JP2000094170A - Laser machining method, laser machined product, granular body grader, and head part of ink jet type printer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To expand the applicable range of combination of the laser beam machining of a synthetic resin which is capable of achieving the excellent machining accuracy. SOLUTION: After an amorphous glass thin film 16 is formed in advance on upper and lower surfaces 14a, 14b of a polyimide film, the upper surface 14a is irradiated with the excimer laser beam to form a through hole 13a, the amorphous glass thin film 16 on the upper surface 14a side is removed together with machining scraps, and an amorphous glass thin film 16 is formed again on the upper surface 14a and an inner surface of the through hole 13a to obtain a laser machined product 20a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing technique, and more particularly to an improvement of a processing method for forming a hole in a synthetic resin material using a laser beam, and a laser processing formed by the processing method. The present invention relates to a product and an applied product of the laser processed product.

[0002]

2. Description of the Related Art Synthetic resin materials such as polyimide, polyethylene, vinyl chloride, and polypropylene are generally excellent in electric insulation and have advantages such as light weight, rust prevention and low cost. It's being used. There are various methods for forming a hole in this synthetic resin material, such as a mechanical method such as punching, and etching using a chemical action of a chemical. However, it is necessary to form a fine and highly accurate hole. In such cases, laser processing is most suitable. In particular, since the combination of excimer laser with polyimide can realize the finest hole forming process, utilization in many fields where fine hole formation is required is being studied.

[0003]

However, in order to further expand the application range of the technology of forming a fine and highly accurate hole in a synthetic resin material using this laser, there are several problems. Need to be resolved. First, as a characteristic characteristic of the synthetic resin material, there is a point that it is easily charged with static electricity and it is difficult to remove the static electricity. Therefore, it is naturally difficult to apply to a field where the influence of static electricity is disliked. In addition, dust in the air tends to adhere to the surface due to static electricity, which is a factor that hinders further improvement in processing accuracy. When processing a synthetic resin material with a laser, carbides and precipitates will inevitably adhere to the processed end. Although the amount is extremely small, the presence of these processing slags itself causes instability of the processing shape, and it is necessary to establish a means for completely removing these depending on the purpose of use. Depending on the type of synthetic resin material, there is something that is difficult to adhere to different materials such as metal and ceramic,
These cannot be applied to the field where adhesion with metals, ceramics, etc. is required. Depending on the type of the synthetic resin material, it may not be applicable to a field that requires a certain level of surface strength (abrasion resistance), slidability, and wettability.

The present invention has been devised in view of the above-mentioned problems, and is a technology which can expand the application range of "combination of laser processing on synthetic resin material" which can achieve excellent processing accuracy. The purpose is to provide.

[0005]

In order to achieve the above object, a laser processing method according to the present invention comprises forming an amorphous glass thin film in advance on the surface of a synthetic resin material as a processing object, It is characterized in that a hole is formed by irradiating a laser beam to the surface of the processing object. Further, the laser processed product according to the present invention is a product formed by the above-described processing method, and includes a main body made of a synthetic resin material, an amorphous glass thin film formed on a surface of the main body, and the amorphous glass thin film. And a hole in a main body formed by irradiating a laser to the porous glass thin film. Examples of the synthetic resin material include polyimide, polyethylene, vinyl chloride, and polypropylene. In addition, as a processing laser,
In addition to an excimer laser, a YAG laser, a CO ₂ laser, or the like can be used. The “hole” is a concept that includes not only a through hole but also a concave portion (non-through hole), a through groove, and a concave groove (non-through groove). The shape of the opening of the hole is not particularly limited, and an arbitrary shape can be selected. The formation region of the amorphous glass thin film is not particularly limited. For example, when the object to be processed is a film-shaped synthetic resin material, an amorphous glass thin film may be formed on both upper and lower surfaces, or may be formed only on a surface irradiated with a laser.

[0006] Glass has a characteristic that it is hard to be charged compared to a synthetic resin material. Therefore, if an amorphous glass thin film is formed on the surface of the synthetic resin material to be processed prior to laser processing, the influence of static electricity can be suppressed as compared with the case where the synthetic resin material is exposed. It is possible to effectively prevent dust in the air from being adsorbed on the surface of the object to be processed and hindering the processing. In this case, the presence of the amorphous glass thin film is limited to the surface layer of the object to be processed, and the main body of the object to be processed is a synthetic resin material having good compatibility with the laser. Can be formed. In addition, the laser processed product obtained as a result of this processing not only has holes with high processing accuracy, but also has an amorphous glass thin film on the surface, so it is hard to be charged with static electricity, and it is made of metal or ceramic. Has excellent properties such as good adhesiveness and high surface strength (hardness) as compared with synthetic resin materials, and can be expected to be used in a wide range of fields.

[0007] By removing the amorphous glass thin film on the surface of the object to be processed after the formation of the hole, it is possible to simultaneously remove processing residues generated by laser processing.
As a result, an extremely well-defined contour shape to which no processing residue is attached is realized, and the processing shape can be stabilized. Depending on the purpose of use, it can be used as it is, but if it is necessary to modify the surface of the synthetic resin material to give the properties of a glass material, remove the amorphous glass thin film together with the processing slag and then again What is necessary is just to form an amorphous glass thin film on the surface. In this case, if necessary, an amorphous glass thin film can be formed even on the inner surface of the formed hole.

In place of the amorphous glass thin film, a metal thin film is previously formed on the surface of a synthetic resin material, and a laser is irradiated on the surface of the metal thin film to form a hole. It may be removed together with the processing residue, and then an amorphous glass thin film may be formed on the surface of the processing object or the inner surface of the hole. If a metal thin film is formed on the surface of the synthetic resin material in this way, it is possible to easily remove static electricity on the surface by taking appropriate grounding means during laser processing, and dust in the air may cause dust in the processing target. It can be prevented that it is adsorbed on the surface and hinders processing. This metal thin film is, for example, nickel,
It is composed of chromium, aluminum, copper, their alloys and the like. It is desirable that the metal thin film be formed by a plating method. Although there are various other methods for forming the metal thin film, the plating method is the most advantageous in terms of cost, and has the advantage that the surface friction coefficient and the film thickness can be controlled relatively freely. However, depending on the purpose of use, other thin film forming techniques such as a vapor deposition method, a sputtering method, and a CVD method (chemical vapor deposition method) may be used.

[0009] Alternatively, in the case where the processed shape is not required to be so homogeneous and the surface of the processed synthetic resin material is simply required to be modified, the surface of the synthetic resin material to be processed is directly placed on the surface. After the hole is formed by irradiating the laser, the amorphous glass thin film may be formed on the surface of the object to be processed or the inner surface of the hole for the first time.

The amorphous glass thin film is made of, for example, SiO ₂
Is formed as a main component, and has a very dense amorphous structure, so that pinholes are not easily generated or peeled off, and the gas sealing property is excellent. Also, it has excellent insulation properties, corrosion resistance, and weather resistance. The surface hardness is increased by coating the surface with the glass coat, and the mechanical strength and durability can be improved, as compared with the case where the synthetic resin material is left bare. Since the surface of the amorphous glass thin film is formed very smoothly and has a small coefficient of friction, it is suitable for applications requiring high slidability. When durability is particularly required, the amorphous glass thin film may be formed relatively thick.

The above-mentioned laser processed product can be applied to a sorter for adjusting the shape and size of a granular material. That is, the granular material sorter according to the present invention comprises introducing a large number of spherical granular materials on the surface of a planar filter having a plurality of circular through holes formed therein, and then swinging the filter, or forming the cylindrical filter into a cylindrical shape. By rotating the cylindrical filter after introducing a large number of granular materials into the inside in a shape, a granular material sorter having a structure that allows a granular material having a smaller particle diameter than the hole diameter of each circular through hole to pass through. A filter formed by irradiating a laser to the amorphous glass thin film or the metal thin film formed on the surface of the main body; It is characterized in that it is constituted by a laser-processed product having an amorphous glass thin film formed on the surface of the main body and the inner surface of the through-hole after removing the porous glass thin film or the metal thin film together with the processing residue.
As the above-mentioned granular material, a fine ball bearing is a typical example, but the present invention can be applied to selection of other fine spherical granular material.

As another application example, there is a semi-fluid transfer type used for transferring a semi-fluid according to a predetermined pattern. In other words, the semi-fluid transfer mold according to the present invention includes a main body made of a synthetic resin material and a half-flow formed by irradiating a laser to an amorphous glass thin film or a metal thin film formed on the surface of the main body. It is characterized by comprising a concave portion for filling an animal, and an amorphous glass thin film formed on the surface of the main body portion and the inner surface of the concave portion after removing the amorphous glass thin film or the metal thin film together with the processing residue.

Further, as another application example, a nozzle plate constituting a head portion of an ink jet printer can be cited. That is, the head unit of the ink jet printer according to the present invention includes a housing, a vibration plate that closes an opening of the housing to form an ink chamber, and a piezoelectric element that is in contact with an outer surface of the vibration plate. A nozzle plate adhered to the outer surface of the bottom of the housing, a nozzle formed by communicating and connecting a through hole formed in the bottom of the housing and a through hole formed in the nozzle plate. In the head portion of the type printer, the nozzle plate has a main body made of a synthetic resin material, and a through-hole formed by irradiating a laser to an amorphous glass thin film or a metal thin film formed on the surface of the main body. A laser-processed product having the amorphous glass thin film formed on the surface of the main body and the inner surface of the through-hole after removing the amorphous glass thin film or the metal thin film together with the processing residue. It is characterized in.

[0014]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows a state in which a hole is formed in a processing target 10 using a laser. That is, supplied from a laser oscillator (not shown),
The laser beam 12 arriving at the processing lens 11 via an optical path constituted by a reflecting mirror and the like is
The surface of the workpiece 10 is irradiated from the lower end of 11. As a result, the processing object 10 has a fine hole corresponding to the laser output.
13 is formed. The workpiece 10 is mounted on an XY table (not shown). The XY table is moved by a predetermined amount in the X-axis direction and the Y-axis direction, and the timing of laser irradiation is appropriately adjusted. The object to be processed
Holes 13 are formed in the surface of 10 in an arbitrary pattern.

The object to be processed 10 has a thickness of, for example, 75 μm.
The surface of the main body 14 made of
a, on the lower surface 14b), an amorphous glass thin film 16 having a thickness of 1 μm is formed. In addition, the laser
As the beam 12, for example, an excimer laser is used. When the surface of the object 10 is irradiated with an excimer laser at a predetermined output, the ablation of the excimer laser causes the amorphous glass thin film 16 formed on both surfaces of the main body 14 and the main body 14 as shown in FIG. 14 through hole 13
a is formed.

When an excimer laser is used as the hole forming means for the polyimide, a very high processing accuracy can be realized in which the variation in the diameter of each through hole 13a is within ± 2 μm. In addition, since the processing uses ablation, a relatively well-defined contour shape can be obtained. Also, the main unit
Because the amorphous glass thin film 16 is formed on both sides of 14,
It is less likely to be charged with static electricity than when the synthetic resin material is exposed on the surface. As a result, it is possible to effectively avoid that dust floating in the air is adsorbed on the surface of the processing target 10 by the action of static electricity and hinders processing. Since the amorphous glass thin film 16 itself covering both surfaces of the main body 14 is extremely thin,
This does not adversely affect the processing efficiency.

At the opening end of each through-hole 13a, more specifically, at the opening end of the amorphous glass thin film 16 on the upper surface 14a side of the main body, carbide 17a or precipitate 17
A small amount of processing residue 17 consisting of b adheres.
Therefore, the amorphous glass thin film 16 on the upper surface 14a side is removed using a special chemical. As a result, as shown in FIG. 3, the processing residue 17 is removed together with the amorphous glass thin film 16, and a very clear outline appears at the opening end. Depending on the purpose of use, the amorphous glass thin film 16 on the lower surface 14b side is also removed in the same manner, and can be used as it is as a laser processing product made of polyimide provided with a high-precision fine through-hole 13a.

Alternatively, as shown in FIG. 4, an amorphous glass thin film 16 may be formed again on the upper surface 14a of the main body and the inner surface of the through hole 13a. As a result, in addition to using a processing method that can be expected with the highest accuracy of irradiating an excimer laser to the polyimide film, the processing residue 17 is completely removed, and the surface of the laser processing product 20 is given a glass material property.
a is obtained. Thus, both sides of the main body 14 and the through hole
By subjecting the inner surface of 13a to surface modification for coating the amorphous glass thin film 16, characteristics such as low chargeability, improvement in surface strength, and improvement in adhesion can be imparted to the polyimide film. Also, as described above, both surfaces of the main body 14 and the through holes 13 are formed.
By covering the inner surface with the amorphous glass thin film 16, it is possible to prevent the polyimide film from absorbing moisture in the air. Therefore, it is possible to prevent the main body portion 14 from being warped or bent, contracted, or expanded due to a change in temperature.

Note that, depending on the purpose of use of the laser beam, the amorphous glass thin film 16 is formed only on both surfaces of the main body portion 14 and the amorphous glass thin film 16 is not formed on the inner surface of the through hole 13a. You can choose to keep it. In the above, the amorphous glass thin film is previously formed on both surfaces of the main body 14.
The example in which the laser irradiation is performed on the amorphous glass thin film 16 on the upper surface 14a side after forming the amorphous glass thin film 16 is shown, but the amorphous glass thin film 16 is formed only on one of the surfaces, and Laser irradiation may be performed on the amorphous glass thin film 16.

The amorphous glass thin film 16 is made of a very dense amorphous SiO ₂ film, is less likely to cause pinholes and peeling, has excellent gas sealing properties, and has high insulation, corrosion resistance and weather resistance. It has the nature. Thus, by applying an amorphous glass coat to the surface of the polyimide body 14, the surface hardness can be increased as compared with the case where the polyimide is exposed as it is, and the mechanical strength and durability can be improved. It can also be improved. Since the surface of the amorphous glass thin film 16 is formed very smoothly and has a small friction coefficient, it can be used for applications requiring high slidability. In the above description, an example in which the amorphous glass thin film 16 is formed to a thickness of 1 μm is shown, but it may be formed as thin as about 0.05 μm depending on the purpose of use.

In the above, an excimer laser is applied to the main body portion 14 made of a polyimide film so as to irradiate the through hole 13.
Although the example of forming a is shown, the concave portion 13b (non-through hole) can be formed as shown in FIG. 5 by adjusting the laser output. Also in this case, similarly to the above, each recess
At the opening end of 13b, that is, at the opening end of the amorphous glass thin film 16 on the upper surface 14a side, a processing residue 17 made of a processing carbide 17a or a processing precipitate 17b generated by laser irradiation adheres. Therefore, the amorphous glass thin film 16 on the upper surface 14a side
Is removed using a special chemical, thereby removing the above-mentioned processed slag 17 together with the amorphous glass thin film 16 as shown in FIG. As a result, an extremely clear outline appears at the opening end of the recess 13b. Depending on the purpose of use, the bottom
The amorphous glass thin film 16 on the 14b side is also removed in the same manner, and can be used as it is as a polyimide laser workpiece provided with a highly accurate fine concave portion 13b. Alternatively, as shown in FIG. 7, by forming the amorphous glass thin film 16 again on the inner surface of the upper surface 14a and the inner surface of the concave portion 13b of the main body, a laser processed product 20b having the surface of a glass material can be obtained. .

Instead of forming the amorphous glass thin film 16 on both sides of the main body portion 14 in advance as described above, a metal plating layer is formed on the upper surface 14a, and the metal plating layer is irradiated with laser. Thus, the through holes 13a and the recesses 13b may be formed. As described above, if a metal plating layer is formed on the upper surface 14a of the main body, static electricity on the surface can be easily removed by taking an appropriate grounding means during laser processing. As a result, it is possible to effectively avoid that dust floating in the air is adsorbed on the surface of the processing target 10 by the action of static electricity and hinders processing. In this case, the metal plating layer is formed to be extremely thin with a thickness of about 500 Å, so that the processing efficiency does not deteriorate.
After the formation of the through-hole 13a or the recess 13b, the metal plating layer is removed using a special chemical, whereby the processing residue 17 attached to the opening end can be removed at the same time. After removing the metal plating layer, the upper surface 14a and the lower surface
14b, furthermore, by forming an amorphous glass thin film 16 on the inner surface of the through-hole 13a or the concave portion 13b, a polyimide film is irradiated with an excimer laser in the same manner as described above. In addition, the processing residue 17 is completely removed, and the laser processed products 20a and 20b having the surface of the glass material are obtained.

Next, an application example of the laser workpieces 20a and 20b formed as described above will be described. First,
FIG. 8 and FIG. 9 show this laser processing product 20a as a granular material sorter.
An example in which the filter 24 is used as a filter 24 is shown. That is, the laser processing object 20a is mounted as a filter 24 at the lower end opening of the frame member 26 having four wall surfaces (FIG. 8). This laser workpiece 20a has a large number of fine circular through holes 13a, and as shown in FIG. 9, an amorphous glass thin film 16 is formed on the upper surface 14a, the lower surface 14a of the main body made of polyimide, and the inner surface of the through hole 13a. Have been. In the frame member 26, a large number of spherical particles (for example, fine ball bearings) 28
After the introduction, the exciter (not shown) is driven to drive the frame member.
By swinging 26 back and forth, left and right, each granular body 28 enters the through hole 13a of the filter 24 one after another. Through hole 13
a of the granular material 28 that has entered the
Those smaller than 0 μm) fall from the through holes 13a. Further, the granular material 28 larger than the standard stays in the through hole 13a.

Next, the granular material 28 left on the filter 24
Through hole 13 slightly larger than the filter 24
It is applied to another sorter 22 equipped with a filter 24 having a. In this case, the granular material 28 conforming to the standard falls through the through hole 13a, and the granular material 28 larger than the standard is left on the filter 24. As described above, by passing through the two-stage filter 24, the granular material having an extremely small particle size error can be obtained.
28 can be aligned.

Although not shown, the filter member having a large number of fine circular through-holes is rolled to form a cylindrical body, and a large number of particles 28 are introduced into the cylindrical body. The laser processing product 20a may be used as a filter of a granular material sorter configured to discharge the granular material 28 having a smaller particle size than the circular through hole to the outside by rotating. Since the amorphous glass thin film 16 is formed to be extremely thin and has excellent exfoliation resistance, it does not exfoliate even when the filter 24 is processed into a cylindrical shape.

In the field of precision machinery, high-precision granules (ball bearings) that are ultra-fine (particle size in the order of several hundreds of μm) and reduce the particle size error between individual granules as much as possible
There is a demand for For this reason, after the spherically formed granular material is centrifuged to roughly sort out defective products,
By passing through a filter with fine circular through holes,
Final sorting is taking place. Accordingly, the accuracy of the particle size of the granular material depends on the accuracy of the diameter of each through-hole formed in the filter, and this determines the accuracy of the granular material.

The use of the laser processing object 20a according to the present invention as the filter 24 of the granular material sorter 22 has the following advantages. Since each through-hole 13a has a high hole diameter accuracy, the granular material 28 can be sorted with extremely high accuracy. In particular,
Sorting is possible with a particle size error of ± 2 μm. Since the amorphous glass thin film 16 is formed on both the upper and lower surfaces of the filter 24 and on the inner surface of the through-hole 13a, static electricity is relatively unlikely to be charged, and the sorting operation can be made more efficient. Originally, a large number of particles 28 are rubbed in the sorter 22 to generate large static electricity.If the synthetic resin material is exposed, the static electricity is charged on the surface, so the fine particles 28 are adsorbed on the surface of the filter 24. However, smooth sorting cannot be performed, but the formation of the amorphous glass thin film 16 can suppress charging. Since the amorphous glass thin film 16 is formed on the upper surface 14a of the main body and the inner surface of the through hole 13a, the surface strength (wear resistance) is increased, and the life characteristics of the filter 24 can be improved. The presence of the smooth amorphous glass thin film 16 on the surface facilitates the movement of the granular material 28 and increases the sorting efficiency.

Next, based on FIGS. 10 to 12, an example is shown in which the laser workpiece 20b according to the present invention is applied to a high-precision semi-fluid transfer mold 30. FIG. The semi-fluid transfer mold is a female mold used to apply a semi-fluid (for example, ink paste) having a certain degree of viscosity to the transfer surface in an arbitrary fine pattern. The semi-fluid transfer mold 30 has an amorphous glass thin film 16 or a metal plating layer formed on the upper surface 14a of the main body made of a polyimide film, and is provided with a necessary pattern by irradiating an excimer laser thereon. After forming the recess 13b, the amorphous glass thin film 16 or the metal plating layer is removed together with the processing residue 17, and the upper surface 14a, the lower surface 14b, and the recess 13 are formed.
This is completed by forming an amorphous glass thin film 16 on the inner surface of b.

The method of using the semi-fluid transfer mold 30 will be described below. First, as shown in FIG. 10, a semi-fluid 32 is applied to the surface of the semi-fluid transfer mold 30 using a squeegee (not shown). As a result, the semi-fluid 32 in the recess 13b
Is filled. Then, using a special chemical, the recess 13b
The extra semi-fluid 32 deposited on the outside is removed (FIG. 1).
1). Next, as shown in FIG. 12, the semi-fluid transfer mold 30 is turned over and brought into contact with the surface to be transferred 34, and is subjected to a heating or pressurizing treatment so that the semi-fluid 32 in the recess 13b is transferred to the surface to be transferred. After being attached to 34, the transfer mold 30 is lifted. As a result, the semi-fluid 32 is arranged on the transfer surface 34 in a desired pattern.

The following advantages are obtained by applying the laser processing product 20b according to the present invention to the semi-fluid transfer die 30. Since a concave portion 13b is formed by irradiating an excimer laser to polyimide as a base material, an extremely fine and highly accurate pattern can be realized. Since the processing residue 17 is also removed when removing the amorphous glass thin film or the metal plating layer, the contour of the concave portion 13b is formed extremely sharp, and the precision of the pattern can be improved. Since the amorphous glass thin film 16 is formed on the upper surface 14a and the inner surface of the concave portion 13b of the main body, the surface strength (abrasion resistance, corrosion resistance, etc.) is increased, and the life characteristics of the transfer die can be improved. The presence of the smooth amorphous glass thin film 16 on the surface facilitates the removal of the semi-fluid 32 and facilitates transfer to the transfer surface.

Next, an example in which the laser workpiece 20a according to the present invention is applied to a nozzle plate 42 constituting a head section 40 of an ink jet printer will be described with reference to FIGS. Inkjet printer head
As shown in FIG. 13, reference numeral 40 denotes a housing 44 made of ceramic such as alumina, a vibration plate 46 for closing an upper opening of the housing 44, and a piezoelectric element as a piezoelectric element in contact with the upper surface of the vibration plate 46. An element 48 and a nozzle plate 42 bonded to the outer surface of the bottom 44a of the housing 44 are provided. The housing 44 is filled with an ink liquid to form an ink chamber 49.
Through holes 44b and 13a are formed at corresponding positions in the bottom portion 44a and the nozzle plate 42 of the housing, respectively.
The nozzle 50 is formed by the through holes 44b and 13a that are connected to each other. In these through holes, the housing bottom 44
The through hole 44b on the a side constitutes an introduction portion of the nozzle 50, and the through hole 13a on the plate 42 side having a smaller diameter and a tapered inner surface constitutes a discharge portion of the nozzle 50.

The nozzle plate 42 is formed by irradiating an excimer laser to the upper surface 14a of the main body portion 14 made of a polyimide film having an amorphous glass thin film 16 or a metal plating layer formed on both surfaces in advance to form a through hole 13a. , Through hole 13a
Glass thin film with processing residue 17 attached to the open end of the glass
16 or the metal plating layer is removed, and the upper surface 14a of the main body is removed.
An amorphous glass thin film 16 is formed on the lower surface 14b and the inner surface of the through hole 13a.
Is formed.

Although FIG. 13 is a cross-sectional view, one ink chamber 49, a piezo element 48, and a nozzle 50 are illustrated, respectively. However, a plurality of ink chambers 49 partitioned by partition walls are actually used. A plurality of piezo elements 48 corresponding to each ink chamber 49 are arranged.
Further, the same number of through holes 44b and 13a as the number of the ink chambers 49 are formed at regular intervals in the housing bottom portion 44a and the nozzle plate 42 as well. Then, the piezo element 48
When a pulse-like voltage is applied, the piezo element 48 expands and instantaneously presses the diaphragm 46 toward the ink chamber 49 side. As a result, the ink droplet 52 is ejected from the tip of the nozzle 50, and adheres to the paper surface disposed below.

As shown in FIG. 14, the bottom 44a of the housing and the nozzle plate 42 are joined via an adhesive 54 after positioning the through holes 44b and 13a of both. As the adhesive 54, for example, an ultraviolet curable adhesive is used.

In order to improve the printing quality of an ink jet printer, it is necessary to arrange a large number of nozzles 50 each having the smallest possible diameter and to suppress variations in the diameter between the nozzles 50. In the case of the head section 40, since the ejection section of the nozzle 50 (that is, the through hole 13a) which requires the highest accuracy is formed by irradiating the polyimide film with the excimer laser as described above,
It has extremely high processing accuracy. Moreover, since the amorphous glass thin film 16 or the metal plating layer on the surface is removed together with the processing residue 17 after the processing, an extremely clear contour appears at the peripheral portion of the opening of the discharge portion, and the fluidity of the ink between the nozzles 50 is improved. Can be homogenized. Further, since the amorphous glass thin film 16 is formed on the inner surface of the through hole 13a, there is an advantage that the durability as the nozzle 50 is enhanced. Since the amorphous glass thin film 16 is generally superior in wettability as compared with a synthetic resin material, clogging of the nozzle tip portion with ink can be prevented.

Further, since the amorphous glass thin film 16 is formed on the bonding surface (upper surface 14a), the ceramic housing 44 is formed.
Also, the effect of increasing the adhesiveness with the adhesive is produced. In other words, a relatively inexpensive and robust ceramic is used as a main component of the head portion, and a nozzle discharge portion requiring high dimensional accuracy is realized by a nozzle plate having a through hole formed by irradiating an excimer laser to a polyimide film. This has been attempted for some time, but the satisfactory adhesion between the ceramic and the polyimide has been a hindrance, and yet satisfactory results have not been obtained. In contrast, the nozzle plate 42
In the case of, a ceramic housing on the surface of the polyimide film
Because an amorphous glass thin film 16 of the same quality as 44 is formed,
High adhesion can be realized.

[0037]

According to the laser processing method of the present invention, an amorphous glass thin film is formed on the surface of a synthetic resin material to be processed prior to laser processing as described above. It is difficult for static electricity to be charged on the surface without taking appropriate grounding means during processing. For this reason, it is possible to effectively prevent dust in the air from being adsorbed on the surface of the object to be processed and hinder processing, and to further improve processing accuracy. In addition, the laser processed product obtained by this processing method has a high-precision hole provided by "combination of laser processing on synthetic resin material", and has a low chargeability and an adhesive property with a ceramic material or the like on its surface. The properties of the glass material, such as goodness and high surface strength, are imparted, so that it can be applied in a wide range of fields that have not been available before.

By removing the amorphous glass thin film on the surface of the object to be processed after the formation of the hole, it is possible to simultaneously remove processing residues generated by laser processing. As a result, an extremely well-defined contour shape to which no processing residue is attached is realized, and the processing shape can be stabilized.
After removing the processing residue and the amorphous glass thin film as described above, the amorphous glass thin film is formed again on the surface of the processing object, thereby stabilizing the processing shape and improving the characteristics of the glass material on the surface. It becomes possible to further provide a laser processing object.

It should be noted that a laser beam is directly applied to the surface of the synthetic resin material to be processed to form a hole, and then an amorphous glass thin film is formed on the surface of the material to be processed. It is possible to meet the purpose of use in which the surface modification of the synthetic resin material is regarded as more important than the improvement of the processed shape.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a state where laser processing is performed on an object to be processed.

FIG. 2 is a cross-sectional view showing a state in which a through hole is formed by irradiating a laser beam to an object to be processed.

FIG. 3 is a cross-sectional view showing a state in which an amorphous glass thin film has been removed from the surface of the processing object.

FIG. 4 is a cross-sectional view showing a state in which an amorphous glass thin film is formed again on the surface of the object to be processed and the inner surface of the through hole.

FIG. 5 is a cross-sectional view showing a state where a concave portion is formed by irradiating a laser beam to an object to be processed.

FIG. 6 is a cross-sectional view showing a state where an amorphous glass thin film has been removed from the surface of the processing object.

FIG. 7 is a cross-sectional view showing a state in which an amorphous glass thin film is re-formed on the surface of the object to be processed and the inner surface of the concave portion.

FIG. 8 is a perspective view showing an example in which a laser processed product is applied to a filter of a granular material sorter.

FIG. 9 is a cross-sectional view showing an example in which a laser beam is applied to a filter of a granular material sorter.

FIG. 10 is a cross-sectional view showing a semi-fluid transfer mold which is an application example of a laser processing object.

FIG. 11 is a sectional view showing an example of use of the semi-fluid transfer type.

FIG. 12 is a sectional view showing an example of use of the semi-fluid transfer type.

FIG. 13 is a cross-sectional view showing an example in which a laser workpiece is applied to a nozzle plate in a head section of an ink jet printer.

FIG. 14 is a cross-sectional view showing a state in which the nozzle plate is bonded to a bottom of a housing of a head unit.

[Explanation of symbols]

 10 Workpiece 13 Hole 13a Through hole 13b Recess 14 Main body 14a Upper surface of main body 14b Lower surface of main body 16 Amorphous glass thin film 17 Processing residue 20a Laser processed 20b Laser processed 22 Granular material sorter 24 Filter 28 Granules 40 Ink jet printer head 42 Nozzle plate 44 Housing 46 Vibration plate 48 Piezo element 49 Ink chamber 50 nozzle

Claims (12)

[Claims] 1. A laser characterized in that after forming an amorphous glass thin film in advance on the surface of a synthetic resin material as a processing object, a laser is irradiated on the surface of the processing object to form a hole. Processing method. 2. The laser processing method according to claim 1, wherein after the formation of the hole, the amorphous glass thin film on the surface of the processing object is removed together with the processing residue. 3. The laser processing method according to claim 2, wherein after removing the amorphous glass thin film, an amorphous glass thin film is formed again on the surface of the object to be processed. 4. A metal thin film is formed in advance on the surface of a synthetic resin material as a processing object, a hole is formed by irradiating a laser to the surface of the metal thin film, and then the metal thin film is removed together with processing residues. Forming an amorphous glass thin film on the surface of the object to be processed. 5. A laser characterized in that a hole is formed by irradiating a laser on the surface of a synthetic resin material as an object to be processed, and then an amorphous glass thin film is formed on the surface of the object to be processed. Processing method. 6. The laser processing method according to claim 1, wherein said synthetic resin material is made of polyimide, and said laser is made of an excimer laser. 7. A main body made of a synthetic resin material, an amorphous glass thin film formed on a surface of the main body, and a hole formed by irradiating a laser to the amorphous glass thin film. A laser workpiece characterized by the above-mentioned. 8. A body made of a synthetic resin material, a hole formed by irradiating a laser to an amorphous glass thin film or a metal thin film formed on the surface of the body, and the amorphous glass thin film Alternatively, a laser processed product comprising an amorphous glass thin film formed on the surface of the main body and the inner surface of the hole after removing the metal thin film. 9. The synthetic resin material is made of polyimide,
The laser processed product according to claim 7, wherein the hole is formed by excimer laser irradiation. 10. The laser processed product according to claim 7, wherein said amorphous glass thin film contains SiO ₂ as a main component. 11. A granular material sorter having a structure in which a large number of granular materials are introduced into a filter surface in which a plurality of circular through holes are formed, and a granular material having a particle size smaller than the diameter of each circular through hole is passed. The filter, a main body made of a synthetic resin material, and a plurality of circular through-holes formed by irradiating a laser to an amorphous glass thin film or a metal thin film formed on the surface of the main body,
A granular material comprising a laser-processed product having the amorphous glass thin film formed on the surface of the main body and the inner surface of the through-hole after removing the amorphous glass thin film or the metal thin film together with the processing residue. Sorter. 12. A housing, a vibrating plate for closing an opening of the housing to form an ink chamber, a piezoelectric element in contact with an outer surface of the vibrating plate, and an adhesive on a bottom outer surface of the housing. A nozzle plate provided with a through-hole formed in the bottom of the housing and a nozzle formed by connecting and connecting a through-hole formed in the nozzle plate. A plate, a main body made of synthetic resin material,
A through hole formed by irradiating a laser to the amorphous glass thin film or metal thin film formed on the surface of the main body, and the surface of the main body after removing the amorphous glass thin film or the metal thin film together with the processing residue. A head portion of an ink-jet printer, comprising: a laser-processed product comprising: an amorphous glass thin film formed on an inner surface of a through hole.