JP2000088504A - Measuring apparatus and measuring method of thin- walled component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measuring apparatus of a thin-walled component which can accurately measure the dimension of a high precise thin-walled component. SOLUTION: This measuring apparatus is equipped with a contact type probe 1 which comes into contact with the surface of a thin-walled component to be measured and detects the position, a deformation amount detector 2 detecting the deformation amount of the thin-walled component from the rear side of the component which deformation is caused by a contact pressure of the probe 1, and an operating apparatus 4 operating the accurate position of the surface of the thin-walled component, from the position detected by the probe 1 and the amount of deformation detected by the deformation amount detector 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for measuring a thin-walled part for more accurate measurement in the measurement and evaluation of a highly accurate thin-walled part.

[0002]

2. Description of the Related Art Conventionally, when measuring a high-precision part made of plastic, a precise dimension value has been measured by a three-dimensional measuring machine. The three-dimensional measuring machine can contact the probe with the measurement surface and measure the position with high accuracy (within 1 μm).

[0003]

However, in the three-dimensional measuring machine, as described above, at the time of measurement, a probe is brought into contact with the measurement surface to perform the measurement, so that a load is applied to the measurement surface.

[0004] Therefore, in the case of a thin-walled part, there is a problem that the measurement surface is deformed by the load at the time of the contact, and an accurate dimensional value cannot be obtained.

A non-contact measurement method such as a laser displacement meter has problems in measurement accuracy and reproducibility, and cannot be said to be an effective measurement method for components requiring high accuracy.

Accordingly, the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a thin-walled part measuring apparatus and a measuring method capable of accurately measuring the dimensions of a thin-walled part with high accuracy. That is.

[0007]

Means for Solving the Problems The above-mentioned problems are solved,
In order to achieve the object, a thin-walled part measuring apparatus according to the present invention includes a contact-type probe that contacts a surface of a thin-walled part to be measured and detects a position of the thin-walled part; A deformation amount detector for detecting the deformation amount of the thin-walled part due to the contact pressure of the above, and a calculation for calculating an accurate position of the surface of the thin-walled part from the detection position by the probe and the deformation amount detected by the deformation-amount detector. Means.

Further, in the thin part measuring apparatus according to the present invention, the deformation amount detector comprises a non-contact sensor for detecting a deformation amount of the thin part in a non-contact manner.

Further, in the measuring apparatus for a thin part according to the present invention, the deformation detector detects a displacement of a back side of the thin part facing a contact position of the probe.

[0010] The measuring apparatus for thin parts according to the present invention is further characterized by further comprising a moving means for moving the probe and the deformation amount detector in conjunction with each other.

Further, in the thin part measuring apparatus according to the present invention, the calculating means subtracts a deformation amount detected by the deformation amount detector from a position detected by the probe, thereby obtaining an accurate surface of the thin part. Is calculated.

Further, the method for measuring a thin part according to the present invention includes a position detecting step of contacting a contact type probe with the surface of the thin part to be measured and detecting the position of the thin part from the back side of the thin part. A deformation amount detection step of detecting a deformation amount of the thin part due to the contact pressure of the probe, and an accurate detection of the surface of the thin part from the detected position in the position detection step and the deformation amount detected in the deformation amount detection step. And a calculating step of calculating the position.

Further, in the method for measuring a thin part according to the present invention, the deformation detecting step detects the deformation of the thin part in a non-contact manner.

Further, in the method for measuring a thin part according to the present invention, in the deformation detecting step, a displacement of a back side of the thin part facing a contact position of the probe is detected.

The method for measuring a thin-walled part according to the present invention is characterized in that the method further comprises a moving step of moving the probe and the deformation amount detector in conjunction with each other.

In the method for measuring a thin part according to the present invention, in the calculating step, the amount of deformation detected in the deformation detecting step is subtracted from the position detected in the position detecting step to obtain a surface of the thin part. It is characterized in that the exact position of is calculated.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Before that, an outline of the present embodiment will be described.

In the present embodiment, a probe is directly applied to a measuring section of a thin-walled part, and a contact-type measuring unit for detecting a position where the thin-walled part is deformed when hit by the probe, and a back surface of the measuring section. On the other hand, it is set in a vertical position,
And a non-contact position detector for measuring the amount of deformation of the thin part. .

When the probe comes into contact with the thin-walled part, the position after the deformation caused by the contact of the probe occurs, not the position of the original part, is measured by the contact-type measuring device.

Since this is not the position of the original part,
The amount of deformation at that time is detected by a non-contact type position detector which is located on the opposite side of the thin part of the probe. The position before the deformation is reset to zero, the position where the amount of deformation is the largest is confirmed, and it is set as the amount of deformation correction.

As the dimensional value, an amount obtained by correcting the amount of deformation obtained by the non-contact type position detector from the position obtained by the contact type measuring device is used as the original measured value.

It should be noted that the probe and the non-contact position detector can be operated in conjunction with each other, so that the displacement of the correction position with respect to the measurement unit can be eliminated, and a plurality of measurement positions can be measured.

When a non-contact position detector is used, it is considered that there is a problem in measurement accuracy and reproducibility as described in the section of the prior art. However, in practice, non-contact measurement is performed. This is a small deformation amount of the measurement component, so that the measurement error is a sufficiently small value, and does not pose a problem.

FIG. 1 is a configuration diagram of an apparatus for measuring a thin part according to one embodiment.

In FIG. 1, reference numeral 1 denotes a probe for detecting a measurement position by contacting a measurement unit, and 2 denotes a non-contact probe for detecting a deformation amount of the measurement unit when the probe comes into contact with the probe from the back side of the measurement unit. The sensor head 3 of the measuring device (for example, a laser displacement meter) is a slider that holds the probe 1 and is freely movable in the X and Y directions.

The sensor head 2 is also fixed to the slider 3, so that the probe 1 and the sensor head 2 move in conjunction with each other.

The contact type measuring device comprising the probe 1 and the slider 3 is connected to the personal computer 4 and sends the detected position to the personal computer 4.

The sensor head 2 is connected to the controller 5, detects the amount of deformation when the probe 1 comes into contact from the back side of the measuring section, and obtains the amount of correction by the controller 5.

The controller 5 is connected to the personal computer 4, and displays the corrected position of the component in the personal computer 4, or stores the corrected position in a disk. Note that the corrected position is usually a value obtained by subtracting the measured value of the deformation amount by the sensor head 2 from the measured value by the probe 1.

An example of measurement of a plastic body part of a thinned camera will be described below.

FIG. 2 is a view showing the shape of the body parts of the camera. Part A in FIG. 2 is a rail surface on which the film runs.
The rail surface is required to have high accuracy and measurement evaluation is important. However, since the rail surface is as thin as 1.0 mm, deformation occurs when the probe is applied vertically from above. The contact pressure of the probe is at least about 5 gf / cm2.

At this time, in the case of a plastic molded product having a thickness of 1.0 mm, as shown in FIG. 3, a deformation of about 10 μm occurs. The amount of deformation is read by the sensor head 2.

In the camera body parts shown in FIG. 2, the rail surface A is measured at a plurality of points. Therefore, the probe 1 and the sensor head 2 in FIG. 1 can move in pairs. This facilitates continuous high-accuracy measurement of the rail surface A.

It should be noted that the present invention can be applied to a modification or modification of the above embodiment without departing from the gist thereof.

For example, in the above-described embodiment, the case where a thin-walled part made of plastic is measured has been described. However, the present invention can be similarly applied to the measurement of a thin-walled and easily deformed part even with a material other than plastic. is there.

[0036]

As described above, according to the present invention,
It is possible to correct deformation of a thin-walled part at the time of measurement contact, and to perform measurement evaluation with high accuracy.

[0037]

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a measuring device for a thin part according to an embodiment of the present invention.

FIG. 2 is a diagram showing main body parts of the camera.

FIG. 3 is a diagram showing a state of deformation due to contact of a probe.

[Explanation of symbols]

 1 Probe 2 Sensor head 3 Slider 4 PC 5 Controller A Rail surface

Claims (10)

[Claims] 1. A contact-type probe that contacts a surface of a thin-walled component to be measured and detects its position, and detects a deformation amount of the thin-walled component due to a contact pressure of the probe from a back side of the thin-walled component. A deformation amount detector, and a calculating means for calculating an accurate position on the surface of the thin-walled component from a position detected by the probe and a deformation amount detected by the deformation amount detector. measuring device. 2. The thin part measuring apparatus according to claim 1, wherein the deformation amount detector comprises a non-contact sensor for detecting a deformation amount of the thin part in a non-contact manner. 3. The thin part measuring apparatus according to claim 1, wherein the deformation amount detector detects a displacement of a back side of the thin part facing a contact position of the probe. 4. The apparatus for measuring a thin part according to claim 1, further comprising moving means for moving the probe and the deformation amount detector in conjunction with each other. 5. The apparatus according to claim 1, wherein the calculating means calculates an accurate position of the surface of the thin-walled component by subtracting a deformation amount detected by the deformation amount detector from a position detected by the probe. Item 2. A measuring device for a thin-walled part according to item 1. 6. A position detecting step in which a contact-type probe is brought into contact with a surface of a thin component to be measured to detect a position thereof, and a deformation of the thin component due to a contact pressure of the probe from the back side of the thin component. A deformation amount detection step of detecting an amount, and a calculation step of calculating an accurate position of the surface of the thin-walled component from the detected position in the position detection step and the deformation amount detected in the deformation amount detection step. A method for measuring thin parts, characterized by the following. 7. The deformation amount detecting step includes detecting a deformation amount of the thin part in a non-contact manner.
The method for measuring a thin-walled part according to the above. 8. The method for measuring a thin part according to claim 6, wherein in the deformation detecting step, a displacement of a back side of the thin part facing a contact position of the probe is detected. 9. The method for measuring a thin part according to claim 6, further comprising a moving step of moving the probe and the deformation amount detector in conjunction with each other. 10. In the calculating step, an accurate position of the surface of the thin-walled part is calculated by subtracting a deformation amount detected in the deformation amount detecting step from a detection position in the position detecting step. The method for measuring a thin part according to claim 6.