JP2000103068A - Manufacture for print head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve a wettability of an ink channel of a channel plate to ink and prevent air bubbles from adhering to a surface of the ink channel by forming the channel plate where the ink channel including a pressure chamber for storing ink is formed to one face and/or the other face and processing a surface of the ink channel of the channel plate to a rough face. SOLUTION: Ink channels 50C of recessed parts are formed in the same pattern as ink channels each comprising a pressure chamber, an ink introduction passage, a common channel and a penetration passage of a channel plate to one face 50A of a photosensitive glass plate 50 of the same size as the desired channel plate. A dry film 51 is attached entirely onto the one face 50A of the glass plate 50, exposed in accordance with the pattern of the ink channels 50C and developed. As a result, opening parts 51A of the same shape as the ink channels 50C are formed to exposed only the ink channels 50C to the film 51. A bottom face of the ink channel 50C is processed to a predetermined surface roughness while the film 51 is used as a mask. Then, the glass plate 50 is cleaned and the film 51 is removed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a print head, and particularly to a method suitable for application to an ink jet print head.

[0002]

2. Description of the Related Art Conventionally, in an ink-jet printer, characters or graphics are printed on a recording medium by discharging ink droplets onto a recording medium such as paper or film in response to a recording signal. It is made to be able to do.

FIG. 6 shows an example of the configuration of a conventional ink jet print head used in such an ink jet printer apparatus. A piezoelectric actuator 3 is fixed to one surface 2A of a flow path plate 2, and the flow path Board 2
The nozzle plate 4 is attached to the other surface 2B.

In this case, an arrow x is provided on one surface 2A side of the flow path plate 2.
_A plurality of recessed pressure chambers 2C for ink storage are arranged in parallel at a predetermined pitch along _one direction. Each of the pressure chambers 2C can be successively supplied with ink from an ink cartridge (not shown) via a common channel 2D.

[0005] throughway 2E which through the respective passage plate 2 to the distal end portion of the pressure chamber 2C in the thickness direction (arrow z ₁ direction) is bored, the nozzle plate 4 Each of these through passages 2E
When the nozzle 4A that in correspondence consisting of a plurality of through-holes each are bored at a predetermined pitch along the arrow x ₁ direction.

On the other hand, the piezoelectric actuator 3 has a plurality of piezoelectric elements or the like on one surface of a vibration plate 5 made of a flexible material so as to face each pressure chamber 2C of the flow path plate 2 via the vibration plate 5. Are arranged along the direction of the arrow x ₁ , and the other surface of the vibration plate 5 is adhered or welded to the one surface 2 </ b> A of the flow passage plate 2. It is fixed to the plate 2.

[0007] while being polarized in this case the piezoelectric element 6 is a thickness direction, respectively (arrow z ₁ direction), and one surface and the other surface are respectively the upper and lower electrodes formed in the piezoelectric elements 6, thus by generating a potential difference between these upper and lower electrodes, it may deflect the piezoelectric element 6 in a direction for displacing the diaphragm 5 inside the corresponding pressure chamber 2C by bimorph effect (arrow z ₁ direction opposite) It has been made like that.

As a result, in this type of ink jet print head 1, a potential difference is generated between the upper electrode and the lower electrode of the piezoelectric element 6 to displace the diaphragm 5 to the inside of the corresponding pressure chamber 2C. A pressure corresponding to the amount can be generated in the pressure chamber 2C,
This pressure causes the ink in the pressure chamber 2C to pass through the passage 2.
The corresponding nozzle 4A can be discharged to the outside via E.

[0009]

In the ink jet print head 1, the flow path plate 2 is formed by exposing a photosensitive surface of a photosensitive glass plate to a desired pattern and developing the same, thereby forming each pressure chamber 2C and the common flow path. A recess corresponding to 2D is formed, and thereafter, a through path 2E formed of a through hole is formed at a predetermined position of the photosensitive glass plate using an excimer laser or the like. Therefore, in such a conventional method of manufacturing the flow path plate 2, an ink flow path including the pressure chambers 2 </ b> C, the common flow path 2 </ b> D, and the respective through paths 2 </ b> E of the flow path plate 2 (hereinafter collectively referred to as ink flow There is a problem that it is difficult to control the surface roughness of the surface of the road 2F) to a desired state.

In this case, the wettability of the ink to the ink flow path 2F of the flow path plate 2 is determined by the material of the flow path plate 2, the surface roughness of the surface of the ink flow path 2F, and the like. Bubbles may adhere to the surface of the ink flow path 2F of the plate 2.

If air bubbles adhere to the surface of the ink flow path 2F, the air bubbles may cause resistance of the ink flowing in the ink flow path 2F, or may cause, for example, pressure in the pressure chamber 2C.
When bubbles are generated in the piezoelectric actuator 3
As a result, there is a problem that the pressure generated in the pressure chamber 2C of the flow path plate 2 is absorbed by the air bubbles and a predetermined amount of pressure cannot be generated in the pressure chamber 2C.

If the specified amount of pressure cannot be generated in each of the pressure chambers 2C of the flow path plate 2, the size of the ink droplets ejected from each of the nozzles 4A becomes unbalanced. Printing becomes unstable.

Therefore, in the ink jet print head 1, if the wettability of the ink flow path 2F of the flow path plate 2 can be improved, the adhesion of bubbles in the ink flow path 2F can be prevented, and the reliability of printing can be improved. It is considered to be gained.

The present invention has been made in view of the above points, and it is an object of the present invention to propose a method of manufacturing a print head capable of improving printing reliability.

[0015]

According to the present invention, there is provided a method for manufacturing a print head, comprising: a flow path having an ink flow path including a pressure chamber for storing ink on one side and / or the other side; A first step of making a plate;
And a second step of roughening the surface of the ink flow path of the flow path plate.

As a result, according to the method of manufacturing a print head, the wettability of the ink flow path of the flow path plate with respect to ink can be improved, and bubbles are prevented from adhering to the surface of the ink flow path. be able to.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings.

(1) Configuration of Powder Beam Processing Apparatus In recent years, as one of the etching processing methods, a particle size of 0.01 to 3 is used.
The solid-gas two-phase flow is formed by mixing abrasive grains of approximately (μm) approximately uniformly with high-pressure air, and the solid-gas two-phase flow is blown onto the processing surface of the workpiece, thereby forming the processing surface. 2. Description of the Related Art A processing method of removing a workpiece by grinding with abrasive grains contained in a solid-gas two-phase flow (hereinafter, this is referred to as a powder beam processing method) has been proposed.

According to such a powder beam processing method, since the grain size of the abrasive grains used is as small as 0.01 to 3 [μm], a fine pattern can be processed at high speed with high accuracy. Since the injection amount of the abrasive grains can be reliably controlled, there is an advantage that the processing amount can be accurately controlled.

Here, FIG. 1 shows a processing apparatus (hereinafter, referred to as a powder beam processing apparatus) 10 capable of performing processing by such a powder beam processing method.
It shows.

In this case, the powder beam processing apparatus 10
In the above, after the high-pressure air AIR ₁ output from the air compressor 11 passes through the regulating valve 12 and the solenoid valve 13, the high-pressure air AIR ₁ is divided, and the divided high-pressure air AIR ₁ (hereinafter referred to as the first
AIR _{2 is connected} to the first air supply pipe 1
4. The air is ejected into the abrasive grain storage chamber 15B of the mixing tank 16 via the air chamber 15A and the filter 16 provided in the lower part of the mixing tank 15 in order.

At this time, the abrasive grain storage chamber 15 of the mixing tank 15
In B, the average particle size of silicon carbide, alumina or glass is
Abrasive grains 17 of about 0.01 to 3 [μm] are stored, and thus the first abrasive grains 17 ejected into the abrasive grain storage chamber 15B are stored.
Blown up of the shunt high pressure air AIR _2.

The other divided high-pressure air (hereinafter referred to as a second divided high-pressure air) AIR ₃ is connected to the regulating valve 1.
The air is ejected into the delivery pipe 20 via the air supply pipe 8 and the second air supply pipe 19 in order. As a result, a portion of the delivery pipe 20 that connects the connection portion 20A to the second air supply pipe 19 and the upper part of the mixing tank 15 (hereinafter, this portion is referred to as a connection portion 20A of the delivery pipe 20). negative pressure by the air flow of the second shunt high pressure air aIR ₃ occurs.

By this negative pressure, the abrasive grains 17 blown up by the first split high pressure air AIR ₂ and diffused into the air (solid-air state) in the abrasive grain storage chamber 15B of the mixing tank 15 are sent out. is sucked into the connecting portion 20B of the tube 20, the second second diverted high pressure air aIR ₃ and are substantially uniformly mixed solid-gas two-phase flow aIR ₄ at connecting portions 20A of the air supply pipe 19 the delivery tube 20 Generated.

Further, this solid-gas two-phase flow AIR ₄ is thereafter fixed to the distal end of the arm 23 in the injection chamber 22 through the delivery pipe 20 and the nozzle 21 attached to the distal end thereof. It is sprayed onto the processing surface of the set workpiece 24 at a predetermined angle.

[0026] In this powder beam processing apparatus 10 in this manner, so that it can be etched so as to cut the machined surface of the workpiece 24 by the abrasive grains 17 contained in the solid-gas two-phase flow AIR ₄ Has been made.

At this time, the arm 23 can be freely moved in the front-rear and left-right directions (X ₂ Y ₂ directions) by the driving unit 25, whereby the working surface of the workpiece 24 can be moved. The entire surface can be etched by the solid-gas two-phase flow AIR ₄ .

On the other hand, a solid-gas two-phase flow AIR ₄ jetted into the injection chamber 22 so as to be sprayed on the processing surface of the workpiece 24.
Thereafter, the abrasive is supplied to the abrasive storage tank 28 integrally attached to the upper part of the mixing tank 15 via the return pipes 26 and 27.

The abrasive grains 17 contained in the solid-gas two-phase flow AIR ₄ are thereafter stored in an abrasive grain storage tank 28, and the high-pressure air forming the solid-gas two-phase flow AIR ₄ is removed by the abrasive. The air is supplied to an air blower 31 via an exhaust pipe 29 and an electromagnetic valve 30 connected to the upper part of the grain storage tank 28, and is filtered and then discharged to the outside.

At this time, the abrasive grain storage tank 28 and the abrasive grain storage chamber 15 of the mixing tank 15 are stored in the abrasive grain storage tank 28.
B so as to close the communication port communicating between the coil springs B and the coil spring 3
The supply valve 33 is disposed so as to be urged upward (Z2 direction) by the _second valve 2.

Thus, in the powder beam processing apparatus 10, when a predetermined amount of the abrasive grains 17 is accumulated in the abrasive grain storage tank 28, the weight of the supply valve 33 causes the supply valve 33 to move downward against the elastic force of the coil spring 32. The abrasive grains 17 stored in the abrasive grain storage tank 17 can be supplied to the abrasive grain storage chamber 15 </ b> B of the mixing tank 15.

In addition to this configuration, in the case of the powder beam processing apparatus 10, a stirring member 35 that rotates in the direction of arrow a based on the rotation output of the motor 34 is provided in the abrasive storage chamber 15B of the mixing tank 15. I have.

Thus, the powder beam processing apparatus 1
0, the solid-air state of the abrasive grains 17 temporarily blown up by the first branch high-pressure air AIR _{2 is} changed to the stirring member 35.
To produce a solid-gas two-phase flow AIR ₄ that always contains a certain amount of abrasive grains 17,
The solid-gas two-phase flow AIR ₄ enables the processing surface of the workpiece 24 to be processed with high precision.

(2) Inkjet print head 40
2 and 3 show an inkjet print head 40 manufactured by applying the present invention. A piezoelectric actuator 42 is fixed to one surface 41A of a flow path plate 41, and the flow path A nozzle plate 43 is attached to the other surface 41B side of the plate 41.

[0035] one surface 41A of the case flow path plate 41, the pressure chambers 41C formed of recesses for a plurality of ink storage at a predetermined pitch along the arrow x ₃ direction are juxtaposed. Ink is supplied to each of the pressure chambers 41C from an ink cartridge (not shown) through a common flow path 41D formed of a concave portion provided on one surface 41A of the flow path plate 41 and a corresponding ink introduction path 41E. Has been made.

Further are through passage 41F is drilled to penetrate through the respective flow channel plate 41 at the front end of the pressure chambers 41C in the thickness direction (arrow z ₃ direction), each of these in the nozzle plate 43 nozzles 43A comprising a plurality of through holes at a predetermined pitch respectively through passages 41F along the arrow x ₃ direction so as to communicate with are bored.

On the other hand, the piezoelectric actuator 42 has a plurality of piezoelectric elements or the like on one surface of a vibration plate 44 made of a flexible material so as to face the corresponding pressure chamber 41C of the flow path plate 41 via the vibration plate 44, respectively. The piezoelectric element 45 of arrow x ₃
The diaphragm 44 is fixed to the flow path plate 41 such that the other surface of the vibration plate 44 is attached to one surface 41A of the flow path plate 41.

[0038] At this time the piezoelectric elements 45 while being polarized in a thickness direction, respectively (arrow z ₃ direction), one side and consisting each of a conductive material on the other side the upper electrode or the lower electrode of each piezoelectric element 45 is formed and are thus by causing a potential difference between these upper and lower electrodes, the corresponding direction of displacement to the inside of the pressure chamber 41C (arrow z ₃ direction vibration plate 44 by the respective individual bimorph effect the piezoelectric elements 45 (In the direction opposite to the above).

Thus, in the ink jet print head 40, a potential difference is generated between the upper electrode and the lower electrode of the piezoelectric element 45 to displace the vibration plate 44 to the inside of the corresponding pressure chamber 41C. A corresponding pressure can be generated in the pressure chamber 41C, and this pressure causes the ink in the pressure chamber 41C to pass through the corresponding passage 4F of the corresponding nozzle 4 of the nozzle plate 43.
3A can be discharged to the outside.

(3) Manufacturing Procedure of the Inkjet Printhead 40 According to the Present Embodiment
Can be manufactured by the following procedure shown in FIGS. 4 (A) to 5 (B).

That is, first, as shown in FIG.
A photosensitive glass plate 50 of the same size as the desired flow path plate 41
The ink flow path 4 including the desired pressure chambers 41C, the respective ink introduction paths 41E, the common flow paths 41D, and the respective through paths 41F of the desired flow path plate 41 on the one surface 50A using the above-described conventional method.
An ink flow path 50C composed of a concave portion is formed in the same pattern as 1G. Therefore, in this state, the photosensitive glass plate 50
Functions as one flow path plate having the same ink flow path pattern as the flow path plate 41.

Next, as shown in FIG. 4B, a dry film 51 is stuck on one surface 50A of the photosensitive glass plate 50 over the entire surface, and thereafter, as shown in FIG.
The dry film 51 is exposed and developed according to the pattern of the ink flow path 50C of the photosensitive glass plate 50, and is developed so that only the ink flow path 50C of the photosensitive glass plate 50 is exposed to the dry film 51. An opening 51A having the same shape as the ink flow path 50C is formed.

Subsequently, as shown in FIG. 4D, using the dry film 51 as a mask, the bottom surface of the ink flow path 50C of the photosensitive glass plate 50 is fixed to a predetermined position using the powder beam processing apparatus 10 shown in FIG. Rough surface processing is performed to obtain a surface roughness. At this time, abrasive grains 17 used for powder beam processing
Various processing conditions such as the particle size and the number of scans in (Fig. 1)
It is selected according to the material of the photosensitive glass plate 50 and the like so as to obtain a desired surface roughness.

Next, as shown in FIG. 5A, the photosensitive glass plate 50 having the roughened bottom surface of the ink flow path 50C is washed to remove the dry film 51 from the one surface 50A. . Thereby, the flow path plate 41 shown in FIGS. 2 and 3 in which the bottom surfaces of the pressure chambers 41C, the ink introduction paths 41E, and the common flow path 41D are roughened can be obtained.

Then, as shown in FIG. 5B, a piezoelectric actuator 42 composed of a vibration plate 44 and a piezoelectric element 45 manufactured in a separate process is positioned and fixed on one surface 41A of the flow path plate 41. And the flow path plate 41
Nozzle plate 43 similarly manufactured in another process on other surface 41B
Position and attach. Thus, the ink jet print head 40 shown in FIGS. 2 and 3 can be obtained.

(4) Operation and Effect of the Present Embodiment In the above configuration, the photosensitive glass plate 5 in which the ink flow path 50C having the concave portions of the predetermined pattern is formed on one surface 50A.
The bottom surface of the ink flow path 50 is roughened using a powder beam processing method, and then the piezoelectric actuator 42 is positioned and fixed to one surface 41A of the flow path plate 41 where the ink flow path 41G is formed. At the same time, the ink jet print head 40 is manufactured by positioning and adhering the nozzle plate 43 to the other surface 41B of the flow path plate 41.

Therefore, according to the method of manufacturing the ink jet print head 40, the bottom surface of the ink flow path 41G (ink flow path 50C) of the flow path plate 41 (photosensitive glass plate 50) is roughened to the extent that the flow path plate is roughened. By improving the wettability of the ink flow path 41 with ink, it is possible to prevent bubbles from adhering to the bottom surface of the ink flow path 41G.

The ink jet print head 4
According to the manufacturing method of No. 0, the ink flow path 41G (the ink flow path 50) of the flow path plate 41 (the photosensitive glass plate 50) is thus obtained.
Since the powder beam processing method is used as a processing method when the bottom surface of C) is roughened, regardless of the material of the flow path plate 41, the flow path plate 41 of any material can be used. The bottom surface of the ink flow path 41G can be processed to a desired surface roughness with high accuracy.

According to the above configuration, the bottom surface of the ink flow path 50C of the photosensitive glass plate 50 in which the ink flow path 50C of the predetermined pattern is formed on one surface 50A is roughened using the powder beam processing method. The piezoelectric actuator 42 is positioned and fixed on one surface 50A, and the nozzle plate 43 is positioned and adhered to the other surface 50B to manufacture the ink jet print head 40. By improving the wettability of the ink flow path 41G with respect to ink, it is possible to prevent bubbles from adhering to the bottom surface of the ink flow path 41G.
Thus, it is possible to realize a method for manufacturing an ink jet print head capable of improving the reliability of printing.

(5) Other Embodiments In the above embodiment, the abrasive grains 17 having an average particle diameter of 0.01 to 3 [μm] are sprayed on the bottom surface of the ink flow path of the flow path plate 41. Although the case where the bottom surface is roughened has been described, the present invention is not limited to this, and substantially the same effect can be obtained by using abrasive grains having an average particle diameter of 3 to 24 [μm]. be able to.

Further, in the above-described embodiment, the case has been described where only the bottom surface of the ink flow path 41G of the flow path plate 41 is roughened. However, the present invention is not limited to this. May be roughened over the entire surface of the ink flow path 41G, whereby bubbles can be prevented from adhering to the entire surface of the ink flow path 41G. Properties can be further improved.

Further, in the above-described embodiment, the case where the powder beam processing method is applied as the processing method for roughening the surface of the ink flow path 41G of the flow path plate 41 has been described. For example, a sandblasting method other than the method may be applied.
However, it is better to use the powder beam processing method,
Since the ejection amount can be controlled with high accuracy, there is an advantage that the surface of the ink flow path 41G of the flow path plate 41 can be roughened with higher accuracy.

Further, in the above-described embodiment, a case has been described in which the present invention is applied to the ink jet print head 40 configured as shown in FIGS. 2 and 3, but the present invention is not limited to this. For example, an ink jet print head in which each of the through passages 41F of the flow path plate 41 is formed in a tapered shape so as to function as a nozzle and the nozzle plate 43 is omitted, or the flow path of the flow path plate is The present invention can be widely applied to ink jet print heads having various other structures, such as an ink jet print head formed separately on one surface and another surface of a plate.

[0054]

As described above, according to the present invention, in a method for manufacturing a print head, a flow path plate in which an ink flow path including a pressure chamber for storing ink is formed on one surface and / or the other surface. By providing the first step and the second step of roughening the surface of the ink flow path of the flow path plate, it is possible to improve the wettability of the ink flow path of the flow path plate with respect to the ink. Thus, it is possible to realize a method of manufacturing a print head capable of preventing bubbles from adhering to the surface of the ink flow path and improving printing reliability.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view illustrating a configuration of a powder beam processing apparatus used in manufacturing an ink jet print head according to an embodiment.

FIG. 2 is a perspective view showing a partial cross section of the configuration of the inkjet print head according to the present embodiment.

FIG. 3 is a cross-sectional view illustrating a configuration of an inkjet print head according to the present embodiment.

FIG. 4 is a cross-sectional view for explaining a manufacturing procedure of the inkjet print head according to the embodiment.

FIG. 5 is a cross-sectional view for explaining a manufacturing procedure of the inkjet print head according to the embodiment.

FIG. 6 is a cross-sectional view illustrating a configuration of a conventional inkjet print head.

[Explanation of symbols]

10: powder beam processing device, 17: abrasive grains, 40
…… Inkjet print head, 41 …… Channel plate,
41A, 50A: one side, 41B, 50B: the other side, 4
1C: pressure chamber, 41D: common flow path, 41E: ink introduction path, 41F: through path, 41G, 50C: ink flow path, 42: piezoelectric actuator, 43: nozzle plate, 43A: Nozzle, 44, diaphragm, 45, lower electrode layer, 46, piezoelectric layer, 47, upper electrode layer, 50
... a photosensitive glass plate.

Claims (2)

[Claims] A first step of producing a flow path plate having an ink flow path formed of a recess having a predetermined shape including a pressure chamber for ink storage on one surface and / or another surface; Second surface roughening of the surface of the ink flow path
And a third step of fixing a pressure generating means for generating pressure in the pressure chamber to the one surface of the flow path plate. 2. The method according to claim 2, wherein the second step is performed by using a processing method of processing the processing surface by spraying abrasive grains having an average particle diameter of 24 [μm] or less on the processing surface of the workpiece. The method according to claim 1, wherein the surface of the ink channel of the channel plate is roughened.