JP2000065595A - Sensor circuit - Google Patents

Sensor circuit

Info

Publication number
JP2000065595A
JP2000065595A JP23391898A JP23391898A JP2000065595A JP 2000065595 A JP2000065595 A JP 2000065595A JP 23391898 A JP23391898 A JP 23391898A JP 23391898 A JP23391898 A JP 23391898A JP 2000065595 A JP2000065595 A JP 2000065595A
Authority
JP
Japan
Prior art keywords
circuit
variable
difference
sensor circuit
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23391898A
Other languages
Japanese (ja)
Inventor
Hideo Morimoto
森本  英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta Corp
Original Assignee
Nitta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitta Corp filed Critical Nitta Corp
Priority to JP23391898A priority Critical patent/JP2000065595A/en
Publication of JP2000065595A publication Critical patent/JP2000065595A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a sensor circuit where no sensitivity difference is generated depending on a direction by providing a fixed capacitor that becomes a reference for comparison and comparing the fixed capacitor with a pair of variable capacitors whose capacity changes according to a physical amount, and outputting the difference. SOLUTION: A circuit 1 for detecting amount of capacity change compares a fixed capacitor C0 that becomes a reference for comparison with a pair of variable capacitors C1 and C2 whose capacity changes according to a physical amount and outputs the capacity differences ΔC1 and ΔC2. A C/V conversion circuit 2 converts the capacity differences ΔC1 and ΔC2 to voltages, and the voltage output is compared by an amplification circuit 3, and the difference is outputted. As a result, by applying, for example, to a sensor for converting the difference between double capacitance to voltage output, voltage output also equally changes when the amount of change in the capacitance is equal and sensitivity at + and - sides becomes equal, thus achieving a symmetrical circuit type sensor without generating a sensitivity difference that depends on the polarity of the direction of a detection axis.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、センサ回路に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor circuit.

【0002】[0002]

【従来の技術】静電容量式センサの検出回路としては、
例えば図4に示すような、静電容量の差の変化を検出信
号とする回路が知られている。図5はその具体例であ
る。
2. Description of the Related Art As a detection circuit of a capacitance type sensor,
For example, there is known a circuit as shown in FIG. 4 which uses a change in capacitance difference as a detection signal. FIG. 5 shows a specific example.

【0003】しかしながら、静電容量C1→電圧V1と、
静電容量C2→電圧V2との変換率が異なる場合や、静電
容量C1,C2が増加する場合と減少する場合で電圧V1,V2
への変換率が異なる場合、物理量の変化の検出感度が信
号の変化方向によって異なることになる。つまり、上記
回路を使用した場合、方向により感度差が発生するとい
う問題がある。
However, the capacitance C1 → the voltage V1,
When the conversion rate from the capacitance C2 to the voltage V2 is different, or when the capacitances C1 and C2 increase and decrease, the voltages V1 and V2
When the conversion rate to the data is different, the detection sensitivity of the change of the physical quantity is different depending on the change direction of the signal. That is, when the above-described circuit is used, there is a problem that a sensitivity difference occurs depending on the direction.

【0004】[0004]

【発明が解決しようとする課題】そこで、この発明で
は、方向により感度差が発生しないセンサ回路を提供す
ることを課題とする。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a sensor circuit which does not cause a sensitivity difference depending on the direction.

【0005】[0005]

【課題を解決するための手段】(請求項1記載の発明)
この発明のセンサ回路は、比較の基準となる固定容量を
設け、前記固定容量と物理量に応じて容量が変化する一
対の可変容量とを比較して、その差を出力するものとし
ている。 (請求項2記載の発明)この発明のセンサ回路は、比較
の基準となる固定抵抗を設け、前記固定抵抗と物理量に
応じて抵抗が変化する一対の可変抵抗とを比較して、そ
の差を出力するものとしている。 (請求項3記載の発明)この発明のセンサ回路は、比較
の基準となる一定の時定数回路を設け、前記一定の時定
数回路と物理量に応じて時定数が変化する一対の時定数
回路とを比較して、その差を出力するものとしている。 (請求項4記載の発明)この発明のセンサ回路は、上記
請求項1又は2記載の発明に関して、可変容量又は可変
抵抗を検出部とすると共に半導体論理回路を比較器と
し、前記比較器からの出力をオペアンプで作動出力する
ものとしている。 (請求項5記載の発明)この発明のセンサ回路は、上記
請求項3記載の発明に関して、物理量に応じて時定数が
変化する一対の時定数回路が、可変容量と固定抵抗、固
定容量と可変抵抗、又は可変容量と可変抵抗により構成
されており、前記可変容量又は可変抵抗を検出部とする
と共に半導体論理回路を比較器とし、前記比較器からの
出力をオペアンプで作動出力するものとしている。
Means for Solving the Problems (Invention of Claim 1)
The sensor circuit according to the present invention is provided with a fixed capacitor serving as a reference for comparison, compares the fixed capacitor with a pair of variable capacitors whose capacity changes in accordance with a physical quantity, and outputs the difference. (Invention of Claim 2) The sensor circuit of the present invention is provided with a fixed resistor serving as a reference for comparison, compares the fixed resistor with a pair of variable resistors whose resistance changes according to a physical quantity, and determines the difference. It shall be output. According to a third aspect of the present invention, there is provided a sensor circuit including a constant time constant circuit serving as a reference for comparison, a constant time constant circuit, and a pair of time constant circuits whose time constants change according to physical quantities. And outputs the difference. (Invention of Claim 4) The sensor circuit according to the present invention relates to the invention of Claim 1 or 2, wherein a variable capacitance or a variable resistance is used as a detection unit, and a semiconductor logic circuit is used as a comparator. The output is operated by an operational amplifier. According to the sensor circuit of the present invention, a pair of time constant circuits whose time constants change in accordance with the physical quantity include a variable capacitor and a fixed resistor, and a fixed capacitor and a variable capacitor. It is composed of a resistor or a variable capacitor and a variable resistor. The variable capacitor or the variable resistor serves as a detection unit, the semiconductor logic circuit serves as a comparator, and the output from the comparator is operated and output by an operational amplifier.

【0006】なお、上記発明のセンサ回路の機能につい
ては、以下の発明の実施の形態の欄で詳述する。
The function of the sensor circuit of the present invention will be described in detail in the following embodiments of the present invention.

【0007】[0007]

【発明の実施の形態】以下、この発明の実施の形態を図
面に従って説明する。(実施形態1について) この実施形態のセンサ回路は、
図1に示すように、比較の基準となる固定容量C0と物理
量に応じて容量が変化する一対の可変容量C1, C2とをそ
れぞれ比較してその容量差ΔC1, ΔC2を出力する容量変
化量検出回路1,1と、各容量差ΔC1,ΔC2をそれぞれ
電圧に変換するC/V変換回路2,2と、前記C/V変
換回路2,2からの電圧出力を比較し且つその差を出力
するアンプ回路3とから構成されている。
Embodiments of the present invention will be described below with reference to the drawings. (Regarding Embodiment 1) The sensor circuit of this embodiment is as follows.
As shown in FIG. 1, a fixed capacitance C0 serving as a reference for comparison is compared with a pair of variable capacitors C1 and C2 whose capacitances change according to a physical quantity, respectively, and the capacitance difference ΔC1, ΔC2 is output. Circuits 1 and 1, C / V conversion circuits 2 and 2 for converting the respective capacitance differences ΔC1 and ΔC2 into voltages, and compares the voltage outputs from the C / V conversion circuits 2 and 2 and outputs the difference. And an amplifier circuit 3.

【0008】上記センサ回路をより具体的に形成する
と、図2のような回路になる。図2中、符号R0, R1, R
2, R4〜R9は固定抵抗、符号C1, C2は可変静電容量、符
号C0,Cは固定静電容量、U1, U2はEX−OR論理回
路、U3, U4はオペアンプである。
When the above sensor circuit is formed more specifically, a circuit as shown in FIG. 2 is obtained. In FIG. 2, symbols R0, R1, R
2, R4 to R9 are fixed resistors, C1 and C2 are variable capacitances, C0 and C are fixed capacitances, U1 and U2 are EX-OR logic circuits, and U3 and U4 are operational amplifiers.

【0009】 図2において、R1=R2、C1=C2(無負荷時) C1×R1=C2×R2≠C0×R0 ・・・・・(a) また、V0 =(1+R6/R7)(V2 −V1 )・・・・・(b) R6/R7=R9/R8 可変静電容量C1, C2は、力、モーメント、加速度、
圧力等の物理量により変化するようにしてある。 時定数C1×R1,C0×R0の違いによりP1 点には無負
荷時に電圧V1 が発生し、他方、時定数C2×R2,C0×R0
の違いによりP2 点には無負荷時に電圧V2 が発生す
る。上記の如くR1=R2、C1=C2であるから回路の対称性
よりV1 =V2 となり、V0 =0となる。 ここで、上記した物理量によりC2が+ΔCだけ変化
し、P2 点の電圧が(V 2 +ΔV)になると、出力V0
は上記(b) 式により V0 =(1+R6/R7)(V2 +ΔV−V1 )・・・・・(c) となる。 また、物理量により逆にC1が+ΔCだけ変化し、P
1 点の電圧が(V1 +ΔV)になると、出力V0 は上記
(b) 式により V0 =(1+R6/R7)(V2 −V1 −ΔV)・・・・・(d) となる。 したがって、C1又はC2が+ΔCだけ変化すれば、出
力電圧V0 の変化量ΔV 0 は相互に大きさが同じで、 ΔV0 の絶対値=(1+R6/R7)・ΔV となる。
In FIG. 2, R1 = R2, C1 = C2 (when no load is applied) C1 × R1 = C2 × R2 ≠ C0 × R0 (a)0= (1 + R6 / R7) (VTwo-V1) ... (b) R6 / R7 = R9 / R8 The variable capacitances C1 and C2 are the force, moment, acceleration,
It changes according to physical quantities such as pressure. P due to the difference between the time constants C1 × R1 and C0 × R01No negatives on points
Voltage V at loading1Occurs, while the time constants C2 × R2, C0 × R0
P due to the differenceTwoThe point is the voltage V when there is no load.TwoOccurs
You. Circuit symmetry because R1 = R2 and C1 = C2 as described above
More V1= VTwoAnd V0= 0. Here, C2 changes by + ΔC due to the above physical quantity.
Then PTwoThe voltage at the point is (V Two+ ΔV), the output V0
Is given by the above equation (b).0= (1 + R6 / R7) (VTwo+ ΔV-V1) ... (c) Conversely, C1 changes by + ΔC depending on the physical quantity, and P1
1The voltage at the point is (V1 + ΔV), the output V0Is above
From equation (b), V0= (1 + R6 / R7) (VTwo-V1 −ΔV)... (D). Therefore, if C1 or C2 changes by + ΔC,
Force voltage V0Of change ΔV 0Are the same in size, ΔV0Is the absolute value of (1 + R6 / R7)) ΔV.

【0010】これは、例えば、二つの静電容量の差の変
化を電圧出力に変換するようなセンサに適用した場合、
静電容量の変化量が等しければ電圧出力も等しく変化
し、+側と−側の感度が等しくなることを意味する。 以上の説明により、検出軸方向の極性に依存する感
度差が発生しない対称回路型のセンサが実現可能なこと
が明らかである。(実施形態2について) この実施形態のセンサ回路は、
図3に示すように、比較の基準となる固定抵抗R0と物理
量に応じて抵抗が変化する一対の可変抵抗R1, R2とをそ
れぞれ比較してその抵抗差ΔR1, ΔR2を出力する抵抗変
化量検出回路1’,1’と、各抵抗差ΔR1, ΔR2をそれ
ぞれ電圧に変換するR/V変換回路2’,2’と、前記
R/V変換回路2’,2’からの電圧出力を比較し且つ
その差を出力するアンプ回路3’とから構成されてい
る。上記センサ回路をより具体的に形成するには、図2
に示した回路中のR1, R2のみを可変とし、その他の固定
値とすることにより成すことができる。
For example, when this is applied to a sensor that converts a change in the difference between two capacitances into a voltage output,
If the amount of change in the capacitance is equal, the voltage output changes equally, which means that the + side and the-side sensitivity become equal. From the above description, it is clear that a symmetrical circuit type sensor that does not generate a sensitivity difference depending on the polarity in the detection axis direction can be realized. (Regarding Embodiment 2) The sensor circuit of this embodiment is as follows.
As shown in FIG. 3, a resistance change amount detection circuit for comparing a fixed resistance R0 serving as a reference for comparison with a pair of variable resistances R1 and R2 whose resistance changes according to a physical quantity and outputting the resistance differences ΔR1 and ΔR2. Circuit 1 ', 1', R / V conversion circuits 2 ', 2' for converting the respective resistance differences ΔR1, ΔR2 into voltages, and voltage outputs from the R / V conversion circuits 2 ', 2', respectively. And an amplifier circuit 3 'for outputting the difference. To form the sensor circuit more specifically, FIG.
Can be achieved by making only R1 and R2 in the circuit shown in FIG.

【0011】このセンサ回路の場合においても上記実施
形態と同様に、検出軸方向の極性に依存する感度差が発
生しないことが明らかである。(その他の実施形態について) なお、上記実施形態1、
2にかえて、図2に示した回路中のR1, R2及びC1, C2の
みを可変とし、その他を固定値とするようにしてもよ
い。
It is apparent that no sensitivity difference depending on the polarity in the detection axis direction occurs in this sensor circuit, as in the above embodiment. (Other Embodiments) In the first embodiment,
In place of 2, only R1, R2 and C1, C2 in the circuit shown in FIG. 2 may be made variable, and the others may be made fixed values.

【0012】また、上記実施形態1、2は一元的な物理
量を検出するためのセンサ回路であるが、必要に応じ
て、図2の回路を複数個用いて多元的に物理量を検出す
ることがこできる。
Although the first and second embodiments are sensor circuits for detecting a unitary physical quantity, if necessary, a plurality of circuits shown in FIG. I can do it.

【0013】さらに、センサ回路の具体的構成は図2に
限られるものではなく、同等の機能を発揮する回路であ
れば自由に採用できる。
Further, the specific configuration of the sensor circuit is not limited to that shown in FIG. 2, and any circuit that performs the same function can be used freely.

【0014】[0014]

【発明の効果】この発明は上記構成を有するものである
から以下の効果を奏する。
Since the present invention has the above configuration, the following effects are obtained.

【0015】発明の実施の形態段の欄の説明から明らか
なように、方向により感度差が発生しないセンサ回路を
提供できた。
As is clear from the description in the section of the embodiment of the invention, a sensor circuit in which a sensitivity difference does not occur depending on the direction can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施形態1の基本回路を示す図。FIG. 1 is a diagram showing a basic circuit according to a first embodiment of the present invention.

【図2】図1の基本回路をより具体化した場合のセンサ
回路図。
FIG. 2 is a sensor circuit diagram when the basic circuit of FIG. 1 is further embodied.

【図3】この発明の実施形態2の基本回路を示す図。FIG. 3 is a diagram showing a basic circuit according to a second embodiment of the present invention.

【図4】従来のセンサの基本回路の図。FIG. 4 is a diagram of a basic circuit of a conventional sensor.

【図5】図4の基本回路をより具体化した場合のセンサ
回路図。
FIG. 5 is a sensor circuit diagram when the basic circuit of FIG. 4 is further embodied.

【符号の説明】[Explanation of symbols]

C0 固定容量 C1 可変容量 C2 可変容量 R0 固定抵抗 R1 可変抵抗 R2 可変抵抗 U1 EX−OR論理回路 U2 EX−OR論理回路 U3 オペアンプ U4 オペアンプ C0 Fixed capacitance C1 Variable capacitance C2 Variable capacitance R0 Fixed resistance R1 Variable resistance R2 Variable resistance U1 EX-OR logic circuit U2 EX-OR logic circuit U3 Operational amplifier U4 Operational amplifier

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 比較の基準となる固定容量を設け、前記
固定容量と物理量に応じて容量が変化する一対の可変容
量とを比較して、その差を出力することを特徴とするセ
ンサ回路。
1. A sensor circuit comprising: a fixed capacitor serving as a reference for comparison; comparing the fixed capacitor with a pair of variable capacitors whose capacity changes according to a physical quantity; and outputting a difference therebetween.
【請求項2】 比較の基準となる固定抵抗を設け、前記
固定抵抗と物理量に応じて抵抗が変化する一対の可変抵
抗とを比較して、その差を出力することを特徴とするセ
ンサ回路。
2. A sensor circuit, comprising: a fixed resistor serving as a reference for comparison, comparing the fixed resistor with a pair of variable resistors whose resistance changes according to a physical quantity, and outputting a difference therebetween.
【請求項3】 比較の基準となる一定の時定数回路を設
け、前記一定の時定数回路と物理量に応じて時定数が変
化する一対の時定数回路とを比較して、その差を出力す
ることを特徴とするセンサ回路。
3. A constant time constant circuit serving as a reference for comparison is provided. The constant time constant circuit is compared with a pair of time constant circuits whose time constants change according to physical quantities, and the difference is output. A sensor circuit characterized by the above.
【請求項4】 可変容量又は可変抵抗を検出部とすると
共に半導体論理回路を比較器とし、前記比較器からの出
力をオペアンプで作動出力することを特徴とする請求項
1又は2記載のセンサ回路。
4. The sensor circuit according to claim 1, wherein a variable capacitance or a variable resistance is used as a detection unit, the semiconductor logic circuit is used as a comparator, and an output from the comparator is operated and output by an operational amplifier. .
【請求項5】 物理量に応じて時定数が変化する一対の
時定数回路が、可変容量と固定抵抗、固定容量と可変抵
抗、又は可変容量と可変抵抗により構成されており、前
記可変容量又は可変抵抗を検出部とすると共に半導体論
理回路を比較器とし、前記比較器からの出力をオペアン
プで作動出力することを特徴とする請求項3記載のセン
サ回路。
5. A pair of time constant circuits whose time constants change in accordance with a physical quantity are constituted by a variable capacitor and a fixed resistor, a fixed capacitor and a variable resistor, or a variable capacitor and a variable resistor. 4. The sensor circuit according to claim 3, wherein the resistance is used as a detection unit, the semiconductor logic circuit is used as a comparator, and an output from the comparator is operated and output by an operational amplifier.
JP23391898A 1998-08-20 1998-08-20 Sensor circuit Pending JP2000065595A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23391898A JP2000065595A (en) 1998-08-20 1998-08-20 Sensor circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23391898A JP2000065595A (en) 1998-08-20 1998-08-20 Sensor circuit

Publications (1)

Publication Number Publication Date
JP2000065595A true JP2000065595A (en) 2000-03-03

Family

ID=16962645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23391898A Pending JP2000065595A (en) 1998-08-20 1998-08-20 Sensor circuit

Country Status (1)

Country Link
JP (1) JP2000065595A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403730B (en) * 2010-12-22 2013-08-01 Inventec Corp Inspecting method for detecting by-pass capacitors
JP2017187294A (en) * 2016-04-01 2017-10-12 セイコーエプソン株式会社 Detection device, processing device, detection system, detection method, and program

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403730B (en) * 2010-12-22 2013-08-01 Inventec Corp Inspecting method for detecting by-pass capacitors
JP2017187294A (en) * 2016-04-01 2017-10-12 セイコーエプソン株式会社 Detection device, processing device, detection system, detection method, and program

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