JP2000084798A - Machining abnormality detecting method and device, and machining controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To previously prevent the generation of abnormality in the machining by an NC machine or the like. SOLUTION: This machining abnormality detecting device for a work 2 machined by bringing the work 2 into contact with a machining tool 3 and relatively moving them, comprises a vibration amplitude detecting means 8 for detecting at least one of amplitude by vibration of the machining tool 3 during the machining, and that of the work 2 under machining, and the judging means 9, 10 for judging whether the machining condition is normal or not on the basis of at least one vibration detected by the vibration amplitude detecting means 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing abnormality detection device, a processing control device, and a processing abnormality detection method for preventing occurrence of abnormality during processing in, for example, an NC machine.

[0002]

2. Description of the Related Art As NC processing machines (devices for processing workpieces by numerical control), there are, for example, devices such as lathes, cutting machines, turning machines, machining centers, and polishing machines. This N
In the NC processing executed in the C processing machine, once the processing procedure is programmed, a large number of workpieces are produced under the same conditions according to the contents.

Conventionally, in such an NC processing machine, an abnormality occurring during the processing is detected by detecting a load amount. A lathe, which is an example of an NC processing machine, rotates a main shaft of a workpiece as a rotation axis, and moves a cutting tool (blade) left, right, front and back to turn the surface of the workpiece.

FIG. 9 is a perspective view showing an example of a state of a workpiece turned by a lathe. Here, a columnar workpiece 1a having a radius of 15 cm is first roughly cut by a radius of 5 mm, then a middle cut by a radius of 4 mm, and finally finished by a radius of 1 mm to obtain a target workpiece 1b having a target radius of 14 cm. The state is illustrated.

As described above, when a workpiece is turned, the turning is usually performed in a plurality of times. FIG. 10 is a flowchart showing a flow of an abnormality detection process in such a conventional NC processing machine.

In the conventional abnormality detection processing, a load variation of a tool motor for driving a cutting tool is measured (s).
1). As this load change, for example, a change over time of the output current of the tool motor is used.

FIG. 11 is a state diagram showing an example of a change over time of the output current of the tool motor measured as a load change.
The output current value of the tool motor increases during turning. Further, since this output current value rises extremely when an abnormality occurs in the tool motor, a threshold based on the motor rated current value for detecting an overload is set in advance.

Therefore, in the conventional abnormality detection process shown in FIG. 10, whether or not an overload has occurred is determined based on whether or not the load fluctuation exceeds a threshold value, and an abnormality is detected (s2).

When the load fluctuation exceeds the threshold and an abnormality is detected, the circuit breaker provided on the primary side of the tool motor is cut off, and the current supply from the primary side is cut off (s3). . Thus, the tool motor is stopped, and the operation of the cutting tool is also stopped. This makes it possible to protect the tool motor from overload current.

[0010]

As described above, in the abnormality detection processing of the conventional NC working machine, the tool motor of the working tool is protected from overload current. However, when the tool electric motor is stopped by this processing, the machining tool or the workpiece may already be damaged.

In the NC processing machine, processing is set by a program. This processing is executed based on the relative position between the processing tool and the workpiece at the beginning of the processing.
Here, when the machining tool is damaged, it is necessary to replace the machining tool.When exchanging the machining tool, the relative position between the original machining tool and the workpiece is changed. It is necessary to make adjustments to achieve the prescribed state.

However, since this adjustment requires labor and time, the productivity of the NC machine is reduced. The present invention has been made in view of the above situation, and
An object of the present invention is to provide a processing abnormality detection device, a processing control device, and a processing abnormality detection method that can detect an abnormality in a C processing machine at an early stage and prevent a failure in a processing tool and a workpiece before it occurs.

[0013]

In order to achieve the above object, the present invention takes the following measures. A first aspect of the present invention relates to a processing abnormality detection device that detects an abnormality that occurs when processing a workpiece by relatively moving the workpiece and the processing tool while making contact with the processing tool. The vibration amplitude of, and vibration amplitude detection means for detecting at least one of the vibration amplitude of the workpiece being processed, based on at least one vibration amplitude detected by the vibration detection means, the state of the processing is This is a machining abnormality detection device that includes a determination unit that determines whether or not the processing is normal.

Therefore, in the machining abnormality detecting device according to the first aspect of the present invention, the abnormality is detected from the vibration amplitude of the working tool or the vibration amplitude of the workpiece during the contact machining. The damage that occurs can be prevented beforehand.

According to a second aspect of the present invention, there is provided a machining abnormality detecting apparatus for detecting an abnormality occurring when a workpiece and a processing tool are relatively moved while being in contact with each other and processing the workpiece. The acceleration of the vibration state of the machining tool, the vibration acceleration detection means for detecting at least one of the acceleration of the vibration state of the workpiece being processed, and at least one vibration detected by the vibration acceleration detection means A processing abnormality detection device comprising: a determination unit configured to determine whether a processing state is normal based on acceleration.

The processing abnormality detecting device according to the second aspect of the invention detects an abnormality based on the acceleration of the vibration of the processing tool or the acceleration of the vibration of the workpiece, thereby obtaining the same effect as that of the first aspect. Can be.

According to a third aspect of the present invention, there is provided a machining control device using the machining abnormality detecting device according to the first or second aspect. This is a machining control device to which machining amount control means for changing the machining amount at the time of machining is added.

Therefore, in the machining control device according to the third invention, in addition to the same functions and effects as the first and second inventions, it is possible to correct and recover the machining state deteriorated by changing the machining amount. it can.

Therefore, the frequency of exchanging the working tools can be reduced, and the labor and time involved in the exchange can be reduced. In addition, a good processing state can be maintained for a long time.

For example, in the case of turning, a value determined from a cut amount and a feed amount (a product of a cut amount and a feed amount) when a processing tool cuts a workpiece may be used as a processing amount. it can.

According to a fourth aspect of the present invention, there is provided a machining control device using the machining abnormality detecting device according to the first or second aspect, or a machining control device according to the third aspect, wherein the abnormality is determined by the determining means. And a speed controller for changing a relative moving speed between the working tool and the workpiece.

Therefore, in the machining control device according to the fourth aspect of the present invention, the machining state deteriorated by changing the moving speed can be corrected and recovered. The relative movement speed can be changed, for example, in the case of turning by changing the rotation speed of the workpiece.

Further, by applying the contents of the fourth invention together with the contents of the third invention, control using both the moving speed and the processing amount is possible. The range can be expanded.

According to a fifth aspect of the present invention, there is provided a machining abnormality detection method for detecting an abnormality which occurs when a workpiece and a processing tool are relatively moved while being in contact with each other and machining the workpiece. Detects at least one of the vibration state of the machining tool and the vibration state of the workpiece being processed, and determines whether the processing state is normal based on the detected at least one vibration state. This is a processing abnormality detection method.

The processing abnormality detection method according to the fifth invention is the same as the processing executed by the processing abnormality detection device according to the first invention, and the same effect can be obtained. Note that the processing executed by the processing abnormality detection device of the second invention and the processing control devices of the third and fourth inventions are also considered to be the processing abnormality detection method and the processing control method, respectively, as in the above case. Can be.

[0026]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) This embodiment includes a machining abnormality detection function for detecting an abnormality based on the amplitude of vibration in a machining tool. The rotation speed and the machining amount are set so that the vibration becomes normal. The processing control device to be controlled will be described.

FIG. 1 is a perspective view showing a processing state in a lathe. FIG. 2 is a diagram showing a state when viewed from the turned side. The columnar workpiece 2 is rotated at a predetermined rotation speed about the main shaft as a rotation axis.

The cutting tool 3 comes into contact with the rotating workpiece 2 and moves at a predetermined feed speed in parallel with the rotation axis. Thus, the workpiece 2 is turned. This rotation speed is an element indicating the relative speed between the workpiece 2 and the cutting tool 3.

The amount of processing refers to the amount of cutting when the cutting tool 3 cuts the workpiece 2. Here, the machining amount is the product of the feed amount, which is the amount of movement of the cutting tool 3 in the rotation axis direction, and the cutting amount, which is the difference between the radius of the workpiece 2 before turning and the radius of the workpiece 2 after turning. Is used.

The relative moving speed and the processing amount determine the processing state of the workpiece 2. That is, in general turning, it is possible to improve the processing state of the workpiece 2 by reducing the cutting amount and the feed amount to reduce the processing amount per operation. Further, even when the rotational speed is increased to increase the relative moving speed between the workpiece 2 and the cutting tool 3, the processing state of the workpiece 2 can be improved.

During the turning operation in the situation as shown in FIGS. 1 and 2, vibration occurs in the cutting tool 3 in the same direction as the rotation direction or in the opposite direction. The amplitude of the vibration generated in the cutting tool 3 during the turning has a property of increasing as the machining state of the workpiece 2 deteriorates.

The machining control device according to the present embodiment performs abnormality detection and recovery from abnormality by utilizing the above-mentioned characteristics. FIG. 3 is a block diagram showing the configuration of the machining control device according to the present embodiment. The same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals, and the description thereof will be omitted or will be simplified. A description will be given here, and only different portions will be described in detail.

Referring to FIG. 3, the NC machine for machining the workpiece 2 includes a machining head 4 as a machining tool and a rotary electric motor 5 having a rotating portion 5a. The machining head 4 includes a cutting tool 3 and a tool motor 6 for driving the cutting tool 3.

The rotary electric motor 5 rotates the rotating part 5a, at which the workpiece 2 is fixed by the support member 7, at a predetermined rotational speed. The turning operation performed by the NC machine is the same as the turning operation described above, and the description thereof is omitted here.

The machining control device according to the present embodiment for performing abnormality detection and abnormality recovery of a machining state by the NC machining machine mainly includes a vibration amplitude sensor 8 and a rotary motor control device 1.
1 and a processing head controller 12.

The vibration amplitude sensor 8 is a non-contact type sensor for detecting the amplitude of the vibration generated in the cutting tool 3, and particularly detects the amplitude of the vibration in the same direction as the rotation direction or in the opposite direction. As the vibration amplitude sensor 8, for example, a distance sensor can be used.

The rotary motor control device 11 inputs the amplitude of the vibration generated in the cutting tool 3 from the vibration amplitude sensor 8,
When the time change of the vibration amplitude obtained based on this amplitude exceeds a predetermined threshold value, control is performed to increase the rotation speed of the workpiece 2 by the rotary electric motor 5.

The rotary motor control device 11 mainly includes an input / output unit 11a, a calculation unit 11b, a storage unit 11c, a control unit 11
d. The input / output unit 11a receives the vibration amplitude from the vibration amplitude sensor 8 and outputs control information on the rotation speed to the rotary electric motor 5.

The calculation section 11b outputs the vibration amplitude input to the input / output section 11a to the control section 11d. Storage unit 11c
Stores a threshold value regarding the vibration amplitude to be determined to be abnormal.

The control section 11d has a function of comparing the vibration amplitude with a threshold value and determining that the vibration amplitude exceeds the threshold value as abnormal. When an abnormality is detected,
It has a rotation speed control function of creating control information indicating that the rotation speed of the workpiece 2 is to be increased and outputting the control information to the input / output unit 11a.

The machining head controller 12 inputs the amplitude of the vibration generated in the cutting tool 3 from the vibration amplitude sensor 8,
When the time change of the vibration amplitude obtained based on this amplitude exceeds a predetermined threshold value, control is performed to reduce the machining amount.

This processing head control device 12 controls the relative positional relationship between the workpiece 2 and the processing head 4, and, like the rotary motor control device 11, the input / output unit 12a, Operation unit 12b, storage unit 12c, control unit 1
2d. Among them, the operation unit 12b and the storage unit 12c
Are the components 11a, 11 of the rotary motor control device 11.
The description is omitted because it is the same as b.

The input / output unit 12a receives the vibration amplitude from the vibration amplitude sensor 8 and outputs control information on the processing amount to the processing head 4. The control unit 12d repeats the increase of the rotation speed by the rotary motor control device 11 so that it becomes impossible to increase the rotation speed more than the current state.
It has a determining function of determining that the case where the vibration amplitude input from 2b exceeds the threshold value is abnormal. When the rotation speed is the upper limit and the vibration amplitude exceeds the threshold value and is determined to be abnormal, control information indicating that the machining amount is reduced and the turning is performed is input / output unit 12a. It has a processing amount control function for outputting to the processing head 4.

The operation of the machining control device according to the present embodiment configured as described above will be described below. In this processing control device, a rotary motor control device 11 and a processing head control device 12 perform operations in parallel.

FIG. 4 is a flowchart showing the operation of the rotary motor controller 11. First, the vibration amplitude of the cutting tool 3 of the NC processing machine is measured by the vibration amplitude sensor 8 (t
1), is input to the arithmetic unit 9b via the input / output unit 9a (t2).

FIG. 5 is a state diagram showing a change over time of the vibration amplitude obtained by the operation unit 9b. Next, in the rotary motor control device 11, the control unit 11d determines whether or not the vibration amplitude changing as shown in FIG. 5 exceeds the threshold value stored in the storage unit 9c (t)
3). It is assumed that this threshold value is obtained in advance from the relationship between normal turning and abnormal turning.

If the result of determination is that the vibration amplitude exceeds the threshold, control information indicating that the rotation speed is to be increased is transmitted to the control unit 1.
1d, and output from the input / output unit 11a to the rotary motor 5 (t4).

The rotary electric motor 5 includes a rotary electric motor control device 11
The rotation speed is increased according to the control information from. Due to the increase in the rotation speed, the processing state of the workpiece 2 is improved, and the vibration of the cutting tool 3 returns to the normal state.

FIG. 6 is a flowchart showing the operation of the processing head control device 12. This processing head control device 1
Also in 2, in the first place, the vibration amplitude of the cutting tool 3 is measured by the vibration amplitude sensor 8 (u1), input to the arithmetic unit 12b via the input / output unit 12a (u2), and the vibration amplitude is stored in the storage unit 12c. The control unit 12d determines whether the threshold value is exceeded (u3).

If the result of the determination is that the vibration amplitude exceeds the threshold value, it is determined whether or not the rotational speed is at the upper limit (u).
4). Here, when the rotation speed is not at the upper limit, since the operation of recovering the processing state is performed by the rotary motor control device 11 described above, the processing head control device 12 does not perform any control.

However, when the rotational speed is at the upper limit, the control unit 12d creates control information indicating that the feed amount and the cutting amount are changed, thereby reducing the processing amount and performing processing. Is output to the processing head 4 (u5).

The processing head 4 includes a processing head controller 12
The amount of processing is reduced according to the control information from. The processing state of the workpiece 2 is improved by the reduction of the processing amount,
The vibration of the cutting tool 3 returns to a normal state.

As described above, the machining control device according to the present embodiment determines whether the machining state (turning state) is normal by comparing the vibration amplitude of the cutting tool 3 with the threshold value. I do.

Therefore, an abnormality in the machining state can be detected at an early stage, whereby an abnormality can be detected before a trouble occurs in the cutting tool 3 and the workpiece 2. Further, when it is determined that the machining state is not normal, the machining control device increases the rotation speed or decreases the machining amount in one turn.

Therefore, even if an abnormality in the machining state is detected during the machining operation, the machining state is automatically recovered, so that the machining can be continued and the frequency of changing the machining tool can be reduced.

Therefore, the labor and time involved in the replacement can be reduced, and the productivity of the NC processing machine can be improved. In the machining control device according to the present embodiment, whether or not the machining state is normal is determined based on the vibration amplitude. However, the calculation units 11b and 12b determine the acceleration of the byte 3 from the time change of the vibration amplitude of the byte 3. And the processing state may be determined.

When the machining is performed a plurality of times, an individual threshold value may be set for each machining.
2b, and this value may be compared with a predetermined threshold value to determine normal / abnormal.

Further, as another method, normality / abnormality may be determined based on whether or not a difference between the obtained vibration amplitude and the vibration amplitude in a normal state is within a predetermined range. That is,
In the NC machining, after programming once, a large amount of machining is performed under the same conditions. Therefore, the programmed temporal vibration state may be stored, and this may be compared with the sequentially measured vibration state.

Furthermore, in the present embodiment, the vibration amplitude sensor 8 is provided. Instead, a contact type acceleration detection sensor provided on the cutting tool 3 and directly detecting the acceleration of the cutting tool 3 is used. Is also good.

Further, in the present embodiment, the processing state is recovered by first increasing the rotation speed, and when the rotation speed reaches the upper limit, the processing state is recovered by reducing the processing amount. However, conversely, the processing state may be recovered by reducing the processing amount, and the processing speed may be increased when the state recovery is required. Further, the processing state may be recovered while adjusting both the processing speed and the processing amount.

Further, the case where the machining control device according to the present embodiment is applied to a lathe for performing turning on a cylindrical workpiece has been described as an example, but the invention is not limited to this. Rather, various NCs such as cutting machines, machining centers, grinding machines, etc., that generate flat surfaces, curved surfaces, grooves, etc.
It can be applied to processing machines.

Further, in the present embodiment, the case where a cutting tool is provided as a working tool is described as an example. However, the present invention is not limited to this. For example, when a drill or the like is provided as a working tool. The same can be applied to.

(Second Embodiment) In the machining control device according to the first embodiment described above, the relative moving speed between the machining tool and the workpiece is changed by changing the rotation speed. In addition, the processing amount is changed by changing the feed amount and the cut amount.

On the other hand, in the machining control device according to the present embodiment, the machining state is changed by changing not the rotation speed of the workpiece but the moving speed of the cutting tool such as the feed speed. That is, in addition to the rotation speed of the workpiece, the moving speed of the processing tool is also an element indicating the relative speed between the workpiece and the processing tool.

FIG. 7 is a block diagram showing the configuration of the machining control apparatus according to the present embodiment. The same reference numerals are given to the same parts as in FIG. 3, and the description thereof will be omitted, or will be simplified. A description will be given here, and only different portions will be described in detail.

The tool motor control unit 9 includes an input / output unit 9a and a calculation unit 9 similarly to the rotary motor control unit 11 described above.
b, a storage unit 9c, and a control unit 9d.
Since b and the storage unit 9c are the same as the respective constituent parts 11a and 11b of the rotary motor control device 11, the description is omitted.

The input / output unit 9a of the tool motor control device 9
The vibration amplitude is input from the vibration amplitude sensor 8, and control information on the moving speed of the tool 3 by the tool motor 6 is output to the tool motor 5.

The control unit 9d compares the vibration amplitude obtained by the arithmetic unit 9b with the threshold value stored in the storage unit 11c, and determines that the case where the vibration amplitude exceeds the threshold value is abnormal. In addition, when it is determined that there is an abnormality, it has a moving speed control function of creating control information indicating that the moving speed of the tool 3 by the tool motor 5 is to be increased and outputting the control information to the input / output unit 11a.

The processing head control device 10 has an input / output unit 10a, a calculation unit 10b, a storage unit 10c, and a control unit 10d, like the processing head control device 12 described above. The operation unit 10b and the storage unit 10c are the same as the respective constituent parts 12a to 12c of the processing head control device 12, and thus the description is omitted.

The controller 10 of the processing head controller 10
d indicates a case in which the increase in the moving speed by the tool motor control device 11 is repeated to make it impossible to increase the moving speed from the current state, and the vibration amplitude obtained by the calculation unit 10b exceeds the threshold value. Judge as abnormal.

If the result of determination is that the moving speed is at the upper limit and the vibration amplitude exceeds the threshold value, control information indicating that the machining amount is to be reduced is created, and the control information is generated via the input / output unit 10a. Output to the processing head 4.

In the machining control device configured as described above, when the vibration amplitude of the cutting tool 3 exceeds the threshold value, the moving speed of the cutting tool is increased. If the moving speed has reached the upper limit, the processing amount is reduced.

As a result, it is possible to detect the abnormality in the machining state early, and to recover from the abnormality in the machining state, so that the same effects as those in the first embodiment can be obtained.

As described above, the method of controlling the tool motor 6 to change the processing speed and recovering from the abnormality in the processing state is, for example, that the workpiece 2 is fixed, and the cutting tool 3 and the drill are connected to the tool motor 6. This is effective for NC machining that is moved.

(Third Embodiment) In the machining control devices according to the first and second embodiments described above, abnormality detection and abnormality recovery are executed by detecting the vibration amplitude of the machining tool. However, in the present embodiment, in addition to the vibration amplitude of the processing tool, the vibration amplitude of the workpiece is also detected to execute abnormality detection and abnormality recovery.

FIG. 8 is a block diagram showing the configuration of the machining control device according to the present embodiment. The same reference numerals are given to the same parts as in FIGS. 3 and 7, and the description thereof will be omitted. Alternatively, a brief description will be given, and only different portions will be described in detail here.

Since the vibration generated during processing by the NC processing machine is a relative vibration between the workpiece 2 and the cutting tool 3, the workpiece 2 is also vibrated during the processing. The vibration amplitude sensor 13 is a sensor that measures the amplitude in the vibration direction generated on the workpiece 2 during processing.

As the processing proceeds, the size and form of the workpiece change. Therefore, the vibration amplitude sensor 1
When vibration is detected by the method 3, it is desirable to perform position adjustment.

The tool motor control device 14, the rotary motor control device 15,
In the case of rough machining, the machining head control device 16 detects an abnormality and recovers the machining state based on the vibration amplitude detected by the vibration amplitude sensor 13.

On the other hand, if it is not rough machining, abnormality detection and recovery of the machining state are performed based on the vibration amplitude detected by the vibration amplitude sensor 8. In other respects, operations similar to those described in the first and second embodiments are performed.

In the machining control device according to the present embodiment as described above, an abnormality is detected early based on the amplitude of the vibration detected by the vibration amplitude sensor 8 or 13.
When an abnormality is detected, recovery from the abnormality is performed automatically and promptly.

Therefore, the same effects as those described in the first and second embodiments can be obtained. The use of the vibration amplitude detected by the vibration amplitude sensor 8 is effective when the workpiece 2 is driven to perform processing.
The use of the vibration amplitude detected by the vibration amplitude sensor 13 is effective when the cutting tool 3 or the drill is driven to perform machining.

[0083]

As described above in detail, in the machining abnormality detection apparatus and the machining abnormality detection method according to the present invention, an abnormality in the machining state is detected based on the vibration amplitude of the machining tool or workpiece during machining. Thereby, an abnormality can be detected before a failure occurs in a processing tool or a workpiece.

In the machining control device of the present invention,
When an abnormality in the machining state is detected, the deteriorated machining state can be recovered by increasing the relative moving speed between the machining tool and the workpiece or decreasing the machining amount. .

Therefore, the frequency of changing the working tools can be reduced, and the labor and time involved in the replacement can be reduced. In addition, a good processing state can be maintained for a long time.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an execution state of cutting.

FIG. 2 is a diagram illustrating a cutting state as viewed from a side where the cutting is performed.

FIG. 3 is a block diagram showing a configuration of a processing control device according to the first embodiment of the present invention.

FIG. 4 is a flowchart showing the operation of the tool motor control device of the machining control device according to the embodiment.

FIG. 5 is a state diagram showing a temporal change in acceleration.

FIG. 6 is a flowchart showing an operation of the processing head control device of the processing control device according to the embodiment.

FIG. 7 is a block diagram showing a configuration of a machining control device according to a second embodiment of the present invention.

FIG. 8 is a block diagram showing a configuration of a machining control device according to a third embodiment of the present invention.

FIG. 9 is a perspective view showing an example of a state of a workpiece cut by a cutting machine.

FIG. 10 is a flowchart showing the flow of an abnormality detection process in a conventional NC processing machine.

FIG. 11 is a state diagram showing an example of a time change of the output current of the tool motor measured as a load change.

[Explanation of symbols]

 1a, 1b, 2 ... Workpiece 3 ... Bite 4 ... Processing head 5 ... Rotary electric motor 6 ... Tool electric motor 7 ... Supporting material 8, 13 ... Vibration amplitude sensor 9, 14 ... Tool electric motor control device 10, 12, 16 ... Processing Head control device 11, 15 ... Rotary motor control device

Claims (5)

[Claims] An apparatus for detecting an abnormality generated when processing a workpiece by relatively moving the workpiece and a processing tool while making contact with the processing tool. A vibration amplitude, a vibration amplitude detecting means for detecting at least one of the vibration amplitudes of the workpiece being processed, and a machining state based on at least one vibration amplitude detected by the vibration detecting means. A processing abnormality detecting device comprising: a determination unit configured to determine whether the processing is abnormal. 2. A processing abnormality detecting device for detecting an abnormality occurring when processing a workpiece by relatively moving the workpiece and a processing tool while making contact with the processing tool. Acceleration in a vibration state, vibration acceleration detection means for detecting at least one of the acceleration in a vibration state of the workpiece being processed, and at least one vibration acceleration detected by the vibration acceleration detection means. A determination means for determining whether or not a processing state is normal. 3. A processing control device using the processing abnormality detection device according to claim 1 or 2, wherein the processing tool processes the workpiece with the processing tool when the determination unit determines that the processing is abnormal. A machining control device characterized by adding a machining amount control means for changing a machining amount when performing machining. 4. A processing control device using the processing abnormality detection device according to claim 1 or 2, or the processing control device according to claim 3, wherein when the determination unit determines that the abnormality is abnormal, A machining control device further comprising a speed control means for changing a relative moving speed between a machining tool and the workpiece. 5. A machining abnormality detection method for detecting an abnormality which occurs when a workpiece and a processing tool are relatively moved while being in contact with each other while processing the workpiece, The vibration state and at least one of the vibration states of the workpiece being processed are detected, and based on the detected at least one vibration state,
A processing abnormality detection method, comprising: determining whether a processing state is normal.