JP2000065574A - Laser system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a laser surveying apparatus capable of forming a measuring reference line or a reference plane by laser beams, and in particular obtain the laser surveying apparatus capable of forming not only a horizontal reference line and the reference plane, but also a reference line or the reference plane which is inclined at a predetermined angle with respect to a horizontal surface. SOLUTION: A stand laying part 1010 is pivoted around a vertical axis, and a laser floodlighting part 1020 is pivoted around a horizontal axis, and laser beams are irradiated by a pivoting irradiation part in a direction parallel to the horizontal axis, and the laser beams are irradiated by a light source part 1100 in a direction perpendicular to the horizontal axis, and a first deflecting means provided in the laser floodlighting part deflects laser beams in a direction perpendicular to the horizontal axis, and a second deflecting means provided in the pivoting irradiation part deflects the laser beams from the first deflecting means in a perpendicular direction, and a reflecting means reflects the laser beams from a light source toward the first deflecting means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser surveying instrument capable of forming a measurement reference line or a reference plane by a laser beam, and more particularly to a laser surveying instrument for a horizontal plane as well as a horizontal reference line and a reference plane. The present invention relates to a laser surveying instrument capable of forming a reference line or a reference plane inclined at an angle.

[0002]

2. Description of the Related Art Conventionally, a tiltable rotary laser device has a structure in which a laser projection unit is supported by a gimbal or a spherical surface so that it can be tilted freely, or a laser device which rotates around a vertical axis and a horizontal axis. In some cases, the laser projection unit is supported so that the inclination can be set.

[0003] Here, based on FIG. 12, a description will be given of a structure in which a laser projection unit is supported by a spherical surface. The laser projecting unit 9100 is supported by a spherical surface, and is configured so that a laser beam is rotationally projected on a reference plane from a rotating projecting unit 9200 provided in the laser projecting unit 9100. Note that the rotating irradiation unit 9200 is driven by a motor 9250.

The laser projecting unit 9100 can be tilted in one or two directions by moving an arm 9300 (one direction not shown) extending in two orthogonal directions up and down by a vertical mechanism driven by a motor 9350. It is configured. The laser projector 9100 is leveled by two tilt sensors 9410 and 9420 formed on the main body. Then, the laser projecting unit 9100 is tilted and set in a predetermined direction after leveling.

[0005] This tilt setting is performed, for example, by directly driving the set tilt angle or by converting the outputs of the two tilt sensors 9410 and 9420 into the number of motor pulses and driving the motor 9350 based on the calculated angle. Can be set. Note that an appropriate tilt detector can be employed. If the laser projection unit 9100 is inclined in only one direction, an inclined surface in a predetermined direction is formed, and if the laser projection unit 9100 is inclined in two directions, a composite inclined surface can be formed.

[0006] Next, based on FIG.
A configuration in which 100 is supported on a vertical axis and a horizontal axis will be described. A mounting portion 9500 that rotates around a vertical axis;
Laser projection unit 910 that rotates around a horizontal axis on 500
0. This laser projector 9100
A rotation irradiation unit 9200 is provided on the upper side, and can rotate and irradiate a laser beam onto a reference plane. Then, similarly to the configuration in which the laser projection unit is supported by a spherical surface, the laser light is leveled by an appropriate leveling unit.

In a configuration in which the laser projecting unit 9100 is supported on a vertical axis and a horizontal axis, the support unit is rotated about the horizontal axis so that the rotation direction of the laser projecting unit 9100 matches the tilt direction. After the rotation of the support, the laser projector 9100 is rotated about a vertical axis to be tilted at a predetermined tilt angle, thereby performing tilt setting.

The composite inclined surface can be formed by calculating the direction and the inclination angle of the composite inclination from the inclination data in two directions, and inclining the composite inclination surface in the direction determined based on the operation result.

[0009]

However, the above conventional laser surveying instrument does not cause an error when the rotation axis of the inclination setting device rotates around an ideal arbitrary axis. In reality, there is a problem that a shaft play for smooth rotation is required, and a conversion of the angle of the shaft play results in a tilt error.

[0010] Accordingly, there has been a strong demand for a laser surveying instrument capable of reducing the tilt error due to the axial play and improving the tilt setting accuracy.

Further, the rotary laser device supported on a spherical surface has a simple basic structure for setting the inclination, so that the setting can be made with relatively high accuracy, but the set gradient has a structural limit. Therefore, there is a problem that it is not suitable for setting a high gradient.

In the rotary laser device supported on the vertical axis and the horizontal axis, it is relatively easy to set a high gradient. However, as described above, since many errors are accumulated in the rotary axis, a high level is required. There has been a problem that high machining accuracy is required and the cost is high.

[0013]

SUMMARY OF THE INVENTION The present invention has been devised in view of the above-mentioned problems, and has a supporting portion which rotates around a vertical axis, and which is supported by the supporting portion and rotates about a horizontal axis. A laser irradiator, and a rotating irradiator provided on the laser irradiator, for irradiating the laser light in a direction parallel to the horizontal axis,
A light source unit provided on the laser projection unit for irradiating the laser beam in a direction perpendicular to the horizontal axis; and a light source unit provided on the laser projection unit to deflect the laser beam in a direction perpendicular to the horizontal axis. Deflecting means, a second deflecting means provided in the rotating irradiation unit, for deflecting the laser light from the first deflecting means in a direction orthogonal to the first deflecting means, and a laser light from the light source. And reflecting means for reflecting the light toward the first deflecting means.

According to the present invention, there is further provided a mounting portion rotating around a vertical axis, a laser light emitting portion supported by the mounting portion and rotating around a horizontal axis, and provided on the laser light emitting portion. A rotary irradiation unit for irradiating laser light in a direction parallel to a horizontal axis, a light source unit provided on the laser projection unit for irradiating laser light in a direction intersecting with the horizontal axis, and the laser A first deflecting means provided in the light projecting section for deflecting the laser light in a direction orthogonal to the horizontal axis; and a first deflecting means provided in the rotating irradiation section for orthogonalizing the laser light from the first deflecting means. Second deflecting means for deflecting the laser light from the light source, reflecting means for reflecting the laser light from the light source, and deflecting the laser light from the reflecting means toward the first deflecting means. And third deflecting means. .

Further, in the present invention, an angular magnification reducing means is provided on an optical path between the first deflecting means and the second deflecting means.
Or the laser device according to 2.

The mounting portion of the present invention is provided with a first rotation angle detecting portion for detecting rotation about a vertical axis,
The laser projection unit may be provided with a second rotation angle detection unit for detecting rotation about a horizontal axis.

Further, the present invention irradiates a laser beam onto a tilt surface in a predetermined direction based on tilt setting data and angle detection between the first rotation angle detection unit and the second rotation angle detection unit. Alternatively, the configuration may be as follows.

Further, the first deflecting means of the present invention cancels the error θ ₁ in the XZ plane, and the angular magnification reducing means makes the error θ ₂ in the XY plane 1 / n. You can also.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention constructed as described above
The mounting part rotates around the vertical axis, the laser projection part supported by the mounting part rotates about the horizontal axis, and the rotation irradiation part provided on the laser projection part is parallel to the horizontal axis. Irradiate the laser beam in various directions, and the light source section provided in the laser
A laser beam is irradiated in a direction perpendicular to the horizontal axis, and a first deflecting unit provided in the laser projecting unit deflects the laser beam in a direction perpendicular to the horizontal axis, and a first deflecting unit provided in the rotating irradiation unit. The second deflecting means deflects the laser light from the first deflecting means in a direction orthogonal to the first deflecting means, and the reflecting means reflects the laser light from the light source toward the first deflecting means.

Further, according to the present invention, the mounting portion is rotated about a vertical axis, and the laser light projecting portion supported by the mounting portion is rotated about a horizontal axis so that the laser light is provided on the laser light emitting portion. The dynamic irradiation unit
A laser beam is radiated in a direction parallel to the horizontal axis, and a light source unit provided in the laser projection unit irradiates the laser beam in a direction crossing the horizontal axis, and a first deflection provided in the laser projection unit. Means for deflecting the laser light in a direction orthogonal to the horizontal axis, and a second deflecting means provided in the rotating irradiation unit,
The laser light from the first deflecting means is deflected in a direction orthogonal to the first deflecting means, the reflecting means reflects the laser light from the light source, and the third deflecting means directs the laser light from the reflecting means to the first deflecting means. To be deflected.

Further, according to the present invention, an angular magnification reducing means may be provided on the optical path between the first deflecting means and the second deflecting means.

The mounting portion of the present invention is provided with a first rotation angle detecting section for detecting rotation about a vertical axis, and the laser projecting section is provided with a first rotation angle detecting section for detecting rotation about a horizontal axis. A second rotation angle detector may be provided.

Further, according to the present invention, the inclination setting data and the first
It is also possible to irradiate the inclined surface in a predetermined direction with laser light based on the angle detection between the rotation angle detection unit and the second rotation angle detection unit.

Also, the first deflecting means of the present invention can cancel out the error θ ₁ in the XZ plane, and the angular magnification reducing means can make the error θ ₂ in the XY plane 1 / n.

[0025]

【Example】

An embodiment of the present invention will be described with reference to the drawings.

(Principle)

Here, the principle of the present invention will be described.

"Rotational backlash of tilt setting device"

First, the rotation shaft play will be described.

As shown in FIG. 4, the rotation axis 700
Is installed, and is rotatably fixed by the first bearing 710 and the second bearing 720.
Then, in a direction orthogonal to the rotation axis 700 (X axis),
A laser beam is irradiated, and the laser irradiation optical axis is defined as a Z axis.

As shown in FIG. 5, the tilt error of the optical system due to the play of the rotating shaft 700 is represented by an error θ ₁ in the XZ plane and a tilt error in FIG.
XY plane error θ ₂ shown in FIG.

As shown in FIG. 5, the error θ ₁ in the XZ plane is when the rotation axis 700 is rotated by an angle θ ₁ in the XZ plane about the origin. In this case, the irradiated laser light falls from the Z axis.

In the laser device, since the laser beam is emitted in a direction perpendicular to the Z axis, the inclination of the Z axis results in the inclination of the rotating projection surface. For example, a plane inclined from a horizontal plane is formed.

Next, as shown in FIG. 6, the error θ ₂ in the XY plane
Shows a case where the rotation axis 700 is rotated by an angle θ ₂ about the origin in the XY plane.

The axial play is usually determined by the error in the XZ plane θ ₁ and the XY
And an in-plane error θ _2.
To eliminate _one of the errors, errors in the XY plane within the error theta ₂ also needs to be removed. If the structure of correcting only XZ plane error theta ₁ is a slope of always rotating irradiation plane.

"Principle of correction"

(1) Correction of error θ ₁ in XZ plane

As shown in FIG. 7A, when the emission direction of the laser light source 600 and the optical axis of the angular magnification reduction means 620 are parallel when viewed from the X axis direction of the horizontal rotation axis, the laser light source The laser light from 600 is reflected by the right angle prism 940 on the Z axis. Due to the nature of the right-angle prism 940, the emitted light regardless of the XZ plane error theta ₁ is parallel to the reflected and incident light.

In the Y-axis direction, as shown in FIG. 7B, when the incident light and the reflected light are equally reflected in the same manner as a mirror, the light emitted from the right-angle prism 940 has a Z-axis inclination. The light is incident on the angular magnification reducing means 620 while being inclined by θ _{1 in a} direction opposite to a certain XZ plane error θ ₁ .

The angular magnification reducing means 620 calculates f ₁ : f ₂ = 2:
The lens is composed of an O lens and a Totsu lens which are 1. The incident light from the right-angle prism 940 is corrected so as to be inclined by 2 * θ ₁ * 1/2. As a result, the laser beam is directed in the vertical direction, offset by the angle θ ₁ .

(2) Correction of error θ ₂ in XY plane

As shown in FIG. 7B, when the emission direction of the laser light source 600 and the optical axis of the angular magnification reduction means 620 are parallel to each other when the horizontal rotation axis is viewed from the Y axis direction, the XY plane is used. The internal error θ ₂ is obtained from the laser light source 600 by the angular magnification reducing means 6.
The laser beam reflected on the optical axis 20 acts so as to be deviated parallel to the Z axis. Therefore, there is no substantial effect.

When there is an inclination between the emission direction of the laser light source 600 and the optical axis of the angular magnification reducing means 620, there is an influence of the error θ _{2 in} the XY plane. In this case, the angular magnification reducing means 620 is employed. By doing so, the error that affects it is 1 / n
(N is the angle reduction magnification).

[Example]

[First Embodiment]

The laser device 10000 of the first embodiment
As shown in FIG. 1, a laser device main body 1001 capable of setting an inclination in a predetermined direction, and an automatic leveling unit 20 for horizontally mounting the laser device main body 1001.
00. Laser device body 1001
Is connected to the automatic leveling unit 2000 and is rotatably mounted in the horizontal direction.

The laser device body 1001 includes a light source section 1100, an objective lens 1200, and a reflection member 1336.
An angular magnification reduction unit 1400, a rotation irradiation unit 1500,
Inclination sensor 1600 and first rotation angle detector 1700
And a second rotation angle detection unit 1800.

A laser beam is incident on a reflecting member 1337 from a light source unit 1100 formed obliquely upward, and the laser beam incident on the reflecting member 1336 is reflected vertically upward. .

The reflecting member 1336 is arranged so as to be inclined so that the reflected laser beam is vertically upward.

[0050] Above vertically, the angular magnification reduction unit 140 is provided.
0 is arranged. Angular magnification reduction unit 14 of the first embodiment
00 is f ₁ : f ₂ = 2: 1.

As shown in FIG. 1, the laser apparatus main body 1001 has a support portion 1010 for rotating around a vertical axis and directing it in an inclined direction, and a horizontal portion on the support portion 1010, which intersects the vertical axis. And a laser projecting unit 1020 for setting an inclination by rotating around an axis.

The mounting portion 1010 is configured to be rotatable by a mounting portion driving means 8100 including appropriate rotating means such as a motor.

Further, the laser projector 1020 is also configured to be rotatable by a laser projector driving unit 8200 composed of appropriate rotating means such as a motor.

The laser device main body 1000 includes a light source 1100, an objective lens 1200, and a reflection member 1336.
An angular magnification reduction unit 1400, a rotation irradiation unit 1500,
Inclination sensor 1600 and first rotation angle detector 1700
And a second rotation angle detection unit 1800.

The light source section 1100 is a laser light source. In this embodiment, a semiconductor laser is employed. However, any element can be used as long as it can emit laser light.

The objective lens 1200 converts the laser beam from the light source unit 1100 into a parallel light beam. In this embodiment, the laser device is configured to irradiate the laser beam obliquely downward from the vertical direction of the laser device main body 1000.

The laser device main body 1001 is configured to be rotatable about the emission direction of laser light from the light source unit 1100 as a central axis. Therefore, the laser device main body 1001 is rotatably mounted in a plane orthogonal to the horizontal direction.

A laser beam is incident on a reflecting member 1336 from a light source unit 1100 formed obliquely upward, and the laser beam incident on the reflecting member 1336 is reflected vertically upward. .

The angular magnification reduction section 1400 of the first embodiment is
Since f ₁ : f ₂ = 2: 1, the error θ ₁ in the XZ plane can be canceled and the error θ ₂ in the XY plane can be reduced to １ ／.

The rotation irradiating section 1500 is provided with the laser projecting section 1
020, for rotating and irradiating a laser beam on a reference plane set at an inclination. A pentaprism 1510 is fixed to the rotating irradiation unit 1500, and is configured to be rotatable by a rotating irradiation unit driving unit 8300. Reflecting member 1336 as laser beam deflector
The laser light vertically reflected by the laser beam passes through the angular magnification reduction unit 1400, and then enters the pentaprism 1510.

The laser beam incident on the pentaprism 1510 is deflected by 90 degrees, and
0, and the rotary head 1
It is configured to be irradiated in a horizontal direction with the rotation of 500. Therefore, a laser reference plane can be formed by irradiating the laser light within the reference plane.

The pentaprism 1510 corresponds to the second deflecting means.

The tilt sensor 1600 includes a first tilt sensor 1610 and a second tilt sensor 1620, and can detect the tilt of the laser device main body 1000. As the tilt sensor 1600, any sensor that can detect a tilt can be used. In this embodiment, a bubble tube is employed,
First tilt sensor 1610 and second tilt sensor 1620
Thereby, the inclination of the laser device main body 1000 with respect to the horizontal can be detected.

As the inclination sensor 1600 for detecting the inclination, for example, a sensor using a bubble tube as shown in FIG. 2 can be used. This sensor has two electrodes 1651 and 1652 on the upper surface of the bubble tube 1650 and an electrode 1653 on the lower surface,
The bubble 1650a moves according to the inclination of the bubble tube, and the electrode 1
651 and the electrode 1653 and between the electrode 1652 and the electrode 165
The inclination θ of the bubble tube 1650 is obtained by converting the change into the change of the capacitances C ₁ and C ₂ between the three and detecting the change.

The first rotation angle detection unit 1700 is
010 is for detecting the rotation angle around the vertical axis (horizontal direction) and setting the tilt direction. In the present embodiment, a rotor 1710 is attached to the support portion 1010, and a stator 1720 is arranged at a position facing the rotor 1710, and the rotation angle between the rotor 1710 and the stator 1720 is detected. ing. The first rotation angle detection unit 1700 can use any sensor as long as it can detect the horizontal rotation angle of the support unit 1010.

The second rotation angle detector 1800 is provided in the laser projector 1020 and detects a rotation angle about a horizontal axis. In this embodiment, the rotor 181 is used.
0 is attached to the laser projector 1020,
The stator 182 is located at a position facing the rotor 1810.
0 is arranged to detect the rotation angle between the rotor 1810 and the stator 1820. The second rotation angle detection unit 1800 can detect the rotation angle of the laser projection unit 1020 around the horizontal axis,
Either sensor can be used.

Next, the electrical configuration of this embodiment will be described with reference to FIG.

In this embodiment, the mounting portion driving means 8100
A mounting part driving circuit 8110 for controlling and driving the mounting part driving means 8100, and a laser light emitting part driving means 820
0, a laser light emitting unit driving circuit 8210 for driving the laser light emitting unit driving means 8200, a rotating light emitting unit driving means 8300, and the rotating light emitting unit driving means 8300
A rotating irradiation unit driving circuit 8310 for driving the
Rotation angle detection unit 1700 and the first rotation angle detection unit 1
A first signal processing circuit 1730 for processing the signal from the second rotation angle detection unit 700, a second rotation angle detection unit 1800,
, A second signal processing circuit 1830 for processing a signal from the rotation angle detecting unit 1800, a control unit 6000, a setting unit 8500, and an automatic leveling unit 2000.

Based on the detection signals of the first rotation angle detection unit 1700 and the second rotation angle detection unit 1800, the control unit 600
0 calculates a driving amount for creating a laser reference plane in a predetermined direction, and mounts the mounting portion via a mounting portion driving circuit 8110, a laser projecting portion driving circuit 8210, and a rotating irradiation portion driving circuit 8310. It is configured to drive a driving unit 8100, a laser projection unit driving unit 8200, and a rotating irradiation unit driving unit 8300.

The setting means 8500 sets data for obtaining a predetermined laser reference plane. For example, if the setting unit 8500 sets a composite inclination in two directions, the control unit 6000 performs an operation based on the setting data to form a predetermined laser reference plane.

The setting means 8500 corresponds to the reference data setting means.

Further, the rotary irradiation unit driving means 8300 is
The drive unit 8100 corresponds to the second driving unit, and the driving unit 8200 corresponds to the third driving unit.

The automatic leveling unit 2000 controls the control means 6000 based on the data of the first tilt sensor 1610 and the second tilt sensor 1620 so that the center of rotation of the support unit 1010 coincides with the vertical direction. Is what you do. Details will be described below.

The laser device main body 1 configured as described above
Reference numeral 000 is used to scan a laser beam in a horizontal or inclined direction, and can perform leveling, tilting, and the like. That is, a laser beam scanned in a horizontal plane is detected on the object to be measured, and leveling or the like is performed based on the reaching height, or the laser beam can be viewed in the tilt direction to set the tilt.

The automatic leveling unit 2000 includes a leveling table 2100 and a bottom plate 2200.
It is supported by the leveling screws 2300, 2300, and 2300 to be vertically movable.

Next, the electric system of the automatic leveling unit 2000 will be described with reference to FIG.
10, the second tilt sensor 1620, and the control means 600
0, the first motor driving means 7100, the second motor driving means 7200, and the third motor driving means 7300
, A first motor 4310 and a second motor 4320
And a third motor 4330.

The first tilt sensor 1610 and the second tilt sensor 1620 are set so as to detect the tilt in two orthogonal directions, and detect the tilt of the laser device main body 1000.

The rotation center of the support portion is set vertically by the detection of the second tilt sensor 1620 and the first tilt sensor 1610.

The control means 6000 controls the first tilt sensor 1
The displacement amount of the leveling screws 2300, 2300, and 2300 required to set the leveling table 2100 on the reference plane is calculated based on the output signals of the leveling table 610 and the second tilt sensor 1620. That is, the first tilt sensor 1610 and the second
The three leveling screws 2300, 2300, and 2300 such that the inclination angles detected by the
300 are calculated.

The control means 6000 outputs a control signal corresponding to the amount of movement of each leveling screw 2300, 2300, 2300 to the corresponding first, second, and third motor drive means 710.
0, 7200, 7300. The first, second, and third motor driving units 7100, 7200, and 7300 supply electric power for rotating the motors 4310, 4320, and 4330 based on a control signal from the control unit 6000 via a connector (not shown). Is to be generated.

The motors 4310, 4320, 4330
Leveling screws 2300, 2300, 230 using electric power supplied from motor driving means 7100, 7200, 7300
0 is rotated to correct the inclination of the leveling table 2100. Then, the first tilt sensor 1610 and the second tilt sensor 16
20 detects the inclination of the leveling table 2100 again and performs feedback control, thereby detecting the laser apparatus main body 100.
The vertical axis of 0 can be accurately leveled vertically (set on the reference plane). It should be noted that leveling is possible even if the configuration is such that only two arbitrary leveling screws are driven.

In this embodiment configured as described above, since the automatic leveling unit 2000 is employed, the leveling screws 230, 230, 230 are manually operated while the observer visually recognizes the flat level. Leveling of the vertical axis of the laser device main body 1000 can be automatically performed without operation.

Then, the laser device main body 1000 is XZ
In a plane, even if the rotation angle theta _1, the angular magnification reducer 1400, and the reflective member 1336, can be tilted angle theta _1, it can be corrected by consequently the angle theta cancel ₁ minute.

Further, the laser device main body 1000 is
In a plane, even if the rotation by theta _2, it is possible to reduce the influence of the XY plane within the error theta _2.

As described above, the laser apparatus main body 1000 of the first embodiment automatically levels the vertical axis by the automatic leveling unit 2000 and corrects even if an error of θ ₂ occurs in the XY plane. be able to.

[Second Embodiment]

The laser device 20000 of the second embodiment
As shown in FIG. 8, a laser device main body 1002 capable of setting an inclination in a predetermined direction, and an automatic leveling unit 20 for mounting the laser device main body 1002 horizontally.
00. Laser device main body 1002
Is connected to the automatic leveling unit 2000 and is rotatably mounted in the horizontal direction.

The laser device main body 1002 includes a light source section 1100, an objective lens 1200, and a reflecting member 1336.
Anamorphic prism 1337, angular magnification reduction unit 1400, rotation irradiation unit 1500, tilt sensor 160
0, a first rotation angle detection unit 1700, and a second rotation angle detection unit 1800.

A laser beam is incident on a reflecting member 1336 from a light source unit 1100 formed diagonally above, and the laser beam incident on the reflecting member 1336 is reflected at an appropriate reflection angle. ing.

The laser light reflected by the reflecting member 1336 is incident on the anamorphic prism 1337, and the transmitted and refracted laser light is emitted vertically upward.

The laser light of the laser element serving as the laser light source has an elliptical shape, and the anamorphic prism 1
By passing through 337, it can be corrected to a substantially circular shape.

[0092] Above vertically, the angular magnification reduction section 140 is provided.
0 is arranged. Angular magnification reduction unit 14 of the second embodiment
00 is f ₁ : f ₂ = 2: 1, and corrects the error θ ₁ in the XZ plane.

The other configurations, effects, operations, and the like of the second embodiment are the same as those of the first embodiment, and therefore, description thereof will be omitted.

[Third Embodiment]

The laser device 30000 of the third embodiment
As shown in FIG. 9, a laser device main body 1003 capable of setting an inclination in a predetermined direction, and an automatic leveling section 20 for mounting the laser device main body 1003 horizontally.
00. Laser device body 1003
Is connected to the automatic leveling unit 2000 and is rotatably mounted in the horizontal direction.

The laser device main body 1003 includes a light source section 1100, an objective lens 1200, and a reflecting member 1336.
A mirror member 1338, an angular magnification reduction unit 1400,
Rotation irradiation unit 1500, tilt sensor 1600, first rotation angle detection unit 1700, and second rotation angle detection unit 1800
And are provided.

A laser beam is incident on the reflecting member 1336 from the light source unit 1100 formed obliquely upward, and the laser beam incident on the reflecting member 1336 is reflected upward at an appropriate angle. Have been.

The laser light emitted from the reflection member 1336 enters the mirror member 1338 and is reflected by the mirror member 133.
The laser light reflected by 8 is configured to be directed vertically upward.

Therefore, the laser beam reflected by the mirror member 1338 is directed vertically upward so that the mirror member 13
38 is inclined.

[0100] Above vertically, the angular magnification reduction unit 140 is provided.
0 is arranged. Angular magnification reduction unit 14 of the third embodiment
00 is f ₁ : f ₂ = 2: 1, so that the error θ ₁ in the XZ plane can be offset.

The other configurations, effects, operations, and the like of the third embodiment are the same as those of the first to third embodiments, and thus description thereof is omitted.

"Fourth Embodiment"

The laser apparatus 40000 of the fourth embodiment
As shown in FIGS. 10A and 10B, a laser device main body 10 capable of setting an inclination in a predetermined direction.
04 and an automatic leveling unit 2000 for mounting the laser device main body 1004 horizontally. The laser device main body 1004 is connected to the automatic leveling unit 2000, and is mounted to be rotatable in the horizontal direction.

The laser device main body 1004 includes a light source section 1100, an objective lens 1200, and a right-angle mirror 133.
5, an angular magnification reduction unit 1400, and a rotation irradiation unit 1500
, An inclination sensor 1600, and a first rotation angle detection unit 170
0, and a second rotation angle detection unit 1800.

Laser light is incident on the right-angle mirror 1335 from the light source unit 1100 formed above, and the laser light incident on the right-angle mirror 1335 is deflected by 90 degrees in the right-angle mirror 1335 and reflected. Further, the light is further deflected by 90 degrees and reflected upward, so that the incident light and the reflected light become parallel around the horizontal axis.

The angular magnification reduction section 140 is located vertically above.
0 is arranged. Angular magnification reduction unit 14 of the fourth embodiment
00 is f ₁ : f ₂ = 2: 1, and cancels the error θ ₁ in the XZ plane.

Note that the right angle mirror 13 is
Since the optical path leading to 35 and the optical path leading from the right-angle mirror 1335 to the angular magnification reduction unit 1400 are made parallel, the error θ ₂ in the XY plane shifts the laser light parallel to the Z axis. Because of the parallel displacement, the error in the XY plane θ ₂
Has been corrected and has no substantial effect.

[0108] Other configurations, effects, operations, and the like of the fourth embodiment are the same as those of the first to third embodiments, and thus description thereof is omitted.

[Modification]

As shown in FIGS. 11A and 11B, a laser device 50000 according to this modification has a laser device main body 1005 capable of setting an inclination in a predetermined direction.
And an automatic leveling unit 2000 for mounting the laser apparatus main body 1005 horizontally. The laser device main body 1000 is connected to the automatic leveling unit 2000, and is mounted to be rotatable in the horizontal direction.

As shown in FIG. 11, the main body 1005 of the laser apparatus is provided with a supporting portion 1010 for turning around a vertical axis and pointing in an inclined direction, and a horizontal portion on the supporting portion 1010, which And a laser projecting unit 1020 for setting an inclination by rotating around an axis.

The mounting portion 1010 is configured to be rotatable by mounting portion driving means 8100 including appropriate rotating means such as a motor.

The laser projector 1020 is also configured to be rotatable by a laser projector driving unit 8200 composed of appropriate rotating means such as a motor.

The laser device main body 1005 includes a light source section 1100, an objective lens 1200, and a right-angle mirror 133.
5, an angular magnification reduction unit 1400, and a rotation irradiation unit 1500
, An inclination sensor 1600, and a first rotation angle detection unit 170
0, and a second rotation angle detection unit 1800.

The light source section 1100 is a laser light source. In this embodiment, a semiconductor laser is used. However, any element can be used as long as it can emit laser light.

The objective lens 1200 is for converting the laser beam from the light source unit 1100 into a parallel beam. In the present embodiment, the laser device is configured to irradiate the laser beam obliquely downward from the vertical direction of the laser device main body 1005.

The laser device main body 1005 is configured to be rotatable about the emission direction of the laser light from the light source unit 1100 as a central axis. Therefore, the laser device main body 1000 is rotatably mounted in a plane orthogonal to the horizontal direction.

The right angle mirror 1335 corresponds to a laser correction unit, and employs a right angle prism 1330.

Laser light is incident on the right-angle mirror 1335 from the light source unit 1100 formed obliquely upward, and the laser light incident on the right-angle mirror 1335 is reflected vertically upward. .

That is, the right-angle mirror 1335 is
00 is reflected vertically above the laser device main body 1000, and the laser light is reflected vertically above the laser device main body 1000.
_{This is} for correcting ₁ . This XZ plane error θ ₁
Is corrected by the above-described “Principle (XY
Are those described in the in-plane error theta ₁ correction) ", XZ
Even when rotated by an angle θ ₁ in a plane, the right-angle mirror 1335 and the angle reduction unit 1400 can tilt the angle θ ₁ , and as a result, the angle θ ₁ can be offset and corrected.

The right angle mirror 1335 corresponds to the first deflecting means together with the laser correction unit.

The angular magnification reduction section 1400 of this modification is
f ₁ : f ₂ = 2: 1.

In this modified example configured as described above, since the automatic leveling unit 2000 is employed, the leveling screws 230, 230, 230 are manually adjusted while the observer visually recognizes the flat level. The leveling of the vertical axis of the laser device main body 1005 can be automatically performed without operation.

The laser apparatus main body 1005 is an XZ
In a plane, even if the rotation angle theta _1, can be tilted angle theta ₁ by quadrature mirror 1335 is laser light polarization angle unit, it can be corrected by consequently the angle theta cancel ₁ minute.

Further, the laser device main body 1005 is XY
In a plane, even if the rotation by theta _2, by the laser light source 600 is provided in parallel to the horizontal axis, it can be corrected XY plane error theta _2.

As described above, the laser device main body 1 of this modification is
005, the vertical axis is automatically leveled by the automatic leveling unit 2000, and even if an error of the angle θ ₁ occurs in the XZ plane, the error is offset, and even if an error of θ ₂ occurs in the XY plane, correction is performed. be able to.

[0127]

According to the present invention having the above-described structure, a mounting portion that rotates about a vertical axis, a laser light emitting portion that is supported by the mounting portion and that rotates about a horizontal axis, A rotating irradiation unit for irradiating the laser beam in a direction parallel to the horizontal axis, provided in the light unit, and provided in the laser projection unit;
A light source unit for irradiating the laser beam in a direction orthogonal to the horizontal axis; and a first light source unit provided in the laser projection unit for deflecting the laser beam in a direction orthogonal to the horizontal axis.
Deflecting means, a second deflecting means provided in the rotating irradiation unit, for deflecting the laser light from the first deflecting means in a direction orthogonal to the first deflecting means, Since it is composed of reflecting means for reflecting toward the deflecting means, it is possible to set a high gradient even with a rotating laser device of a type supported by a spherical surface, and a type of a type supported on a vertical axis and a horizontal axis. Even with a rotating laser device, there is an excellent effect that a high-precision laser device can be provided at low cost without accumulating many errors on the rotating shaft.

[0128]

[Brief description of the drawings]

FIG. 1 shows a laser apparatus 100 according to a first embodiment of the present invention.
FIG.

FIG. 2 is a diagram illustrating an inclination sensor 1600.

FIG. 3A is a diagram illustrating an electrical configuration of the present embodiment.

3A is a diagram illustrating an electric system of an automatic leveling unit 2000. FIG.

FIG. 4 is a diagram illustrating a rotational shaft play of the inclination setting device.

FIG. 5 is a diagram illustrating an error θ ₁ in the XZ plane.

FIG. 6 is a diagram for explaining an error θ ₂ in the XY plane.

FIG. 7A is a diagram illustrating correction of an error θ _{1 in} the XZ plane.

FIG. 7B is a diagram illustrating correction of an error θ _{1 in} the XZ plane.

FIG. 8 shows a laser apparatus 100 according to a second embodiment of the present invention.
FIG.

FIG. 9 shows a laser apparatus 100 according to a third embodiment of the present invention.
FIG.

FIG. 10A is a diagram illustrating a laser device 1004 according to a fourth embodiment of the present invention.

FIG. 10 (b) is a diagram illustrating a laser device 1004 according to a fourth embodiment of the present invention.

FIG. 11 (a) is a laser device 1 according to a modification of the present invention.
FIG. 9 is a diagram for explaining 005.

FIG. 11 (b) is a laser device 1 according to a modification of the present invention.
FIG. 9 is a diagram for explaining 005.

FIG. 12 is a diagram illustrating a conventional technique.

FIG. 13 is a diagram illustrating a conventional technique.

[Explanation of symbols]

 10,000 Laser device of first embodiment 20000 Laser device of second embodiment 30000 Laser device of third embodiment 40000 Laser device of fourth embodiment 50000 Laser device of modified example 1001 Laser device body of first embodiment 1002 Second Laser device main body of the embodiment 1003 Laser device main body of the third embodiment 1004 Laser device main body of the fourth embodiment 1005 Laser device main body of a modified example 1010 Mounting portion 1020 Laser projecting portion 1100 Light source portion 1200 Objective lens 1300 Laser light polarization Corner part 1310 Polarized beam splitter 1320 Quarter wave plate 1330 Right angle prism 1336 Reflecting member 1337 Anamorphic prism 1338 Mirror member 1400 Angular magnification reduction unit 1500 Rotating head 1510 Penta prism 1600 Tilt sensor 1610 First tilt sensor 1620 Second tilt sensor 1700 First rotation angle detector 1710 Rotor 1720 Stator 1730 First signal processing circuit 1800 Second rotation angle detector 1810 Rotor 1820 Stator 1830 Second signal Processing circuit 2000 Automatic leveling unit 2100 Leveling table 2300 Leveling screw 4000 Driving means 6000 Control means 8100 Standing part driving means 8110 Standing part driving circuit 8200 Laser light emitting part driving means 8210 Laser light emitting part driving circuit 8300 Rotational irradiation Unit driving unit 8310 rotation irradiation unit driving circuit 8500 setting unit

Claims (6)

[Claims] 1. A mounting portion that rotates about a vertical axis, a laser light projecting portion that is supported by the mounting portion and that rotates about a horizontal axis, A rotary irradiator for irradiating the laser beam in a parallel direction, a light source unit provided on the laser projector for irradiating the laser beam in a direction orthogonal to the horizontal axis, and the laser projector A first deflecting means for deflecting the laser light in a direction orthogonal to the horizontal axis; and A laser device comprising: a second deflecting unit for deflecting; and a reflecting unit for reflecting the laser beam from the light source toward the first deflecting unit. 2. A mounting portion that rotates about a vertical axis, a laser light projecting portion that is supported by the mounting portion and that rotates about a horizontal axis, A rotary irradiator for irradiating the laser beam in a parallel direction, a light source unit provided on the laser projector for irradiating the laser beam in a direction intersecting the horizontal axis, and the laser projector. A first deflecting means for deflecting the laser light in a direction orthogonal to the horizontal axis; and A second deflecting unit for deflecting, a reflecting unit for reflecting the laser beam from the light source, and a third unit for deflecting the laser beam from the reflecting unit toward the first deflecting unit. A laser device comprising deflection means. 3. The laser apparatus according to claim 1, further comprising an angular magnification reducing unit on an optical path between the first deflecting unit and the second deflecting unit. 4. A gantry section is provided with a first rotation angle detection section for detecting rotation about a vertical axis, and the laser projection section detects rotation about a horizontal axis. The laser device according to any one of claims 1 to 3, further comprising a second rotation angle detection unit for detecting the rotation angle. 5. A laser beam is applied to an inclined surface in a predetermined direction on the basis of inclination setting data, and angle detection between the first rotation angle detection unit and the second rotation angle detection unit. A laser device according to any one of claims 1 to 4. 6. The apparatus according to claim 1, wherein the first deflecting means includes an error in the XZ plane θ _1.
Has become a way to offset the, angular magnification reducing means, any which is one laser system of claims 1 to 5, wherein the XY plane error theta ₂ and 1 / n.