JP2000005898A - Circularity holding tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and surely secure circularity of a cylinder when welding processing is applied to a long cylinder. SOLUTION: This holding tool A is inserted in a long cylinder 21 and maintains circularity of the cylinder 21 when the cylinder is welded. In this case, the tool comprises holding plate mounting shafts 24, 25 which can be installed inside the cylinder 21 across approximately total length, plural circularity holding plates 27 which are mounted to the shafts 24, 25 at a constant parallel interval and have a perfect circular abutting face 26 detachably/abuttably to an inner face of the cylinder 21 on each of the outer peripheral face, and a holding plate diameter adjusting mechanism 32 which is disposed parallely with the shafts 24, 25 in the cylinder 21 and can shrink, enlarge the face 26 of the plural plates 27 from the outside of the cylinder 21 integrally.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a roundness holder used for manufacturing a cylindrical pulling furnace chamber by welding in a silicon single crystal manufacturing apparatus.

[0002]

2. Description of the Related Art Conventionally, for example, as a method of manufacturing a silicon single crystal, there is a Czochralski method of growing a crystal from a melt in a crucible while pulling up the crystal. FIG. FIG.
As shown in the figure, a quartz crucible 11 heated by a heater is provided in a main chamber 10.
Above the main chamber 10, an upper chamber 12 having a gate valve (not shown) and a cylindrical lifting furnace chamber 13 are provided in series.

[0003] At the top of the pulling furnace chamber 13, a crystal rotation driving unit 14 is provided. From the crystal rotation driving unit 14, a pulling wire 15 is hung down toward the silicon melt in the crucible 11. And the lifting wire 1
A seed crystal is attached to the chuck 16 provided at the tip of the fifth. With the above configuration, the ingot 1 formed while growing a silicon single crystal around the seed crystal is formed.
7 can be pulled up into the furnace chamber 13.

[0004] When manufacturing the pulling furnace chamber 13 that constitutes the silicon single crystal manufacturing apparatus having the above configuration, it is extremely important to ensure the roundness of the inner surface thereof. That is, the lifting furnace chamber 13
If the roundness of the inner surface of the ingot is not sufficient, the radiant heat radiated from the ingot 17 and then reflected toward the ingot 17 by the inner surface of the lifting furnace chamber 13 becomes non-uniform, and the quality of the ingot 17 is significantly reduced. Because it becomes.

Therefore, conventionally, when manufacturing the lifting furnace chamber 13, a plurality of jacks each having a roundness holding plate are arranged inside the cylindrical lifting furnace chamber 13, and an operator can lift the furnace. The inside of the chamber 13 is operated to operate the jacks to expand the roundness holding plate, thereby raising the furnace chamber 1.
3 roundness, and then the lifting furnace chamber 1
The lifting furnace chamber 13 was manufactured by welding a partition wall or the like to the furnace 3.

[0006]

However, the above-mentioned work for manufacturing the pulling furnace chamber 13 still has the following problems to be solved. That is, the lifting furnace chamber 13 is generally formed of a long cylinder, and its inner diameter is only large enough to be bent by an operator, so that the operation of expanding the roundness holding plate by the jack is complicated and difficult. . Further, in order to expand the diameter of the plurality of roundness maintaining plates by operating independent jacks, the lifting furnace chamber 1 is used.
It was difficult to ensure the same roundness over the entire length of No. 3.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and a roundness holder that can easily and surely ensure the roundness of a long cylinder when welding is performed on the long cylinder. The purpose is to provide.

[0008]

According to the present invention, there is provided a semiconductor device comprising:
The circularity retainer described is a circularity retainer that is inserted into a long cylinder and retains the circularity of the cylinder when performing welding processing on the cylinder. A mounting plate mounting shaft that can be disposed over substantially the entire length of the cylinder, and the mounting plate mounting shaft is mounted at intervals in the axial direction on the holding plate mounting shaft, and the outer peripheral surface thereof can be freely contacted with and separated from the inner peripheral surface of the cylinder A plurality of roundness holding plates having a perfect circular abutment surface, and are disposed in the cylinder in parallel with the holding plate mounting axis, and integrally form the diameters of the plurality of roundness holding plates from outside the cylinder. And a holding plate diameter adjusting mechanism that can be expanded and contracted.

[0009] The roundness holder according to the second aspect is the first aspect.
In the circularity holder described above, the holding plate mounting shaft is composed of a disk fixed shaft and a disk pivot provided respectively at a central portion and a peripheral portion in the cylinder, and each of the circularity holding plates. Is formed from first and second divided holding plates having substantially the same semicircular shape, and a central portion of the first divided holding plate is fixed to the disk fixing shaft, and the first and second divided holding plates are fixed. One side edge of the plate is rotatably attached to the disk pivot, and the first
And the other peripheral edge of the second divided holding plate is connected by a tension spring, and the retaining plate diameter adjusting mechanism extends through the gap between the other peripheral edge of the first and second divided retaining plates. Rotating the second divided holding plate with respect to the first divided holding plate against the tensile force of the tension spring, and bringing the perfect circular contact surface of the circularity holding plate into the inside of the cylinder. It is formed from a holding plate diameter adjusting member to be brought into contact with the peripheral surface.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention. In the present embodiment, the elongate cylinder whose roundness is maintained by the roundness holder A according to one embodiment of the present invention is a lifting furnace chamber 13 shown in FIG.

First, referring to FIG. 1 and FIG. 2, the overall structure of the pulling furnace chamber 13 will be described. As shown in the drawing, the lifting furnace chamber 13 has a connecting flange 18 connected to the upper chamber 12 at one end, and an end plate 19 at the other end, and a crystal rotation drive unit 14 on the end plate 19. Attached (see FIG. 4).

The peripheral wall of the lifting furnace chamber 13 has a double pipe structure in which an inner cylinder 21 is arranged concentrically within an outer cylinder 20, and is formed between the inner and outer cylinders 21 and 20. The space is partitioned in the axial direction (longitudinal direction) by a plurality of partition walls 22, and a compartment 23 is formed between the partition walls 22. Then, by flowing cooling water through the compartment 23, the lifting furnace chamber 13 can have a cooling jacket structure.

Next, the configuration of the roundness holder A according to the present embodiment will be described with reference to FIGS.

As shown in FIG. 2, a disk fixed shaft 24 and a disk pivot shaft 25 having substantially the same length as the inner cylinder 21 are respectively provided at the center and the peripheral portion of the inner chamber 21 of the pulling furnace chamber 13. Are arranged in a state where a part of the is inserted. That is, the disk fixed shaft 24 is disposed on the axis 21 a of the inner cylinder 21, and the disk pivot 25 is disposed at a position eccentric in the radial direction from the axis 21 a of the inner cylinder 21. The holding plate mounting shaft is constituted by the disk fixing shaft 24 and the disk pivot shaft 25.
A plurality of roundness holding plates 27 each having a perfect circular contact surface 26 that comes into contact with the inner peripheral surface of the first circular surface so as to freely contact and separate therefrom are attached at intervals in the axial direction.

As shown in FIGS. 2 and 3, each roundness holding plate 27 is formed by first and second divided holding plates 28 and 29 having substantially the same semicircular shape. The central portion of the first split holding plate 28 is fixed to the disk fixed shaft 24. As shown in FIGS. 2 and 3, the first and second divided holding plates 2
The peripheral edges of the sides 8 and 29 are superimposed on each other and are rotatably attached to the disk pivot 25. On the other hand, the other peripheral edges of the first and second divided holding plates 28 and 29 are connected by a tension spring 30.

In the inner cylinder 21, the first and second divided holding plates 28, 29 extend through the gap 31 between the other peripheral edges of the first and second divided holding plates 28, 29, and are opposed to the first spring 30 by the first spring. A holding plate diameter adjusting member 32 which is an example of a holding plate diameter adjusting mechanism having a flat rectangular cross section capable of rotating the second divided holding plate 29 with respect to the divided holding plate 28 is arranged in parallel with the holding plate mounting axis. The rotation handle 33 is attached to one end of the holding plate diameter adjusting member 32. The rotary handle 33 is located outside the inner cylinder 21 even when the roundness holder A is completely inserted into the inner cylinder 21.

With this configuration, when the roundness holder A is inserted into the inner cylinder 21 and the roundness contact surface 26 of the roundness holding plate 27 collides with the inner surface of the inner cylinder 21, the roundness is maintained. Board 27
Since the diameter is easily reduced, the roundness holder A can be easily inserted into the inner cylinder 21. In addition, the circularity holding plate 27
When the diameter is reduced, the impact force can also be absorbed by the tension spring 30, so that the roundness holder A can be inserted into the inner cylinder 21 flexibly. Further, after the circularity holder A is inserted into the inner cylinder 21, the rotation handle 33 is rotated to rotate the holding plate diameter adjusting member 32 around its axis, so that the inner cylinder 21 can be operated from outside. , All roundness retaining plates 2
7 can easily contact the inner peripheral surface of the inner cylinder 21.

Next, the production of the pulling furnace chamber 13 using the roundness holder A having the above configuration will be described. (A) First, a rectangular plate is bent into a circular shape, and both side edges are welded to each other to form an inner cylinder 21 of the pull-up furnace chamber 13. Then, a bead attached to the inner surface of the inner cylinder 21 is polished and removed.

(B) As shown in FIG.
Is inserted into the inner cylinder 21. At this time, all the roundness holding plates 27 can be elastically reduced in diameter via the tension springs 30 so that the roundness holder A can be inserted into the inner cylinder 21 flexibly and securely. Can be.

(C) By rotating the holding plate diameter adjusting member 32 about its axis, all the roundness holding plates 2 are adjusted.
7 is brought into contact with the inner peripheral surface of the inner cylinder 21 to ensure the roundness of the inner cylinder 21 over the entire length. (D) A plurality of partition walls 22 are welded to the outer peripheral surface of the inner cylinder 21. At this time, the inner cylinder 2
Since the roundness of 1 is secured over the entire length, it is ensured that distortion (deformation) due to welding is prevented from occurring in the inner cylinder 21 and that the inner cylinder 21 maintains sufficient roundness even after welding. Can be.

(E) By rotating the holding plate diameter adjusting member 32 in the opposite direction about the axis thereof, the perfect circular contact surfaces 26 of all the roundness holding plates 27 are moved from the inner peripheral surface of the inner cylinder 21 to the outer circumferential surface. After the separation, the roundness holder A is removed from the inner cylinder 21 to the outside. (F) Then, after attaching the outer cylinder 20 to the outside of the inner cylinder 21,
The pulling furnace chamber 13 is manufactured by integrating the outer cylinder 20 and the inner cylinder 21 by metal touch.

As described above, the present invention has been described with reference to an embodiment. However, the present invention is not limited to the configuration described in the above embodiment, and is described in the claims. It also includes other embodiments and modifications that can be considered within the scope of the matters described.

[0023]

According to the circularity holder of the first and second aspects, all the circularity retaining plates are expanded by a retaining plate diameter adjusting mechanism operable from the outside of the cylinder so as to abut on the circularity. By making the surface abut on the inner peripheral surface of the cylinder, the roundness of the cylinder can be maintained over the entire length. Therefore, even when a partition wall or the like is welded to the cylinder thereafter, it is possible to reliably prevent welding distortion from occurring in the cylinder, and to manufacture a cylinder having sufficient roundness. In particular, when the cylinder is a pulling furnace chamber in a silicon single crystal manufacturing apparatus, the radiant heat radiated from the ingot and then reflected toward the ingot by the inner surface of the pulling furnace chamber can be made uniform, and the quality of the ingot can be improved. Can be improved. Further, since the roundness holder is substantially composed of only a holding plate mounting shaft, a plurality of roundness holding plates mounted on the holding plate mounting shaft, and a holding plate diameter adjusting mechanism, Is simple and inexpensive to manufacture.

[0024] In the roundness holder according to the second aspect,
The roundness holding plate is formed by connecting one peripheral edge of the first and second split retaining plates rotatably to a disk pivot and connecting the other peripheral edges by a tension spring. Therefore, even if the circularity holding plate collides with the cylinder when inserting the circularity holding device into the cylinder, the circularity holding plate can be easily reduced in diameter. Can be inserted inside. Also, the impact force can be absorbed by the reduced diameter of the circularity holding plate, and the circularity holding plate can be inserted into the cylinder flexibly, and the cylinder and the circularity holder may be damaged.
Deformation can also be prevented.

[Brief description of the drawings]

FIG. 1 is a partially cutaway front view of a pulling furnace chamber that can be manufactured using a roundness holder according to one embodiment of the present invention.

FIG. 2 is a perspective view of a roundness holder according to one embodiment of the present invention, a part of which is inserted into a lifting furnace chamber.

FIG. 3 is a plan view of a circularity holding plate of the circularity holding tool.

FIG. 4 is a partial front sectional view of the silicon single crystal manufacturing apparatus.

[Explanation of symbols]

A Roundness holder 10 Main chamber 11 Crucible 12 Upper chamber 13 Pulling furnace chamber 14 Crystal rotation drive unit 15 Pulling wire 16 Chuck 17 Ingot 18 Connecting flange 19 End plate 20 Outer cylinder 21 Inner cylinder 21a Axis line 22 Partition wall 23 Partition chamber 24 Disc fixed shaft 25 Disc pivot 26 Round contact surface 27 Roundness holding plate 28 First divided holding plate 29 Second divided holding plate 30 Tension spring 31 Gap 32 Holding plate diameter adjusting member 33 Rotating handle

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Satoshi Kato 3434 Shimada, Hikari-shi, Yamaguchi Pref.

Claims (2)

[Claims] 1. A roundness holding tool inserted into a long cylinder to maintain the roundness of the cylinder when performing welding processing on the cylinder, wherein the roundness holding tool extends over substantially the entire length of the cylinder. A holding plate mounting shaft that can be disposed, and a perfect circular contact that is mounted on the holding plate mounting shaft at an interval in the axial direction and that can abut on an outer peripheral surface thereof so as to be able to freely contact and separate from an inner peripheral surface of the cylinder. A plurality of roundness holding plates having a contact surface, disposed in the cylinder in parallel with the holding plate mounting axis, and capable of integrally expanding and contracting the diameters of the plurality of roundness holding plates from outside the cylinder. A roundness holder having a simple holding plate diameter adjusting mechanism. 2. The holding plate mounting shaft is composed of a disk fixing shaft and a disk pivot provided at a central portion and a peripheral portion in the cylinder, respectively, and each of the circularity holding plates is substantially the same half. A first divided holding plate having a circular shape, a central portion of the first divided holding plate is fixed to the disk fixed shaft,
One peripheral edge of the first and second split holding plates is rotatably attached to the disk pivot, and the other peripheral edge of the first and second split holding plates is connected by a tension spring,
Further, the holding plate diameter adjusting mechanism extends through the gap between the other peripheral edges of the first and second split holding plates, and is attached to the first split holding plate against the tensile force of the extension spring. 2. A holding plate diameter adjusting member that rotates the second divided holding plate and makes the round contact surface of the roundness holding plate abut on the inner peripheral surface of the cylinder. Roundness holder.