JP2000017426A - Deposition apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a deposition apparatus capable of sufficiently cooling a sheet by bringing the thin sheet into tight contact with a cooling and supporting section. SOLUTION: This deposition apparatus has a temp. management mechanism having a cooling roll 141 as the cooling and supporting section which is arranged on a film source 20 and is maintained within a prescribed temp. range and a pair of tension rolls 42a and 42b as pressing mechanisms for pressing an org. film 500 toward the cooling roll 141 side in such a manner that the org. film 500 comes into tight contact with the surface of the cooling roll 141. The cooling roll 141 has a cushion layer 141b which consists of a silicon resin, has flexibility and has a surface shape projecting to the film source 20 side.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a film forming apparatus for forming a film on a thin plate made of an organic material.

[0002]

2. Description of the Related Art This type of film forming apparatus is a PVD (Physical
Using a technique such as Vapor Deposition or sputtering, a thin plate (for example, a long organic film or a short organic sheet) made of an organic material (for example, PES (Polyether Sulfone) or PET (Polyethylene terephthalate)) is placed on a plate surface. This is an apparatus for forming a metal film or an oxide film made of a film material prepared for a film source. The long organic film has a thickness of, for example, about 0.1 to 0.3 mm. The short organic sheet has a thickness of, for example, about 0.3 to 1.2 mm.

During film formation, the film material at the film source is at approximately 500-2000 ° C. Therefore, the thin plate receives radiant heat from the film source and latent heat of the evaporated particles. PES and PET
Organic material film or organic material sheet composed of 80 to 12
0 ° C. is the heat-resistant temperature. There is a possibility that a thin plate heated to a temperature higher than the heat resistant temperature may be deformed, vitrified, carbonized, boiled, and the like.
Therefore, the film forming apparatus has a temperature control mechanism for maintaining the thin plate at a predetermined temperature.

[0004] A film forming apparatus having a temperature control mechanism is described in, for example, Japanese Patent Application Laid-Open No. Hei 5-271732.
Referring to FIG. 5, this film forming apparatus is an apparatus for continuously forming a film on a long organic film 500 and has a vacuum chamber 10.
, A film source 20 provided in the vacuum chamber 10, an unwinding roll previously wound with the organic film 500, and a winding roll driven by a motor and winding the organic film 500 wound on the unwinding roll A cooling roll 541 disposed on the film source 20 and between the unwinding roll and the take-up roll and maintained at a predetermined temperature by, for example, cooling with water; It basically has a pair of tension rolls 42a and 42b for applying a predetermined tension to the organic film 500 so as to be in close contact with the upper surface. A film material 600 is contained in the hearth of the film source 20. In this example, the temperature management mechanism includes a cooling roll 541 and tension rolls 42a and 42b.

[0005]

However, in the conventional film forming apparatus disclosed in the above-mentioned publication, the organic film 500 is sufficiently placed on the cooling roll 541 due to the flexibility of the organic film 500 and the radius of the cooling roll 541. Pressing, that is, it may not be possible to sufficiently adhere.
In this case, since the organic material film 500 is not sufficiently cooled, the temperature becomes high and gas is generated from the organic material film 500. As a result, the organic material film 500 and the cooling roll 5 are cooled.
A gap is formed between the film and the film 41, so that the film cannot be cooled at all, and the organic film is in a high temperature state.

Further, the conventional temperature control mechanism disclosed in the above-mentioned publication cannot be applied to a thin organic sheet as a thin plate.

It is therefore an object of the present invention to provide a film forming apparatus capable of bringing a thin plate made of an organic substance into close contact with a cooling roll.

Another object of the present invention is to provide a film forming apparatus provided with a temperature control mechanism applicable to a single organic material sheet as a thin plate.

[0009]

According to the present invention, there is provided a film forming apparatus for forming a film on a thin plate made of an organic material by evaporating a film material prepared in a film source, wherein the thin plate is maintained at a predetermined temperature. In a film forming apparatus having a temperature control mechanism for performing
The temperature management mechanism is disposed on the film source, a cooling support portion maintained within a predetermined temperature range, and the thin plate on the side of the cooling support portion so that the thin plate closely contacts the cooling support portion And a pressing mechanism for pressing the cooling support portion, wherein the cooling support portion is mainly made of a silicon resin or a flexible metal, and has a surface shape protruding toward the film source side. can get.

According to the present invention, there is also provided an apparatus for continuously forming a film on a long organic film as the thin plate, wherein the unwinding roll is pre-wound with an organic film, and the unwinding is driven by a motor. A take-up roll that takes up an organic film wound around a roll, and is disposed on the film source and between the take-out roll and the take-up roll, and is a cooling support unit that is maintained at a predetermined temperature. And a pair of tension rolls as the pressing mechanism for applying a predetermined tension to the organic film so that the organic film to be wound closely adheres to the cooling roll.

According to the present invention, there is further provided an apparatus for batch-forming a film on a short organic sheet as the thin plate,
The film forming apparatus having the frame member as the pressing mechanism is obtained.

[0012] According to the present invention, the cooling support portion may include:
An inner skin portion mainly made of metal, a spring portion mainly made of metal, exhibiting a cross-sectional waveform, and partially joined on the inner skin portion, and a spring portion mainly made of metal and partially joined on the spring portion The film forming apparatus having the outer skin portion is obtained.

According to the present invention, there is further provided the film forming apparatus, wherein the metal includes at least one of aluminum, copper, indium, stainless steel, and tin.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a film forming apparatus according to an embodiment of the present invention will be described with reference to the drawings.

[Embodiment 1] Referring to FIGS. 1 (a) and 1 (b), a film forming apparatus according to Embodiment 1 of the present invention is similar to the conventional example shown in FIG. Organic film 50
The apparatus is a device for forming a film continuously at 0, a vacuum chamber (not shown), a film source 20 provided in the vacuum chamber, an unwinding roll in which an organic film 500 is wound in advance, and an unwinding roll driven by a motor. Take-up roll that takes up the organic film 500 wound around the film source, and a cooling device that is disposed on the film source 20 and between the take-out roll and the take-up roll and maintained at a predetermined temperature by, for example, water cooling. It has a roll 141 and a pair of tension rolls 42a and 42b for applying a predetermined tension to the organic film 500 so that the organic film 500 to be wound is in close contact with the cooling roll 141. Film source 20
The film material 600 is housed in the hearth. The temperature management mechanism includes a cooling roll 141 and tension rolls 42a and 42b.

The cooling roll 141 has a cylindrical shape or a cylindrical shape having an internal passage, and has a main body 141a through which a coolant such as cooling water flows, and is provided on the peripheral surface of the main body 141a, and is made of silicone resin. Cushion layer 14 having
1b. Silicon resin has high thermal conductivity, in addition to flexibility, and is unlikely to release gas even in a vacuum.

According to the film forming apparatus of this embodiment, when the organic film 500 is tensioned by the tension rolls 42a and 42b, the cooling roll 1
It adheres closely to the 41 cushion layer 141b. Therefore, the organic film 500 is sufficiently cooled, so that no gas is generated from the organic film 500.

[Second Embodiment] Referring to FIGS. 2A and 2B, a film forming apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 1A and 1B. As in mode 1,
An apparatus for continuously forming a film on the organic film 500,
A vacuum chamber, a film source 20, an unwind roll, a take-up roll, and a film are disposed on the film source 20 and between the unwind roll and the take-up roll, and are maintained at a predetermined temperature by, for example, water cooling. Cooling roll 241 and a pair of tension rolls 42 a and 42 b for applying a predetermined tension to the organic film 500 so that the wound organic film 500 is in close contact with the cooling roll 241. In the hearth of the film source 20, a film material 600
Is housed. The temperature management mechanism includes a cooling roll 241.
And tension rolls 42a and 42b.

The cooling roll 241 has a cylindrical shape or a cylindrical shape having an internal passage. The cooling roll 241 is made of metal and a main body 241a through which a coolant such as cooling water flows. An inner skin portion 241b and a spring portion 24 having a cross-sectional waveform and partially joined on the inner skin portion 241b.
1c and an outer skin portion 241d made of metal and partially joined on the spring portion 241c. Endothelium 241
b, the spring part 241c, and the outer skin part 241d are made of aluminum. Aluminum has a higher thermal conductivity than silicon resin, and hardly emits gas even in a vacuum.

According to the film forming apparatus of this embodiment, when the organic film 500 is tensioned by the tension rolls 42a and 42b,
41 is in close contact with the outer skin portion 241d. Therefore, the organic film 500 is sufficiently cooled, so that no gas is generated from the organic film 500.

It should be noted that the inner skin portion 241b, the spring portion 241c, and the outer skin portion 241d may include at least one of aluminum, copper, indium, stainless steel, and tin instead of aluminum. In short, any metal that is not very hard, has good thermal conductivity, and does not generate gas in a vacuum may be used.

[Third Embodiment] Referring to FIGS. 3A to 3C, a film forming apparatus according to a third embodiment of the present invention is an apparatus for forming a film on a short organic sheet 700 in batches. Yes,
The organic material sheet 700 is cooled in cooperation with a vacuum chamber, the film source 20, a cooling supporter 341 disposed on the film source 20, and maintained at a predetermined temperature by, for example, water cooling, and a clamper (not shown). There is a frame-shaped holder 342 that presses the organic material sheet 700 onto the cooling supporter 341 while applying a predetermined tension to the organic material sheet 700 so as to be in close contact with the supporter 341. A film material 600 is contained in the hearth of the film source 20. The temperature management mechanism includes a cooling supporter 341 and a holder 342.

The cooling supporter 341 has a container shape protruding toward the film source 20 and includes a main body 341a into which a coolant such as cooling water flows, and a cushion layer 341b made of silicone resin and having flexibility. I have.

According to the film forming apparatus of this embodiment, when the organic sheet 700 is tensioned by the holder 342, the cushion layer 34 of the cooling supporter 341
1b. Therefore, the organic material sheet 700 is sufficiently cooled, so that no gas is generated from the organic material sheet 700.

[Fourth Embodiment] Referring to FIGS. 4A to 4C, a film forming apparatus according to a fourth embodiment of the present invention will be described with reference to FIG.
Similar to Embodiment 3 shown in (a) to (c), this is an apparatus for forming a film on the organic material sheet 700 in a batch manner, and is disposed on the vacuum source, the film source 20, and the film source 20, For example, a predetermined tension is applied to the organic material sheet 700 so that the organic material sheet 700 adheres to the cooling supporter 441 in cooperation with a cooling supporter 441 maintained at a predetermined temperature by water cooling and a clamper (not shown). And a frame-shaped holder 342 pressed on the cooling supporter 441. A film material 600 is contained in the hearth of the film source 20. The temperature management mechanism includes a cooling supporter 441 and a holder 342.

The cooling supporter 441 has a container shape protruding toward the film source 20 and is made of metal, and is provided in close contact with the organic material sheet mounting side of the main body 441a. And an outer skin portion 441c made of metal, having a cross-sectional waveform, and partially joined on the inner skin portion 441b, and an outer skin portion 441d made of metal and partially joined on the spring portion 441c. It has. The inner skin portion 441b, the spring portion 441c, and the outer skin portion 441d are made of aluminum.

According to the film forming apparatus of the present embodiment, the organic sheet 700 comes into close contact with the outer cover 441c of the cooling supporter 441 when the holder 342 applies tension. Therefore, the organic material sheet 700 is sufficiently cooled, so that no gas is generated from the organic material sheet 700.

The inner skin portion 441b, the spring portion 441c, and the outer skin portion 441d may include at least one material of aluminum, copper, indium, stainless steel, and tin instead of aluminum. In short, any metal that is not very hard, has good thermal conductivity, and does not generate gas in a vacuum may be used.

[0029]

According to the present invention, there is provided a film forming apparatus, comprising: a cooling support portion disposed above a film source and maintained within a predetermined temperature range;
A temperature control mechanism having a pressing mechanism for pressing the thin plate against the cooling support so that the thin plate is in close contact with the cooling support; and the cooling support is mainly made of silicone resin or metal and has flexibility. In addition, since the organic material sheet has a surface shape protruding toward the film source side, the organic material sheet as well as the long organic material film comes into close contact with the cooling support portion when tension is given by the pressing mechanism. For this reason, since the thin plate is sufficiently cooled, no gas is generated from the thin plate.

[Brief description of the drawings]

1 (a) and 1 (b) show Embodiment 1 of the present invention.
FIG. 1 is a diagram showing a detailed configuration of a film forming apparatus and a temperature management mechanism according to the first embodiment.

FIGS. 2 (a) and (b) show Embodiment 2 of the present invention.
FIG. 1 is a diagram showing a detailed configuration of a film forming apparatus and a temperature management mechanism according to the first embodiment.

FIGS. 3A, 3B, and 3C are diagrams showing a configuration of a film forming apparatus, a configuration of a temperature management mechanism, and a detailed configuration of a temperature management mechanism according to a third embodiment of the present invention. is there.

FIGS. 4A, 4B, and 4C are diagrams showing a configuration of a film forming apparatus, a configuration of a temperature management mechanism, and a detailed configuration of a temperature management mechanism according to a fourth embodiment of the present invention. is there.

FIG. 5 is a diagram showing a configuration of a conventional film forming apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Vacuum container 20 Film source 42a, 42b Tension roll 141, 241, 541 Cooling roll 141a, 241a, 341a, 441a Main body 141b, 341b Cushion layer 241b, 441b Endothelial part 241c, 441c Spring part 241d, 441d Outer part 341 Support section 342 Holder 500 Organic film 600 Membrane material 700 Organic sheet

Claims (5)

[Claims] 1. A film forming apparatus for forming a film on a thin plate made of an organic material by evaporating a film material prepared in a film source, said film forming device having a temperature control mechanism for maintaining said thin plate at a predetermined temperature. In the apparatus, the temperature management mechanism is disposed on the film source, and the cooling support unit maintained within a predetermined temperature range, and the cooling unit cools the thin plate so that the thin plate adheres to the cooling support unit. A press mechanism for pressing against the support portion side, wherein the cooling support portion is mainly made of a silicone resin or a flexible metal, and has a surface shape protruding toward the film source side. Membrane equipment. 2. An apparatus for continuously forming a film on a long organic film as the thin plate, the apparatus being driven by an unwinding roll in which the organic film is wound in advance, and a motor,
A take-up roll that takes up the organic film wound around the take-up roll; and the cooling device that is disposed on the film source and between the take-out roll and the take-up roll and that is maintained at a predetermined temperature. The cooling roll as a support portion, and a pair of tension rolls as the pressing mechanism for applying a predetermined tension to the organic film so that the organic film to be wound closely adheres to the cooling roll. Film forming equipment. 3. The film forming apparatus according to claim 1, wherein the film forming apparatus is a device for batch-forming a film on the short organic material sheet as the thin plate, and has a frame member as the pressing mechanism. 4. The cooling support part is mainly composed of an inner skin part mainly made of metal, a spring part mainly made of metal, exhibiting a cross-sectional waveform, and partially joined on the inner skin part, and mainly made of metal. The film forming apparatus according to any one of claims 1 to 3, further comprising an outer skin portion partially joined to the spring portion. 5. The method of claim 1, wherein the metal is at least one of aluminum, copper, indium, stainless steel, and tin.
5. The film forming apparatus according to claim 1, comprising one material.