JP2000023293A - Ultrasonic sensor - Google Patents

Ultrasonic sensor

Info

Publication number
JP2000023293A
JP2000023293A JP10186341A JP18634198A JP2000023293A JP 2000023293 A JP2000023293 A JP 2000023293A JP 10186341 A JP10186341 A JP 10186341A JP 18634198 A JP18634198 A JP 18634198A JP 2000023293 A JP2000023293 A JP 2000023293A
Authority
JP
Japan
Prior art keywords
ultrasonic sensor
case
sound absorbing
main body
case body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10186341A
Other languages
Japanese (ja)
Other versions
JP4126759B2 (en
Inventor
Shozo Odera
昭三 大寺
Koichi Nitta
晃一 新田
Hidetoshi Iwatani
英俊 岩谷
Junichi Etsuno
潤一 越野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP18634198A priority Critical patent/JP4126759B2/en
Publication of JP2000023293A publication Critical patent/JP2000023293A/en
Application granted granted Critical
Publication of JP4126759B2 publication Critical patent/JP4126759B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic sensor which can prevent the position variance of a sound absorbing member that is contained in a case main body and also can prevent the variance of reverberant characteristic. SOLUTION: An ultrasonic sensor 10 consists of a case including an almost cylindrical case main body 11 made of an insulating material and a metallic plate 12 serving as a vibrating part which is made of a conductive material and bonded to the body 11, a piezoelectric vibrating element 13 which is bonded to the inner surface of the plate 12 and the input/output members 14a and 14b which are buried into the body 11 and electrically connected to the element 13. The body 11 has a tapered inner circumference surface.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、自動車のバックソ
ナー、コーナーソナーとして使用される超音波センサに
関する。
The present invention relates to an ultrasonic sensor used as a back sonar or a corner sonar of an automobile.

【0002】[0002]

【従来の技術】超音波センサは、超音波を利用してセン
シングを行うものであり、圧電振動素子から超音波パル
ス信号を間欠的に送信し、周辺に存在する障害物からの
反射波を圧電振動素子で受信することにより障害物の存
在を検知したり、あるいは、超音波パルス信号を送信し
てから受信するまでの経過時間を外部の回路で演算し障
害物までの距離を測定するものである。
2. Description of the Related Art An ultrasonic sensor performs sensing using ultrasonic waves, intermittently transmits an ultrasonic pulse signal from a piezoelectric vibrating element, and piezoelectrically reflects a reflected wave from an obstacle present in the vicinity. It detects the presence of an obstacle by receiving the vibration element, or measures the distance to the obstacle by calculating the elapsed time from transmitting the ultrasonic pulse signal to receiving it by an external circuit. is there.

【0003】この様な原理に基づいて動作する超音波セ
ンサには、遠距離の検知を可能とし、かつ微弱な反射波
を外乱ノイズ等に埋もれさせることなく確実に電気信号
として取り出す特性が要求される。そのためには、超音
波センサの送信出力音圧と受信感度特性をともに高めら
れるよう、振動部の振動動作を阻害しない構造を採用す
る必要がある。具体的には、振動部に配置される圧電振
動素子に直接接続される配線については、特に細く柔ら
かいものを用いることが広く一般に用いられてきた。
[0003] An ultrasonic sensor operating based on such a principle is required to have a characteristic capable of detecting a long distance and reliably extracting a weak reflected wave as an electric signal without being buried in disturbance noise or the like. You. For this purpose, it is necessary to adopt a structure that does not hinder the vibration operation of the vibrating section so that both the transmission output sound pressure and the reception sensitivity characteristics of the ultrasonic sensor can be enhanced. Specifically, for the wiring directly connected to the piezoelectric vibrating element disposed in the vibrating portion, it has been widely and generally used to use a particularly thin and soft wiring.

【0004】しかし、細く柔らかい配線を超音波センサ
の小さな筐体内で安定的に接続配線することは極めて困
難であり、生産コストの上昇要因となり、また電気的接
続の信頼性が低く、センサの特性の不安定化の原因とも
なっていた。
However, it is extremely difficult to stably connect thin and soft wiring in a small housing of an ultrasonic sensor, which causes an increase in production cost, and has a low reliability of electrical connection and a characteristic of the sensor. Cause instability.

【0005】以上の問題点を克服するために、本出願人
は特願平10―4882号において、細く柔らかい配線
を用いることなく、安定した電気的接続を作業性良く得
られる超音波センサの構造を既に提案している。以下、
公知技術ではないが本出願人が特願平10―4882号
において提案している超音波センサを、図3に基づいて
説明する。
In order to overcome the above problems, the present applicant has disclosed in Japanese Patent Application No. 10-4882 a structure of an ultrasonic sensor capable of obtaining stable electrical connection with good workability without using thin and soft wiring. Has already been proposed. Less than,
An ultrasonic sensor which is not a known technique but has been proposed by the present applicant in Japanese Patent Application No. 10-4882 will be described with reference to FIG.

【0006】図3の断面図に示すように従来の超音波セ
ンサ110は、絶縁性材料からなり一方の開口部に段差部
を有する略筒状をしたケース本体111、およびそのケー
ス本体111の段差部に嵌合して接着剤によりケース本体1
11と接合される振動部としての金属板112とからなるケ
ースと、金属板112の内側面に接合される圧電振動素子1
13と、入出力用部材114a、114bと、フェルトなどからな
る吸音材115とから構成されている。
As shown in the cross-sectional view of FIG. 3, a conventional ultrasonic sensor 110 has a substantially cylindrical case body 111 made of an insulating material and having a step at one opening, and a step of the case body 111. Case body 1 with adhesive
A case made up of a metal plate 112 as a vibrating part to be joined to the piezoelectric vibrating element 1
13, input / output members 114a and 114b, and a sound absorbing material 115 made of felt or the like.

【0007】圧電振動素子113の表裏面にはそれぞれ電
極が形成され(図示せず)、裏面の電極は導電性接着剤
などにより金属板112に接続されている。42ニッケル
(鉄−42%ニッケルの合金)などからなる入出力用部材1
14a、114bは、ケース本体111に埋設されるように一体成
形されており、そのうちの一方の入出力用部材114aは一
端が圧電振動素子113の表面に形成された電極に接続さ
れ、他方の入出力部材114bの一端は金属板112に接続さ
れることにより圧電振動素子113裏面に形成された電極
と導通している。また、入出力用部材114a、114bそれぞ
れの他端はケース本体111外部に導出されている。さら
に、吸音材115はケース本体111内に配置されて、超音波
センサ110が超音波パルス信号を発した際の残響波を吸
収するなどの役割を果たしている。
Electrodes (not shown) are formed on the front and back surfaces of the piezoelectric vibrating element 113, respectively, and the electrodes on the back surface are connected to the metal plate 112 by a conductive adhesive or the like. Input / output member made of 42 nickel (iron-42% nickel alloy) etc.
14a and 114b are integrally formed so as to be embedded in the case main body 111. One of the input / output members 114a has one end connected to an electrode formed on the surface of the piezoelectric vibration element 113 and the other input / output member 114a. One end of the output member 114b is electrically connected to an electrode formed on the back surface of the piezoelectric vibration element 113 by being connected to the metal plate 112. The other ends of the input / output members 114a and 114b are led out of the case body 111. Further, the sound absorbing material 115 is disposed in the case main body 111 and plays a role of absorbing a reverberation wave generated when the ultrasonic sensor 110 emits an ultrasonic pulse signal.

【0008】[0008]

【発明が解決しようとする課題】従来の超音波センサに
おいては、超音波パルス信号を発した際に超音波センサ
のケースに残る残響波を吸収するため、すなわち超音波
センサの残響特性を向上させるためにケース本体内に吸
音材を配置していた。一方、超音波パルス信号を発する
際の振動部としての金属板の振動を阻害しないために、
金属板の内側面側、すなわち圧電振動素子が接合されて
いる側の金属板の周辺には空間が必要である。さらに、
この空間の大きさによって超音波センサの残響特性は変
化し、空間の大きさが異なると超音波センサの特性が変
化する。つまり、良好な特性を有する超音波センサを得
るためには吸音材の配置位置を一定にする必要がある。
In a conventional ultrasonic sensor, a reverberation wave remaining in a case of an ultrasonic sensor when an ultrasonic pulse signal is emitted is absorbed, that is, a reverberation characteristic of the ultrasonic sensor is improved. Therefore, a sound absorbing material has been arranged in the case body. On the other hand, in order not to hinder the vibration of the metal plate as the vibrating part when emitting the ultrasonic pulse signal,
A space is required on the inner surface side of the metal plate, that is, around the metal plate on the side where the piezoelectric vibration element is joined. further,
The reverberation characteristics of the ultrasonic sensor change depending on the size of this space, and the characteristics of the ultrasonic sensor change when the size of the space changes. That is, in order to obtain an ultrasonic sensor having good characteristics, it is necessary to keep the arrangement position of the sound absorbing material constant.

【0009】しかしながら、従来の超音波センサにおい
てケース本体はどの部分においても同一の開口形状を有
する筒状であるため、吸音材をケース本体内に挿入して
所望の位置で吸音材を固定することは困難な作業であ
る。このため、超音波センサごとに吸音材の位置がばら
ついてしまい超音波センサの残響特性などがばらつき、
一定の特性を有する超音波センサを供給できないという
問題があった。
However, in the conventional ultrasonic sensor, the case body has a cylindrical shape having the same opening shape in any part. Therefore, it is necessary to insert the sound absorbing material into the case body and fix the sound absorbing material at a desired position. Is a difficult task. For this reason, the position of the sound absorbing material varies for each ultrasonic sensor, and the reverberation characteristics and the like of the ultrasonic sensor vary,
There was a problem that an ultrasonic sensor having certain characteristics could not be supplied.

【0010】本発明の超音波センサは、上述の問題を鑑
みてなされたものであり、これらの問題を解決し、残響
特性にばらつきがなく特性的に安定した超音波センサを
提供することを目的としている。
The ultrasonic sensor of the present invention has been made in view of the above-mentioned problems, and has as its object to solve these problems and to provide an ultrasonic sensor that is characteristically stable without variation in reverberation characteristics. And

【0011】[0011]

【課題を解決するための手段】上記目的を達成するため
本発明の超音波センサは、絶縁性材料からなる略筒状の
ケース本体と、導電性材料からなり前記ケース本体と接
合される振動部とから構成されるケースと、前記振動部
の内側面に接合される圧電振動素子と、前記ケース本体
に埋設され、前記圧電振動素子に電気的に接続される入
出力用部材とを含んでなる超音波センサであって、前記
ケース本体の内周面が少なくとも部分的にテーパ状であ
る。
To achieve the above object, an ultrasonic sensor according to the present invention comprises a substantially cylindrical case body made of an insulating material, and a vibrating part made of a conductive material and joined to the case body. A piezoelectric vibrating element joined to the inner surface of the vibrating portion, and an input / output member embedded in the case body and electrically connected to the piezoelectric vibrating element. An ultrasonic sensor, wherein an inner peripheral surface of the case main body is at least partially tapered.

【0012】これにより、ケース本体内での吸音材が固
定される位置が一定となる。また、吸音材をケース本体
内に押し込むことで固定するので、ケース本体を押さえ
つける力が加わって残響特性が向上する。
Thus, the position where the sound absorbing material is fixed in the case body becomes constant. Further, since the sound absorbing material is fixed by being pushed into the case main body, a force for pressing down the case main body is applied, so that reverberation characteristics are improved.

【0013】[0013]

【発明の実施の形態】以下、本発明の実施例である超音
波センサを、図1に基づいて説明する。なお、図1は本実
施例の超音波センサの断面図である。図1に示すように
本実施例の超音波センサ10は、絶縁性材料からなり一方
の開口部に段差部を有する略筒状をしたケース本体11お
よび、そのケース本体11の段差部に嵌合して接着剤によ
りケース本体11と接合される振動部としての金属板12と
からなるケースと、金属板12の内側面に接合される圧電
振動素子13と、入出力用部材14a、14bと、フェルトなど
からなる吸音材15とから構成されている。なお、ケース
本体11の絶縁性材料には耐熱性や耐久性に優れたエンジ
ニアリングプラスチック、具体的にはポリフェニレンサ
ルファイド、ポリエーテルエーテルケトン、ポリエーテ
ルスルフォンや液晶ポリマなどが用いられる。さらに、
振動部としての金属板12には軽量で弾性率の高いアルミ
ニウムなどが用いられる。さらにまた、入出力用部材14
a、14bとしては42ニッケル、洋白、燐青銅のような剛性
の高い金属や、銅などの剛性の低い金属が用いられる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrasonic sensor according to an embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a sectional view of the ultrasonic sensor according to the present embodiment. As shown in FIG. 1, the ultrasonic sensor 10 of the present embodiment is made of an insulating material and has a substantially cylindrical case body 11 having a step at one opening, and is fitted to the step of the case body 11. A case made of a metal plate 12 as a vibrating part joined to the case body 11 by an adhesive, a piezoelectric vibrating element 13 joined to the inner surface of the metal plate 12, and input / output members 14a, 14b, And a sound absorbing material 15 made of felt or the like. The insulating material of the case body 11 is an engineering plastic having excellent heat resistance and durability, specifically, polyphenylene sulfide, polyether ether ketone, polyether sulfone, a liquid crystal polymer, or the like. further,
For the metal plate 12 as the vibrating part, aluminum or the like, which is lightweight and has a high elastic modulus, is used. Furthermore, the input / output member 14
As a and 14b, a metal having high rigidity such as 42 nickel, nickel silver, phosphor bronze, or a metal having low rigidity such as copper is used.

【0014】圧電振動素子13の表裏面にはそれぞれ電極
が形成され(図示せず)、裏面の電極は導電性接着剤や
半田などにより金属板12の内側面に接続されている。入
出力用部材14a、14bはケース本体11に埋設されるように
一体成形されており、そのうちの一方の入出力用部材14
aは一端が圧電振動素子13の表面に形成された電極に導
電性接着剤などにより接続され、他方の入出力部材14b
の一端は導電性接着剤などにより金属板12に接続される
ことにより圧電振動素子13裏面に形成された電極と導通
している。また、入出力用部材14a、14bそれぞれの他端
はケース本体11外部に導出されている。
Electrodes (not shown) are formed on the front and back surfaces of the piezoelectric vibrating element 13, respectively. The electrodes on the back surface are connected to the inner surface of the metal plate 12 by a conductive adhesive or solder. The input / output members 14a and 14b are integrally formed so as to be embedded in the case body 11, and one of the input / output members 14a and 14b is
a has one end connected to an electrode formed on the surface of the piezoelectric vibration element 13 by a conductive adhesive or the like, and the other input / output member 14b
Is connected to an electrode formed on the back surface of the piezoelectric vibrating element 13 by being connected to the metal plate 12 with a conductive adhesive or the like. The other ends of the input / output members 14a and 14b are led out of the case body 11.

【0015】超音波センサにおいては遠距離の検知のみ
ならず近距離の検知が必要とされることもある。超音波
センサが被検出物からの距離などを測定する場合には、
超音波パルス信号を送信して被検出物からの反射波を電
気信号に変換して外部の回路に送り演算しているが、近
距離の場合、送信する際の振動が超音波センサのケース
本体などに残っており、反射波との区別がつきにくくな
る。すなわち、超音波センサには、超音波パルス信号の
送信後、速やかにケース本体などに残る残響を収束させ
る機能、つまり残響特性を改善することが必要となる。
超音波センサ10の残響特性を改善するためケース本体11
内にフェルトなどからなる吸音材15を配置するのである
が、本実施例の超音波センサ10におけるケース本体11の
内周面は図1に示すようにテーパ状に形成されているの
で、吸音材15はケース本体11内で所望の位置に固定され
る。すなわち、ケース本体11の金属板12が接合されてい
る側とは反対側の開口部から吸音材15を挿入して押し込
んでいけば、ケース本体11の内周面がテーパ状となって
いるため吸音材15は所定の位置で止まる。吸音材15の大
きさとケース本体11の内周面の形状を正確に形成してお
けば、作業上の困難性を伴うことなく吸音材15を一定の
位置で固定することができるので、金属板12の周辺に一
定の大きさの空間を形成することができ、超音波センサ
10の残響特性などにばらつきが無くなる。また、吸音材
15をケース本体11内に押し込んでいるため、吸音材15か
らケース本体11に対して外向きに力が加わった状態とな
る。これにより、超音波パルス信号を発した後にケース
本体11に残る振動が抑えられるので、残響特性にばらつ
きがなくなる上に残響特性が改善される。
[0015] In an ultrasonic sensor, not only long-distance detection but also short-distance detection may be required. When the ultrasonic sensor measures the distance from the object to be detected,
The ultrasonic pulse signal is transmitted, the reflected wave from the object is converted into an electric signal, and the signal is sent to an external circuit for calculation. Etc., and it is difficult to distinguish the reflected wave. In other words, it is necessary for the ultrasonic sensor to improve the function of converging reverberation remaining in the case body or the like immediately after transmitting the ultrasonic pulse signal, that is, to improve reverberation characteristics.
Case body 11 to improve reverberation characteristics of ultrasonic sensor 10
A sound absorbing material 15 made of felt or the like is arranged in the inside, but since the inner peripheral surface of the case main body 11 in the ultrasonic sensor 10 of the present embodiment is formed in a tapered shape as shown in FIG. 15 is fixed at a desired position in the case main body 11. That is, if the sound absorbing material 15 is inserted and pushed in from the opening opposite to the side where the metal plate 12 of the case main body 11 is joined, the inner peripheral surface of the case main body 11 is tapered. The sound absorbing material 15 stops at a predetermined position. If the size of the sound absorbing material 15 and the shape of the inner peripheral surface of the case main body 11 are accurately formed, the sound absorbing material 15 can be fixed at a fixed position without any difficulty in work, so that the metal plate can be fixed. An ultrasonic sensor can form a space of a certain size around 12
Variations in the reverberation characteristics of the 10 are eliminated. Also sound absorbing material
Since the case 15 is pushed into the case body 11, a force is applied outward from the sound absorbing material 15 to the case body 11. As a result, the vibration remaining in the case body 11 after the emission of the ultrasonic pulse signal is suppressed, so that the reverberation characteristics are not dispersed and the reverberation characteristics are improved.

【0016】なお、上記の実施例においてはケース本体
11の内周面に形成されたテーパはケース本体11の内周全
面にわたっていたが、例えば三つや四つの部分というよ
うに部分的に形成されていても本発明の効果は得られ
る。また、図2の断面図に示すように、シリコンゴムや
ウレタンゴム、発泡性樹脂など弾性を有する絶縁性樹脂
16をケース内に充填、硬化した超音波センサ10aにも本
発明は適用できる。
In the above embodiment, the case body
Although the taper formed on the inner circumferential surface of the case 11 extends over the entire inner circumferential surface of the case body 11, the effects of the present invention can be obtained even if the taper is formed partially, such as three or four portions. Also, as shown in the cross-sectional view of FIG. 2, an insulating resin having elasticity such as silicon rubber, urethane rubber, and foaming resin.
The present invention can also be applied to the ultrasonic sensor 10a in which the case 16 is filled and cured.

【0017】[0017]

【発明の効果】以上のように本発明によれば、超音波セ
ンサにおける絶縁性材料からなるケース本体の内周面を
テーパ状にした。これにより、ケース本体の内部に配置
する吸音材の位置が固定され、超音波センサの残響特性
などにばらつきがなくなり、吸音材の配置作業も簡便な
ものとなる。また、吸音材をケース本体内に押し込むこ
とでケース本体の内部から外側に向かって力が加わった
状態となるので、超音波センサの残響特性が改善され
る。
As described above, according to the present invention, the inner peripheral surface of the case body made of an insulating material in the ultrasonic sensor is tapered. Thereby, the position of the sound absorbing material arranged inside the case main body is fixed, the reverberation characteristics and the like of the ultrasonic sensor do not vary, and the work of arranging the sound absorbing material is simplified. Further, when the sound absorbing material is pushed into the case main body, a force is applied from the inside to the outside of the case main body, so that the reverberation characteristics of the ultrasonic sensor are improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の超音波センサの断面図である。FIG. 1 is a sectional view of an ultrasonic sensor according to the present invention.

【図2】本発明の超音波センサの他の実施例における断
面図である。
FIG. 2 is a sectional view of another embodiment of the ultrasonic sensor according to the present invention.

【図3】従来の超音波センサの断面図である。FIG. 3 is a sectional view of a conventional ultrasonic sensor.

【符号の説明】[Explanation of symbols]

10,10a 超音波センサ 11 ケース本体 12 金属板 13 圧電振動素子 14a,14b 入出力用部材 15 吸音材 16 絶縁性樹脂 10, 10a Ultrasonic sensor 11 Case body 12 Metal plate 13 Piezoelectric vibrating element 14a, 14b Input / output member 15 Sound absorbing material 16 Insulating resin

───────────────────────────────────────────────────── フロントページの続き (72)発明者 越野 潤一 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 Fターム(参考) 5D019 AA26 BB09 EE01 FF01 GG05 ────────────────────────────────────────────────── ─── Continued from the front page (72) Inventor Junichi Koshino 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto F-term in Murata Manufacturing Co., Ltd. (Reference) 5D019 AA26 BB09 EE01 FF01 GG05

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】絶縁性材料からなる略筒状のケース本体
と、導電性材料からなり前記ケース本体と接合される振
動部とから構成されるケースと、 前記振動部の内側面に接合される圧電振動素子と、 前記ケース本体に埋設され、前記圧電振動素子に電気的
に接続される入出力用部材とを含んでなる超音波センサ
であって、 前記ケース本体の内周面が少なくとも部分的にテーパ状
であることを特徴とする超音波センサ。
1. A case comprising a substantially cylindrical case body made of an insulating material, a vibrating part made of a conductive material and joined to the case body, and joined to an inner surface of the vibrating part. An ultrasonic sensor comprising: a piezoelectric vibrating element; and an input / output member embedded in the case main body and electrically connected to the piezoelectric vibrating element, wherein the inner peripheral surface of the case main body is at least partially An ultrasonic sensor characterized by having a tapered shape.
JP18634198A 1998-07-01 1998-07-01 Ultrasonic sensor Expired - Fee Related JP4126759B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18634198A JP4126759B2 (en) 1998-07-01 1998-07-01 Ultrasonic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18634198A JP4126759B2 (en) 1998-07-01 1998-07-01 Ultrasonic sensor

Publications (2)

Publication Number Publication Date
JP2000023293A true JP2000023293A (en) 2000-01-21
JP4126759B2 JP4126759B2 (en) 2008-07-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP18634198A Expired - Fee Related JP4126759B2 (en) 1998-07-01 1998-07-01 Ultrasonic sensor

Country Status (1)

Country Link
JP (1) JP4126759B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030008715A (en) * 2001-07-19 2003-01-29 아이에스텍 주식회사 Ultrasonic sensor
WO2007104594A1 (en) * 2006-03-10 2007-09-20 Robert Bosch Gmbh Ultrasonic sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030008715A (en) * 2001-07-19 2003-01-29 아이에스텍 주식회사 Ultrasonic sensor
WO2007104594A1 (en) * 2006-03-10 2007-09-20 Robert Bosch Gmbh Ultrasonic sensor
US8080922B2 (en) 2006-03-10 2011-12-20 Robert Bosch Gmbh Ultrasonic sensor having a cover including a damping element

Also Published As

Publication number Publication date
JP4126759B2 (en) 2008-07-30

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