JP2000122070A - Device for producing liquid crystal display element and method for production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To disperse spacers with certainty in a desired area of a liq. crystal display element by a highly versatile method. SOLUTION: A read-out member 2 successively read out the array pattern of the black matrix of a liq. crystal display element L brought into a production device 1. When the liq. crystal display element L passes under a counter electrode 5, voltage is applied to electrodes 4a... of a powder control member 4 selected on the basis of information relating to the array pattern fed back from the read-out member 2, and spacers supplied from a powder electrifier 3 fly toward the liq. crystal display element L and are adsorbed there. By controlling the flight of the spacers on the basis of the read-out information on the array pattern synchronously with the transit of a certain array pattern under the counter electrode 5, the spacers can be exactly dispersed on the black matrix.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a liquid crystal display device, and more particularly to an apparatus and a method for dispersing powder particles (fine particles) as spacers.

[0002]

2. Description of the Related Art Generally, in a liquid crystal display device, a spacer is inserted to control the thickness of a liquid crystal layer. Since the spacers are inserted randomly over the entire liquid crystal layer, those present in the image display area affect the image quality. Therefore, a dispersing method that does not impair the image quality has been proposed.

As an example, a method of distributing spacers disclosed in Japanese Patent Application Laid-Open No. 6-67184 will be described with reference to FIGS. 78 and 79. FIG. FIG. 78 is intended to realize the above-described spraying method by electrically adsorbing the spacer to an electrode provided at a position outside the image display area. First, a charged region is formed by applying a potential difference between the electrode 202 and the substrate 201 on the substrate 201 provided with the stripe-shaped electrodes 202 as shown in FIG. I do. Next, the spacer 20 charged to the opposite polarity to the substrate 201 side by ion flow or the like.
3 is sprayed on the substrate 201 and selectively attracted only to the electrode 202 using electrostatic attraction as shown in FIG. Then, as shown in FIG.
01, and are adhered to each other with a sealing material 205.

In FIG. 79, an electrostatic latent image is formed at a position corresponding to the area outside the image display area of the photoreceptor master, and the spacer is electrically attracted to the area to realize the above-described spraying method. Things. First, light is selectively irradiated to the photoreceptor master 206 as shown in FIG. 6A to form a stripe-shaped charging pattern 20 as shown in FIG.
7 is formed. Next, as shown in FIG. 4C, a substrate 201 made of glass or the like is laminated on the photoreceptor master 206. Then, the photoreceptor master 206
When the spacer 203 charged to the opposite polarity to the side is sprayed on the substrate, as shown in FIG.
The spacer 203 selectively adheres to the charged region formed on the glass in response to the above. Finally, the opposing substrate 204 is overlaid on the substrate 201 as shown in FIG.

[0005] In addition, it is required to stably charge and supply the spacer at the time of spraying. To achieve this, there is a method disclosed in Japanese Patent Application Laid-Open No. Hei 6-34982. This method will be described with reference to FIG. The gas is charged from the gas tank 211 to the ionizer 212 to which the DC high voltage is applied, and is charged to the insulator pressure feeding hose 213. At the same time, weighing section 2
The spacer weighed to a predetermined amount in the manifold 21
5 The spacer 218 sent to the manifold 215 joins the charged gas and is charged to the same polarity, and then reaches the nozzle 216, where it joins the charged gas sent through the insulator stirring hose 217. Then, the spacer 2 dispersed by being stirred by the nozzle 216
18 is sprayed into the chamber 219 and is sprayed on the liquid crystal display element substrate 220 placed on the bottom.

[0006]

However, as disclosed in JP-A-6-67184, the electrode 20
2 is formed and the spacer 203 is caused to fly by an electric field.
Adheres, resulting in incomplete selective adsorption.

In addition, in this method, a voltage is applied to the black matrix for a liquid crystal display device having a structure in which a color filter and a black matrix are arranged on the substrate 201 and a transparent electrode is formed on the entire surface. At that time, the potential of the transparent electrode on it becomes floating,
Inability to control the electric field that causes the spacer to fly. Also,
An electrostatic latent image is formed using the photoreceptor master 206 and the substrate 20
In the method of superimposing on the substrate 1, the substrate 201 is limited to a thin one and has no versatility.

As described above, in the conventional spraying method, it is not possible to accurately control the spraying position of the spacer, and there is a problem in that the element structure to be sprayed is limited and lacks versatility.

Further, even if it is attempted to charge the spacer 218 by mixing it with an ionized gas as disclosed in JP-A-6-34982, it is difficult to charge all the spacers 218 by mixing with the gas. In addition, the spacer 2 is used to determine the supply amount.
Since accurate weighing in mg units is required for every 18 shots, the process requires precision and is not practical.

As described above, the conventional spraying method has a problem that, in addition to the above-mentioned problems, stable and easy charging and supply of the spacer cannot be performed.

The present invention has been made in view of the above-mentioned conventional problems, and has as its object to provide a liquid crystal capable of reliably dispersing spacers to a desired region on a liquid crystal display element by a highly versatile method. An object of the present invention is to provide an apparatus and a method for manufacturing a display element. Another object of the present invention is to provide a manufacturing apparatus and a manufacturing method of a liquid crystal display element which enable stable and easy charging and supply of the spacers to be dispersed as described above.

[0012]

According to the first aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element,
A powder charging means for charging a powder serving as a spacer of the liquid crystal layer; and a powder flying on the liquid crystal display element on which the liquid crystal layer is formed by flying the powder charged by the powder charging means. Means for manufacturing a liquid crystal display element having means for determining the element pattern of the liquid crystal display element, wherein the powder flying means is based on a result of the element pattern determination by the pattern determination means. The method is characterized in that the powder is sprayed on a selected area on the liquid crystal display element.

According to the above invention, the pattern determining means reads the element pattern and performs image processing on the incoming liquid crystal display element, or receives information on the element pattern from the outside to change the element pattern. Determine. Then, based on the determination result, the powder flying means scatters the powder to a selected area on the liquid crystal display element, that is, a target area in the element pattern.

Therefore, the flying of the powder is controlled for each liquid crystal display element in accordance with the element pattern, so that the spacers are surely sprayed to a desired area on the liquid crystal display element by a highly versatile method. And a manufacturing apparatus for a liquid crystal display device that can perform the method.

According to a second aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device according to the first aspect of the present invention, wherein the pattern determining means is provided on the liquid crystal display element. A reading means for reading an array pattern of the provided black matrix is provided, and the element pattern is determined based on a result of reading by the reading means. The powder flying means sprays the powder on an area above the black matrix. It is characterized by doing.

According to the above invention, the pattern determining means has a reading means such as an optical reading device, and reads and determines the arrangement pattern of the black matrix of the liquid crystal display element. The powder flying means scatters the powder to a liquid crystal layer forming region located above the black matrix based on the determined arrangement pattern of the black matrix.

Therefore, the spacers can be accurately spread over the area above the black matrix, and a high quality display image can be obtained.

According to a third aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to the first or second aspect.
In the apparatus for manufacturing a liquid crystal display element according to the above, the powder flying means has a plurality of electrodes for selectively flying the powder by applying a voltage based on the determination result to each, a predetermined An opposing electrode for forming an electric field between the powder flying means by applying a voltage to guide the powder onto the liquid crystal display element is provided so as to face the powder flying means. It is characterized by.

According to the invention, a voltage corresponding to the element pattern of the liquid crystal display element is applied to each of the plurality of electrodes in the powder flying means, and a predetermined voltage is applied to the opposing electrode, so that the powder is dispersed. An electric field is formed between the electrode of the body flying means and the counter electrode. The powder selectively flies by the voltage applied to the electrode of the powder flying means, and the powder that has passed through the powder flying means changes the liquid crystal by the electric field formed between the electrode of the powder flying means and the counter electrode. It is spread over a predetermined area on the display element.

Therefore, the powder charged by the powder charging means can be efficiently scattered to the target area on the liquid crystal display device.

According to a fourth aspect of the present invention, there is provided a liquid crystal display device manufacturing apparatus according to the third aspect, wherein the counter electrode is provided on the liquid crystal display element. The transparent electrode and the black matrix provided are characterized by being closer to the powder flying means.

According to the above invention, of the transparent electrode and the black matrix provided on the liquid crystal display element, the one closer to the electrode of the powder flying means is the counter electrode. Thus, since no conductor is interposed between the electrode of the powder flying means and the counter electrode, an electric field for flying the powder can be reliably formed.

According to a fifth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device according to the third or fourth aspect of the present invention.
In the apparatus for manufacturing a liquid crystal display device according to the above, the pattern determining means further includes a scattered state reading means for reading a scattered state of the powder on the liquid crystal display element, and based on a result of reading by the scattered state reading means. In the subsequent spraying, the voltage applied to each electrode of the powder flying means is changed.

According to the invention, the scattered state of the powder scattered on the liquid crystal display element by the electrode of the powder flying means and the counter electrode is read by the scattered state reading means. Then, as a result of reading the scattered state, if the powder is deviated from a predetermined position, when the powder is scattered to the subsequent liquid crystal display element, based on the read result, the powder is appropriately scattered. The voltage applied to each electrode of the powder flying means is changed.

As described above, by feeding back the state of dispersion of powder to the electrodes, even if the state of dispersion is deviated from a desired state, it is possible to appropriately correct the state.

According to a sixth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to the first to fifth aspects.
In the apparatus for manufacturing a liquid crystal display element according to any one of
The powder charging means is an ion generating section for generating ions, and the powder held inside is irradiated with ions generated by the ion generating section, thereby charging the powder and the powder flying means. And a powder supply unit for supplying the powder to the apparatus.

According to the above invention, the ions generated by the ion generating section are irradiated on the powder held in the powder supply section, and the powder is charged by the charge of the ions during the irradiation. The charged powder becomes cloud-like by obtaining kinetic energy by recoil of ion irradiation, and is supplied from the powder supply unit to the powder flying means.

As described above, since the powder is charged by the ion irradiation and supplied to the powder flying means, the powder is reliably charged to form a cloud shape suitable for the supply form, and the ion irradiation is applied to the powder. In this case, uniform charging and supply of the powder can be obtained.

As a result, it is possible to provide an apparatus for manufacturing a liquid crystal display element capable of stably charging and supplying powder.

According to a seventh aspect of the present invention, there is provided a liquid crystal display device manufacturing apparatus according to the sixth aspect, wherein the powder supply section is made of a conductive material. A powder reservoir which is an aggregate of the powder at a bottom portion, wherein the ion generating portion is provided on a side wall other than the bottom portion of the powder supply portion, and the powder supply portion is the ion generating portion. By irradiating the ions generated by the portion with the electric field formed between the ion generating portion and the bottom portion to the powder reservoir, the powder is charged and directed from the powder reservoir toward the powder flying means. It is characterized by being released.

According to the above invention, the powder supply unit is a container having a bottom made of a conductive material, and the ion generation unit is provided on a side wall other than the bottom of the powder supply unit. The ions generated by the ion generating unit are accelerated by an electric field formed between the ion generating unit and the bottom, and are irradiated to the powder pool held at the bottom. By this ion irradiation, the charged powder is released from the powder pool, and is supplied to the powder flying means in the form of a cloud.

As described above, since the powder pool is located on the acceleration trajectory of the ions generated by the ion generating section, the ions are efficiently irradiated onto the powder, and the powder is charged efficiently to form a cloud. be able to.

An eighth aspect of the present invention is directed to an apparatus for manufacturing a liquid crystal display device according to the sixth or seventh aspect.
In the apparatus for manufacturing a liquid crystal display element according to the above, the powder emitted from the powder reservoir of the powder supply unit and about to enter the ion generation unit is pushed back into the powder supply unit. A powder intrusion prevention member is provided.

According to the above invention, the powder discharged from the powder reservoir by ion irradiation may partially enter the ion generating section on the way to the powder flying means. Is pressed back into the powder supply unit by the powder intrusion prevention member.

Thus, it is possible to prevent the powder from adhering to the inside of the ion generating member and causing contamination.

According to a ninth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to the sixth to eighth aspects.
In the apparatus for manufacturing a liquid crystal display element according to any one of
The powder supply section is provided with a stirring member for stirring the powder reservoir.

According to the above invention, since the powder pool is agitated by the agitating member, the powder in the powder pool can be used evenly and the old powder can be prevented from remaining forever. A stable powder spraying process can be performed.

According to a tenth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to any one of the sixth to ninth aspects, wherein the powder supply unit is provided. In addition, a vibration member for providing vibration to the powder reservoir is provided.

According to the above-mentioned invention, by applying vibration to the powder reservoir, the upper surface of the powder reservoir can be flattened and the powder can be uniformly dispersed. Can be.

According to an eleventh aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to any one of the sixth to tenth aspects, wherein the powder supply unit is provided. A particle size detecting member for detecting a particle size of the powder supplied to the powder flying means.

According to the above invention, the particle diameter of the powder is detected before the powder is supplied to the flight control means, so that the particle diameter of the powder is controlled based on the detection result, or the desired particle diameter is controlled. By supplying the powder to the powder flying means only when it is obtained, a stable powder spraying process can be performed.

According to a twelfth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to any one of the sixth to eleventh aspects. And a particle concentration detecting member for detecting the particle concentration of the powder supplied to the powder flying means.

According to the above-mentioned invention, the particle concentration of the powder is detected before the powder is supplied to the powder flying means. By supplying the powder to the powder flying means only when is obtained, a stable powder dispersion process can be performed.

According to a thirteenth aspect of the present invention, there is provided a liquid crystal display element manufacturing apparatus according to any one of the sixth to twelfth aspects, wherein the powder supply unit is provided. And a remaining amount detecting member for detecting the remaining amount of the powder reservoir.

According to the above-mentioned invention, since the remaining amount of the powder pool can always be grasped, the powder is appropriately replenished from the outside based on the detection result of the remaining amount, so that the stable powder dispersion process can be performed. It can be performed.

According to a fourteenth aspect of the present invention, there is provided a liquid crystal display element manufacturing apparatus according to the thirteenth aspect, wherein the liquid crystal display element manufacturing apparatus is provided based on a detection result of the remaining amount detecting member. And a powder replenishing member for replenishing the powder into the powder supply unit.

According to the above invention, when the remaining amount of the powder pool is detected by the remaining amount detecting member, the powder replenishing member replenishes the powder to the powder supply unit so that the amount of the powder becomes a predetermined amount. . As described above, the powder supply to the powder supply unit is automatically performed, so that the efficiency of the powder dispersion process can be increased.

According to a fifteenth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display element according to the fourteenth aspect, wherein the powder replenishing member comprises And a transport unit that transports the powder in the storage unit to the powder supply unit.

According to the above invention, for example, a large amount of powder is stored in the storage unit, and the powder is conveyed from there to the powder supply unit by controlling the conveyance amount by the conveying unit. A stable powder spraying process can be performed over a long period of time.

According to a sixteenth aspect of the present invention, there is provided a liquid crystal display element manufacturing apparatus according to the fifteenth aspect.
It has a belt or a screw for conveying the powder.

According to the above-mentioned invention, when the carrying section has a belt, a large amount of powder can be carried at one time.
When the conveying section has a screw, the powder can be conveyed quantitatively without being scattered around.

According to a seventeenth aspect of the present invention, there is provided an apparatus for manufacturing a liquid crystal display device according to the fifteenth aspect, wherein the transport unit comprises:
A gas supply source for supplying a gas, and a pipe through which the gas flows from the gas supply source to the powder supply unit, wherein the gas is passed through the storage unit provided in the middle of the pipe to form the powder. Is transported.

According to the above-described invention, the gas supplied from the gas supply source to the pipe passes through the storage section to hold the powder on the way, and is then conveyed to the powder supply section. By using the gas in this way, the powder can be transported quantitatively and quickly.

In order to solve the above-mentioned problems, the method for manufacturing a liquid crystal display element according to the eighteenth aspect is to charge a powder to be a spacer of a liquid crystal layer, to fly the charged powder, In a method of manufacturing a liquid crystal display element that is sprayed on a liquid crystal display element on which a layer is formed, the element pattern of the liquid crystal display element is determined, and the powder is applied to the liquid crystal display element based on the determination result of the element pattern. It is characterized by being sprayed on a selected area.

According to the above invention, the element pattern is determined by reading the element pattern and performing image processing on the incoming liquid crystal display element, or receiving information on the element pattern from the outside. Then, based on the determination result, the powder is sprayed on a selected area on the liquid crystal display element, that is, a target area in the element pattern.

Therefore, the flying of the powder is controlled for each liquid crystal display element in accordance with the element pattern, so that the spacers are surely sprayed to a desired area on the liquid crystal display element by a highly versatile method. And a method of manufacturing a liquid crystal display element that can be used.

According to a nineteenth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the eighteenth aspect, wherein the black matrix is provided on the liquid crystal display device. , The element pattern is determined based on the read result, and the powder is sprayed on a region above the black matrix.

According to the above invention, the arrangement pattern of the black matrix of the liquid crystal display element is read and determined by, for example, an optical reading method. Then, based on the determined arrangement pattern of the black matrix, the powder is sprayed on the liquid crystal layer forming region located above the black matrix.

Therefore, the spacers can be accurately spread over the region above the black matrix, and a high quality display image can be obtained.

According to a twentieth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to the eighteenth or nineteenth aspect of the present invention, in order to solve the above-mentioned problem. The method is characterized in that the powder is selectively fly by application, and the powder is guided onto the liquid crystal display element by an electric field formed by applying a voltage to a predetermined portion on the liquid crystal display element side. I have.

According to the invention, a voltage corresponding to the element pattern of the liquid crystal display element is applied, and the powder selectively flies by this voltage. Further, an electric field is formed by applying a voltage to a predetermined position on the liquid crystal display element side,
The flying powder is guided to a predetermined area on the liquid crystal display element by this electric field and is dispersed.

Accordingly, the charged powder can be efficiently scattered to the target area on the liquid crystal display device.

According to a twenty-first aspect of the present invention, there is provided a method of manufacturing a liquid crystal display element according to the twentieth aspect of the present invention, wherein the powder on the liquid crystal display element is provided. The spraying state is read, and the applied voltage for selectively flying the powder in the subsequent spraying is changed based on the read result.

According to the above-described invention, the scattered state of the powder scattered on the liquid crystal display element is read. When the powder is displaced from a predetermined position as a result of reading the spraying state, the powder is dispersed on the liquid crystal display element based on the above reading result so that the powder is properly sprayed in subsequent spraying. Then, the voltage applied to fly the powder is changed.

As described above, by feeding back the scattered state of the powder, even if the scattered state deviates from a desired state, it can be properly corrected.

According to a twenty-second aspect of the present invention, there is provided a method of manufacturing a liquid crystal display element according to any one of the eighteenth to twenty-first aspects, wherein ions are generated. By irradiating the powder, the powder is charged and supplied.

According to the above-mentioned invention, the generated ions are irradiated on the powder, and the powder is charged by applying the charge of the ions during the irradiation. The charged powder is supplied in the form of a cloud by obtaining kinetic energy by recoil of ion irradiation.

As described above, since the powder is charged and supplied by the ion irradiation, the powder is reliably charged and formed into a cloud shape suitable for the supply mode, and the ion irradiation is uniformly performed on the powder. By doing so, uniform charging and supply of the powder can be obtained.

As a result, it is possible to provide a method of manufacturing a liquid crystal display element capable of stably charging and supplying powder.

According to a twenty-third aspect of the present invention, a method of manufacturing a liquid crystal display element according to the twenty-second aspect is to provide the method of manufacturing a liquid crystal display element according to the twenty-second aspect, wherein the powder particles are charged and supplied. It is characterized by detecting the diameter.

According to the above invention, the particle size of the powder is detected before the powder is supplied. Therefore, control is performed so as to obtain a desired particle size based on the detection result, or when the desired particle size is obtained. By supplying only powder, a stable powder spraying process can be performed.

According to a twenty-fourth aspect of the present invention, there is provided a liquid crystal display element manufacturing method according to the twenty-second or twenty-third aspect, wherein the powder is charged and supplied. It is characterized by detecting the particle concentration of the particles.

According to the above-mentioned invention, the particle concentration of the powder is detected before the powder is supplied. Therefore, the control is performed based on the detection result so that the desired particle concentration is obtained, or when the desired particle concentration is obtained. By supplying only powder, a stable powder spraying process can be performed.

According to a twenty-fifth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device according to any one of the twenty-second to twenty-fourth aspects of the invention. It is characterized in that the remaining amount of the powder is detected.

According to the above-mentioned invention, since the remaining amount of powder can always be grasped, the powder is appropriately replenished from the outside based on the detection result of the remaining amount, so that a stable powder spraying process can be performed. It can be carried out.

[0076]

[Embodiment 1] One embodiment of an apparatus and a method for manufacturing a liquid crystal display element according to the present invention will be described below with reference to FIGS.

FIG. 1 shows a cross-sectional structure of an apparatus 1 for manufacturing a liquid crystal display element (hereinafter referred to as a manufacturing apparatus). The manufacturing apparatus 1
It comprises a reading member 2, a powder charger 3, a powder control member 4, and a counter electrode 5, into which the liquid crystal display element L being manufactured is carried.

First, the liquid crystal display element L carried into the manufacturing apparatus 1 will be described with reference to FIG. The liquid crystal display element L is provided on a glass substrate 6 as shown in FIG.
, A black matrix 8, a transparent electrode 9, and an alignment film 10 are formed on the glass substrate 6, as shown in FIG. RGB color filter 7 ...
The black matrix 8 and the alignment film 10 are formed. In both figures, the vertical direction is the same as the liquid crystal display element L in FIG. When the liquid crystal display element L is viewed from below, a color filter 7 is formed by a black matrix 8 which is a shielding portion of a pixel as shown in FIG.
Are divided into image display areas provided with... By the manufacturing apparatus 1, as shown in FIG.
It is a feature of the present embodiment that the spacers are controlled so as to be accurately spread on the alignment film 10 located on the black matrix 8.

In FIG. 1, the reading member 2 reads an array pattern (element pattern) of the black matrix 8 of the liquid crystal display element L at the initial stage when the liquid crystal display element L is put into the manufacturing apparatus 1 and reads the information. This is given to the body control member 4. The powder charger (powder charging means) 3
At least one type of spacer is charged to a predetermined polarity and supplied to the powder control member 4. The spacer is a powder (fine particles) having a diameter (about 1 μm to 20 μm) corresponding to the thickness of the liquid crystal layer to be obtained.

The powder control member (powder flying means) 4 applies the spacer supplied from the powder charger 3 to the black matrix 8 based on the information given from the reading member (pattern discriminating means, reading means) 2. Upper alignment film 10
Is selectively caused to fly by an electric field. The powder control member 4 includes a plurality of electrodes 4a to which a voltage is applied, and a gate 4b through which a spacer passes at the center of each of the electrodes 4a. The counter electrode 5 is arranged so as to face the powder charger 3 via the powder control member 4, and forms an electric field for attracting the spacer between the counter electrode 5 and the powder control member 4.

In the manufacturing apparatus 1 having such a configuration, the liquid crystal display element L is transported in the direction of the arrow in FIG. 1, but at the initial stage, the reading member 2
Are sequentially read out. Next, when the liquid crystal display element L passes through the counter electrode 5, the electrode 4 of the powder control member 4 selected based on the information on the arrangement pattern read by the reading member 2.
a) is applied, and the spacer supplied from the powder charger 3 is caused to fly by an electric field formed between the powder charger 3, the powder control member 4, and the counter electrode 5, and the liquid crystal display element L Absorb on top. When a certain arrangement pattern passes through the counter electrode 5, the spacer flies based on the read information of the arrangement pattern, so that the spacer is accurately spread on the alignment film 10 above the black matrix 8.

The reading member 2 irradiates the liquid crystal display element L with light from a light source 12 such as a halogen lamp or a fluorescent lamp as shown in FIG.
The light can be condensed by an optical system such as 3 and detected by a sensor 14 such as a CCD or a photodiode. FIG. 4 shows an example of the configuration of an information transmission path for providing the powder control member 4 with the result of reading the arrangement pattern of the black matrix 8 by the reading member 2. On the information transmission path, an image processing member (pattern determining means) 15, an information source (pattern determining means) 17, and a voltage applying member (pattern determining means) 1 are provided downstream of the reading member 2.
In addition, an input member (pattern discriminating means) 16 is provided.

The array pattern information of the black matrix 8 read by the reading member 2 is subjected to image processing by the image processing member 15 and then input to the information source 17 where the voltage is applied by the powder control member 4. 4a ... is selected. The voltage applying member 18 is connected to the information source 17.
A voltage is applied to each electrode 4a of the powder control member 4 selected based on the output signal from. When the arrangement pattern of the black matrix 8 is known from the beginning,
As described above, the arrangement pattern information may be input from the input member 16 to the information source 17 without using the reading member 2.

Here, a method of applying a voltage to the electrodes 4a of the powder control member 4 by the voltage applying member 18 will be described. If a voltage is continuously applied, the spacers are continuously scattered on the black matrix 8 and are arranged on the black matrix 8 without gaps. However, in order to fulfill the spacer's original function of maintaining the thickness of the liquid crystal layer, it is not necessary for the spacers to be densely arranged over the entire surface of the black matrix 8, and it is sufficient if the spacers are dispersed at a certain interval. It is.

Therefore, as shown in FIG. 5 (a), it is preferable to apply a regular pulse-like voltage having a certain period to the electrodes 4a of the powder control member 4. That is, while the pulse is rising, the spacer flies by the powder control member 4 and is scattered at a predetermined position on the black matrix 8, and while the pulse is falling, the spacer is prevented from flying. By the rise of the next pulse, the liquid crystal display element L has moved to the next predetermined position. At this position, the spacer flies again and is scattered on the black matrix 8. Thus, the spacers are arranged at a certain interval as shown in FIG.

The flying amount of the spacer is shown in FIG.
As shown in FIG. 2, the voltage varies depending on the magnitude of the electric field formed between the powder control member 4 and the powder charger 3, and the electrodes 4a of the powder control member 4 as shown in FIG. It changes according to the pulse width of the applied voltage. Particularly preferable conditions for the flying amount are a region near the threshold value Eth and a range near the threshold value Wth where the spacer starts flying in both figures. Accordingly, the voltage applying member 18 can adjust the voltage waveform of FIG. 3A so that the electric field is near the threshold value Eth and the pulse width is near the threshold value Wth. Thereby, a necessary and sufficient amount of spacers can be arranged on the black matrix 8.

Next, the structure of the powder control member 4 will be described in detail with various forms.

FIG. 6 shows the configuration of the first embodiment of the powder control member 4. As shown in the figure, a plurality of ring-shaped electrodes 4a are arranged in a row in a direction orthogonal to the transport direction of the liquid crystal display element L (hereinafter referred to as the width direction of the liquid crystal display element L). Each electrode 4a is connected to a power supply unit 4c that is routed from the end of the powder control member 4 in parallel with the transport direction of the liquid crystal display element L. Each electrode 4a is connected to an individual power supply unit 4c. It is configured as a single drive system driven by power supply. In addition, the adjacent power supply unit 4
... alternately from the opposite end of the powder control member 4 to the electrode 4
a.

FIG. 7 shows an example of a cross-sectional configuration of the above-mentioned electrodes along the transport direction of the liquid crystal display element L. A ring-shaped electrode 4a is patterned on a base material 4e made of a resin such as polyimide, and cover layers 4f, 4f as insulating layers are provided above and below the electrode 4a. The cover layer 4f on the liquid crystal display element L side has an antistatic layer 4g for preventing the adhesion of the spacer and the charging of the powder control member 4, and the cover layer 4f on the powder charger 3 side has the adhesion of the spacer. Shield electrodes 4h for prevention are provided. These antistatic layer 4g and shield electrode 4
h may be provided as needed. In the center of the electrode 4a, a gate 4b through which a spacer passes is provided with a powder charger 3
The side is formed so that the opening diameter is larger than the liquid crystal display element L side. By forming the gate 4b in such a shape, the passage of the spacer becomes smooth.

However, if the powder control member 4 has the structure as it is, the electrodes 4a... And the power supply portions 4c... Therefore, the entire powder control member 4 is easily warped by the stress. Therefore, as shown in FIG. 6, a dummy electrode 4d is provided on the side opposite to the power supply section 4c with respect to each electrode 4a so that the manner of applying stress is uniform. The dummy electrode 4d has the same structure as the power supply unit 4c and does not contribute to power supply. In this manner, the powder control member 4 has a substantially symmetric structure with respect to a center line formed by connecting the centers of the electrodes 4a, and the stress is applied uniformly.

In order to more efficiently disperse the spacers, a plurality of rows of electrodes 4a... May be arranged in a direction perpendicular to the direction of transport of the liquid crystal display element L. FIG. Show. In this case, electrodes 4 facing each other between two rows
are not arranged on a straight line in the transport direction of the liquid crystal display element L, but are provided at positions slightly shifted from each other in the orthogonal direction. Therefore, the powder control member 4 is not completely symmetrical with respect to the center line, but the provision of the dummy electrode 4d at the center between the adjacent power supply portions 4c... be able to.

FIG. 9 shows the configuration of the second embodiment of the powder control member. This is a matrix drive system configuration in which a gate is provided at each intersection of a vertical power supply line and a horizontal power supply line, and the gates are driven collectively. The vertical power supply lines 4i adjacent to each other in a direction parallel to the transport direction of the liquid crystal display element L are provided so as to extend from the opposite ends of the powder control unit 4 to the flying spot of the spacer. And these vertical feeders 4
The horizontal power supply lines 4j which are orthogonal to all of i are provided, and gates 4b are provided at intersections. Further, as shown in FIG. 10, the vertical power supply lines 4i are provided so as to reach both ends of the powder control member 4 so as to prevent uneven stress from being applied to the powder control member 4, In other regions, dummy electrodes 4d (one in the figure) having the same structure as the horizontal power supply lines 4j are arranged in parallel with the horizontal power supply lines 4j and at the same interval as the distance between the horizontal power supply lines 4j. It is good to provide in.

FIG. 11 shows the configuration of the third embodiment of the powder control member 4. This is because the electrodes 4 move in the transport direction of the liquid crystal display element L.
A plurality of rows a are provided so that the spacers can be easily spread on the black matrix 8. The figure shows a case where there are four rows of electrodes 4a. The electrodes 4a in each column are arranged such that the gates 4b are sequentially shifted at intervals of d / 3 in the width direction of the liquid crystal display element L with respect to the electrodes 4a in the adjacent column. Here, d is the arrangement pattern width of the black matrix 8. That is, when viewed in the shift direction, the gates 4 of the four electrodes 4a.
The distance between both ends of b ... is d, which is equal to the arrangement pattern width of the black matrix 8.

The above arrangement is repeated periodically in the shift direction, so that four electrodes 4a... Are always located on the arrangement pattern of the black matrix 8 along the transport direction of the liquid crystal display element L. It has become.
In this manner, the spacers can be easily dispersed on the black matrix 8 by selecting an arbitrary one of the four electrodes 4a located opposite to the black matrix 8 and applying a voltage. it can. Although the above example is of the case of the single drive system, the above effects can be obtained also in the case of the matrix drive system by arranging the gates 4b in the same manner.

FIG. 12 shows the configuration of the fourth embodiment of the powder control member 4. This makes it possible to reduce the number of electrodes 4a by making the flight direction of the spacers in the gates 4b variable. As shown in the figure, a deflection electrode 4k divided in a semicircle is provided on the same surface as each electrode 4a or on the surface opposite to the base material 4e. As described above, when the spacer is caused to fly toward the black matrix 8 immediately above the selected electrode 4a.
A voltage may be applied only to a. When the black matrix 8 is at a position deviated from directly above the electrodes 4a, a voltage is applied to both the electrodes 4a and the deflection electrodes 4k to deflect the flying direction of the spacers, whereby the spacers are moved to target positions. Can fly. At this time, a voltage corresponding to the deflection angle is individually applied to each of the divided pieces of the deflection electrodes 4k. in this way,
Since the spacers can be made to fly from one gate 4b in various directions, the number of electrodes 4a can be reduced accordingly.

FIG. 13 shows the configuration of the fifth embodiment of the powder control member. This simplifies the configuration of the electrodes 4a and allows the spacers to be efficiently sprayed. As shown in the figure, the gate 4b is formed as one rectangular opening having a longitudinal direction in the width direction of the liquid crystal display element L. Further, flat electrodes 4a are provided at the tips of a plurality of power supply lines 4c extending from the ends to the two long sides of the gate 4b. Therefore, if such a powder control member 4 is used, the spacers can be collectively scattered in the arrangement pattern of the black matrix 8 facing the width direction of the liquid crystal display element L, so that the efficiency is high. Further, since only one gate 4b is required, the configuration of the electrodes 4a is simple.

FIG. 14 shows the configuration of the sixth embodiment of the powder control member 4. This is one in which the powder control member 4 of the matrix drive system shown in FIG. 9 is configured using wires. As shown in the figure, the electrodes 4a are composed of wires stretched vertically and horizontally, and the matrix-like regions surrounded by the wires are gates 4b. Wire is X in the figure
Each of the gate rows in the axial direction and each of the gate rows in the Y-axis direction are connected at an end of the powder control member 4 so as to be surrounded by one loop. For example, in order to drive the gate 4b in the region p in the same drawing, the loop M and the loop N may be turned on and a voltage may be applied.

In the single drive type powder control member 4 shown in FIGS. 6, 8 and 11, it is necessary to provide one drive element for one gate 4b, and m rows and Y rows in the X-axis direction.
If there are n columns of gates in the axial direction, a total of m × n
This required two driving elements. However, according to the matrix drive type powder control member 4 described above, if there are m + n drive elements, it is possible to control the drive / non-drive of all the gates 4b... can do.

Although the structure of the powder control member 4 in the first to sixth embodiments has been described above, the powder control member 4 in all of these embodiments can be applied to the following structures. FIG. 15 shows the electrode forming area 4 m of the powder control member 4.
For the dimension W1 along the width direction of the liquid crystal display element L
Is set to be equal to or more than the width W2 of the entire display area Lm of the liquid crystal display element L. With such a configuration, even if there is a slight variation between the liquid crystal display elements L, the entire area of the black matrix 8 always passes above the electrode forming area 4m. The spacers can be reliably spread over the entire surface.

FIG. 16 shows the powder control member 4 of FIG.
This is a cross-sectional configuration in which the electrode forming region 4m of the powder control member 4 has a size equal to or larger than the entire region of the liquid crystal display element L. With this configuration, the liquid crystal display element L is stopped with respect to the electrode forming region 4m, and the spacers can be collectively sprayed from the selected electrodes 4a over the entire surface of the liquid crystal display element L.

Next, a case will be described in which the information transmission path shown in FIG. 4 is changed so as to be compatible with the powder control members 4 having various structures represented by the first to sixth embodiments. . FIG. 17 shows a configuration in which a recognition member 19, a comparison member 20, and a deflection electrode voltage applying member 21 are added to the information transmission path of FIG. The recognition member (pattern discriminating means) 19 is composed of a CCD or the like, and recognizes an arrangement pattern of the gates 4b... Or the electrodes 4a.
The recognition result is input to the image processing member 15. The comparison member (pattern discriminating means) 20 compares the reading result of the reading member 2 and the recognition result of the recognition member 19 with the image processing member 15.
After the image processing is performed, the comparison is performed, and the comparison result is input to the information source 17 or the input member 16.

When the powder control member 4 has the deflecting electrodes 4k as in the fourth embodiment, the deflecting electrode voltage applying member (pattern discriminating means) 21 receives the deflecting electrode based on a signal from the information source 17. 4k... Are applied. With such a configuration, based on a comparison between the arrangement pattern of the black matrix 8 and the arrangement pattern of the gates 4b or the electrodes 4a of the powder control member 4,
The electrode at a desired position among the electrodes 4a of the powder control member 4 can be accurately selected.

An example of the processing flow in this case will be described below. As shown in the flowchart of FIG. 18, first, in S1, the arrangement pattern of the gates 4b... Or the electrodes 4a.
While the result is image-processed by the image processing member 15 in S2, the arrangement pattern of the black matrix 8 is read by the reading member 2 in S3, and the result is image-processed by the image processing member 15 in S4. Next, in S5, the comparison member 20 compares the image processing results of S2 and S4,
In S6, the comparison result is input to the information source 17 to generate a voltage application instruction signal.

Then, a voltage is applied by the voltage applying member 18 to the electrodes 4a... Selected based on the voltage application instruction signal from the information source 17 in S7, and the deflection electrodes 4k.
In step S8, a voltage is applied by the deflection electrode voltage applying member 21 to the deflection electrodes 4k... Selected based on the voltage application instruction signal from the information source 17. At this time, based on the comparison result of the comparison member 20, the voltage application member 18 or the deflection electrode voltage application member 21
or the voltage value or the pulse width of the voltage applied to the deflection electrodes 4k may be changed.

FIG. 19 is a flowchart showing a process for inputting a predetermined arrangement pattern of the black matrix 8 from the input member 16 in advance. S11 to S15
18 are the same as S1 to S5 in the flowchart of FIG. 18, but in S16, the comparison result of S15 is input to the input member 16, and the arrangement pattern of the predetermined black matrix 8 is corrected based on the comparison result. To be corrected. Next, in step S17, the correction result is input to the information source 17 to generate a voltage application instruction signal.
In S9, the same processing as S7 and S8 in the flowchart of FIG.

Next, a configuration in a case where an electric field is reliably formed between the powder control member 4 and the counter electrode 5 will be described. Specifically, the opposing electrode 5 is connected to each of FIGS.
, The transparent electrode 9 or the black matrix 8 of the liquid crystal display element L. When the counter electrode 5 is located outside the glass substrate 6 of the liquid crystal display element L, the transparent electrode 9 or the black matrix 8 which is a conductor is interposed between the powder control member 4 and the counter electrode 5, and When a voltage is applied to the control member 4 and the counter electrode 5, the potential of the transparent electrode 9 or the black matrix 8 becomes floating, and it becomes impossible to control the electric field. Therefore, the counter electrode 5
In this case, the transparent electrode 9 or the black matrix 8 which is closer to the powder control member 4 is used so that no conductor is interposed therebetween.

Then, as shown in FIG. 20A, in order to form a terminal portion Ln for applying a voltage from the outside to the transparent electrode 9 or the black matrix 8, these regions are formed on the liquid crystal display element L. Is larger than the display area Lm. FIG. 2B shows a cross-sectional configuration in the case where a transparent electrode 9 is used as the counter electrode 5. At least a part of the terminal portion Ln is held by a transport member 22 that transports the liquid crystal display element L, as shown in FIG. The transport member 22 includes a conductor 22a for establishing conduction with the transparent electrode 9, an outer peripheral portion 22b made of a conductive material or a semiconductive material and grounded to release static electricity, and insulates the conductor 22a from portions other than the transparent electrode 9. Composed of an insulator 22c. A voltage applying member 23 is connected to an end of the conductor 22a, and a voltage is applied to the transparent electrode 9 from this. Thereby, the flying electric field of the spacer is reliably formed between the powder control member 4 and the transparent electrode 9.

Next, a configuration will be described in which the spacers are surely adhered to the black matrix 8 when the spacers are scattered on the liquid crystal display element L by the method described above. Simply flying the spacer toward the liquid crystal display element L may cause the spacer to rebound and scatter on the surface of the liquid crystal display element L.
In order to prevent this, as shown in FIG. 21A, a spray member 24 is provided on a transport path upstream of the powder control member 4 to spray the liquid, and the liquid crystal display element L
Is applied on the black matrix 8 to make it easier to capture the spacer.

As the spray liquid, a quick-drying liquid such as chlorofluorocarbon or liquid nitrogen is suitable. In particular, a liquid made of chlorofluorocarbon is easy to use because it hardly damages the liquid crystal display element L and requires low cleanliness in the space where it is used. Since such a quick-drying liquid dries immediately after capturing the spacer, it does not adversely affect processes subsequent to the liquid crystal display element L, operation and display.

The mask 25 includes a flat base material 25a having openings 25b... Corresponding to the arrangement pattern of the black matrix 8 as shown in FIG.
a supporting member 25c for supporting the entirety from the back side. If such a mask 25 is used, the opening 2
The spray liquid can be applied only to the black matrix 8 through 5b..., And foreign substances such as dust can be prevented from adhering to places other than the black matrix 8.

Next, a case will be described in which the state of application of the spacers is read and fed back to the powder control member 4 to adjust the application conditions of the spacers. As shown in FIG. 22, on the downstream side of the transport path of the liquid crystal display element L, a scattered state reading member (pattern determining means, scattered state reading means) for reading the surface state (spacer arrangement state) of the liquid crystal display element L after the spacers are scattered. ) 26 is provided. The scattering state reading member 26 can have the same configuration as the reading member 2. The information read by the scattered state reading member 26 is input to the image processing member 15 on the information transmission path and subjected to each processing, and then the voltage application member 18 and the voltage application member 21 for the deflection electrode are applied.
When the spacers are not in the desired arrangement state, the subsequent voltage application conditions are changed.

The processing flow in this case will be described below.
First, the process of correcting the scatter position of the spacer will be described with reference to the flowchart of FIG. In S21, the arrangement pattern of the black matrix 8 and the positions of the scattered spacers are read by the scatter state reading member 26. The read information is stored in the image processing member 15 at S22.
Is input to the comparison member 20 after image processing. In S23, when the comparison member 20 determines that the displacement of the spacer with respect to the arrangement pattern of the black matrix 8 is not equal to or more than the predetermined value, the process ends, and when it is determined that it is equal to or more than the predetermined value. Performs one of the three processes of S24 to S26.

In S24, it is determined that the electrodes 4a... Selected in the powder control member 4 are not appropriate, and a signal for changing the electrodes 4a. Processing. S25
Corrects the deflection angle of the spacer by the deflecting electrodes 4k so that the spacers can be spread to the correct position. A signal for changing the voltage applied to the deflecting electrodes 4k. 21. In S26, it is determined that the arrangement pattern of the black matrix 8 previously input from the input member 16 to the information source 17 is not appropriate, and the predetermined arrangement pattern of the input member 16 is corrected and the information source 17
8 or a process of inputting to the deflection electrode voltage applying member 21.

Next, the processing for correcting the dispersion state of the spacer will be described with reference to the flowchart of FIG.
In S31, the dispersion state of the spacers on the black matrix 8 is read by the scatter state reading member 26.
The read information is input to the image processing member 15 in S32 and subjected to image processing, and then input to the comparison member 20. S
At 33, when the comparison member 20 determines that the dispersion state of the spacers is not equal to or greater than the predetermined specified value, the process ends. A signal for changing the voltage waveform (voltage value or pulse width) to be applied to the electrodes 4a of the control member 4 is input to the information source 17, and finally the flying amount of the spacer is adjusted.

By performing the above-described processing, even if the dispersal state of the spacer is shifted, it can be corrected appropriately.

Next, a case will be described in which, when the spacers cannot be sprayed at the predetermined position of the liquid crystal display element L, the spacers can be removed and the process can be re-sprayed. As shown in FIG. 25, a collection line 27 is provided from the carry-out side to the carry-in side of the manufacturing apparatus 1, and a cleaning member 28 for removing a spacer is disposed on the collection line 27. With respect to the liquid crystal display element L on which the spacers are scattered by the scatter portion 29 composed of the powder charger 3, the powder control member 4, and the counter electrode 5, the spacer is displaced from a predetermined position by the scatter state reading member 26 described above. When it is confirmed that the liquid crystal display element L has been sprayed on the place, the liquid crystal display element L is sent to the collection line 27, and after the spacer is removed by the cleaning member 28, the liquid crystal display element L is again carried into the manufacturing apparatus 1 and the spacer is sprayed. .

Various forms can be applied to the cleaning member 28. First, as shown in FIG. 26 (a), a gas is blown onto the liquid crystal display element L by a blowing portion 28a provided at the center to cause the spacer to fly up, and a suction portion 28b provided around the space and connected to a vacuum pump or the like. For suction. In the case of using the cleaning member 28, the efficiency of collecting the spacer is higher when the gas is blown in a pulsed manner at a certain time interval than when the gas is blown continuously.

In order to easily remove the spacer by weakening the adhesive force of the spacer to the liquid crystal display element L in advance, as shown in FIG.
And a quick-drying liquid such as chlorofluorocarbon or liquid nitrogen may be applied to the entire surface of the liquid crystal display element L in advance. Since the liquid is quick-drying, there is no adverse effect on the process, operation, and display of the liquid crystal display element L after the cleaning step.

Further, in order to prevent static electricity from being generated when the spacer is removed, the spacer may be scraped by the conductive brush 28c and sucked by the suction portion 28b as shown in FIG. Further, as shown in FIG. 5D, an AC or DC voltage may be applied to the conductive brush 28c from the power supply 28d, and the spacer may be sucked and removed by an electric field generated thereby. By providing the cleaning member 28 as described above, the spacer can be easily and reliably removed from the liquid crystal display element L.

Next, a description will be given of a case in which a defect is prevented from occurring in the liquid crystal display element L and the powder control member 4 due to static electricity. As shown in FIG. 27, a first static elimination member 31 that removes electricity from the liquid crystal display element L near the carry-in entrance of the liquid crystal display element L, and a liquid crystal display element L after the spacer is sprayed around the carry-out exit of the liquid crystal display element L. A second charge removing member 32 for removing charge and a third charge removing member 33 for removing charge of the powder control member 4 are provided. Then, each time a predetermined number of the liquid crystal display elements L are processed, for example, one by one, the charge is removed.

A soft X-ray static eliminator, an ultraviolet irradiation type neutralizer, or a corona discharge neutralizer can be applied to each neutralization member. In the case of a soft X-ray static eliminator, it is desirable to cover the entire apparatus with, for example, a vinyl chloride plate having a thickness of about 2 mm in order to prevent leakage of X-rays. In the case of an ultraviolet irradiation type static eliminator, Ce (cerium) -containing glass, an amorphous silicon oxide film (a-SiOx), an amorphous silicon nitride film (a
It is desirable to cover the periphery of the device with an ultraviolet absorbing member formed of a resin or the like on which a thin film such as -SiNx) is formed. In the case of a corona discharge static eliminator, it is desirable to supply an inert gas or the like to the ion generating section to reduce the generation of ozone.

As shown in FIG. 28, a surface potential detecting member 34 for detecting the surface potential of the powder control member 4 is provided.
The third control member 33 may remove the charge of the powder control member 4 based on the detection result. The surface potential detecting member 34 is movable in the direction of the arrow in the figure, and detects the surface potential over the entire surface of the electrode forming region 4m while moving. In this case, the process can be simplified because the powder control member 4 can be neutralized only when necessary. The flow of the process in this case is shown in the flowchart of FIG. In S41, the surface potential of the powder control member 4 is detected by the surface potential detection member 34. If the surface potential is not equal to or greater than the reference value in S42, the process is terminated. If the surface potential is equal to or greater than the reference value, the process proceeds to S43, where the third charge removing member 33 removes the charge from the powder control member 4.

Further, one static elimination member is configured to be movable,
If the first static eliminator 31, the second static eliminator 32, and the third static eliminator 33 are shared by being moved, the configuration of the manufacturing apparatus 1 can be simplified. FIG.
0 is a view of the manufacturing apparatus 1 configured as described above as viewed from above.
6 are provided. For example, from each of the points A, B, and C, the charge removing member 35 can move on the rails 36... In the direction perpendicular to the transport direction of the liquid crystal display element L.
Between the positions C, the liquid crystal display element L can be moved in parallel to the transport direction. In particular, B can be moved in the vertical direction (perpendicular to the paper) by a lifting member (not shown),
It is designed to approach and separate from the powder control member 4 of the spraying unit 29.

As shown in FIG. 31A, the static elimination member 35 includes heads 35a,..., A head support member 35b, and a static elimination member support member 35c. The plurality of heads 35a are attached to the head support member 35b, and are rotatable around the head support member 35b. As shown in FIG. 3B, the charge removing member supporting member 35c is provided with a rectangular opening 35d, and the charge is removed through the opening 35d.

Next, a case will be described in which the state of attachment of the spacer to the powder control member 4 is detected, and the spacer can be removed if necessary. As shown in FIG. 32, the above-described recognition member 19 functions as a monitor member that monitors the state of the spacer attached to the powder control member 4. Further, based on the monitoring result of the recognition member 19, a cleaning member 37 for a powder control member for removing the spacer attached to the powder control member 4 is provided. The cleaning member 37 for the powder control member can have the same configuration as the cleaning member 28 described above.

Further, as shown in the figure, at the time of cleaning, the cleaning member 37 for the powder control member sucks the spacer in the powder charger 3 or the liquid described later enters the powder charger 3. In order to prevent
A shielding member 38 such as a shutter is provided between the powder control member 4 and the powder charger 3. At the time of cleaning, the shielding member 38 is slid to the right side of the arrow to bring it into the closed state. In addition, it is more effective to perform the cleaning after removing the charge of the powder control member 4 by the third charge removing member 33 because the adhesion of the spacer is weakened. The recognition member 19, the powder control member cleaning member 37, and the third charge removing member 33 can be moved in the direction of the arrow as needed.

If the shielding member 38 is not provided, there is a possibility that suction of the spacer from the powder charger 3 may occur. Therefore, after the cleaning is completed, the powder charger 3 is driven for a predetermined time so as to return to a stable state. It is good to let.

The flow of the above cleaning process is shown in FIG.
Is shown in the flowchart of FIG. In S51, the amount of the spacer attached to the powder control member 4 is monitored by the recognition member 19, and in S52, the monitoring result is image-processed by the image processing member 15 and input to the comparison member 20. If the comparison member 20 determines in step S53 that the attached amount of the spacer is not equal to or larger than the specified value, the process ends. If it is determined that the spacer attachment amount is equal to or larger than the specified value, the process proceeds to step S54, and the third charge removing member 3
By 3, static elimination of the powder control member 4 is performed.

Next, when the shielding member 38 is not provided, the process proceeds to S55, where the powder control member 4 is cleaned by the powder control member cleaning member 37. When the shielding member 38 is provided, the process proceeds to S56, and waits until the shielding member 38 is closed.
Then, the powder control member 4 is cleaned by the powder control member cleaning member 37. By performing such processing, the powder control member 4 can always be driven stably.

The components of the manufacturing apparatus 1 described above are connected to the control unit 39 as shown in FIG.
All the operations of the above-described members are controlled by the control unit 39.

As described above, according to the apparatus and method for manufacturing a liquid crystal display element of the present embodiment, the arrangement pattern of the black matrix 8 of the liquid crystal display element L is read, and the spacer flies based on the information. As a result, the spacers can be surely sprayed at desired positions.

[Embodiment 2] Another embodiment of the apparatus and method for manufacturing a liquid crystal display element of the present invention is shown in FIG.
The following is a description based on FIGS.

The manufacturing apparatus of the present embodiment is similar to that of the first embodiment.
Is characterized in that the powder charger 3 is configured to stably and easily charge the spacer and supply it to the powder control member 4. The powder charger 3 can take several forms, which will be described below.

FIG. 35A shows a sectional configuration of the first embodiment of the powder charger 3. In the figure, the powder charger 3 includes a stirring chamber 51 and a charging chamber 52. Stir chamber 51
Has a predetermined amount of spacers stored therein, and a stirring roller 53 for stirring the spacers. The charging chamber 52 is partitioned by a stirring chamber 51 and a partitioning section 54, and a powder carrier 55 that frictionally charges the spacer and supplies the powder to the powder control member 4, and a spacer delivered from the stirring chamber 51 is a powder carrier. There are provided a supply roller 56 for supplying to the 55, and a blade 58 supported by the support 57 and for regulating the layer thickness of the spacer on the powder carrier 55. The stirring roller 53 in the stirring chamber 51
The spacer stirred by this is supplied to the charging chamber 52, and is supplied to the powder carrier 55 by the supply roller 56. The thickness of the spacer carried on the powder carrier 55 is regulated by the blade 58 with the rotation of the powder carrier 55, and a predetermined amount of electric charge is applied by frictional charging. When the charged spacer is carried to the uppermost part of the powder carrier 55 by the rotation of the powder carrier 55, it is supplied to the powder control member 4 there. In this way, the spacer can be stably and uniformly charged, and
The powder can be stably supplied to the powder control member 4 at a constant rate.

As shown in FIG. 13B, a blade 59 is provided so as to be in contact with the uppermost portion of the powder carrier 55.
It is even more preferred that a cloud of charged spacers be thereby formed. Forming a cloud of spacers weakens the adhesion between the spacer particles,
The powder control member 4 can fly the spacer with a low electric field.

Further, as shown in FIG. 36, instead of the powder carrier 55, a belt-shaped carrier 62 stretched around rollers 60 may be provided. The process of supplying the spacer to the belt-shaped carrier 62 and the process of charging are the same as in the case of the powder carrier 55. When the belt-shaped carrier 62 is used, the spacer can be supplied over a large area in addition to the effect of the powder carrier 55.

In the case of the powder carrier 55, since the portion facing the powder control member 4 has a curvature, a distribution occurs in the distance from this portion to the powder control member 4. Therefore, in order to make the spacer fly uniformly, the powder control member 4 must correct the magnitude of the applied voltage and the pulse width according to the distance. On the other hand, in the case of the belt-shaped carrier 62, if the portion where the belt is flat is made to be the portion facing the powder control member 4, the distribution does not occur in the distance. Is unnecessary. An auxiliary member 61 is provided on the belt-shaped carrier 62, and the electrode forming region 4 formed on the powder control member 4 is provided.
m. Powder carrier 5 described above
5 and the auxiliary member 61 are configured to be maintained at the ground potential or to be applied with an appropriate bias voltage as needed.

Next, FIG. 37 shows a sectional configuration of the second embodiment of the powder charger 3. FIG. 3 is a cross-sectional view when the powder charger 3 is cut along the transport direction of the liquid crystal display element L.
The powder charger 3 is roughly composed of an ion generator 63 and a powder supplier 64. The powder supply section 64 is a container having the same cross-section extending vertically to the paper surface (in the width direction of the liquid crystal display element L). The longitudinal direction is set to at least the width across the liquid crystal display element L in the width direction so that the spacer can fly over the entire area on the liquid crystal display element L.

As shown in the figure, an opening 64 from which a spacer is released is provided on an upper surface 64a facing the powder control member 4.
While b is provided, the bottom 64c has a spacer pool (powder pool) 65, which is an aggregate of spacers, and has a cylindrical surface at a predetermined height from the bottom. The bottom 64c is made of a metal such as Al
It is made of a conductive material such as tin oxide (SnO ₂ ) or ITO (Indium Tin Oxide) used as a transparent electrode, and is grounded.

A plurality of ion generators 63 are arranged on the side wall above the bottom 64c of the powder supply unit 64 so as to face each other at a predetermined height from the lowermost part of the powder supply unit 64. The ion generators 63... Are driven by the voltages applied from the power source E1 to discharge electrodes 63 in the house 63a.
The ions are generated by causing corona discharge or the like in b. The generated ions are accelerated by an electric field formed between the discharge electrode 63b and the bottom 64c of the powder supply unit 64, and are irradiated as ion flows F to the spacer pool 65.

As a result, the charged spacers are charged with ions from the spacer pool 65 to gain kinetic energy by the recoil of the ion irradiation and fly up, forming a cloud suitable for the supply mode and forming a powder supply unit. The material is conveyed to the powder control member 4 from the opening 64b. As described above, the spacer pool 6 on the acceleration trajectory of the ions generated by the ion generators 63.
Since 5 is located, ions are efficiently irradiated to the spacers, and the spacers can be efficiently charged to that extent to form a cloud.

Further, as described above, since the plurality of ion generators 63 are arranged so as to face each other on the side wall, the ion flow F to be irradiated becomes uniform in the powder supply unit 64. Further, since the bottom 64c of the powder supply unit 64 has a cylindrical surface, the electric field formed between the ion generating units 63 and the bottom 64c becomes uniform in the powder supply unit 64. Therefore, the uniformity of the charging of the spacer can be improved.

Since the powder supply section 64 may have various shapes other than those described above, the plurality of ion generation sections 63 can uniformly supply ions in accordance with the respective shapes. As described above, the powder supply unit 64 may be disposed so as to be uniformly dispersed on the side wall having a predetermined height from the lowermost portion. In addition, the bottom portion 64c of the powder supply unit 64 has a cylindrical surface from the lowermost portion to a predetermined height, but is not limited thereto, and may have a spherical surface.

In the powder charger 3 having the above-described structure, depending on the conditions, the cloud-shaped spacer enters the ion generators 63... From the powder supply unit 64 and adheres thereto, thereby causing contamination. However, there is a possibility that the function of the ion generators 63 may be reduced due to the progress. Therefore, in order to prevent such adverse effects, as shown in FIG.
A mesh-like member (powder intrusion prevention member) 63c is provided at a boundary between the ion generation unit 63 and the powder supply unit 64.

A bias voltage is applied to the mesh member 63c from the power source E2, and the charged spacer is pushed back into the powder supply section 64 by the electric field generated by the power supply E2, so that the ion generation section 63 is charged. Avoid intrusion. The polarity of the bias voltage is appropriately changed according to the charging polarity of the spacer. Because of the mesh shape, the ion generator 63 and the bottom 64 of the powder supply 64
c, and the ions generated in the ion generators 63 can pass through and reach the powder supply unit 64. At this time, an insulating member 63d is interposed between the mesh member 63c and the grounded house 63a to insulate both members.

Alternatively, the following method can be adopted to avoid the above problem. That is, FIG.
As shown in FIG. 9A, a blowing member (a powder intrusion preventing member) 66 is provided outside the ion generating section 63, and a gas is blown to the ion generating section 63 so that the spacer is not brought into the ion generating section 63. To The gas to be blown may be air, but Ar gas is used so that ozone is not generated.
(Argon), Ne (neon), He (helium), N
_It is desirable to use an inert gas such as ₂ (nitrogen) or Kr (krypton).

The gas supplied from a gas supply source (not shown) passes through the pipe 66a and enters the buffer member 66b. The buffer member 66b plays a role of a pressure buffer, and suppresses pressure fluctuation of the supplied gas. Buffer member 66b
A blowing member 66c that blows gas toward the ion generating section 63 is provided at the downstream end of the gas generating section. The blowing member 66c is a nozzle provided with a large number of openings 66d.

FIG. 17B is a view of the blowing member 66c viewed from the blowing direction. The opening diameters of the openings 66d become larger toward both ends, and the distance between the openings 66d becomes smaller. Is formed. With such a configuration, it is possible to prevent the blowing pressure at the central portion of the blowing member 66c from becoming larger than that at both ends, thereby enabling uniform blowing. The gas blown out from the blowing member 66c in this way reaches the inside of the ion generating section 63 from the window 63e provided in the house 63a, and blows off the spacer which is going to enter the ion generating section 63.

In the powder charger 3, as shown in FIG. 40A, in order to use the spacers of the spacer pool 65 of the powder supply unit 64 uniformly, as shown in FIG. A propeller-like stirring member 67 for stirring the spacer pool 65 may be provided on the side. The stirring member 67 is formed to be rotatable in proximity to the bottom 64c. By the stirring by the stirring member 67, the spacers can be used evenly regardless of the upper layer and the lower layer of the spacer pool 65, and the spacers that are not used forever can be prevented from remaining.

The stirring member 67 has a large number of openings 67a in the blade portion as shown in FIG. 13B, and when the spacers are stirred, a certain amount of the spacers are opened. To reduce the resistance. With such a configuration, the spacer pool 65 can be gently agitated, and unnecessary uncharged spacers can be prevented from rising.

Further, in the powder charger 3, the spacer pool 65 is not unevenly distributed in the powder supply unit 64.
As shown in FIG. 41, a vibration member 68 that generates ultrasonic vibration or the like may be provided outside the bottom 64c of the powder supply unit 64. As a result, the upper surface of the spacer pool 65 is flattened by the vibration in the powder supply unit 64, and the spacers are uniformly dispersed.

Next, FIG. 42 shows a sectional configuration of the third embodiment of the powder charger 3. As shown in FIG. The powder charger 3 includes a powder supply unit 6
4 so as to sandwich the upper space 64d in the particle size detecting member 7.
1. A particle concentration detecting member 72 and a calibration member 73 are provided. The flying spacer has an optimum particle diameter and particle concentration. However, the powder charger 3 detects the state of the spacer and feeds it back to the ion generator 63 to control the particle diameter and particle concentration. Is available.

An apparatus using a light scattering method or a light diffraction method can be applied to the particle diameter detecting member 71, and has a structure as shown in FIG. 43, for example. In the figure, a laser beam output from a laser oscillator 74 is scanned in a horizontal direction by a polygon mirror 77 and is incident on an incident area 71a. On the other hand, a part of the laser light is split by the beam splitter 75 and the intensity is monitored by the reference light detector 76.

A collimator lens 78 is provided in the incident area 71a.
Is provided, and the laser light that has become a parallel light beam passes through the monitor window 81, enters the space 64d, and is scattered or diffracted by the floating spacer.
The light reaches the light receiving area 71b through the monitor window 82. Since the light receiving area 71b is provided with a detector 79 including a light receiving element such as a photodiode array, each light receiving element receives laser light with an intensity corresponding to a scattering or diffraction pattern in accordance with scanning of the laser light. I do.

Therefore, the average particle diameter of the spacer is determined from the result and fed back to the ion generator 63.
If it is out of the specified range, the voltage of the power supplies E1 is changed so that the particle diameter falls within the specified range, and the ion generator 6
The output of 3 ... may be adjusted. The laser light is modulated to perform ON / OFF control, and the detector 79 turns ON the laser light.
It is also possible to perform detection in synchronization with / OFF. If continuous light is applied, the detector 79 is divided into a plurality of regions, whereby the particle size of each region can be detected and the dispersion state can be known.

The flow of the above processing is shown in the flowchart of FIG. First, in step S61, the scattering or the diffraction pattern of the laser beam by the spacer is detected by the detector 79, and the particle diameter is monitored. Next, in S62, the average value of the particle diameter monitoring results is calculated, and in S63, it is determined whether the average value is outside the specified range. If it is within the specified range, a desirable particle diameter has been obtained, so the flow returns to S61 to continue the particle diameter monitoring.
On the other hand, if it is outside the specified range, it is necessary to set the particle diameter to a value within the specified range, so the process proceeds to S64, in which the voltage of the power supplies E1 is changed to adjust the output of the ion generators 63.

Next, a device for measuring the concentration using the light transmission method can be applied to the particle concentration detecting member 72. For example, similarly to the above-described particle diameter detecting member 71, the one shown in FIG. Can be used. In this case, the detector 79 detects the diffraction intensity of the laser beam by the spacer, calculates the particle concentration of the spacer based on the result, and feeds it back to the ion generator 63.

The flow of this process is shown in the flowchart of FIG. First, in step S71, the intensity of the diffraction of the laser beam by the spacer is detected by the detector 39, and the particle concentration is monitored. Next, in S72, the average value of the particle concentration monitoring results is calculated, and in S73, it is determined whether the average value is outside the specified range.
If it is within the specified range, a desirable particle concentration has been obtained, so the flow returns to S71 to continue the particle concentration monitoring. On the other hand, if it is outside the specified range, it is necessary to set the particle concentration to a value within the specified range. Therefore, the process proceeds to S74, in which the voltage of the power source E1 is changed to adjust the output of the ion generating units 63.

If the particle diameter detecting member 71 and the particle concentration detecting member 72 have the same structure, the two members are combined into one, the particle diameter is obtained from the scattering or diffraction pattern of the laser light, and the particle diameter is obtained from the diffraction intensity. The concentration may be determined.

Next, the calibration member 73 will be described. This optically detects the state of the spacer in order to calibrate the particle diameter detection member 71 and the particle concentration detection member 72, and includes a light irradiation unit and a detection unit. A white light source such as a halogen lamp can be used as the light irradiating unit, and a configuration in which scanning and light irradiation are performed similarly to the particle diameter detecting member 71 may be employed. In this case, the light irradiation unit and the detection unit are arranged in the same direction. As the detection unit, for example, CCDs or the like arranged in an array in the horizontal direction are used. Then, light is applied to the spacer in the same area as the area detected by the particle diameter detecting member 71, the reflected light is measured, image processing is performed, and calibration is performed by comparing with the result obtained by the particle diameter detecting member 71. Do. Thereby, the particle diameter detecting member 71
Can be accurately calibrated.

A reflecting section in which a high-reflectance material such as Al is disposed on the side facing the light irradiating section via a spacer,
Alternatively, the white light source may be arranged to adjust the brightness of the observed spacer image.

Next, the calibration of the particle concentration detecting member 72 will be described. As a method of calibrating the particle concentration detecting member 72, a correlation between transmitted light or a change in diffraction intensity when the particle concentration is changed in advance and an image processing result in the calibration member 73 is obtained, and particles are supplied. And a method of performing calibration by comparing the measurement result with the correlation. Alternatively, instead of actually supplying the particles, standard particles may be used and photographic films recorded at various densities may be used.

The powder charger 3 is provided with a shielding member 80 for opening and closing the opening 64b of the powder supply section 64. When the detection result of the particle diameter detecting member 71 or the particle concentration detecting member 72 is out of the specified range, the particle diameter or the particle concentration of the spacer is not a desired value. It may not be done. Therefore, in such a case, the opening 64b is closed by the shielding member 80 so that the spacer is not supplied to the powder control member 4.

On the other hand, the detection results of the particle diameter detecting member 71 and the particle concentration detecting member 72 are fed back to the ion generating sections 63..., And after the particle diameter and the particle concentration of the spacer have reached the specified ranges, they fly over the spacer. Then, the shielding member 80 is moved to open the opening 64b. Then, a predetermined voltage is applied to the powder control member 4 according to the arrangement pattern of the black matrix 8. This makes it possible to always stably fly the spacer.

The flow of the above processing is shown in the flowcharts of FIGS. 46 and 47. FIG. 46 shows a case where the detection of the particle diameter and the particle concentration is processed in chronological order. In this process, it is assumed that the shielding member 80 is closed in advance. First, the particle size is monitored in S81, and S8
In step 2, the average of the detection results is calculated. If the average value is out of the specified range in S83, the process proceeds to S84, and the ion generation unit 63
After adjusting the output of ..., the process returns to S81. The output of the ion generators 63 is adjusted until the average value of the particle diameters falls within the specified range. When the average value of the particle diameters falls within the specified range, the process proceeds to S85 to monitor the particle concentration.

Next, the average value of the detection results is obtained in S86, and if the average value is out of the specified range in S87, the process proceeds to S88 to adjust the output of the ion generators 63. Ion generator 6
Since the average value of the particle diameter may be out of the specified range due to the adjustment of the output of No. 3, the process returns to S81, and the ion generating units 63 are controlled until the average values of the particle diameter and the particle concentration are within the specified range. Output adjustment is performed, and when both are within the specified ranges, the process proceeds to S89 and the shielding member 80 is opened. And
In S90, a signal is input to the powder control member 4.

As shown in FIG. 47, the detection of the particle diameter and the particle concentration may be performed simultaneously, and the processing of the detection result may be performed in parallel. Also in this processing, it is assumed that the shielding member 80 is closed in advance. Steps S91 to S97 are processing when the particle diameter or particle concentration is out of the specified range, and are the same as those in the flowcharts of FIGS. 44 and 45, respectively. If the average value of the particle diameters is within the specified range in S93, it is determined in S96 whether the average value of the particle concentration is within the specified range. If the values are both within the specified range, the process proceeds to S98, and the shielding member 80 is opened. Then, a signal is input to the powder control member 4 in S99. In the above description, the processing method in which the detection result of the particle diameter is first determined, and then the detection result of the particle concentration is referred to, but the order of the two may be reversed.

By the way, in the above-mentioned powder charger 3,
The monitor window 8 exposed on the space 64d side of the particle diameter detecting member 71, the particle concentration detecting member 72, and the calibration member 73.
.. 82 may be contaminated by the attachment of the spacers, so that a configuration that avoids such a problem may be adopted. For example, as shown in FIG. 48A, a particle diameter detecting member 71, a particle concentration detecting member 72,
, 82... Of the calibration member 73 are provided with opening and closing members 83 respectively.

Each opening / closing member 83 is movable in a direction perpendicular to the longitudinal direction of the powder supply section 64 (the direction of the arrow in FIG. 48A) and has a cleaning function. Monitor window 81
When the spacers adhered to... 82 are to be removed, the open / close members 83 that have been opened at the predetermined position and moved to the monitor windows 81. It is supposed to do. Further, the respective opening / closing members 83 can perform cleaning in conjunction with each other, or can perform cleaning individually.

As such an opening / closing member 83, for example, the one shown in FIG. This figure shows a case where the opening and closing member 83 is viewed from the longitudinal direction of the powder supply unit 64. The opening and closing member 83 includes a cleaning member 83a and a holding member 83b that holds the cleaning member 83a. The cleaning member 83a is made of a conductive or semiconductive brush material, an elastic rubber material, a foamed rubber material, or the like, and performs cleaning by contacting the monitor windows 81 ... 82. At this time, the cleaning member 83a is connected to an earth line so as not to be charged by static electricity.

The opening / closing member 83 is shown in FIG.
A configuration as shown in FIG. The opening / closing member 83 has a hollow passage 83e extending in the vertical and horizontal directions therein, a gas blowing portion 83c having a plurality of discharge holes 83f... Communicating from the hollow passage 83e to the surface, and a pipe for introducing gas into the gas blowing portion 83c. 83d. FIG. 7A is a plan view of the opening / closing member 83 as viewed from the gas blowing direction, and FIG.
FIG. 3 is a side view of the powder supply unit 64 viewed from the longitudinal direction.

The gas introduced from the pipe 83d passes through the hollow passage 83e of the gas blowing portion 83c, blows out from the discharge holes 83f, and blows off the spacers attached to the monitor windows 81,. Note that the opening diameter of the discharge holes 83f becomes larger as the distance from the center axis extension of the pipe 83d increases so that the pressure of the blown gas becomes as uniform as possible for all the discharge holes 83f.

As a timing for performing cleaning using the opening / closing member 83 having the above-described structure, a time when the process of flying the spacer is not performed is appropriate. For example, cleaning may be performed immediately before calibration of the particle diameter detection member 71 and the particle concentration detection member 72.

Particle Diameter Detector 71, Particle Concentration Detector 7
2 and the calibration member 73 perform detection and calibration using the optical method as described above, so that the monitor windows 81.
... directly affects the detection and calibration results. Therefore, when the manufacturing apparatus 1 is turned on, when the manufacturing apparatus 1 processes a predetermined number of liquid crystal display elements L, or when the manufacturing apparatus 1 starts processing the liquid crystal display elements L, a predetermined time has elapsed. Window 81 ...
It is preferable to inspect the degree of contamination of 82. As a method for this, a state in which the spacer is not supplied (the ion generator 6
3 is not driven), the transmitted light amount of the laser beam in the space 64d, the reflected light amount of the white light source, and the like are monitored, and the detection result can be compared with an initial value. At this time, the opening / closing members 83 are operated to operate the particle diameter detecting member 71, the particle concentration detecting member 72, and the calibration member 7.
Cleaning 3 may be performed.

After cleaning, the monitor window 81
.. 82 are performed a plurality of times, and the average value of the test results is compared with the initial value. If the difference between the two is outside the specified range, the particle diameter detecting member 71, the particle concentration detecting member 72, and the calibrating member 7
3 and at least one of the opening / closing members 83 of the respective members is displayed or warned that inspection should be performed. Thus, the abnormality of the particle diameter detecting member 71, the particle concentration detecting member 72, the calibration member 73, or the opening / closing members 83 thereof can be quickly and easily grasped and corrected, so that the spacer dispersing process is stabilized. Can be changed.

The flow of the process in this case is shown in the flowchart of FIG. Although the drawing shows the case of the particle concentration detecting member 72, the same processing may be performed for the case of the particle diameter detecting member 71 and the calibration member 73. First S
At 101, the particle concentration detecting member 72 is cleaned by the opening / closing members 83, and at S102, the monitor window 81 is opened.
Perform the inspection of 82 multiple times. Next, in S103, the average value of the inspection results is compared with the initial value, and it is determined whether or not the difference between the two is outside the specified range. If it is within the specified range, the process is immediately terminated. If it is out of the specified range, the process proceeds to S104, where the particle concentration detecting member 72 and the opening / closing member 8 of the particle concentration detecting member 72 are opened.
The processing is terminated after displaying or warning that at least one of 3.83 should be checked.

As described above, according to the powder charger 3 of the third embodiment, since the particle diameter detecting member 71, the particle concentration detecting member 72, and the calibration member 73 are provided, the particle diameter and the particle concentration of the spacer can be reduced. It can be controlled to a predetermined value.
Further, since a cleaning mechanism is provided for each of the particle diameter detecting member 71, the particle concentration detecting member 72, and the calibration member 73, it is possible to stably perform appropriate detection.

As described above, according to the manufacturing apparatus and the manufacturing method of the liquid crystal display element of the present embodiment, the powder charger is configured to charge and supply the spacer by the carrier or the ion irradiation. The spacer can be supplied stably and easily charged.

[Embodiment 3] The liquid crystal display element L of the present invention
Another embodiment of the manufacturing apparatus and the manufacturing method of the present invention will be described below with reference to FIGS. 51 to 77. For convenience of explanation, the first and second embodiments are described.
Components having the same functions as those shown in the drawings are denoted by the same reference numerals, and description thereof will be omitted.

The manufacturing apparatus of the present embodiment is similar to that of the first embodiment.
Alternatively, a configuration is added to the manufacturing apparatus 1 described in 2 in which the remaining amount of the spacer in the powder charger 3 is detected and the amount of the spacer can be kept constant by supplementing the necessary amount. is there. In the following, the configuration of the powder charger 3 of the second or third embodiment described in the second embodiment will be described as an example, but the configuration of the powder charger 3 of the first embodiment is also appropriately changed. It is applicable by doing.

As shown in FIG. 51, for example, the manufacturing apparatus 1 has a configuration in which a remaining amount detecting member 91 and a powder container 92 are added to the outside of the powder supply section 64 of the powder charger 3. The remaining amount detection member 91 detects the remaining amount of the spacer pool 65 in the powder supply unit 64. The powder storage unit (powder replenishing member) 92 replenishes the powder supply unit 64 with the spacer based on the detection result fed back from the remaining amount detection member 91 until the spacer reaches the reference amount. The powder container 92
Even if the spacers are not refilled, the detection result of the remaining amount is fed back to the ion generators 63, and the voltage of the power source E1 is changed to control the output of the ion generators 63 to a value corresponding to the remaining amount at that time. By doing so, stable supply of the spacer to the powder control member 4 can be continued.

Further, in the case where only the spacers accommodated in the powder accommodating section 92 are insufficient, a powder supply source (powder replenishing member) 93 storing a large amount of spacers is provided as shown in FIG. From this, a spacer can be supplied to the powder container 92. Further, in this case, FIG.
As shown in FIG.
The spacer can also be supplied directly from 3 to the powder supply section 64. In this case, in order to control the spacer amount of the spacer pool 65, the detection result of the remaining amount detection member 91 is fed back to the powder supply source 93.

In particular, in the configuration of FIG. 52, the powder container 92 absorbs the force of the spacer supplied from the powder supply source 93 to prevent the state inside the powder supply unit 64 from being disturbed. Of the role.

The remaining amount detecting member 91 is, for example, as shown in FIG.
As shown in FIG. 7, the upper surface of the spacer pool 65 is detected by passing a laser beam through the powder supply section 64. The laser beam emitted from the laser oscillator 94 has its beam diameter expanded by a beam expander 97 and is applied to a polygon mirror 98. Note that the intensity of the laser light is measured by receiving the laser light split by the beam splitter 95 by the reference light detector 96.

The laser beam having a width in the horizontal direction is scanned in the vertical direction with the rotation of the polygon mirror 98.
The collimator lens 99 converts the light into collimated light,
The window 102 provided on the side wall is vertically scanned. Window 10
During scanning vertically 2, the laser light passing above the upper surface of the spacer pool 65 passes through another window 103 facing the window 102, and is received by the detector 101 via the condenser lens 100. On the other hand, the laser light incident on the spacer pool 65 is blocked and attenuated here. Therefore, if the time during which the laser beam is blocked or transmitted during the time when the window 102 is scanned vertically is measured, for example, the distance from the reference points 104 and 104 provided on the windows 102 and 103 to the upper surface of the spacer pool 65 is measured. Since the distance can be calculated, the remaining amount of the spacer pool 65 can be detected.

Here, a shutter 106 to which a cleaning member 105 is attached is provided in the window 102 as shown in FIG. This shutter 106
Is opened when the remaining amount is detected by the remaining amount detecting member 91 as described above, and is closed at other times, and the cleaning is performed by the cleaning member 105 contacting the inner surface of the window 102. ing. Window 10
3 has the same configuration as the window 102.

When the remaining amount of the spacer is detected by the remaining amount detecting member 91 having such a structure, the detection result is compared with a reference value of the amount of the spacer. If the output of the source 93 is adjusted, the supply of the spacer can be stabilized.
After adjusting the output of the powder container 92 or the powder supply source 93, if the detection result is out of the specified range even if the remaining amount is detected a plurality of times, the powder container 92 may be used.
Alternatively, it is possible to quickly detect the depletion or abnormality of the spacer in the powder container 92 or the powder supply source 93 by displaying or alarming that the inspection of the powder supply source 93 should be performed. .

The process in this case is shown in the flowchart of FIG. First, in S111, the remaining amount of the spacer is detected by the remaining amount detecting member 91. Next, when the detection result is within the specified range when the detection result is compared with the reference value in S112, S1
Returning to step S11, the remaining amount detection is continued. If the remaining amount is out of the specified range, the process proceeds to step S113 to adjust the output of the powder container 92 or the powder supply source 93. Then proceed to S114,
The processes from S111 to S113 are repeated until the number N of output adjustments reaches the specified number K. If the predetermined number K has been reached, it is determined that an abnormality has occurred, and in S115, a message indicating that the powder container 92 or the powder supply source 93 should be checked is displayed or an alarm is issued.

A calibration member for calibrating the remaining amount detecting member 91 may be provided. As shown in FIG. 56A, a plate-like reference member 107 having openings 107a at predetermined intervals can be used as the calibration member. The reference member 107 is attached to the side wall of the powder supply unit 64 of the powder charger 3 and can be moved to the positions of the windows 102 and 103 by sliding during use. With the reference member 107 set in the windows 102 and 103, the laser beam of the remaining amount detecting member 91 is received through the openings 107a and the interval calculated from the time when the laser beam is blocked is determined by the interval between the windows 102 and 103. Calibration is performed by comparing the distance with the light shielding part.

Alternatively, as shown in FIG. 17B, a window 102 is formed by a liquid crystal cell 108 in which liquid crystal is injected between glass substrates.
103 may be configured to serve also as a calibration member.
In this case, the liquid crystal layer 109 is normally in a transmissive state, and a predetermined voltage is applied during calibration so that a predetermined area is in a light-shielded state (scattered state). For example, as shown in FIG. Is formed. In this case, the interval calculated from the laser light receiving time and the transmission area 10
9b may be compared. The pattern can be changed as appropriate. For example, a nematic liquid crystal is used as the liquid crystal, and its dynamic scattering mode can be used.

The above calibration is performed when the power of the manufacturing apparatus 1 is turned on, when the manufacturing apparatus 1 processes a predetermined amount of the liquid crystal display elements L, or after the manufacturing apparatus 1 starts processing the liquid crystal display elements L. This may be performed at a point in time when a predetermined time has elapsed. The calibration result is compared with the reference value as described above, and when the difference is out of the specified range, it is possible to display or warn that the remaining amount detecting member 91 should be inspected or replaced. In this manner, a change or abnormality in the detection sensitivity of the remaining amount detection member 91 can be detected and corrected at an early stage, so that the spacer dispersing process can be stabilized.

The flow of the process at this time is shown in the flowchart of FIG. First, in step S121, the remaining amount detection member 91 is calibrated as described above, and in step S122, it is determined whether the calibration result is out of the specified range. If it is within the specified range,
Since the remaining amount detecting member 91 is normal, the process ends immediately. If it is out of the specified range, the process proceeds to S123, and a display or warning prompting the inspection or replacement of the remaining amount detecting member 91 is performed, and the process ends.

The powder container 92 comprises, for example, a container 92a and a stirring chamber 92b as shown in FIG. A necessary amount of the spacer housed in the housing chamber 92a is sent to the stirring chamber 92b by the supply roller 110 at the boundary between the housing chamber 92a and the stirring chamber 92b. The detection result of the remaining amount is fed back to the driving source of the supply roller 110 from the above-described remaining amount detection member 91. When the supply roller 110 is driven based on this, the amount of the spacer to be sent to the stirring chamber 92b is reduced. Controlled. Stir chamber 92
In b, the spacer sent from the storage chamber 92 a is uniformly stirred by the stirring roller 111 and is supplied to the powder supply unit 64.

When a powder supply source 93 for continuously supplying a spacer to the powder container 92 for a long time is further provided as shown in FIG. 52, the storage chamber of the powder container 92 in FIG. The spacer is supplied to the powder supply source 92a from the powder supply source 93.

As shown in FIG. 59, for example, the powder supply source 93 mainly includes a storage section 121 and a belt (transport section) 1.
22. Storage unit 12
A large number of spacers are stored in 1, and the spacers that fall downward are transported to the powder supply unit 64 by being placed on a belt 122 stretched over rollers 123. Since the belt 122 is used, a large amount of spacers can be transported at one time.

In addition, above the belt 122 at a position near the conveyance start position, the regulating member 1 is spaced apart from the belt 122 by a predetermined distance.
24 are provided to regulate the thickness of the spacer to be conveyed. During the conveyance, a vibration member 125 that generates ultrasonic vibration or the like is provided so as to be in contact with the belt 122 so as to vibrate the belt 122 and the spacer, and the spacer is uniformly dispersed on the belt 122. A blowing member 126 is provided above the conveyance end position of the belt 122 so that the spacer can be easily separated from the belt 122 by blowing gas.

This figure shows a case where the spacer is supplied directly from the powder supply source 93 to the powder supply section 64. In such a configuration, the above-described remaining amount detection member 91 is provided.
May be fed back to, for example, the driving source of the rollers 123. The spacer may be supplied from the powder supply source 93 to the above-described powder container 92.

As shown in FIG. 60A, the powder supply source 93 may be mainly composed of a storage section 121 and a screw (conveyance section) 127. In this case, the spacer dropped from the storage unit 121 is conveyed to the powder supply unit 64 while drawing a spiral by the rotation of the screw 127. Since the screw 127 is used, the spacer is less likely to be scattered in the powder supply source 93, and highly reliable transport can be performed.

An auxiliary member 128 for receiving the transported spacer is located below the transport end position of the screw 127.
Are provided, and a vibration member 125 is attached to the back surface of the auxiliary member 128. A gas is blown by the blowing member 126 onto the spacer on the auxiliary member 128 to which the vibration is given by the vibration member 125, and is dropped into the powder supply unit 64. Further, a plurality of screws 127 may be provided in parallel according to the amount of the spacer to be conveyed, as shown in FIG.

FIG. 60A also shows a case where the spacer is directly supplied from the powder supply source 93 to the powder supply section 64. In such a configuration, the detection of the remaining amount detection member 91 is performed. The result may be fed back to the drive source of the screw 127, for example. The spacer may be supplied from the powder supply source 93 to the above-described powder container 92.

Although not shown, FIGS. 59 and 60
(A) A dispersion state monitor for monitoring the dispersion state of the spacers falling from the powder supply source 93 into the powder supply section 64 may be provided. The dispersion state monitor includes the particle diameter detection member 71 or the calibration member 7 described in the second embodiment.
3 can be applied. Thus, the dispersion state of the spacers can be known, so that it can be determined whether or not the spacers are supplied so as to be uniformly dispersed in the powder supply unit 64.

In addition, by comparing the detection result of the dispersion state monitor with a reference value prepared in advance, and adjusting the output of the powder supply source 93 when it is out of the specified range, the dispersion state of the spacer is corrected. be able to. The adjustment of the output is performed by adjusting the supply amount of the spacer from the storage unit 121,
The adjustment of the vibration intensity of 5 or the adjustment of the blowing pressure of the blowing member 126 is performed.

The processing at this time is shown in the flowchart of FIG. First, in step S131, the dispersion state of the spacer is monitored by the dispersion state monitor. Next, in step S132, the detection result is compared with the reference value. If the detection result is within the specified range, the process returns to step S131 to continue monitoring. If the detection result is out of the specified range, the process proceeds to step S133. Is adjusted and the process returns to S131.

Further, the powder supply source 93 supplies
A supply amount monitor for monitoring the supply amount of the spacer falling into the inside 4 may be provided. This supply monitor includes:
The weight of the spacer may be measured, or the particle concentration detecting member 72 described in the second embodiment may be applied.
Thus, it is possible to determine whether an appropriate amount of the spacer is supplied. In addition, by comparing the detection result of the supply amount monitor with a reference value prepared in advance and adjusting the output of the powder supply source 93 when the supply amount is out of the specified range, the supply amount of the spacer can be kept constant. Can be.

Even if the output of the powder supply source 93 is adjusted based on the detection result of the supply amount monitor, when the detection result of both monitors is compared again with the respective reference values a plurality of times, the detection result becomes within a specified range. If it is outside, the powder supply source 93
May have an error. Therefore, in such a case, it is preferable to display or warn that the powder supply source 93 should be checked so that it is easy to grasp the depletion of the storage unit 121 and the abnormality of the belt 122 and the screw 127.

The processing at this time is shown in the flowchart of FIG. First, in S141, the supply amount of the spacer is monitored by the supply amount monitor. Next, in step S142, the detection result is compared with the reference value.
Returning to step 1 and continuing the monitoring, if it is out of the specified range, proceed to S143 to adjust the output of the powder supply source 93. Thereafter, the process proceeds to S144, and the processes from S141 to S143 are repeated until the number N of output adjustments reaches the specified number K. When the specified number K has been reached, it is determined that an abnormality has occurred, and in S145, a message indicating that the powder supply source 93 should be inspected is displayed or a warning is issued.

[0207] The flowchart shown in the figure can be applied to the above-mentioned distributed state monitor. If the calibration of these two monitors is performed each time the power of the manufacturing apparatus 1 is turned on or each time the powder supply source 93 is inspected,
The spacer dispersing process can be stabilized and made more efficient.

Although the above-described powder supply source 93 has a configuration in which the spacers are transported by the belt 122 and the screw 127, a configuration in which the spacers are transported by gas as shown in FIG. 63 may be used instead. The powder supply source 93 shown in the figure includes a gas supply source 131, a storage unit 132, a pipe 13
3 and a head section 134. The spacer stored in the storage section 132 is a gas supply source (transport section) 13.
The gas supplied from 1 is carried in the pipe (transport section) 133. Since the gas is used as the carrier gas for the spacer, the spacer can be quickly supplied.

The head section 134 extends from the pipe 133 into the powder supply section 64, and discharges a spacer from a nozzle 134a provided at the tip thereof. Further, the head portion 134 is movable in the horizontal direction, and the spacer is uniformly supplied into the powder supply portion 64 by continuing to move during the supply of the spacer. In this case, based on a detection signal from the remaining amount detecting member 91, the gas supply source 131 turns ON / OFF the gas supply and the gas supply amount, and the storage unit 132 turns ON / OFF the spacer supply and the spacer supply. Control the amount. In addition, according to the powder supply source 93 having such a configuration, a discharge port 135 for discharging the supplied gas to the outside is provided on a side wall of the powder supply unit 64.

The method of transporting the spacer by gas in this way will be described in more detail with reference to FIG. As shown in the figure, a gas supply source 131 is disposed at the uppermost stream of the supply system, and a gas cylinder filled with an inert gas such as N ₂ or Ar, a compressor for supplying compressed air, or the like is applied. . The gas supply source 131 and the powder supply unit 64 are connected by a pipe 133, and a bypass 133a that branches off from the mainstream on the way is provided. Bypass 133
a storage section 132 is provided on the
When the gas flowing through 3a passes through the storage section 132, the gas including the spacers again joins the main stream.

In the middle of the pipe 133, the gas supply source 1
A flow regulator 136 such as a mass flow controller is provided immediately downstream of the supply port of the gas supply 31, and controls the flow rate of the gas supplied from the gas supply source 131. In addition, a pressure regulator 137 such as a valve or a regulator that is controlled to open and close is provided on the front side before entering the powder supply unit 64, and regulates the pressure of the gas including the spacer to a predetermined value. Also,
Downstream of the pressure regulator 137, a pressure gauge 138 for monitoring the pressure is provided.

The process of transporting the spacer having the above configuration will be described. The gas supplied from the gas supply source 131 into the pipe 133 based on the detection result from the remaining amount detection member 91 is first controlled by the flow controller 136 to control the flow rate. And sent downstream. On the way, part of the gas is bypass 1
After passing through the storage section 132 through the portion 33a, the space containing the amount of spacer based on the detection result from the remaining amount detection member 91 is included, and then merges with the mainstream gas. After the merging, the gas including the spacer further flows through the pipe 133, is adjusted to a predetermined pressure by the pressure adjuster 137, and is supplied to the powder supply unit 64.

The pressure regulator 137 and the powder supply unit 64
A particle size monitor (particle size detection member) 139 for monitoring the particle size of the spacer is provided between the two.
The degree of dispersion of the particle diameter of the spacer flowing into the powder supply unit 64 can be confirmed by the particle diameter monitor 139. As the particle size monitor 139, a measuring device using the light scattering method or the light diffraction method described above is used. The monitored degree of dispersion of the particle diameter is fed back to, for example, the flow controller 136, and is compared with a reference value to adjust the set value of the flow controller 136 when out of the specified range. That is,
The output of the powder supply 93 is adjusted. By controlling in this manner, the spacer can always be supplied with a particle size having a constant degree of dispersion.

The processing at this time is shown in the flowchart of FIG. First, in step S151, the degree of dispersion of the particle diameter of the spacer is detected by the particle diameter monitor. In step S152, the degree of dispersion is compared with the reference value. If the value is within the specified range, the process returns to step S151 to continue monitoring. If the value is outside the specified range, the process proceeds to step S153, and the output of the powder supply source 93 is adjusted. And S
Return to 151.

It is preferable to provide a particle diameter monitor calibrating member (not shown) for calibrating the particle diameter monitor 139 because the degree of dispersion of the particle diameter can be monitored stably. As a particle diameter monitor calibration member, for example, image processing of information obtained by a microscope or the like as described above,
An optical detection member that performs calibration based on a comparison with a result obtained by a particle size monitor can be considered. Thus, the particle size monitor 139 can be accurately calibrated. Also,
Calibration by the particle diameter monitor calibration member may be performed every time the power of the manufacturing apparatus 1 is turned on, each time the powder supply source 93 is inspected, after a predetermined amount of the liquid crystal display element L is processed in the manufacturing apparatus 1, or after a predetermined time has elapsed. Good.

Further, a configuration as shown in FIG. 66 can be added as required. For example, the pressure regulator 137
A first concentration monitor (particle concentration detection member) 140 is provided in a pipe 133 between the powder supply unit 64 and the powder supply unit 64.
The particle concentration of the spacer in the gas flowing into the inside can be ascertained. The first concentration monitor 140 is, for example, a tube 133 for monitoring the particle concentration of the spacer, which is made transparent, and the spacer flowing therethrough is irradiated with light from the outside to measure the transmittance to measure the concentration. Apparatus of the transmission method can be applied. The monitored particle concentration of the spacer is compared with a preset reference value and fed back to, for example, the flow regulator 136, and when the concentration is outside the specified range, the gas flow is adjusted. That is, the output of the powder supply source 93 is adjusted.

In such a configuration, the detection result of the remaining amount detecting member 91 is supplied to the supply of gas from the gas supply source 131 and the storage unit 1.
Used for ON / OFF control with supply of 32 spacers,
This is suitable when the detection result of the first density monitor 140 is used for controlling the spacer supply rate at that time. By performing such control, the spacer can always be supplied at a constant particle concentration. Even if the output of the powder supply source 93 is adjusted, if the result of concentration monitoring performed a plurality of times after that is out of the specified range in comparison with the reference value, the gas supply source 131 and the storage unit 132 are depleted. For example, since there is a possibility that an abnormality has occurred in the powder supply source 93, it is preferable to display or warn that the powder supply source 93 should be checked. Thereby, the abnormality of the powder supply source 93 can be quickly and easily known.

The process in this case is shown in the flowchart of FIG. First, in step S161, the particle concentration of the spacer is monitored by the first concentration monitor. Next, in step S162, the detection result is compared with a reference value.
The process returns to step 161 to continue monitoring, while if the value is outside the specified range, the process proceeds to step S163 to adjust the output of the powder supply source 93. Thereafter, the process proceeds to S164, and the processes from S161 to S163 are repeated until the number N of output adjustments reaches the specified number K. When the specified number K has been reached, it is determined that an abnormality has occurred, and in S165, a message indicating that the powder supply source 93 should be inspected is displayed or a warning is issued.

Also, the piping 13 before the pressure regulator 137
3 may be blocked by the spacer.
A vibration member 141 that applies vibration to prevent blockage may be provided. As the vibration member 141, a member that applies vibration to the pipe 133 by generating ultrasonic waves, a member that automatically applies an impact to the pipe 133 with a hammer, or the like can be used.

The vibrating member 141 may be always operated at the time of supplying the spacer in order to always prevent the pipe 133 from being blocked, or may be operated at a stage where the attachment of the spacer to the pipe 133 has progressed to some extent. In the latter case, the second step of measuring the spacer concentration adjacent to the vibration member 141 is performed.
A monitor result comparing member that controls the operation of the vibration member 141 by comparing the monitoring result (second monitoring result) of the density monitor 142 and the second density monitor 142 with the monitoring result (first monitoring result) of the first density monitor 140. 143 may be provided.

That is, the second monitor result is compared with the first monitor result by the monitor result comparing member 143,
If the first monitor result indicates that the density is lower than the specified range and lower than the second monitor result, the vibration member 14
It is determined that the supply capacity of the spacers has decreased due to the considerable amount of the spacers adhering to the pipe 133 provided with 1, and the vibration member 141 is operated.

Note that the first density monitor 140 and the second
By providing a calibration member for calibrating the density monitor 142, the reliability of the density monitor can be improved. As the calibration method, the same method as the above-described method for calibrating the particle concentration detecting member 72 provided in the powder charger 3 can be used. For example, as shown in FIG. 68, a laser beam emitted from a laser oscillator 144 as a light source is
After passing through, the beam diameter is expanded and collimated by the beam expander 148 to irradiate the spacer in the transparent pipe 133 of the powder supply source 93 without supplying the spacer. At this time, the amount of the supplied spacer is changed under predetermined conditions, and the transmitted light under each condition is collected by the light receiving lens 149 and measured by the detector 150. At this time, photographic films obtained by photographing spacers having various densities may be used. Since the emission intensity of the laser is divided by the beam splitter 145 and detected by the reference light detector 146, the intensity of the received light can be standardized.

By comparing the result of the measurement in this manner with the result of the previously measured calibration curve of the spacer supply amount and the transmittance, the first density monitor 14 is obtained.
Calibration of the zero and second density monitors 142 can be performed. In the above calibration, the state of adhesion of the spacer to the pipe 133 can be known by measuring the transmittance without supplying the spacer and comparing it with the initial value. The calibration by the calibration member is performed when the manufacturing apparatus 1 is powered on, when the powder supply source 93 is checked, after the manufacturing apparatus 1 processes a predetermined amount of the liquid crystal display elements L, or when the manufacturing apparatus 1 uses the liquid crystal display elements L. This may be performed when a predetermined time has elapsed from the start of the processing.

In the powder supply source 93 that transports the spacer by using gas, a configuration is described in which the gas is swirled in the pipe 133 so that the spacer does not easily adhere to the pipe 133. To generate a swirling flow, for example, as shown in FIG.
1 is a pipe 1 from behind obliquely to the direction of transport of the spacer.
Gas is supplied into 33. As shown in FIG. 70, a spiral groove 151 may be provided on the inner wall of the pipe.

Alternatively, as shown in FIG. 71 (a), a flat plate member 152 is provided so as to shield the upper right and lower left when the pipe 133 is viewed in the axial direction. Such a flat member 152
Is disposed and the gas is sent into the pipe 133, the gas, which is prevented from proceeding by the flat plate member 152, goes to the adjacent open space, and in the case of FIG. FIG. 2B shows a state in which the pipe 133 is viewed from above in the vertical direction, and the flat member 152 is provided so as to be inclined in the direction of transport of the spacer from the inner wall of the pipe toward the center. . The pressure loss of gas can be reduced by arranging the plate-like members 152 at an angle as described above.

If the gas that has passed through the plate member 152 continues to travel in the pipe 133 as it is, the swirl may be lost.
It is preferable to provide a plurality of such as D, E, F and G points at appropriate intervals. Further, the methods of forming the swirling flows shown in FIGS. 69 to 71 may be combined.

Next, the structure of the gas outlet 135 provided on the side wall of the powder supply section 64 will be described. More specifically, as shown in FIG. 72 (a), a bag filter, a HEPA filter, a ULP
A powder capturing member 153 made of one of the A filters or a combination thereof is provided. Since the spacer supplied to the powder charger 3 is transported by gas, the gas must be discharged to the outside from the exhaust port 135.
At that time, the spacer is captured by the powder capturing member 153 so that the spacer is not discharged together.

The powder charger 3 is provided with a pressure detecting member 154 for detecting the internal pressure by a pressure gauge 154b attached via a valve 154a.
The pressure is detected by setting a to the open state. In addition, the pressure gauge 154
b, a pressure calibration port 154 via a valve 154c.
d is provided, the valve 154a is closed, the valve 154c is open, and a gas at a standard pressure is introduced from the pressure calibration port 154d to thereby obtain a pressure gauge 154b.
Can be calibrated.

If the powder capturing member 153 is used for a long time,
The spacers cause clogging and poor gas passage. Therefore, a state monitor member for detecting the state of the powder capturing member 153 is provided. In the case of the figure, a flow rate detecting member 155 is provided as a state monitoring member via a valve 156 at the subsequent stage of the powder capturing member 153. The flow rate detecting member 155 detects whether the clogging of the powder capturing member 153 is out of the specified range by detecting the flow rate of the gas passing through the powder capturing member 153. The powder capturing member 153 is replaced according to a display, an alarm, or the like for replacing the body capturing member 153.

The flow rate detecting member 155 includes a valve 1
A flow rate calibration port 155b is provided through 55a, and the flow rate detection member 155 can be calibrated by introducing a standard flow rate gas from the flow rate calibration port 155b with the valve 156 closed and the valve 155a opened. Has become.

As shown in FIG. 23B, the optical detecting member 1 is provided on the side wall of the powder charger 3 facing the exhaust port 135.
57 is provided as a state monitor member, and the powder capturing member 15
The state of attachment of the spacer to 3 may be monitored by an optical system combining a lens system and a CCD.

Further, as shown in FIG. 73, a state monitor calibration member 158 for calibrating the optical detection member 157.
Is provided, the state monitor can be stably performed. The state monitor calibration member 158 is provided with a reference density member 158a serving as a state reference outside the window 64e on the side wall of the powder supply unit 64. Reference density member 158a
Is a black and white pattern or a pattern in which spacers are dispersed. The reference density member 158a can be replaced by opening and closing an opening / closing member 158c provided at an end of a surrounding wall 158b surrounding the pattern. .

The shutter 15 is provided inside the window 64e.
8d, the shutter 158d is opened when calibration is to be performed, and the optical detection member 15 is opened through the window 64e.
7, the reference density member 158a is observed, and the optical detection member 157 is calibrated based on whether a predetermined density is detected. In order to improve the efficiency and stability of the process, the calibration by the state monitor calibration member 158 may be performed every time the power of the manufacturing apparatus 1 is turned on or every time the powder capturing member 153 is replaced.

FIG. 74 is a flowchart showing the monitoring process performed by the two types of status monitor members. First, S1
At 71, the state of the powder capturing member 153 is monitored by the state monitoring member. In step S172, the monitoring result is compared with the reference value. If it is within the specified range, the process returns to step S171 to continue monitoring. If it is out of the specified range, the process proceeds to step S173, where the powder capturing member 153 is replaced.

The above is the description of the case where the spacer is directly supplied to the powder supply section 64 by gas. On the other hand, when the spacers are once supplied by gas to the powder container 92 as shown in FIG. 75 and then supplied into the powder supply unit 64 by the supply roller 157, as shown in FIG. After the exhaust port 158 is provided in the powder container 92, the above-described powder capturing member 153, flow rate detecting member 155, optical detecting member 157, and the like may be provided.

Next, the accommodating chamber 9 of the powder accommodating section 92 described above.
2a and a configuration in which the spacer of the storage section 132 of the powder supply source 93 can be easily replaced will be described. FIG.
6 (a), the powder accommodating portion 92 in which a spacer accommodated in the accommodating chamber 92a is housed in a cartridge 161 and is replaceable.
Is shown.

A frame 162 also serving as a side wall of the accommodation room 92a
Is formed so that the cartridge 161 is fitted. In the figure, a spacer 161 is filled in a space 161a surrounded by a broken line of the cartridge 161 and a frame 162 is formed.
The supply roller 161b provided on the cartridge 161 is engaged with a drive shaft (not shown) of the storage chamber 92a when the cartridge 161 is fitted. The supply port of the spacer is closed by a closing member 161c, and the supply port is opened by grasping the handles 161d and 161d and pulling out the closing member 161c before starting use of the cartridge 161.

When the cartridge 161 is used, the spacer is supplied from the supply port to the stirring chamber 92b by the rotation of the supply roller 161b. A handle 161e is provided at the center of the side surface of the cartridge 161 to facilitate handling when the cartridge 161 is attached to or detached from the frame 162.

[0239] Also, FIG.
An example is shown in which is fixed firmly to the frame 162.
In this example, a plurality of concave portions provided on the inner periphery of the frame 162 and a plurality of convex portions provided on the outer periphery of the cartridge 161 are fitted to each other as fitting portions 161f. In this case, in order to facilitate the alignment between the cartridge 161 and the frame body 162, the fitting portions 161f are formed such that the width thereof increases toward the outside of the accommodation chamber 92a.

Further, the cartridge 161 is inserted into the frame 162
Are fixed to the outer periphery of the cartridge 161 corresponding to them in a plurality of guide holes 162a provided in predetermined positions of the frame body 162 in such a manner as to be movable in the direction of the arrow. Are fitted into the plurality of fitting holes 161g. As a result, the cartridge 161 is
Firmly fixed to

As described above, the spacer is used for the cartridge 1
If it is housed in the storage chamber 61 so that it can be attached to and detached from the accommodation room 92a, the replacement of the spacer can be performed extremely easily, and the trouble that the spacer spills and contaminates the surroundings at the time of replacement can be avoided.

As shown in FIG. 77, the stirring member 16 for stirring the spacers in the cartridge 161 so that the supply of the spacers from the cartridge 161 becomes uniform.
4. Vibrating member 16 for applying vibration to cartridge 161
5, or a blowing member 166 that blows gas to the spacer supplied from the supply roller 161b to disperse the gas can also be provided.

In the same drawing, the cartridge 161
A dispersion state monitor for monitoring the dispersion state of the spacer supplied from the cartridge 161 may be provided in the vicinity of the supply port. The particle size detection member 71 or the calibration member 73 described in the second embodiment can be applied to the dispersion state monitor. The detection result of the dispersion state monitor is compared with a reference value prepared in advance, and when it is out of the specified range, the rotation speed of the stirring member 164 of the cartridge 161, the vibration intensity of the vibration member 165, or the rotation speed of the supply roller 161 b is changed. If the output is adjusted in this way, it is possible to easily detect an abnormality in the dispersion state of the spacer and correct it. The processing at this time is the same as that in the flowchart in FIG. 61 except that the powder supply source is replaced with a cartridge.

Further, the cartridge 161 is placed in the same location.
A supply amount monitor for monitoring the supply amount of the spacer supplied from the apparatus may be provided. This supply monitor includes:
A member for measuring the weight of the spacer or the particle concentration detecting member 72 described in Embodiment 2 can be applied. The detection result of the supply amount monitor is compared with a reference value prepared in advance, and the output of the cartridge 161 is adjusted when it is out of the specified range. This makes it possible to always supply a fixed amount of spacer by grasping the supply amount of the spacer.

If the detection result of the supply amount monitor is out of the specified range even after the output adjustment is repeated a plurality of times, there is a possibility that an abnormality has occurred in the cartridge 161 and it is displayed that the cartridge 161 should be inspected. Or be warned. The processing at this time is the same as that in the flowchart in FIG. 62 except that the powder supply source is replaced with a cartridge.

If the dispersion state monitor or the supply amount monitor is calibrated when the power of the manufacturing apparatus 1 is turned on or when the cartridge 161 is replaced or inspected, the spacer supply process can be stabilized and the efficiency can be improved. Can be.

Although the above-described cartridge 161 has been described as being applied to the accommodating chamber 92a of the powder accommodating section 92, the present invention is not limited to this.
The storage sections 121 and 132 can also be applied by appropriately adjusting the structure.

As described above, according to the apparatus and method for manufacturing a liquid crystal display element of the present embodiment, the remaining amount of the spacer in the powder supply section 64 of the powder charger 3 is detected. Since the necessary amount of spacer is replenished from the outside based on this result, a stable spacer dispersing process can be performed.

[0249]

As described above, the apparatus for manufacturing a liquid crystal display element according to the first aspect of the present invention comprises: a powder charging means for charging a powder serving as a spacer of a liquid crystal layer; A liquid crystal display element manufacturing apparatus having a powder flying means for flying the powder and spraying the liquid crystal display element on which the liquid crystal layer is formed, a pattern discriminating means for discriminating an element pattern of the liquid crystal display element. The powder flying means is configured to spray the powder to a selected area on the liquid crystal display element based on a result of the element pattern discrimination by the pattern discriminating means.

Therefore, the flying of the powder is controlled for each liquid crystal display element according to the element pattern.
There is an effect that it is possible to provide an apparatus for manufacturing a liquid crystal display element, which can reliably disperse spacers in a desired region on the liquid crystal display element by a highly versatile method.

In the apparatus for manufacturing a liquid crystal display element according to the second aspect of the present invention, as described above, in the apparatus for manufacturing a liquid crystal display element according to the first aspect, the pattern determining means is provided in the liquid crystal display element. It has a reading means for reading an array pattern of a black matrix and determines the element pattern based on a reading result by the reading means, and the powder flying means sprays the powder in a region above the black matrix. is there.

[0252] Therefore, the spacers can be accurately dispersed in the region above the black matrix, and an effect that a high quality display image is obtained can be obtained.

According to a third aspect of the present invention, as described above, in the liquid crystal display element manufacturing apparatus according to the first or second aspect, the powder flying means is based on the determination result. A plurality of electrodes for selectively flying the powder by applying a voltage to each of them, and forming an electric field between the powder flying means by applying a predetermined voltage, A counter electrode for guiding powder onto the liquid crystal display element is provided so as to face the powder flying means.

Therefore, there is an effect that the powder charged by the powder charging means can be efficiently scattered to the target area on the liquid crystal display element.

According to the apparatus for manufacturing a liquid crystal display element of the invention according to claim 4, as described above, in the apparatus for manufacturing a liquid crystal display element according to claim 3, the counter electrode is provided on the liquid crystal display element. The transparent electrode and the black matrix are arranged closer to the powder flying means.

Therefore, since no conductor is interposed between the electrode of the powder flying means and the counter electrode, the electric field for flying the powder can be surely formed.

According to a fifth aspect of the present invention, there is provided the liquid crystal display device manufacturing apparatus according to the third or fourth aspect, wherein the pattern determining means is provided on the liquid crystal display element. A configuration further comprising a scattered state reading means for reading the scattered state of the powder, and changing a voltage applied to each electrode of the powder flying means during the subsequent scattering based on a result of reading by the scattered state reading means. It is.

Therefore, by feeding back the powder scatter state to the electrode, even if the scatter state deviates from a desired state, it is possible to appropriately correct the scatter state.

According to a sixth aspect of the present invention, there is provided a liquid crystal display device manufacturing apparatus according to any one of the first to fifth aspects, wherein the powder charging means comprises an ion source. A powder supply unit for charging the powder and supplying the powder to the powder flying means by irradiating the powder held therein with ions generated by the ion generation unit; It is a structure which has.

Therefore, since the powder is charged by the ion irradiation and supplied to the powder flying means, the powder is reliably charged to form a cloud suitable for the supply form, and the ion irradiation is applied to the powder. In this case, the powder is uniformly charged and supplied.

As a result, it is possible to provide an apparatus for manufacturing a liquid crystal display element capable of stably charging and supplying powder.

According to a seventh aspect of the present invention, there is provided a liquid crystal display device manufacturing apparatus according to the sixth aspect, wherein the powder supply section is provided at a bottom portion made of a conductive material. A container that holds a powder reservoir that is an aggregate of the powder, wherein the ion generating unit is provided on a side wall other than the bottom of the powder supply unit, and the powder supply unit is generated by the ion generation unit; By irradiating the charged ions with the electric field formed between the ion generating portion and the bottom portion to the powder reservoir, the powder is charged and discharged from the powder reservoir toward the powder flying means. Configuration.

Therefore, since the powder pool is located on the acceleration trajectory of the ions generated by the ion generating unit, the ions are efficiently irradiated on the powder, and the powder is charged efficiently and the cloud is formed. This has the effect that it can be performed.

According to an eighth aspect of the present invention, there is provided the liquid crystal display element manufacturing apparatus according to the sixth or seventh aspect, wherein the ion generating section is provided with the powder supply section. And a powder intrusion preventing member that pushes the powder that is released from the powder reservoir and tries to enter the ion generating section back into the powder supply section.

Therefore, it is possible to prevent the powder from adhering to the inside of the ion generating member, thereby preventing the occurrence of contamination.

According to a ninth aspect of the present invention, in the liquid crystal display element manufacturing apparatus according to any one of the sixth to eighth aspects, the powder supply unit includes In this configuration, a stirring member for stirring the powder pool is provided.

Therefore, by stirring the powder pool, the powder in the powder pool can be used evenly and the old powder can be prevented from remaining forever. Is achieved.

According to a tenth aspect of the present invention, a liquid crystal display device manufacturing apparatus according to any one of the sixth to ninth aspects, wherein This is a configuration in which a vibration member that applies vibration to the powder reservoir is provided.

Therefore, by applying vibration to the powder reservoir, the upper surface of the powder reservoir can be flattened and the powder can be uniformly dispersed, so that a stable powder dispersion process can be performed. To play.

[0270] According to the apparatus for manufacturing a liquid crystal display element of the invention according to claim 11, as described above, in the apparatus for manufacturing a liquid crystal display element according to any one of claims 6 to 10, the powder supply unit may be provided with: In this configuration, a particle diameter detecting member for detecting the particle diameter of the powder supplied to the powder flying means is provided.

Therefore, since the particle diameter of the powder is detected before the powder is supplied to the flight control means, it is controlled based on the detection result so as to obtain a desired particle diameter, or when the desired particle diameter is obtained. By supplying only the powder to the powder flying means, there is an effect that a stable powder spraying process can be performed.

According to a twelfth aspect of the present invention, in the liquid crystal display element manufacturing apparatus according to any one of the sixth to eleventh aspects, the powder supply section comprises In this configuration, a particle concentration detecting member for detecting the particle concentration of the powder supplied to the powder flying means is provided.

Therefore, the particle concentration of the powder is detected before the powder is supplied to the powder flying means, so that the desired particle concentration can be controlled or the desired particle concentration can be obtained based on the detection result. By supplying the powder to the powder flying means only in the case, there is an effect that a stable powder spraying process can be performed.

According to a thirteenth aspect of the present invention, as described above, in the liquid crystal display element manufacturing apparatus according to any one of the sixth to twelfth aspects, the powder supply unit includes In this configuration, a remaining amount detecting member for detecting the remaining amount of the powder pool is provided.

Therefore, it is possible to constantly grasp the remaining amount of the powder accumulation, so that the powder can be appropriately replenished from the outside based on the detection result of the remaining amount, so that a stable powder dispersion process can be performed. It has the effect of being able to.

According to a fourteenth aspect of the present invention, there is provided a liquid crystal display device manufacturing apparatus according to the thirteenth aspect, wherein the powder remaining amount detecting member detects the powder based on the detection result of the remaining amount detecting member. In this configuration, a powder replenishing member for replenishing the body to the powder supply unit is provided.

Therefore, the powder is automatically replenished to the powder supply section, so that the powder dispersing process can be more efficiently performed.

According to a fifteenth aspect of the present invention, as described above, in the liquid crystal display element producing apparatus according to the fourteenth aspect, the powder replenishing member stores the powder. It is a configuration having a storage unit and a transport unit that transports the powder in the storage unit to the powder supply unit.

[0279] Therefore, if a large amount of powder is stored in the storage unit and the powder is conveyed to the powder supply unit by controlling the amount of conveyance by the conveyance unit, for example, the powder is stable for a long time. There is an effect that a powder spraying process can be performed.

[0280] According to the apparatus for manufacturing a liquid crystal display element of the invention according to claim 16, as described above, in the apparatus for manufacturing a liquid crystal display element according to claim 15, the transporting section comprises a belt or a belt for transporting the powder. This is a configuration having a screw.

Therefore, when the transport section has a belt, a large amount of powder can be transported at once, and when the transport section has a screw, the powder can be transported quantitatively without being scattered around. It has the effect that it can be done.

According to a seventeenth aspect of the present invention, in the apparatus for manufacturing a liquid crystal display element according to the fifteenth aspect, the transport unit includes a gas supply source for supplying a gas. A pipe through which the gas flows from the gas supply source to the powder supply section, and the powder is conveyed by passing the gas through the storage section provided in the middle of the pipe.

Therefore, the use of gas has an effect that the powder can be transported quantitatively and quickly.

In the method for manufacturing a liquid crystal display element according to the eighteenth aspect of the present invention, as described above, the powder serving as the spacer of the liquid crystal layer is charged, and the charged powder is caused to fly to form the liquid crystal layer. In the method for manufacturing a liquid crystal display element to be sprayed on the liquid crystal display element, the element pattern of the liquid crystal display element is determined, and the powder is selected on the liquid crystal display element based on the determination result of the element pattern. It is a configuration to spray.

Therefore, the flying of the powder is controlled for each liquid crystal display element according to the element pattern.
There is an effect that it is possible to provide a method of manufacturing a liquid crystal display element in which spacers can be surely spread to a desired region on the liquid crystal display element by a highly versatile method.

According to the method of manufacturing a liquid crystal display element of the invention according to claim 19, as described above, in the method of manufacturing a liquid crystal display element of claim 18, the arrangement pattern of the black matrix provided in the liquid crystal display element is changed. Is read, the element pattern is determined based on the read result, and the powder is sprayed on an area above the black matrix.

Therefore, it is possible to accurately disperse the spacers in the region above the black matrix, and it is possible to obtain a high quality display image.

According to a twentieth aspect of the present invention, as described above, in the method of manufacturing a liquid crystal display element according to the eighteenth or nineteenth aspect, by applying a voltage based on the result of the determination, Selectively fly powder,
Further, the structure is such that the powder is guided onto the liquid crystal display element by an electric field formed by applying a voltage to a predetermined portion on the liquid crystal display element side.

Therefore, there is an effect that the charged powder can be efficiently sprayed to a target area on the liquid crystal display element.

According to the method for manufacturing a liquid crystal display element of the invention according to claim 21, as described above, in the method for manufacturing a liquid crystal display element according to claim 20, the dispersion state of the powder on the liquid crystal display element is changed. It is a configuration in which the applied voltage for selectively flying the powder in the subsequent spraying is changed based on the reading and the reading result.

[0291] Therefore, by feeding back the scattered state of the powder, even if the scattered state deviates from a desired state, it is possible to appropriately correct the scattered state.

According to the method of manufacturing a liquid crystal display device of the invention according to claim 22, as described above, in the method of manufacturing a liquid crystal display device according to any one of claims 18 to 21, ions are generated to produce the powder. The powder is charged and supplied by irradiating the powder.

Therefore, since the powder is charged and supplied by the ion irradiation, the powder is surely charged to form a cloud suitable for the supply mode, and the ion irradiation is uniformly performed on the powder. By doing so, uniform charging and supply of the powder can be obtained.

As a result, it is possible to provide a method of manufacturing a liquid crystal display element capable of stably charging and supplying powder.

According to the method for manufacturing a liquid crystal display element of the invention according to claim 23, as described above, in the method for manufacturing a liquid crystal display element according to claim 22, the particle diameter of the powder to be charged and supplied is detected. It is a configuration to do.

Therefore, the particle diameter of the powder is detected before the supply, so that the particle diameter is controlled based on the detection result so that the desired particle diameter is obtained, or the powder is removed only when the desired particle diameter is obtained. By supplying the powder, there is an effect that a stable powder spraying process can be performed.

According to a twenty-fourth aspect of the present invention, in the method for manufacturing a liquid crystal display element according to the twenty-second or twenty-third aspect, the particle concentration of the powder supplied by charging is provided. Is detected.

Therefore, since the particle concentration of the powder is detected before the supply, the control is performed so that the desired particle concentration is obtained based on the detection result, or the powder is only detected when the desired particle concentration is obtained. By supplying the powder, there is an effect that a stable powder spraying process can be performed.

According to a twenty-fifth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display element according to any one of the twenty-second to twenty-fourth aspects, wherein the powder is charged and supplied. This is a configuration for detecting the remaining amount of the battery.

Therefore, since the remaining amount of the powder can be always grasped, a stable powder dispersing process can be performed by appropriately replenishing the powder from the outside based on the detection result of the remaining amount. This has the effect.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a configuration of an apparatus for manufacturing a liquid crystal display element according to an embodiment of the present invention.

2 (a) and 2 (b) are cross-sectional views showing a configuration of a liquid crystal display element on which spacers are scattered in the apparatus for manufacturing a liquid crystal display element of FIG. 1, and FIG. 2 (c) is a sectional view of (a) and (b). FIG. 3D is a plan view showing the configuration of a black matrix and a color filter, and FIG. 4D is an explanatory view showing a state in which spacers are scattered in accordance with the arrangement pattern of the black matrix in FIG.

FIG. 3 is a cross-sectional view illustrating a configuration of a reading member in the apparatus for manufacturing a liquid crystal display element of FIG.

FIG. 4 is an explanatory diagram showing an information transmission path from a reading member to a powder control member in the apparatus for manufacturing a liquid crystal display element of FIG.

5A is a waveform diagram showing a voltage applied to an electrode of the powder control member, and FIGS. 5B and 5C are graphs showing a relationship between the voltage waveform of FIG. is there.

FIG. 6 is a plan view showing a configuration of a first embodiment of the powder control member.

FIG. 7 is an explanatory diagram showing a cross-sectional configuration near an electrode of the powder control member of FIG. 6;

FIG. 8 is a plan view showing a configuration of a modification of the powder control member of FIG. 6;

FIG. 9 is a plan view showing a configuration of a second embodiment of the powder control member.

FIG. 10 is a plan view showing a configuration of a modification of the powder control member of FIG. 9;

FIG. 11 is a plan view showing a configuration of a third embodiment of the powder control member.

FIG. 12 is a plan view showing a configuration of a fourth embodiment of the powder control member.

FIG. 13 is a plan view showing a configuration of a fifth embodiment of the powder control member.

FIG. 14 is a plan view showing a configuration of a sixth embodiment of the powder control member.

FIG. 15 is an explanatory diagram showing an example in which the width of the electrode forming region of the powder control member is configured to be larger than the width of the display region of the liquid crystal display element.

FIG. 16 is an explanatory view showing an example in which the area of the electrode forming region of the powder control member is configured to be larger than the area of the display region of the liquid crystal display element.

FIG. 17 is an explanatory diagram showing an information transmission path to a powder control member when a recognition member is added to the liquid crystal display element manufacturing apparatus of FIG. 1;

18 is a flowchart illustrating an example of a process of transmitting information via the information transmission path in FIG.

FIG. 19 is a flowchart illustrating another example of a process of transmitting information via the information transmission path in FIG. 17;

FIGS. 20A and 20B are explanatory diagrams showing an example in which a transparent electrode is used as a counter electrode.

21A is an explanatory view showing a configuration in which a spraying member is added to the apparatus for manufacturing a liquid crystal display element in FIG. 1, and FIG. 21B is a plan view showing a configuration of a mask used together with the spraying member in FIG. FIG.

FIG. 22 is an explanatory diagram showing an information transmission path to a powder control member when a scattered state reading member is added to the liquid crystal display element manufacturing apparatus of FIG. 1;

FIG. 23 is a flowchart illustrating an example of a process of transmitting information via the information transmission path in FIG. 22.

24 is a flowchart illustrating another example of a process of transmitting information via the information transmission path in FIG.

FIG. 25 is an explanatory view showing a configuration in a case where a cleaning member is added to the liquid crystal display element manufacturing apparatus of FIG. 1;

26 (a) to (d) are cross-sectional views showing specific examples of the cleaning member of FIG. 25.

FIG. 27 is an explanatory diagram showing a configuration in a case where each static elimination member is added to the liquid crystal display element manufacturing apparatus of FIG. 1;

FIG. 28 is an explanatory diagram showing a configuration in a case where a surface potential detecting member is added to the liquid crystal display element manufacturing apparatus of FIG. 27;

FIG. 29 is a flowchart illustrating a process of removing electricity using the liquid crystal display element manufacturing apparatus of FIG. 28.

FIG. 30 shows a liquid crystal display device manufacturing apparatus shown in FIG.
It is explanatory drawing which shows the example which comprised the static elimination member movable.

31A is a cross-sectional view showing the configuration of the charge removing member of FIG. 30, and FIG. 31B is a plan view of FIG.

FIG. 32 is an explanatory view showing a configuration in a case where a cleaning mechanism for a powder control member is added to the liquid crystal display element manufacturing apparatus of FIG. 1;

FIG. 33 is a flowchart illustrating a process of performing cleaning using the cleaning mechanism of FIG. 32;

FIG. 34 is an explanatory diagram showing a connection relationship between a control unit and each member in all the above-described liquid crystal display element manufacturing apparatuses.

35A is a cross-sectional view illustrating a configuration of a first embodiment of a powder charger, and FIG. 35B is a cross-sectional view illustrating a configuration of a modification of the powder charger of FIG.

FIG. 36 is a cross-sectional view showing a configuration of a modification of the powder charger of FIG. 35 (a).

FIG. 37 is a cross-sectional view illustrating a configuration of a second embodiment of the powder charger.

FIG. 38 is a cross-sectional view showing a configuration in a case where a mesh-like member is provided in an ion generation section in the powder charger of FIG. 37.

39 (a) is a cross-sectional view showing a configuration in which a blowing member is provided in an ion generation section in the powder charger of FIG. 37, FIG.
(B) is a front view of the blowing member of the blowing member.

40A is a cross-sectional view illustrating a configuration in which a stirring member is provided in a powder supply unit in the powder charger in FIG. 37;
(B) is a perspective view of the stirring member.

41 is a cross-sectional view illustrating a configuration in which a vibration member is provided in a powder supply unit of the powder charger of FIG. 37.

FIG. 42 is a cross-sectional view illustrating a configuration of a third embodiment of the powder charger.

43 is a cross-sectional view illustrating a configuration of a particle diameter detection member in the powder charger of FIG.

FIG. 44 is a flowchart illustrating a process of controlling a particle size using a particle size detection member in the powder charger of FIG. 42;

FIG. 45 is a flowchart illustrating a process of controlling a particle concentration using a particle concentration detection member in the powder charger of FIG. 42;

FIG. 46 is a flowchart illustrating an example of a process in which the shielding member in the powder charger in FIG. 42 is used for controlling the particle diameter and the particle concentration.

FIG. 47 is a flowchart illustrating another example of the process of using the shielding member in the powder charger of FIG. 42 for controlling the particle diameter and the particle concentration.

48A is a cross-sectional view showing a configuration in which an opening / closing member is provided in the powder charger of FIG. 42, and FIG. 48B is a cross-sectional view showing a configuration of an example of the opening / closing member.

FIG. 49 (a) is a plan view showing the configuration of another example of the opening / closing member, and FIG. 49 (b) is a side view of FIG.

50 is a flowchart illustrating a process of inspecting a monitor window in the powder charger of FIG. 42 by taking a particle concentration detection member as an example.

FIG. 51 is a cross-sectional view illustrating a configuration of a third embodiment of the powder charger.

FIG. 52 is a cross-sectional view showing a configuration of a modification of the powder charger of FIG. 51.

FIG. 53 is a cross-sectional view showing a configuration of another modification of the powder charger of FIG. 53;

54A is a cross-sectional view showing a configuration of a remaining amount detecting member in the powder charger of FIGS. 51 to 53, and FIG. 54B is an enlarged view of a part of the remaining amount detecting member of FIG. It is sectional drawing.

FIG. 55 is a flowchart illustrating a process of detecting the remaining amount by the remaining amount detecting member in FIG. 54;

56 (a) and (b) are plan views showing a configuration of a calibration member of the remaining amount detection member of FIG. 54.

FIG. 57 is a flowchart illustrating a process of calibrating the remaining amount detecting member in FIG. 54.

FIG. 58 is a cross-sectional view showing a configuration of the powder container of FIGS. 51 and 52.

FIG. 59 is a sectional view showing an example of the configuration of the powder supply source of FIGS. 52 and 53.

60 (a) and (b) are FIGS. 52 and 53
FIG. 6 is a cross-sectional view illustrating another example of the configuration of the powder supply source of FIG.

FIG. 61 is a flowchart showing an example of a process of monitoring the state of the powder supply source in FIGS. 59 and 60.

FIG. 62 is a flowchart showing another example of the process of monitoring the state of the powder supply source in FIGS. 59 and 60.

FIG. 63 is a sectional view showing still another example of the configuration of the powder supply source of FIGS. 52 and 53.

FIG. 64 is a cross-sectional view showing the configuration of the powder supply source of FIG. 63 in further detail.

65 is a flowchart illustrating a process of monitoring a particle diameter using the powder supply source of FIG. 64.

FIG. 66 is a cross-sectional view showing a configuration of a variation of the powder supply source of FIG. 64.

FIG. 67 is a flowchart illustrating a process of monitoring particle concentration by the powder supply source of FIG. 66.

FIG. 68 is a cross-sectional view showing calibration of a calibration member of each monitor in the powder supply source of FIG. 66.

FIG. 69 is a cross-sectional view showing a configuration of a powder supply source when a swirling flow of gas occurs in a pipe.

70 is a sectional view showing a modification of the powder supply source of FIG. 69.

71 (a) and (b) are cross-sectional views showing another modification of the powder supply source of FIG. 69.

FIGS. 72 (a) and (b) are cross-sectional views showing a configuration when a powder capturing member is added to a powder charger.

73 is a sectional view showing a configuration of a state monitor calibration member for calibrating an optical detection member added to the powder charger of FIG. 72.

FIG. 74 is a flowchart illustrating a process of monitoring the state of the powder capturing member of FIG. 72.

FIG. 75 is a cross-sectional view showing a configuration when an exhaust port is provided in the powder container.

76A is a cross-sectional view illustrating a configuration of a cartridge applied to the powder container of FIG. 58, and FIG. 76B is a cross-sectional view illustrating a configuration of a modified example of the cartridge of FIG.

77 is a cross-sectional view showing a configuration in which a stirring member, a vibration member, and a blowing member are provided in the cartridge of FIG. 76.

FIGS. 78A to 78D are explanatory views showing a conventional spacer dispersing method.

FIGS. 79 (a) to (e) are explanatory views showing another conventional spacer dispersing method.

FIG. 80 is a cross-sectional view showing a configuration of a conventional spacer spraying device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus of a liquid crystal display element 2 Reading member (pattern discrimination means, reading means) 3 Powder charger (powder charging means) 4 Powder control member (powder flying means) 4a electrode 4b gate 4k deflection electrode 5 counter electrode Reference Signs List 7 color filter 8 black matrix 9 transparent electrode 15 image processing member (pattern discriminating means) 16 input member (pattern discriminating means) 17 information source (pattern discriminating means) 18 voltage applying member (pattern discriminating means) 19 recognition member (pattern discriminating means) 20 comparison member (pattern discriminating means) 21 deflection electrode voltage applying member (pattern discriminating means) 26 scattering state reading member (pattern discriminating means) 28 cleaning member 31 first discharging member 32 second discharging member 33 third discharging member 35 Static eliminator 63 Ion generator 63c Mesh-like member (powder Blocking member) 64 Powder supply section 64c Bottom 65 Spacer pool (Powder pool) 66 Blowing member (Powder intrusion blocking member) 67 Stirring member 68 Vibrating member 71 Particle diameter detecting member 72 Particle concentration detecting member 83 Opening / closing member 91 Remaining amount Detecting member 92 Powder storage unit (powder replenishing member) 93 Powder supply source (powder replenishing member) 121 Storage unit 122 Belt 127 Screw 131 Gas supply source 132 Storage unit 133 Piping 153 Powder capturing member 161 Cartridge E1 Power supply E2 Power supply F Ion current L Liquid crystal display

Claims (25)

[Claims] 1. A powder charging means for charging a powder serving as a spacer of a liquid crystal layer, and the powder charged by the powder charging means is caused to fly on a liquid crystal display element on which the liquid crystal layer is formed. In a manufacturing apparatus for a liquid crystal display element having a powder flying means to be scattered, there is provided a pattern discriminating means for discriminating an element pattern of the liquid crystal display element, wherein the powder flying means is an element pattern of the element pattern by the pattern discriminating means. An apparatus for manufacturing a liquid crystal display element, wherein the powder is sprayed on a selected area on the liquid crystal display element based on a result of the determination. 2. The method according to claim 1, wherein said pattern discriminating means has a reading means for reading an array pattern of a black matrix provided on said liquid crystal display element, and discriminates said element pattern based on a reading result by said reading means. 2. The apparatus according to claim 1, wherein the means sprays the powder on an area above the black matrix. 3. The powder flying means has a plurality of electrodes for selectively flying the powder by applying a voltage based on the discrimination result to each of the plurality of electrodes, and a predetermined voltage is applied. Wherein an opposing electrode for forming an electric field with the powder flying means to guide the powder onto the liquid crystal display element is provided so as to face the powder flying means. 3. The apparatus for manufacturing a liquid crystal display element according to 1 or 2. 4. The liquid crystal display element according to claim 3, wherein the counter electrode is a transparent electrode provided on the liquid crystal display element and a side of the black matrix which is closer to the powder flying means. Manufacturing equipment. 5. The apparatus according to claim 1, wherein said pattern determining means further includes a scattered state reading means for reading a scattered state of said powder on said liquid crystal display element. 5. The apparatus according to claim 3, wherein the voltage applied to each electrode of the powder flying means is changed. 6. The powder charging means charges the powder by irradiating the ion generation section for generating ions with the ions generated by the ion generation section to the powder held therein. 6. The apparatus for manufacturing a liquid crystal display device according to claim 1, further comprising a powder supply unit for supplying the powder flying means. 7. The powder supply unit is a container having a powder reservoir, which is an aggregate of the powder, at the bottom made of a conductive material, and the ion generation unit is other than the bottom of the powder supply unit. The powder supply unit is provided on the side wall of the powder, and the powder supply unit irradiates the powder pool with the ions generated by the ion generation unit by an electric field formed between the ion generation unit and the bottom portion, thereby powdering the powder. 7. The apparatus for manufacturing a liquid crystal display element according to claim 6, wherein the device is charged and discharged from the powder reservoir toward the powder flying means. 8. A powder intrusion preventing member for pushing back the powder, which is released from the powder reservoir of the powder supply unit and tries to enter the ion generation unit, into the powder supply unit, is provided in the ion generation unit. The apparatus for manufacturing a liquid crystal display element according to claim 6, wherein the apparatus is provided. 9. The manufacturing apparatus for a liquid crystal display device according to claim 6, wherein a stirring member for stirring the powder pool is provided in the powder supply section. 10. An apparatus for manufacturing a liquid crystal display device according to claim 6, wherein said powder supply section is provided with a vibration member for applying vibration to said powder reservoir. 11. The powder supply section is provided with a particle diameter detection member for detecting a particle diameter of the powder supplied to the flight control means. 3. A manufacturing apparatus for a liquid crystal display element according to claim 1. 12. The powder supply section is provided with a particle concentration detecting member for detecting a particle concentration of the powder supplied to the flight control means.
2. The apparatus for manufacturing a liquid crystal display element according to claim 1. 13. A liquid crystal display device according to claim 6, wherein said powder supply section is provided with a remaining amount detecting member for detecting a remaining amount of said powder pool. Manufacturing equipment. 14. A liquid crystal display according to claim 13, further comprising a powder replenishing member for replenishing said powder to said powder supply section based on a detection result of said remaining amount detecting member. Device manufacturing equipment. 15. The powder replenishing member has a storage unit for storing the powder, and a transport unit for transporting the powder in the storage unit to the powder supply unit. An apparatus for manufacturing a liquid crystal display element according to claim 14. 16. The apparatus according to claim 15, wherein the transport section has a belt or a screw for transporting the powder. 17. The transfer section has a gas supply source for supplying gas, and a pipe through which the gas flows from the gas supply source to the powder supply section, wherein the gas is provided in the middle of the pipe. The liquid crystal display device manufacturing apparatus according to claim 15, wherein the powder is transported by passing the powder through the storage unit. 18. A method for manufacturing a liquid crystal display element, comprising charging a powder serving as a spacer of a liquid crystal layer, flying the charged powder, and scattering the charged powder on a liquid crystal display element on which the liquid crystal layer is formed. A method for manufacturing a liquid crystal display element, comprising determining an element pattern of a liquid crystal display element, and spraying the powder on a selected area on the liquid crystal display element based on a result of the determination of the element pattern. 19. An arrangement pattern of a black matrix provided in the liquid crystal display element, the element pattern is determined based on the read result, and the powder is sprayed on an area above the black matrix. The method for manufacturing a liquid crystal display device according to claim 18, wherein 20. The powder is selectively fly by applying a voltage based on the result of the determination, and further by the electric field formed by applying a voltage to a predetermined portion on the liquid crystal display element side. 20. The method for manufacturing a liquid crystal display device according to claim 18, wherein a body is guided onto the liquid crystal display device. 21. The method according to claim 19, wherein a state of dispersion of the powder on the liquid crystal display element is read, and an applied voltage for selectively flying the powder in subsequent dispersion is changed based on the read result. A method for manufacturing a liquid crystal display device according to claim 20. 22. The method of manufacturing a liquid crystal display device according to claim 18, wherein said powder is charged and supplied by generating ions and irradiating said powder. . 23. The method for manufacturing a liquid crystal display element according to claim 22, wherein the particle diameter of the powder supplied by charging is detected. 24. The method for manufacturing a liquid crystal display device according to claim 22, wherein a particle concentration of the powder to be charged and supplied is detected. 25. The method of manufacturing a liquid crystal display device according to claim 22, wherein the remaining amount of the powder supplied by charging is detected.