JP2000050394A - Electret condenser microphone - Google Patents

Electret condenser microphone

Info

Publication number
JP2000050394A
JP2000050394A JP10209774A JP20977498A JP2000050394A JP 2000050394 A JP2000050394 A JP 2000050394A JP 10209774 A JP10209774 A JP 10209774A JP 20977498 A JP20977498 A JP 20977498A JP 2000050394 A JP2000050394 A JP 2000050394A
Authority
JP
Japan
Prior art keywords
back electrode
condenser microphone
capsule
electret condenser
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10209774A
Other languages
Japanese (ja)
Other versions
JP3375284B2 (en
Inventor
Yoshiaki Obayashi
義昭 大林
Mamoru Yasuda
護 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hosiden Corp
Original Assignee
Hosiden Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hosiden Corp filed Critical Hosiden Corp
Priority to JP20977498A priority Critical patent/JP3375284B2/en
Publication of JP2000050394A publication Critical patent/JP2000050394A/en
Application granted granted Critical
Publication of JP3375284B2 publication Critical patent/JP3375284B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To reduce deposition of fine dusts onto an electret dielectric film and to simplify the assembly. SOLUTION: This microphone is provided with a capsule 11 made of a metallic material and having a front plate 12, a diaphragm 16 adhered to a diaphragm ring 15, an electret dielectric film 191 adhered and formed to an outer surface of a cup shaped rear electrode 181, a ring spacer 17, a printed circuit board 42 with an IC element 50 having an impedance conversion circuit 24 mounted thereon, and the diaphragm ring 15 is in contact with the front face plate 12 and the diaphragm 16, the ring spacer 17, the cup shaped rear electrode 181 and the printed circuit board 42 are contained in the capsule 11 in this order and a rear end of the capsule 11 is bent and caulked to a lower end of the printed board 42.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、エレクトレット
コンデンサマイクロホンに関し、特に、背極をカップ状
背極に形成してその上表面にエレクトレット誘電体膜を
被着形成した構成を採用して別体の背極ホルダを不用と
したエレクトレットコンデンサマイクロホンに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electret condenser microphone, and more particularly, to a separate back electrode formed by forming a back electrode into a cup-shaped back electrode and applying an electret dielectric film on an upper surface thereof. The present invention relates to an electret condenser microphone that does not require a back pole holder.

【0002】[0002]

【従来の技術】従来例を図を参照して説明する。この発
明の実施の形態を図2を参照して説明する。図2におい
て、カプセル11はアルミニウムの如き金属の円筒体よ
り成る。カプセル11の一端面はその前面板12により
閉塞されている。前面板12の中心には音孔である中心
孔13が形成されている。カプセル11内には、金属材
料より成る振動膜リング15に張り付けられた振動膜1
6が収容され、振動膜リング15は前面板12に電気機
械的に接触している。背極18の上表面にはエレクトレ
ット誘電体膜19が被着形成されている。27は背極1
8に貫通形成された背極孔である。振動膜16は絶縁材
料より成るリング状のスペーサ17を介して背極18上
表面のエレクトレット誘電体膜19と対向取り付けられ
ている。40は合成樹脂よりなる背極ホルダである。背
極ホルダ40の上端部には全周に亘って段部41が形成
され、背極18を嵌合固定されている。背極ホルダ40
の中央部には背室28が形成されている。50’は後で
説明されるICチップであり、背極ホルダ40に取り付
けられている。背極ホルダ40下面には出力端子51お
よびアース端子52が形成され、ICチップ50’から
リード線が導出接続している。ICチップ50’から更
にゲート53が導出され、背極18に接続せしめられて
いる。
2. Description of the Related Art A conventional example will be described with reference to the drawings. An embodiment of the present invention will be described with reference to FIG. In FIG. 2, the capsule 11 is formed of a metal cylinder such as aluminum. One end surface of the capsule 11 is closed by the front plate 12. A center hole 13 which is a sound hole is formed at the center of the front plate 12. In the capsule 11, a vibrating membrane 1 attached to a vibrating membrane ring 15 made of a metal material is provided.
6 is accommodated, and the vibrating membrane ring 15 is in electromechanical contact with the front plate 12. An electret dielectric film 19 is formed on the upper surface of the back electrode 18. 27 is back pole 1
8 is a back electrode hole penetratingly formed. The vibrating film 16 is mounted to face the electret dielectric film 19 on the upper surface of the back electrode 18 via a ring-shaped spacer 17 made of an insulating material. Reference numeral 40 denotes a back electrode holder made of a synthetic resin. At the upper end of the back electrode holder 40, a step portion 41 is formed over the entire circumference, and the back electrode 18 is fitted and fixed. Back pole holder 40
The back room 28 is formed in the center part of. Reference numeral 50 'denotes an IC chip described later, which is attached to the back pole holder 40. An output terminal 51 and a ground terminal 52 are formed on the lower surface of the back pole holder 40, and a lead wire is led out and connected from the IC chip 50 '. A gate 53 is further led out of the IC chip 50 ′ and connected to the back pole 18.

【0003】図3を参照して説明するに、背極ホルダ4
0に取付けられるICチップ50’はインピーダンス変
換回路とより成る。このインピーダンス変換回路は電界
効果トランジスタ54、抵抗55、抵抗56により構成
される。以上のエレクトレットコンデンサマイクロホン
を組み立てるには、カプセル11内に振動膜リング1
5、振動膜16、スペーサ17を収容し、更に、背極1
8の上表面に被着形成されているFEP膜に電子ビーム
或いはコロナ放電を照射してこれをエレクトレット誘電
体膜19に構成し、背極18を背極ホルダ40の段部4
1に嵌合して一体化されたものをカプセル11に組み込
み、背極ホルダ40の下端面に対してカプセル11の後
方端部を屈曲かしめつけることにより背極ホルダ40を
カプセル11内に機械的に収容固定する。
[0003] Referring to FIG.
The IC chip 50 'attached to 0 comprises an impedance conversion circuit. This impedance conversion circuit includes a field effect transistor 54, a resistor 55, and a resistor 56. In order to assemble the above electret condenser microphone, the diaphragm 1
5, the diaphragm 16 and the spacer 17 are accommodated.
An electron beam or corona discharge is applied to the FEP film deposited on the upper surface of the back electrode 8 to form an electret dielectric film 19, and the back electrode 18 is connected to the step 4 of the back electrode holder 40.
1 is integrated into the capsule 11 and the back end of the capsule 11 is bent and crimped against the lower end surface of the back electrode holder 40 to mechanically move the back electrode holder 40 into the capsule 11. To be fixed.

【0004】ここで、エレクトレットコンデンサマイク
ロホンの動作について説明するに、エレクトレット誘電
体膜19が上面に形成される金属材料より成る背極18
が一方の電極を構成し、金属材料より成る振動膜16が
他方の電極を構成している。この一方の電極である背極
18はゲート端子53を介してインピーダンス変換回路
を構成する電界効果トランジスタ54のゲートに接続す
る。他方の電極である振動膜16は金属材料より成る振
動膜リング15、カプセル11および図示されない導線
を介してアース端子52に電気接続している。音孔であ
る中心孔13を介して音響振動がマイクロホン内に進入
すると、これに起因して振動膜16は振動し、この振動
に対応する振動膜16と背極18との間の電気容量は変
化し、この変化を電気信号として出力する。
Here, the operation of the electret condenser microphone will be described. The back electrode 18 made of a metal material on which the electret dielectric film 19 is formed on the upper surface is described.
Constitute one electrode, and the vibrating film 16 made of a metal material constitutes the other electrode. The back electrode 18, which is one electrode, is connected to the gate of a field effect transistor 54 forming an impedance conversion circuit via a gate terminal 53. The vibrating membrane 16, which is the other electrode, is electrically connected to a ground terminal 52 via a vibrating membrane ring 15, a capsule 11, and a conductor (not shown) made of a metal material. When acoustic vibration enters the microphone through the central hole 13 which is a sound hole, the vibration film 16 vibrates due to this, and the electric capacitance between the vibration film 16 and the back pole 18 corresponding to this vibration is And outputs this change as an electric signal.

【0005】[0005]

【発明が解決しようとする課題】エレクトレットコンデ
ンサマイクロホンの従来例において、問題は背極18と
背極ホルダ40とが別体に構成されていて、エレクトレ
ット誘電体膜19が被着形成されている背極18を別体
の背極ホルダ40に嵌合固定する点である。この作業工
程の内には、背極18に被着形成されているFEP膜に
電子ビーム或いはコロナ放電を照射してこれをエレクト
レット誘電体膜19に変化させ、これを背極ホルダ40
の段部41にはめ込み、これをカプセル11内に組み込
むことその他の作業が必要であり、これらを実施してい
る際に、エレクトレット誘電体膜19には微細な塵埃が
付着すると共に他の物体が接触して分極電位が低下する
恐れが大きく、作業工程管理上および品質管理上の困難
が多く含まれる。
In the conventional example of the electret condenser microphone, the problem is that the back electrode 18 and the back electrode holder 40 are formed separately and the back electrode 18 on which the electret dielectric film 19 is formed is formed. The point is that the pole 18 is fitted and fixed to a separate back pole holder 40. In this operation process, the FEP film formed on the back electrode 18 is irradiated with an electron beam or corona discharge to change the FEP film into the electret dielectric film 19, and this is changed to the back electrode holder 40.
It is necessary to perform other operations such as fitting into the step portion 41 and incorporating the same into the capsule 11. During these operations, fine dust adheres to the electret dielectric film 19 and other objects are removed. There is a great risk that the polarization potential will decrease due to contact, and there are many difficulties in work process management and quality control.

【0006】そして、このエレクトレットコンデンサマ
イクロホンの実際の形状寸法は直径が6mm、厚さが1
mmのオーダーの微小なものであり、これを組み立てる
に際して、mmのオーダーの微小な構成部品を多数手作
業により取り扱うことはそれ程容易なことではない。特
に、振動膜リング15、振動膜16、スペーサ17、背
極18は厚さの薄い微小な部品ばかりであるので、この
近傍の組み立て作業において製造上のトラブルを発生す
る恐れは大きく、構成部品の入れ忘れその他のトラブル
を発生することもある。
The actual shape and dimensions of this electret condenser microphone are 6 mm in diameter and 1 mm in thickness.
It is a minute thing of the order of mm, and when assembling it, it is not so easy to handle a large number of minute components of the order of mm by hand. In particular, since the vibrating membrane ring 15, the vibrating membrane 16, the spacer 17, and the back electrode 18 are only small parts having a small thickness, there is a great possibility that a trouble in manufacturing will occur in an assembling operation in the vicinity thereof, and Missing or other troubles may occur.

【0007】この発明は、上述の問題を解消したエレク
トレットコンデンサマイクロホンを提供するものであ
る。
[0007] The present invention provides an electret condenser microphone that solves the above-mentioned problems.

【0008】[0008]

【課題を解決するための手段】請求項1:金属材料より
成り前面板12を有するカプセル11を具備し、振動膜
リング15に張り付けられた振動膜16を具備し、カッ
プ状背極181の外表面に被着形成されたエレクトレッ
ト誘電体膜191を具備し、リング状スペーサ17を具
備し、インピーダンス変換回路24を有するIC素子5
0を取り付けた配線基板42を具備し、前面板12に振
動膜リング15を接触せしめて振動膜16、リング状ス
ペーサ17、カップ状背極181、配線基板42をこの
順にカプセル11に収容し、配線基板42の下端面に対
してカプセル11の後方端部を屈曲かしめつけたエレク
トレットコンデンサマイクロフォンを構成した。
Means for Solving the Problems Claims 1 includes a capsule 11 made of a metal material and having a front plate 12, a vibrating membrane 16 attached to a vibrating membrane ring 15, and an outside of a cup-shaped back electrode 181. IC element 5 including electret dielectric film 191 formed on the surface, including ring-shaped spacer 17, and impedance conversion circuit 24
0 is attached, the vibrating membrane ring 15 is brought into contact with the front plate 12, and the vibrating membrane 16, the ring-shaped spacer 17, the cup-shaped back electrode 181, and the wiring board 42 are housed in the capsule 11 in this order. An electret condenser microphone in which the rear end of the capsule 11 was bent and crimped to the lower end surface of the wiring board 42 was formed.

【0009】そして、請求項2:請求項1に記載される
エレクトレットコンデンサマイクロフォンにおいて、カ
ップ状背極181は金属薄板の片面にFEPフィルムを
被着形成し、この金属薄板にFEPフィルムを外側にし
て絞り加工を施してカップ状に成型し、FEPフィルム
をエレクトレット化したものであるエレクトレットコン
デンサマイクロフォンを構成した。
Claim 2: In the electret condenser microphone according to claim 1, the cup-shaped back electrode 181 is formed by coating an FEP film on one surface of a thin metal plate, and setting the FEP film on the thin metal plate with the FEP film outside. An electret condenser microphone was formed by drawing and forming into a cup, and the FEP film was electretized.

【0010】また、請求項3:請求項2に記載されるエ
レクトレットコンデンサマイクロフォンにおいて、金属
薄板はアルミニウム薄板であるエレクトレットコンデン
サマイクロフォンを構成した。更に、請求項4:請求項
3に記載されるエレクトレットコンデンサマイクロフォ
ンにおいて、アルミニウム薄板の厚さは0. 3mm程度
とし、FEPフィルムの厚さは12. 5μm〜25μm
程度としたエレクトレットコンデンサマイクロフォンを
構成した。
Further, in the electret condenser microphone according to the present invention, the metal thin plate is an electret condenser microphone which is an aluminum thin plate. Further, in the electret condenser microphone according to claim 3, the thickness of the aluminum thin plate is about 0.3 mm, and the thickness of the FEP film is 12.5 μm to 25 μm.
An electret condenser microphone of about a degree was constructed.

【0011】[0011]

【発明の実施の形態】この発明の実施の形態を図1を参
照して説明する。図1において、従来例の参照符号と共
通する参照符号は共通する部材を示す。カプセル11は
アルミニウムの如き金属の円筒体より成る。カプセル1
1の一端面はその前面板12により閉塞されている。前
面板12の中心には音孔である中心孔13が形成されて
いる。カプセル11内には、金属材料より成る振動膜リ
ング15に張り付けられた振動膜16が収容され、振動
膜リング15は前面板12に電気機械的に接触してい
る。
An embodiment of the present invention will be described with reference to FIG. In FIG. 1, reference numerals common to those of the conventional example indicate common members. The capsule 11 is formed of a metal cylinder such as aluminum. Capsule 1
One end face of 1 is closed by its front plate 12. A center hole 13 which is a sound hole is formed at the center of the front plate 12. A vibrating film 16 attached to a vibrating film ring 15 made of a metal material is accommodated in the capsule 11, and the vibrating film ring 15 is in electromechanical contact with the front plate 12.

【0012】181はこの発明によるカップ状背極を示
す。このカップ状背極181はその外表面にエレクトレ
ット誘電体膜191が被着形成されている。このエレク
トレット誘電体膜191が被着形成されたカップ状背極
181は、厚さ0. 3mm程度の金属薄板、特にアルミ
ニウム薄板の片面に厚さ12. 5μm〜25μm程度の
FEPフィルムを被着形成し、このアルミニウム薄板に
FEPフィルムを外側にして絞り加工を施してカップ状
に成型し、FEP膜に電子ビーム或いはコロナ放電を照
射してFEPフィルムをエレクトレット誘電体膜191
にすることにより構成される。エレクトレット誘電体膜
191が被着形成されたカップ状背極181には両者を
貫通して背極孔27が形成されている。カップ状背極1
81の内側は背室28を形成している。
Reference numeral 181 denotes a cup-shaped back electrode according to the present invention. An electret dielectric film 191 is formed on the outer surface of the cup-shaped back electrode 181. The cup-shaped back electrode 181 on which the electret dielectric film 191 is adhered is formed by applying a FEP film having a thickness of about 12.5 μm to 25 μm on one surface of a thin metal sheet having a thickness of about 0.3 mm, particularly an aluminum thin plate. Then, the aluminum thin plate is subjected to drawing processing with the FEP film on the outside and formed into a cup shape, and the FEP film is irradiated with an electron beam or corona discharge to convert the FEP film into an electret dielectric film 191.
It is constituted by making it. A back electrode hole 27 is formed in the cup-shaped back electrode 181 on which the electret dielectric film 191 is formed so as to penetrate both. Cup-shaped back electrode 1
The inside of 81 forms a back chamber 28.

【0013】振動膜16は絶縁材料より成るリング状ス
ペーサ17を介してカップ状背極181上表面のエレク
トレット誘電体膜191と対向取り付けられている。4
2は配線基板である。配線基板42の上表面には接触片
58が形成されると共に、IC素子50が取り付けられ
ている。配線基板42の下表面には出力端子51および
アース端子52が形成され、IC素子50からリード線
が導出接続している。IC素子50から更にゲート53
が導出され、接触片58を介してカップ状背極181に
接続せしめられている。
The vibrating film 16 is mounted to face the electret dielectric film 191 on the upper surface of the cup-shaped back electrode 181 via a ring-shaped spacer 17 made of an insulating material. 4
2 is a wiring board. A contact piece 58 is formed on the upper surface of the wiring board 42, and the IC element 50 is attached to the contact piece 58. An output terminal 51 and a ground terminal 52 are formed on the lower surface of the wiring board 42, and lead wires are led out from the IC element 50 and connected. Gate 53 from IC element 50
Is led out and connected to the cup-shaped back electrode 181 via the contact piece 58.

【0014】図3を参照して説明するに、配線基板42
に取り付けられるIC素子50はインピーダンス変換回
路とより成る。このインピーダンス変換回路は電界効果
トランジスタ54、抵抗55、抵抗56により構成さ
れ、これに更に高増幅率増幅器が接続されたものがIC
素子50である。以上のエレクトレットコンデンサマイ
クロホンを組み立てるには、カプセル11内に振動膜リ
ング15、振動膜16、スペーサ17を収容する。次い
で、カップ状背極181の上表面に被着形成されている
FEP膜に電子ビーム或いはコロナ放電を照射してこれ
をエレクトレット誘電体膜191に構成し、このカップ
状背極181をそのまま直ちにカプセル11に組み込
み、更に、IC素子50を取り付け接続した配線基板4
2を接触片58をカップ状背極181に接触した状態で
カプセル11に組み込み、配線基板42の下面に対して
カプセル11の後方端部を屈曲かしめつける。これにに
より、構成部品は全てカプセル11内に機械的に収容固
定される。
Referring to FIG. 3, the wiring board 42
The IC element 50 attached to the device comprises an impedance conversion circuit. This impedance conversion circuit is composed of a field effect transistor 54, a resistor 55, and a resistor 56, and further connected to a high amplification factor amplifier is an IC.
Element 50. In order to assemble the above electret condenser microphone, the diaphragm 11, the diaphragm 16, and the spacer 17 are accommodated in the capsule 11. Next, the FEP film formed on the upper surface of the cup-shaped back electrode 181 is irradiated with an electron beam or corona discharge to form an electret dielectric film 191. The cup-shaped back electrode 181 is directly encapsulated as it is. 11, and further, a wiring board 4 to which an IC element 50 is attached and connected.
2 is assembled into the capsule 11 with the contact piece 58 in contact with the cup-shaped back electrode 181, and the rear end of the capsule 11 is bent and crimped against the lower surface of the wiring board 42. Thereby, all the components are mechanically housed and fixed in the capsule 11.

【0015】[0015]

【発明の効果】以上の通りであって、この発明に依れ
ば、背極をカップ状背極に形成してその上表面にエレク
トレット誘電体膜191を被着形成した構成を採用して
いる。これにより、マイクロホンの組み立てにおけるエ
レクトレット誘電体膜191の取り扱いは、カップ状背
極181の上表面に被着形成されているFEP膜をエレ
クトレット化し、このカップ状背極181をそのまま直
ちにカプセル11に組み込むことだけであり、従来例の
場合と比較して大きく簡略化される。その結果、エレク
トレット誘電体膜191に微細な塵埃が付着する機会は
少なくなると共に他の物体が接触して分極電位を低下
し、不安定化する恐れも小さくなり、作業工程管理上お
よび品質管理上も好都合である。
As described above, according to the present invention, the back electrode is formed as a cup-shaped back electrode, and the electret dielectric film 191 is formed on the upper surface thereof. . As a result, the handling of the electret dielectric film 191 in assembling the microphone converts the FEP film deposited on the upper surface of the cup-shaped back electrode 181 into an electret, and immediately incorporates the cup-shaped back electrode 181 into the capsule 11 as it is. This is greatly simplified as compared with the conventional example. As a result, the chances of fine dust adhering to the electret dielectric film 191 are reduced, and the possibility that other objects come into contact with each other to lower the polarization potential and destabilize is reduced, thereby reducing work process management and quality control. Is also convenient.

【0016】そして、微小な部品ばかりを取り扱う振動
膜リング15、振動膜16、スペーサ17、エレクトレ
ット誘電体膜191の近傍においてこの発明のカップ状
背極が従来は別体であった背極ホルダの作用も果して背
極ホルダを不用としたことにより、組み立て作業を容易
とすると共にエレクトレットコンデンサマイクロホンの
小型化にも貢献している。
In the vicinity of the vibrating membrane ring 15, the vibrating membrane 16, the spacer 17, and the electret dielectric film 191 handling only minute components, the cup-shaped back electrode of the present invention is a back electrode holder which is conventionally a separate body. By eliminating the need for the back electrode holder, it also facilitates the assembly work and contributes to the miniaturization of the electret condenser microphone.

【0017】また、カップ状背極181をアルミニウム
の薄板により構成することにより、エレクトレットコン
デンサマイクロホンを高温領域における動作に耐えるも
のとした。
Further, by forming the cup-shaped back electrode 181 from a thin aluminum plate, the electret condenser microphone can withstand operation in a high temperature region.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例を説明する図。FIG. 1 illustrates an embodiment.

【図2】従来例を説明する図。FIG. 2 illustrates a conventional example.

【図3】エレクトレットコンデンサマイクロホンの電気
回路を説明する図。
FIG. 3 is a diagram illustrating an electric circuit of the electret condenser microphone.

【符号の説明】[Explanation of symbols]

11 カプセル 12 前面板 13 中心孔 15 振動膜リング 16 振動膜 17 スペーサ 18 背極 181 カップ状背極 19 エレクトレット誘電体膜 191 エレクトレット誘電体膜 27 背極孔 28 背室 40 背極ホルダ 41 段部 42 配線基板 50 IC素子 51 出力端子 52 アース端子 53 ゲート 54 電界効果トランジスタ 55 抵抗 56 抵抗 58 接触片 DESCRIPTION OF SYMBOLS 11 Capsule 12 Front plate 13 Center hole 15 Vibrating film ring 16 Vibrating film 17 Spacer 18 Back electrode 181 Cup-shaped back electrode 19 Electret dielectric film 191 Electret dielectric film 27 Back electrode hole 28 Back chamber 40 Back electrode holder 41 Step 42 Wiring board 50 IC element 51 Output terminal 52 Ground terminal 53 Gate 54 Field effect transistor 55 Resistance 56 Resistance 58 Contact piece

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 金属材料より成り前面板を有するカプセ
ルを具備し、振動膜リングに張り付けられた振動膜を具
備し、カップ状背極の外表面に被着形成されたエレクト
レット誘電体膜を具備し、リング状スペーサを具備し、
インピーダンス変換回路を有するIC素子を取り付けた
配線基板を具備し、前面板に振動膜リングを接触せしめ
て振動膜、リング状スペーサ、カップ状背極、配線基板
をこの順にカプセルに収容し、配線基板の下端面に対し
てカプセルの後方端部を屈曲かしめつけたことを特徴と
するエレクトレットコンデンサマイクロフォン。
1. A capsule made of a metal material and having a front plate, a vibrating film attached to a vibrating film ring, and an electret dielectric film formed on an outer surface of a cup-shaped back electrode. And a ring-shaped spacer,
A wiring board equipped with an IC element having an impedance conversion circuit is provided. A vibration membrane ring is brought into contact with a front plate, and a vibration membrane, a ring-shaped spacer, a cup-shaped back electrode, and a wiring board are housed in a capsule in this order, and the wiring board is An electret condenser microphone characterized in that the rear end of the capsule is bent and crimped against the lower end surface of the electret condenser microphone.
【請求項2】 請求項1に記載されるエレクトレットコ
ンデンサマイクロフォンにおいて、 カップ状背極は金属薄板の片面にFEPフィルムを被着
形成し、この金属薄板にFEPフィルムを外側にして絞
り加工を施してカップ状に成型し、FEPフィルムをエ
レクトレット化したものであることを特徴とするエレク
トレットコンデンサマイクロフォン。
2. The electret condenser microphone according to claim 1, wherein the cup-shaped back electrode is formed by applying an FEP film to one surface of a thin metal plate, and drawing the thin metal plate with the FEP film on the outside. An electret condenser microphone characterized in that it is formed into a cup shape and the FEP film is electretized.
【請求項3】 請求項2に記載されるエレクトレットコ
ンデンサマイクロフォンにおいて、 金属薄板はアルミニウム薄板であることを特徴とするエ
レクトレットコンデンサマイクロフォン。
3. The electret condenser microphone according to claim 2, wherein the metal thin plate is an aluminum thin plate.
【請求項4】 請求項3に記載されるエレクトレットコ
ンデンサマイクロフォンにおいて、 アルミニウム薄板の厚さは0. 3mm程度とし、FEP
フィルムの厚さは12. 5μm〜25μm程度としたこ
とを特徴とするエレクトレットコンデンサマイクロフォ
ン。
4. The electret condenser microphone according to claim 3, wherein the thickness of the aluminum thin plate is about 0.3 mm,
An electret condenser microphone characterized in that the film has a thickness of about 12.5 μm to 25 μm.
JP20977498A 1998-07-24 1998-07-24 Electret condenser microphone Expired - Lifetime JP3375284B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20977498A JP3375284B2 (en) 1998-07-24 1998-07-24 Electret condenser microphone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20977498A JP3375284B2 (en) 1998-07-24 1998-07-24 Electret condenser microphone

Publications (2)

Publication Number Publication Date
JP2000050394A true JP2000050394A (en) 2000-02-18
JP3375284B2 JP3375284B2 (en) 2003-02-10

Family

ID=16578397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20977498A Expired - Lifetime JP3375284B2 (en) 1998-07-24 1998-07-24 Electret condenser microphone

Country Status (1)

Country Link
JP (1) JP3375284B2 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001082649A1 (en) * 2000-04-26 2001-11-01 Mitsubishi Denki Kabushiki Kaisha Semiconductor electret capacitor microphone
JP2002345087A (en) * 2001-05-16 2002-11-29 Citizen Electronics Co Ltd Elecret condenser microphone
JP2003047095A (en) * 2001-07-31 2003-02-14 Matsushita Electric Ind Co Ltd Capacitor microphone and manufacturing method therefor
JP2006033091A (en) * 2004-07-12 2006-02-02 Jepico Corp Sensor unit and sensor signal processing circuit
US7043035B2 (en) 1999-12-09 2006-05-09 Sonionmicrotronic Nederland B.V. Miniature microphone
US7062058B2 (en) 2001-04-18 2006-06-13 Sonion Nederland B.V. Cylindrical microphone having an electret assembly in the end cover
US7136496B2 (en) 2001-04-18 2006-11-14 Sonion Nederland B.V. Electret assembly for a microphone having a backplate with improved charge stability
US7184563B2 (en) 2003-03-04 2007-02-27 Knowles Electronics Llc. Electret condenser microphone
WO2007032579A1 (en) * 2005-09-15 2007-03-22 Bse Co., Ltd. Electret condenser microphone for surface mounting and main board including the same
WO2007032581A1 (en) * 2005-09-15 2007-03-22 Bse Co., Ltd Silicon based condenser microphone
WO2007032582A1 (en) * 2005-09-15 2007-03-22 Bse Co., Ltd Directional silicon condenser microphone
US7239714B2 (en) 2001-10-09 2007-07-03 Sonion Nederland B.V. Microphone having a flexible printed circuit board for mounting components
KR100812690B1 (en) * 2006-04-27 2008-03-13 (주) 대일씨티 Condenser Microphone
US8280082B2 (en) 2002-10-08 2012-10-02 Sonion Nederland B.V. Electret assembly for a microphone having a backplate with improved charge stability
JP2013031164A (en) * 2011-06-24 2013-02-07 Toho Kasei Kk Small acoustic sensor
KR101505420B1 (en) 2013-04-05 2015-03-26 싸니코전자 주식회사 Electret Condenser Microphone

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7043035B2 (en) 1999-12-09 2006-05-09 Sonionmicrotronic Nederland B.V. Miniature microphone
WO2001082649A1 (en) * 2000-04-26 2001-11-01 Mitsubishi Denki Kabushiki Kaisha Semiconductor electret capacitor microphone
US7684575B2 (en) 2001-04-18 2010-03-23 Sonion Nederland B.V. Electret assembly for a microphone having a backplate with improved charge stability
US7286680B2 (en) 2001-04-18 2007-10-23 Sonion Nederland B.V. Cylindrical microphone having an electret assembly in the end cover
US7062058B2 (en) 2001-04-18 2006-06-13 Sonion Nederland B.V. Cylindrical microphone having an electret assembly in the end cover
US7136496B2 (en) 2001-04-18 2006-11-14 Sonion Nederland B.V. Electret assembly for a microphone having a backplate with improved charge stability
JP4528461B2 (en) * 2001-05-16 2010-08-18 シチズン電子株式会社 Electret condenser microphone
JP2002345087A (en) * 2001-05-16 2002-11-29 Citizen Electronics Co Ltd Elecret condenser microphone
JP2003047095A (en) * 2001-07-31 2003-02-14 Matsushita Electric Ind Co Ltd Capacitor microphone and manufacturing method therefor
JP4697763B2 (en) * 2001-07-31 2011-06-08 パナソニック株式会社 Condenser microphone
US7239714B2 (en) 2001-10-09 2007-07-03 Sonion Nederland B.V. Microphone having a flexible printed circuit board for mounting components
US8280082B2 (en) 2002-10-08 2012-10-02 Sonion Nederland B.V. Electret assembly for a microphone having a backplate with improved charge stability
US7184563B2 (en) 2003-03-04 2007-02-27 Knowles Electronics Llc. Electret condenser microphone
JP2006033091A (en) * 2004-07-12 2006-02-02 Jepico Corp Sensor unit and sensor signal processing circuit
KR100740462B1 (en) 2005-09-15 2007-07-18 주식회사 비에스이 Directional silicon condenser microphone
WO2007032582A1 (en) * 2005-09-15 2007-03-22 Bse Co., Ltd Directional silicon condenser microphone
WO2007032581A1 (en) * 2005-09-15 2007-03-22 Bse Co., Ltd Silicon based condenser microphone
WO2007032579A1 (en) * 2005-09-15 2007-03-22 Bse Co., Ltd. Electret condenser microphone for surface mounting and main board including the same
KR100812690B1 (en) * 2006-04-27 2008-03-13 (주) 대일씨티 Condenser Microphone
JP2013031164A (en) * 2011-06-24 2013-02-07 Toho Kasei Kk Small acoustic sensor
KR101505420B1 (en) 2013-04-05 2015-03-26 싸니코전자 주식회사 Electret Condenser Microphone

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