JP2000104895A - Sf6 recovery device and method therefor - Google Patents

Sf6 recovery device and method therefor

Info

Publication number
JP2000104895A
JP2000104895A JP10276952A JP27695298A JP2000104895A JP 2000104895 A JP2000104895 A JP 2000104895A JP 10276952 A JP10276952 A JP 10276952A JP 27695298 A JP27695298 A JP 27695298A JP 2000104895 A JP2000104895 A JP 2000104895A
Authority
JP
Japan
Prior art keywords
recovery
container
gas
vacuum
telescopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10276952A
Other languages
Japanese (ja)
Inventor
Junichi Terakado
純一 寺門
Shinji Watanabe
伸次 渡辺
Fukuo Fujiwara
福雄 藤原
Yukie Yusa
幸栄 遊佐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Oxigen Ltd
Original Assignee
Hitachi Ltd
Hitachi Oxigen Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Oxigen Ltd filed Critical Hitachi Ltd
Priority to JP10276952A priority Critical patent/JP2000104895A/en
Publication of JP2000104895A publication Critical patent/JP2000104895A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To simplify movement, carry-in, and carry-out of an apparatus without enlarging a recovery device by constituting the device by a vacuum recovery pump having discharge pressure capable of evacuation and recovering inside an SF6 gas filling apparatus, and capable of expanding a telescopic recovery container, and an SF6 recovery container having a telescopic function. SOLUTION: An SF6 gas recovery device 13 is composed of a vacuum recovery pump 6, a filter harm eliminating cylinder 2, and an opening/closing valve 1. In the vacuum recovery pump 6, a scroll type and evacuation capacity is 200 little/minute, vacuum achieving degree is 1×103 Torr, and compression discharge capacity is 0.15 MpaAbs, and has a capacity which is suitable for filling to a telescopic container 14. In the telescopic containers 14, two outer layer rubber made 40 little containers for metal coating are used in parallel with each other. By rubber and resin film made telescopic container, an evacuation capacity of the recovery container is reduced to 1/50 to 1/1,000 of a metallic container. It is thus possible to easily handle this device without enlarging the recovery device of SF6.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はSF回収装置及
びその方法に係り、例えばガス絶縁開閉装置、或いはガ
ス絶縁変圧器等のガス封入機器から、機器の補修、或い
は設備更新時の廃棄時に内部に封入されているSF6
スを回収するものに好適なSF6 回収装置及びその方法
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for recovering SF 6 and a method thereof, for example, from a gas-insulated switchgear, a gas-insulated device such as a gas-insulated transformer, or the like, when repairing the device or disposing it when renewing the equipment. TECHNICAL FIELD The present invention relates to an SF 6 recovery apparatus suitable for recovering SF 6 gas sealed in a device and a method thereof.

【0002】[0002]

【従来の技術】重電設備の遮断器,変圧器等には、電流
遮断及び電気絶縁性能に優れているSF6 ガスが充填封
入されている。このSF6 ガスは地球温暖化係数が炭酸
ガスの23000倍ときわめて高く、遮断器,変圧器等
のSF6 ガス封入機器の補修並びに設備更新時の廃棄の
際に、機器内に封入されているSF6 ガスの回収リサイ
クル処理が要求されている。
2. Description of the Related Art Circuit breakers, transformers and the like of heavy electric equipment are filled with SF 6 gas which is excellent in current interruption and electric insulation performance. This SF 6 gas has a very high global warming potential of 23000 times that of carbon dioxide gas, and is sealed in the equipment when repairing SF 6 gas-filled equipment such as circuit breakers and transformers and disposing of the equipment when renewing the equipment. There is a demand for recovery and recycling of SF 6 gas.

【0003】特に電柱等に設置されているガス負荷開閉
器(遮断器)では、設置台数が多い反面SF6ガスの封
入量は20〜30リットル/台と少ないために、従来の
SF6ガス回収装置ではSF6 ガス回収装置が大きすぎ
搬入・搬出にも重機並びにトラックが必要であり不都合
である。
[0003] Particularly, in the gas load break switch which is installed in a utility pole or the like (breaker), charging amount of the number of installed units is large although SF 6 gas for Less 20-30 liters / stand, conventional SF 6 gas recovery In the device, the SF 6 gas recovery device is too large, and heavy equipment and trucks are required for loading and unloading, which is inconvenient.

【0004】SF6 ガスそのものは無臭,無毒の安全性
の高いガスであり、少量のSF6 ガス封入機器では、S
6 ガス回収作業の経済的負担比率が大きくなり、回収
せずに大気に放出される事が多かった。しかし、 '97
年12月の地球温暖化防止京都会議(COP−3)以降
は、環境改善の視点よりSF6 ガスの封入量に関係なく
SF6 ガスのガス回収リサイクルの使用の取り組みが要
求されている。
[0004] SF 6 gas itself is high gas odorless, safe, non-toxic, the small amount of SF 6 gas sealed appliances, S
The economic burden ratio of the F 6 gas recovery work increased, and it was often released to the atmosphere without recovery. However, '97
December of global warming prevention Kyoto conference (COP-3) or later, use of initiatives without SF 6 gas gas collection and recycling of related to the inclusion amount of SF 6 gas from the point of view of environmental improvement is required.

【0005】SF6 をSF6 封入機器より回収する場合
には、SF6 回収装置をSF6 封入機器の設置現場まで
搬出入し、SF6 を現地で回収する「SF6 回収装置の
移動方式」と、SF6 封入機器をSF6 回収装置の置き
場まで搬出入し、SF6 を回収・封入後にSF6 封入機
器を設置場所まで再び戻す「SF6 封入機器の移動方
式」がある。
[0005] In the case of the SF 6 is recovered from the SF 6 filled equipment, SF 6 recovery system the loading and unloading City to the installation site of the SF 6 filled equipment, the recovery of SF 6 in the local "movement method of SF 6 recovery device" If, loading and unloading city until storage of the SF 6 encapsulated devices SF 6 recovery device back after recovery and encapsulating SF 6 again SF 6 encapsulated equipment to the installation site is "moving method of SF 6 encapsulated device".

【0006】SF6 回収装置の移動方式では、一般に数
10m3 以上のSF6 封入機器が対象であり、使用され
る回収装置の荷姿(W:1000〜2300mm,D:10
00〜4500mm,H:1000〜2500mm)も大き
く、また回収装置の重量も1000〜8000kgと重く、装
置の搬出入にはトラック並びに積み下ろしにクレーン車
が不可欠でハンドリングも大掛かりとなる。
[0006] In the moving method of the SF 6 recovery apparatus, generally, SF 6 encapsulation equipment of several tens m 3 or more is targeted, and the packing form of the recovery apparatus used (W: 1000 to 2300 mm, D: 10
(00 to 4500 mm, H: 1000 to 2500 mm), and the weight of the recovery device is as heavy as 1000 to 8000 kg. A crane truck is indispensable for loading and unloading the truck, and the handling becomes large.

【0007】SF6 封入機器の移動方式は、SF6 封入
機器の撤去,移送,SF6 回収,充填,移送と一連の連
続した作業ができにくく、速やかなSF6 封入機器の復
旧が困難となり、不経済であるため現実的にはSF6
収装置を移動して一連の連続した作業が展開できるSF
6 回収装置の移動方式が取られている。
[0007] The moving method of SF 6 filled equipment, removal of SF 6 filled equipment, transport, SF 6 recovery, filling, hardly able to transfer a series of continuous work, it is difficult to recover the rapid SF 6 filled equipment, Because it is uneconomical, it is practically possible to move the SF 6 recovery device and perform a series of continuous operations
6 The collection system is moved.

【0008】しかし、SF6 の回収容量が40リットル
未満の小型のSF6 封入機器(例えばSF6 ガス負荷開
閉器)のSF6 回収作業においては、SF6 回収装置を
移動する方式ではSF6回収装置移動の搬出入の時間,
労力の負担比率が大型のSF6封入機器に比べて大きく
なる欠陥がある。
However, in the SF 6 recovery operations of the recovery volume is less than 40 liters compact SF 6 encapsulated devices SF 6 (e.g. SF 6 gas load break switch), SF 6 recovered in a manner to move the SF 6 recovery device The time for loading and unloading the equipment,
There is a defect that the labor share ratio is larger than that of a large SF 6 encapsulated device.

【0009】従来のSF6 気体回収装置の代表的な構成
系統を図7に、SF6 液体回収装置の構成を図8に、S
6 回収装置を用いたSF6 封入機器からのSF6 回収
作業の装置・機器構成を図9に示す。
FIG. 7 shows a typical configuration of a conventional SF 6 gas recovery apparatus, and FIG. 8 shows a configuration of an SF 6 liquid recovery apparatus.
FIG. 9 shows an apparatus / equipment configuration for an SF 6 recovery operation from an SF 6 encapsulation device using an F 6 recovery apparatus.

【0010】図9に示すごとく、遮断器及び変圧器等の
SF6 封入機器10のSF6 を回収する為に、SF6
入機器10とSF6 回収装置11は連結管9で接続され
ている。SF6 気体回収装置は、図7のSF6 液体回収
容器5と回収装置系内を真空排気ポンプ7で真空に排気
後、SF6 封入機器10内のSF6 を回収圧縮器3で大
気圧程度まで回収し、回収されたSF6 はSF6 液体回
収容器5にSF6 を加圧充填する。続いて真空回収ポン
プ6によりSF6 封入機器10内を真空下まで回収し、
回収ガスを回収圧縮器3を経由し、SF6 液体回収容器
5にSF6 気体で加圧充填する。
[0010] As shown in FIG. 9, in order to collect SF 6 of the SF 6 enclosing device 10 such as a circuit breaker and a transformer, the SF 6 encapsulating device 10 and the SF 6 recovery device 11 are connected by a connecting pipe 9. . SF 6 gas recovery apparatus, after evacuation and SF 6 liquid collection container 5 in FIG. 7 to the collection device system evacuated by a vacuum exhaust pump 7, approximately atmospheric SF 6 of SF 6 encapsulated device 10 in the recovery compressor 3 The recovered SF 6 is filled with SF 6 under pressure into the SF 6 liquid recovery container 5. Subsequently, the inside of the SF 6 sealed device 10 is recovered to a vacuum by the vacuum recovery pump 6,
The recovered gas is filled under pressure with SF 6 gas into the SF 6 liquid recovery container 5 via the recovery compressor 3.

【0011】SF6 液体回収装置は、図8のSF6 液体
回収容器5と回収装置系内を真空排気ポンプ7で真空に
排気後、SF6 封入機器10内のSF6 を回収圧縮器3
で大気圧程度まで回収し、出口を臨界圧まで圧縮し液化
器4を通してSF6 液体回収容器5にSF6 を液体で充
填回収する。続いて真空回収ポンプ6によりSF6 封入
機器10内を真空下まで回収し、回収ガスを回収圧縮器
3を経由し、臨界圧まで圧縮し液化器4を通してSF6
液体回収容器5にSF6 を液体で充填回収する方法が取
られている。
[0011] SF 6 liquid recovery apparatus, SF 6 liquid collection container 5 and after evacuating the collecting device based on the vacuum evacuation pump 7, SF 6 SF 6 recovery compressor 3 of the encapsulation device 10 of FIG. 8
In it recovered to about the atmospheric pressure, the SF 6 to SF 6 liquid collection container 5 through liquefier 4 compresses the outlet to the critical pressure filling recovered in liquid. Subsequently, the inside of the SF 6 sealed device 10 is recovered to a vacuum by the vacuum recovery pump 6, the recovered gas is compressed to a critical pressure via the recovery compressor 3, and is compressed through the liquefier 4 to the SF 6.
A method of filling and recovering SF 6 with liquid in the liquid recovery container 5 is adopted.

【0012】SF6 回収装置は、気体,液体の回収法を
問わず真空排気ポンプ7,回収圧縮器3,真空排気ポン
プ6,SF6 液体回収容器5は金属製の重量機器で構成
されている。
In the SF 6 recovery apparatus, the vacuum pump 7, the recovery compressor 3, the vacuum pump 6, and the SF 6 liquid recovery container 5 are composed of heavy metal devices regardless of the method of recovering gas and liquid. .

【0013】又、SF6 液体回収容器5を真空排気洗浄
する為に、タンクが負圧下の強度に耐える為には厚肉の
重量容器となり、且つ、労働安全衛生法の第2種圧力容
器並びに高圧ガス保安法の容器保安規則及び特定設備検
査規則により回収容器を製作するために製作コストが高
くなる。
In addition, since the SF 6 liquid recovery container 5 is evacuated and cleaned, the tank becomes a thick weight container in order to withstand the strength under negative pressure, and a second-class pressure container and a second type pressure container according to the Industrial Safety and Health Law. According to the container security rules and the inspection rules for specific equipment of the High Pressure Gas Safety Law, the manufacturing cost is increased because the recovery container is manufactured.

【0014】[0014]

【発明が解決しようとする課題】SF6 の回収作業で無
視できないのは、回収作業性の問題と共に、回収装置の
設計及び装置の取扱い作業に関わる高圧ガス保安法の規
制である。
What cannot be ignored in the recovery work of SF 6 is not only the problem of recovery workability, but also the regulations of the High Pressure Gas Safety Law concerning the design of the recovery equipment and the work of handling the equipment.

【0015】SF6 液体回収装置は、SF6 を気体状態
より液体状態にすると体積が約1/150程度になるた
め、小型の容器で大きい容量のSF6 ガスが回収貯蔵出
来る特徴を有する。しかし、SF6 の液体による回収が
高圧ガス保安法のガス製造行為に該当するため、液化S
6 の回収容量及び回収圧力の如何によらず、高圧ガス
保安法の許認可対象となり、SF6 回収設備の製作・検
査についても許認可が必要となる。同時にSF6 液体回
収装置の取り扱い者も高圧ガス保安法の有資格者が必要
となり小型のSF6 封入機器では適応できにくい。
The SF 6 liquid recovery apparatus has a feature that when SF 6 is changed from a gas state to a liquid state, the volume becomes about 1/150, so that a large volume of SF 6 gas can be collected and stored in a small container. However, since the recovery of SF 6 by liquid corresponds to the gas production act of the High Pressure Gas Safety Law,
Regardless of the recovery volume and recovery pressure of F 6 , it is subject to approval under the High Pressure Gas Safety Law, and the production and inspection of SF 6 recovery equipment also requires approval. At the same time, operators of SF 6 liquid recovery equipment also need to be qualified by the High Pressure Gas Safety Law, which makes it difficult to accommodate small SF 6 sealed equipment.

【0016】一方、SF6 気体回収装置でも回収容器の
充填圧が1MPa未満では、高圧ガス保安法の許認可対
象外であるが、1MPa以上では高圧ガス保安法の許認
可対象となる。
On the other hand, in the SF 6 gas recovery apparatus, if the filling pressure of the recovery container is less than 1 MPa, it is out of the scope of permission of the High Pressure Gas Safety Law, but if it is 1 MPa or more, it is subject to the High Pressure Gas Safety Law.

【0017】SF6 気体回収装置で回収容器の充填圧が
1MPa未満では、有資格者は必要ないがSF6 封入機
器の適応汎用性を考慮に、通常、水容積300〜100
0リットルで充填圧0.9MPa程度で充填する為に厚
肉鋼板製の圧力容器が使用されており、液体回収装置に
比べ幾分は軽量化ができるものの、回収装置の搬出入の
作業には重機及びトラックが必要である。
If the filling pressure of the recovery vessel in the SF 6 gas recovery apparatus is less than 1 MPa, a qualified person is not required, but the water volume is usually 300 to 100 in consideration of the versatility of the SF 6 encapsulation equipment.
A pressure vessel made of thick steel plate is used for filling at 0 liter and filling pressure of about 0.9 MPa. Although it is possible to reduce the weight somewhat compared to the liquid recovery device, it is necessary to carry out the work of loading and unloading the recovery device. Heavy equipment and trucks are required.

【0018】また、SF6 ガス回収装置の回収容器は、
充填圧力を0.1MPa 等に低く押さえても、容器内の
真空排気時の容器変形を防止する為に厚肉耐圧容器の使
用が不可欠であり、金属製容器を用いたSF6 回収装置
の軽量化は困難であった。
Further, the recovery container of the SF 6 gas recovery device is as follows:
Be kept low filling pressure 0.1MPa, etc., the use of thick pressure vessel in order to prevent the container deformation during evacuation of the container is the essential, lightweight SF 6 recovery device using a metal container Conversion was difficult.

【0019】更に、地球温暖化防止の対策としてSF6
回収リサイクリング環境を構築する為には、SF6 回収
装置をコンパクトに簡便に使用でき、且つ機器の移動搬
出入が簡単で経済的にも負担の少ないSF6 回収法が望
まれるのは言うまでもない。本発明は上述の点に鑑みな
されたもので、その目的とするところは、SF6 の回収
装置が大型化することなくコンパクトな装置で簡便に行
え、かつ、機器の移動搬出入も簡単で経済的にも負担の
少ないSF6 回収装置及びその方法を提供するにある。
Further, as a measure for preventing global warming, SF 6
In order to construct a recovery recycling environment, it is needless to say that an SF 6 recovery method that can use the SF 6 recovery device compactly and easily, and that can easily move and carry in and out equipment and that has a low economical burden is desired. . The present invention has been made in view of the above points, and it is an object of the present invention to provide a simple and economical apparatus for recovering SF 6 with a compact apparatus without increasing the size of the apparatus. It is an object of the present invention to provide an SF 6 recovery apparatus and a method thereof with a small load.

【0020】[0020]

【課題を解決するための手段】従来の回収装置は真空ポ
ンプと真空回収ポンプがついているが、回収容器の汚染
源の空気等を短時間に排気するために、排気能力も大き
く長時間の回収運転にも対応できる油循環の真空ポンプ
が使用されている。しかし、SF6 封入機器のSF6
真空下まで回収する為には、油循環の真空ポンプはSF
6 を油蒸気で回収するがガス汚染する為に、オイルフリ
ーの真空回収ポンプが使用される。
Means for Solving the Problems A conventional recovery apparatus has a vacuum pump and a vacuum recovery pump. However, in order to evacuate air or the like as a contamination source in the recovery container in a short time, the exhaust capacity is large and the recovery operation is performed for a long time. An oil-circulating vacuum pump is used, which can cope with this. However, in order to collect the SF 6 of SF 6 encapsulated device to under vacuum, vacuum pump oil circulation SF
6 is recovered with oil vapor, but an oil-free vacuum recovery pump is used to contaminate the gas.

【0021】本来、オイルフリーの真空回収ポンプが油
循環の真空ポンプの特徴である高排気能力,長時間の真
空排気運転能力を有していれば、オイルフリーの真空回
収ポンプ1台で油循環の真空ポンプを使用しないで済
む。しかし油循環の真空ポンプを用いるのはオイルフリ
ーの真空回収ポンプの弱点である排気能力及び循環油を
使用しない為の長時間排気時の耐久性の能力不足を油循
環の真空ポンプの併設化により改善しているためであ
る。
If the oil-free vacuum recovery pump originally has the high pumping capacity and the long-time vacuum pumping operation characteristic of the oil-circulating vacuum pump, the oil-circulating vacuum pump can be used for one oil-free vacuum recovery pump. The use of a vacuum pump is unnecessary. However, the use of an oil circulation vacuum pump is due to the disadvantages of the oil-free vacuum recovery pump, evacuation capacity and the lack of durability for long-term evacuation because no circulating oil is used. It is because it is improving.

【0022】そこで本発明は、SF6 ガス封入機器内を
真空排気・回収でき、伸縮自在回収容器を膨らませる事
のできる吐出圧を有する真空回収ポンプと、伸縮自在機
能をもったSF6 回収容器によって構成されるSF6
ス回収装置としたものである。
Therefore, the present invention provides a vacuum recovery pump having a discharge pressure capable of evacuating and recovering the inside of an SF 6 gas-filled device and expanding a telescopic recovery container, and an SF 6 recovery container having a telescopic function. This is an SF 6 gas recovery device composed of

【0023】また、本発明では、伸縮自在機能を持った
ゴム並びに樹脂フィルム製の伸縮自在容器により、回収
容器の真空排気容積が金属製容器の1/50〜1/10
00に軽減できるため、オイルフリーの真空回収ポンプ
の弱点である排気能力の不足と長時間排気運転の問題が
大幅に軽減できる。更に、本発明の真空回収ポンプと伸
縮自在容器の構成により、回収時間の大幅な回収時間及
び設備費の製作コスト軽減と共に、安定したSF6 の回
収が達成できる。
Further, in the present invention, the evacuation volume of the recovery container is reduced to 1/50 to 1/10 of that of the metal container by the elastic container made of rubber and resin film having the elastic function.
Since it can be reduced to 00, the shortcomings of the oil-free vacuum recovery pump, such as the shortage of the exhaust capacity and the long-term exhaust operation, can be greatly reduced. Further, the configuration of the vacuum recovery pump and the telescopic container of the present invention can achieve a large recovery time of the recovery time, a reduction in the production cost of the equipment cost, and a stable recovery of SF 6 .

【0024】また、従来の金属製容器では、真空時の容
器変形を防止する為に厚肉耐圧容器を使用する必要があ
ったが、本発明の伸縮自在容器は0〜0.11MPa A
bsの範囲で使用でき、容器の真空排気時は、容器壁が
密着変形し空間が排除され真空と同等の状態になり、金
属容器のように真空排気時の変形を考慮した厚肉耐圧構
造にする必要がなく軽量化と共に低コストのSF6 ガス
の回収が構築できる。従来のSF6 回収用の金属性耐圧
容器では、ガス充填量の如何に拘わらず容器の外観が変
らない為に、回収容器の真空は行き状態及びSF6 封入
設備内のガス回収容量が圧力計指示値よりの計算か、又
は秤量計なしでは測定ができない。本発明の伸縮自在容
器は、一定の定格容量で製作しており容器の膨らみ状態
で回収作業中に容易に回収量が目視計測でき、真空排気
状態も伸縮自在容器のしぼみ状態を目視で計測できる。
また、伸縮自在容器は定格容量で製作しており、伸縮自
在容器の連結化によりガス量の不明なガス封入機器でも
回収容量が容易に目視計測できる。
In a conventional metal container, a thick-wall pressure-resistant container had to be used in order to prevent the container from being deformed in a vacuum. However, the expandable container of the present invention has a pressure of 0 to 0.11 MPa A.
bs range, and when the container is evacuated, the container wall is closely deformed and the space is eliminated, and the space becomes the same as a vacuum. Therefore, it is possible to construct a lightweight and low-cost recovery of SF 6 gas. In conventional metallic pressure-resistant containers for recovering SF 6, the appearance of the container does not change regardless of the gas filling amount. Therefore, the vacuum of the recovery container and the gas recovery capacity in the SF 6 enclosing facility are measured by a pressure gauge. Measurement cannot be performed without calculation from the indicated value or without a weighing scale. The telescopic container of the present invention is manufactured with a constant rated capacity, and the amount of collection can be easily measured visually during the collection operation in the bulging state of the container, and the evacuated state of the telescopic container can also be visually measured in the evacuated state. .
In addition, the telescopic container is manufactured with a rated capacity, and the coupling capacity of the telescopic container makes it possible to easily and visually measure the recovery capacity of gas-filled equipment whose gas volume is unknown.

【0025】従来のSF6 回収の金属性耐圧容器の真空
排気は、真空回収ポンプの特性上、真空到達度が上がる
ほど真空引きの時間が掛かる。真空到達度と真空時間の
関係を図2のaに示す。本発明の収縮自在容器では、排
気に伴い容器が変形し真空下での容器容積はゼロに近く
なるための回収容器内は段階的な真空状態にならずに図
2のbに示す範囲で効率的に排気できる。また真空回収
ポンプの接続前の状態で回収容器内は図1の2面体15
の状態で真空回収容積を極めて小さくできので真空時間
は図2のcの状態で大幅に改善される。
In the conventional vacuum evacuation of the metal pressure-resistant container for recovering SF 6 , it takes more time to evacuate as the degree of vacuum rises due to the characteristics of the vacuum recovery pump. The relationship between the degree of vacuum arrival and the vacuum time is shown in FIG. In the shrinkable container of the present invention, the container is deformed by the evacuation, and the volume of the container under vacuum becomes close to zero. Can be exhausted. In addition, before the vacuum recovery pump is connected, the inside of the recovery container is the dihedral body 15 of FIG.
Since the vacuum recovery volume can be made extremely small in the state shown in FIG. 2, the vacuum time is greatly improved in the state shown in FIG.

【0026】従来のSF6 回収の金属性耐圧容器と異な
り、ガス回収充填前の伸縮自在容器は、金属厚肉容器の
1/30〜1/60の容器容積に縮小収納でき設置スペ
ースが大幅に軽減できる。又金属耐圧容器と異なり容器
形状を円筒状にする必要がなく、軽量化と共に容器形状
及び容量を自由にした製作ができる。
Unlike the conventional metal pressure-resistant container for recovering SF 6, the expandable container before gas collection and filling can be reduced to a container volume of 1/30 to 1/60 of the thick metal container, and the installation space is greatly increased. Can be reduced. Also, unlike a metal pressure-resistant container, it is not necessary to make the container a cylindrical shape, so that the container can be manufactured with a reduced weight and a free shape and capacity.

【0027】本発明の伸縮自在容器を立方体の形状化に
することより、容器を段積みにし車両積載効率を上げる
事ができ、回収容器の床面の設置スペースを少なく改善
できる。伸縮自在容器をフィルム及びシート状の材質で
製作しており、2m3 /個の回収容器時の総重量は20
kg(ガス重量:13kg含む)未満であり、1人で持ち運
びができる為、通常の宅配便の配送が可能となった。ま
た、回収SF6 ガスを充填した伸縮自在容器は、高圧ガ
ス貯蔵、並びに移動輸送についても高圧ガス保安法の規
制も無く、一般の宅配便にて全国各地のSF6 封入機器
の使用現場で回収したより回収容器を、SF6 を封入し
た状態で搬送でき、従来の高圧ガス保安法に準拠した配
送規制の問題も解決出来る。
By forming the expandable container of the present invention into a cubic shape, the containers can be stacked and the vehicle loading efficiency can be increased, and the installation space on the floor of the collection container can be reduced and improved. The telescoping container is made of film and sheet material, and the total weight of 2 m 3 / piece collecting container is 20
It is less than kg (including gas weight: 13 kg) and can be carried by one person, making it possible to deliver ordinary courier services. In addition, the telescopic container filled with recovered SF 6 gas is not subject to the regulations of the High Pressure Gas Safety Law for high-pressure gas storage and transportation, and is collected by general courier service at the use sites of SF 6 sealed equipment all over the country. Accordingly, the collection container can be transported in a state in which SF 6 is sealed, and the problem of the delivery regulation based on the conventional High Pressure Gas Safety Law can be solved.

【0028】SF6 液体回収装置による液体SF6 状態
の回収は、回収容器体積を約1/152にして収納でき
るため回収容器がコンパクトにでき、回収ガスの精製を
SF6 製造メーカーに委託するときの引き取り条件の
「液体SF6 」の条件も満足する。しかし、SF6 回収
装置の装置構成も複雑で装置形状も大きくなり装置の搬
出入がしにくく、SF6 液体回収装置は気体回収装置に
比べ装置価格も高くなり、有資格者運転等の制約があ
り、10m3 未満のSF6 封入機器のガス回収には適さ
ない。
The recovery of the liquid SF 6 state by SF 6 liquid recovery apparatus, when the collection container for can be accommodated by the collecting container volume approximately 1/152 can be compactly delegate purification of the collected gas to the SF 6 manufacturers Satisfies the condition of “liquid SF 6 ” of the pickup condition. However, the configuration of the SF 6 recovery device is complicated and the shape of the device is large, making it difficult to carry in and out the device. The SF 6 liquid recovery device is more expensive than the gas recovery device, and the operation of qualified personnel is limited. Yes, it is not suitable for gas recovery of SF 6 sealed equipment less than 10 m 3 .

【0029】また、従来のSF6 気体回収装置では、液
体回収装置に比べ有資格者の必要もなく、幾分小型化が
出来るものの、回収装置の主要構成設備である、SF6
回収容器の製作は汎用性を持たせる為500〜1000
リットルの容器が使用されており、搬送には重機及びト
ラックが必要で装置の移動も容易ではない。
Further, in the conventional SF 6 gas collecting apparatus, without the need for qualified personnel compared to the liquid recovery apparatus, although somewhat compact can be a major construction equipment recovery apparatus, SF 6
The production of the collection container is 500-1000 to give versatility.
Because a liter container is used, heavy equipment and trucks are required for transportation, and the movement of the equipment is not easy.

【0030】本発明は、全国の各現地にて伸縮自在容器
で回収したSF6 気体を、SF6 液体回収装置の設置所
在地に集約集荷し、集約回収した少量の気体SF6 を纏
めて効率的に液体回収装置により、液化回収することが
できる。
According to the present invention, SF 6 gas collected in a telescopic container at each site in the whole country is collected and collected at the installation location of the SF 6 liquid recovery device, and a small amount of the collected and collected gas SF 6 is efficiently collected. The liquid can be liquefied and recovered by the liquid recovery device.

【0031】SF6 ガス封入機器より回収した伸縮自在
容器を宅配便を用い、SF6 液体回収装置所在地まで配
送する。所定の伸縮自在容器が集荷された状態にて、液
化回収装置を運転し気体SF6 を液体SF6 にして回収
する。
The extensible container collected from the SF 6 gas filling device is delivered to the location of the SF 6 liquid recovery device using a home delivery service. The liquefaction / recovery device is operated in a state where a predetermined telescopic container is collected, and the gas SF 6 is recovered as the liquid SF 6 .

【0032】ガス回収容量が40リットル未満の小型の
SF6 封入機器(SF6 ガス負荷開閉器)では、本発明
の伸縮回収容器40リットルで191本分(7640リ
ットル)を水容積47.6 リットルの高圧容器1本に1
人作業でも充填でき、再製品化及びSF6 メーカーへの
精製処理が容易となった。液化回収装置で回収した伸縮
自在容器は、SF6 を抜き取った後では、密着容器の状
態でガス充填時の容器容積の1/30〜1/60に縮小
でき宅配便で送付元に低コストで返送できる。従来は回
収装置で金属容器に回収し、SF6 封入機器に再充填す
る時には常に金属製の厚肉の重量容器を回収装置とトラ
ック及び積み下ろしのための重機を使用し同時移動する
必要があった。本発明のSF6 真空回収ポンプとSF6
気体ガスを封入した伸縮自在容器によりSF6 封入機器
に充填する。再封入後の伸縮自在容器を折りたたみ収納
でき、軽車両による搬送回収作業が容易となった。
In a small SF 6 sealed device (SF 6 gas load switch) having a gas recovery capacity of less than 40 liters, 191 bottles (7640 liters) of a stretchable recovery container of the present invention of 40 liters (7640 liters) were used in a water volume of 47.6 liters. 1 in one high pressure vessel
Can also be filled with people work, purification treatment to re-commercialization and SF 6 manufacturers has become easy. After the SF 6 has been extracted, the expandable container collected by the liquefaction recovery device can be reduced to 1/30 to 1/60 of the container volume at the time of gas filling in the state of the tightly packed container, and can be delivered to the sender by courier at low cost. Can be returned. Conventionally, when collecting in a metal container with a recovery device and refilling SF 6 encapsulation equipment, it was necessary to always move a heavy metal heavy container using a recovery device and a truck and a heavy machine for loading and unloading at the same time. . SF 6 vacuum recovery pump of the present invention and SF 6
The SF 6 encapsulation equipment is filled with a telescopic container enclosing gaseous gas. The retractable container after re-encapsulation can be folded and stored, facilitating transportation and collection work by light vehicles.

【0033】SF6 封入機器内及び気体回収装置内を真
空回収ポンプを用い真空排気した後、精製・回収したS
6 を伸縮自在容器をSF6 気体回収装置の回収ライン
に接続する。各開閉弁をSF6 封入機器充填側にセット
した後、SF6 ガス回収装置にて伸縮自在容器のSF6
を真空回収し、SF6 封入機器のSF6 封入が簡便にで
きる。
After evacuating the inside of the SF 6 sealing device and the gas recovery device using a vacuum recovery pump, the purified and recovered S
Connect F 6 to the retractable container of the SF 6 gas recovery unit. After setting each open / close valve on the filling side of the SF 6 encapsulation equipment, the SF 6 gas recovery device sets the SF 6
The vacuum recovery, SF 6 encapsulated in SF 6 encapsulated devices can be conveniently.

【0034】[0034]

【発明の実施の形態】本発明の一実施例を図1を用いて
説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIG.

【0035】該図に示すごとく、本実施例でのSF6
体回収装置13は真空回収ポンプ6,フィルター除害筒
2、及び開閉弁1で構成されており、機器間は図1のよ
うに接続されている。真空回収ポンプ6はスクロール式
で真空排気能力は200リットル/分、シンク到達度は
1×10-3Torr、圧縮吐出能力は0.15MPa Absで
伸縮自在容器14に充填するには十分な能力を持ってい
る。伸縮自在容器14は、メタルコーテングの外層ゴム
製の40リットル容器を並列にし2個を用いた。SF6
封入機器10は容積30リットルで0.13MPa Ab
sでSF6 が39リットル封入されている。SF6 封入
機器10とSF6 気体回収装置13間の開閉弁1を閉に
した後、伸縮自在容器14及び回収装置系内の空気を真
空回収ポンプ6を用い大気に排気した。伸縮自在容器1
4が密着し真空排気が状態より2分間保持した後、2個
中の1個の伸縮自在容器14を閉にし、続いて大気放出
弁を閉にした後、真空回収ポンプ6を停止した。
As shown in the figure, the SF 6 gas recovery device 13 in this embodiment is composed of a vacuum recovery pump 6, a filter elimination cylinder 2, and an on-off valve 1, and between the devices as shown in FIG. It is connected. The vacuum recovery pump 6 is a scroll type, has a vacuum evacuation capacity of 200 liter / min, a sink reach of 1 × 10 −3 Torr, a compression discharge capacity of 0.15 MPa Abs, and has a sufficient capacity to fill the expandable container 14. have. As the telescopic container 14, two 40-liter containers made of metal-coated outer layer rubber were used in parallel. SF 6
The encapsulation device 10 has a capacity of 30 liters and 0.13 MPa Ab.
In this case, 39 liters of SF 6 are sealed. After closing the on-off valve 1 between the SF 6 sealing device 10 and the SF 6 gas recovery device 13, the air in the telescopic container 14 and the recovery device system was exhausted to the atmosphere using the vacuum recovery pump 6. Telescopic container 1
After the vacuum evacuation was maintained for 2 minutes from the state in which the vacuum pump 4 was brought into close contact, one of the two expandable containers 14 was closed, and then the air release valve was closed, and then the vacuum recovery pump 6 was stopped.

【0036】次に、SF6 封入機器10と伸縮自在容器
14間並びに真空回収ポンプ6のバイパス弁を開ける
と、SF6 封入機器10に充填されていた大気圧以上の
加圧分(0.3MPa)のSF6が伸縮自在容器14に移
動し、SF6 封入機器10と伸縮自在容器14間は、約
0.1MPaの大気圧(等圧)になる。
Next, when the bypass valve of the vacuum recovery pump 6 is opened between the SF 6 enclosing device 10 and the extensible container 14, the pressurized gas (0.3 MPa) above the atmospheric pressure filled in the SF 6 enclosing device 10 is opened. The SF 6 of (1 ) moves to the telescopic container 14, and the pressure between the SF 6 enclosing device 10 and the telescopic container 14 becomes about 0.1 MPa (atmospheric pressure).

【0037】この大気圧の充填操作により、SF6 封入
機器10が略0.1MPa になり、伸縮自在容器14側
に9リットルが回収された。続いて真空回収ポンプ6の
バイパス弁を閉にした後、真空回収ポンプ6を起動しS
6 封入機器10のSF6 を真空回収した。SF6 封入
機器10の大気圧下のSF6 量は30リットルであり、
伸縮自在容器14の容量40リットルが満杯の状態を目
視確認により回収状態を確認でき取り扱い経験の少ない
作業員でも的確な作業が出来た。
By the filling operation at atmospheric pressure, the pressure of the SF 6 enclosing device 10 became approximately 0.1 MPa, and 9 liters were collected in the expandable container 14 side. Subsequently, after closing the bypass valve of the vacuum recovery pump 6, the vacuum recovery pump 6 is started and S
SF 6 of the F 6 sealing device 10 was vacuum-collected. The SF 6 volume under atmospheric pressure of the SF 6 encapsulation device 10 is 30 liters,
The state of recovery was confirmed by visual confirmation of the state in which the capacity of the expandable container 14 was full of 40 liters, and even workers with little handling experience could carry out proper work.

【0038】試験に用いた伸縮自在容器14は、大きさ
は縦40cm×横50cm×高さ10cmでSF6 充填ガス容
量40リットルと縦100cm×横100cm×高さ100
cmでSF6 充填ガス容量1000リットルを製作した。
材質はゴムのガス透過性及びSF6 ガスの容器内の汚染
を防止する為にゴムシートの金属フィルムをコーテング
したものと、樹脂製の多層膜フィルムのものを製作した
バルブはベローシールバルブを用いている。真空排気時
は樹脂製及び金属フィルムともに密着し良好な真空排気
が出来た。SF6 注入後の1週間後に伸縮自在容器14
のSF6 ガス中の酸素濃度を測定したが0.1%以下で
酸素濃度の変化は認められず良好であった。
The expandable container 14 used in the test was 40 cm long × 50 cm wide × 10 cm high with a SF 6 filling gas capacity of 40 liters and 100 cm long × 100 cm wide × 100 height.
A volume of 1000 liters of SF 6 filling gas was produced in cm.
The material used is a rubber sheet metal film coated in order to prevent rubber gas permeability and SF 6 gas contamination in the container, and a bellows seal valve is used for valves made of resin multilayer film. ing. At the time of evacuation, both the resin and metal films adhered to each other, and good evacuation was achieved. One week after SF 6 injection, the elastic container 14
Of the measured oxygen concentration of SF 6 gas is a change in the oxygen concentration was good not observed at 0.1% or less.

【0039】200リットル/分の真空排気ポンプで金
属製の厚肉回収容器1000リットルを大気圧より5To
rr迄排気するのに30分を要したが、本発明の伸縮自在
容器は8分で5Torrの排気ができ排気時間が約1/4以
下に短縮できた。
Using a 200 liter / min vacuum pump, 1000 liters of a metal thick-walled recovery container is
Although it took 30 minutes to evacuate to rr, the extensible container of the present invention can evacuate to 5 Torr in 8 minutes, and the evacuation time can be reduced to about 1/4 or less.

【0040】また、本発明の伸縮自在容器は収納状態で
の容積は4リットル以下であり1000リットルを大気圧よ
り5Torr迄の排気では約2分で排気でき金属製の厚肉回
収容器の排気時間に比べて1/15に飛躍的に排気時間
の短縮が出来た。
The retractable container of the present invention has a capacity of 4 liters or less in a housed state, and can evacuate 1000 liters from atmospheric pressure to 5 Torr in about 2 minutes. The evacuation time was dramatically reduced to 1/15 of that of.

【0041】尚、伸縮自在容器の破裂を防止するため
に、SF6 回収装置内に圧力減圧弁を設けて減圧供給す
るようにしてもよい。
Incidentally, in order to prevent bursting of the telescopic container, a pressure reducing valve may be provided in the SF 6 recovery apparatus to supply the container under reduced pressure.

【0042】本発明の伸縮自在容器は輸送中の容器の汚
れ及び傷付きを防止するために、伸縮自在容器をダンボ
ール梱包をした。これを図4に示す。該図では、伸縮自
在容器でSF6 封入状態のダンボール箱収納状態を1
4、SF6 排気状態のダンボール箱収納状態を15に示
す。前述した40リットル伸縮自在容器はバルブ付き
で、SF6 充填前の大きさは縦15cm×横20cm×高さ
10cmのダンボール箱に収納できた。同様に1000リ
ットルのSF6 充填前の大きさは縦30cm×横40cm×
高さ20cmのダンボール箱に収納できた。
The extensible container of the present invention is packed in a cardboard box in order to prevent the container from being stained and damaged during transportation. This is shown in FIG. In the figure, the storage state of the cardboard box with SF 6 sealed in a telescopic container is 1
4. The cardboard box storage state in the SF 6 exhausted state is shown in FIG. The above-mentioned 40-liter telescopic container was provided with a valve, and could be stored in a cardboard box measuring 15 cm long × 20 cm wide × 10 cm high before filling with SF 6 . Similarly, the size before filling 1000 liters of SF 6 is 30 cm long x 40 cm wide x
It was stored in a 20 cm high cardboard box.

【0043】SF6 充填後の大きさは縦50cm×横50
cm×高さ15cmのダンボール箱に収納でき、1000リ
ットルのSF6 充填後の大きさは縦110cm×横105
cm×高さ105cmのダンボール箱に収納できた。
The size after filling with SF 6 is 50 cm long × 50 cm wide.
It can be stored in a cardboard box of cm × 15 cm in height, and the size after filling with 1000 liters of SF 6 is 110 cm × 105 cm.
It was stored in a cardboard box measuring cm × 105 cm in height.

【0044】1000のリットルSF6 充填後の重量も
18.5kg で1人での搬送も可能で宅配便の配送が出来
る荷姿に出来た。
The weight after filling with 1000 liters of SF 6 was 18.5 kg, so that it could be transported by one person and could be delivered in a courier service.

【0045】現在、使用されている小型の液体回収装置
でも、3000〜6000リットル/Hrの気体SF6
を液化SF6 にする能力をもっている。能力3000リ
ットル/Hrの液体回収装置を小型のSF6 封入機器の
現場に搬入しSF6 を回収使用する為のハンドリング時
間は3〜4時間掛かる。
At present, even a small-sized liquid recovery apparatus used has a gas SF 6 of 3000 to 6000 liters / Hr.
It has the ability to liquefy SF 6 a. It takes 3 to 4 hours to carry a liquid recovery device with a capacity of 3000 liters / Hr to the site of a small SF 6 encapsulation device to recover and use SF 6 .

【0046】これに対しSF6 ガス量40リットルを液
化回収する正味の時間は1分未満である。500リット
ル未満のSF6 容器に充填されている気体SF6 をSF
6 封入機器の設置場所で液体回収していたのでは、液体
回収装置の運転前の準備ハンドリングに半日をかけ、S
6 液化回収には数分となり準備と実作業時間のバラン
スが悪くきわめて効率が悪い。又、液体回収では、液体
SF6 を状態の確認に必要な液体SF6 で10リットル
相当の気体SF6 約1400リットルが必要となり、液
体回収装置の運転では1500リットル相当の気体SF
6 が必要である。
On the other hand, the net time to liquefy and recover 40 liters of SF 6 gas is less than 1 minute. SF 6 gas filled in a SF 6 container of less than 500 liters
6 If the liquid was collected at the place where the encapsulation equipment was installed, it took half a day to prepare and handle the liquid
F 6 liquefaction recovery takes several minutes, and the balance between preparation and actual working time is poor, resulting in extremely low efficiency. In the liquid recovery, the liquid SF 6 required to confirm the state of the liquid SF 6 requires about 1400 liters of gaseous SF 6 equivalent to 10 liters, and the operation of the liquid recovery apparatus requires 1500 liters of gaseous SF 6 equivalent to 1500 liters.
6 is required.

【0047】本発明の集約回収法を図3に示す。本発明
は全国各地にて伸縮自在容器で回収したSF6 気体を、
SF6 液体回収装置の設置所在地に集約集荷し、集約回
収した少量の気体SF6 を纏めて効率的に液化回収装置
により液化回収する方法である。
FIG. 3 shows the collective recovery method of the present invention. The present invention uses SF 6 gas collected in telescopic containers throughout the country,
This method collects and collects a small amount of gas SF 6 collected and collected at the location where the SF 6 liquid recovery device is installed, and collects and collects the gas SF 6 efficiently and efficiently using the liquefaction and recovery device.

【0048】図3に示すごとく、SF6 封入機器10よ
りSF6 を回収した伸縮自在容器15を宅配便16を用
い、SF6 液体回収装置設置場19まで配送し、所定の
伸縮自在容器15が集荷された状態にて液化回収装置1
7を運転し気体SF6 を液体SF6 にして回収する。
As shown in FIG. 3, the extensible container 15 from which the SF 6 has been recovered from the SF 6 encapsulating device 10 is delivered to the SF 6 liquid recovery apparatus installation site 19 by using a courier service 16 so that the predetermined extensible container 15 is Liquefaction and recovery device 1 in a state where cargo is collected
7 is operated to convert gaseous SF 6 to liquid SF 6 and collect it.

【0049】伸縮自在容器の集荷・集合による液体SF
6 回収法の系統を図5に示す。
Liquid SF by collection and collection of telescopic containers
The system of the 6 recovery method is shown in FIG.

【0050】宅配便16で全国よりSF6 を回収し配送
された伸縮自在容器14をSF6 液体回収装置設置場1
9に搬入する。SF6 ガス回収ヘッダーが気体SF6
1500リットル溜まった時点でSF6 ガス回収ヘッダー2
0に接続する。図5では1000リットル×2個,40リッ
トル×3個の合計2120リットルを接続した。
The telescopic container 14 from which the SF 6 is collected and delivered from the whole country by the courier service 16 is transferred to the SF 6 liquid collection device installation site 1
9 SF 6 gas recovery header is gas SF 6
When 1500 liters are collected, SF 6 gas recovery header 2
Connect to 0. In FIG. 5, a total of 2120 liters of 1000 liters × 2 pieces and 40 liters × 3 pieces were connected.

【0051】続いて液体回収装置17,SF6 ガス回収
ヘッダー20,SF6 液体回収容器5の系内を真空排気
ポンプ7にて真空に排気する。
Subsequently, the inside of the system including the liquid recovery device 17, the SF 6 gas recovery header 20, and the SF 6 liquid recovery container 5 is evacuated by the vacuum exhaust pump 7.

【0052】続いて0.07〜0.7MPa Abs.の範
囲で吸気・圧縮できる回収圧縮器3により、伸縮自在容
器14内の気体SF6 を液化しSF6 液体回収容器5に
充填した。金属製の厚肉耐圧容器では、大気圧(約0.1
MPa Abs.)以下のSF6は真空回収ポンプ6を介し
た後、回収圧縮器3で回収する必要があったが、本発明
では回収容器が0.1MPa Abs. 時点で収縮し真空
回収ポンプ6を運転しなくとも2120リットルの気体
SF6 を液化できた。
Subsequently, the gas SF 6 in the telescopic container 14 was liquefied and filled into the SF 6 liquid recovery container 5 by the recovery compressor 3 capable of suctioning and compressing in the range of 0.07 to 0.7 MPa Abs. Atmospheric pressure (approximately 0.1
(MPa Abs.) The following SF 6 had to be recovered by the recovery compressor 3 after passing through the vacuum recovery pump 6, but in the present invention, the recovery container shrinks at the time of 0.1 MPa Abs. 2120 liters of gaseous SF 6 could be liquefied without operating.

【0053】金属製の厚肉耐圧容器で、2120リット
ルを0.1MPa Abs. に充填した気体SF6 を液体
回収するには2.5 時間掛かるが、本発明では図2に示
す真空回収時間が改善でき1時間で回収できた。従来の
液体回収装置の現地搬入方式に比べ、高圧ガス保安法に
よる有資格者の派遣費は不要となり、SF6 回収、液化
作業工程の調整が容易となり、回収人件費及び容器運搬
費は本発明は、従来の約1/2以下に改善できた。
It takes 2.5 hours to recover the liquid SF 6 filled with 2120 liters of 0.1 MPa Abs. In a metal thick-wall pressure-resistant container. However, in the present invention, the vacuum recovery time shown in FIG. It improved and was recovered in one hour. Compared with the conventional on-site delivery method of liquid recovery equipment, dispatching of qualified personnel by the High Pressure Gas Safety Law is not necessary, SF 6 recovery and liquefaction work process can be adjusted easily, recovery labor cost and container transportation cost are the same as the present invention. Was improved to about 1/2 or less of the conventional one.

【0054】SF6 充填機器の補修の為に、充填されて
いたSF6 を金属製の厚肉耐圧容器に充填した後、補修
後に再度SF6 充填機器に戻すためには、金属製の厚肉
耐圧容器の真空回収時間や充填量の確認管理に時間を要
した。
In order to repair the SF 6 filling equipment, after filling the filled SF 6 into a thick metal pressure-resistant container, and after returning to the SF 6 filling equipment again, it is necessary to use a thick metal It took time to check and control the vacuum recovery time and filling volume of the pressure vessel.

【0055】本発明では、図6に示すように、真空回収
ポンプ6のみで真空回収時間が短縮でき、且つ伸縮自在
容器の収縮状態の目視確認によりSF6 ガスの充填量が
容易に確認管理出来た。
In the present invention, as shown in FIG. 6, the vacuum recovery time can be reduced only by the vacuum recovery pump 6, and the filling amount of SF 6 gas can be easily confirmed and managed by visually checking the contracted state of the expandable and contractible container. Was.

【0056】本発明の伸縮自在容器を用いたSF6 封入
機器へのSF6 充填法を図6に示す。
FIG. 6 shows a method of filling SF 6 into an SF 6 enclosing device using the stretchable container of the present invention.

【0057】修理・点検を終了したSF6 封入機器10
とSF6 気体回収装置13,伸縮自在容器14を接続す
る。続いて真空回収ポンプのバイパスの開閉弁1を経由
して真空回収ポンプ6にてSF6 封入機器内を真空排気
する。続いて真空回収ポンプのバイパスの開閉弁1を閉
にし、伸縮自在容器14のSF6 を真空回収ポンプ6を
経由してSF6 封入機器10にSF6 を充填する。
SF 6 sealed equipment 10 after repair and inspection
And the SF 6 gas recovery device 13 and the telescopic container 14 are connected. Subsequently, the inside of the SF 6 sealing device is evacuated by the vacuum recovery pump 6 via the on-off valve 1 of the bypass of the vacuum recovery pump. Subsequently, the on-off valve 1 of the bypass of the vacuum recovery pump is closed, and SF 6 in the telescopic container 14 is filled with SF 6 into the SF 6 enclosing device 10 via the vacuum recovery pump 6.

【0058】従来の金属製の厚肉耐圧容器とSF6 気体
回収装置による、SF6 封入機器(SF6 充填量40リ
ットル)充填圧0.01MPa では、SF6 封入機器の
真空排気に30分、及び容器の吸引,充填に30分の合
計1時間を要していたが、本発明では、伸縮自在容器1
4によってSF6 封入機器の真空排気に30分、及び容
器の吸引,充填に5分と容器の真空排気時間が大幅に改
善され、また、伸縮自在容器1440リットルの容器外
層が図6の14から17の伸縮状態になり、目視により
容易にガスの封入機器10へのSF6 充填量が確認でき
た。
[0058] according to conventional metal thick pressure-resistant container and SF 6 gas recovery apparatus, SF 6 encapsulated devices (SF 6 filling of 40 liters) The filling pressure 0.01 MPa, 30 minutes evacuation of SF 6 encapsulated devices, In addition, the suction and filling of the container required a total of 30 minutes and one hour.
4 significantly improves the vacuum evacuation time of the container, e.g., 30 minutes for evacuation of the SF 6 encapsulation equipment, and 5 minutes for suction and filling of the container. As a result, the filling amount of SF 6 into the gas filling device 10 could be easily confirmed visually.

【0059】今までは、少容量のSF6 ガス充填してい
る小型封入機器でのSF6 の回収は設置台数が多く、従
来のSF6 回収装置及び回収容器では、コンパクトな荷
姿が困難なばかりか、装置,容器の価格が掛かりすぎ、
同時にハンドリングも大変であったが、本発明により、
SF6 回収装置並びにSF6 回収容器がライトバン乗用
車に積載できる大きさが可能となり、搬出入並びに1人
でのガス回収作業ができる。
Until now, the collection of SF 6 by a small encapsulation device filled with a small volume of SF 6 gas has a large number of installations, and it is difficult for a conventional SF 6 recovery device and a recovery container to have a compact package. Not only is the price of equipment and containers too high,
At the same time, handling was difficult, but according to the present invention,
The SF 6 recovery device and the SF 6 recovery container can be large enough to be loaded on a light van passenger car, and can be carried in / out and gas recovery can be performed by one person.

【0060】97年の地球温暖化防止京都会議を考慮
し、SF6 大気放出ゼロを目標にした環境の整備におい
ては、SF6 回収装置及びSF6 回収容器が経済的に安
価入手できる必要があるが、本発明では、ハンドリング
の簡便性と共に、回収装置及び回収容器も安くでき、S
6 の回収,循環を含めたリサイクル環境の整備には不
可欠なものとなっている。同時に本発明の伸縮自在容器
により、容器がコンパクトとなり容器搬出入にも、一般
路線便並びに宅配便の使用が可能となり、全国各地より
回収したSF6 を精製基地並びにSF6 液体回収基地ま
での集荷・集合が用意となる。
In consideration of the 1997 Kyoto Conference on the Prevention of Global Warming, in order to improve the environment with the goal of achieving zero emission of SF 6 from the atmosphere, it is necessary that SF 6 recovery equipment and SF 6 recovery containers be economically available at low cost. However, in the present invention, the collection device and the collection container can be inexpensive with the simplicity of handling,
Recovery of F 6, have become indispensable to the development of recycling environment, including the circulation. At the same time, the telescopic container of the present invention enables the container to be compact and the use of general route service and home delivery service for the carrying in and out of the container, and the collection of SF 6 collected from all over the country to the refining base and SF 6 liquid collection base.・ A set is ready.

【0061】また、SF6 封入ガスは、封入機器の兇器
使用、又は機器への過負荷に劣化でSF6 中にフッ化水
素,二酸化硫黄,各種酸性フッ素化合物のガスが発生す
る。これらのSF6 に含有される分解ガスは、モネル,
インコレル等の高級金属を除いては、金属性鋼製容器で
は耐食性が劣り、かつ、分解ガスで汚染された容器内を
完全に洗浄することは難しく、費用も非常に高いものと
なる。
Further, the SF 6 sealed gas is used in a sealed device or deteriorates due to an overload on the device, and hydrogen fluoride, sulfur dioxide and various acidic fluorine compounds are generated in SF 6 . The decomposition gas contained in these SF 6 is Monel,
Except for high-grade metals such as incolel, metallic steel containers have poor corrosion resistance, and it is difficult to completely clean the inside of a container contaminated with decomposition gas, and the cost is very high.

【0062】本発明の伸縮自在容器は、プラスチック並
びにゴム等の耐食材料の多層構造で軽量に、かつ、製作
でき安全に金属容器の1/10以下の低コストで製作で
きる。使い捨てタイプの使用も可能でハンドリングも簡
単で安全である。また、伸縮自在容器はアルカリにも強
く、アルカリ溶剤,溶液を注入しておくことにより、酸
性ガスの中和処理が回収と同時に安全に簡便に処理回収
できる特徴を有する。結局本発明は、地球環境整備に必
要な次の5条件を満たしている。
The telescopic container of the present invention has a multilayer structure made of a corrosion-resistant material such as plastic and rubber, and can be manufactured lightly and safely at a cost 1/10 or less of a metal container. Disposable type can be used, handling is easy and safe. In addition, the telescopic container is resistant to alkalis, and has a feature that by injecting an alkaline solvent or a solution, the neutralization treatment of the acidic gas can be performed safely and simply at the same time as the recovery. As a result, the present invention satisfies the following five conditions necessary for improving the global environment.

【0063】1):専門的な知識が無くても設備が簡単
に小人数で使用できる。
1): The facility can be easily used by a small number of people without any specialized knowledge.

【0064】2):全国的な規模で、地域を限定しない
で使用展開できる。
2): It can be used and developed on a nationwide scale without limiting the area.

【0065】3):SF6 回収設備主要な構成機器の回
収機器並びに回収容器が経済的普及に支障を及ぼさずに
入手できる。
3): SF 6 recovery equipment The recovery equipment and recovery container of the main constituent equipment can be obtained without hindering economic spread.

【0066】4):機器及び容器の授受・配送が全国規
模で、既存の一般路線便及び宅配便により経済的に対応
できる。
4): Delivery and delivery of equipment and containers are on a nationwide scale, and can be economically supported by existing general route and home delivery services.

【0067】5):回収,配送,精製等のリサイクリン
グの応用展開が容易なこと。
5): Easy application of recycling, such as collection, delivery, and purification.

【0068】[0068]

【発明の効果】以上説明した本発明によれば、SF6
回収が装置が大型化することなくコンパクトな装置で簡
便に行え、かつ、機器の移動搬出入も簡単で経済的にも
負担の少ないSF6 回収装置及びその方法を得ることが
できる。
According to the present invention as described in the foregoing, the recovery of SF 6 is apparatus conveniently performed in a compact device without increasing the size, and also the movement loading and unloading equipment is simple economically burden A small SF 6 recovery apparatus and method can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のSF6 気体回収装置の一実施例を示す
系統図である。
FIG. 1 is a system diagram showing one embodiment of an SF 6 gas recovery device of the present invention.

【図2】本発明の一実施例における真空排気(回収)ポ
ンプと排気時間の関係を示す特性図である。
FIG. 2 is a characteristic diagram showing a relationship between a vacuum evacuation (recovery) pump and an evacuation time in one embodiment of the present invention.

【図3】本発明のSF6 回収方法の一実施例を示す系統
図である。
FIG. 3 is a system diagram showing one embodiment of the SF 6 recovery method of the present invention.

【図4】本発明の一実施例における伸縮自在容器の輸送
用荷姿を示す斜視図である。
FIG. 4 is a perspective view showing a shipping package of a telescopic container according to an embodiment of the present invention.

【図5】本発明の伸縮自在容器の集荷・集約による液体
SF6 回収方法を示す系統図である。
FIG. 5 is a system diagram showing a method for recovering liquid SF 6 by collecting and consolidating telescopic containers according to the present invention.

【図6】本発明の一実施例におけるSF6 封入機器への
SF6 充填方法を示す系統図である。
6 is a system diagram showing a SF 6 filling method to SF 6 encapsulated device according to an embodiment of the present invention.

【図7】従来のSF6 気体回収装置の一例を示す系統図
である。
FIG. 7 is a system diagram showing an example of a conventional SF 6 gas recovery device.

【図8】従来のSF6 液体回収装置の一例を示す系統図
である。
FIG. 8 is a system diagram showing an example of a conventional SF 6 liquid recovery device.

【図9】従来のSF6 回収作業の機器構成を示す図であ
る。
FIG. 9 is a diagram showing a device configuration of a conventional SF 6 recovery operation.

【符号の説明】[Explanation of symbols]

1…開閉弁、2…フィルター除害筒、3…回収圧縮器、
4…液化器、5…SF6液体回収容器、6…真空回収ポン
プ、7…真空排気ポンプ、8…蒸発器、9…連結管、1
0…SF6 封入機器、11…SF6 回収装置、12…現
地SF6 封入設備、13…SF6 気体回収装置、14…
伸縮自在容器(SF6 封入状態)、15…伸縮自在容器
(SF6 排気状態)、16…宅配便、17…液体回収装
置、19…SF6 液体回収装置設置場、20…SF6
ス回収ヘッダー。
1 ... open / close valve, 2 ... filter abatement cylinder, 3 ... recovery compressor,
4 liquefier, 5 SF 6 liquid recovery container, 6 vacuum recovery pump, 7 vacuum pump, 8 evaporator, 9 connecting pipe, 1
0: SF 6 sealing equipment, 11: SF 6 recovery equipment, 12: On-site SF 6 sealing equipment, 13: SF 6 gas recovery equipment, 14 ...
Telescopic container (SF 6 enclosed state), 15: Telescopic container (SF 6 exhausted state), 16: Courier service, 17: Liquid recovery device, 19: SF 6 liquid recovery device installation site, 20: SF 6 gas recovery header .

───────────────────────────────────────────────────── フロントページの続き (72)発明者 渡辺 伸次 茨城県日立市国分町三丁目1番17号 日立 酸素株式会社内 (72)発明者 藤原 福雄 茨城県日立市国分町一丁目1番1号 株式 会社国分機器エンジニアリング内 (72)発明者 遊佐 幸栄 茨城県日立市国分町一丁目1番1号 株式 会社日立製作所国分工場内 Fターム(参考) 3E073 AA01 DB03  ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Shinji Watanabe 3-1-1-17 Kokubuncho, Hitachi City, Ibaraki Prefecture Within Hitachi Oxygen Co., Ltd. (72) Inventor Fukuo Fujiwara 1-1-1 Kokubuncho, Hitachi City, Ibaraki Prefecture Inside Kokubu Equipment Engineering Co., Ltd. (72) Inventor Koei Yusa 1-1-1 Kokubuncho, Hitachi City, Ibaraki Prefecture F term in Hitachi Kokubu Factory 3E073 AA01 DB03

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】SF6 が封入されているSF6 封入機器と
連通され、該SF6 封入機器内のSF6 を回収するSF
6 回収容器を備えたSF6 回収装置において、 前記SF6 回収容器は、伸縮自在な機能をもって形成さ
れていることを特徴とするSF6 回収装置。
1. A SF 6 is communicated with SF 6 encapsulated devices are sealed, SF for recovering SF 6 in the SF 6 encapsulated device
In SF 6 recovery apparatus having a six-collecting container, the SF 6 collecting container, SF 6 recovery apparatus characterized by being formed with a stretchable capability.
【請求項2】前記伸縮自在な機能をもったSF6 回収容
器は連通管を介して前記SF6 封入機器と接続され、該
連通管の途中に真空回収ポンプが設けられていることを
特徴とする請求項1記載のSF6 回収装置。
2. The apparatus according to claim 1, wherein the SF 6 recovery container having an expandable and contractible function is connected to the SF 6 enclosing device via a communication pipe, and a vacuum recovery pump is provided in the communication pipe. The SF 6 recovery device according to claim 1, wherein
【請求項3】前記真空回収ポンプは、前記SF6 封入機
器内を真空排気・回収でき、かつ、前記伸縮自在な機能
をもったSF6 回収容器を膨らませることのできる吐出
し圧を有することを特徴とする請求項2記載のSF6
収装置。
3. The vacuum recovery pump has a discharge pressure capable of evacuating and recovering the inside of the SF 6 encapsulating device and inflating the expandable SF 6 recovery container. 3. The SF 6 recovery device according to claim 2, wherein:
【請求項4】前記伸縮自在な機能をもったSF6 回収容
器は、ゴム或いは樹脂フィルム製で形成されていること
を特徴とする請求項1記載のSF6 回収装置。
4. SF 6 collection container having the telescopic function, SF 6 recovery apparatus according to claim 1, characterized in that it is formed by a rubber or resin film.
【請求項5】SF6 封入機器より回収した伸縮自在回収
容器を用い、SF6 液体回収装置所在地まで配送し、所
定の伸縮自在回収容器が集荷された状態にて前記液化回
収装置を運転し気体SF6 を液体SF6 にして回収する
ことを特徴とするSF6 回収方法。
5. The liquefaction and recovery apparatus is operated by using the telescopic recovery container recovered from the SF 6 encapsulation equipment and delivered to the location of the SF 6 liquid recovery apparatus, and operating the liquefaction and recovery apparatus in a state where the predetermined telescopic recovery container is collected. SF 6 recovery method comprising recovering by the SF 6 in the liquid SF 6.
【請求項6】SF6 封入機器内及び気体回収装置内を真
空回収ポンプを用い真空排気した後、精製・回収したS
6 が封入された伸縮自在回収容器をSF6 気体回収装
置の回収ラインに接続し、開閉弁を前記SF6 の充填側
にセットした後、SF6 回収装置にて前記伸縮自在回収
装置のSF6 を真空回収することを特徴とするSF
収方法。
6. The S6 purified and recovered after evacuating the inside of the SF 6 sealing device and the gas recovery device using a vacuum recovery pump.
The telescopic collection container F 6 is sealed and connected to a recovery line of SF 6 gas recovery apparatus, after the opening and closing valve is set to the filling side of the SF 6, SF of the telescopic recovery device in SF 6 recovery device A method for recovering SF 6, comprising recovering 6 in vacuum.
JP10276952A 1998-09-30 1998-09-30 Sf6 recovery device and method therefor Pending JP2000104895A (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
JP10276952A JP2000104895A (en) 1998-09-30 1998-09-30 Sf6 recovery device and method therefor

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Publication Number Publication Date
JP2000104895A true JP2000104895A (en) 2000-04-11

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ID=17576709

Family Applications (1)

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Country Link
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JP2011060709A (en) * 2009-09-14 2011-03-24 Chubu System Kogyo Kk Gas recovery device
FR2951860A1 (en) * 2009-10-27 2011-04-29 Areva T & D Sas Sulfur hexafluoride gas recovering device for circuit breaker in medium or high voltage electrical circuit, has conduit mounted between inlet and outlet of pump, and switching unit permitting circulation of gas in pump or in conduit
CN103244819A (en) * 2013-05-17 2013-08-14 国家电网公司 SF6 gas filling device
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CN104061434A (en) * 2014-05-28 2014-09-24 国家电网公司 Universal combined type self-sealing sulfur hexafluoride gas filling pipeline
JP2018128178A (en) * 2017-02-07 2018-08-16 東京瓦斯株式会社 Gas treatment method, gas treatment device, and gas treatment system
JP2019033644A (en) * 2017-08-09 2019-02-28 中国電力株式会社 Gas pressure regulator for gas equipment
CN109915728A (en) * 2018-12-24 2019-06-21 国网浙江龙游县供电有限公司 A kind of SF6Full-automatic vacuum-pumping inflates cart
KR102433970B1 (en) * 2022-03-02 2022-08-23 (주)비티엑스 Pressure check device for gas insulated switchgear

Cited By (11)

* Cited by examiner, † Cited by third party
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JP2008501892A (en) * 2004-06-02 2008-01-24 ゴールデン・トライアングル・エンタープライジズ・ピーティーワイ・リミテッド Apparatus and method for collecting and confining leaked sulfur hexafluoride gas
JP2012072907A (en) * 2004-06-02 2012-04-12 Golden Triangle Enterprises Pty Ltd Apparatus and method for capturing and containing sulfur hexafluoride gas leakage
JP2011060709A (en) * 2009-09-14 2011-03-24 Chubu System Kogyo Kk Gas recovery device
FR2951860A1 (en) * 2009-10-27 2011-04-29 Areva T & D Sas Sulfur hexafluoride gas recovering device for circuit breaker in medium or high voltage electrical circuit, has conduit mounted between inlet and outlet of pump, and switching unit permitting circulation of gas in pump or in conduit
CN103727338A (en) * 2012-10-10 2014-04-16 湖北省电力公司荆门供电公司 Sulfur hexafluoride breaker inflation universal connector
CN103244819A (en) * 2013-05-17 2013-08-14 国家电网公司 SF6 gas filling device
CN104061434A (en) * 2014-05-28 2014-09-24 国家电网公司 Universal combined type self-sealing sulfur hexafluoride gas filling pipeline
JP2018128178A (en) * 2017-02-07 2018-08-16 東京瓦斯株式会社 Gas treatment method, gas treatment device, and gas treatment system
JP2019033644A (en) * 2017-08-09 2019-02-28 中国電力株式会社 Gas pressure regulator for gas equipment
CN109915728A (en) * 2018-12-24 2019-06-21 国网浙江龙游县供电有限公司 A kind of SF6Full-automatic vacuum-pumping inflates cart
KR102433970B1 (en) * 2022-03-02 2022-08-23 (주)비티엑스 Pressure check device for gas insulated switchgear

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