JP2000104895A - Sf6 recovery device and method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify movement, carry-in, and carry-out of an apparatus without enlarging a recovery device by constituting the device by a vacuum recovery pump having discharge pressure capable of evacuation and recovering inside an SF6 gas filling apparatus, and capable of expanding a telescopic recovery container, and an SF6 recovery container having a telescopic function. SOLUTION: An SF6 gas recovery device 13 is composed of a vacuum recovery pump 6, a filter harm eliminating cylinder 2, and an opening/closing valve 1. In the vacuum recovery pump 6, a scroll type and evacuation capacity is 200 little/minute, vacuum achieving degree is 1×103 Torr, and compression discharge capacity is 0.15 MpaAbs, and has a capacity which is suitable for filling to a telescopic container 14. In the telescopic containers 14, two outer layer rubber made 40 little containers for metal coating are used in parallel with each other. By rubber and resin film made telescopic container, an evacuation capacity of the recovery container is reduced to 1/50 to 1/1,000 of a metallic container. It is thus possible to easily handle this device without enlarging the recovery device of SF6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for recovering SF ₆ and a method thereof, for example, from a gas-insulated switchgear, a gas-insulated device such as a gas-insulated transformer, or the like, when repairing the device or disposing it when renewing the equipment. TECHNICAL FIELD The present invention relates to an SF ₆ recovery apparatus suitable for recovering SF ₆ gas sealed in a device and a method thereof.

[0002]

2. Description of the Related Art Circuit breakers, transformers and the like of heavy electric equipment are filled with SF ₆ gas which is excellent in current interruption and electric insulation performance. This SF ₆ gas has a very high global warming potential of 23000 times that of carbon dioxide gas, and is sealed in the equipment when repairing SF ₆ gas-filled equipment such as circuit breakers and transformers and disposing of the equipment when renewing the equipment. There is a demand for recovery and recycling of SF ₆ gas.

[0003] Particularly, in the gas load break switch which is installed in a utility pole or the like (breaker), charging amount of the number of installed units is large although SF ₆ gas for Less 20-30 liters / stand, conventional SF ₆ gas recovery In the device, the SF ₆ gas recovery device is too large, and heavy equipment and trucks are required for loading and unloading, which is inconvenient.

[0004] SF ₆ gas itself is high gas odorless, safe, non-toxic, the small amount of SF ₆ gas sealed appliances, S
The economic burden ratio of the F ₆ gas recovery work increased, and it was often released to the atmosphere without recovery. However, '97
December of global warming prevention Kyoto conference (COP-3) or later, use of initiatives without SF ₆ gas gas collection and recycling of related to the inclusion amount of SF ₆ gas from the point of view of environmental improvement is required.

[0005] In the case of the SF ₆ is recovered from the SF ₆ filled equipment, SF ₆ recovery system the loading and unloading City to the installation site of the SF ₆ filled equipment, the recovery of SF ₆ in the local "movement method of SF ₆ recovery device" If, loading and unloading city until storage of the SF ₆ encapsulated devices SF ₆ recovery device back after recovery and encapsulating SF ₆ again SF ₆ encapsulated equipment to the installation site is "moving method of SF ₆ encapsulated device".

[0006] In the moving method of the SF ₆ recovery apparatus, generally, SF ₆ encapsulation equipment of several tens m ³ or more is targeted, and the packing form of the recovery apparatus used (W: 1000 to 2300 mm, D: 10
(00 to 4500 mm, H: 1000 to 2500 mm), and the weight of the recovery device is as heavy as 1000 to 8000 kg. A crane truck is indispensable for loading and unloading the truck, and the handling becomes large.

[0007] The moving method of SF ₆ filled equipment, removal of SF ₆ filled equipment, transport, SF ₆ recovery, filling, hardly able to transfer a series of continuous work, it is difficult to recover the rapid SF ₆ filled equipment, Because it is uneconomical, it is practically possible to move the SF ₆ recovery device and perform a series of continuous operations
_{6 The} collection system is moved.

However, in the SF ₆ recovery operations of the recovery volume is less than 40 liters compact SF ₆ encapsulated devices SF ₆ (e.g. SF ₆ gas load break switch), SF ₆ recovered in a manner to move the SF ₆ recovery device The time for loading and unloading the equipment,
There is a defect that the labor share ratio is larger than that of a large SF ₆ encapsulated device.

FIG. 7 shows a typical configuration of a conventional SF ₆ gas recovery apparatus, and FIG. 8 shows a configuration of an SF ₆ liquid recovery apparatus.
FIG. 9 shows an apparatus / equipment configuration for an SF ₆ recovery operation from an SF ₆ encapsulation device using an F ₆ recovery apparatus.

[0010] As shown in FIG. 9, in order to collect SF ₆ of the SF ₆ enclosing device 10 such as a circuit breaker and a transformer, the SF ₆ encapsulating device 10 and the SF ₆ recovery device 11 are connected by a connecting pipe 9. . SF ₆ gas recovery apparatus, after evacuation and SF ₆ liquid collection container 5 in FIG. 7 to the collection device system evacuated by a vacuum exhaust pump 7, approximately atmospheric SF ₆ of SF ₆ encapsulated device 10 in the recovery compressor 3 The recovered SF ₆ is filled with SF ₆ under pressure into the SF ₆ liquid recovery container 5. Subsequently, the inside of the SF ₆ sealed device 10 is recovered to a vacuum by the vacuum recovery pump 6,
The recovered gas is filled under pressure with SF ₆ gas into the SF ₆ liquid recovery container 5 via the recovery compressor 3.

[0011] SF ₆ liquid recovery apparatus, SF ₆ liquid collection container 5 and after evacuating the collecting device based on the vacuum evacuation pump 7, SF ₆ SF ₆ recovery compressor 3 of the encapsulation device 10 of FIG. 8
In it recovered to about the atmospheric pressure, the SF ₆ to SF ₆ liquid collection container 5 through liquefier 4 compresses the outlet to the critical pressure filling recovered in liquid. Subsequently, the inside of the SF ₆ sealed device 10 is recovered to a vacuum by the vacuum recovery pump 6, the recovered gas is compressed to a critical pressure via the recovery compressor 3, and is compressed through the liquefier 4 to the SF _6.
A method of filling and recovering SF ₆ with liquid in the liquid recovery container 5 is adopted.

In the SF ₆ recovery apparatus, the vacuum pump 7, the recovery compressor 3, the vacuum pump 6, and the SF ₆ liquid recovery container 5 are composed of heavy metal devices regardless of the method of recovering gas and liquid. .

In addition, since the SF ₆ liquid recovery container 5 is evacuated and cleaned, the tank becomes a thick weight container in order to withstand the strength under negative pressure, and a second-class pressure container and a second type pressure container according to the Industrial Safety and Health Law. According to the container security rules and the inspection rules for specific equipment of the High Pressure Gas Safety Law, the manufacturing cost is increased because the recovery container is manufactured.

[0014]

What cannot be ignored in the recovery work of SF ₆ is not only the problem of recovery workability, but also the regulations of the High Pressure Gas Safety Law concerning the design of the recovery equipment and the work of handling the equipment.

The SF ₆ liquid recovery apparatus has a feature that when SF ₆ is changed from a gas state to a liquid state, the volume becomes about 1/150, so that a large volume of SF ₆ gas can be collected and stored in a small container. However, since the recovery of SF ₆ by liquid corresponds to the gas production act of the High Pressure Gas Safety Law,
Regardless of the recovery volume and recovery pressure of F ₆ , it is subject to approval under the High Pressure Gas Safety Law, and the production and inspection of SF ₆ recovery equipment also requires approval. At the same time, operators of SF ₆ liquid recovery equipment also need to be qualified by the High Pressure Gas Safety Law, which makes it difficult to accommodate small SF ₆ sealed equipment.

On the other hand, in the SF ₆ gas recovery apparatus, if the filling pressure of the recovery container is less than 1 MPa, it is out of the scope of permission of the High Pressure Gas Safety Law, but if it is 1 MPa or more, it is subject to the High Pressure Gas Safety Law.

If the filling pressure of the recovery vessel in the SF ₆ gas recovery apparatus is less than 1 MPa, a qualified person is not required, but the water volume is usually 300 to 100 in consideration of the versatility of the SF ₆ encapsulation equipment.
A pressure vessel made of thick steel plate is used for filling at 0 liter and filling pressure of about 0.9 MPa. Although it is possible to reduce the weight somewhat compared to the liquid recovery device, it is necessary to carry out the work of loading and unloading the recovery device. Heavy equipment and trucks are required.

Further, the recovery container of the SF ₆ gas recovery device is as follows:
Be kept low filling pressure 0.1MPa, etc., the use of thick pressure vessel in order to prevent the container deformation during evacuation of the container is the essential, lightweight SF ₆ recovery device using a metal container Conversion was difficult.

Further, as a measure for preventing global warming, SF ₆
In order to construct a recovery recycling environment, it is needless to say that an SF ₆ recovery method that can use the SF ₆ recovery device compactly and easily, and that can easily move and carry in and out equipment and that has a low economical burden is desired. . The present invention has been made in view of the above points, and it is an object of the present invention to provide a simple and economical apparatus for recovering SF _{6 with} a compact apparatus without increasing the size of the apparatus. It is an object of the present invention to provide an SF ₆ recovery apparatus and a method thereof with a small load.

[0020]

Means for Solving the Problems A conventional recovery apparatus has a vacuum pump and a vacuum recovery pump. However, in order to evacuate air or the like as a contamination source in the recovery container in a short time, the exhaust capacity is large and the recovery operation is performed for a long time. An oil-circulating vacuum pump is used, which can cope with this. However, in order to collect the SF ₆ of SF ₆ encapsulated device to under vacuum, vacuum pump oil circulation SF
₆ is recovered with oil vapor, but an oil-free vacuum recovery pump is used to contaminate the gas.

If the oil-free vacuum recovery pump originally has the high pumping capacity and the long-time vacuum pumping operation characteristic of the oil-circulating vacuum pump, the oil-circulating vacuum pump can be used for one oil-free vacuum recovery pump. The use of a vacuum pump is unnecessary. However, the use of an oil circulation vacuum pump is due to the disadvantages of the oil-free vacuum recovery pump, evacuation capacity and the lack of durability for long-term evacuation because no circulating oil is used. It is because it is improving.

Therefore, the present invention provides a vacuum recovery pump having a discharge pressure capable of evacuating and recovering the inside of an SF ₆ gas-filled device and expanding a telescopic recovery container, and an SF ₆ recovery container having a telescopic function. This is an SF ₆ gas recovery device composed of

Further, in the present invention, the evacuation volume of the recovery container is reduced to 1/50 to 1/10 of that of the metal container by the elastic container made of rubber and resin film having the elastic function.
Since it can be reduced to 00, the shortcomings of the oil-free vacuum recovery pump, such as the shortage of the exhaust capacity and the long-term exhaust operation, can be greatly reduced. Further, the configuration of the vacuum recovery pump and the telescopic container of the present invention can achieve a large recovery time of the recovery time, a reduction in the production cost of the equipment cost, and a stable recovery of SF ₆ .

In a conventional metal container, a thick-wall pressure-resistant container had to be used in order to prevent the container from being deformed in a vacuum. However, the expandable container of the present invention has a pressure of 0 to 0.11 MPa A.
bs range, and when the container is evacuated, the container wall is closely deformed and the space is eliminated, and the space becomes the same as a vacuum. Therefore, it is possible to construct a lightweight and low-cost recovery of SF ₆ gas. In conventional metallic pressure-resistant containers for recovering SF _6, the appearance of the container does not change regardless of the gas filling amount. Therefore, the vacuum of the recovery container and the gas recovery capacity in the SF ₆ enclosing facility are measured by a pressure gauge. Measurement cannot be performed without calculation from the indicated value or without a weighing scale. The telescopic container of the present invention is manufactured with a constant rated capacity, and the amount of collection can be easily measured visually during the collection operation in the bulging state of the container, and the evacuated state of the telescopic container can also be visually measured in the evacuated state. .
In addition, the telescopic container is manufactured with a rated capacity, and the coupling capacity of the telescopic container makes it possible to easily and visually measure the recovery capacity of gas-filled equipment whose gas volume is unknown.

In the conventional vacuum evacuation of the metal pressure-resistant container for recovering SF ₆ , it takes more time to evacuate as the degree of vacuum rises due to the characteristics of the vacuum recovery pump. The relationship between the degree of vacuum arrival and the vacuum time is shown in FIG. In the shrinkable container of the present invention, the container is deformed by the evacuation, and the volume of the container under vacuum becomes close to zero. Can be exhausted. In addition, before the vacuum recovery pump is connected, the inside of the recovery container is the dihedral body 15 of FIG.
Since the vacuum recovery volume can be made extremely small in the state shown in FIG. 2, the vacuum time is greatly improved in the state shown in FIG.

Unlike the conventional metal pressure-resistant container for recovering SF _6, the expandable container before gas collection and filling can be reduced to a container volume of 1/30 to 1/60 of the thick metal container, and the installation space is greatly increased. Can be reduced. Also, unlike a metal pressure-resistant container, it is not necessary to make the container a cylindrical shape, so that the container can be manufactured with a reduced weight and a free shape and capacity.

By forming the expandable container of the present invention into a cubic shape, the containers can be stacked and the vehicle loading efficiency can be increased, and the installation space on the floor of the collection container can be reduced and improved. The telescoping container is made of film and sheet material, and the total weight of 2 m ³ / piece collecting container is 20
It is less than kg (including gas weight: 13 kg) and can be carried by one person, making it possible to deliver ordinary courier services. In addition, the telescopic container filled with recovered SF ₆ gas is not subject to the regulations of the High Pressure Gas Safety Law for high-pressure gas storage and transportation, and is collected by general courier service at the use sites of SF ₆ sealed equipment all over the country. Accordingly, the collection container can be transported in a state in which SF ₆ is sealed, and the problem of the delivery regulation based on the conventional High Pressure Gas Safety Law can be solved.

The recovery of the liquid SF ₆ state by SF ₆ liquid recovery apparatus, when the collection container for can be accommodated by the collecting container volume approximately 1/152 can be compactly delegate purification of the collected gas to the SF ₆ manufacturers Satisfies the condition of “liquid SF ₆ ” of the pickup condition. However, the configuration of the SF ₆ recovery device is complicated and the shape of the device is large, making it difficult to carry in and out the device. The SF ₆ liquid recovery device is more expensive than the gas recovery device, and the operation of qualified personnel is limited. Yes, it is not suitable for gas recovery of SF ₆ sealed equipment less than 10 m ³ .

Further, in the conventional SF ₆ gas collecting apparatus, without the need for qualified personnel compared to the liquid recovery apparatus, although somewhat compact can be a major construction equipment recovery apparatus, SF ₆
The production of the collection container is 500-1000 to give versatility.
Because a liter container is used, heavy equipment and trucks are required for transportation, and the movement of the equipment is not easy.

According to the present invention, SF ₆ gas collected in a telescopic container at each site in the whole country is collected and collected at the installation location of the SF ₆ liquid recovery device, and a small amount of the collected and collected gas SF ₆ is efficiently collected. The liquid can be liquefied and recovered by the liquid recovery device.

The extensible container collected from the SF ₆ gas filling device is delivered to the location of the SF ₆ liquid recovery device using a home delivery service. The liquefaction / recovery device is operated in a state where a predetermined telescopic container is collected, and the gas SF ₆ is recovered as the liquid SF ₆ .

In a small SF ₆ sealed device (SF ₆ gas load switch) having a gas recovery capacity of less than 40 liters, 191 bottles (7640 liters) of a stretchable recovery container of the present invention of 40 liters (7640 liters) were used in a water volume of 47.6 liters. 1 in one high pressure vessel
Can also be filled with people work, purification treatment to re-commercialization and SF ₆ manufacturers has become easy. After the SF ₆ has been extracted, the expandable container collected by the liquefaction recovery device can be reduced to 1/30 to 1/60 of the container volume at the time of gas filling in the state of the tightly packed container, and can be delivered to the sender by courier at low cost. Can be returned. Conventionally, when collecting in a metal container with a recovery device and refilling SF ₆ encapsulation equipment, it was necessary to always move a heavy metal heavy container using a recovery device and a truck and a heavy machine for loading and unloading at the same time. . SF ₆ vacuum recovery pump of the present invention and SF ₆
The SF ₆ encapsulation equipment is filled with a telescopic container enclosing gaseous gas. The retractable container after re-encapsulation can be folded and stored, facilitating transportation and collection work by light vehicles.

After evacuating the inside of the SF ₆ sealing device and the gas recovery device using a vacuum recovery pump, the purified and recovered S
Connect F ₆ to the retractable container of the SF ₆ gas recovery unit. After setting each open / close valve on the filling side of the SF ₆ encapsulation equipment, the SF ₆ gas recovery device sets the SF ₆
The vacuum recovery, SF ₆ encapsulated in SF ₆ encapsulated devices can be conveniently.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIG.

As shown in the figure, the SF ₆ gas recovery device 13 in this embodiment is composed of a vacuum recovery pump 6, a filter elimination cylinder 2, and an on-off valve 1, and between the devices as shown in FIG. It is connected. The vacuum recovery pump 6 is a scroll type, has a vacuum evacuation capacity of 200 liter / min, a sink reach of 1 × 10 ⁻³ Torr, a compression discharge capacity of 0.15 MPa Abs, and has a sufficient capacity to fill the expandable container 14. have. As the telescopic container 14, two 40-liter containers made of metal-coated outer layer rubber were used in parallel. SF ₆
The encapsulation device 10 has a capacity of 30 liters and 0.13 MPa Ab.
In this case, 39 liters of SF ₆ are sealed. After closing the on-off valve 1 between the SF ₆ sealing device 10 and the SF ₆ gas recovery device 13, the air in the telescopic container 14 and the recovery device system was exhausted to the atmosphere using the vacuum recovery pump 6. Telescopic container 1
After the vacuum evacuation was maintained for 2 minutes from the state in which the vacuum pump 4 was brought into close contact, one of the two expandable containers 14 was closed, and then the air release valve was closed, and then the vacuum recovery pump 6 was stopped.

Next, when the bypass valve of the vacuum recovery pump 6 is opened between the SF ₆ enclosing device 10 and the extensible container 14, the pressurized gas (0.3 MPa) above the atmospheric pressure filled in the SF ₆ enclosing device 10 is opened. The SF _{6 of (1} ) moves to the telescopic container 14, and the pressure between the SF ₆ enclosing device 10 and the telescopic container 14 becomes about 0.1 MPa (atmospheric pressure).

By the filling operation at atmospheric pressure, the pressure of the SF ₆ enclosing device 10 became approximately 0.1 MPa, and 9 liters were collected in the expandable container 14 side. Subsequently, after closing the bypass valve of the vacuum recovery pump 6, the vacuum recovery pump 6 is started and S
SF ₆ of the F ₆ sealing device 10 was vacuum-collected. The SF ₆ volume under atmospheric pressure of the SF ₆ encapsulation device 10 is 30 liters,
The state of recovery was confirmed by visual confirmation of the state in which the capacity of the expandable container 14 was full of 40 liters, and even workers with little handling experience could carry out proper work.

The expandable container 14 used in the test was 40 cm long × 50 cm wide × 10 cm high with a SF ₆ filling gas capacity of 40 liters and 100 cm long × 100 cm wide × 100 height.
A volume of 1000 liters of SF ₆ filling gas was produced in cm.
The material used is a rubber sheet metal film coated in order to prevent rubber gas permeability and SF ₆ gas contamination in the container, and a bellows seal valve is used for valves made of resin multilayer film. ing. At the time of evacuation, both the resin and metal films adhered to each other, and good evacuation was achieved. One week after SF ₆ injection, the elastic container 14
Of the measured oxygen concentration of SF ₆ gas is a change in the oxygen concentration was good not observed at 0.1% or less.

Using a 200 liter / min vacuum pump, 1000 liters of a metal thick-walled recovery container is
Although it took 30 minutes to evacuate to rr, the extensible container of the present invention can evacuate to 5 Torr in 8 minutes, and the evacuation time can be reduced to about 1/4 or less.

The retractable container of the present invention has a capacity of 4 liters or less in a housed state, and can evacuate 1000 liters from atmospheric pressure to 5 Torr in about 2 minutes. The evacuation time was dramatically reduced to 1/15 of that of.

Incidentally, in order to prevent bursting of the telescopic container, a pressure reducing valve may be provided in the SF ₆ recovery apparatus to supply the container under reduced pressure.

The extensible container of the present invention is packed in a cardboard box in order to prevent the container from being stained and damaged during transportation. This is shown in FIG. In the figure, the storage state of the cardboard box with SF ₆ sealed in a telescopic container is 1
4. The cardboard box storage state in the SF ₆ exhausted state is shown in FIG. The above-mentioned 40-liter telescopic container was provided with a valve, and could be stored in a cardboard box measuring 15 cm long × 20 cm wide × 10 cm high before filling with SF ₆ . Similarly, the size before filling 1000 liters of SF ₆ is 30 cm long x 40 cm wide x
It was stored in a 20 cm high cardboard box.

The size after filling with SF ₆ is 50 cm long × 50 cm wide.
It can be stored in a cardboard box of cm × 15 cm in height, and the size after filling with 1000 liters of SF ₆ is 110 cm × 105 cm.
It was stored in a cardboard box measuring cm × 105 cm in height.

The weight after filling with 1000 liters of SF ₆ was 18.5 kg, so that it could be transported by one person and could be delivered in a courier service.

At present, even a small-sized liquid recovery apparatus used has a gas SF _{6 of} 3000 to 6000 liters / Hr.
It has the ability to liquefy SF ₆ a. It takes 3 to 4 hours to carry a liquid recovery device with a capacity of 3000 liters / Hr to the site of a small SF ₆ encapsulation device to recover and use SF ₆ .

On the other hand, the net time to liquefy and recover 40 liters of SF ₆ gas is less than 1 minute. SF ₆ gas filled in a SF ₆ container of less than 500 liters
_{6 If the} liquid was collected at the place where the encapsulation equipment was installed, it took half a day to prepare and handle the liquid
F ₆ liquefaction recovery takes several minutes, and the balance between preparation and actual working time is poor, resulting in extremely low efficiency. In the liquid recovery, the liquid SF ₆ required to confirm the state of the liquid SF ₆ requires about 1400 liters of gaseous SF ₆ equivalent to 10 liters, and the operation of the liquid recovery apparatus requires 1500 liters of gaseous SF 6 equivalent to 1500 liters.
₆ is required.

FIG. 3 shows the collective recovery method of the present invention. The present invention uses SF ₆ gas collected in telescopic containers throughout the country,
This method collects and collects a small amount of gas SF ₆ collected and collected at the location where the SF ₆ liquid recovery device is installed, and collects and collects the gas SF ₆ efficiently and efficiently using the liquefaction and recovery device.

As shown in FIG. 3, the extensible container 15 from which the SF ₆ has been recovered from the SF ₆ encapsulating device 10 is delivered to the SF ₆ liquid recovery apparatus installation site 19 by using a courier service 16 so that the predetermined extensible container 15 is Liquefaction and recovery device 1 in a state where cargo is collected
7 is operated to convert gaseous SF ₆ to liquid SF ₆ and collect it.

Liquid SF by collection and collection of telescopic containers
The system of the ₆ recovery method is shown in FIG.

The telescopic container 14 from which the SF ₆ is collected and delivered from the whole country by the courier service 16 is transferred to the SF ₆ liquid collection device installation site 1
9 SF ₆ gas recovery header is gas SF ₆
When 1500 liters are collected, SF ₆ gas recovery header 2
Connect to 0. In FIG. 5, a total of 2120 liters of 1000 liters × 2 pieces and 40 liters × 3 pieces were connected.

Subsequently, the inside of the system including the liquid recovery device 17, the SF ₆ gas recovery header 20, and the SF ₆ liquid recovery container 5 is evacuated by the vacuum exhaust pump 7.

Subsequently, the gas SF ₆ in the telescopic container 14 was liquefied and filled into the SF ₆ liquid recovery container 5 by the recovery compressor 3 capable of suctioning and compressing in the range of 0.07 to 0.7 MPa Abs. Atmospheric pressure (approximately 0.1
(MPa Abs.) The following SF ₆ had to be recovered by the recovery compressor 3 after passing through the vacuum recovery pump 6, but in the present invention, the recovery container shrinks at the time of 0.1 MPa Abs. 2120 liters of gaseous SF ₆ could be liquefied without operating.

It takes 2.5 hours to recover the liquid SF ₆ filled with 2120 liters of 0.1 MPa Abs. In a metal thick-wall pressure-resistant container. However, in the present invention, the vacuum recovery time shown in FIG. It improved and was recovered in one hour. Compared with the conventional on-site delivery method of liquid recovery equipment, dispatching of qualified personnel by the High Pressure Gas Safety Law is not necessary, SF ₆ recovery and liquefaction work process can be adjusted easily, recovery labor cost and container transportation cost are the same as the present invention. Was improved to about 1/2 or less of the conventional one.

In order to repair the SF ₆ filling equipment, after filling the filled SF ₆ into a thick metal pressure-resistant container, and after returning to the SF ₆ filling equipment again, it is necessary to use a thick metal It took time to check and control the vacuum recovery time and filling volume of the pressure vessel.

In the present invention, as shown in FIG. 6, the vacuum recovery time can be reduced only by the vacuum recovery pump 6, and the filling amount of SF ₆ gas can be easily confirmed and managed by visually checking the contracted state of the expandable and contractible container. Was.

FIG. 6 shows a method of filling SF ₆ into an SF ₆ enclosing device using the stretchable container of the present invention.

SF ₆ sealed equipment 10 after repair and inspection
And the SF ₆ gas recovery device 13 and the telescopic container 14 are connected. Subsequently, the inside of the SF ₆ sealing device is evacuated by the vacuum recovery pump 6 via the on-off valve 1 of the bypass of the vacuum recovery pump. Subsequently, the on-off valve 1 of the bypass of the vacuum recovery pump is closed, and SF ₆ in the telescopic container 14 is filled with SF ₆ into the SF ₆ enclosing device 10 via the vacuum recovery pump 6.

[0058] according to conventional metal thick pressure-resistant container and SF ₆ gas recovery apparatus, SF ₆ encapsulated devices (SF ₆ filling of 40 liters) The filling pressure 0.01 MPa, 30 minutes evacuation of SF ₆ encapsulated devices, In addition, the suction and filling of the container required a total of 30 minutes and one hour.
4 significantly improves the vacuum evacuation time of the container, e.g., 30 minutes for evacuation of the SF ₆ encapsulation equipment, and 5 minutes for suction and filling of the container. As a result, the filling amount of SF ₆ into the gas filling device 10 could be easily confirmed visually.

Until now, the collection of SF ₆ by a small encapsulation device filled with a small volume of SF ₆ gas has a large number of installations, and it is difficult for a conventional SF ₆ recovery device and a recovery container to have a compact package. Not only is the price of equipment and containers too high,
At the same time, handling was difficult, but according to the present invention,
The SF ₆ recovery device and the SF ₆ recovery container can be large enough to be loaded on a light van passenger car, and can be carried in / out and gas recovery can be performed by one person.

In consideration of the 1997 Kyoto Conference on the Prevention of Global Warming, in order to improve the environment with the goal of achieving zero emission of SF _{6 from the} atmosphere, it is necessary that SF ₆ recovery equipment and SF ₆ recovery containers be economically available at low cost. However, in the present invention, the collection device and the collection container can be inexpensive with the simplicity of handling,
Recovery of F _6, have become indispensable to the development of recycling environment, including the circulation. At the same time, the telescopic container of the present invention enables the container to be compact and the use of general route service and home delivery service for the carrying in and out of the container, and the collection of SF ₆ collected from all over the country to the refining base and SF ₆ liquid collection base.・ A set is ready.

Further, the SF ₆ sealed gas is used in a sealed device or deteriorates due to an overload on the device, and hydrogen fluoride, sulfur dioxide and various acidic fluorine compounds are generated in SF ₆ . The decomposition gas contained in these SF ₆ is Monel,
Except for high-grade metals such as incolel, metallic steel containers have poor corrosion resistance, and it is difficult to completely clean the inside of a container contaminated with decomposition gas, and the cost is very high.

The telescopic container of the present invention has a multilayer structure made of a corrosion-resistant material such as plastic and rubber, and can be manufactured lightly and safely at a cost 1/10 or less of a metal container. Disposable type can be used, handling is easy and safe. In addition, the telescopic container is resistant to alkalis, and has a feature that by injecting an alkaline solvent or a solution, the neutralization treatment of the acidic gas can be performed safely and simply at the same time as the recovery. As a result, the present invention satisfies the following five conditions necessary for improving the global environment.

1): The facility can be easily used by a small number of people without any specialized knowledge.

2): It can be used and developed on a nationwide scale without limiting the area.

3): SF ₆ recovery equipment The recovery equipment and recovery container of the main constituent equipment can be obtained without hindering economic spread.

4): Delivery and delivery of equipment and containers are on a nationwide scale, and can be economically supported by existing general route and home delivery services.

5): Easy application of recycling, such as collection, delivery, and purification.

[0068]

According to the present invention as described in the foregoing, the recovery of SF ₆ is apparatus conveniently performed in a compact device without increasing the size, and also the movement loading and unloading equipment is simple economically burden A small SF ₆ recovery apparatus and method can be obtained.

[Brief description of the drawings]

FIG. 1 is a system diagram showing one embodiment of an SF ₆ gas recovery device of the present invention.

FIG. 2 is a characteristic diagram showing a relationship between a vacuum evacuation (recovery) pump and an evacuation time in one embodiment of the present invention.

FIG. 3 is a system diagram showing one embodiment of the SF ₆ recovery method of the present invention.

FIG. 4 is a perspective view showing a shipping package of a telescopic container according to an embodiment of the present invention.

FIG. 5 is a system diagram showing a method for recovering liquid SF ₆ by collecting and consolidating telescopic containers according to the present invention.

6 is a system diagram showing a SF ₆ filling method to SF ₆ encapsulated device according to an embodiment of the present invention.

FIG. 7 is a system diagram showing an example of a conventional SF ₆ gas recovery device.

FIG. 8 is a system diagram showing an example of a conventional SF ₆ liquid recovery device.

FIG. 9 is a diagram showing a device configuration of a conventional SF ₆ recovery operation.

[Explanation of symbols]

1 ... open / close valve, 2 ... filter abatement cylinder, 3 ... recovery compressor,
4 liquefier, 5 SF ₆ liquid recovery container, 6 vacuum recovery pump, 7 vacuum pump, 8 evaporator, 9 connecting pipe, 1
0: SF ₆ sealing equipment, 11: SF ₆ recovery equipment, 12: On-site SF ₆ sealing equipment, 13: SF ₆ gas recovery equipment, 14 ...
Telescopic container (SF ₆ enclosed state), 15: Telescopic container (SF ₆ exhausted state), 16: Courier service, 17: Liquid recovery device, 19: SF ₆ liquid recovery device installation site, 20: SF ₆ gas recovery header .

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Shinji Watanabe 3-1-1-17 Kokubuncho, Hitachi City, Ibaraki Prefecture Within Hitachi Oxygen Co., Ltd. (72) Inventor Fukuo Fujiwara 1-1-1 Kokubuncho, Hitachi City, Ibaraki Prefecture Inside Kokubu Equipment Engineering Co., Ltd. (72) Inventor Koei Yusa 1-1-1 Kokubuncho, Hitachi City, Ibaraki Prefecture F term in Hitachi Kokubu Factory 3E073 AA01 DB03

Claims (6)

[Claims] 1. A SF ₆ is communicated with SF ₆ encapsulated devices are sealed, SF for recovering SF ₆ in the SF ₆ encapsulated device
In SF ₆ recovery apparatus having a _{six-collecting} container, the SF ₆ collecting container, SF ₆ recovery apparatus characterized by being formed with a stretchable capability. 2. The apparatus according to claim 1, wherein the SF ₆ recovery container having an expandable and contractible function is connected to the SF ₆ enclosing device via a communication pipe, and a vacuum recovery pump is provided in the communication pipe. The SF ₆ recovery device according to claim 1, wherein 3. The vacuum recovery pump has a discharge pressure capable of evacuating and recovering the inside of the SF ₆ encapsulating device and inflating the expandable SF ₆ recovery container. 3. The SF ₆ recovery device according to claim 2, wherein: 4. SF ₆ collection container having the telescopic function, SF ₆ recovery apparatus according to claim 1, characterized in that it is formed by a rubber or resin film. 5. The liquefaction and recovery apparatus is operated by using the telescopic recovery container recovered from the SF ₆ encapsulation equipment and delivered to the location of the SF ₆ liquid recovery apparatus, and operating the liquefaction and recovery apparatus in a state where the predetermined telescopic recovery container is collected. SF ₆ recovery method comprising recovering by the SF ₆ in the liquid SF _{6. 6. The} S6 purified and recovered after evacuating the inside of the SF ₆ sealing device and the gas recovery device using a vacuum recovery pump.
The telescopic collection container F ₆ is sealed and connected to a recovery line of SF ₆ gas recovery apparatus, after the opening and closing valve is set to the filling side of the SF _6, SF of the telescopic recovery device in SF ₆ recovery device _A method for recovering SF _{6, comprising} recovering ₆ in vacuum.