JP2000046534A - Moire device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the precision of an image magnification correction and sensitivity correction for accurate solid shape information of an object which is to be measured by, related to a lattice projection type moire device provided with a fringe scan function, automatically selecting a range-finding reference point on the object at observation of moire fringe, and automatically measuring a distance between the range-finding reference point and a imaging lens so that a distance between the object and the imaging lens of an observation optical system is accurately measured. SOLUTION: A moire fringe measurement is performed while a projection lattice 40 is fringe-scanned, a 3-dimension data of an object 2 which is to be measured is calculated from the measuring result, a range-finding reference point P (X, Y, Z) of the object 2 is selected from the 3-dimension data, and a range L from the range-finding reference point to an imaging lens 44 is automatically measured. The automatic measurement is performed by moving a lens 52L of a CCD camera 52 in its optical axis direction to detect the peak of video signal output of the CCD.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moire device of the so-called lattice projection type, and more particularly to a moire device having a fringe scanning function.

[0002]

2. Description of the Related Art Conventionally, a moiré device has been known as a device for easily taking in three-dimensional shape information of an object to be measured in a short time. There are two types of moiré devices: a grid irradiation type and a grid projection type. The latter has a large degree of freedom in measuring an object to be measured because a large reference grid like the former is not required.

The grating projection type moiré device includes a projection optical system and an observation optical system having optical axes parallel to each other. The projection optical system projects an image of the projection grating onto an object to be measured and observes the observation optical system. The system is configured so that a deformed grating image formed on the object to be measured by the system is formed on an observation reference grating, and the resulting moire fringes are observed.
At this time, if the fringe scan is performed to move the projection grating in a direction orthogonal to the grating lines of both gratings in a plane orthogonal to both optical axes, the directionality of the change of the moire fringes with respect to the movement of the projection grating can be observed By doing so, it is possible to determine the unevenness of the object to be measured and to perform phase connection, so that it is possible to obtain information on the three-dimensional shape of the object to be measured (for example, Japanese Patent Application No. Hei 10
-32214).

[0004]

The moiré fringes appearing on the monitor for observing moiré fringes are taken in through the observation optical system, and are formed on the object to be measured at a position close to the photographing lens of the observation optical system. The actual depth dimensions of the moiré fringe and the moiré fringe formed at a distant position are different from each other even if they have the same lattice line interval.
Therefore, in order to obtain accurate three-dimensional shape information of the measured object, it is necessary to correct the image magnification and the sensitivity according to the position of each point on the measured object in the depth direction.

The image magnification correction and the sensitivity correction must be performed in accordance with the absolute distance between each point on the measured object and the photographing lens of the observation optical system. Since the data is only relative position data on the measured object, it is necessary to measure the distance between the measured object and the photographing lens separately from the observation of the moire fringes.

Conventionally, this distance measurement has been performed manually by applying a measure between an appropriate point on an object to be measured and a photographing lens and reading the scale. However, there is a problem that it is difficult to accurately measure a distance, and therefore, it is not possible to accurately correct an image magnification.

The present invention has been made in view of such circumstances, and is required for a grid projection type moiré apparatus having a fringe scanning function to obtain accurate three-dimensional shape information of a measured object. It is an object of the present invention to provide a moiré device capable of improving the accuracy of image magnification correction and sensitivity correction.

[0008]

The moiré device of the present invention comprises:
In order to achieve the above object, by automatically selecting a distance measurement reference point on the measured object at the time of moiré fringe observation and automatically measuring a distance between the distance measurement reference point and the photographing lens. It was done.

That is, the present invention comprises a projection optical system and an observation optical system having optical axes parallel to each other, wherein the projection optical system projects an image of a projection grating onto an object to be measured, and the observation optical system The deformed grating image formed on the object to be measured is formed on an observation reference grating, and the resulting moire fringes are observed, and the projection grating is arranged in a plane orthogonal to both optical axes. In the moiré apparatus configured to move the projection grating in a direction orthogonal to the grid lines, the three-dimensional data of the object to be measured is calculated from the moiré fringes observed while moving the projection grating. A distance measurement reference point on the object to be measured is selected from the data, and the distance between the distance measurement reference point and the photographing lens of the observation optical system is automatically measured. It is.

[0010] The "distance measurement reference point" can be an arbitrary point on the measured object. However, if the vertex of the measured object is set as the reference point, the image after the distance measurement is obtained. Magnification correction and sensitivity correction can be easily performed.

It is preferable that the distance measurement reference point is a vertex of the measured object.

The automatic measurement may detect the amount of reflected light from the object to be measured and perform peak detection based on the detected amount of light.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing a moiré apparatus (three-dimensional image scanner) according to an embodiment of the present invention.

As shown, the moiré apparatus 10 includes a measuring head 12, a power supply driving unit 14, a control unit 16
And a monitor 18. In the measuring head 12, three-dimensional shape information and a pattern (texture) of the measured object 2 are provided.
Information, and outputs these three-dimensional shape information and pattern information to the control unit 16 via the power supply device driving unit 14;
The control unit 16 combines the three-dimensional shape information and the pattern information to generate a three-dimensional image of the measured object 2, and displays the three-dimensional image on the monitor 18. A keyboard 20 and a mouse 22 are connected to the control unit 16, and by operating these, it is possible to perform a switching operation of the display contents such as a change in the display angle of the three-dimensional image on the monitor 18. ing.

The acquisition of the three-dimensional shape information in the measuring head 12 is performed by using a grid projection type moire topography. In FIG. 1, a lattice plane Pg indicated by a two-dot chain line in front of the measuring head 12 is a virtual reference lattice plane in the lattice projection type moire topography.

FIG. 2 is a perspective view showing the appearance of the measuring head 12, and FIG. 3 is a perspective view showing the internal structure of the measuring head 12.

As shown in these drawings, the measuring head 12 is provided with a projection optical system 26, an observation optical system 28, and a measurement object illumination system 30 in a casing 24.

The projection optical system 26 includes a projection lamp 32, a heat ray cut filter 34, a grating illumination system 38 including a condenser lens 36, a projection grating 40, and a projection lens 4.
The observation optical system 28 includes an imaging lens 44, an observation reference grating 46, and a field lens 4.
8, a television optical system 54 including a folding mirror 50 and a CCD camera 52.

The projection lens 42 and the photographing lens 44
On the front surface of the casing 24, the respective optical axes Ax1 and Ax
2 are attached so as to be parallel to each other.

The grating illumination system 38 is arranged so as to irradiate the projection grating 40 from obliquely rearward left with respect to the optical axis Ax1, and the image of the projection lamp 32 is substantially at the entrance pupil position of the projection lens 42. An image is formed. The condenser lens 36 has a size enough to cover the projection grating 40.

On the other hand, the observation reference grating 46, the field lens 48 of the television optical system 54, and the folding mirror 50 are arranged on the optical axis Ax2, and the CCD camera 52 is folded by the folding mirror 50 with respect to the optical axis Ax2. It is arranged on the optical axis folded at a right angle. The field lens 48 is arranged so that the light flux transmitted through the observation reference grating 46 is incident on the CCD camera 52 without any leakage.

Projection grating 40 and observation reference grating 46
Have grid lines extending in the vertical direction at the same pitch, and are provided in the same plane orthogonal to the optical axes Ax1 and Ax2. And the projection grating 40
Are arranged in a conjugate positional relationship with the virtual reference grid plane Pg so that the image of the projection grid 40 is formed on the virtual reference grid plane Pg (see FIG. 1).
Are also arranged in a conjugate positional relationship with the virtual reference lattice plane Pg so that the image of the virtual reference lattice plane Pg is formed on the observation reference lattice 46.

FIG. 4 is a plan view for explaining the function of the measuring head 12 as a grating projection type moiré device.

As shown in the figure, in the measuring head 12, the image of the projection grating 40 is projected onto the measured object 2 by the projection optical system 26, and formed on the measured object 2 by the observation optical system 28. Observation reference grid 4
6 is formed so as to observe moire fringes caused by the image formation.

In FIG. 4, a virtual reference lattice plane Pg indicated by a dashed-dotted line and a plurality of planes indicated by solid lines parallel to the virtual reference lattice plane Pg form moire planes. Moire fringes will be formed along the intersecting curves. In FIG. 4, the moire surface is shown by a solid line only on the near side of the virtual reference lattice plane Pg, but a plurality of moiré planes are also formed on the back side of the virtual reference lattice plane Pg. Therefore, moiré fringes are formed even when the measured object 2 is arranged so as to straddle the virtual reference lattice plane Pg back and forth.

As shown in FIG. 3, the projection grating 40 is supported by a grating feed mechanism 56, and the projection grating 40 is moved in a horizontal direction (that is, in the plane orthogonal to the optical axis Ax1). (In the direction perpendicular to). This grid feed mechanism 56
Is constituted by a pulse stage provided with a pulse motor, and causes the projection grating 40 to reciprocate (fringe scan) over a length of one phase. The reciprocating vibration may be performed using a piezoelectric element or the like instead of the pulse stage.

The movement of the projection grating 40 causes the projection grating 40
Since the phase between the light and the observation reference grating 46 changes, the moire fringes change accordingly. Therefore, the control unit 16 (see FIG. 1) samples the moire fringe image for each 1/4 phase to determine the unevenness of the measured object 2.

On the other hand, the observation reference grating 46 is supported by a grating retreat mechanism 58, and is moved in a horizontal direction in a plane orthogonal to the optical axis Ax2 by the lattice retreat mechanism 58. A moiré fringe observation position located in the optical path and a retracted position deviating from the optical path can be selectively adopted. The movement of the observation reference grid 46 is performed by manually inserting and extracting a grid retract knob 60 projecting from the right side surface of the casing 24 in the lattice retract mechanism 58. A limit switch 62 for detecting when the observation reference grid 46 has moved to the retreat position is attached to the grid retreat mechanism 58.

The moire fringe observation for taking in the three-dimensional shape information of the measured object 2 is performed with the observation reference grating 46 set at the moiré fringe observation position, but the observation reference grating 46 is retracted to the retracted position. By doing so, it becomes possible to capture a two-dimensional image of the measured object 2 on which moire fringes are not formed. Thus, the measuring head 12 captures the pattern information of the measured object 2 by capturing the two-dimensional image.

As shown in FIG.
Is provided so as to be located between the projection optical system 26 and the observation optical system 28. The illumination system 30 for the object to be measured
Is a lighting lamp 64, a heat ray cut filter 66,
A diffuser window 68 attached to the front surface of the casing 24 is provided. The light from the illumination lamp 64 is diffused and radiated forward through the heat ray cut filter 66 and the diffuser window 68.

The illumination lamp 64 is not lit when observing moire fringes, but is lit when capturing a two-dimensional image. The projection lamp 32 of the lattice illumination system 38 is turned off in conjunction with this lighting operation. This switching of lighting is performed based on a detection signal of the limit switch 62.

As described above, the lighting switching from the projection lamp 32 to the illumination lamp 64 at the time of capturing a two-dimensional image is performed while the illumination lamp 64 is not lit and the projection lamp 32 is lit. If the two-dimensional image photographing is performed in the state described above, a two-dimensional image of the measured object 2 will be photographed in a state where the image of the projection grating 40 is formed. This is to avoid this. When the illumination lamp 64 is turned on, the influence of the image of the projection grating 40 is very small even if the projection lamp 32 is kept turned on. It is not always necessary to turn off the projection lamp 32.

On the left side and the back side of the casing 24,
Cooling fans 70 and 72 are attached so that the heat generated by the projection lamp 32 and the illumination lamp 64 is discharged to the outside of the casing 24. At this time, the partitions 74 and 76 formed in the casing 24 efficiently guide the heat generated by the lamps 32 and 64 to the cooling fan 70, and further, the space between the CCD camera 52 and the partition 76. Another partition wall 78 is formed, an adiabatic path is formed between the partition walls 76 and 78, and air (heat) in the adiabatic path is cooled by the cooling fan 72.
Is to lead to. Thus, the heat generated by the lamps 32 and 64 is reliably prevented from being transmitted to the CCD camera 52, and the CCD camera 52 is protected.

As shown in FIG. 2, cool air suction holes 80 and 82 are formed above the lamps 32 and 64 on the upper surface of the casing 24, thereby increasing the heat removal efficiency of the cooling fans 70 and 72. It has become.

On the right side of the casing 24, in addition to the lattice retract knob 60, a power switch 84 and a power indicator lamp 86 are provided, and an electronic board 88 is provided on the inner side. A power supply and signal cord 90 extends from the right side surface of the casing 24, and a power supply connector 92, a control signal connector 94, and a television signal connector 96 are provided at the other end by the power supply device drive unit 14 ( 1 (see FIG. 1).

Since moire fringes appearing on the monitor 18 are captured via the observation optical system 28 of the measuring head 12, moire fringes are formed on the measured object 2 at a position close to the taking lens 44 of the observation optical system 28. The fringe and the moiré fringe formed at a distant position have different actual depth dimensions even if they have the same grid line spacing.
Therefore, in order to obtain accurate three-dimensional shape information of the measured object 2, it is necessary to correct the image magnification in accordance with the position of each point on the measured object 2 in the depth direction.

For this reason, in this embodiment, when observing moire fringes, the distance between the vertex of the object 2 and the photographing lens 44 is automatically measured, and the distance on the object 2 is measured based on the distance measurement data. The image magnification of each point is corrected. At this time, since the point to be measured on the measured object 2 is also a reference point for image magnification correction, its position in a plane (x, y plane) orthogonal to the depth direction (z direction) is determined. You need to know exactly.

Therefore, in the present embodiment, the measured object 2
A vertex of the measured object 2 is selected as an upper distance measurement reference point, and this vertex is displayed as a flag on the monitor 18.

FIG. 5 is a diagram showing a procedure of vertex selection, distance measurement, and image magnification correction performed at the time of moire fringe observation.

First, a vertex is selected by measuring moire fringes (S1). That is, after capturing an image of moire fringes while performing fringe scanning, fringe analysis of moire fringes is performed, height calculation is performed using an internally set value, and then three-dimensional data (x , Y, z), and a vertex is selected from the three-dimensional data. Next, the selected vertices are flag-displayed on the monitor 18 (S2). When the operator confirms the vertex position indicated by the flag and performs an OK input (S3), the distance between the vertex and the photographing lens 44 is automatically measured (S4). Then, after automatically inputting the distance measurement value (S5), a height calculation formula is calculated (S6), and the image magnification of each point on the measured object 2 is corrected based on the calculation result (S7). ).

FIG. 6 is a diagram showing a specific procedure of selecting a vertex based on the measurement of moire fringes in step S1.

First, the DUT 2 whose phase is shifted by 1 / 2π
Capture the image of At that time, one point P of each captured image
Focusing on (x, y), the brightness I at that point is represented by I1, I2,
If I3 and I4 are set, they can be represented as shown in FIG.

When the phase φ at this point is obtained from the four brightness data having different phases, φ = tan ^-1 {(I2-I4) / (I1-I3)}.

The phase φ is calculated for each point, and the phase calculation result is graphed as shown in FIG. The maximum value in this graph is 2π, which is a curve interrupted every 2π.

When this intermittent curve is subjected to an unwrapping process for phase-connecting the curve, the result is as shown in FIG. As a result, the height of each moire fringe is δ.
Since the height z of each point of the image when (δ = 2π) is set (the relative depth dimension of each point of the measured object 2), the vertex of the measured object 2 can be found.

That is, z1 (x1, y1) −z2 (x2, y2) ≧ 0 (or>
0), P (x1, y1, z1) is selected, and z1 (x1, y1) −z2 (x2, y2) <0 (or ≦
0), a comparison selection of selecting P (x2, y2, z2) is performed over the entire measurement area, and the vertex P (X, Y, Z) is selected.
Elect. When the equality relation is satisfied in the above equation, an arbitrary point may be selected from the plurality of selected points.

At this time, since the frame memory and the pixels of the CCD have a one-to-one correspondence, the coordinates in the frame memory and the coordinates on the monitor match.

FIG. 7 shows the selected vertex P (X, Y, Z)
FIG. 3 is a diagram showing a xy coordinate value P (X, Y) displayed on the monitor 18 as a flag. FIG. 3A shows an example in which a flag is displayed on a diagram (for example, a contour diagram) displaying the result of moire fringe analysis, and FIG. 3B shows an example in which a flag is displayed on a video through image. By switching and displaying the flags displayed in these two modes on the monitor 18, visual confirmation that the vertex P (X, Y, Z) has been appropriately selected can be reliably performed.

FIG. 8 is a diagram for explaining a method of automatically measuring the distance between the vertex P (X, Y, Z) and the photographing lens 44.

This automatic measurement is performed by using a general auto focus technique.

First, at the time of automatic measurement, the observation reference grid 46 is retracted to the retracted position in advance.

The lens 52L of the CCD camera 52
Is in the home position, that is, the reference setting (1
After confirming that m) is performed, the video signal of the flagged pixel is observed.

Next, the lens 52L is moved in the optical axis direction, and peak detection is performed by the hill-climbing method. Then, from the movement amount ε of the lens 52L when the peak detection is performed, the displacement amount ΔL in the depth direction of the point on the object side corresponding to the movement amount ε is calculated. By calculating a value obtained by subtracting the displacement amount ΔL from a distance L between a point on the object side when the lens 52L is at the home position and a principal point (object-side principal point) H of the photographing lens 44, the measurement target 2 is obtained. Vertex P (X, Y, Z)
L ′ (L ′ = L) between the camera and the taking lens 44 (principal point H)
−ΔL) is obtained.

The peak detection by the hill climbing method is performed according to the procedure shown in FIG.

That is, as shown in FIG.
The lens 52L of the D camera 52 is moved in the direction of the optical axis, and the images at the respective movement positions are captured as shown in FIG. At this time, as shown in FIG. 7C, the video signal output of the flag-displayed pixel is plotted on a graph, and the lens position (that is, the in-focus position) when the output is maximized is determined as the peak detection position. I do.

At this time, as shown in FIG. 10A, cross sections in the x-axis direction and the y-axis direction including the vertex P (X, Y, Z) at the peak detection position are taken. As shown in (c), if the output of each pixel in the x-axis direction and the y-axis direction including the flag-displayed pixel is plotted on a graph, the vertex P (X, Y,
It can be verified that Z) has a peak value.

The following relational expression is used to calculate the displacement .DELTA.L of the point on the object side.

That is, in FIG. 8, the point on the object side is Δ
When the focal length of the imaging lens 44 is f, the amount of displacement Δb of the image forming point formed by the imaging lens 44 when the lens is displaced by L is Δb = (f / (f−L)) ² ΔL. Then, the amount of movement ε of the lens 52L of the CCD camera 52 accompanying this becomes ε = (f ′ / (f′−L)) ² Δb, where f ′ is the focal length of the lens 52L. Therefore, ΔL = {(f′−L) (f−L) / f′f} ² ε is obtained from these two equations.

Next, a modified example of this embodiment will be described.

In this embodiment, the vertex P (X, Y,
Although the case where the automatic measurement of the distance between Z) and the photographing lens 44 is performed by using a general auto-focusing method has been described, the automatic measurement may be performed by another measuring method.

For example, by using a scanning optical system as shown in FIG. 11, automatic measurement can be performed.

That is, the beam from the laser is
1, the beam is deflected and reflected in the vertical direction by rotating about the horizontal axis, and is deflected and reflected in the left and right direction by being incident on the mirror M2 that is rotated about the vertical axis, thereby scanning the beam in both the vertical and horizontal directions. Is irradiated toward the measured object 2. Then, by reading the rotation angle θ of the mirror M2 when the beam reflected on the surface of the measured object 2 is incident on the pixel indicated by the flag of the CCD, the vertex P
The distance d in the optical axis direction between (X, Y, Z) and the lens 52L can be calculated.

FIG. 12 is a plan view for explaining a method of calculating the distance d.

In the figure, the case where the rotation axis of the mirror M2 is located on the main plane of the lens 52L will be considered. At this time, if the distance between the rotation axis of the mirror M2 and the optical axis Ax2 of the lens 52L is a, then a = d (tan θ + tan φ). Here, the angle φ is a horizontal component of an angle formed by a straight line connecting the vertex P (X, Y, Z) and the pixel indicated by the flag with the optical axis Ax2, and tan φ = ε / b. Where ε is the y of the flagged pixel
It is a coordinate value, and b is the distance between the CCD and the main plane of the lens 52L.

From the above equation, d = a / (tan θ + ε / b) is obtained. By reading the rotation angle θ of the mirror M2, the optical axis between the vertex P (X, Y, Z) and the lens 52L is obtained. The distance d in the direction can be calculated.

The rotation angle θ of the mirror M2 can be read by, for example, generating a pulse when the mirror M2 is rotated and detecting the encoder amount accompanying the rotation of the mirror M2.

Instead of using the mirror M1 in FIG. 11, a cylindrical lens extending in the horizontal direction as shown in FIG. 13 may be used. By using the cylindrical lens as described above, a beam that is diffused in the vertical direction can be made incident on the mirror M2.
The mirror M1 and the driving means for rotating the mirror M1 about the horizontal axis can be eliminated. In this case, not the beam spot but the beam line extending in the vertical direction enters the CCD, but the mirror M
The reading of the rotation angle θ of No. 2 has no effect on the calculation of the distance d.

In the above embodiment, the selected vertex P (X, Y, Z) is displayed on the monitor 18 as a flag, and the vertex position indicated by the flag is confirmed by the operator and an OK input is performed. , The vertex P (X, Y,
Although the distance between Z) and the photographing lens 44 is automatically measured, the automatic measurement may be performed in conjunction with the selection of the vertex without waiting for the OK input. Alternatively, the flag display of the selected vertex P (X, Y, Z) on the monitor 18 may be omitted.

[0070]

The moiré apparatus according to the present invention performs moiré fringe observation while fringe-scanning the projection grating, calculates three-dimensional data of the measured object from the result, and calculates the three-dimensional data on the measured object from the three-dimensional data. The distance measurement reference point is selected, and the distance between the distance measurement reference point and the photographing lens is automatically measured, so that the distance measurement between the object to be measured and the photographing lens of the observation optical system can be performed accurately and efficiently. Can do well. Then, the accuracy of the image magnification correction can be improved, so that accurate three-dimensional shape information of the measured object can be obtained.

In this case, if the reference point is the vertex of the measured object, the process of correcting the image magnification can be facilitated.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an entire configuration of a moiré device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing an appearance of a measuring head of the moiré device shown in FIG. 1;

FIG. 3 is a perspective view showing an internal structure of the measuring head shown in FIG. 1;

FIG. 4 is a plan view for explaining functions of the measuring head shown in FIG. 1;

5 is a flowchart showing a procedure of vertex selection, distance measurement, and image magnification correction performed when observing moire fringes by the moiré apparatus shown in FIG.

FIG. 6 is a schematic diagram for explaining a specific procedure of selecting a vertex based on moiré fringe measurement.

FIG. 7 is a schematic diagram showing a state where selected vertices are flag-displayed on a monitor.

FIG. 8 is a schematic diagram for explaining a method for automatically measuring the distance between the vertex and the photographing lens of the observation optical system.

FIG. 9 is a schematic diagram showing a procedure of peak detection by a hill-climbing method.

FIG. 10 is a schematic diagram showing a method for verifying a peak detection position.

FIG. 11 is a perspective view for explaining a modification of the automatic measurement method of FIG. 8;

FIG. 12 is a plan view for explaining a method of calculating the distance between the vertex and the photographing lens of the observation optical system in the modification shown in FIG.

FIG. 13 is a perspective view showing a part of a modification of the configuration of the modification shown in FIG. 11;

[Explanation of symbols]

 2 Measurement object 10 3D image scanner (moire device) 12 Measurement head 14 Power supply device drive unit 16 Control unit 18 Monitor 24 Casing 26 Projection optical system 28 Observation optical system 30 Measurement object illumination system 32 Projection lamp 34 Heat ray cut filter 36 Condenser lens 38 Grating illumination system 40 Projection grating 42 Projection lens 44 Imaging lens 46 Observation reference grating 48 Field lens 50 Folding mirror 52 CCD camera 52L Lens 54 TV optical system 56 Grid feed mechanism 58 Grid retract mechanism 60 Grid retract knob 62 Limit Switch Ax1, Ax2 Optical axis Pg Virtual reference lattice plane P (X, Y, Z) Vertex (distance measurement reference point)

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA04 AA06 AA53 BB05 DD17 DD19 EE05 EE09 FF01 FF07 FF15 FF65 FF67 GG04 HH02 HH04 HH05 JJ03 JJ26 LL08 LL13 LL26 LL41 LL62 MM16 QQ01 Q02SSQQ

Claims (3)

[Claims] A projection optical system having an optical axis parallel to each other and an observation optical system, wherein an image of a projection grating is projected onto the measurement object by the projection optical system, and the measurement object is measured by the observation optical system. The deformed grating image formed on the observation reference grating is formed on the observation reference grating, and the resulting moiré fringes are configured to be observed. A moiré apparatus configured to move the projection grating in a direction orthogonal to the grid lines, calculating three-dimensional data of the object to be measured from moiré fringes observed while moving the projection grating, and calculating the three-dimensional data from the three-dimensional data. A moiré apparatus which is configured to select a distance measurement reference point on a measurement object and automatically measure a distance between the distance measurement reference point and a photographing lens of the observation optical system. 2. The moiré apparatus according to claim 1, wherein the distance measurement reference point is a vertex of the measured object. 3. The moiré according to claim 1, wherein the automatic measurement is performed by detecting an amount of reflected light from the measured object and performing peak detection based on the detected amount of light. apparatus.