JP2000058319A - Actuator - Google Patents

Actuator

Info

Publication number
JP2000058319A
JP2000058319A JP10239538A JP23953898A JP2000058319A JP 2000058319 A JP2000058319 A JP 2000058319A JP 10239538 A JP10239538 A JP 10239538A JP 23953898 A JP23953898 A JP 23953898A JP 2000058319 A JP2000058319 A JP 2000058319A
Authority
JP
Japan
Prior art keywords
yoke
mover
coil
permanent magnet
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10239538A
Other languages
Japanese (ja)
Inventor
Hiromoto Hayashi
博大 林
Hirobumi Takabayashi
博文 高林
Hitoshi Mikami
均 三上
Naoko Sugawara
菜穂子 菅原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Metals Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP10239538A priority Critical patent/JP2000058319A/en
Publication of JP2000058319A publication Critical patent/JP2000058319A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an actuator the linearity of which is improved. SOLUTION: A needle 26 is arranged in a yoke 1 on which coils 22 and 24 are mounted. The needle 26 includes a permanent magnet 28, magnetic pole pieces 30 and 32 fixed to the both main faces of the permanent magnet 28, and supporting shaft 34 penetrating the permanent magnet 28 and the magnetic pole pieces 30 and 32. The yoke 12 is provided with an extended part 60 formed, so as to extend to a region interposed by the coil 22 and the magnetic pole piece 30, and an extended part 60 formed so as to extend to a region interposed by the coil 24 and the magnetic pole piece 32. Thus, the existence of the extended part 60 is realized so that a magnetic force can act on the needle 26, even if the needle 26 is displaced in a relatively wide range, and the fluctuations of magnetic flux density in the magnetic circuit can be suppressed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明はアクチュエータに
関し、特にたとえば自動車等の車両の車体に伝達される
エンジンの振動を低減するためのアクティブエンジンマ
ウント等の防振装置に用いられるリニアアクチュエータ
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator, and more particularly, to a linear actuator used in an anti-vibration device such as an active engine mount for reducing vibration of an engine transmitted to a body of a vehicle such as an automobile.

【0002】[0002]

【従来の技術】この種の従来技術の一例が、特開平8−
51020号公報において開示されており、図5に示す
ように構成される。
2. Description of the Related Art An example of this kind of prior art is disclosed in Japanese Unexamined Patent Publication No.
It is disclosed in Japanese Patent Publication No. 51020 and is configured as shown in FIG.

【0003】図5に示す従来の電磁アクチュエータ1で
は、通常状態から第1のコイル2および第2のコイル3
に一方向の電流を流すと、可動子4には第1のコイル2
の方向への吸引力と第2のコイルからの反発力とが作用
し、可動子4は第1のコイル2の方向(図中上方)へ移
動する。一方、第1のコイル2および第2のコイル3に
上述とは逆方向の電流を流すと、可動子4には第1のコ
イル2からの反発力と第2のコイル3の方向への吸引力
とが作用し、可動子4は第2のコイル3の方向(図中下
方)へ移動する。このように、第1のコイル2および第
2のコイル3へ流す電流の方向を切り換えることによっ
て可動子4が支持軸5上を往復動し、支持軸5に発生す
る振動を低減する。
In a conventional electromagnetic actuator 1 shown in FIG. 5, a first coil 2 and a second coil 3
When a current in one direction flows through the first coil 2
And the repulsive force from the second coil acts, and the mover 4 moves in the direction of the first coil 2 (upward in the figure). On the other hand, when a current in the opposite direction is applied to the first coil 2 and the second coil 3, the repulsive force from the first coil 2 and the attraction in the direction of the second coil 3 are applied to the mover 4. The force is applied, and the mover 4 moves in the direction of the second coil 3 (downward in the figure). In this way, by switching the direction of the current flowing through the first coil 2 and the second coil 3, the mover 4 reciprocates on the support shaft 5, and the vibration generated on the support shaft 5 is reduced.

【0004】[0004]

【発明が解決しょうとする課題】しかし、この従来技術
では、可動子4が或る程度以上変位すれば可動子4には
十分な磁力が及ばなくなり、かつ可動子4に発生する推
力が可動子4の変位によって大きく変化するので、リニ
アリティがよくないという問題点があった。
However, in this prior art, if the mover 4 is displaced by a certain degree or more, a sufficient magnetic force is not exerted on the mover 4 and the thrust generated in the mover 4 is reduced. Since the displacement greatly changes due to the displacement of No. 4, there is a problem that linearity is not good.

【0005】それゆえに、この発明の主たる目的は、リ
ニアリティが改善されたアクチュエータを提供すること
である。
[0005] Therefore, a main object of the present invention is to provide an actuator with improved linearity.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に、請求項1に記載のアクチュエータは、中空筒状のヨ
ーク、ヨークに装着されるコイル、ならびにヨーク内に
設けられ軸方向に着磁された永久磁石と永久磁石の両端
面に形成される磁極片と永久磁石および磁極片を貫通す
る支持軸とを含む可動子を備えるアクチュエータであっ
て、ヨークはコイルと磁極片とに挟まれる領域にまで延
びる伸長部を有する。
According to a first aspect of the present invention, there is provided an actuator having a hollow cylindrical yoke, a coil mounted on the yoke, and an axial magnet provided in the yoke. An actuator comprising a movable element including a permanent magnet formed and a pole piece formed on both end faces of the permanent magnet, and a support shaft penetrating the permanent magnet and the pole piece, wherein the yoke is an area sandwiched between the coil and the pole piece. Has an extension extending to

【0007】請求項2に記載のアクチュエータは、請求
項1に記載のアクチュエータにおいて、ヨークはヨーク
外周部とヨーク外周部の内側に形成される板状部材の積
層体とを含むものである。
According to a second aspect of the present invention, in the actuator according to the first aspect, the yoke includes an outer peripheral portion of the yoke and a laminate of plate members formed inside the outer peripheral portion of the yoke.

【0008】請求項1に記載のアクチュエータでは、コ
イルと磁極片とに挟まれる領域にまで延びた伸長部をヨ
ークが有するので磁束分布が広範囲になり、可動子が比
較的広範囲に変位しても可動子には磁力(吸引力または
反発力)が及ぶようになる。また、伸長部の存在によっ
て、可動子が変位しても可動子とヨークとの間のギャッ
プ寸法はさほど変化せず、電磁石となるヨークと永久磁
石および磁極片とによって形成される磁気回路内の磁束
密度の変動が抑制され、可動子に及ぶ磁力の変動も抑制
される。したがって、可動子が比較的広範囲に変位して
も可動子には比較的変動の少ない推力が働き、リニアリ
ティが改善される。
In the actuator according to the first aspect, since the yoke has an extended portion extending to a region sandwiched between the coil and the pole piece, the magnetic flux distribution is wide, and even if the mover is displaced over a relatively wide range. Magnetic force (attraction or repulsion) is applied to the mover. Also, due to the presence of the extension, the gap dimension between the mover and the yoke does not change much even if the mover is displaced, and the magnetic circuit formed by the yoke serving as the electromagnet, the permanent magnet, and the magnetic pole piece. Fluctuations in the magnetic flux density are suppressed, and fluctuations in the magnetic force exerted on the mover are also suppressed. Therefore, even when the mover is displaced in a relatively wide range, a thrust with relatively little change acts on the mover, and the linearity is improved.

【0009】請求項2に記載のアクチュエータでは、ヨ
ーク外周部の内側に、複数の板状部材とコイルとを所定
の順序で嵌め入れて積層するだけで、縦断面形状が略E
字状の複雑なヨークを容易に得ることができかつそのヨ
ークに所定のコイルを装着することができるので、アク
チュエータの製造が容易になる。
In the actuator according to the second aspect, the plurality of plate-like members and the coils are inserted and laminated in a predetermined order inside the outer peripheral portion of the yoke, and the longitudinal sectional shape is substantially E.
Since a complicated yoke having a letter shape can be easily obtained and a predetermined coil can be mounted on the yoke, manufacture of the actuator is facilitated.

【発明の実施の形態】以下、この発明について図面を参
照して説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.

【0010】図1を参照して、この発明の実施の形態の
アクチュエータ10は、縦断面形状が略E字状に形成さ
れた中空円筒状のヨーク12を含む。ヨーク12はたと
えば鉄などからなり、中空円筒状のヨーク外周部14
と、ヨーク外周部14内にそれぞれ形成されるヨーク中
間部16、ヨーク下端部18、ヨーク上端部20とを含
む。ヨーク中間部16は板状部材16a〜16eを、ヨ
ーク下端部18は板状部材18a〜18cを、ヨーク上
端部20は板状部材20a〜20cを、それぞれ積層し
て形成される。板状部材16a〜16e、18a〜18
c、20a〜20cは、それぞれ中空円板状の部材であ
り、板状部材16b、16c、16d、18a、18
b、20b、20cは同一部材であり、また、板状部材
16a、16e、18c、20aは同一部材である。
Referring to FIG. 1, an actuator 10 according to an embodiment of the present invention includes a hollow cylindrical yoke 12 having a substantially E-shaped longitudinal section. The yoke 12 is made of, for example, iron or the like, and has a hollow cylindrical yoke outer peripheral portion 14.
And a yoke intermediate portion 16, a yoke lower end portion 18, and a yoke upper end portion 20 formed in the yoke outer peripheral portion 14, respectively. The yoke intermediate portion 16 is formed by laminating plate members 16a to 16e, the yoke lower end portion 18 is formed by laminating plate members 18a to 18c, and the yoke upper end portion 20 is formed by laminating plate members 20a to 20c. Plate members 16a to 16e, 18a to 18
c, 20a to 20c are hollow disk-shaped members, respectively, and are plate-shaped members 16b, 16c, 16d, 18a, 18
b, 20b, and 20c are the same members, and the plate members 16a, 16e, 18c, and 20a are the same members.

【0011】ヨーク中間部16とヨーク下端部18との
間には中空円筒状のコイル22が装着され、同様に、ヨ
ーク中間部16とヨーク上端部20との間には中空円筒
状のコイル24が装着される。なお、コイル22と24
とはヨーク中間部16に同極性の磁極が発生するように
通電される。
A hollow cylindrical coil 22 is mounted between the yoke intermediate portion 16 and the yoke lower end portion 18. Similarly, a hollow cylindrical coil 24 is mounted between the yoke intermediate portion 16 and the yoke upper end portion 20. Is attached. The coils 22 and 24
Is applied so that a magnetic pole of the same polarity is generated in the yoke intermediate portion 16.

【0012】ヨーク12内には可動子26が配置され
る。可動子26は、軸方向に着磁された円板状の永久磁
石28と、永久磁石28の両主面にそれぞれ固着された
磁極片30および32と、永久磁石28、磁極片30、
32を貫通する支持軸34とを含む。永久磁石28は、
たとえばネオジム磁石によって構成され、ここでは、上
面側がN極、下面側がS極に着磁される。永久磁石28
と磁極片30、32とは、磁極片30および32のそれ
ぞれの一方主面に当接されるワッシャ36および38に
よって支持軸34に固定される。このとき、ワッシャ3
6および38は支持軸34の周方向に形成された溝(図
示せず)に嵌合される。支持軸34は、ワッシャ36お
よび38が取り付けられた位置よりやや端部寄りの位置
において、中空円筒状のリニアベアリング40および4
2を介してそれぞれたとえばアルミニウムなどからなる
中空円板状のホルダ44および46によって保持され
る。このとき、通常状態ではコイル22および24にそ
れぞれ磁極片30および32が対向するように支持軸3
4が保持され、また、支持軸34はリニアベアリング4
0および42に摺動可能とされる。
A mover 26 is arranged in the yoke 12. The mover 26 includes a disk-shaped permanent magnet 28 magnetized in the axial direction, magnetic pole pieces 30 and 32 fixed to both main surfaces of the permanent magnet 28, and a permanent magnet 28, a magnetic pole piece 30,
32 and a support shaft 34 penetrating therethrough. The permanent magnet 28
For example, it is constituted by a neodymium magnet. Here, the upper surface is magnetized to the N pole and the lower surface is magnetized to the S pole. Permanent magnet 28
The pole pieces 30 and 32 are fixed to the support shaft 34 by washers 36 and 38 abutting on one main surfaces of the pole pieces 30 and 32, respectively. At this time, washer 3
6 and 38 are fitted into grooves (not shown) formed in the circumferential direction of the support shaft 34. The support shaft 34 has a hollow cylindrical linear bearing 40 and 4 at a position slightly closer to the end than the position where the washers 36 and 38 are attached.
2 are respectively held by hollow disk-shaped holders 44 and 46 made of, for example, aluminum or the like. At this time, in the normal state, the support shaft 3 is set so that the pole pieces 30 and 32 face the coils 22 and 24, respectively.
4 is held, and the support shaft 34 is a linear bearing 4
It is slidable to 0 and 42.

【0013】また、ホルダ44の下面および支持軸34
の下端部近傍にはそれぞれダイヤフラム48および50
が取り付けられ、ダイヤフラム48および50に外カバ
ー52が嵌合される。同様に、ホルダ46の上面、およ
び支持軸34のうちリニアベアリング42が配置された
箇所からやや端部よりの位置には、それぞれダイヤフラ
ム54および56が取り付けられ、ダイヤフラム54お
よび56には外カバー58が嵌合される。外カバー52
および58は防塵および防水の役割を果たす。
The lower surface of the holder 44 and the support shaft 34
The diaphragms 48 and 50 are located near the lower end of the
Is attached, and the outer cover 52 is fitted to the diaphragms 48 and 50. Similarly, diaphragms 54 and 56 are attached to the upper surface of the holder 46 and a part of the support shaft 34 from the position where the linear bearing 42 is disposed to a little from the end, respectively, and the outer covers 58 are attached to the diaphragms 54 and 56, respectively. Are fitted. Outer cover 52
And 58 play a dust and waterproof role.

【0014】ここで注目すべきは、板状部材16a、1
6e、18c、20aが、その内周端に屈曲した伸長部
60を有することである。板状部材16aおよび18c
では、伸長部60はコイル22の内周面の上下両端を覆
いコイル22と磁極片30とに挟まれる領域にまで延び
るように形成され、同様に、板状部材16eおよび20
aでは、伸長部60はコイル24の内周面の上下両端を
覆いコイル24と磁極片32とに挟まれる領域にまで延
びるように形成される。その作用については後述する。
It should be noted that the plate members 16a, 1
6e, 18c and 20a have a bent extension 60 at the inner peripheral end thereof. Plate members 16a and 18c
In this embodiment, the extending portion 60 is formed so as to cover both the upper and lower ends of the inner peripheral surface of the coil 22 and extend to a region sandwiched between the coil 22 and the pole piece 30. Similarly, the plate-like members 16e and 20
In a, the extension 60 is formed so as to cover the upper and lower ends of the inner peripheral surface of the coil 24 and extend to a region sandwiched between the coil 24 and the pole piece 32. The operation will be described later.

【0015】このように構成されるアクチュエータ10
の作用について説明する。
The actuator 10 constructed as described above
The operation of will be described.

【0016】まず、通常状態、すなわちコイル22およ
び24に電流が流れていない場合には、可動子26は、
コイル22および24にそれぞれ磁極片30および32
が対向した位置に静止する。
First, in a normal state, that is, when no current flows through the coils 22 and 24, the mover 26
Pole pieces 30 and 32 on coils 22 and 24 respectively
Comes to a stop at the opposing position.

【0017】そして、外部で発生する振動が支持軸34
を通してアクチュエータ10に伝達されると、コイル2
2および24に正弦波の電圧が印加されて電流が流れる
ことによって振動が低減される。
The externally generated vibration is generated by the support shaft 34.
Transmitted to the actuator 10 through the coil 2
Vibration is reduced by applying a sinusoidal voltage to 2 and 24 and causing a current to flow.

【0018】すなわち、通常状態からコイル22および
24に一方向の電流が流されると、可動子26を構成す
る永久磁石28の磁束の方向と、コイル24で生じた磁
束の方向とが同一になり、コイル22で生じた磁束の方
向とは逆になる。その結果、可動子26には、ヨーク上
端部20との間に吸引力がヨーク下端部18との間に反
発力がそれぞれ働き、可動子26はヨーク上端部20方
向(図1では上方)へ移動する。
That is, when current flows in one direction from the normal state to the coils 22 and 24, the direction of the magnetic flux of the permanent magnet 28 constituting the mover 26 and the direction of the magnetic flux generated by the coil 24 become the same. , The direction of the magnetic flux generated in the coil 22 is opposite. As a result, a suction force acts on the mover 26 with the yoke upper end 20 and a repulsive force acts on the mover 26 with the yoke lower end 18, so that the mover 26 moves toward the yoke upper end 20 (upward in FIG. 1). Moving.

【0019】一方、コイル22および24に上述とは逆
方向の電流が流されると、可動子26を構成する永久磁
石28の磁束の方向と、コイル22で生じた磁束の方向
とが同一になり、コイル24で生じた磁束の方向とは逆
になる。その結果、可動子26には、ヨーク下端部18
との間に吸引力がヨーク上端部20との間に反発力がそ
れぞれ働き、可動子26はヨーク下端部18方向(図1
では下方)へ移動する。
On the other hand, when a current in the opposite direction to that described above is applied to the coils 22 and 24, the direction of the magnetic flux of the permanent magnet 28 constituting the mover 26 becomes the same as the direction of the magnetic flux generated by the coil 22. , The direction of the magnetic flux generated by the coil 24 is opposite. As a result, the mover 26 has the yoke lower end 18
1 and a repulsive force acts between the yoke upper end 20 and the mover 26 in the direction of the yoke lower end 18 (FIG. 1).
Then move down).

【0020】このように、コイル22および24へ流す
電流の方向を切り換えることによって、外部で発生する
振動とは反対方向に可動子26が上下動し、振動が低減
される。
As described above, by switching the direction of the current flowing through the coils 22 and 24, the mover 26 moves up and down in the direction opposite to the vibration generated outside, and the vibration is reduced.

【0021】ついで、伸長部60による作用について、
図2〜図4を参照して説明する。
Next, the operation of the extension unit 60 will be described.
This will be described with reference to FIGS.

【0022】まず、図2(a)を参照して、ヨーク中間
部16、ヨーク下端部18およびヨーク上端部20のそ
れぞれに伸長部60を形成すると、コイル22および2
4に電流を流したときに電磁石となるヨーク12による
磁束(点線A1に示す)の分布が広範囲になる。なお、
実線B1は永久磁石28による磁束を示す。したがっ
て、図2(b)に示すように可動子26が上下方向の比
較的広範囲に変位しても可動子26には磁力が及ぶよう
になる。
First, referring to FIG. 2A, when extending portions 60 are formed in the yoke intermediate portion 16, the yoke lower end portion 18 and the yoke upper end portion 20, respectively, the coils 22 and 2 are formed.
The distribution of the magnetic flux (indicated by the dotted line A1) by the yoke 12 which becomes the electromagnet when a current is passed through 4 becomes wide. In addition,
The solid line B1 indicates the magnetic flux generated by the permanent magnet 28. Therefore, as shown in FIG. 2B, even when the mover 26 is displaced in a relatively wide range in the vertical direction, magnetic force is exerted on the mover 26.

【0023】また、伸長部60の存在によって、図2
(b)に示すように、可動子26が変位してもヨーク1
2と可動子26の永久磁石28、磁極片30、32との
間のギャップ寸法はさほど変化せず、電磁石となるヨー
ク12と永久磁石28、磁極片30、32とによって形
成される磁気回路内の磁束密度の変動が抑制される。
Further, due to the presence of the extension portion 60, FIG.
As shown in (b), even if the mover 26 is displaced, the yoke 1
The gap size between the permanent magnet 2 and the permanent magnet 28 of the mover 26 and the magnetic pole pieces 30 and 32 does not change so much, and the magnetic circuit formed by the yoke 12 to be an electromagnet, the permanent magnet 28 and the magnetic pole pieces 30 and 32 Of the magnetic flux density is suppressed.

【0024】したがって、図4に示すグラフからもわか
るように、伸長部60を有するヨーク12を用いた場合
(L=2.5mm、L=5.6mm)には、可動子26が比
較的広範囲に変位しても可動子26には比較的変動の少
ない推力が働き、リニアリティが改善され、防振動作に
優れたアクチュエータ10が得られる。ここで、Lは図
1に示すように伸長部60の長さをいう。
Therefore, as can be seen from the graph shown in FIG. 4, when the yoke 12 having the extension 60 is used (L = 2.5 mm, L = 5.6 mm), the movable element 26 has a relatively wide range. Even when the movable member 26 is displaced, a thrust with relatively little fluctuation acts on the mover 26, the linearity is improved, and the actuator 10 excellent in the vibration proof operation is obtained. Here, L refers to the length of the extension 60 as shown in FIG.

【0025】因みに、図3(a)に示すように、伸長部
60がないヨーク12aを用いた場合には、コイル22
および24に電流を流したときに電磁石となるヨーク1
2aによる磁束(点線A2に示す)の分布は狭い範囲に
集中する。なお、実線B2は永久磁石28による磁束を
示す。また、たとえば図3(b)に示すように可動子2
6が上方向へ変位すると、ヨーク12aと永久磁石2
8、磁極片30、32との間にギャップが大きい箇所
(たとえば一点鎖線Cで囲む箇所)が生ずるため、ヨー
ク12aと永久磁石28、磁極片30、32とによって
形成される磁気回路内の磁束密度が小さくなってしま
う。したがって、可動子26が或る程度以上変位すれば
可動子26に十分な磁力が及ばなくなってしまう。
By the way, as shown in FIG. 3A, when the yoke 12a without the extension 60 is used, the coil 22
Yoke 1 that becomes an electromagnet when current is applied to
The distribution of the magnetic flux (shown by the dotted line A2) due to 2a is concentrated in a narrow range. The solid line B2 indicates the magnetic flux generated by the permanent magnet 28. Further, for example, as shown in FIG.
6 is displaced upward, the yoke 12a and the permanent magnet 2
8, since a portion having a large gap (for example, a portion surrounded by a dashed line C) is generated between the pole pieces 30 and 32, the magnetic flux in the magnetic circuit formed by the yoke 12a, the permanent magnet 28, and the pole pieces 30 and 32 The density is reduced. Therefore, if the mover 26 is displaced by a certain degree or more, a sufficient magnetic force does not reach the mover 26.

【0026】したがって、図4に示すグラフからもわか
るように、伸長部60のないヨーク12aの場合(L=
0mm)には、可動子26の変位に応じて急激に推力が変
化し、また可動子26の或る程度以上の大きな変位には
対応できず、リニアリティに欠ける。
Therefore, as can be seen from the graph shown in FIG. 4, in the case of the yoke 12a without the extension 60 (L =
(0 mm), the thrust changes abruptly in accordance with the displacement of the mover 26, and it cannot cope with a large displacement of the mover 26 that is greater than a certain level, and lacks linearity.

【0027】また、アクチュエータ10によれば、ヨー
ク外周部14内にヨーク下端部18を構成する板状部材
18a〜18c、コイル22、ヨーク中間部16を構成
する板状部材16a〜16e、コイル24、ヨーク上端
部20を構成する板状部材20a〜20cを、この順で
嵌入して積層するだけで、コイル22および24が装着
されたヨーク12を容易に組み立てることができ、ひい
てはアクチュエータ10の製造が容易になる。なお、板
状部材16a、16e、18c、20aはすべて同一部
品であり、かつ板状部材16b、16c、16d、18
a、18b、20b、20cはすべて同一部品であり、
これらはプレス加工によって容易に得られることから
も、ヨーク12の製造がより一層容易になることは明ら
かである。
Further, according to the actuator 10, the plate members 18a to 18c forming the yoke lower end portion 18, the coil 22, the plate members 16a to 16e forming the yoke intermediate portion 16, and the coil 24 in the yoke outer peripheral portion 14. The yoke 12 on which the coils 22 and 24 are mounted can be easily assembled simply by inserting and laminating the plate-like members 20a to 20c constituting the yoke upper end portion 20 in this order, and thus manufacturing the actuator 10. Becomes easier. Note that the plate members 16a, 16e, 18c, and 20a are all the same components, and the plate members 16b, 16c, 16d, and 18
a, 18b, 20b, 20c are all the same parts,
Since these are easily obtained by press working, it is clear that the manufacture of the yoke 12 is further facilitated.

【0028】さらに、板状部材16a、16e、18
c、20aはすべて同一部品であり伸長部60の長さL
はすべて等しくなるので、コイル22を挟む板状部材1
6aおよび18cからの磁力は等しくなり、同様に、コ
イル24を挟む板状部材16eおよび20aからの磁力
は等しくなる。
Further, the plate members 16a, 16e, 18
c and 20a are all the same parts, and the length L
Are all equal, the plate-like member 1 sandwiching the coil 22
The magnetic forces from 6a and 18c are equal, and similarly, the magnetic forces from plate-like members 16e and 20a sandwiching coil 24 are equal.

【0029】なお、この発明は、エンジンマウント用に
限定されず、たとえば半導体装置に用いられる除振台や
車両のサスペンションなど振動を低減または除去するた
めの任意の装置に適用できる。
The present invention is not limited to an engine mount, but can be applied to any device for reducing or eliminating vibration, such as a vibration isolation table or a vehicle suspension used for a semiconductor device.

【0030】[0030]

【発明の効果】この発明によれば、ヨークと可動子との
間に形成される磁束分布が広範囲になり、可動子が比較
的広範囲に変位しても可動子には磁力が及ぶようにな
る。また、伸長部の存在によって、可動子が変位しても
可動子とヨークとの間のギャップ寸法はさほど変化せ
ず、電磁石となるヨークと永久磁石および磁極片とによ
って形成される磁気回路内の磁束密度の変動が抑制さ
れ、可動子への磁力の変動も抑制される。したがって、
可動子が比較的広範囲に変位しても可動子には比較的変
動の少ない推力が働き、リニアリティが改善される。
According to the present invention, the magnetic flux distribution formed between the yoke and the mover becomes wide, and even if the mover is displaced over a relatively wide range, the magnetic force is exerted on the mover. . Also, due to the presence of the extension, the gap dimension between the mover and the yoke does not change much even if the mover is displaced, and the magnetic circuit formed by the yoke serving as the electromagnet, the permanent magnet, and the magnetic pole piece. Fluctuations in magnetic flux density are suppressed, and fluctuations in magnetic force on the mover are also suppressed. Therefore,
Even when the mover is displaced in a relatively wide range, a thrust with relatively little change acts on the mover, and the linearity is improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施形態を示す縦断面図である。FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention.

【図2】図1の実施形態における磁束の一例を示す図解
図である。
FIG. 2 is an illustrative view showing one example of a magnetic flux in the embodiment of FIG. 1;

【図3】伸長部を有さないヨークを用いたときの磁束の
一例を示す図解図である。
FIG. 3 is an illustrative view showing one example of a magnetic flux when a yoke having no extension is used;

【図4】可動子の変位と推力との関係を示すグラフであ
る。
FIG. 4 is a graph showing a relationship between displacement of a mover and thrust.

【図5】従来技術を示す断面図である。FIG. 5 is a sectional view showing a conventional technique.

【符号の説明】[Explanation of symbols]

10 アクチュエータ 12、12a ヨーク 16 ヨーク中間部 18 ヨーク下端部 20 ヨーク上端部 16a〜16e、18a〜18c、20a〜20c
板状部材 22、24 コイル 26 可動子 28 永久磁石 30、32 磁極片 34 支持軸 60 伸長部 L 伸長部の長さ
DESCRIPTION OF SYMBOLS 10 Actuator 12, 12a Yoke 16 Yoke middle part 18 Yoke lower end part 20 Yoke upper end part 16a-16e, 18a-18c, 20a-20c
Plate member 22, 24 Coil 26 Mover 28 Permanent magnet 30, 32 Magnetic pole piece 34 Support shaft 60 Extension L Length of extension

───────────────────────────────────────────────────── フロントページの続き (72)発明者 三上 均 大阪府三島郡島本町江川2丁目15番17号 住友特殊金属株式会社山崎製作所内 (72)発明者 菅原 菜穂子 大阪府三島郡島本町江川2丁目15番17号 住友特殊金属株式会社山崎製作所内 Fターム(参考) 3J048 AC08 AD03 BE08 BE09 EA01 5E048 AA04 AB10 AC05 AD02 BA07 CA02  ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hitoshi Mikami 2-15-17 Egawa, Shimamoto-cho, Mishima-gun, Osaka Prefecture Yamazaki Works, Sumitomo Special Metals Co., Ltd. (72) Naoko Sugawara Egawa, Shimamoto-cho, Mishima-gun, Osaka 2-15-15-17 Sumitomo Special Metals Co., Ltd. Yamazaki Works F term (reference) 3J048 AC08 AD03 BE08 BE09 EA01 5E048 AA04 AB10 AC05 AD02 BA07 CA02

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 中空筒状のヨーク、 前記ヨークに装着されるコイル、ならびに前記ヨーク内
に設けられ軸方向に着磁された永久磁石と前記永久磁石
の両端面に形成される磁極片と前記永久磁石および前記
磁極片を貫通する支持軸とを含む可動子を備えるアクチ
ュエータであって、 前記ヨークは前記コイルと前記磁極片とに挟まれる領域
にまで延びる伸長部を有する、アクチュエータ。
A hollow cylindrical yoke, a coil mounted on the yoke, a permanent magnet provided in the yoke and axially magnetized, and magnetic pole pieces formed on both end surfaces of the permanent magnet; An actuator comprising a mover including a permanent magnet and a support shaft penetrating the pole piece, wherein the yoke has an extension extending to a region sandwiched between the coil and the pole piece.
【請求項2】 前記ヨークはヨーク外周部と前記ヨーク
外周部の内側に形成される板状部材の積層体とを含む、
請求項1に記載のアクチュエータ。
2. The yoke includes a yoke outer peripheral portion and a laminate of plate-like members formed inside the yoke outer peripheral portion.
The actuator according to claim 1.
JP10239538A 1998-08-11 1998-08-11 Actuator Pending JP2000058319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10239538A JP2000058319A (en) 1998-08-11 1998-08-11 Actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10239538A JP2000058319A (en) 1998-08-11 1998-08-11 Actuator

Publications (1)

Publication Number Publication Date
JP2000058319A true JP2000058319A (en) 2000-02-25

Family

ID=17046308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10239538A Pending JP2000058319A (en) 1998-08-11 1998-08-11 Actuator

Country Status (1)

Country Link
JP (1) JP2000058319A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005294830A (en) * 2004-03-26 2005-10-20 Bose Corp Electromagnetic actuator and controlling method of the same
US8662266B2 (en) 2010-06-29 2014-03-04 Hyundai Motor Company Electromotive active dynamic vibration absorber apparatus for vehicle
JP2014196106A (en) * 2014-07-18 2014-10-16 富士重工業株式会社 Vehicle hood moving device
CN104976263A (en) * 2015-05-14 2015-10-14 上海交通大学 Symmetric electromagnetic actuator
US9762112B2 (en) 2012-11-30 2017-09-12 Hitachi Metals, Ltd. Actuator and method of manufacturing actuator
US20170314632A1 (en) * 2016-04-28 2017-11-02 Sumitomo Riko Company Limited Electromagnetic actuator and active vibration-damping device
JP2017199768A (en) * 2016-04-26 2017-11-02 パナソニックIpマネジメント株式会社 Electromagnet device and mobile object with the same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005294830A (en) * 2004-03-26 2005-10-20 Bose Corp Electromagnetic actuator and controlling method of the same
US8662266B2 (en) 2010-06-29 2014-03-04 Hyundai Motor Company Electromotive active dynamic vibration absorber apparatus for vehicle
US9762112B2 (en) 2012-11-30 2017-09-12 Hitachi Metals, Ltd. Actuator and method of manufacturing actuator
JP2014196106A (en) * 2014-07-18 2014-10-16 富士重工業株式会社 Vehicle hood moving device
CN104976263A (en) * 2015-05-14 2015-10-14 上海交通大学 Symmetric electromagnetic actuator
JP2017199768A (en) * 2016-04-26 2017-11-02 パナソニックIpマネジメント株式会社 Electromagnet device and mobile object with the same
US20170314632A1 (en) * 2016-04-28 2017-11-02 Sumitomo Riko Company Limited Electromagnetic actuator and active vibration-damping device
CN107420479A (en) * 2016-04-28 2017-12-01 住友理工株式会社 Electromagnetic actuator and active vibration absorber
US10451134B2 (en) 2016-04-28 2019-10-22 Sumitomo Riko Company Limited Electromagnetic actuator and active vibration-damping device

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