JP2000062136A - Method for printing metallic paste - Google Patents

Method for printing metallic paste

Info

Publication number
JP2000062136A
JP2000062136A JP10235300A JP23530098A JP2000062136A JP 2000062136 A JP2000062136 A JP 2000062136A JP 10235300 A JP10235300 A JP 10235300A JP 23530098 A JP23530098 A JP 23530098A JP 2000062136 A JP2000062136 A JP 2000062136A
Authority
JP
Japan
Prior art keywords
metal paste
recess
recessed part
printing
metallic paste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10235300A
Other languages
Japanese (ja)
Inventor
Ken Maeda
憲 前田
Tadahiko Sakai
忠彦 境
Seiji Sakami
省二 酒見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10235300A priority Critical patent/JP2000062136A/en
Publication of JP2000062136A publication Critical patent/JP2000062136A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To enable a metallic paste to be smoothly supplied into a recessed part and prevent a joint failure from occurring. SOLUTION: In a metallic paste printing method by which a metallic paste 6 is printed on an electrode 2 formed at the bottom of a recessed part 3 through a stencil mask 4, the stencil mask 4 with a smaller opening size than the opening size D of the recessed part 3, is used when the recessed part 3 is a recessed part whose ratio obtained by dividing the depth (t) of the recessed part 3 by an opening size D is a depth aspect ratio exceeding 0.2. Consequently a deaeration passageway for an air remaining in the recessed part 3 during printing the metallic paste 6 is secured without the edge part 1E part of the recessed part 3 being hermetically sealed by the metallic paste 6 and therefore an unfilled part to be caused by a residual air in the recessed part 3 is not generated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、ワークに設けられ
た凹部内の電極に金属ペーストを印刷する金属ペースト
の印刷方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal paste printing method for printing a metal paste on an electrode in a recess provided in a work.

【0002】[0002]

【従来の技術】電子部品の接合に用いられるクリーム半
田等の金属ペーストを電極に塗布する方法として、印刷
による方法が知られている。この方法は、印刷対象部位
である電極に対応した開口が設けられたステンシルマス
クを被印刷物上に装着し、ステンシルマスク上に金属ペ
ーストを供給した後に、ステンシルマスク上でスキージ
を摺動させることによって金属ペーストを開口を介して
刷り込むものであり、印刷対象部位のみに定量の金属ペ
ーストを供給できるという特徴がある。
2. Description of the Related Art A printing method is known as a method for applying a metal paste such as cream solder used for joining electronic parts to electrodes. This method, by mounting a stencil mask provided with an opening corresponding to the electrode that is the printing target site on the printing object, after supplying the metal paste on the stencil mask, by sliding the squeegee on the stencil mask Since the metal paste is imprinted through the openings, it is characterized in that a fixed amount of metal paste can be supplied only to the printing target portion.

【0003】[0003]

【発明が解決しようとする課題】ところで、金属ペース
トが印刷される対象部位の形状は種々であり、基板など
のワークに設けられた凹部の底に形成された電極が対象
とされる場合がある。このような場合、特に凹部の深さ
が開口寸法に比べて深い深アスペクト比の凹部の場合に
は、金属ペーストを凹部内に完全に充填することが困難
で、内部に金属ペーストが未充填の隙間を生じやすい。
この現象は、金属ペーストをスキージによって刷り込む
際に、金属ペーストが凹部の開口部を完全に塞ぐ形で刷
り込みが行われるため、凹部の底部にある空気が開口か
ら抜け出すことができないまま凹部内に残留することに
より発生するものである。そして、このような未充填の
隙間を残したまま半田接合が行われると、この隙間によ
り凹部上に搭載される半田と凹部の電極との接合が阻害
され、接合不良を生じやすいという問題点があった。
By the way, the shape of the target portion on which the metal paste is printed is various, and the electrode formed on the bottom of the recess provided in the work such as the substrate may be the target. . In such a case, especially in the case of a recess having a deep aspect ratio in which the depth of the recess is deeper than the opening size, it is difficult to completely fill the metal paste into the recess, and the inside of the metal paste is not filled. Easy to create gaps.
This phenomenon occurs when the metal paste is imprinted with a squeegee so that the metal paste completely imprints the opening of the recess, so that the air at the bottom of the recess does not escape from the opening and enters the recess. It is caused by remaining. If solder joining is performed while leaving such an unfilled gap, the gap hinders the joining between the solder mounted on the recess and the electrode of the recess, and a problem that a joint failure easily occurs. there were.

【0004】そこで本発明は、凹部内に良好に金属ペー
ストを供給でき、接合不良を防止することができる金属
ペーストの印刷方法を提供することを目的とする。
Therefore, an object of the present invention is to provide a method for printing a metal paste which can supply the metal paste satisfactorily into the recesses and prevent defective bonding.

【0005】[0005]

【課題を解決するための手段】請求項1記載の金属ペー
ストの印刷方法は、ワークの凹部の底に形成された電極
上にステンシルマスクを介して金属ペーストを印刷する
金属ペーストの印刷方法であって、前記凹部の深さを開
口寸法で除して得られる比率が所定比率を越える場合
に、前記凹部の開口寸法よりも小さい開口寸法を有する
ステンシルマスクを用いるようにした。
A method of printing a metal paste according to a first aspect of the present invention is a method of printing a metal paste in which a metal paste is printed on an electrode formed on the bottom of a recess of a work through a stencil mask. Then, when the ratio obtained by dividing the depth of the recess by the opening size exceeds a predetermined ratio, a stencil mask having an opening size smaller than the opening size of the recess is used.

【0006】請求項2記載の金属ペーストの印刷方法
は、請求項1記載の金属ペーストの印刷方法であって、
前記所定比率は0.2である。
A method for printing a metal paste according to a second aspect is the method for printing a metal paste according to the first aspect,
The predetermined ratio is 0.2.

【0007】各請求項記載の発明によれば、凹部の開口
寸法よりも小さい開口寸法を有するステンシルマスクを
用いることにより、金属ペースト印刷時の凹部内の脱気
経路が確保され、凹部内に空気が残留することによる未
充填部が発生しない。
According to the invention described in each claim, by using the stencil mask having the opening size smaller than the opening size of the recess, the degassing route in the recess at the time of printing the metal paste is secured, and the air in the recess is secured. There is no unfilled portion due to the remaining.

【0008】[0008]

【発明の実施の形態】次に本発明の実施の形態を図面を
参照して説明する。図1(a),(b),(c),
(d),(e)、図2(a),(b),(c),(d)
は本発明の一実施の形態の半田バンプ形成方法の工程説
明図である。図1(a)において、ワークとしての基板
1には凹部3が設けられており、凹部3の底には電極2
が形成されている。ここで、凹部3の深さtを凹部3の
開口寸法Dで除して得られる比率t/Dは0.2より大
きく、径に対する深さが大きい深アスペクト比形状の凹
部となっている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings. 1 (a), (b), (c),
(D), (e), FIG. 2 (a), (b), (c), (d)
FIG. 4 is a process explanatory diagram of a solder bump forming method according to an embodiment of the present invention. In FIG. 1A, a substrate 1 as a work is provided with a recessed portion 3, and an electrode 2 is provided on the bottom of the recessed portion 3.
Are formed. Here, the ratio t / D obtained by dividing the depth t of the concave portion 3 by the opening dimension D of the concave portion 3 is larger than 0.2, and the concave portion has a deep aspect ratio shape having a large depth with respect to the diameter.

【0009】次に、この基板1の表面に、凹部3内に金
属ペーストを印刷するためのステンシルマスク4が装着
される。金属ペーストはフラックス成分中に導電粒子を
含有させたものである。図1(b)に示すように、ステ
ンシルマスク4には凹部3に対応した位置に開口4aが
設けられており、開口4aの寸法dは凹部3の開口寸法
Dよりも小さく設定されている。本実施の形態では、寸
法dは凹部3の開口寸法Dの70〜90%の範囲に設定
されている。
Next, a stencil mask 4 for printing a metal paste in the recess 3 is mounted on the surface of the substrate 1. The metal paste is a flux component containing conductive particles. As shown in FIG. 1B, the stencil mask 4 is provided with an opening 4 a at a position corresponding to the recess 3, and the dimension d of the opening 4 a is set smaller than the opening dimension D of the recess 3. In the present embodiment, the dimension d is set in the range of 70 to 90% of the opening dimension D of the recess 3.

【0010】図1(b)に示すように、ステンシルマス
ク4上には金属ペースト6が供給され、スキージ5をス
テンシルマスク4上で摺動させることにより、金属ペー
スト6は凹部3内に開口4aを介して印刷される。以
下、この印刷過程での金属ペースト6の挙動について説
明する。スキージ5を右方向に徐々に摺動させると、金
属ペースト6はステンシルマスク4上で掻き寄せられ、
図1(c)に示すようにステンシルマスクの開口4a上
に到達する。
As shown in FIG. 1B, the metal paste 6 is supplied onto the stencil mask 4, and the squeegee 5 is slid on the stencil mask 4, so that the metal paste 6 is opened in the concave portion 3 a 4 a. Is printed through. The behavior of the metal paste 6 during this printing process will be described below. When the squeegee 5 is gradually slid to the right, the metal paste 6 is scraped on the stencil mask 4,
As shown in FIG. 1C, the stencil mask reaches the opening 4a.

【0011】このとき、金属ペースト6は高粘度のペー
スト状物質であるため開口4a上に到達しても直ちに垂
直下方に向って垂下せず、矢印aに示すようにスキージ
5の進行方向への速度成分を有した状態で凹部3内に浸
入する。すなわち、金属ペースト6は凹部3内に均等に
充填されず、凹部3の内部の、スキージ5の進行方向と
反対の側に空隙部3aを残した形で金属ペースト6の充
填が進行する。
At this time, since the metal paste 6 is a highly viscous paste-like substance, it does not immediately droop vertically downward even when it reaches the opening 4a, and the squeegee 5 moves in the traveling direction as shown by the arrow a. It penetrates into the concave portion 3 with a velocity component. That is, the metal paste 6 is not evenly filled in the recesses 3, but the filling of the metal paste 6 progresses in the form of leaving the voids 3a inside the recesses 3 on the side opposite to the advancing direction of the squeegee 5.

【0012】この空隙部3a内に残留した空気は、ステ
ンシルマスク4と基板1との間の隙間から外部に押し出
されるが、上述のようにステンシルマスク4の開口寸法
dは凹部3の開口寸法Dよりも小さいため、図1(c)
に示す凹部3のエッジ部1Eは金属ペースト6とは接触
せず、ステンシルマスク4の下面とのみ接した状態とな
っている。すなわち、金属ペースト6の凹部3内への充
填が開始された時点から、図1(d)に示す状態を経て
凹部3内が完全に充填される時点に至るまで、エッジ部
1Eの近傍は金属ペースト6によって密封された状態と
はならず、したがって凹部3内に残留した空気が金属ペ
ースト6によって押され、エッジ点1E近傍の隙間から
外部に洩れ出すのを阻害しない。この結果、図1(e)
に示すように、スキージ5による金属ペースト6の凹部
3内への印刷が終了した後に、凹部3内部に空気が残留
することによる未充填の隙間が発生せず、凹部3内は金
属ペースト6によって隙間なく良好に充填される。
The air remaining in the void 3a is pushed out through the gap between the stencil mask 4 and the substrate 1. As described above, the opening dimension d of the stencil mask 4 is the opening dimension D of the recess 3. 1 (c) because it is smaller than
The edge portion 1E of the concave portion 3 shown in FIG. 3 does not contact the metal paste 6 but contacts only the lower surface of the stencil mask 4. That is, from the time when the filling of the metal paste 6 into the recess 3 is started to the time when the inside of the recess 3 is completely filled through the state shown in FIG. It is not sealed by the paste 6, and therefore, the air remaining in the recess 3 is not pressed by the metal paste 6 and leaks to the outside from the gap near the edge point 1E. As a result, FIG. 1 (e)
As shown in FIG. 3, after the printing of the metal paste 6 into the recess 3 by the squeegee 5 is completed, an unfilled gap due to air remaining inside the recess 3 does not occur, and the inside of the recess 3 is filled with the metal paste 6. Fills well with no gaps.

【0013】次に、上記印刷が完了して図2(a)に示
すように金属ペースト6が充填された凹部3に対して、
半田ボールが搭載される。図2(b),(c)に示すよ
うに、半田ボール7を吸着ツール8により凹部3上に位
置合わせして搭載する。この後、基板1はリフロー工程
に送られ、加熱される。この加熱により、半田ボール7
は溶融し凹部3の底の電極12の表面と半田接合され
る。このとき、金属ペースト6中のフラックス成分によ
り、半田ボール7や電極2の表面の酸化膜が除去され、
良好な半田接合が行われる。また金属ペースト6中の導
電粒子が凹部3内に介在することにより、半田ボール7
が溶融した溶融半田は、凹部3内を導電粒子を濡らしな
がら下方に移動して電極2の表面に確実に到達する。そ
してこの移動の際、凹部3の内部には空気の残留による
金属ペースト6の未充填部分が存在しないため、溶融半
田は確実に凹部3内を充填し、電極2との良好な半田接
合部を形成することができる。
Next, after the printing is completed, as shown in FIG. 2 (a), with respect to the concave portion 3 filled with the metal paste 6,
Solder balls are mounted. As shown in FIGS. 2B and 2C, the solder balls 7 are aligned and mounted on the concave portions 3 by the suction tool 8. After that, the substrate 1 is sent to the reflow process and heated. By this heating, the solder balls 7
Melts and is soldered to the surface of the electrode 12 at the bottom of the recess 3. At this time, due to the flux component in the metal paste 6, the oxide film on the surfaces of the solder balls 7 and the electrodes 2 is removed,
Good solder joining is achieved. Further, since the conductive particles in the metal paste 6 are present in the concave portion 3, the solder balls 7
The molten solder, which has melted, moves downward while wetting the conductive particles in the recess 3 and reliably reaches the surface of the electrode 2. At the time of this movement, since there is no unfilled portion of the metal paste 6 due to air remaining inside the concave portion 3, the molten solder surely fills the concave portion 3 to form a good solder joint with the electrode 2. Can be formed.

【0014】[0014]

【発明の効果】本発明によれば、凹部の開口寸法よりも
小さい開口寸法を有するステンシルマスクを用いるよう
にしたので、金属ペーストの印刷時に凹部内に残留した
空気の脱気経路が確保され、凹部内に空気が残留するこ
とによる金属ペーストの未充填部が発生しない。したが
って凹部上に搭載された半田と凹部内の電極とを良好に
半田接合することができる。
According to the present invention, since the stencil mask having the opening size smaller than the opening size of the recess is used, the deaeration path of the air remaining in the recess during the printing of the metal paste is secured, An unfilled portion of the metal paste due to air remaining in the recess does not occur. Therefore, the solder mounted on the recess and the electrode in the recess can be soldered well.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)本発明の一実施の形態の半田バンプ形成
方法の工程説明図 (b)本発明の一実施の形態の半田バンプ形成方法の工
程説明図 (c)本発明の一実施の形態の半田バンプ形成方法の工
程説明図 (d)本発明の一実施の形態の半田バンプ形成方法の工
程説明図 (e)本発明の一実施の形態の半田バンプ形成方法の工
程説明図
FIG. 1A is a process explanatory diagram of a solder bump forming method according to an embodiment of the present invention. FIG. 1B is a process explanatory diagram of a solder bump forming method according to an embodiment of the present invention. (D) Process explanatory drawing of the solder bump forming method of one embodiment of the present invention (e) Process explanatory drawing of the solder bump forming method of one embodiment of the present invention

【図2】(a)本発明の一実施の形態の半田バンプ形成
方法の工程説明図 (b)本発明の一実施の形態の半田バンプ形成方法の工
程説明図 (c)本発明の一実施の形態の半田バンプ形成方法の工
程説明図 (d)本発明の一実施の形態の半田バンプ形成方法の工
程説明図
FIG. 2A is a process explanatory diagram of a solder bump forming method according to an embodiment of the present invention. FIG. 2B is a process explanatory diagram of a solder bump forming method according to an embodiment of the present invention. (D) Process explanatory drawing of the solder bump forming method of one embodiment of the present invention

【符号の説明】[Explanation of symbols]

1 基板 2 電極 3 凹部 4 ステンシルマスク 4a 開口 6 金属ペースト 1 substrate 2 electrodes 3 recess 4 stencil mask 4a opening 6 Metal paste

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H05K 3/12 610 H05K 3/12 610N 3/34 505 3/34 505C (72)発明者 酒見 省二 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 2C035 AA06 FD01 FF22 2H113 AA02 BA10 BB22 BC12 CA17 EA06 EA07 5E319 BB04 BB05 CD29 GG03 5E343 BB03 EE23 GG18 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) H05K 3/12 610 H05K 3/12 610N 3/34 505 3/34 505C (72) Inventor Shoji Sakami 1006, Kadoma, Kadoma City, Osaka Prefecture F-term within Matsushita Electric Industrial Co., Ltd. (reference) 2C035 AA06 FD01 FF22 2H113 AA02 BA10 BB22 BC12 CA17 EA06 EA07 5E319 BB04 BB05 CD29 GG03 5E343 BB03 EE23 GG18

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】ワークの凹部の底に形成された電極上にス
テンシルマスクを介して金属ペーストを印刷する金属ペ
ーストの印刷方法であって、前記凹部の深さを開口寸法
で除して得られる比率が所定比率を越える場合に、前記
凹部の開口寸法よりも小さい開口寸法を有するステンシ
ルマスクを用いることを特徴とする金属ペーストの印刷
方法。
1. A method for printing a metal paste in which a metal paste is printed on an electrode formed on the bottom of a recess of a work through a stencil mask, which is obtained by dividing the depth of the recess by the opening size. A method of printing a metal paste, wherein a stencil mask having an opening size smaller than the opening size of the recess is used when the ratio exceeds a predetermined ratio.
【請求項2】前記所定比率は0.2であることを特徴と
する請求項1記載の金属ペーストの印刷方法。
2. The method for printing a metal paste according to claim 1, wherein the predetermined ratio is 0.2.
JP10235300A 1998-08-21 1998-08-21 Method for printing metallic paste Pending JP2000062136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10235300A JP2000062136A (en) 1998-08-21 1998-08-21 Method for printing metallic paste

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10235300A JP2000062136A (en) 1998-08-21 1998-08-21 Method for printing metallic paste

Publications (1)

Publication Number Publication Date
JP2000062136A true JP2000062136A (en) 2000-02-29

Family

ID=16984082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10235300A Pending JP2000062136A (en) 1998-08-21 1998-08-21 Method for printing metallic paste

Country Status (1)

Country Link
JP (1) JP2000062136A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100491110B1 (en) * 2002-10-29 2005-05-24 앰코 테크놀로지 코리아 주식회사 Manufacturing method of stencil for semiconductor device
JP2006173325A (en) * 2004-12-15 2006-06-29 Ibiden Co Ltd Forming method of solder bump
US8034414B2 (en) 2004-12-21 2011-10-11 Chunghwa Picture Tubes, Ltd. Printing process and method for improving side-bottom ratio
US20130334291A1 (en) * 2012-06-14 2013-12-19 Electronics And Telecommunications Research Institute Method of forming solder on pad on fine pitch pcb and method of flip chip bonding semiconductor using the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100491110B1 (en) * 2002-10-29 2005-05-24 앰코 테크놀로지 코리아 주식회사 Manufacturing method of stencil for semiconductor device
JP2006173325A (en) * 2004-12-15 2006-06-29 Ibiden Co Ltd Forming method of solder bump
JP4544982B2 (en) * 2004-12-15 2010-09-15 イビデン株式会社 Method of forming solder bump
US8034414B2 (en) 2004-12-21 2011-10-11 Chunghwa Picture Tubes, Ltd. Printing process and method for improving side-bottom ratio
US20130334291A1 (en) * 2012-06-14 2013-12-19 Electronics And Telecommunications Research Institute Method of forming solder on pad on fine pitch pcb and method of flip chip bonding semiconductor using the same
US8794502B2 (en) * 2012-06-14 2014-08-05 Electronics And Telecommunications Research Institute Method of forming solder on pad on fine pitch PCB and method of flip chip bonding semiconductor using the same

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