JP2000124291A - Position controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simply and with high accuracy position controller which can reduce man-hours in attachment and the attachment space, and enables attachment member to be attached at a specified interval to a fixed board. SOLUTION: A fixed board 10 and an attachment member 9 are attached to each other at a specified interval 31, with a control member 20 which is screwed to either for example the fixed board 10 or the attachment member 9, the attachment member 9 and also abuts on the attachment surface 10a of the other fixed board 10, and a fixed screw member 40 which is inserted at an interval 30 into an axial through-hole 21 provided in this adjusting screw member 20 and is screwed in the tapped hole 12, threaded in the fixed board 10 where the control screw member 20 abuts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position adjusting device, and more particularly, to a position adjusting device in which mounting members are mounted in parallel to a fixed base at predetermined intervals in a horizontal or vertical direction. It is about.

[0002]

2. Description of the Related Art Generally, in a semiconductor manufacturing process, a plurality of, eg, 50, wafers to be processed are housed in a cassette, for example, 50 wafers, and a loading / unloading section. In the loading / unloading section, the transport means, for example, a cassette transport arm, transports the wafer or the like to a take-out section, and takes out the wafer or the like from the cassette by the wafer take-out arm. After the conversion and adjustment, the wafer is transferred to a processing unit by a wafer transfer unit, for example, a wafer transfer arm, and subjected to appropriate processing. The processed wafer and the like that have been processed in the processing unit are stored in an empty carrier by the reverse procedure, and then unloaded.

In the semiconductor manufacturing process, in order to transfer a wafer or the like to a predetermined position, the cassette transfer arm, the wafer take-out arm, the wafer transfer arm, and the like are moved horizontally (X, Y directions) and vertically (Z direction). ) And the rotation direction (θ direction) can be moved accurately and quickly. Therefore, these arms are attached to the fixed part of the device by accurate positioning.

Therefore, conventionally, as shown in FIGS. 11 and 12, a fixing portion (hereinafter referred to as a fixing base) a
In order to attach an arm attachment portion (hereinafter referred to as an attachment member) b at a predetermined interval, three screw members (bolts) are used for each attachment portion. That is, the mounting member b
Adjusting screw member c which is screwed into and abuts on the fixed base a
And two fixing screw members e, which penetrate through guide holes d provided on both sides of the adjusting screw member c and are screwed to the fixing base a, the mounting member b is fixed to the fixing base a by a predetermined amount. They were installed at intervals. The adjusting screw member c is fixed so as not to be loosened by a lock nut f screwed to the adjusting screw member. In this way, for example, the four corners of the mounting member b are respectively connected to the three screw members c, e,
e and a lock nut f, which is fixed by a position adjusting device.

[0005]

However, in the conventional position adjusting device, after the distance between the fixed base a and the mounting member b is determined by the adjusting screw c, the fixing screw e is screwed onto the fixed base a. In addition, since the structure is such that the mounting member b is drawn to the fixed base a side, two or three screw members (bolts) are required for one mounting portion, and it takes much time for mounting, and many mounting portions are required. Space was needed. In addition, as shown by a two-dot chain line in FIG.
There was a problem of bending to the side. Thus, the mounting member b
The bending of the arm means that the cassette transfer arm, the wafer take-out arm, the wafer transfer arm, and the like are mounted in a state where they are not accurately positioned, which not only hinders the movement of these arms but also causes the transfer and processing of the wafer and the like. It may cause trouble.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and can reduce the number of man-hours and space required for mounting.
It is an object of the present invention to provide a position adjusting device in which an attaching member can be easily and accurately attached to a fixed base at a predetermined interval.

[0007]

To achieve the above object, a position adjusting device according to the present invention is configured as follows.

(1) The invention according to claim 1 is an adjustment screw member which is screwed into one of the fixed base and the attachment member and abuts on the other surface, and an axial direction provided on the adjustment screw member. Is inserted with a gap into the through hole of
A fixing screw member screwed to the fixing base or the mounting member with which the adjusting screw member comes into contact.

With this configuration, the adjusting screw member is screwed into one of the fixed base and the mounting member, and is brought into contact with the other to maintain the fixed base and the mounting member at a predetermined distance. In this state, the fixing screw member is inserted into the through hole provided in the adjusting screw member, and screwed to the fixing base or the mounting member with which the adjusting screw member abuts, so that the fixed base and the mounting member have a predetermined interval. Can be fixed. Therefore, since the adjusting screw member and the fixing screw member can be screwed together at one location on the same axis, the number of mounting steps and the mounting space can be reduced, and the mounting member can be provided at a predetermined interval with respect to the fixed base. It can be installed easily and with high accuracy.

(2) The invention according to claim 2 is that the screw portion which is screwed into one of the fixed base and the mounting member, the step portion which comes into contact with the other surface, and the gap in the through hole provided in the other. An adjusting screw member having a protruding shaft inserted with
A fixing screw member screwed to a tip of a protruding shaft of the adjusting screw member to press the fixing base or the mounting member against the step portion.

With this configuration, the adjusting screw member is screwed into one of the fixed base and the mounting member, and the step is brought into contact with the other, so that the fixed base and the mounting member are spaced at a predetermined distance. Maintain, and in this state, fix the fixing screw member,
By screwing onto the tip of the protruding shaft of the adjusting screw member, the fixed base and the mounting member can be fixed at a predetermined interval. Therefore, similarly to the first aspect of the present invention, the adjusting screw member and the fixing screw member can be screwed together at one location on the same axis, so that the number of mounting steps and the mounting space can be reduced, and the fixing base can be fixed. On the other hand, the attachment members can be easily and accurately attached at predetermined intervals.

(3) According to a third aspect of the present invention, there is provided the position adjusting device according to the first or second aspect, further comprising a lock nut screwed into the adjusting screw member to fix the adjusting screw member. It is characterized by.

[0013] With this configuration, the lock nut is screwed into the adjusting screw member for adjusting the distance between the fixed base and the mounting member, and the adjusting screw member is fixed. Fastening can be performed at predetermined intervals.

(4) In the position adjusting device according to claim 1 or 2, it is preferable that a tightening tool mounting portion is formed on the adjusting screw member. Further, the adjusting screw member may be formed by a bolt (claim 5).

With this configuration, the operation of screwing the adjusting screw member into the fixed base or the mounting member can be easily performed with the tightening tool.

[0016]

Embodiments of the present invention will be described below in detail with reference to the drawings. In this embodiment, a case where the position adjusting device of the present invention is applied to a transfer arm of a wafer storage carrier of a semiconductor wafer cleaning / drying processing system will be described.

FIG. 1 is a schematic perspective view showing a transfer arm of a wafer storage carrier to which the position adjusting device of the present invention is applied.

The carrier transfer arm has a pair of arm members 1 for holding a carrier (not shown) and an arm moving mechanism (not shown) for moving the arm members 1 in and out of the horizontal direction. 2, a vertical moving unit 4 having a vertical moving mechanism 3 for moving the gripper 2 in the vertical direction (Z direction in FIG. 1), and moving the vertical moving unit 4 in the horizontal direction (FIG. 1).
And a horizontal moving unit 6 having a horizontal moving mechanism 5 for moving in the X direction (in the middle X direction).
Is fixed with a position adjusting device of the present invention described later. In this case, the vertical moving mechanism 3 and the horizontal moving mechanism 5 are each constituted by a belt mechanism having servo motors 7a and 7b and timing belts 8a and 8b.

Next, the position adjusting device of the present invention for mounting the horizontal moving portion 6 of the carrier transfer arm and the fixed base 10 will be described in detail with reference to FIGS.

First Embodiment FIG. 2 is a sectional view showing a main part of a first embodiment of the position adjusting device of the present invention, FIG. 3 is a sectional view showing a modification of the first embodiment, and FIG. FIG. 2 is an exploded perspective view of a main part of the first embodiment.

The position adjusting device shown in FIG. 2 is engraved on the mounting member 9 of the horizontal moving portion 6 (hereinafter referred to as the mounting portion 6), is screwed into the screw hole 11, and is mounted on the mounting surface 10a of the fixed base 10.
Adjusting screw member 20 abutting on
A fixed screw member 40 which is inserted through a through hole 21 provided along the axial direction at the center of the fixed member with a gap 30 and is screwed into the screw hole 12 formed in the fixed base 10 with which the adjusting screw member 20 abuts. And a lock nut 50 screwed to the adjustment screw member 20 to fix the adjustment screw member 20.

In this case, the adjusting screw member 20 has a male screw engraved on the entire shaft main body, and a flat-shaped engaging part such as a wrench is engaged with a tightening tool such as a wrench at an opposing outer periphery of the base end. A fastening tool mounting part 60 is provided. The fixing screw member 40 is screwed to the adjusting screw member 20 via a washer 71 and a spring washer 72, and the lock nut 50 is connected to the adjusting screw member 20 via a washer 73.
And is in contact with the surface 9 b of the mounting member 9.

Next, a procedure for attaching the horizontal moving portion of the carrier transport arm, that is, the attaching portion 6, to the fixed base 10 will be described.

First, the mounting portion 6 is attached to the mounting position of the fixed base 10.
Is set. In this state, the adjusting screw member 20 is screwed into the screw hole 11 provided in the mounting member 9 with a tightening tool (not shown) such as a wrench, and the tip of the adjusting screw member 20 is brought into contact with the mounting surface 10a of the fixed base 10. At the same time, the fixing screw member 40 penetrating through the through hole 21 of the adjusting screw member 20 is screwed into the screw hole 12 formed in the fixing base 10. At this time, the distance 31 between the fixed base 10 and the mounting member 9 is adjusted by adjusting the screwing amount of the adjusting screw member 20. Also, a gap 30 between the through hole 21 and the fixing screw member 40
The vertical position of the mounting member 9, that is, the mounting portion 6 can be adjusted within the range described above.

With the mounting member 9 mounted on the fixed base 10 as described above, the lock nut 50 screwed to the adjusting screw member 20 is tightened to the mounting member 9 side to fix the adjusting screw member 20. The fixed base 10 and the mounting member 9 are maintained at a predetermined interval 31. In this way, the fixed base 10 and the mounting member 9 are mounted at several places, and the mounting operation is completed.

In the above description, the adjusting screw member 20 is screwed into the screw hole 11 formed in the mounting member 9, the adjusting screw member 20 abuts on the fixed base 10, and the through hole provided in the adjusting screw member 20. The case where the fixing screw member 40 penetrating through the inside 21 is screwed into the screw hole 12 formed in the fixing base 10 has been described, but the adjusting screw member 20 and the fixing screw member 40 are screwed.
May be reversed. That is, as shown in FIG. 3, the adjusting screw member 20 is screwed into the screw hole 13 formed in the fixed base 10, and the tip of the adjusting screw member 20 abuts on the mounting member 9. Through hole 21 provided in
The fixing screw member 40 may be screwed into the screw hole 14 formed in the mounting member 9 while penetrating the fixing screw member 40 with a gap 30 therein.

Second Embodiment FIG. 5 is a sectional view showing a main part of a second embodiment of the position adjusting device of the present invention.

The second embodiment uses a bolt 2 having a hexagonal head 20a instead of the adjustment screw member 20 of the first embodiment.
This is the case where it is formed at 0A. That is, the bolt 20A is screwed into the screw hole 11 provided in the mounting member 9 with a tightening tool (not shown) such as a wrench, so that the tip of the bolt 20A comes into contact with the mounting surface 10a of the fixed base 10. is there.

In the second embodiment, the other parts are the same as those in the first embodiment, and a fixing screw member 40 penetrating through the through hole 21 provided in the bolt 20A is engraved on the fixing base 10. Screwed into the screw hole 12
A lock nut 50 screwed to the bolt 20A is fastened to the mounting member 9 side to fix the bolt 20A, and the fixed base 1
0 and the attachment member 9 can be maintained at a predetermined interval 31.

In the above description, the bolt 20A is screwed into the mounting member 9 side, but may be screwed into the fixed base 10 side.

Third Embodiment FIG. 6 is a sectional view showing a main part of a position adjusting device according to a third embodiment of the present invention, FIG. 7 is an enlarged sectional view taken along line AA of FIG. 6, FIG. 9 is an exploded perspective view of a main part of the third embodiment, FIG.
FIG. 9 is a cross-sectional view showing a modification of the third embodiment.

The position adjusting device according to the third embodiment has a screw portion 22 that is screwed into a screw hole 15 formed in the fixed base 10.
An adjusting screw member 20B having a stepped portion 23 in contact with the mounting surface 9a of the mounting member 9 and a protruding shaft 24 inserted into the through hole 16 provided in the mounting member 9 with a gap 30; And a fixing screw member 40A that is screwed to the tip of the protruding shaft 24 and presses the mounting member 9 against the step portion 23.

In this case, a mounting portion 60A such as a tightening tool such as a screwdriver is formed at the base end of the adjusting screw member 20B. The mounting portion 60A is provided with the adjusting screw member 20.
A shaft portion 61 having a smaller diameter than the screw portion extending to the end portion on the side of the base B.
And a mounting hole 62 formed in a portion of the shaft portion 61 perpendicular to the axial direction. The adjustment screw member 20B is inserted by, for example, inserting a screwdriver into the mounting hole 62 of the mounting portion 60A thus configured and turning the screwdriver.
Can be screwed into the screw hole 15 of the fixed base 10.
The fixing screw member 40A is screwed to the adjusting screw member 20B via a washer 74 and a spring washer 75, and the lock nut 50 is screwed to the adjusting screw member 20B via a spring washer 76 and a washer 77. It is in contact with the fixed base 10.

In order to mount the position adjusting device configured as described above, first, the mounting member 9 of the mounting portion 6 is set at the mounting position of the fixed base 10. In this state, the fixed base 1
The adjusting screw member 20B is screwed into a screw hole 15 provided in the mounting member 9 with a fastening tool (not shown) such as a screwdriver, and the step 23 of the adjusting screw member 20B is attached to the mounting surface 9a of the mounting member 9.
, And the protruding shaft 24 is inserted into the through hole 16 provided in the mounting member 9 with a gap 30 therebetween, and the fixed screw member 40A is screwed into the screw hole 24a formed on the protruding shaft 24. At this time, the distance 31 between the fixed base 10 and the mounting member 9 is adjusted by adjusting the screwing amount of the adjusting screw member 20B.
Further, the vertical position of the mounting member 9, that is, the mounting portion 6 can be adjusted within the gap 30 between the through hole 16 and the fixing screw member 40 </ b> A.

With the mounting member 9 attached to the fixed base 10 as described above, the lock nut 50 screwed to the adjusting screw member 20B is tightened to the fixed base 10 to fix the adjusting screw member 20B. The fixed base 10 and the mounting member 9 are maintained at a predetermined interval 31. In this way, the fixed base 10 and the mounting member 9 are mounted at several places, and the mounting operation is completed.

In the above description, the adjusting screw member 20B is screwed into the screw hole 15 formed in the fixed base 10, and the step 23 of the adjusting screw member 20B contacts the mounting member 9, and
The case where the protruding shaft 24 is inserted into the through hole 16 provided on the mounting member 9 and the fixing screw member 40A is screwed into the screw hole 24a formed on the protruding shaft 24 has been described. And the fixing screw member 40A may be reversed. That is, as shown in FIG. 9, the adjusting screw member 20 </ b> B is screwed into the screw hole 17 formed in the mounting member 9, and the step 23 of the adjusting screw member 20 </ b> B is attached to the mounting surface 10 of the fixed base 10.
a, through which the projecting shaft 24 of the adjusting screw member 20B penetrates through the through hole 16A provided in the fixed base 10 with a gap 30, and the fixing screw member 40A is cut into the projecting shaft 24. It may be screwed into the hole 24a.

Fourth Embodiment FIG. 10 is a sectional view showing a main part of a fourth embodiment of the position adjusting device of the present invention.

In the fourth embodiment, a bolt 20C having a hexagonal head 20a is used instead of the adjusting screw member 20B of the third embodiment. That is, the fixed base 1
The bolt 20C is screwed into the screw hole 15 formed in the hole 2 with a tightening tool (not shown) such as a screwdriver, and the bolt 2C is inserted.
This is the case where the step 23 of the OC is brought into contact with the mounting surface 9a of the mounting member 9.

In the fourth embodiment, the other parts are the same as those in the third embodiment, and the projecting shaft 24 provided on the bolt 20C is inserted into the through hole 16 provided in the mounting member 9 by a clearance. At the same time, the lock nut 50 is screwed into the screw hole 24a formed on the protruding shaft 24, and the lock nut 50 is screwed into the bolt 20C.
Tighten to the fixed base 10 side to fix the bolt 20C,
The fixed base 10 and the mounting member 9 can be maintained at a predetermined distance 31.

In the above description, the bolt 20C is screwed into the fixed base 10 side, but it may be screwed into the mounting member 9 side.

In the above embodiment, the case where the mounting members 9 are mounted on the fixed base 10 in the vertical state at a predetermined interval 31 has been described. However, when the fixed base 10 is disposed horizontally or at an arbitrary angle. Similarly, in the above, the fixed base 10 and the mounting member 9 can be mounted at predetermined heights and intervals.

In the above embodiment, the case where the horizontal moving section 6 of the transfer arm of the carrier accommodating the wafer is attached to the apparatus fixing section of the cleaning / drying system has been described. It is needless to say that the present invention can be applied to attachment of a system such as a transfer arm to a device fixing portion. Further, in addition to the transfer arm, the present invention can be applied to all mountings of the fixed base and the mounting member at a predetermined interval (including height, width, etc.).

[0043]

As described above, according to the present invention, since the above-described configuration is employed, the following excellent effects can be obtained.

(1) According to the first aspect of the present invention, the adjusting screw member is screwed into one of the fixed base and the mounting member, and is brought into contact with the other, so that the fixed base and the mounting member are fixed to each other. Maintaining the spacing, in this state, the fixing screw member is inserted through a through hole provided in the adjusting screw member, and screwed to the fixing base or the mounting member with which the adjusting screw member abuts, so that the fixing base and the mounting member are Can be fixed at predetermined intervals. Therefore, since the adjusting screw member and the fixing screw member can be screwed together at one location on the same axis, the number of mounting steps and the mounting space can be reduced, and the mounting member can be provided at a predetermined interval with respect to the fixed base. It can be installed easily and with high accuracy.

(2) According to the second aspect of the invention, the adjusting screw member is screwed into one of the fixed base and the mounting member, and the stepped portion is brought into contact with the other, so that the fixed base and the mounting member are connected to each other. Is maintained at a predetermined interval, and in this state, the fixing base member and the mounting member can be fixed at a predetermined interval by screwing the fixing screw member to the tip of the protruding shaft of the adjusting screw member. Therefore, similar to the first aspect of the present invention,
Since the adjusting screw member and the fixing screw member can be screwed together at a single location on the same axis, the number of mounting steps and the mounting space can be reduced, and the mounting member can be easily and easily provided at a predetermined interval with respect to the fixed base. Can be mounted with high precision.

(3) According to the third aspect of the invention, since the lock nut is screwed into the adjusting screw member for adjusting the distance between the fixing base and the mounting member, and the adjusting screw member is fixed, the fixing base member and the fixing base are fixed. The attachment member can be fastened at a predetermined interval. Therefore, in addition to the above (1) and (2), the fixed base and the mounting member can be more firmly mounted at predetermined intervals.

(4) According to the invention described in claims 4 and 5,
Since the tightening tool mounting portion is formed on the adjusting screw member or the adjusting screw member is formed by bolts, the screwing operation of the adjusting screw member to the fixed base or the mounting member can be easily performed with the tightening tool. it can. Therefore, the mounting operation can be easily performed.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a carrier transfer arm to which a position adjusting device according to the present invention is applied.

FIG. 2 is a sectional view showing a main part of the first embodiment of the position adjusting device of the present invention.

FIG. 3 is a sectional view showing a modification of the first embodiment.

FIG. 4 is an exploded perspective view showing a main part of the first embodiment.

FIG. 5 is a sectional view showing a main part of a second embodiment of the position adjusting device of the present invention.

FIG. 6 is a sectional view showing a main part of a third embodiment of the position adjusting device of the present invention.

FIG. 7 is an enlarged sectional view taken along line AA of FIG. 6;

FIG. 8 is an exploded perspective view showing a main part of the third embodiment.

FIG. 9 is a sectional view showing a modification of the third embodiment.

FIG. 10 is a sectional view showing a main part of a fourth embodiment of the position adjusting device of the present invention.

FIG. 11 is a cross-sectional view showing a main part of a conventional position adjusting device.

FIG. 12 is a schematic front view showing an attached state of a conventional position adjusting device.

[Explanation of symbols]

 Reference Signs List 9 mounting member 9a mounting surface 10 fixing base 10a mounting surface 11 to 15 screw hole 16 through hole 17 screw hole 20, 20B adjusting screw member 20A, 20C bolt (adjusting screw member) 21 through hole 22 screw portion 23 step portion 24 protruding shaft Reference Signs List 30 gap 31 interval 40, 40A fixing screw member 50 lock nut 60, 60A fastener mounting portion

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F078 CA01 CA08 CB09 CB10 CB12 CC03 5F031 CA02 FA01 GA49 GA51 KA07

Claims (5)

[Claims] 1. An adjusting screw member screwed into one of a fixed base and a mounting member and abutting on the other surface, and is inserted with a gap into an axial through hole provided in the adjusting screw member. A fixing screw member screwed to the fixing base or the mounting member with which the adjusting screw member comes into contact. 2. An adjustment having a screw portion to be screwed into one of a fixed base and a mounting member, a step portion abutting on the other surface, and a protruding shaft inserted into a through hole provided in the other with a gap. A position adjusting device comprising: a screw member; and a fixing screw member that is screwed to a tip of a protruding shaft of the adjusting screw member to press the fixing base or the mounting member against the step portion. 3. The position adjusting device according to claim 1, further comprising a lock nut screwed into said adjusting screw member to fix said adjusting screw member. 4. The position adjusting device according to claim 1, wherein a tightening tool mounting portion is formed on the adjusting screw member. 5. The position adjusting device according to claim 1, wherein the adjusting screw member is formed by a bolt.