JP2000055429A - Two-story type clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower the entire height of the building of a two-story type clean room and improve the practical use. SOLUTION: An upper clean room 1 is made a semi-downflow type in which clean air is supplied from a plurality of air supply openings 5 provided in a ceiling 3 and is exhausted via an exhaust duct 8 from a plurality of exhaust openings 7 provided in a floor 6. A lower clean room 2 is made a ceiling-supply wall-exhaust type in which clean air is supplied from a plurality of air supply openings 14 provided in a ceiling 12 and is exhausted via an exhaust duct 8 from a plurality of exhaust openings 16 provided in lower positions of a wall 15. The exhaust duct 8 of the upper clean room is disposed in a duct space of an air supply duct 13 of the lower clean room 2, and each air supply duct 4, 13 and each exhaust duct 8, 17 are led to the outside of the clean rooms one by one. With this configuration, an exclusive space of an exhaust path of the upper clean room 1 is eliminated so as to lower the height of the building, and the practical use of the upper and lower clean rooms can be done separately.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room, and more particularly, to a clean room having two different levels of clean room with different cleanliness.

[0002]

2. Description of the Related Art In general, in processes (manufacturing process, inspection process, etc.) for handling precision parts, semi-finished products, products, etc. requiring high precision or cleanliness, such as magnetic disk substrates and semiconductor devices, etc. If dust in the air adheres to these parts and the like, it causes defects and the like, and is therefore handled in a room called a clean room.

[0003] Cleanroom cleanliness is typically measured at a certain magnitude (for example, 0.5 cubic feet) per cubic foot.
μm or more, or 0.1 μm or more). The required cleanliness differs depending on the parts to be handled and the like. For example, in the case of an aluminum substrate of a magnetic disk, a cream room with a high degree of cleanliness is required in the final inspection step, but a high degree of cleanliness is not necessarily required in the polishing and cleaning steps of substrate manufacture as in the inspection step. In the case of high cleanliness (for example, less than several hundreds of classes), a clean room generally called a downflow type is adopted.

However, the down-flow type has a high construction cost and so on. In view of the required cleanliness, a clean room with high cleanliness is arranged on the upper floor and a clean room with low cleanliness is disposed on the lower floor. Japanese Patent Application Laid-Open No. 61-96344 proposes a two-story structure with a small installation area. That is, according to the publication, the second floor and the first floor
A high-performance filter, etc., is placed on the ceiling of the clean room on the floor, and each floor is formed of a ventilation grid such as grating, and clean air supplied from the ceiling of the clean room on the second floor is supplied from the floor. The air is exhausted, and the exhaust is directly purified by a filter at the ceiling of the clean room on the first floor, clean air is supplied to the clean room on the first floor, and the exhaust is exhausted from the floor of the first floor.

[0005]

However, the above publication does not consider reducing the height of the building. In other words, the downflow type blows clean air into the room from the ceiling through a high-performance filter, and passes the room air to the space provided under the floor through the opening surface of the micropores provided on the floor surface. Since the collected air is passed again through a high-performance filter and purified, and the clean air is blown into the room again from the ceiling, a space for collecting indoor air under the floor is required, There is a problem that the height of the whole building becomes high.

Further, the two-story clean room described in the above-mentioned publication is a two-room clean room which communicates two clean rooms in order and supplies air in a sequential manner, and there is no consideration to operate each clean room independently. .
Therefore, for example, even when it is desired to use only one clean room, both rooms must be operated, and waste of operating power due to unnecessary filter loss of the clean room and waste of power for air conditioning occur. There is a problem. Also, there is an operational problem that control of cleanliness by the number of times of replacement of ventilation and control of air conditioning such as room temperature cannot be performed in a clean room unit.

An object of the present invention is to reduce the overall height of a two-story type clean room building and improve the operation.

[0008]

In order to solve the above-mentioned problems, a second-floor type clean room according to the present invention is provided with an air supply duct disposed in a space above a ceiling, and provided on the ceiling in communication with the air supply duct. Upper clean room having a plurality of air supply ports provided, a plurality of exhaust ports provided on the floor, and an exhaust duct provided in communication with the exhaust ports, and an air supply provided in a space above the ceiling. A duct, a plurality of air inlets provided on the ceiling in communication with the air supply duct, a plurality of air outlets provided in a low position of the wall, and an air exhaust duct provided in communication with the air outlet. And a lower clean room having a lower clean room, the exhaust duct of the upper clean room is arranged in the duct space of the air supply duct of the lower clean room, and each air supply duct and each exhaust duct are individually led out of the clean room. I do.

That is, in the case of a downflow type in which the entire floor of the upper clean room is a lattice floor, a space for an exhaust passage is required on the entire surface under the floor. On the other hand, in the case of the present invention, since the upper clean room is a semi-downflow type in which a plurality of exhaust ports are appropriately arranged on the floor surface, the exhaust duct communicating with the exhaust port of the upper clean room is supplied to the lower clean room by the air supply. It becomes possible to arrange in the duct space of the duct. As a result, a dedicated space for the exhaust passage of the upper clean room is not required, and the height of the building can be reduced accordingly.

Further, since the air supply duct and the exhaust duct of the upper clean room and the air supply duct and the exhaust duct of the lower clean room are individually led out of the cream room, these ducts are provided with a high-performance filter and air supply. By individually connecting to a clean air supply device including a fan and an air conditioner, each clean room can be operated individually. Note that a clean air supply device may be provided in common for the upper and lower clean rooms. In this case, it is possible to provide a passage opening / closing means in an air supply duct or the like and operate them individually. A high-performance filter may be attached to each air supply port of the clean room.

In addition, in addition to the above configuration, it is preferable that an exhaust port is provided at a lower position on the wall of the upper clean room, and an exhaust duct is connected to the exhaust port. According to this, the cleanliness of the upper clean room can be increased. In this case, for example, the cleanliness of the upper clean room can be operated in the range of thousands to tens of classes, and the cleanliness of the lower clean room can be operated in the range of tens of thousands to 1,000.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to an embodiment shown in FIG. As shown in FIG. 1, the second-floor type clean room of the present embodiment includes an upper clean room 1 and a lower clean room 2. The upper clean room 1 includes a plurality of air supply ducts 4 arranged in a space above the ceiling 3, a plurality of air supply ports 5 provided on the ceiling 3 in communication with the air supply ducts 4, and a floor 6. A plurality of exhaust ports 7 provided, an exhaust duct 8 provided in communication with the exhaust ports 7, a plurality of exhaust ports 10 provided in the vicinity of the floor surface of the wall 9, and And an exhaust duct 11 provided in communication therewith.

On the other hand, the lower clean room 2 includes a plurality of air supply ducts 13 arranged in a space above the ceiling 12 and a plurality of air supply ports 14 provided in the ceiling 12 so as to communicate with the air supply ducts 13. And a plurality of exhaust ports 16 provided at a lower position of the wall 15, that is, a position near the floor 18, and an exhaust duct 17 provided in communication with the exhaust ports 16. .

The space between the floor 6 of the upper clean room 1 and the ceiling 12 of the lower clean room 2 is a duct space, and a plurality of exhaust ducts communicated with the exhaust ports 7 of the floor 6 of the upper clean room 1 here. 8, an air supply duct 13 and an exhaust duct 17 of the lower clean room 2 are provided,
Each is individually led out of the clean room and connected to a clean air supply device (not shown). The clean air supply device collects dust-containing air from each clean room through the exhaust ducts 8, 11, and 17, and then removes the dust-containing air from the clean room. (HEPA filter) and other high-performance filters 22
Dust is filtered through the filter and clean air is supplied to each clean room. The high-performance filter 22 may be attached to a clean air supply device. If an air conditioner is provided in the clean air supply device, the temperature and humidity of the clean room can be adjusted. The clean air supply device may be provided separately for the upper and lower clean rooms, or may be provided in common. When they are provided in common, individual operation can be made possible by providing a passage opening / closing means in an air supply duct or the like.
In the drawing, reference numeral 19 denotes a beam on the second floor, reference numeral 20 denotes a roof, and reference numeral 21 denotes a beam on the floor 6 on the second floor.

The operation and operation of the embodiment configured as described above will be described below. In the case of the upper clean room 1, a clean air supply device (not shown)
Is filtered and cleaned by a high-performance filter 22 attached to the ceiling air supply port 5, and is discharged from the ceiling air supply port 5 into the room as shown by the arrow in the figure. . The indoor air is guided to an exhaust port 7 on the floor surface and an exhaust port 10 on the wall surface, and is circulated to the clean air supply device via the exhaust ducts 8 and 11. In the process, the upper clean room 1
Dust and bacteria floating in the air inside are exhausted from the exhaust ports 7 and 10 along with the airflow of the clean air, and the inside of the upper clean room 1 is maintained at a desired cleanliness.

On the other hand, in the case of the lower clean room 2, similarly, the air supplied through the air supply duct 13 is filtered and cleaned by a high-performance filter 22 attached to the air supply port 14 on the ceiling. The air is discharged from the ceiling air supply port 14 into the room as shown by the arrows in the figure. The indoor air is guided to the exhaust port 16 on the wall surface, and is circulated to the clean air supply device via the exhaust duct 17. Then, the dust floating in the room is discharged from the exhaust port 16, and the lower clean room 2 is maintained at a desired cleanliness.

Here, an example of cleanliness when the present embodiment is applied to, for example, a manufacturing process of a magnetic disk substrate (for example, made of aluminum) will be described. As the recording density of magnetic disk substrates increases, extremely high surface cleanliness as well as surface processing accuracy are required. Therefore, there is a step of polishing and cleaning the substrate surface in the final stage, and a room for performing this step requires a medium degree of cleanliness (for example, tens of thousands to several hundreds of classes). Similarly, the step of inspecting a substrate after polishing / cleaning has a higher degree of cleanliness (for example,
Hundreds to tens of classes) are required. Therefore, the upper clean room 1 is used for an inspection process, and the lower clean room 2 is used for a polishing / cleaning process. In order to maintain the cleanliness of the upper clean room 1 in a class of several hundred to several tens, the number of ventilations is several hundred times. In order to maintain the cleanliness of the lower clean room 2 in the class of tens of thousands to 1,000, the number of ventilations is set to 30 to one hundred and several tens times.

As described above, according to the present embodiment,
Since the upper clean room 1 is of a semi-downflow type in which a plurality of exhaust ports 7 are appropriately arranged on the floor 6, the exhaust duct 8 communicating with the exhaust port 7 of the upper clean room 1 is connected to the air supply duct 13 of the lower clean room 2. Since it can be disposed in a duct space and a dedicated space for the exhaust passage of the upper clean room 1 is not required, the height of the building can be reduced accordingly. And lower clean room 2
Because of the ceiling air supply and wall exhaust type, it is not necessary to provide a floor exhaust passage below the floor, so that the height of the building can be kept low from that surface as well.

The air supply duct 4 of the upper clean room 1
And the exhaust ducts 10 and 11 and the air supply duct 13 and the exhaust duct 17 of the lower clean room 2 were individually led out of the clean room, and these ducts were individually connected to the clean air supply device. Can be operated individually. That is, when it is desired to use only one of the clean rooms, the use of the other can be stopped by appropriately operating an opening / closing means such as a damper provided in the air supply duct.

As a result, it is possible to avoid waste of operation power due to unnecessary filter loss in the clean room and waste of power for air conditioning. In addition, control of cleanliness based on the number of times of replacement of ventilation and control of air conditioning such as room temperature can be performed in units of a clean room, so that excellent usability can be achieved.

[0021]

As described above, according to the present invention,
The overall height of the two-story clean room building can be reduced, and the operation can be improved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a second-floor type clean room according to an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Upper clean room 2 Lower clean room 3,12 Ceiling 4,13 Air supply duct 5,14 Air supply port 6,18 Floor 7,10,16 Exhaust port 8,11,17 Exhaust duct 22 High-performance filter

Continuation of the front page (72) Inventor Shimada ▲ Yu ▼ 2 43-3 Harumi-cho, Tomakomai-shi, Hokkaido F-term (reference) in Tomakomai Nippon Light Metal Co., Ltd. 3L058 BE02 BF01 BF03 BF06 BF07 BG01 BG03 BG04

Claims (3)

[Claims] 1. An air supply duct disposed in a space above a ceiling, a plurality of air inlets provided on the ceiling in communication with the air supply duct, and a plurality of air outlets provided on the floor. An upper clean room having an exhaust duct provided in communication with the exhaust port; an air supply duct provided in a space above the ceiling; and a plurality of air supply provided in the ceiling in communication with the air supply duct. A lower clean room having an outlet, a plurality of exhaust ports provided at a low position on the wall, and an exhaust duct provided in communication with the exhaust ports, and supplying an exhaust duct of the upper clean room to an air supply of the lower clean room. A two-story clean room, which is installed in the duct space of the duct, and each air supply duct and each exhaust duct are individually led out of the clean room. 2. The two-story clean room according to claim 1, wherein an exhaust port is provided at a lower position of a wall of the upper clean room, and an exhaust duct is provided to communicate with the exhaust port. 3. The cleanliness of the upper clean room is in a class of 1,000 or more.
The cleanliness of the lower clean room is in the range of tens of thousands
3. The two-story clean room according to claim 2, wherein the number is in the range of one thousand.