JP2000100892A - 基板検査装置 - Google Patents
基板検査装置Info
- Publication number
- JP2000100892A JP2000100892A JP26453498A JP26453498A JP2000100892A JP 2000100892 A JP2000100892 A JP 2000100892A JP 26453498 A JP26453498 A JP 26453498A JP 26453498 A JP26453498 A JP 26453498A JP 2000100892 A JP2000100892 A JP 2000100892A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- opening
- inspection
- blocking plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 76
- 238000007689 inspection Methods 0.000 title claims abstract description 70
- 230000000903 blocking effect Effects 0.000 claims abstract description 67
- 238000012546 transfer Methods 0.000 claims description 49
- 238000012856 packing Methods 0.000 claims description 18
- 239000000428 dust Substances 0.000 abstract description 13
- 230000002411 adverse Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 230000003749 cleanliness Effects 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26453498A JP2000100892A (ja) | 1998-09-18 | 1998-09-18 | 基板検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26453498A JP2000100892A (ja) | 1998-09-18 | 1998-09-18 | 基板検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000100892A true JP2000100892A (ja) | 2000-04-07 |
| JP2000100892A5 JP2000100892A5 (enExample) | 2005-11-04 |
Family
ID=17404608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26453498A Pending JP2000100892A (ja) | 1998-09-18 | 1998-09-18 | 基板検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000100892A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100526946C (zh) * | 2006-07-03 | 2009-08-12 | 元太科技工业股份有限公司 | 防止产生粉尘的无电能环保式玻璃基板载运装置 |
| WO2017187803A1 (ja) * | 2016-04-26 | 2017-11-02 | 日本電産サンキョー株式会社 | 処理装置 |
| WO2019054345A1 (ja) * | 2017-09-14 | 2019-03-21 | 日本電産サンキョー株式会社 | 検査装置 |
-
1998
- 1998-09-18 JP JP26453498A patent/JP2000100892A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100526946C (zh) * | 2006-07-03 | 2009-08-12 | 元太科技工业股份有限公司 | 防止产生粉尘的无电能环保式玻璃基板载运装置 |
| WO2017187803A1 (ja) * | 2016-04-26 | 2017-11-02 | 日本電産サンキョー株式会社 | 処理装置 |
| WO2019054345A1 (ja) * | 2017-09-14 | 2019-03-21 | 日本電産サンキョー株式会社 | 検査装置 |
| CN111065903A (zh) * | 2017-09-14 | 2020-04-24 | 日本电产三协株式会社 | 检查装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050913 |
|
| A621 | Written request for application examination |
Effective date: 20050913 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Effective date: 20080825 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081007 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090324 |