JP2000117976A - Printing head and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a printing head for color printing whose manufacture can be simplified while a print image is prevented from being qualitatively deteriorated, and a manufacturing method therefore. SOLUTION: In the printing head 40 and a manufacturing method therefor, ink flow paths 41A-41C are formed, in a specified positional relationship, in a flow path plate 4. Consequently, it is possible to easily match the positions of nozzles 43 per each of the ink flow paths 41A-41C with high precision based on the flow path plate 41 as a reference. Thus the manufacture of the printing head 40 can be simplified while a print image is prevented from being qualitatively deteriorated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a print head and a method for manufacturing the same, and particularly to a print head suitable for an ink jet print head.

[0002]

2. Description of the Related Art Conventionally, an ink jet printer device discharges ink droplets onto a recording medium such as paper or film in accordance with a recording signal, thereby printing an image such as a character or a figure according to the recording signal. It can be printed on.

FIG. 10 shows an example of the configuration of a conventional ink jet print head used in such an ink jet printer. A piezoelectric actuator 3 is fixed to one surface 2A of a flow path plate 2, and the flow path The nozzle plate 4 is attached to the other surface 2B of the plate 2.

In this case, an arrow x is provided on one surface 2A side of the flow path plate 2.
_A plurality of recessed pressure chambers 2C for ink storage are arranged in parallel at a predetermined pitch along _one direction. Each of the pressure chambers 2C can be successively supplied with ink from an ink cartridge (not shown) via a common channel 2D.

[0005] throughway 2E which through the respective passage plate 2 to the distal end portion of the pressure chamber 2C in the thickness direction (arrow z ₁ direction) is bored, the nozzle plate 4 and the respective through passages 2E nozzle 4A respectively in correspondence consisting of a plurality of through holes are formed at a predetermined pitch along the arrow x ₁ direction.

On the other hand, the piezoelectric actuator 3 has a plurality of piezoelectric elements or the like on one surface of a vibration plate 5 made of a flexible material so as to face each pressure chamber 2C of the flow path plate 2 via the vibration plate 5. Are arranged along the direction of the arrow x ₁ , and the other surface of the vibration plate 5 is adhered or welded to the one surface 2 </ b> A of the flow passage plate 2. It is fixed to the plate 2.

[0007] while being polarized in this case the piezoelectric element 6 is a thickness direction, respectively (arrow z ₁ direction), and one surface and the other surface are respectively the upper and lower electrodes formed in the piezoelectric elements 6, thus by generating a potential difference between these upper and lower electrodes, may deflect in a direction of displacing the piezoelectric element 6 diaphragm 5 inside the corresponding pressure chamber 2C by monomorph effect (arrow z ₁ direction opposite) It has been made like that.

As a result, in this type of ink jet print head 1, a potential difference is generated between the upper electrode and the lower electrode of the piezoelectric element 6 to displace the diaphragm 5 to the inside of the corresponding pressure chamber 2C. A pressure corresponding to the amount can be generated in the pressure chamber 2C,
This pressure causes the ink in the pressure chamber 2C to pass through the passage 2.
The corresponding nozzle 4A can be discharged to the outside via E.

[0009]

In recent years, ink jet printers that can print color images using two or more colors have been commercialized as ink jet printers.

Conventionally, as an ink jet print head used in such an ink jet printing apparatus, an ink jet print head 1 for each color, which has been individually manufactured, is integrated with a predetermined positional relationship using a holder or the like. Three flow paths in which one color ink flow path is formed in the nozzle plate based on a nozzle plate in which nozzle patterns for one color are formed in a predetermined positional relationship for a predetermined number of colors at a predetermined pitch. In some cases, the plates were positioned and fixed.

However, the former one of the ink jet print heads has a problem that it is difficult to integrate the print heads for each color in a predetermined positional relationship with high precision, and the production becomes complicated. However, in such an ink jet print head, if the positional relationship of the print heads for each color is shifted, the landing positions of the ink droplets of each color are shifted, and there is a problem that the printed image is deteriorated.

The latter type of the ink jet print head has a problem that the flatness is deteriorated because the area of the nozzle plate increases as the ink color used increases. When the flatness of the nozzle plate is deteriorated in such an ink jet print head, there is a problem in that the landing position of the ink droplet ejected from the nozzle is shifted, so that the printed image is deteriorated.

Further, in the latter ink jet print head, when the nozzle plate is manufactured by electroforming, the manufacturing cost increases in proportion to the area of the nozzle plate. Was.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and it is an object of the invention to propose a print head for color printing and a method of manufacturing the same which can simplify the manufacture while preventing the deterioration of a printed image. .

[0015]

According to the present invention, a plurality of ink flow paths are provided in a flow path plate in a print head.

As a result, in this print head, the positional relationship of the nozzles for each ink flow path can be easily and accurately adjusted with reference to the flow path plate.

Further, in the present invention, in the method of manufacturing a print head, a plurality of ink flow paths are formed in the flow path plate.

As a result, according to this print head manufacturing method, the positional relationship of the nozzles for each ink flow path can be easily and accurately adjusted with reference to the flow path plate.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings.

(1) Configuration of Powder Beam Processing Apparatus In recent years, as one of the etching processing methods, a particle size of 1 to 20 [μ
m) is mixed almost uniformly with high-pressure air to form a solid-gas two-phase flow, and the solid-gas two-phase flow is blown onto the processing surface of the workpiece to solidify the processing surface. There has been proposed a processing method (hereinafter, referred to as a powder beam processing method) for removing and processing by grinding with abrasive grains contained in a gas-two-phase flow.

According to such a powder beam processing method, since the particle size of the abrasive grains used is as small as 1 to 20 [μm], a fine pattern can be processed at high speed with high accuracy. Since the injection amount of the abrasive grains can be reliably controlled, there is an advantage that the processing amount can be accurately controlled.

Here, FIG. 1 shows a processing apparatus (hereinafter, referred to as a powder beam processing apparatus) 10 capable of performing processing by such a powder beam processing method.
It shows.

In this case, the powder beam processing apparatus 10
In the above, after the high-pressure air AIR ₁ output from the air compressor 11 passes through the regulating valve 12 and the solenoid valve 13, the high-pressure air AIR ₁ is divided, and the divided high-pressure air AIR ₁ (hereinafter referred to as the first
AIR _{2 is connected} to the first air supply pipe 1
4. The air is ejected into the abrasive grain storage chamber 15B of the mixing tank 16 via the air chamber 15A and the filter 16 provided in the lower part of the mixing tank 15 in order.

At this time, the abrasive grain storage chamber 15 of the mixing tank 15
A contains abrasive grains 17 of silicon carbide, alumina, glass, or the like having an average particle size of about 1 to 20 [μm]. Thus, the first diverted stream is injected into the abrasive grain storage chamber 15B. It is blown up by the high-pressure air aIR _2.

The other divided high-pressure air (hereinafter, referred to as a second divided high-pressure air) AIR ₃ is connected to the regulating valve 1.
The air is ejected into the delivery pipe 20 via the air supply pipe 8 and the second air supply pipe 19 in order. As a result, a portion of the delivery pipe 20 that connects the connection portion 20A to the second air supply pipe 19 and the upper part of the mixing tank 15 (hereinafter, this portion is referred to as a connection portion 20A of the delivery pipe 20). negative pressure by the air flow of the second shunt high pressure air aIR ₃ occurs.

The negative pressure causes the abrasive grains 17 to be blown up by the first split high-pressure air AIR ₂ and diffused into the air (solid-air state) in the abrasive grain storage chamber 15B of the mixing tank 15 (solid-air state). is sucked into the connecting portion 20B of the tube 20, the second second diverted high pressure air aIR ₃ and are substantially uniformly mixed solid-gas two-phase flow aIR ₄ at connecting portions 20A of the air supply pipe 19 the delivery tube 20 Generated.

Further, the solid-gas two-phase flow AIR ₄ is thereafter fixed to the distal end of the arm 23 in the injection chamber 22 through the delivery pipe 20 and the nozzle 21 attached to the distal end thereof. It is sprayed onto the processing surface of the set workpiece 24 at a predetermined angle.

[0028] In this powder beam processing apparatus 10 in this manner, so that it can be etched so as to cut the machined surface of the workpiece 24 by the abrasive grains 17 contained in the solid-gas two-phase flow AIR ₄ Has been made.

At this time, the arm 23 can be moved freely in the front-rear and left-right directions (X ₂ Y ₂ directions) by the drive unit 25, whereby the processing surface of the workpiece 24 can be moved. The entire surface can be etched by the solid-gas two-phase flow AIR ₄ .

On the other hand, a solid-gas two-phase flow AIR ₄ jetted into the injection chamber 22 so as to be sprayed on the processing surface of the workpiece 24.
Thereafter, the abrasive is supplied to the abrasive storage tank 28 integrally attached to the upper part of the mixing tank 15 via the transfer pipes 26 and 27.

The abrasive grains 17 contained in the solid-gas two-phase flow AIR ₄ are thereafter stored in an abrasive grain storage tank 28, and the high-pressure air forming the solid-gas two-phase flow AIR ₄ is removed by the abrasive. The air is supplied to an air blower 31 via an exhaust pipe 29 and an electromagnetic valve 30 connected to the upper part of the grain storage tank 28, and is filtered and then discharged to the outside.

At this time, the abrasive grain storage tank 28 and the abrasive grain storage chamber 15 of the mixing tank 15 are stored in the abrasive grain storage tank 28.
B so as to close the communication port communicating between the coil springs B and the coil spring 3
The supply valve 33 is disposed so as to be urged upward (Z2 direction) by the _second valve 2.

Thus, in the powder beam machining apparatus 10, when a predetermined amount of the abrasive grains 17 is accumulated in the abrasive grain storage tank 28, the weight of the supply valve 33 causes the supply valve 33 to move downward against the elastic force of the coil spring 32. The abrasive grains 17 stored in the abrasive grain storage tank 17 can be supplied to the abrasive grain storage chamber 15 </ b> B of the mixing tank 15.

In addition to the above configuration, in the case of the powder beam processing apparatus 10, a stirring member 35 that rotates in the direction of arrow a based on the rotation output of the motor 34 is provided in the abrasive grain storage chamber 15B of the mixing tank 15. I have.

Thus, the powder beam processing apparatus 1
0, the solid-air state of the abrasive grains 17 temporarily blown up by the first branch high-pressure air AIR _{2 is} changed to the stirring member 35.
To produce a solid-gas two-phase flow AIR ₄ that always contains a certain amount of abrasive grains 17,
The solid-gas two-phase flow AIR ₄ enables the processing surface of the workpiece 24 to be processed with high precision.

(2) Inkjet print head 40
FIG. 2 shows an ink jet print head 40 according to the present embodiment, and first to third ink flow paths 41A to 41C for three colors of the same pattern are formed in a flow path plate 41.
Are formed, and the first to third ink flow paths 4 are formed.
1A to 41C, the first to third piezoelectric actuators 42A to 42
C is fixed, and the first to third nozzle plates 43A to 43C are attached to the other surface 41E of the flow path plate 41.

In this case, the first to third ink flow paths 41A to 41A
As shown in FIG. 3 and FIG. 4, the pressure chamber 41 </ b> C has a pressure chamber 41 </ b> DA formed of a plurality of concave portions arranged in two rows at a predetermined pitch along one direction 41 of the flow path plate 41 along the arrow x <b> ₃ direction. , Each of the pressure chambers 41DA has a common flow path 41D.
B and ink can be supplied from an ink cartridge (not shown) through an ink introduction path 41DC provided at the rear end of each pressure chamber 41DA.

The first to third ink flow paths 41A to 41A
The C, bored in the distal end portion of the pressure chambers 41DA respectively, the channel plate 41 with the through passage 41DD are provided to penetrate in the thickness direction (arrow z ₃ direction), the first to third nozzles Each of the through-holes 4 is provided on the plates 43A to 43C.
Respectively in correspondence with the 1DD, nozzle 43D comprising a plurality of through-holes at predetermined pitches along the arrow x ₃ direction it is bored. The first to third nozzle plates 43A to 43C are provided so that the respective nozzles 43D communicate with the corresponding through passages 41DD of the corresponding first to third ink flow channels 41A to 41C. Other side 41
It is positioned and attached to the E side.

On the other hand, the first to third piezoelectric actuators 42
A to 42C correspond to the first to third ink flow paths 41A of the flow path plate 41 on one surface of the vibration plate 44 made of a flexible material.
~41C respectively in correspondence to the pressure chambers 41DA piezoelectric element 45 such as a plurality of piezoelectric elements is constituted by being affixed along the arrow x ₃ direction.

Each of the first to third piezoelectric actuators 42A to 42C has a corresponding one of the first to third ink flow paths 41A in which the corresponding piezoelectric element 45
The other surface of the vibration plate 41 is adhered to the one surface 41 </ b> D of the flow path plate 41 in a state where it is positioned so as to face the corresponding pressure chamber 41 </ b> DA of 41 </ b> C.

[0041] while being polarized in this case the first to third piezoelectric elements 45 of the piezoelectric actuator 42A~42C its thickness direction, respectively (arrow z ₃ direction), the piezoelectric elements 4
An upper electrode or a lower electrode made of a conductive material is formed on one surface and the other surface of 5, respectively.

Thus, in each of the first to third piezoelectric actuators 42A to 42C, a potential difference is generated between the upper electrode and the lower electrode, whereby each piezoelectric element 45 is individually driven by the diaphragm 44 by the monomorph effect.
The corresponding first to third ink channel 41A~41C corresponding direction displaced to the inside of the pressure chamber 41Da (arrow z ₃
(In the direction opposite to the direction).

Thus, in the ink jet print head 40, the first to third piezoelectric actuators 4
By generating a potential difference between the upper electrode and the lower electrode of the piezoelectric element 45 of 2A to 42C, the vibration plate 44 is moved to the corresponding first to third electrodes.
Pressure chambers 41DA of the ink flow paths 41A to 41C of FIG.
, A pressure corresponding to the displacement amount can be generated in the pressure chamber 41DA,
With this pressure, the ink in the pressure chamber 41DA can be discharged to the outside from the corresponding nozzle 43D of the corresponding first to third nozzle plates 43A to 43C via the through path 41DD.

(3) Manufacturing Procedure of the Inkjet Printhead 40 According to the Present Embodiment
Can be manufactured by the following procedure shown in FIGS. 5A to 6D.

That is, first, as shown in FIG.
A dry film 51 is applied on one surface 50A of a glass plate 50 that is a base of the flow path plate 41. Next, as shown in FIG. 5B, the dry film 51 is exposed to light in a predetermined pattern and developed, so that the dry film 51 is provided with each of the first through third ink flow paths 41A through 41C.
An opening 51A having the same size as the through-passage 41 is formed in the same pattern as the DD.

Further, as shown in FIG. 5C, the glass plate 50 is subjected to the powder beam processing method using the dry film 51 as a resist by using the powder beam processing apparatus 10 shown in FIG. Thereafter, the through paths 4 of the first to third ink flow paths 41A to 41C are formed.
A through hole 50C serving as 1DD is formed.

Subsequently, the glass plate 50 is washed to remove the dry film 52 from the one surface 50A, and thereafter, as shown in FIG.
A new dry film 52 is applied on one surface 50A of the substrate.

Then, as shown in FIG. 6A, the dry film 52 is exposed to light through a mask for an ink flow path and is developed, whereby the dry film 52 is developed.
Correspond to the first to third ink flow paths 41A to 41C, respectively.
An opening 52A having the same shape as the shape of 1C is formed.

Next, as shown in FIG. 6 (B), the surface 50A of the glass plate 50 is powder-beam-processed using the dry film 52 as a resist, using the powder beam processing apparatus 10 shown in FIG. The first to third ink flow paths 41 correspond to the first to third ink flow paths 41A to 41C on one surface 50A of the first 50, respectively.
A concave portion 50D having the same pattern as A to 41C is formed.

Then, as shown in FIG. 6C, the glass plate 50 is cleaned so that the glass plate 50 is cleaned.
The dry film 52 is peeled off from the one surface 50A. As a result, it is possible to manufacture the channel plate 41 in which the first to third ink channels 41A to 41C for three colors are formed as shown in FIGS.

Further, as shown in FIG. 6D, each of the first to third piezoelectric actuators manufactured in a step different from that of the flow path plate 41 is provided on one surface 41D of the flow path plate 41. 42A to 42C respectively correspond to the first to third ink flow paths 4
1A to 41C, and the first to third nozzle plates 43A to 43A, which are formed in another process on the other surface 41E of the flow path plate 41 in the same manner.
C is positioned and attached in correspondence with the first to third ink flow paths 41A to 41C, respectively. Thereby, the inkjet print head 40 shown in FIGS. 2 to 4 can be obtained.

When the ink jet print head 40 is manufactured as described above, for example, as shown in FIG. 7, a large number of flow path plates 41 may be formed separately from a single glass plate 60. Accordingly, the flow path plate 41 can be formed at low cost.

Specifically, according to the procedure shown in FIGS. 8A to 9C, first, as shown in FIG. 8A, on one surface of a substrate 61 made of a glass material or the like, for example, Nitto Denko Corporation Foamable heat-releasable sheet 6 such as Riba Alpha (trade name)
The glass plate 60 is pasted through the substrate 2.

Here, the heat release sheet 62 has one surface 62
An adhesive layer made of a thermofoamable adhesive is formed on the A side, and when heated, the adhesive layer foams and comes into a point contact state with the substance adhered to the adhesive layer, thereby easily peeling off the substance. It was made to get.

In the step of FIG. 8A, the other surface 62B of the heat-releasable sheet 62 is bonded to the substrate 61, and the glass plate 60 is bonded to the adhesive layer on the one surface 62A of the heat-releasable sheet 62.
The glass plate 60 is attached to the substrate 61 by bonding.

Next, as shown in FIG. 8B, one surface 60 of the glass plate 60 thus adhered on the substrate 61.
On the A side, a set of three ink flow paths (hereinafter referred to as one set of three ink flow paths) including the through-holes 60C and the recesses 60D by the procedure described above with reference to FIGS. 5A to 6D. Is referred to as an ink flow path assembly pattern 60E) and the flow path plate 41 is used to form a plurality of sheets.

Subsequently, as shown in FIG. 8C, a dry film 63 is applied on one surface 60A of the glass plate 60, and is exposed in a predetermined pattern as shown in FIG. 8D. By developing, the dry film 63 has a frame-shaped opening 6 that borders the outer shape of the flow path plate 41.
3A correspond to the respective ink flow path set patterns 60E of the glass plate 60, and the respective ink flow path set patterns 6
0E.

Subsequently, as shown in FIG. 9A, the glass plate 60 is processed by a powder beam using the powder film processing apparatus 10 shown in FIG. 1 using the dry film 63 as a resist. Is cut out in accordance with the shape of each opening 63A of the dry film 63. Thus, one flow path plate 41 is provided corresponding to each ink flow path set pattern 60E of the glass plate 60.
Are formed separately.

Subsequently, as shown in FIG. 9 (B), the glass plate 60 cut into the plurality of flow path plates 41 in this manner is washed while being adhered to the substrate 61, whereby
The dry film 63 is removed from the one surface 60A.

Further, as shown in FIG. 9 (C), the heat release sheet 62 is heated by heating the heat release sheet 62 by placing the substrate 61 on a hot plate or the like, and then the heat release sheet 62 is foamed. Each of the flow path plates 41 is individually peeled from 62. Thereby, a large number of flow path plates 41 shown in FIGS. 2 to 4 can be manufactured at once.

(4) Operation and Effect of the Present Embodiment In the above configuration, the first to third colors for the three colors are formed in the flow path plate 41.
Are formed, and the first to third piezoelectric actuators 42A to 42C and the first to third ink passages 41A to 41C are formed corresponding to the first to third ink passages 41A to 41C.
The nozzle plates 43A to 43C are respectively
The ink jet print head 40 is manufactured so as to be positioned and fixed to one surface 41D or the other surface 41E.

In the ink jet print head 40 manufactured as described above, one channel plate 4 in which first to third ink channels 41A to 41C for three colors are formed.
1 to the first to third ink flow paths 41A to 41A.
Since the positional relationship of the nozzle pattern for each color (corresponding to the positional relationship of the first to third nozzle plates 43A to 43C) is determined in correspondence with C, the positional relationship of the nozzle pattern for each color can be easily determined. It can be adjusted to high precision. In addition, in this inkjet print head 40,
Since the flow path plate 41 formed thicker than the first to third nozzle plates 41A to 41C is used as a reference, the flatness of the nozzle pattern for each color can be maintained with high accuracy.

Further, in the ink jet print head 40, the first to third ink flow paths 41A of the flow path plate 41 are provided.
Since the first to third nozzle plates 43A to 43C are attached to the other surface 41E of the flow path plate 41 corresponding to the first to third nozzle plates 4 to 41C, respectively.
The size of 3A to 43C can be set to the minimum necessary size. Thus, for example, even when the first to third nozzle plates 43A to 43C are manufactured by electroforming, it is possible to prevent an increase in the manufacturing cost, and thus, for example, as described above, the nozzles for three colors are provided in one nozzle plate. An ink jet print head can be manufactured at a lower cost than when a pattern is formed.

According to the above configuration, the first to third ink flow paths 41A to 41C for three colors are formed in one flow path plate 41, and the first to third ink flow paths 41A to 41C are formed. 41C, the first to third piezoelectric actuators 4
2A-42C and the first through third nozzle plates 43A-
43C is the one surface 41D or the other surface 41 of the flow path plate 41, respectively.
Since the inkjet print head 40 is manufactured by positioning and fixing the print head at position E, the positional relationship of the nozzle pattern for each color can be easily and accurately adjusted, and thus the deterioration of the printed image can be achieved. An ink jet print head for color printing and a method for manufacturing the same that can simplify the production while preventing the occurrence of the problem can be realized.

(5) Other Embodiments In the above embodiments, the case where the present invention is applied to the ink jet print head 40 has been described. However, the present invention is not limited to this, and for example, a heating element may be used. Accordingly, the present invention can be widely applied to a so-called bubble jet type print head in which the ink is heated and boiled and the ink is ejected to the outside by the pressure of the generated bubbles, and other print heads.

In the above-described embodiment, the abrasive grains 17 having an average particle size of 1 to 20 [μm] are sprayed on one surface 50A, 60A of the glass plates 50, 60 of the flow path plate 41. Although the case has been described in which one surface 50A, 60B of the plates 50, 60 is etched, the present invention is not limited to this, and in this case, abrasive grains having an average particle diameter of 20 to 24 [μm] are used. In this case, substantially the same effect can be obtained.

Further, in the above embodiment, three ink flow paths 41A to 41C are formed in the flow path plate 41 (that is, the present invention is applied to the ink jet print head 40 for three-color printing). However, the present invention is not limited to this, and the point is that if a plurality of ink flow paths are formed in a single flow path plate in a predetermined positional relationship, the ink formed in the flow path plate 41 Channels 41A to 41
The number of C may be a value other than 3 (that is, the present invention may be applied to a print head for printing colors other than three colors).

Further, in the above-described embodiment, a case has been described in which the nozzle plates 43A to 43C are individually formed so as to correspond to the respective ink flow paths of the flow path plate 41. The invention is not limited to this, and may be formed integrally.

Further, in the above-described embodiment, each pressure chamber 41D of each of the ink flow paths 41A to 41C of the flow path plate 41 is provided.
Although the case where the piezoelectric actuators 42A to 42C as pressure generating means for generating pressure in A are configured as shown in FIGS. 2 to 4 has been described, the present invention is not limited to this, and the configuration of the pressure generating means is not limited to this. Various other configurations can be widely applied.

Further, in the above-described embodiment, the case where each of the ink flow paths 41A to 41C of the flow path plate 41 is formed by using the powder beam processing method has been described, but the present invention is not limited to this. Alternatively, the flow path plate 41 may be formed by exposing and developing photosensitive glass, or may be formed by using a sandblasting method. However, by using the powder beam processing method, a finer ink flow path can be formed with high precision.

[0071]

As described above, according to the present invention, in the print head, a plurality of ink channels are formed in the channel plate in a predetermined positional relationship. A print head for color printing can be realized in which the positional relationship of the nozzles for each flow path can be easily and accurately adjusted, and thus the production can be simplified while preventing the deterioration of the printed image.

According to the present invention, in the method of manufacturing a print head, a plurality of ink flow paths are formed in the flow path plate in a predetermined positional relationship. A method of manufacturing a print head for color printing can be realized in which the positional relationship of each nozzle can be easily and accurately adjusted, and thus the manufacturing can be simplified while preventing deterioration of a printed image.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view illustrating a configuration of a powder beam processing apparatus used in manufacturing an ink jet print head according to an embodiment.

FIG. 2 is an exploded perspective view showing the configuration of the inkjet print head according to the embodiment.

FIG. 3 is a perspective view showing a partial cross section of the configuration of the inkjet print head according to the present embodiment.

FIG. 4 is a cross-sectional view illustrating a configuration of an inkjet print head according to the present embodiment.

FIG. 5 is a cross-sectional view for explaining a manufacturing procedure of the inkjet print head according to the embodiment.

FIG. 6 is a cross-sectional view for explaining a manufacturing procedure of the inkjet print head according to the embodiment.

FIG. 7 is a schematic perspective view for explaining the batch production of the flow path plate.

FIG. 8 is a cross-sectional view for explaining a manufacturing procedure of a batch manufacturing of the channel plate.

FIG. 9 is a cross-sectional view for explaining a manufacturing procedure of a batch manufacturing of the channel plate.

FIG. 10 is a cross-sectional view illustrating a configuration of a conventional inkjet print head.

[Explanation of symbols]

10: powder beam processing device, 17: abrasive grains, 40
…… Inkjet print head, 41 …… Channel plate,
41A to 41C: ink flow paths, 41D, 50A, 60
A: one side, 41E, 50B, 60B ... the other side, 41D
A: pressure chamber, 41DB: common flow path, 41DC: ink introduction path, 41DD: through path, 42A to 42C
Piezoelectric actuators, 43A to 43C: nozzle plate, 43D: nozzle, 44: diaphragm, 45: piezoelectric element, 50, 60: glass plate.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Toru Tanigawa 6-35 Kita-Shinagawa, Shinagawa-ku, Tokyo F-term within Sony Corporation (reference) 2C057 AF24 AF91 AF93 AG15 AG29 AG44 AP02 AP13 AP14 AP22 AP77 BA04 BA14

Claims (5)

[Claims] 1. A flow path plate in which a plurality of ink flow paths formed of a predetermined pattern of concave portions on one surface are formed in a predetermined positional relationship, and the ink flow paths are provided so as to correspond to the respective ink flow paths. A pressure generating means for generating pressure in a pressure chamber, which is a part of the ink passage, and a nozzle formed with a through-hole fixed to the other surface of the flow path plate and communicating with the corresponding pressure chamber of the ink flow path. A printhead comprising a nozzle plate. 2. The ink jet printer according to claim 1, wherein the nozzle plates are individually provided for each of the ink flow paths in correspondence with each of the ink flow paths of the flow path plate.
The print head according to 1. 3. A first step of producing a flow path plate in which a plurality of ink flow paths of a predetermined pattern are formed on one surface in a predetermined positional relationship, and communicating with the ink flow path on the other surface of the flow path plate. And a second step of positioning and fixing a nozzle plate having a nozzle formed of a through hole. 4. In the first step, a first processing method of etching the processed surface by spraying abrasive grains having an average particle diameter of 24 [μm] or less on the processed surface of the workpiece. The method for manufacturing a print head according to claim 3, wherein each of the ink flow paths is formed on the one surface of the flow path plate by using. 5. A print head according to claim 4, wherein a plurality of said flow path plates are collectively formed separately from a plate-like member made of a predetermined material by using said first processing method. Manufacturing method.