JP2000073157A - Masking jig for optical thin film vapor deposition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a masking jig for optical thin film vapor deposition capable of easily vapor-depositing an optical thin film only on a required place onto the material to be vapor-deposited such as a tungsten halogen lamp with an infrared reflection film or the like with high operability and high precision. SOLUTION: A cylindrical masking cylinder 3 having a contact part 4 with a prescribed size in contact with the face of a sphere 1 is fixed by executing energizing in such a manner that the contact part 4 is brought into contact with the face of the sphere 1 by an energizing means 5, by which masking can easily be executed with high operability, and the boundary between the part A to be vapor-deposited and the part B not to be vapor-deposited becomes in the clear and stable contact state. By executing vacuum deposition in this state, a stable optical thin film can be formed on only the required place on the face of the sphere 1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a masking jig for vapor deposition of an optical thin film used for manufacturing a halogen bulb having an infrared reflecting film.

[0002]

2. Description of the Related Art Conventionally, in halogen lamps having an infrared reflecting film used for automobiles and the like, measures against heat such as forming a reflecting layer for infrared light or the like as an optical thin film on a bulb by a method such as vacuum evaporation are taken. Has been taken. In this case, it is not necessary to form a reflection layer around the electrodes of the bulb due to optical design. Therefore, prior to forming the reflection layer (optical thin film) by vacuum evaporation or the like, the bulb to be deposited is masked. Is made.

As an example of such a masking process,
Conventionally, a masking tape having one-sided adhesiveness and heat resistance is wound and adhered to the outer periphery of a valve.

[0004]

However, in the case of the masking process using a masking tape, the bonding operation depends exclusively on humans, and the object has a spherical shape and is difficult to wind. Work is complicated and time-consuming, skill is required, and automation is difficult. Generally speaking, it is difficult to ensure the accuracy of tape tensioning, and there are problems such as tape displacement during vapor deposition. As a result, a tape that regulates the boundary between the portion to be vapor-deposited and the non-vapor-deposited portion (masking portion) In the vapor deposition state near the end, the appearance becomes blurred or cloudy in appearance, or the surface is wavy, so that an optical thin film cannot be formed only at a desired portion in many cases. Further, since the heat-resistant tape is expensive and disposable, there is a disadvantage that the cost is considerably high as a whole.

SUMMARY OF THE INVENTION An object of the present invention is to provide a masking jig for depositing an optical thin film on an object to be deposited such as a halogen bulb having an infrared reflective film, which has good workability, is simple and accurate, and can deposit an optical thin film only at a necessary place. Is to provide tools.

Another object of the present invention is to provide a masking jig for depositing an optical thin film which can be used repeatedly without disposable and can contribute to cost reduction.

[0007]

According to a first aspect of the present invention, there is provided a masking jig for vapor deposition of an optical thin film according to the present invention, which has a contact portion having a predetermined diameter in contact with a spherical surface as an object to be vapor-deposited and is removably loaded. A cylindrical masking cylinder that regulates a coating position of the optical thin film by vacuum deposition along a circumferential direction of the spherical surface according to a contact portion; and a biasing device that urges the masking cylinder in a direction in which the contact portion contacts the spherical surface. Force means.

[0008] Here, the "deposited object" is mainly assumed to be a bulb serving as a source of a halogen bulb with an infrared reflecting film, and may be a sphere in principle, but is mainly viewed in cross section. And a spherical surface having a continuous curvature, that is, a surface having a shape in which circles having different radii are continuous. In this case, the material to be deposited is not limited to a single sphere, but may be two at a time in consideration of the use efficiency of an expensive vacuum vapor deposition apparatus on which the material to be deposited is set including the jig. In order to perform the vapor deposition process, two spheres may be symmetrically connected to form a peanut shape as in the invention of the second or third aspect. The “masking cylinder” may be a cylindrical one having a contact portion having a predetermined diameter corresponding to the outer diameter of the spherical surface of the portion where the formation of the optical thin film is necessary, and having a heat resistance. Here, if the object to be deposited has only one sphere, it can be directly loaded in the axial direction, so that the masking cylinder may be a simple cylindrical one. In the case where the object to be vapor-deposited is formed into a peanut shape by connecting two spheres, the central concave portion cannot be loaded in the axial direction as it is, so for example, as in the invention according to claim 2 A dividing structure in which the masking cylinder has contact portions at both ends in the axial direction, and is divided in the axial direction and the radial direction, and is loaded in the central concave portion of the peanut-shaped deposition object in which two spheres are connected symmetrically. It is desirable to do. Alternatively, as in the third aspect of the invention, the sphere is formed so as to have contact portions at both ends in the axial direction and to have a restoring force for restoring to a cylindrical shape having an overlapping portion so as to be freely expandable in the circumferential direction. Is desirably a belt-plate curl structure that is loaded in the central recess of a peanut-shaped object to be deposited in which two are connected symmetrically. It is preferable that the material of the masking cylinder having the belt-plate curl structure be thin, has a predetermined strength, and has a shape memory, for example, SUS. As the "biasing means", it suffices if it has a function of biasing the masking cylinder in the direction in which the contact portion contacts the spherical surface.
A pressing spring or the like may be used. In particular, when the masking cylinder has a divided structure as in the invention according to claim 2, if the masking cylinder has a biasing structure that biases in a direction to separate the pair of divided pieces in the axial direction of the masking cylinder, The contact portions at both ends can be pressed against the spherical surfaces of the two spheres. In this case, the biasing structure may use, for example, a pressing spring or the like, and may have a structure in which a shaft or the like is interposed at the center of the spring in consideration of the mountability and the like. In this case, an elastic holding piece for maintaining the cylindrical shape after loading the masking cylinder having the divided structure is required. The elastic holding piece may be made of a suitable shape and material, but may be a clip made of a semicircular elastic plate, for example, in consideration of detachability and holding properties. On the other hand, when the masking cylinder has a band-plate curl structure as in the third aspect of the present invention, the masking cylinder is detachably mounted on the outer peripheral surface of the masking cylinder and holds the masking cylinder in a cylindrical shape having a predetermined diameter against its restoring force. With a one-piece structure, the contact portions at both ends can be pressed against the spherical surfaces of the two spheres by using the restoring force of the masking cylinder. The holding piece structure in this case may be appropriately made of a shape and material, but may be a clip made of a semicircular elastic plate in consideration of detachability, holding properties, and the like.

Accordingly, the cylindrical masking cylinder having a contact portion having a predetermined diameter in contact with the spherical surface is urged by the urging means so that the contact portion comes into contact with the spherical surface. The boundary between the portion and the non-evaporated portion has a good precision and a clear and stable contact state, so that a stable optical thin film can be applied and formed by vacuum evaporation only at a necessary portion on the spherical surface. In particular, if the diameter of the contact portion is formed in accordance with the outer diameter of the sphere surface of the portion where the formation of the optical thin film is required, then the contact portion is stabilized only by pressing the contact portion against the sphere surface by the urging means. Compared to the winding method, it can be easily mounted without skill and the workability is improved. Also, the masking cylinder can be used repeatedly as many times as possible,
Contribute to cost reduction. In particular, in the invention according to claim 2 or 3, the contact portions at both ends can be simultaneously pressed against the sphere surfaces of the two spheres without impairing the mountability of the masking cylinder, and the posture thereof is changed. Since it is uniquely determined, the boundary between the portion to be vapor-deposited and the non-vapor-deposited portion regulated by the contact portions at both ends has high precision.

[0010] The invention according to claim 4 is the invention according to claims 1 to 3.
In the masking jig for depositing an optical thin film according to any one of the above, a step at the contact portion of the masking cylinder in contact with the spherical surface is 0.5 mm or less.

Therefore, since the contact portion for regulating the boundary between the portion to be vapor-deposited and the non-vapor-deposited portion has a step of 0.5 mm or less with respect to the spherical surface, white blur, turbidity, and waving may occur at the boundary. Without forming an optical thin film. The step is preferably as thin as possible within a range where the strength can be maintained.

[0012]

FIG. 1 shows a first embodiment of the present invention.
A description will be given based on FIG. FIG. 1 is a principle structural view showing a cross section of a structure of a masking jig for vapor deposition of an optical thin film.
FIG. 1 is a configuration diagram schematically showing a schematic structure of a vacuum evaporation apparatus. First, an object having a spherical surface having a continuous curvature as viewed in the axial direction in section is used as an object to be deposited. In the present embodiment, an object having only one spherical object 1 is targeted.
The sphere 1 is a bulb material that is finally manufactured as a halogen bulb with an infrared reflecting film through post-processing such as vacuuming and electrode formation after coating the optical thin film. Treated as a work. Also,
In order to facilitate handling of the sphere 1 in a vacuum deposition step or the like, the sphere 1 is integrally formed with a cylindrical portion 2.

When a region A indicated by hatching in the drawing is a desired portion to be vapor-deposited, a masking cylinder 3 for masking the non-vapor-deposited portion B side is replaced by a cylindrical portion 2.
Loaded around (loaded axially). The masking cylinder 3 has a cylindrical shape having an inner diameter larger than the diameter of the cylindrical portion 2, and the sphere 1 is formed in a tapered shape so that the wall thickness decreases toward the tip, and the tip is The outer peripheral surface of the sphere 1 is formed with a predetermined diameter as the contact portion 4 that continuously contacts in the circumferential direction. This contact part 4
Regulates the boundary between the deposition target portion A and the non-deposition portion B,
The predetermined diameter of the contact portion 4 is set in accordance with the outer diameter of the sphere 1 at the boundary. Here, the thickness of the contact portion 4 at the tip is formed to be 0.5 mm or less.

Further, a pressing spring 5 is loaded on the cylindrical portion 2 as biasing means for biasing the masking cylinder 3 toward the sphere 1. The rear end side of the pressing spring 5 is mounted on the cylindrical portion 2 and is locked by a spring holder 6 which is also used for mounting and supporting in a vacuum bell jar. Thereby, the contact portion 4 is pressed so as to contact the outer peripheral surface of the sphere 1.

The sphere 1 to which the jig such as the masking cylinder 3 is attached is set in a vacuum bell jar 8 to which a vacuum generator 7 is connected as shown in FIG. The substance to be deposited from the deposition source 9 is a sphere 1
By emitting toward the vicinity, the optical thin film is vapor-deposited and formed only on the portion of the sphere 1 that is not masked by the masking cylinder 3, that is, on the desired portion A to be vapor-deposited indicated by hatching.

Therefore, according to the present embodiment, the contact portion 4
Presses the masking cylinder 3 having a predetermined diameter into the spring 5
By constantly pressing against the outer peripheral surface of the spherical body 1, the state where the contact portion 4 is in contact with the entire circumference in the circumferential direction at the boundary position between the desired deposition target portion A and the non-deposition portion B without being displaced is maintained. Therefore, deposition can be performed with good boundary accuracy. In particular, if the diameter of the contact portion 4 is formed in accordance with the outer diameter of the spherical surface of the portion where the optical thin film needs to be formed (the boundary between the portion A to be deposited and the non-deposited portion B), the pressing spring 5 As a result, the contact portion 4 is stabilized by simply pressing it against the surface of the spherical body, so that it can be easily attached without skill, and the workability is improved as compared with the tape winding method. Further, the masking cylinder 3 can be used repeatedly as many times as possible, which is advantageous in reducing costs.

A second embodiment of the present invention will be described with reference to FIGS. The same parts as those described in the first embodiment are denoted by the same reference numerals, and description thereof is omitted (the same applies to the following embodiments). 3 is a sectional view showing the principle of the structure of a masking jig for depositing an optical thin film, FIG. 4 is a side view thereof, FIG. 5 is an exploded perspective view of the jig, and FIG.
FIG. 7 is a configuration diagram schematically showing a schematic structure of a vacuum evaporation apparatus, and FIG.
FIG. 2 is a perspective view schematically showing a schematic structure inside a vacuum bell jar.

The present embodiment is more practical, in which the method as in the first embodiment is used as a principle method, and the object 10 is developed for taking two pieces. In other words, in the present embodiment, two deposition processes can be performed at a time in consideration of the use efficiency of an expensive vacuum deposition device in which the object 10 is set including the jig. Sphere 1A, 1B
Are connected in a point symmetry to form a groundnut shape. These spheres 1A and 1B are divided into two after application of the optical thin film, and are each subjected to post-treatments such as internal vacuuming and electrode formation. It is a material, and in the vacuum evaporation apparatus, the entire object to be evaporated 10 is treated as a work (see FIG. 7). In addition, cylindrical portions 2A and 2B are integrally formed in the axial direction to facilitate the handling of the deposition target 10 in a vacuum deposition process or the like.

A cylindrical masking cylinder 11 is mounted around the central concave portion of the object 10 to be deposited. This masking cylinder 11 has four divided pieces 11a, 11b, 11 divided into two in the axial direction and the radial direction, respectively.
It has a divided structure composed of c and 11d. That is, the divided pieces 11a and 11b forming a pair in the radial direction,
Each of c and 11d has a shape obtained by dividing the above-mentioned masking cylinder 3 into two, and has contact portions 4A and 4B having a predetermined diameter at the tips of the corresponding spheres 1A and 1B, respectively. Also, spring holding holes 12a, 12b, 12c and 12d are formed at corresponding positions in the pair of divided pieces 11a and 11c and in the divided pieces 11b and 11d in the axial direction. Pressing springs 13a and 13b as means are attached. Thereby, the divided pieces 11a, 11
c and the divided pieces 11b and 11d are each subjected to an urging force in a direction away from each other in the axial direction.
B is pressed so as to contact the outer peripheral surfaces of the corresponding spheres 1A and 1B. Also, these divided pieces 11a, 11b, 11
After loading the masking cylinder 11 composed of c and 11d, the divided pieces 11a and 11b forming a pair in the radial direction,
Elastic holding pieces 14A and 14B are provided so as to be detachably mounted on c and 11d and maintain a cylindrical shape. These elastic holding pieces 14A and 14B are divided pieces 1
It is formed as a semicircular clip that can hold the laminations 1a and 11b and the split pieces 11c and 11d over half a circumference or more.

The object 10 to which the jig such as the masking cylinder 11 is attached is set as a work in a vacuum bell jar 8 to which a vacuum generator 7 is connected as shown in FIG. By emitting a substance to be deposited from 9 toward the vicinity of the object 10 to be deposited, portions of the spheres 1A and 1B of the object 10 which are not masked by the masking cylinder 11, that is, hatched portions in FIG. An optical thin film is formed by vapor deposition only on a desired portion A to be vapor deposited.

In this embodiment, the inside of the vacuum bell jar 8 has a ferris wheel structure. For example, as shown in FIG. 7, a plurality of objects to be vapor-deposited 10 are rotatably attached to two annular revolution mechanisms 15 (in FIG. 7, the masking cylinder 11 is not shown). Each object 1
0 is revolved while rotating, so that the evaporation source 9
, And the optical thin film can be deposited on a large number of the objects 10 (spheres 1A and 1B) during one revolution of the revolving mechanism 15, so that the vacuum deposition apparatus can be efficiently used. Can be used well. Thus, the use efficiency of the expensive vacuum evaporation apparatus is improved in combination with the use of the peanut shape in which the two spheres 1A and 1B are connected. Needless to say, the vacuum deposition apparatus is not limited to the ferris wheel type, but may be a fan-type turning type or the like.

Therefore, according to the present embodiment, the object 10 is a two-piece peanut-shaped object to be deposited which is useful for efficient use of the vacuum evaporation apparatus. Also, the effect based on the principle of the first embodiment can be obtained similarly.

A third embodiment of the present invention will be described with reference to FIG. FIG. 8 is a principle perspective view showing the structure of a masking jig for vapor deposition of an optical thin film. This embodiment is also directed to the peanut-shaped object to be deposited 10 shown in the second embodiment. A cylindrical masking cylinder 21 is loaded around the central concave portion of the object 10 to be deposited. The masking cylinder 21 has contact portions 4 at both ends in the axial direction.
C and 4D, and has a restoring force for restoring to a cylindrical shape having an overlapped portion, and has a band plate curl structure formed to be freely expandable in the circumferential direction. Therefore, by expanding the masking cylinder 21 in the circumferential direction, the masking cylinder 21 can be removably loaded around the central concave portion of the object 10. Such a masking cylinder 21 is, for example, S
A plate made of US and having a thickness of about 0.2 to 0.3 mm is used, and the steps at the contact portions 4C and 4D at both ends are formed to be 0.5 mm or less. A clip 22 having a holding piece structure as a biasing means is removably mounted on the outer peripheral surface of the masking cylinder 21 loaded in this way. This clip 22 is a masking cylinder 21
Are semicircular (U-shaped) formed to have a width that restricts the diameter at the contact portions 4C and 4D to a predetermined diameter by tightening against the restoring force in the expanding direction. Therefore, when the masking cylinder 21 is loaded and the clip 22 is attached,
The contact portions 4C and 4D are regulated to a predetermined diameter, and the spheres 1 on both sides are formed.
A and 1B are in contact with the outer peripheral surface in a pressed state.
The position accuracy of C and 4D is high.

The object 10 to which the jig such as the masking cylinder 21 is attached is not shown in FIG.
7 and the ferrous wheel type vacuum bell jar 8 as in the case of FIG.
The material to be deposited is emitted from the deposition source 9 toward the vicinity of the deposition target 10, and is set in the spheres 1 </ b> A and 1 </ b> B of the deposition target 10.
Accordingly, the optical thin film is deposited only on the portions that are not masked, that is, on the desired portions A to be deposited, which are hatched in FIG.

Therefore, according to the present embodiment, the object 10 is a peanut-shaped object to be deposited which is useful for efficient use of the vacuum evaporation apparatus and cannot be detached in the axial direction. Also, the same effect as in the second embodiment can be obtained.

[0026]

According to the first aspect of the present invention, a cylindrical masking cylinder having a contact portion having a predetermined diameter in contact with a spherical surface is urged by an urging means so that the contact portion comes into contact with the spherical surface. Therefore, the boundary between the part to be evaporated and the non-evaporated part, which is regulated by the contact part, has a good precision and a clear and stable contact state, and a stable optical thin film is applied and formed by vacuum evaporation only at the necessary places on the spherical surface. In particular, if the diameter of the contact portion is formed in accordance with the outer diameter of the spherical surface of the portion where the formation of the optical thin film is required, then simply pressing the contact portion against the spherical surface by the urging means As it is stable, it can be installed easily without skill, compared to the tape winding method, and the workability is improved. In addition, the masking cylinder can be used repeatedly as many times as possible, further reducing costs. You can also.

According to the second aspect of the present invention, in the masking jig for the optical thin film deposition according to the first aspect, the object to be deposited is formed in a peanut shape having two spheres connected to each other, and is formed around the central recess. Since a cylindrical masking cylinder having a divided structure divided in the axial direction and the radial direction is loaded, a two-piece peanut-shaped object to be deposited that is useful for efficient use of a vacuum evaporation apparatus is targeted. Even if it is not possible to attach / detach in the axial direction as it is, the effects of the first aspect can be obtained with higher accuracy.

According to the third aspect of the present invention, in the masking jig for the optical thin film deposition according to the first aspect, the object to be deposited is formed in a peanut shape by connecting two spheres, and is formed around a central concave portion. Since it has a contact portion at both ends in the axial direction, and has a restoring force for restoring to a cylindrical shape having an overlapping portion, a masking cylinder having a strip curl structure formed to be freely expandable in the circumferential direction is loaded. The effect of the invention according to claim 1 is more accurate even if the object is a peanut-shaped object to be deposited which is useful for efficient use of a vacuum evaporation apparatus and cannot be detached in the axial direction as it is. You can get higher.

According to the fourth aspect of the present invention, in the masking jig for depositing an optical thin film according to any one of the first to third aspects, the contact portion for regulating the boundary between the portion to be deposited and the non-deposition portion is provided. Since the step is 0.5 mm or less with respect to the spherical surface, a more precise optical thin film can be formed without causing white blur, cloudiness, and waving at the boundary.

[Brief description of the drawings]

FIG. 1 is a principle configuration diagram showing a cross section of a structure of a masking jig for depositing an optical thin film according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram schematically showing a schematic structure of a vacuum evaporation apparatus.

FIG. 3 is a principle configuration diagram showing a cross section of a structure of a masking jig for depositing an optical thin film according to a second embodiment of the present invention.

FIG. 4 is a side view thereof.

FIG. 5 is an exploded perspective view of a jig.

FIG. 6 is a configuration diagram schematically showing a schematic structure of a vacuum evaporation apparatus.

FIG. 7 is a perspective view schematically showing a schematic structure inside a vacuum bell jar.

FIG. 8 is a principle perspective view showing the structure of a masking jig for depositing an optical thin film according to a third embodiment of the present invention.

[Explanation of symbols]

 1, 1A, 1B: spherical body 3: masking cylinder 4, 4A, 4B, 4C, 4D: contact portion 5: urging means 10: object to be deposited 11: masking cylinder 11a, 11b, 11c, 11d: divided pieces 13a, 13b : Biasing means 14A, 14B: elastic holding piece 21: masking cylinder 22: biasing means

Claims (4)

[Claims] 1. An optical thin film is applied by vacuum deposition along a circumferential direction of the spherical surface according to the contact portion, the optical thin film having a contact portion having a predetermined diameter in contact with a spherical surface to be deposited. A masking jig for vapor deposition of an optical thin film, comprising: a cylindrical masking cylinder for regulating a position; and a biasing unit for biasing the masking cylinder in a direction in which the contact portion contacts the spherical surface. 2. The masking cylinder has the contact portions at both ends in the axial direction, and is divided in the axial direction and the radial direction to connect the two spheres symmetrically to each other. The biasing means includes a biasing structure for biasing the pair of divided pieces in the axial direction of the masking cylinder in a direction to separate them from each other; 2. The masking jig for depositing an optical thin film according to claim 1, further comprising a detachable elastic holding piece for maintaining a pair of divided pieces in a radial direction in a cylindrical shape. 3. The masking cylinder has the contact portions at both ends in the axial direction thereof, and is formed so as to be expandable in a circumferential direction by providing a restoring force for restoring a cylindrical shape having an overlapping portion. And a strip curl structure to be loaded in a central concave portion of the peanut-shaped object to be deposited, which is symmetrically connected to two pieces; and the biasing means is detachably loaded on the outer peripheral surface of the masking cylinder. 2. The masking jig for depositing an optical thin film according to claim 1, having a holding piece structure for restricting the cylindrical shape having a predetermined diameter against a restoring force. 4. The masking jig for depositing an optical thin film according to claim 1, wherein a step at the contact portion of the masking cylinder in contact with the spherical surface is 0.5 mm or less.