of which is guided to the closed end and there is no return light, and the other light is transmitted through the optical fiber 6 b to the tip 9 of the probe 4. It is led to.

This laser beam emerges from (a small area of) the distal end surface of the thin fiber 6b as shown in FIG. 2, and is reflected by a mirror 21 disposed on the opposite side, and is disposed on the reflected light side. The reflected light is reflected by the movable mirror 17, subsequently reflected by the mirror 22 disposed on the reflected light side, and further reflected by the movable mirror 18 disposed on the reflected light side.

Subsequently, the light passes through the diffraction grating lens 24, passes through the front end cover 12, and is condensed and irradiated on the test portion 13 so as to form the focal point 23. The backscattered light from the focal point 23 passes through the same optical path as the incident light, and is incident on the fiber 6b again. The backscattered light from other than the focal point 23 cannot pass through the same optical path as the incident light, and therefore cannot be focused on the distal end surface of the pinhole-shaped fiber 6b, so that almost no light is emitted from the pinhole-shaped fiber 6b. Cannot enter the tip.

That is, the optical probe device 1 forms a confocal optical system in which the focal point 23 and the tip end surface of the fiber 6b have a confocal relationship, and constitutes an optical system for detecting only the return light from the focal point 23. I have.

When the movable mirror 17 is rotated by the XY drive circuit 32 of the control section 5 in this state, the position of the focal point 23 of the laser beam is accordingly shifted in the X direction (in FIG. (Vertical direction).

When the rotating mirror 18 is rotated, the position of the focal point 23 of the laser beam is accordingly shifted to the scanning surface 25.
Are scanned in the Y direction indicated by reference numeral 27 in FIG. Where Y
By making the frequency of the vibration in the direction sufficiently lower than the frequency of the scanning in the X direction, the focal point 23 sequentially raster-scans the scanning surface 25 as shown in FIG. Accordingly, the backscattered light at each point on the scanning surface 25 is transmitted by the optical fiber 6b.

The light incident on the fiber 6b is split into two by the four-terminal coupler 7, guided to the photodetector 34 of the control unit 5 through the fiber 6c, and detected by the photodetector 34.

Here, the photodetector 34 outputs an electric signal corresponding to the intensity of the incident light, and is further amplified by a built-in amplifier (not shown). This signal is sent to the image processing circuit 35. In the image processing circuit 35, X
Referring to the drive waveform of the Y drive circuit 32, the signal output when the focal position is at the point, the intensity of the backscattered light at this point is calculated, and the calculation is repeated. Is imaged and displayed on the monitor 36. Also, the image data is recorded in the recording device 37 as needed.

When it is desired to examine the state of the part in more detail with respect to the confocal microscope image of the part, for example, when there is a possibility that the part is a lesion, a focus position changing operation means (not shown) is used. The operator changes the position of the focal point 23 in the subject 13 in the depth direction.

In other words, when it is desired to move the scanning plane 25 in the depth direction with respect to the part 13 to be inspected, the Z driving circuit 33
To control the contraction of the piezoelectric element 28. As a result, the piezoelectric element 28 expands and contracts in the Z direction indicated by reference numeral 29, and accordingly, the distal end cover 12 also moves in the Z direction.

At this time, the position of the focal point 23 does not move, but by moving the position of the distal end cover 12 in the Z direction, the position of the focal point 23 in the test portion 13 is changed to another depth position, and the position is changed. You will be able to observe. At this time, since the amount of change in the position of the tip cover 12 in the depth direction can be measured from the voltage applied to the piezoelectric element 28, it is also possible to know at which depth the image is obtained.

Here, the XY drive circuit 32
For example, when only the movable mirror 17 is driven, the movable mirror 18 is stopped, and instead the piezoelectric element 28 is slowly driven by the Z drive circuit 33, the focal point 23 becomes the cut surface 30 in the depth direction.
By scanning the upper surface two-dimensionally, two-dimensional image information of the cut surface 30 can be obtained, that is, tomographic image information can be obtained. In FIG. 5, when the Y direction is set to the Z direction, the scan surface 25 is cut along the cut surface 3.
Scanning at 0 is performed.

As described above, the light incident on the fiber 6b is split into two by the four-terminal coupler 7, detected by the photodetector 34, and the electric signal is input to the image processing circuit 35, In 35, the reference point is the drive waveforms of the XY drive circuit 32 and the Z drive circuit 33, and calculates where the focal position is the signal output, and further calculates the intensity of the backscattered light at this point.
By repeating these, the backscattered light on the cut surface 30 is imaged and displayed on the monitor 36. Also, the image data is recorded in the recording device 37 as needed.

This embodiment has the following effects. Since the confocal microscope is configured at the tip of the thin optical probe 4, the inside of the body cavity can be observed with a microscope.

Since the optical probe 4 can be observed in the axial direction, it can be more easily pressed against the object to be observed.

Since the transparent window member for pressing against the object is provided, the object can be observed in a state where the object does not move with respect to the tip of the optical probe 4.

Since the position of the focal point 23 of the laser beam is configured to be continuously movable relative to the depth direction of the portion 13 to be inspected, the surface of the portion 13 to be inspected at various depths can be observed. An image can be obtained, which is convenient for examining and diagnosing the test object in detail. Further, a tomographic image can be obtained.

(Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIG. This embodiment is a modification of the configuration of the first embodiment, and differs only in the means for moving the focal point in the Z direction. The description of the other parts is omitted. In the present embodiment, there is no piezoelectric element 28, and the transparent front cover 12 is adhered to the optical frame 10.

The front cover 12 has a liquid crystal lens 40.
Is fixed to its inner surface. Inside the liquid crystal lens 40, for example, two liquid crystal cells 41 and 42 each having a shape of a plano-convex lens filled with liquid crystal are provided. Liquid crystal cells 41, 4
2 is fixed to the glass plates 43 and 44, respectively, and the space therebetween is filled with a glass part 45.

Transparent electrodes (not shown) are disposed on the upper and lower surfaces of the liquid crystal cell 41, respectively, and these are insulated from each other. When a voltage is applied between the transparent electrodes, the arrangement of the liquid crystal molecules in the liquid crystal cell 41 changes, and the refractive index changes. The same applies to the liquid crystal cell 42. The wiring from these electrodes is connected to the Z drive circuit 33 of the control unit 5 shown in FIG. Other configurations are the same as those of the first embodiment.

Next, the operation of the present embodiment will be described. By changing the voltage applied to the transparent electrodes of the liquid crystal cells 41 and 42 by the Z drive circuit 33, the refractive indexes of the liquid crystal cells 41 and 42 change, and accordingly, the position of the focal point 23 is changed in the Z direction 29.
Can be moved to.

As a result, it becomes possible to observe another depth of the test portion 13. Further, here, for example, only the movable mirror 17 is driven and the movable mirror 18 is stopped by the XY drive circuit 32, and the refractive index of the liquid crystal cells 41 and 42 is slowly driven by the Z drive circuit 33 instead. The cut surface 30 cut in the direction can be scanned, and the cut surface 30 can be imaged.

This embodiment has the following effects. Since the confocal microscope is configured at the tip of the thin optical probe 4, the inside of the body cavity can be observed with a microscope. Since the configuration is such that the axial direction of the optical probe 4 can be observed, it is easier to press against the observation target. Since the transparent window member for pressing the object is provided, the observation can be performed in a state where the object does not move with respect to the tip of the optical probe 4.

Since the focal point 23 of the laser beam is configured to be relatively movable in the depth direction of the portion 13 to be inspected, the surface of the portion 13 to be inspected at various depths can be observed. Further, a tomographic image can be obtained. Since the liquid crystal lens 40 is used to move the focal point 23 in the optical axis direction, the focal point 23 can be moved in the optical axis direction with a simpler configuration than in the first embodiment.

(Third Embodiment) Next, a third embodiment of the present invention will be described with reference to FIG. This embodiment is a modification of the second embodiment. More specifically, only the liquid crystal lens 40 is changed to a deformable lens 50 as a varifocal lens that changes the shape, and thus other parts will be described. Is omitted.

That is, the deformable lens 50 is fixed to the inner surface of the front cover 12, and the focal point of the deformable lens 50 changes by changing its shape.

Inside the deformable lens 50, a plurality of drive diaphragms 51 and 52 (only two of them are shown in the figure) are provided around the center thereof. Each diaphragm 5
Plate-shaped piezoelectric elements 53 and 54 are attached to 1 and 52, respectively. Further, a lens portion 55 made of a thin film is provided at the center of the plurality of diaphragms 51 and 52 on the peripheral side of the deformed lens 50.

The inside of the deformable lens 50 is filled with a transparent working fluid 56. The wiring from the piezoelectric elements 53 and 54 is connected to the Z drive circuit 33 of the control unit 5 shown in FIG.

When a voltage is applied to the piezoelectric elements 53 and 54, the diaphragms 51 and 52 expand, and when the voltage is cut off, the diaphragms 51 and 52 become almost flat. (In FIG. 7, the voltage is applied.) In addition, the lens portion 55 of the deformable lens 50 is deformed accordingly. At this time, the film thickness of the lens portion 55 is set to an appropriate convex lens shape. It has a distributed configuration.

Next, the operation of the present embodiment will be described. By changing the voltage applied to the piezoelectric elements 53 and 54 by the Z drive circuit 33, the drive diaphragms 51 and 52 expand, and accordingly, the curvature of the deformable lens 50 decreases,
The focal point 23 moves in a direction away from the deformable lens 50. Conversely, when the voltage applied to the piezoelectric elements 53 and 54 is reduced,
The drive diaphragms 51 and 52 become flat, and accordingly, the curvature of the deformable lens 50 increases, and the focal point 23 moves in a direction closer to the deformable lens 50.

Thus, the position of the focal point 23 can be moved in the Z direction 29. As a result, another depth of the subject 13 can be observed. Further, here, for example, only the movable mirror 17 is driven by the XY drive circuit 32, the movable mirror 18 is stopped, and the piezoelectric elements 53 and 54 are slowly driven by the Z drive circuit 33.
The focal point 23 can scan on the cut surface 30 cut in the depth direction, and the cut surface 30 can be imaged.

This embodiment has the following effects. Since the confocal microscope is configured at the tip of the thin optical probe 4, the inside of the body cavity can be observed with a microscope. Since the configuration is such that the axial direction of the optical probe 4 can be observed, it is easier to press against the observation target.

Since the transparent window member for pressing against the object is provided, it is possible to observe the object in a state where the object does not move with respect to the tip of the optical probe 4. The focal point 23 of the laser beam is
3 is configured to be relatively movable with respect to the depth direction, so that surfaces of the test portion 13 at various depths can be observed. Further, a tomographic image can be obtained.

The deformation lens 5 is used to move the focal point 23 in the optical axis direction.
Since 0 is used, the movement of the focal point 23 in the optical axis direction can be realized with a simpler configuration than in the first embodiment.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described with reference to FIG. This embodiment is a modification of the first embodiment, and only the means for moving the front cover 12 is changed, and the description of other parts is omitted.

In the present embodiment, the distal end cover 12 and the optical frame 10 are fitted, and the distal end cover 12 is movable in the depth direction 29. Also, the tip cover 12 and the optical frame 10
An O-ring 60 is provided at the fitting portion with the above, and has a watertight structure for keeping the inside watertight.

The optical frame 10 has a hole 61 in its axial direction.
The hole 61 is provided through a tube 62 (FIG. 4).
The Z driving circuit 64 is provided in place of the Z driving circuit 33 of FIG. The Z drive device 64 includes a pump and a valve, and injects a fluid into the tube 62 and
It is configured so that liquid can be sucked out of the device.

The space 63 between the tip cover 12 and the optical frame 10 is filled with a transparent fluid. Further, a filter (not shown) is provided on the front surface of the photodetector 34 of the present embodiment. This filter is capable of passing only wavelengths longer than the wavelength of the laser.

Next, the operation of the present embodiment will be described. When it is desired to move the scanning surface 25 in the depth direction with respect to the test portion 13, the distal end cover 12 is moved in the Z direction 29 by the Z drive device 64. Tube 6 by Z drive 64
2. When the fluid is fed into the space 63 through the hole 61, the front cover 12 moves in a direction away from the optical unit 11. Conversely, when the liquid is sucked out from the space 63, the tip cover 1
2 is moved in a direction approaching from the optical unit 11.

At this time, since the position of the focal point 23 does not move, another depth of the test portion 13 can be observed by moving the distal end cover 12 in the Z direction. At this time, by measuring the amount of liquid supplied,
Since the position of the tip cover 12 can be measured, it is also possible to know at what depth the image is being obtained.

Here, the XY drive circuit 32
For example, when only the movable mirror 17 is driven and the movable mirror 18 is stopped, and instead the tip cover 12 is slowly driven (moved) by the Z drive device 64, the focal point 23 scans on the cut surface 30 cut in the depth direction. Thus, the cut surface 30 can be imaged.

In the present embodiment, the filter is provided on the front surface of the photodetector 34, so that the auto-fluorescence from the test section 13 can be observed. Further, the fluorescent substance which has been administered in advance may be observed.

Further, a spectroscope may be used in place of the photo detector 34. In this case, the wavelength of the fluorescence from the test section 13 can be measured in detail. Further, the distal end cover 12 may be moved using the thermal expansion of the fluid instead of the flow of the fluid. Further, a two-photon laser may be used as a light source.

This embodiment has the following effects. Since the confocal microscope is configured at the tip of the thin optical probe 4, the inside of the body cavity can be observed with a microscope.

Since the optical probe 4 is configured to be observed in the axial direction, it can be more easily pressed against the object to be observed. Since the transparent window member for pressing the object is provided, the observation can be performed in a state where the object does not move with respect to the tip of the optical probe 4.

Since the focal point 23 of the laser beam is configured to be relatively movable in the depth direction of the portion 13 to be inspected, the surface of the portion 13 to be inspected at various depths can be observed. Further, a tomographic image can be obtained.

Further, the fluorescence from the test section 13 can be observed. Further, by using a spectroscope, it is possible to measure the wavelength of the fluorescence from the test section 13 in detail.

(Fifth Embodiment) Next, a fifth embodiment of the present invention will be described with reference to FIGS. This embodiment is different from the first embodiment only in the structure of the distal end portion 9 of the optical probe 4, and the description of other parts is omitted.

In this embodiment, the distal end cover 12 is configured to be detachably connected to the optical frame 10. The laser light source used in the present embodiment is a tunable laser,
This laser is also driven by the laser drive circuit 31. Also,
In the present embodiment, a means for changing the wavelength of the variable wavelength laser is provided without using the Z drive circuit 33.

Further, in this embodiment, the distal end cover 12 is removed and a wide-angle observation distal end cover 72 having, for example, a concave lens portion 71 near the center of its upper surface as shown in FIG.
Can be attached.

Next, the operation of the present embodiment will be described. FIG.
When it is desired to move the scanning surface 25 in the depth direction with respect to the test portion 13 as shown in (1), the wavelength of the tunable laser is changed by the laser drive circuit 31. Thus, when the wavelength changes, the position of the focal point 23 by the diffraction grating lens 24 changes in the depth direction. Generally, as the wavelength becomes longer, the position of the focal point 23 becomes closer to the diffraction grating lens 24 side, and as the wavelength becomes shorter, the position of the focal point 23 becomes farther.

As a result, the scanning surface 25 of the test portion 13
It becomes possible to move in the direction 29 and observe.

Here, the XY drive circuit 32
By changing the voltage and frequency applied to the rotating mirrors 17 and 18, the range of the field of view to be scanned can be changed. When the wide-angle observation end cover 72 is attached, the focal point 73 is focused at a farther position as shown in FIG. 10, and a wide range can be scanned.

In this case as well, the scanning can be performed on the scanning surface 74 by changing the voltage applied to the rotating mirrors 17 and 18. Further, by changing the wavelength of the variable wavelength laser, it is possible to scan in the depth direction 75 and obtain a tomographic image.

This embodiment has the following effects. Since the confocal microscope is configured at the tip of the thin optical probe 4, the inside of the body cavity can be observed with a microscope. Since the configuration is such that the axial direction of the optical probe 4 can be observed, it is easier to press against the observation target.

Since the transparent window member for pressing the object is provided, it is possible to observe the object without moving the tip of the optical probe 4. Focus 23 or 73 of laser light
And the test portion 13 are configured to be relatively movable in the depth direction of the test portion 13, so that surfaces of the test portion 13 at various depths can be observed.

Since the focal point 23 or 73 is moved by using a variable wavelength laser, the configuration of the tip 9 of the optical probe 4 is simpler than in the first embodiment. Also,
The scanning range can be changed.

Further, since the distal end cover 72 provided with the concave lens portion 71 is made detachable, the visual field range can be largely changed. Although the description has been given of the case of the distal end cover 72 provided with the concave lens portion 71, the distal end cover provided with the convex lens may be attached so that the observation position in the depth direction can be changed.

(Sixth Embodiment) Next, a sixth embodiment of the present invention will be described with reference to FIG. This embodiment is different from the fifth embodiment only in the tip 9 of the optical probe 4 and the description of other parts is omitted. In the present embodiment, the front cover 12 is adhered to the optical frame 10.

The laser light source of the light source unit 2 used in this embodiment is a normal laser light source. In the present embodiment, the Z drive circuit 33 is not used. In the present embodiment, the upper plate 16 of the optical unit 11 is provided with the birefringent lens 7.
6 is pasted. The focal position of the birefringent lens 76 varies depending on the direction of polarized light. For example, the focal position becomes the focal point 23 for polarized light in the direction parallel to the paper surface, and the focal position becomes the focal point 77 for polarized light in the direction perpendicular to the paper surface.

Next, the operation of the present embodiment will be described. The light passing through the birefringence lens 76 has a different refractive index depending on the direction of polarized light, and thus forms a focal point 77 in addition to the focal point 23. At the time of normal pressing observation, since the focal point 77 is located at a deep part of the inspected portion 13, almost no light returns.
Only the image of is obtained.

When the optical probe 4 is separated from the object 13 to some extent and the surface of the object 13 is located at a position 78 indicated by a two-dot chain line, there is no object at the focal point 23. While the light from the point does not return, the focus 77
Since the light from the light source returns, an image of only the scanning surface 79 is observed.

At this time, since the focal point 23 and the focal point 77 have different distances from the birefringent lens 76, the scanning surface 79 is wider than the scanning surface 25. Therefore, in the present optical probe 4,
Two types of scanning ranges can be selected depending on how the optical probe 4 is used.

This embodiment has the following effects. Since the confocal microscope is configured at the tip of the thin optical probe 4, the inside of the body cavity can be observed with a microscope. Since the configuration is such that the axial direction of the optical probe 4 can be observed, it is easier to press against the observation target.

Since the transparent window member for pressing against the object is provided, it is possible to observe the object without moving the tip of the optical probe 4. The scanning range can be selected.

(Seventh Embodiment) Next, a seventh embodiment of the present invention will be described with reference to FIGS. FIG.
An optical scanning probe device 81 according to a seventh embodiment of the present invention shown in FIG. 2 includes a control device 82 having a built-in light emitting unit for light diagnosis and the like, and a base end (rear end) ) Is detachably connected, is inserted into the subject, is connected to an optical probe 83 having a built-in light transmitting means, and is connected to a control device 82, and outputs a video signal output from a video signal generating means in the control device 82. And a monitor 84 for displaying.

The control device 82 incorporates, for example, a white light source 85, and the light from the white light source 85
Is converted into parallel light. The parallel light passes through the polarizing beam splitter 87, becomes linearly polarized light parallel to the polarization direction of the polarizing beam splitter 87, and has a plurality of pinholes 88 through which spot-like light passes. 8
9 is incident.

The Nipkow disc 89 is rotated at a constant speed by a motor 90. The light passing through the pinhole 88 of the rotated Nipkow disc 89 is condensed by a condenser lens 91.
And is incident on the optical probe 83 side.

The optical probe 83 has an elongated transmission fiber 92.
The rear end is fitted to a connector 82a provided in the control device 82 and is detachably connected. And
When this rear end is connected to the connector 82a, the rear end of the transmission fiber 92 is located at a position where light is collected by the condenser lens 91.

The transmission fiber 92 is composed of a tube 93 and a fiber bundle 94 inserted therein. The internal fiber bundle 94 has a diameter of 2 mm.
An optical fiber for image transmission is used. This is one
It corresponds to a pixel, and is a bundle of tens of thousands of these, and transmits the light that is condensed and incident by the condensing lens 91 to the front end side.

The tip 95 of this optical probe 83 is
The configuration is as shown in FIG. That is, the optical probe 8
A distal end body 96 of a hard member is adhered and fixed to the distal end of the tube 93 as the outer tube and the distal end of the fiber bundle 94.

A 先端 wavelength plate 97 and an objective lens 98 are fixed to the distal end body 96 so as to face the distal end surface of the fiber bundle 94.

Then, the linearly polarized light transmitted through the fiber bundle 94 is converted into circularly polarized light through a quarter-wave plate 97, and is condensed and radiated onto a test portion (symmetrical tissue) 99 by an objective lens 98. The light that is condensed and irradiated on the test portion 99 becomes a spot light at an image forming position (focal point) 100.

The light reflected by the test portion 99 is condensed by an objective lens 98, passes through a quarter-wave plate 97, becomes linearly polarized light having a polarization direction different from that of the forward path by 90 degrees, and becomes a fiber bundle 94. Then, the light returns to the Nipkow disk 89 via the condenser lens 91. In this case, only light returning from the focal point 100 passes through the pinhole 88, and light from other than the focal point 100 is shielded by a light-shielding portion around the pinhole 88. That is, focus 1
Only the light returning from 00 enters the polarization beam splitter 87 via a path opposite to the outward path.

Then, the light is reflected by the polarization beam splitter 87 and is imaged on a charge-coupled device (abbreviated as CCD) 102 arranged at the image-forming position by the image-forming lens 101 facing the beam splitter 87.

The light photoelectrically converted by the CCD 102 is input to a video signal generation circuit in the controller 104, is converted into a video signal, and is output to the monitor 84.
The confocal image is displayed on the display surface of. A recording device 105 is connected to the controller 104, and can record a video signal.

The controller 104 controls the lighting operation of the white light source 85 and the rotation of the motor 90. In addition, a signal from an encoder (not shown) for detecting the rotational position of the motor 90 is input, and the operation of generating a video signal is performed in synchronization with the rotational position of the motor 90.

As shown in FIG. 13, the distal end portion 95 is attached so that the base end of a transparent distal end cover 111 is fitted. The distal end cover 111 is attached to the distal end main body 96 in the optical axis direction 112. It is movable. The tip cover 111 has a convex shape so that the tissue can be easily fixed.

The inside 114 of the tip cover 111 is airtight by the O-ring 113. The distal end body 96 is provided with a small pressure sensor 115, which is connected to the controller 104 via a cable 116, and detects the pressure of the inside 114 of the distal end cover 111. Axial direction 112
The movement position of the can be detected.

Next, the operation of the present embodiment will be described below. The light emitted from the white light source 85 is collimated by the collimating lens 8.
6 make parallel light, and the polarization beam splitter 87 transmits only light having the same polarization direction. This light is applied to the upper surface of the Nipkow disk 89.

Only the light of the irradiation light, which has passed through the inner pinhole 88, is guided to the optical probe 83 by the condenser lens 91, and condensed on the end of the transmission fiber 92, that is, the rear end face 94 a of the fiber bundle 94 therein. Is done. The light propagates through the fiber bundle 94 and is emitted from the distal end portion 94b. This illuminating light is converted into circularly polarized light by the quarter-wave plate 97, then condensed by the objective lens 98, and focuses on the focal point 100 slightly before the tip cover 111 as a transparent window member.

Since the optical probe 83 is used by being pressed against the target tissue 99 at the time of observation as shown in FIG. 13, the focus 100 is focused inside the tissue. At this time, the reflected light from the tissue returns along the same path and passes through the 波長 wavelength plate 97, and becomes light having a polarization direction different from that of the light exiting from the distal end portion 94 b of the fiber bundle 94 by 90 degrees. Then, the light is incident on the distal end portion 94b of the fiber bundle 94.

This light propagates through the fiber bundle 94 again, returns to the same optical path in the opposite direction, and is focused on the pinhole 88 by the condenser lens 91. At this time, only the light reflected at the focal point 100 on the target tissue 99 by the confocal effect passes through the pinhole 88, and the reflected light and scattered light from other than the focal point 100 are not focused on the pinhole 88 and are removed. You.

The light passing through the pinhole 88 travels to the polarization beam splitter 87. Here, the polarization plane of the light has a polarization plane of 9 with the light transmitted through the polarization beam splitter 87 first.
Since they are different by 0 degrees, they are reflected by the polarization beam splitter 87 and imaged on the CCD 102 by the imaging lens 101. Further, the light reflected by the end faces 94a and 94b of the fiber bundle 94 on the Nipkow disc 89 passes through the polarization beam splitter 87 because the polarization plane is intact, and is not received by the CCD 102.

Next, the operation when the Nipkow disk 89 is rotated will be described. In FIG. 14, a plurality of pin holes 88 provided on the Nipkow disc 89 are described for the sake of explanation.
a, 88b and the like will be described separately.

When the Nipkow disk 89 rotates as shown in FIG. 14, the position of the pinhole 88a moves. Along with this, the focal point 120a formed by the light passing through the pinhole 88a and condensed by the condensing lens 91 also moves along a locus 121a as shown in FIG. That is, it moves so as to draw the trajectory 121a in the direction indicated by the symbol A.

The Nipkow disk 89 is further rotated and the focus 1
When 20a comes off the base end of the optical probe 3, the focal point formed by the light passing through the next pinhole 88b moves along a similar trajectory 121b.

At this time, since the pinhole 88b is located on a smaller radius than the pinhole 88a, the locus 121b of the focal point also deviates from the locus 121a. By repeating this, the focal point moves the rear end of the optical probe 83 to 2
Scans dimensionally. In this case, the rear end portion 94a cross-sectional area of the fiber bundle 94 is configured to be smaller than the range in which the focal point 120a is scanned.

The light that has passed through the pinhole 88a propagates through the fiber bundle 94 to the distal end portion 95, irradiates the target tissue 99, and the return light from the focal point 100 passes through the same optical path and returns to the pinhole again. The light condensed at 88a and passing through this pinhole 88a
23, and the focal point 123 also scans the CCD 102 in the direction indicated by the symbol B as the Nipkow disk 89 rotates.

In addition, the tip 95
Since the direction in which light is emitted changes, the focal point 100 also scans on the scanning surface 125 including the focal point 100 of the target tissue 99. Thus, the focus 10 on the target tissue 99
0 scans and the information is imaged on the CCD 102.

The controller 104 has a Nipkow disk 89
, And a process of converting the image signal of the CCD 102 into a video signal is performed. The video signal is sent to the monitor 84, and a confocal image is displayed on the display surface of the monitor 84. Also, it is stored in the recording device 105 as needed.

When it is desired to obtain information on a deeper surface of the target tissue 99, the pressing strength is changed, for example, by pressing the distal end portion 95 of the probe 83 more strongly against the target tissue 99. At this time, the distal end surface of the distal end body 96 moves rightward in FIG. 13 with respect to the distal end cover 111 as a window member,
The focal point 100 moves to a deeper side of the target tissue 99,
Scanning is performed two-dimensionally at the moved position.

At this time, the pressure inside the front cover 111 increases, and this pressure is detected by the pressure sensor 115.
This signal is sent to the controller 104, and from this pressure information, it is possible to know which depth is being observed.
When the distal end of the optical probe 83 is released from the state where the distal end of the optical probe 83 is pressed against the target tissue 99, the distal end cover 111 returns to the initial position due to the internal pressure.

As described above, in the present embodiment, the target organization 9
By pressing the sheet 9 with appropriate strength, information on the depth to be observed can be obtained.

The present embodiment has the following effects. Since a confocal microscope was constructed at the tip of the thin optical probe 83,
The body cavity can be observed under a microscope. Optical probe 83
Is configured to be able to be observed in the axial direction, so that it is easier to press against the observation target.

Since the Nipkow disk 89 is used as the light scanning means, high-speed scanning can be realized. Since the fiber bundle 94 is used for transmitting light, scanning can be performed at the hand side, and the configuration of the distal end portion 95 of the optical probe 83 can be simplified. Further, since the window member pressed against the object is made convex, the object can be fixed more easily than in the first embodiment.

Further, since the window member is configured to be movable,
Different depths of the target tissue can be observed. Further, since the pressure sensor 115 is provided, it is possible to know which depth is being observed.

(Eighth Embodiment) Next, an eighth embodiment of the present invention will be described with reference to FIG. This embodiment is a modification of the tip of the optical probe 83 of the seventh embodiment, and only different portions will be described.

The tip 95 of the optical probe 83 is as follows. As in the seventh embodiment, a distal end body 96 is adhesively fixed to the distal end of the tube 93. The distal end body 96 is also fixed to the distal end of the fiber bundle 94. Further, a 波長 wavelength plate 97 is fixed to the distal end surface of the fiber bundle 94. The tip cover 111 serving as a window member is fixed to the tip of the tip body 96.

Further, the objective lens 98 is fixed to a lens frame 130, and this lens frame 130
Is movable in an axial direction 131 parallel to the optical axis of the optical disk.
A push-pull rod 132 that can be pushed and pulled is fixed to the lens frame 130. The other end of the push-pull rod 132 is connected to a linear actuator (not shown). The linear actuator is connected to the controller 104 of FIG.

By moving the push-pull rod 132 in the axial direction 131 via the linear actuator, the position of the focal point 100 can be changed in the depth direction of the target tissue 99.

An optical fiber 134 is provided on the distal end body 96 so that the distal end thereof faces the lens frame 130.
It is connected to an internal light source and a detector (not shown). Then, the light from the light source is transmitted through the optical fiber 134, and the reflected light from the lens frame 130 facing the distal end surface is detected by a detector, and the detected light intensity allows the objective attached to the lens frame 130 to be detected. Lens 98
In the axial direction 131 or the position of the focal point 100 can be calculated.

Next, the operation of the present embodiment will be described. The operation of obtaining the focal point 100 on the scanning plane 125 is the same as in the seventh embodiment. Therefore, the operation of the mechanism for moving the scanning surface 125 in the axial direction 131 will be described.

When the linear actuator is driven by the controller 104, the power is applied to the push-pull rod 1
32, the lens frame 130 moves in the axial direction. At this time, as the objective lens 98 moves, the focus 100
Also moves in the optical axis direction 135. At this time, the scanning surface 125 can also move in the axial direction 135.

The optical fiber 134 is connected to the controller 1
Transmit the light from the light source inside 04 to the tip. Here, the light from the fiber 134 is reflected by a portion of the lens frame 130 facing the distal end of the fiber 134, re-enters the distal end surface of the fiber 134, and is guided to a detector inside the controller 104.

Here, when the lens frame 130 moves, the amount of movement of the lens frame 130 can be accurately known by utilizing the fact that the amount of light guided to the detector changes. This makes it possible to know which depth is being observed.

Although the objective lens 98 is moved in this embodiment, the end of the fiber bundle 94 and the tip cover 111 as a window member are moved in the axial direction 131 in the same manner.
It may be moved to.

The present embodiment has the following effects. Since a confocal microscope was constructed at the tip of the thin optical probe 83,
The body cavity can be observed under a microscope. Optical probe 83
Is configured to be able to be observed in the axial direction, so that it is easier to press against the observation target.

Since the Nipkow disk 89 is used for scanning, high-speed scanning can be realized. Since the fiber bundle 94 is used for transmitting light, scanning can be performed at hand,
The configuration of the distal end portion 95 of the optical probe 83 can be simplified. Also, since the window member pressed against the object is made convex,
It is easier to fix the object than in the embodiment.

Further, since the objective lens 98 is configured to be movable, it is possible to observe surfaces of the target tissue having different depths.

Further, the position in the depth direction can be found more accurately than in the seventh actual rotation. It should be noted that embodiments and the like configured by partially combining the above-described embodiments and the like also belong to the present invention.

[Supplementary Notes] (0) An optical probe inserted into a body cavity, a light source for generating light for irradiating the test portion with light, and a light source for guiding light from the light source to the tip of the optical probe. A light transmitting means, a condensing means for converging and irradiating the light to the portion to be detected, and a focal point condensed on the portion to be detected by the condensing means in a direction orthogonal to the optical axis direction of the condensing means. The optical scanning probe device, comprising: an optical scanning device for scanning; a separating device for separating return light from the test portion from light from a light source; and a light detecting device for detecting the separated light. An optical scanning probe device, further comprising a changing means for changing a position of a focused light focused on the detection unit along an optical axis direction of the light collecting means.

(1) A probe to be inserted into a body cavity, a light source for generating light for irradiating light to a portion to be inspected, an optical fiber for guiding light from the light source to the tip of the probe,
Light-collecting means for converging and irradiating the light to the portion to be detected, light-scanning means for scanning a focal point condensed by the light-condensing means,
An optical scanning probe device comprising: separating means for separating return light from the test portion from an optical path of light from a light source; and light detecting means for detecting the separated light. An optical scanning probe device comprising a focal point moving means for continuously moving the focal point of the light beam in the optical axis direction.

(2) The optical scanning probe device according to appendix 1, wherein the light source is a laser light source. (3) The optical scanning probe device according to appendix 1, wherein the focal point moving means moves the focal point in an axial direction of the probe. (4) The optical scanning probe scanning device according to appendix 1, wherein the optical scanning means is a scanning mirror provided at a probe tip.

(5) The optical scanning probe device according to appendix 1, wherein the optical fiber is a bundle fiber, and the optical scanning means scans light incident on the bundle fiber. (6) The optical scanning probe device according to appendix 5, wherein the optical scanning means has a Nipkow disk provided with a pinhole. (7) The optical scanning probe device according to appendix 1, wherein the optical scanning probe device forms a confocal optical system.

(8) The optical scanning probe device according to appendix 1, wherein the return light from the test portion is guided to the outside of the probe through the same optical fiber as the light from the light source. (9) The optical scanning probe device according to appendix 8, wherein the separating means separates light guided to the outside of the probe by an optical fiber. (10) The optical scanning probe device according to supplementary note 1, wherein the light detection device has a spectral unit.

(11) The optical scanning probe device according to appendix 1, further comprising means for extracting only fluorescence from the return light. (12) The optical scanning probe device according to supplementary note 1, wherein the focus moving means is a variable focus lens. (13) The optical scanning probe device according to appendix 12, wherein the focus moving means is a variable focus lens that changes a refractive index.

(14) The optical scanning probe device according to appendix 12, wherein the focal point moving means is a variable focal length lens that changes its shape. (15) The optical scanning probe device according to supplementary note 12, wherein the focus moving means is performed by changing a wavelength of the laser light source. (16) The optical scanning probe device according to appendix 1, wherein the focal point moving unit moves the focusing unit with respect to the tip of the probe.

(17) The optical scanning probe device according to appendix 1, wherein the focal point moving means moves the tip of the probe with respect to the light collecting means. (18) The optical scanning probe device according to appendix 1, wherein the focal point moving unit moves the distal end of the optical fiber in the axial direction. (19) The optical scanning probe device according to Supplementary notes 16, 17, and 18, further comprising measuring means for measuring the movement amount.

(20) The optical scanning probe device according to Supplementary notes 16, 17, and 18, wherein the focal point moving means is driven by an actuator provided at a probe tip. (21) The optical scanning probe device according to supplementary note 20, wherein the actuator is a piezoelectric element. (22) The optical scanning probe device according to supplementary note 20, wherein the actuator is driven by movement of a fluid.

(23) The optical scanning probe device according to appendix 19, wherein the focus moving means is driven by an actuator provided near a rear end of the probe. (24) The optical scanning probe device according to supplementary note 23, further comprising a transmission element that transmits power of the actuator to a probe tip. (25) The optical scanning probe device according to appendix 17, wherein the focal point moving unit is a moving unit that allows the probe tip to be passively moved by an external force applied to the probe tip. (26) The optical scanning probe device according to Supplementary Note 25, further comprising a measuring unit that measures a pressure that changes with the movement.

(27) The focal point moving means is a second light condensing means detachably provided at the tip of the probe, and moves the focal point by attaching and detaching the second light condensing means. 2. The optical scanning probe device according to 1. (28) The optical scanning probe device according to supplementary note 1, wherein the focal point moving unit is configured such that the light collecting unit focuses a plurality of focal points, and moves the focal point by selecting the focal point. . (Background of Supplementary Notes 27 and 28) (Problems of the Related Art) In the related art, the optical system is moved in the axial direction of the optical probe in order to select an objective lens. In such a system, there is a problem that it is difficult to observe the optical probe in the axial direction and it is difficult to handle. (Purpose) For the purpose of providing an optical scanning probe device capable of easily observing the optical probe in the axial direction, appendix 2
7, 28 were adopted. (Function) The focal length can be easily changed even in the direct viewing state.

(29) The optical scanning probe device according to appendix 4, wherein the scanning range of the focal point changes depending on the driving frequency and voltage of the scanning mirror. (30) The optical scanning probe device according to supplementary note 1, wherein a scanning range of the focal point is changed by the focal point moving unit. (Background of Supplementary Notes 29 and 30) (Problems of the Related Art) The prior art has no means for continuously changing the scanning range of the focal point, and has a disadvantage that the magnification or the scanning range cannot be variously changed. . (Purpose) To provide an optical scanning probe device capable of continuously changing a magnification or a scanning range. In order to achieve the purpose, the constitutions of supplementary notes 29 and 30 are provided. (Operation) The range in which the focal point is scanned can be changed continuously.

[0152]

As described above, according to the present invention, an optical probe inserted into a body cavity, a light source for generating light for irradiating light to a test portion, and a light from the light source A light transmitting means for guiding the light to the tip of the probe; a light condensing means for condensing and irradiating the light to the object to be detected; An optical scanning means for scanning in a direction perpendicular to the axial direction, a separating means for separating return light from the test portion from light from a light source, and a light detecting means for detecting the separated light In the apparatus, since there is provided changing means for changing the position of the focal point condensed on the test portion side along the optical axis direction of the condensing means, the position of the focal point with respect to the portion to be examined is provided. Observed images can be obtained by changing the optical axis direction.

[Brief description of the drawings]

FIG. 1 is a diagram showing an overall configuration of an optical scanning probe device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view illustrating a configuration of a distal end portion of the optical probe.

FIG. 3 is a perspective view showing a configuration of an optical unit.

FIG. 4 is a block diagram illustrating a configuration of a control unit.

FIG. 5 is a diagram showing a state of scanning of a focal point when a movable mirror is driven.

FIG. 6 is a sectional view showing a configuration of a distal end portion of an optical probe according to a second embodiment of the present invention.

FIG. 7 is a sectional view showing a configuration of a distal end portion of an optical probe according to a third embodiment of the present invention.

FIG. 8 is a cross-sectional view illustrating a configuration of a tip portion of an optical probe according to a fourth embodiment of the present invention.

FIG. 9 is a sectional view showing a configuration of a distal end portion of an optical probe according to a fifth embodiment of the present invention.

FIG. 10 is a cross-sectional view showing a configuration of a distal end portion of the optical probe in a state where a distal cover for wide-angle observation is attached.

FIG. 11 is a sectional view showing a configuration of a distal end portion of an optical probe according to a sixth embodiment of the present invention.

FIG. 12 is a diagram showing an overall configuration of an optical scanning probe device according to a seventh embodiment of the present invention.

FIG. 13 is a cross-sectional view showing the configuration of the tip of the optical probe.

FIG. 14 is an explanatory diagram of the operation when the Nipkow disc is rotated.

FIG. 15 is a sectional view showing a configuration of a distal end portion of an optical probe according to an eighth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Optical scanning probe device 2 ... Light source part 3 ... Light transmission part 4 ... Optical probe 5 ... Control part 6a, 6b, 6c, 6d ... Optical transmission fiber 7 ... Four terminal coupler 8 ... Tube 9 ... Tip part 10 ... Optical Frame 11 ... Optical unit 12 ... Front cover 13 ... Test target 14 ... Substrate 15 ... Spacer 16 ... Top plate 17, 18 ... Movable mirror (rotating mirror) 19 ... Cable 21, 22 ... Mirror 23 ... Focus 24 ... Diffraction grating Lens 25 Scanning surface 28 Piezoelectric element 29 Depth direction of the part to be inspected 30 Cut surface 31 Laser driving circuit 32 XY driving circuit 33 Z driving circuit 34 Photodetector 35 Image processing circuit 36 Monitor 37 Recording device

Continued on the front page F term (reference) 2H052 AA08 AA09 AB05 AC15 AC26 AC34 AF13 AF14 AF25 4C061 AA00 BB02 BB07 CC07 DD03 FF35 FF40 FF47 LL03 NN01 NN05 PP13 RR06 RR17 WW03

Claims (1)

[Claims] (1) An optical probe inserted into a body cavity, a light source for generating light for irradiating a test portion with light, and a light for guiding light from the light source to a tip of the optical probe. A transmission unit; a light-collecting unit that collects and irradiates the light to the target unit; and scans a focal point collected by the light-collecting unit toward the target unit in a direction orthogonal to an optical axis direction of the light-collecting unit. An optical scanning device, comprising: a light scanning unit that separates the return light from the test portion from the light from the light source; and a light detection device that detects the separated light. An optical scanning probe device provided with changing means for changing the position of the focal point condensed along the optical axis direction of the condensing means.