JP2000011869A - Exposure method and exposure device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a phosphor screen forming method of a color picture tube excellent in the shape of black matrix holes formed on the panel of a color picture tube. SOLUTION: This method executes exposure by dividing it into two steps. The first step is executed by arranging a light source part 5 at the position of an electron gun. In the second step, light is applied through a lens 9a. A floating quantity ΔZ1 of the light source part 5 produced by the action of the lens 9a is varied depending on the magnitude of an incident angle θ1. The ΔZ1 is small at ends of X, Y axes and large at diagonal parts. Therefore, the exposure is performed by moving the light source part 5 in the direction opposite to that of the floating by a distance equivalent to the ΔZ1 at the ends of the X, Y axes. The spot of the light formed on a panel is elliptical in the vicinity of the diagonal parts, but its position in the first step is different from that in the second step, so that the spot formed by both the steps looks like a circle when it is viewed as a whole. The spot is circular in the vicinity of the ends of the X, Y axes and its position in the first step coincides with that in the second step. Therefore, it is also kept circular as a whole.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure method and an exposure apparatus which are suitable for forming a fluorescent screen of a color picture tube, and in particular, can form a black matrix hole or a phosphor dot having an excellent shape.

[0002]

2. Description of the Related Art Conventionally, when a phosphor screen is formed on the inner surface of a panel, a technique of photo printing using a shadow mask as a pattern has been used. This utilizes the fact that the path of the deflected electron beam and the path of light from the light source located at the center of deflection are substantially the same. In the actual manufacture of a phosphor screen, first, a phosphor suspension which is cured by being exposed to light is applied to the inner surface of the panel, and after drying, a shadow mask is attached, and a light source unit (lamp house) is placed at the center of deflection. Then, the photosensitive agent layer composed of the phosphor suspension is exposed, and the shadow mask is removed for development. As a result, the phosphor remains only in the portion irradiated with light from the light source through the circular opening of the shadow mask. By performing this step for each color phosphor, the phosphor screen of the color picture tube is completed. When a black matrix layer, which is a light absorbing layer, is formed on the inner surface of the panel, it is formed before the formation of the fluorescent screen.

The exposure for forming the phosphor screen is performed by the exposure apparatus shown in FIG. 10 as follows. Light L emitted from the straight tubular mercury lamp 11 of the light source unit 5 passes through the slit 15 of the masking plate 14 and passes through the optical system such as the correction filter 12 and the correction lens 8 and the circular opening 16 of the shadow mask 3. The light passes through the photosensitive agent layer 2 applied to the inner surface of the panel 1.

The correction lens 8 is for approximating the trajectory of the light L emitted from the light source unit 5 to the trajectory of the electron beam. Further, the correction filter 12 is for correcting the light amount distribution of the light L irradiated to the photosensitive agent layer 2.

[0005]

However, the shape of the light L applied to the shadow mask 3 of the color picture tube is shown in FIG.
As shown in the figure, the position differs on the shadow mask 3. That is, at the center, the shape shown in FIG. 11A (indicated by reference numeral 18a in the figure) is obtained, and at the Y-axis end, the shape shown in FIG.
1 (b) (indicated by reference numeral 18b in the figure), and at the X-axis end, the shape illustrated in FIG.
8c), and at the diagonal portion, as shown in FIG.
(Indicated by reference numeral 18d in the figure). Then, due to this, the light L is actually
(Light-irradiated portion, hereinafter referred to as “spot”) S also has a different shape depending on the position on panel 1.

Although the light source 5 is revolved along a circular orbit E in order to make the shape of the spot S circular,
The shape of the completed black matrix hole is shown in FIG.
As shown in the figure, the position also varied depending on the position.
That is, as shown in FIG. 12, the shape of the completed black matrix hole is distorted into an elliptical shape in which the diagonal portion is crushed diagonally, the diagonal axis direction is a short axis, and the orthogonal direction is a long axis. Had become. Center of panel 1,
The shape of the black matrix hole at each point of the Y-axis end and the X-axis end is formed in a substantially perfect circle.

Usually, the landing margin of the electron beam with respect to the three-color phosphor layer is limited by the major diameter of the black matrix hole or the phosphor dot. Therefore, when the black matrix hole in the diagonal region is elliptical, the light emitting area becomes smaller than when the black matrix hole is a perfect circle, and uniform luminance cannot be obtained over the entire phosphor screen, or color purity cannot be obtained. It causes deterioration.

Various methods have been proposed to solve such a problem. For example, JP-A-3-236
No. 139 discloses a technique of deforming a phosphor hole using an exposure device that swings a light source unit in a tube axis direction of a color picture tube by a cam. Also, Japanese Patent Application Laid-Open No. 7-21 / 1995
No. 911 discloses an exposure performed through a light-transmitting auxiliary lens that optically moves a predetermined amount of light in a panel direction and an irradiation performed without a light-transmitting auxiliary lens. Means using the device are shown. Hereinafter, the movement of the light spot S according to the related art will be described with reference to FIGS.

FIG. 13A schematically shows a change in the trajectory of light L when the position of the light source unit 5 is changed in the direction of the tube axis of the color picture tube. Light L emitted from the light source unit 5 passes through the circular opening 16 of the shadow mask 3 and irradiates the photosensitive agent layer 2 applied to the inner surface of the panel 1. In this figure, ΔZ is the driving direction of the light source unit 5 and ΔLp
Reference numeral 1 denotes a displacement direction of the spot S of the light L applied to the photosensitive agent layer 2 when the light source unit 5 is moved by ΔZ. FIG. 13B shows the displacement direction ΔLp2 of the position of the spot S in each part of the panel 1 at the time described above.
As can be seen from this figure, when the light source unit 5 is brought closer to the panel 1, the spot S moves outward.

FIG. 14A schematically shows the change in the trajectory of the light L when the translucent auxiliary lens 9a is inserted and when it is not inserted. Light L emitted from the light source unit 5 passes through the circular opening 16 of the shadow mask 3 via the translucent auxiliary lens 9a and is applied to the photosensitive agent layer 2 applied to the inner surface of the panel 1. In this figure, Δ
Lp3 is the displacement direction of the spot S. FIG. 14 (b)
Is the displacement direction Δ of the spot S with the change from the state where the translucent auxiliary lens 9a is not inserted to the state where it is inserted.
Lp4 is shown. In the figure, when the trajectory drawn by the dotted line (FIG. 14A) and the spot (FIG. 14B) do not include the translucent auxiliary lens 9a, the trajectory drawn by the solid line (FIG. 14A )) And spots (FIG. 14B) are obtained when the translucent auxiliary lens 9a is inserted.

As can be seen from FIGS. 13 and 14, in the above prior art, the shape of the black matrix hole is a perfect circle at the diagonal portion of the panel 1, but it is horizontally long at the X-axis end and Y-axis end. Then it becomes vertical. In other words, in order to optimize the shape of the diagonal black matrix hole, other regions (X-axis end, Y-axis end)
In this case, the shape of the black matrix hole is deteriorated.

As described above, in the prior art, the shape of the black matrix hole of the color picture tube cannot be uniform over the entire phosphor screen, so that uniform brightness cannot be obtained over the entire phosphor screen, or There is a problem that color purity is deteriorated.

The present invention has been made to solve such a problem, and can provide a uniform black matrix hole shape over the entire fluorescent screen of a color picture tube.
An object of the present invention is to provide an exposure method and an exposure apparatus.

[0014]

SUMMARY OF THE INVENTION The present invention has been made to achieve the above-mentioned object, and a first aspect of the present invention is to irradiate a surface to be irradiated with light through a mask having openings. In the exposure method, exposure to irradiate the surface to be illuminated with light emitted from the light source unit through a translucent optical device, and exposure to irradiate the surface to be illuminated with light emitted from the light source unit without passing through the optical device Exposure to irradiate light via the optical device is performed, with reference to a position at the time of exposure to irradiate light without passing through the optical device, movement of an apparent position of the light source unit by the optical device. An exposure method is provided in which the position of the light source unit is changed in a direction opposite to the direction described above.

[0015] The optical device is a flat transparent member,
The light source unit side may be a flat convex lens or the light source unit side may be a flat concave lens.

According to a second aspect of the present invention, there is provided an exposure method for irradiating a surface to be illuminated with light through a mask having openings, the light emitted from the light source unit being transmitted through a light-transmitting optical device. Exposure to irradiate the irradiated surface is performed a plurality of times after switching the optical device and changing the position of the light source unit in a direction opposite to the direction of movement of the apparent position of the light source unit by the optical device, Is provided.

When a plurality of plate-shaped transparent members having different thicknesses are switched and used as the optical device, the exposure performed through the thick transparent member is more effective than the exposure performed through the thin transparent member. It is also preferable that the light source unit is kept away from the irradiated surface.

When a plurality of concave lenses having a flat light source portion side and different curvatures are used as the optical device by switching, a concave lens having a large curvature is used when performing exposure through a concave lens having a small curvature. It is preferable to move the light source unit away from the surface to be illuminated as compared with the time of exposure performed through a light source.

When a plurality of convex lenses having a flat light source portion side and different curvatures are used by switching as the optical device, a convex lens having a large curvature is used for exposure through a convex lens having a small curvature. It is preferable to bring the light source unit closer to the irradiated surface than at the time of exposure performed through a light source.

In a case where the optical device is used by switching between a flat transparent member and a concave lens having a flat light source portion side, when performing exposure through the concave lens, the light passes through the flat transparent member. It is preferable that the light source unit is farther from the surface to be irradiated than during exposure.

In the case where the optical device is used by switching between a flat transparent member and a convex lens having a flat light source portion side, when performing exposure through the convex lens, the light is transmitted through the flat transparent member. It is preferable to bring the light source unit closer to the irradiated surface than at the time of performing exposure.

In the case where the optical device is used by switching between a concave lens having a flat light source portion and a convex lens having a flat light source portion, when performing exposure through the concave lens, exposure is performed through the convex lens. It is preferable to move the light source unit away from the surface to be illuminated more than at a time.

According to a third aspect of the present invention, there is provided a light source unit for emitting light, a translucent optical device for moving an apparent position of the light source unit, and the optical device extending from the light source unit to a panel surface. An optical device insertion / retraction means for setting the optical device on the path and retreating the optical device from the path, a light source moving means for moving the light source section, the light source section, the optical device insertion / retreat means, the light source moving means By controlling all the optical devices in the state where all the optical devices are retracted from the path, exposure to irradiate the surface to be irradiated with light emitted from the light source unit, and setting any one of the optical devices on the path In the state in which the light source unit is moved in the direction opposite to the movement direction of the apparent position of the light source unit by the optical device set on the path at that time, Exposure apparatus is provided, characterized in that a control means for causing the exposure to irradiation of light emitted from the light source unit after having allowed to change the location on the surface to be illuminated, a.

According to a fourth aspect of the present invention, there is provided a light source unit for emitting light, a plurality of optical devices for moving an apparent position of the light source unit, and a light source unit for only a selected one of the optical devices. Optical device insertion / retraction means for setting the optical device on a path extending from the path to the panel surface and retreating other optical devices from the path, light source moving means for moving the light source unit, the light source unit, and the optical device insertion By controlling the retracting means and the light source moving means, any one of the optical devices is set on the path, and the moving direction of the apparent position of the light source unit by the set optical device is reversed. Exposure to irradiate the surface to be irradiated with light emitted by the light source unit after changing the position of the light source unit in the direction,
A control unit for switching an optical device to be set on the optical path to perform the switching plural times.

In the third and fourth embodiments described above,
Storage means for storing exposure information defining an amount by which the light source unit is moved for each of the optical devices, wherein the control means only controls the optical device used at that time by an amount defined in the exposure information; The position of the light source may be displaced.

In the third and fourth embodiments described above,
The optical device may be a flat transparent member, a convex lens or a concave lens.

[0027]

Embodiments of the present invention will be described with reference to the drawings.

Embodiment 1 The first embodiment relates to a method of forming a fluorescent screen of a picture tube, and in particular, the shape of a black matrix hole is such that an X-axis end, a Y-axis end,
This is a method for forming a good phosphor screen at any of the diagonal portions.

The black matrix holes are formed by using a photographic technique. In this case, the exposure is performed in a plurality of times, and the position of the spot of the light applied to the panel is shifted to some extent for each exposure. When viewed through all the exposures, the shape of the portion irradiated with light, that is, the portion that eventually becomes a black matrix hole is made substantially circular. In particular, in the present embodiment, by using both the presence or absence of a translucent auxiliary lens described later and the movement of the light source unit, the position is shifted by a spot with a large distortion, that is, a diagonal spot, and a part with a small distortion. That is, the positions of the spots at the X-axis end and the Y-axis end are hardly shifted.

Hereinafter, a detailed description will be given with reference to FIGS.

FIG. 1 shows an exposure apparatus for performing the exposure method of the present embodiment. In the exposure, the light L emitted from the light source unit 5 is passed through the light-transmitting auxiliary lens 9a, the light control filter 12, the correction lens 8, and the shadow mask 3 in which a number of fine circular openings are formed. Irradiation is performed on 2. In this case, a large number of spots are formed on the photosensitive agent layer 2 corresponding to the circular openings. The translucent auxiliary lens 9a can be inserted into and retracted from the optical path from the light source unit 5 to the panel 1 as necessary. The exposure apparatus itself will be described later in detail as a second embodiment.

The following description is based on the translucent auxiliary lens 9a.
As an example, a case where a flat plate is adopted will be described.

When the light-transmitting auxiliary lens 9a is not inserted on the optical path of the light L, the light L
Go straight as it is as drawn by the dotted line in FIG. On the other hand, when the translucent auxiliary lens 9a is inserted on the optical path of the light L, the light L is refracted as drawn by the solid line in FIG. 2 according to Snell's law.
Here, the refractive index of air is n1, the refractive index of the plate-shaped translucent auxiliary lens 9a is n2, the incident angle of the light L to the translucent auxiliary lens 9a (the angle with respect to the normal 13) is θ1, and the refraction angle is To θ
Assuming that 2, the following equation (1) is established.

N1 * sinθ1 = n2 * sinθ2 (1)

An angle θ1 is applied to the plate-shaped translucent auxiliary lens 9a.
Is refracted by the light-transmitting auxiliary lens 9a, and then is angled θ1 with respect to the normal 13 of the light-transmitting auxiliary lens 9a.
Out. Therefore, the incident angle θ1 is equal to or less than the critical angle,
If n1 ≠ n2, a shift indicated by a broken line occurs between the incident light and the output light. This is the same as that the position of the light source unit 5 has risen (approached) in the normal direction of the translucent auxiliary lens 9a, that is, in the same direction as the central axis connecting the light source unit 5 and the center of the panel 1. .

The floating amount ΔZ1 can be adjusted by the refractive index n2 and the plate thickness t of the translucent auxiliary lens 9a. In addition, the floating amount ΔZ1 differs depending on the angle of incidence on the translucent auxiliary lens 9a. That is, from the relationship of the distance from the center of the panel 1, the incident angle θ1 is larger than the value of the light irradiated to the X-axis end and the Y-axis end.
The value for the light irradiated to the diagonal is larger.
Therefore, the floating amount ΔZ1 of the light source unit 5 is larger at the diagonal portion than at the X-axis end and the Y-axis end. Correspondingly, the amount of displacement of the spot of the light L irradiated on the photosensitive agent layer 2 in accordance with the presence or absence of the insertion of the translucent auxiliary lens 9a is also smaller than the X-axis end and the Y-axis end. The corners are larger. Therefore, the actual translucent auxiliary lens 9a
Is inserted as the amount of movement ΔZ of the light source unit 5 when exposing,
X-axis end and Y due to insertion of translucent auxiliary lens 9a
If a value that can offset the positional displacement of the spot at the axis end is set, the position of the spot changes substantially only at the diagonal portion as shown in FIG. For example, consider a case in which the amount of floating of the light source and the amount of displacement of the spot on the panel surface due to insertion of the translucent auxiliary lens and movement of the light source have the values shown in Table 1, respectively.

[0037]

[Table 1]

If the distance (ΔZ1) that moves the light source away from the panel is a value between the floating amount at the X-axis end and the Y-axis end, here 0.825 mm, the movement amount of the spot caused by the movement of the light source is Y 16.5 μm at the axis end, 1 at the X axis end
It is 9.5 μm and 30 μm at the diagonal. Accordingly, the displacement of the spot caused by the insertion of the translucent auxiliary lens 9a and the displacement of the spot caused by the movement of the light source are offset, and
Finally, 0.5 μm at the Y-axis end and −0.0 at the X-axis end.
The spot position is displaced by 5 μm and 5.0 μm at the diagonal.

As described above, by repeating the exposure a plurality of times while changing the apparent position of the light source unit 5 within a range where the positions of the spots at the X-axis end and the Y-axis end do not substantially fluctuate, The diagonal black matrix hole shape can be improved while keeping the black matrix hole shapes at the X-axis end and the Y-axis end substantially circular.

Although the above description has been made with reference to the case of using the plate-shaped translucent auxiliary lens 9a, the translucent auxiliary lens 9a to be used is not limited to this.
Either a concave-shaped translucent auxiliary lens or a convex-shaped translucent auxiliary lens can be used. However, the moving direction and the moving amount of the light source unit 5 need to be determined according to the combination of the translucent auxiliary lenses to be used and the like.

Here, the exposure performed without using the translucent auxiliary lens 9a is combined with the exposure performed using the translucent auxiliary lens 9a and displacing the light source from the first exposure position. The spot shape, that is, the shape of the black matrix hole was improved. However, besides this, the same effect can be obtained by selectively using a plurality of types of translucent auxiliary lenses having different thicknesses and shapes by utilizing the difference in refraction of each translucent auxiliary lens. For example, various combinations are possible as shown in Table 2 below.

[0042]

[Table 2]

In each of the six examples shown in Table 2, the translucent auxiliary lens used for the first exposure and the translucent auxiliary lens used for the second exposure have different shapes. Therefore, the refraction state (optical path) of the incident light L is also different from each other. Therefore, in the first exposure, exposure is performed for a predetermined time while the first light-transmitting auxiliary lens is inserted.
In the subsequent second exposure, the second light-transmitting auxiliary lens is inserted, and the light source unit 5 is positioned on the center axis connecting the center of the panel 1 and the light source unit 5 at the X-axis end and the Y-axis end. The exposure is performed for a predetermined time by moving the light source by the floating amount ΔZ.

As described above, by changing the combination of the shapes of the light-transmitting auxiliary lenses 9a and 9b and the thickness t of the light-transmitting auxiliary lenses 9a and 9b, those having a small ellipticity of the black matrix hole shape on the diagonal axis are as follows. With high precision and a large degree of ellipse, the elliptical shape of the black matrix hole can be corrected without increasing the plate thickness of the translucent auxiliary lens or increasing the moving amount ΔZ of the light source unit 5.

For various types of translucent auxiliary lenses,
FIGS. 4 and 5 show how the light source section rises.
6 and 7.

FIG. 4 shows a case where two plate-shaped translucent auxiliary lenses 9a and 9b having the same refractive index and different thickness are selectively used. When the translucent auxiliary lens 9b having the thickness t1 is inserted, the light L is refracted according to Snell's law as shown in FIG. 4, and Δ is applied so that the light source unit 5 approaches the panel.
It rises by Z1. Transparent auxiliary lens 9a of thickness t2
When the light source unit 5 is inserted, ΔZ2
Becomes In this case, ΔZ2 is larger than ΔZ1. In other words, in the case of the plate-shaped translucent auxiliary lens, the larger the thickness, the larger the amount of floating, and the apparent position of the light source unit 5 is closer to the panel. Therefore, when the thick light-transmitting auxiliary lens 9a is used in the first exposure and the thin light-transmitting auxiliary lens 9b is used in the second exposure, the light source unit is set at the time of the second exposure. Light source unit 5 by Δd (= ΔZ2-ΔZ1)
Close to the panel. Conversely, when using the thin translucent auxiliary lens 9b in the first exposure and using the thick translucent auxiliary lens 9a in the second exposure, the light source unit is used in the second exposure. By Δd (= ΔZ2−ΔZ1).
Away from the panel.

FIG. 5 shows a plate-shaped translucent auxiliary lens 9a having a thickness t and a translucent auxiliary lens 9a having a thickness t at the thickest portion, the light source section 5 being flat and the panel side being convex. Optical auxiliary lens 9b
It is about the case of using properly. In this case, the floating amount ΔZ when the translucent auxiliary lens 9a is inserted
2 is larger than the lifting amount ΔZ1 when the translucent auxiliary lens 9b is inserted.

FIG. 6 shows a plate-shaped translucent auxiliary lens 9a having a thickness t and a thickness t at the thinnest portion. The light source 5 has a flat plate side and a panel-side surface has a concave surface. This is a case where the sex assist lens 9b is used properly. In this case, the floating amount ΔZ1 when the translucent auxiliary lens 9a is inserted
Is smaller than the lifting amount ΔZ2 when the translucent auxiliary lens 9b is inserted.

FIG. 7 shows a light-transmitting auxiliary lens 9a in which the thickness at the thinnest portion is t, the side of the light source 5 is flat and the panel side is concave, and the thickness at the thickest portion is t. This is the case where the light source unit 5 side is a flat plate and the panel-side surface is a translucent auxiliary lens 9b having a convex surface. In this case, the floating amount ΔZ2 when the translucent auxiliary lens 9a is inserted is larger than the floating amount ΔZ1 when the translucent auxiliary lens 9b is inserted.

Here, the first exposure (reference position)
The midpoint between the first and second exposures (displacement positions) was set as the center position of the deflected beam, that is, the center of deflection, and the light source units were arranged at corresponding positions.

The number of exposures is not limited to two. It may be performed more times if necessary.

It is not impossible to obtain the same effect as that of the present embodiment only by using the translucent auxiliary lens without moving the light source unit. However, this requires an expensive aspherical lens, high curved surface accuracy, and the like, which makes the apparatus expensive. In addition, it is difficult to finely correct the spot position as needed, which lacks versatility. On the other hand, in the exposure method of the present embodiment, a general-purpose lens can be used, so that the apparatus price can be reduced even when applied to an actual apparatus. In addition, since fine adjustment can be easily performed as necessary, the versatility of the apparatus itself is high, and the apparatus is excellent in suitability for high-mix low-volume production.

Embodiment 2 The second embodiment is an exposure apparatus for performing the exposure method described in the first embodiment.

As shown in FIG. 1, the exposure apparatus includes a support 4, a light source 5, a light-transmitting auxiliary lens 9a, a correction filter 12, a correction lens 8, a control unit 21, and the like.

The support 4 is for positioning and supporting the panel.

The light source unit 5 is provided at the bottom of the exposure apparatus, and includes a straight tubular mercury lamp 11 and a masking plate 14 having a slit 15 as shown in FIG. As shown in FIG. 8, the light source unit 5 is configured to revolve along a circular orbit E. The light source unit 5 is provided with a shutter 7 for turning on / off the light L emitted from the straight tubular mercury lamp 11. Further, the light source unit 5 is configured to be able to change its position in the vertical direction with respect to the panel 1 by a light source driving mechanism 6 including a stepping motor or the like, as indicated by an arrow v shown in the figure. ing. However, the light source unit 5 is arranged such that an intermediate point between the first and second exposures, which will be described later, becomes the center of deflection of the electron beam in the picture tube in which the panel 1 is incorporated. The position of the light source unit 5 in the first exposure is set as a reference position, and in the second exposure, the position is moved from the reference position by a separately determined amount. The on / off of the shutter 7 and the control of the light source driving mechanism 6 are performed based on an instruction from the control unit 21.

The light-transmitting auxiliary lens 9a is for refracting the light L. In the present embodiment, a flat-plate-like lens is used. The light-transmitting auxiliary lens 9a irradiates the photosensitive agent layer 2 by moving in parallel to the panel 1 as shown by an arrow ha by an auxiliary lens driving mechanism 10 including an air cylinder and the like. The light L can be inserted into and extracted from the passage area. The control of the auxiliary lens drive mechanism 10, that is, the insertion and removal of the translucent auxiliary lens 9a, is performed based on an instruction from a control system not shown in FIG.
As will be described later, in the present embodiment, the translucent auxiliary lens 9a is driven in conjunction with the light source unit 5.

The correction filter 12 is for correcting the light amount distribution of the light L irradiating the photosensitive agent layer 2.

The correction lens 8 approximates the trajectory of the light L emitted from the light source unit 5 to the trajectory of the electron beam emitted from the electron gun of the color picture tube.

The control section 21 controls the entire exposure apparatus, and includes a memory 22, a processor 23, a drive circuit 24 for driving each section, and the like.

The processor 23 realizes various functions by executing control programs, calculations, and the like stored in the memory 22. In particular, in the exposure apparatus of the present embodiment,
A single panel is exposed a plurality of times, and has a function of controlling insertion / retreat of the translucent auxiliary lens 9a and movement of the light source unit 5 at this time. Further, a function for turning on / off the shutter 7 is provided.

The memory 22 stores in advance various data necessary for various controls in addition to the control program. Particularly, in the present embodiment, information defining the correspondence between the type of the translucent auxiliary lens 9a and the movement amount ΔZ of the light source unit 5 is stored. As an example, Table 3 shows information specified for exposure of a 17 inch 90 ° tube. In Table 3, information of three types of combinations is stored in consideration of replacing the translucent auxiliary lens.

[0063]

[Table 3]

The “optical device” in the claims is a translucent auxiliary lens in the present embodiment. The “irradiation surface” is the photosensitive agent layer 2 of the panel 1.
The “light source unit” corresponds to the light source unit 5, particularly the straight tube mercury lamp 12. The “optical device insertion / retraction means” is realized by the auxiliary lens driving mechanism 6. `` Light source moving means ''
Are realized by the light source driving mechanism 10. “Control means” corresponds to the control unit 21. "Storage means"
It corresponds to the memory 22. However, the above components operate in close cooperation with each other, and the correspondence described here is not strict.

Next, the exposure operation will be described with reference to FIG.

FIG. 2 is a diagram showing the refraction of light by the plate-shaped translucent auxiliary lens 9a. In the drawing, θ1 is the angle (incident angle) at which the light L enters the flat light-transmitting auxiliary lens 9a, and θ2 is the refraction angle of the flat light-transmitting auxiliary lens 9a.

At the time of exposure, first, the photosensitive agent layer 2
The panel 1 on which is formed is placed on the support 4. In this state, the control unit 21 controls each unit to perform exposure,
An opening pattern of the shadow mask 3 is printed on the photosensitive agent layer 2. More specifically, the light L emitted from the straight tubular mercury lamp 11 passes through the slits 15 of the masking plate 14, further passes through a large number of fine openings formed in the shadow mask 3, and passes through the photosensitive agent layer 2. To form a spot. During this exposure, the light source unit 5 revolves along the trajectory E. As a result, a large number of spots are formed on the photosensitive agent layer 2 corresponding to the circular openings.

In the exposure apparatus of this embodiment, this exposure is performed in two steps.

The first exposure is performed by using the translucent auxiliary lens 9a.
Is performed in a state where it is retracted from the light L passage area (in a state where it is not inserted). In this case, the position of the light source unit 5 is set to the reference position. By this first exposure, panel 1
The spot S that is formed at the X-axis end and the Y-axis end has a circular shape and a diagonal portion has an elliptical shape whose minor axis is in the diagonal direction.

After the completion of the first exposure, the controller 21 prepares for the second exposure. That is, the translucent auxiliary lens 9a is inserted, and the light source unit 5 is further moved perpendicularly to the panel 1 and by ΔZ from the panel 1 in a predetermined direction. The moving direction and the moving amount of the light source unit 5 can be obtained by referring to data (see Table 3) stored in the memory 22 in advance. During this preparation operation, the light L emitted from the straight tubular mercury lamp 11 is blocked by turning off the shutter 7.

After the above preparation is completed, the control unit 21
The second exposure is performed for a predetermined time by opening the shutter 7 of the light source unit 5. By this second exposure, X of panel 1 is
The spot S formed at the axis end and the Y-axis end has a circular shape, and its position is substantially the same as the spot S formed at the time of the first exposure. Therefore, the black matrix holes finally formed at the X-axis end and the Y-axis end are circular.

On the other hand, the spot S formed on the diagonal portion of the panel 1 by the second exposure has an elliptical shape whose minor axis is in the diagonal direction similarly to the first exposure. Are displaced diagonally from the spot S formed at the time of the first exposure. When the spot formed by the first exposure and the spot formed by the second exposure are combined with respect to the diagonal portion, the overall shape is close to a circle. Accordingly, the black matrix hole formed at the diagonal portion finally becomes substantially circular. Each part (X
(Shaft end, Y-axis end, diagonal)
The principle of this is as already described in the first embodiment.

Embodiment 3 In Embodiment 3, a plurality of types of translucent auxiliary lenses are selectively used for each exposure, and the difference in refraction of each translucent auxiliary lens is used to obtain a black matrix hole. This is an exposure apparatus aiming at improving the shape of the substrate. Hereinafter, description will be made with reference to FIG. Note that the same reference numerals are given to the same functional portions as those of the device of the second embodiment, and description thereof will be omitted.

As shown in FIG. 9, the exposure apparatus of the present embodiment includes a plurality of types of light-transmitting auxiliary lenses, which can be used for the first exposure and the second exposure. ing. The other points are basically the same as those of the second embodiment.
Is the same as

The light-transmitting auxiliary lens 9a and the light-transmitting auxiliary lens 9b have different shapes. The light-transmitting auxiliary lens 9a and the light-transmitting auxiliary lens 9b are moved in parallel to the panel 1 by the auxiliary lens driving mechanism 10 including an air cylinder or the like, as shown by arrows ha and hb. 2. Insertion of light L illuminating 2 into the passage area /
Evacuation is possible.

The auxiliary lens driving mechanism 10 includes a controller 21
Are driven in accordance with the instructions from, and the light-transmitting auxiliary lens 9a is inserted at the time of the first exposure, and the light-transmitting auxiliary lens 9b is inserted at the time of the second exposure. I have. In the memory 22 of the control unit 21 according to the second embodiment,
Assuming a 17-inch 90 ° tube, a translucent auxiliary lens 9
Data of combinations as shown in Table 2 are stored as the shapes of a, 9b, and the movement amount ΔZ of the light source. Control unit 21
Reads out the data corresponding to the translucent auxiliary lenses 9a and 9b attached at that time among these data,
Control is performed.

The exposure operation will be described.

The exposure is performed twice.

Prior to the first exposure, the control unit 21
Is the auxiliary lens driving mechanism 1 with the shutter 7 closed.
By 0, the translucent auxiliary lens 9b is inserted into the light L passage area. In addition, by giving an instruction to the light source driving mechanism 6, the light source unit 5 is positioned at the reference position which is the first exposure position.

After the above preparation is completed, the control unit 21
The shutter 7 is opened, the light source unit 5 emits light, and exposure is performed for a predetermined time. The spot S formed on the panel 1 by the first exposure is circular at the X-axis end and the Y-axis end, and is elliptical at the diagonal part with the diagonal direction having a shorter diameter.

Thereafter, in the same manner as in the second embodiment, the preparation for the second exposure and the second exposure are performed. That is, the light-transmitting auxiliary lens 9a is inserted, and further, the light source unit 5 is moved vertically from the panel 1 by ΔZ in a predetermined direction.
Just move. The moving direction and the moving amount of the light source unit 5 can be obtained by referring to data (see Table 2) stored in the memory 22 in advance. During this preparation operation, the shutter 7
Is turned off, the light L emitted from the straight tubular mercury lamp 11 is blocked.

After the above preparation is completed, the control unit 21
The second exposure is performed for a predetermined time by opening the shutter 7 of the light source unit 5. By this second exposure, X of panel 1 is
The spot S formed at the axis end and the Y-axis end has a circular shape, and its position is substantially the same as the spot S formed at the time of the first exposure. Therefore, the black matrix hole finally formed at the X-axis end and the Y-axis end is circular. On the other hand, the spot S formed on the diagonal portion of the panel 1 by the second exposure has an elliptical shape whose minor axis is in the diagonal direction similarly to the first exposure, but the position of the spot S is small. Are shifted diagonally from the spot S formed at the time of the first exposure. And
Regarding the diagonal portion, when the spot formed by the first exposure and the spot formed by the second exposure are combined, the overall shape is almost circular. Accordingly, the black matrix hole formed at the diagonal portion finally becomes substantially circular.

The principle of the spot position and shape at each part (X-axis end, Y-axis end, diagonal part) is as described in the first embodiment.

[0084]

As described above, in the configuration according to the present invention in which the presence or absence of the optical device and the movement of the light source unit are used, the shape of the light spot is excellent in any area of the irradiated surface. If this is used to form the fluorescent screen of the picture tube, the shape of the black matrix holes at the diagonal as well as the black matrix holes at the X-axis and Y-axis ends of the face panel should be close to a circle. Can be. As a result, it is possible to prevent the uniformity of luminance and the deterioration of color purity over the entire phosphor screen, which are caused by the distortion of the shape of the diagonal black matrix hole.

In a configuration in which a plurality of types of optical devices are selectively used and the movement of the light source unit is used, the shape of the light spot is excellent in any region of the irradiated surface. When such a configuration is used for forming the fluorescent screen of the picture tube, not only the black matrix holes at the X-axis end and the Y-axis end of the face panel but also the shape of the black matrix holes at the diagonal portions are circular. You can get closer. In particular, those with a small degree of ellipse increase the accuracy, and those with a large degree of ellipse do not increase the thickness of the optical device or the amount of movement of the light source unit,
Its shape can be approximated to a circle. As a result, it is possible to prevent the uniformity of luminance and the deterioration of color purity over the entire phosphor screen due to the elliptical black matrix hole at the diagonal part.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an outline of an exposure apparatus according to Embodiments 1 and 2 of the present invention.

FIG. 2 is a diagram showing refraction of light by a flat light-transmitting auxiliary lens in the exposure method according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram showing a displacement of a spot position.

FIG. 4 is a diagram showing the lifting of a light source by a flat light-transmitting auxiliary lens having a different thickness.

FIG. 5 is a view showing the floating of a light source in a flat light-transmitting auxiliary lens and a convex light-transmitting auxiliary lens.

FIG. 6 is a view showing the floating of a light source in a flat light-transmitting auxiliary lens and a concave light-transmitting auxiliary lens.

FIG. 7 is a view showing the floating of a light source in a convex light-transmitting auxiliary lens and a concave light-transmitting auxiliary lens.

FIG. 8 is a perspective view illustrating an outline of a light source unit.

FIG. 9 is a schematic diagram illustrating an outline of an exposure apparatus according to a third embodiment of the present invention.

FIG. 10 is a schematic view showing an exposure state in a conventional exposure apparatus.

11A and 11B are diagrams illustrating a shape of light emitted from a straight tube mercury lamp in a conventional exposure apparatus, wherein FIG. 11A is a diagram viewed from the center, FIG. 11B is a diagram viewed from the Y-axis end, c) is X
FIG. 3D is a view as viewed from the shaft end, and FIG. 4D is a view as viewed from the diagonal shaft end.

FIG. 12 is a diagram showing a black matrix hole formation pattern generated when exposure is performed by a conventional exposure light source device.

FIG. 13 is a diagram showing a phenomenon in the related art;
(A) is a diagram showing a change in the trajectory of light when the position of the light source unit is changed in the tube axis direction, and (b) is a diagram showing a displacement of the position of light applied to the inner surface of the panel in (a). It is.

FIG. 14 is a diagram showing a phenomenon in the related art;
(A) is a diagram showing the change in the trajectory of light when the translucent auxiliary lens is inserted and when it is taken out, and (b) is a diagram showing (a) in FIG.
FIG. 9 is a diagram showing displacement of the position of light applied to the inner surface of the panel at the time of FIG.

[Explanation of symbols]

1 panel, 2 photosensitizer layer, 3 shadow mask,
5 light source section, 6 light source drive mechanism, 7 shutter,
8 correction lens, 9a, 9b translucent auxiliary lens,
10 auxiliary lens drive mechanism, 12 correction filter,
14 masking plate, 15 slit, 16
Circular opening, 21 control unit, 22 memory, 2
3 Processor, L light, S spot.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yoshito Matsuura 2-6-2 Otemachi, Chiyoda-ku, Tokyo F-term in Mitsubishi Electric Engineering Co., Ltd. 5C028 GG01 GG06

Claims (13)

[Claims] An exposure method for irradiating a light to a surface to be illuminated through a mask having an opening, the method comprising irradiating light to be illuminated to a surface to be illuminated through a light-transmitting optical device. Exposure to irradiate light emitted from the light source unit to the irradiated surface without passing through the optical device, and exposure to irradiate light through the optical device includes light without passing through the optical device. An exposure method in which the position of the light source unit is changed in a direction opposite to the direction of movement of the apparent position of the light source unit by the optical device with reference to the position at the time of exposure to irradiate light. 2. The exposure method according to claim 1, wherein the optical device is a flat transparent member, a convex lens having a flat light source portion, or a concave lens having a flat light source portion. 3. An exposure method for irradiating an irradiation surface with light through a mask having an opening, comprising: exposing the irradiation surface to light emitted from a light source unit through a light-transmitting optical device. And exchanging the optical device, and changing the position of the light source unit in a direction opposite to the direction in which the apparent position of the light source unit is moved by the optical device, and performing the exposure method a plurality of times. 4. When switching a plurality of flat transparent members having different thicknesses as the optical device,
4. The exposure method according to claim 3, wherein the exposure is performed through a thick transparent member, and the light source unit is moved away from the irradiated surface as compared with the exposure performed through the thin transparent member. 5. When a plurality of concave lenses having a flat light source portion side and different curvatures are used as the optical device by switching, when exposure is performed through a concave lens having a small curvature, a large curvature is used. 4. The exposure method according to claim 3, wherein the light source unit is made farther from the surface to be irradiated than at the time of exposure performed through a concave lens. 6. In the case where a plurality of convex lenses having a flat light source portion side and different curvatures are used as the optical device by switching, when exposure is performed through a convex lens having a small curvature, a large curvature is used. 4. The exposure method according to claim 3, wherein the light source unit is closer to the surface to be irradiated than at the time of exposure performed through a convex lens. 7. When switching between a flat transparent member and a concave lens having a flat light source portion side as the optical device, when performing exposure through the concave lens,
4. The exposure method according to claim 3, wherein the light source unit is farther from the surface to be illuminated than at the time of exposure performed through the flat transparent member. 8. When the optical device is used by switching between a flat transparent member and a convex lens having a flat light source section side, when performing exposure through the convex lens,
4. The exposure method according to claim 3, wherein the light source unit is closer to the irradiation surface than at the time of exposure performed via the flat transparent member. 5. 9. When the optical device is used by switching between a concave lens having a flat light source portion and a convex lens having a flat light source portion, when performing exposure through the concave lens, the convex lens is used through the concave lens. 4. The exposure method according to claim 3, wherein the light source unit is further away from the irradiated surface than during the exposure. 10. A light source unit for emitting light, a translucent optical device for moving an apparent position of the light source unit, and setting the optical device on a path from the light source unit to a panel surface, By controlling the optical device insertion / retraction means for retreating the optical device from the path, the light source moving means for moving the light source unit, the light source unit, the optical device insertion / retraction means, and the light source moving means, Exposure to irradiate the surface to be irradiated with light emitted from the light source unit in a state where the optical device is retracted from the path, and when any of the optical devices is set on the path, After changing the position of the light source unit in the direction opposite to the moving direction of the apparent position of the light source unit by the optical device set to An exposure apparatus for irradiating the surface to be irradiated with light emitted from the light source unit, and control means for performing the exposure. 11. A light source unit that emits light, a plurality of optical devices that move an apparent position of the light source unit, and only a separately selected optical device on a path from the light source unit to a panel surface. While setting
By controlling the optical device insertion / retraction means for retreating other optical devices from the path, the light source moving means for moving the light source unit, and controlling the light source unit, the optical device insertion / retraction means and the light source movement means. Setting any one of the optical devices on the path, and changing the position of the light source unit in a direction opposite to the moving direction of the apparent position of the light source unit by the optical device set at that time. And an exposure device for irradiating the surface to be irradiated with light emitted from the light source unit a plurality of times by switching an optical device set on the optical path. 12. A storage unit for storing exposure information defining an amount by which the light source unit is moved for each of the optical devices, wherein the control unit specifies an optical device used at that time in the exposure information. The position of the light source unit is displaced by a predetermined amount.
12. The exposure apparatus according to 0 or 11. 13. The exposure apparatus according to claim 12, wherein said optical device is a flat transparent member, a convex lens or a concave lens.