JP2000005586A - Device for adjusting resistivity value of pure water - Google Patents
Device for adjusting resistivity value of pure waterInfo
- Publication number
- JP2000005586A JP2000005586A JP17700698A JP17700698A JP2000005586A JP 2000005586 A JP2000005586 A JP 2000005586A JP 17700698 A JP17700698 A JP 17700698A JP 17700698 A JP17700698 A JP 17700698A JP 2000005586 A JP2000005586 A JP 2000005586A
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- hollow fiber
- carbon dioxide
- fiber membrane
- dioxide gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Accessories For Mixers (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、純水の比抵抗値調
整装置に関し、更に詳細には、純水の比抵抗値の調節が
容易で、制御機構の簡単な小型の純水の比抵抗値調整装
置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for adjusting the specific resistance of pure water, and more particularly, to a device for adjusting the specific resistance of pure water which is easy to adjust and has a simple control mechanism. It relates to a value adjusting device.
【０００２】[0002]
【従来の技術】半導体装置の製造過程では、多くのプロ
セス工程の前後で、ウエハを純水で洗浄してウエハ上の
薬剤、パーティクル或いは汚染物を除去している。とこ
ろで、半導体装置の製造工程においては、高いクリーン
度を要求されるために、通常、比抵抗値≧１８MΩcmの
純水を使用している。しかし、純水による洗浄工程にお
いては、純水の比抵抗値が高いと、静電気が発生し、そ
の結果として絶縁破壊、ダストを吸着する等の不具合を
引き起こす。例えば、洗浄装置のウエハステージ上に保
持され、高速回転しているウエハ上にノズルから噴出し
たジェット水が衝突した際に、静電気がウエハ上に発生
し、ウエハ上のパーティクルを静電吸着し、除去し難く
する。更には、静電気の発生により、ウエハが静電破壊
されることもある。そこで、洗浄工程においては、この
静電気の発生の抑制するために、純水の比抵抗値調整装
置を使って、イオン、例えば炭酸ガスを溶解させて比抵
抗値を０．２〜２MΩcm程度まで低下させ、静電気が発
生し難いように、純水の比抵抗を調節している。2. Description of the Related Art In a semiconductor device manufacturing process, before and after many process steps, a wafer is washed with pure water to remove chemicals, particles or contaminants on the wafer. By the way, in a manufacturing process of a semiconductor device, since high cleanliness is required, pure water having a specific resistance value ≧ 18 MΩcm is usually used. However, in the cleaning step using pure water, if the specific resistance value of pure water is high, static electricity is generated, and as a result, problems such as dielectric breakdown and adsorption of dust are caused. For example, when jet water jetted from a nozzle collides with a wafer that is held on a wafer stage of a cleaning device and is rotating at a high speed, static electricity is generated on the wafer, and particles on the wafer are electrostatically attracted, Make it difficult to remove. Furthermore, the wafer may be electrostatically damaged due to the generation of static electricity. Therefore, in the cleaning step, in order to suppress the generation of static electricity, ions, for example, carbon dioxide gas are dissolved using a specific resistance adjusting device of pure water to lower the specific resistance to about 0.2 to 2 MΩcm. The specific resistance of pure water is adjusted so that static electricity hardly occurs.
【０００３】純水の比抵抗値調整装置とは、上述のよう
に、純水に炭酸ガスを溶解させて純水の比抵抗値を調節
する装置であって、例えば、ウエハを純水で洗浄する
際、静電気の発生によりウエハ洗浄の効率が低下した
り、ウエハに対する放電破壊現象が生じたりするのを防
止するために、半導体装置を製造する工場に供給する純
水の比抵抗を調節するために使用されている。As described above, a specific resistance adjusting device for pure water is a device for adjusting the specific resistance of pure water by dissolving carbon dioxide gas in pure water. For example, a wafer is cleaned with pure water. In order to adjust the specific resistance of pure water supplied to a semiconductor device manufacturing factory, in order to prevent the efficiency of wafer cleaning from being reduced due to the generation of static electricity and to prevent a discharge breakdown phenomenon on the wafer from occurring. Used in
【０００４】従来の純水の比抵抗値調整装置では、純水
にイオンを溶解させるに当たり、純水の流路にマグネシ
ウムのメッシュを装着し、メッシュから溶出するマグネ
シウムイオンを純水に溶解する方法、純水を収容したバ
ブラーに炭酸ガスを送入し、バブリングさせつつ炭酸イ
オンを純水に溶解させる方法、或いはガス透過膜からな
る中空糸膜を用い、中空糸膜の内側から外側の純水に炭
酸ガスを透過させ、炭酸ガスを純水に溶解させる方法の
３つの方法のいずれかが使用されている。従来の純水の
比抵抗値調整装置のうち、比抵抗値を調節した純水のク
リーン度が高いこと、比抵抗値の調節が容易なこと、構
造がコンパクトであること、炭酸ガスの使用量が少ない
こと等の利点から中空糸膜を用いる方法が、最も有効で
有望である。例えば、中空糸膜を用いた純水の比抵抗値
調整装置は、日本ガイシ（株）から「メグコン」の商品
名で販売されている。[0004] In a conventional pure water resistivity adjusting device, a method of dissolving ions in pure water is to attach a magnesium mesh to a flow path of the pure water and dissolve magnesium ions eluted from the mesh in the pure water. A method of feeding carbon dioxide gas into a bubbler containing pure water and dissolving carbonate ions in pure water while bubbling, or using a hollow fiber membrane made of a gas permeable membrane, and using pure water from the inside to the outside of the hollow fiber membrane. Any of the three methods of permeating carbon dioxide and dissolving carbon dioxide in pure water is used. Among the conventional pure water resistivity adjustment devices, high purity of pure water whose resistivity has been adjusted is high, resistivity adjustment is easy, compact structure, and the amount of carbon dioxide used. A method using a hollow fiber membrane is the most effective and promising, because of its advantages such as a small amount of water. For example, an apparatus for adjusting the resistivity of pure water using a hollow fiber membrane is sold by NGK Insulators, Ltd. under the trade name of “Megcon”.
【０００５】しかし、従来の中空糸膜を用いた純水の比
抵抗値調整装置は、設定された比抵抗値を維持するため
に、純水の比抵抗値調整装置から流れ出る調節済みの純
水の比抵抗値を測定し、この値を設定値に対してある一
定の範囲内に収めるためのフィードバック回路を設けた
構成となっている。この結果、純水の供給条件等が変化
した場合にも、純水の比抵抗値を所定の値に保持するこ
とができるものの、電気的な複雑な制御系を必要とする
ため、制御システムが高価になり、純水の比抵抗値調整
装置が大型化してしまうという問題があった。このため
に、設置のための所要面積が大きくなり、例えば洗浄装
置の近傍に設置することが難しくなった。また、制御の
操作も複雑になり、運転が面倒で制御に詳しい人手を要
するという問題もあった。However, a conventional pure water specific resistance adjusting device using a hollow fiber membrane is a method of adjusting pure water flowing out of the pure water specific resistance adjusting device in order to maintain a set specific resistance value. Is provided with a feedback circuit for measuring the specific resistance value and setting the value within a certain range with respect to the set value. As a result, even when the supply conditions of pure water change, the specific resistance value of pure water can be maintained at a predetermined value, but since an electrical complicated control system is required, the control system There is a problem that the apparatus becomes expensive and the specific resistance value adjusting device for pure water becomes large. For this reason, the area required for the installation has become large, and it has become difficult to install, for example, near the cleaning device. In addition, the operation of the control becomes complicated, and there is a problem that driving is troublesome and requires a person who is familiar with the control.
【０００６】[0006]
【発明が解決しようとする課題】そこで、本発明の目的
は、小型で、操作が簡単で、しかも制御機構の簡素な純
水の比抵抗値調整装置を提供することである。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an apparatus for adjusting the specific resistance of pure water which is small in size, easy to operate, and has a simple control mechanism.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係る純水の比抵抗値調整装置は、ガス透過
膜からなる多数本の中空糸膜の束を有し、中空糸膜の内
側中空部を通過する炭酸ガスを中空糸膜の外側に透過さ
せる中空糸膜モジュールと、中空糸膜モジュールを内蔵
し、かつ純水が中空糸膜モジュールの外側を流れる密閉
容器とを備え、中空糸膜モジュールに炭酸ガスを導入し
て、容器内を流れる純水に炭酸ガスを溶解させ、純水の
比抵抗を調節する装置であって、炭酸ガスの圧力及び流
量をそれぞれ調節する圧力調節弁及び流量調節弁が、中
空糸膜モジュールに炭酸ガスを供給する炭酸ガス供給管
に設けてあることを特徴としている。In order to achieve the above object, a pure water specific resistance adjusting device according to the present invention comprises a bundle of a large number of hollow fiber membranes formed of a gas permeable membrane. A hollow fiber membrane module that allows carbon dioxide gas passing through the inner hollow portion of the membrane to permeate to the outside of the hollow fiber membrane, and a sealed container containing the hollow fiber membrane module and in which pure water flows outside the hollow fiber membrane module A device for introducing carbon dioxide gas into a hollow fiber membrane module, dissolving carbon dioxide gas in pure water flowing in a container, and adjusting the specific resistance of the pure water. The control valve and the flow rate control valve are provided on a carbon dioxide gas supply pipe for supplying carbon dioxide gas to the hollow fiber membrane module.
【０００８】本発明で使用する容器の形状は、任意であ
って、縦型、横型、或いはＵ字体のパイプを使っても良
い。また、中空糸膜モジュールの中空糸膜の装着態様も
自在であって、容器の長手方向に沿って直線状に延在さ
せても良く、Ｕ字状に懸架させて良く、或いは螺旋状に
配置しても良い。中空糸膜モジュールに使う中空糸膜
は、中空糸膜の外側を流れている純水に、中空糸膜の内
側の中空部を流れている炭酸ガスを効率よく溶解させる
性能を有し、かつ外側を流れている純水が中空部に入り
込まない性質を有していれば、その種類は問わない。The shape of the container used in the present invention is arbitrary, and a vertical, horizontal, or U-shaped pipe may be used. Further, the mounting mode of the hollow fiber membrane of the hollow fiber membrane module may be freely set, may extend linearly along the longitudinal direction of the container, may be suspended in a U shape, or may be arranged in a spiral shape. You may. The hollow fiber membrane used for the hollow fiber membrane module has the ability to efficiently dissolve the carbon dioxide gas flowing in the hollow part inside the hollow fiber membrane in pure water flowing outside the hollow fiber membrane, and Any type can be used as long as the pure water flowing through the air does not enter the hollow portion.
【０００９】炭酸ガスにより純水の比抵抗値を調節する
際、純水の比抵抗値は、中空糸膜を透過して純水に溶解
する炭酸ガス量に依存する。また、中空糸膜を透過する
炭酸ガス量は炭酸ガスの圧力及び流量、並びに純水の流
量に依存する。従って、中空糸膜を使った純水の比抵抗
値の調節には、炭酸ガスの圧力と流量、及び純水の流量
の３つのパラメータを使用することが可能であるもの
の、一般的には、純水の使用量は、洗浄装置のプロセス
条件等により規定されている場合が多い。そこで、本発
明では、純水の流量制御ではなく、中空糸膜モジュール
に供給する炭酸ガスの圧力と流量とを調節することによ
り、純水に溶解する炭酸ガスの溶解量を調節し、純水の
比抵抗値を調節する。本発明では、純水の比抵抗値を調
節する際、使用する中空糸膜の性質、供給する純水の圧
力、炭酸ガスの溶解効率等を考慮し、純水への炭酸ガス
の溶解時に気泡が発生しない圧力範囲内で、先ず、圧力
調節弁により炭酸ガスの圧力を最適な値に調節する。次
に、比抵抗値が所定の値となるように炭酸ガスの流量を
流量調節弁により調節する。When the specific resistance of pure water is adjusted by carbon dioxide, the specific resistance of pure water depends on the amount of carbon dioxide dissolved in pure water through the hollow fiber membrane. Further, the amount of carbon dioxide gas passing through the hollow fiber membrane depends on the pressure and flow rate of carbon dioxide gas and the flow rate of pure water. Therefore, although it is possible to use three parameters of the pressure and flow rate of carbon dioxide gas and the flow rate of pure water to adjust the specific resistance value of pure water using the hollow fiber membrane, generally, The amount of pure water used is often defined by the process conditions of the cleaning device. Therefore, in the present invention, the amount of carbon dioxide dissolved in pure water is adjusted by controlling the pressure and flow rate of carbon dioxide supplied to the hollow fiber membrane module instead of controlling the flow rate of pure water. Adjust the specific resistance value. In the present invention, when adjusting the specific resistance value of pure water, considering the properties of the hollow fiber membrane to be used, the pressure of the supplied pure water, the dissolution efficiency of carbon dioxide gas, etc., bubbles are generated when dissolving carbon dioxide gas in pure water. First, the pressure of the carbon dioxide gas is adjusted to an optimum value by the pressure control valve within the pressure range in which is not generated. Next, the flow rate of the carbon dioxide gas is adjusted by the flow control valve so that the specific resistance value becomes a predetermined value.
【００１０】本発明の好適な実施態様では、炭酸ガスの
流量を調節する第２の流量調節弁が、中空糸膜モジュー
ルを通過した炭酸ガスを外部に流出させる炭酸ガス流出
管に設けてある。第２の流量調節弁を操作して、流量を
調節することにより、中空糸膜を透過して純水に溶解す
る炭酸ガス量を更に精密に制御することができる。In a preferred embodiment of the present invention, a second flow control valve for controlling the flow rate of the carbon dioxide gas is provided in a carbon dioxide gas outlet pipe for discharging the carbon dioxide gas passing through the hollow fiber membrane module to the outside. By operating the second flow rate control valve to adjust the flow rate, the amount of carbon dioxide gas permeating through the hollow fiber membrane and dissolving in pure water can be controlled more precisely.
【００１１】[0011]
【発明の実施の形態】以下に、実施形態例を挙げ、添付
図面を参照して、本発明の実施の形態を具体的かつ詳細
に説明する。実施形態例１ 本実施形態例は、本発明に係る純水の比抵抗値調整装置
の実施形態の一例であって、図１は本実施形態例の純水
の比抵抗値調整装置の構成を示す断面図である。本実施
形態例の純水の比抵抗値調整装置１０は、図１に示すよ
うに、所定の容量を有して、純水を滞留させ、かつ通過
させる縦長の容器１２と、容器１２の内部に設けられた
中空糸膜モジュール１４とを備えている。容器１２は、
純水を流入させる純水入口ポート１６を下部端部に、及
び比抵抗値を調整した純水を流出させる純水出口ポート
１８を上部端部にそれぞれ有する。中空糸膜モジュール
１４は、容器１２の縦方向に沿って長く直線状に延在す
る多数本の中空糸膜２０の束と、中空糸膜２０の束の端
部を接着剤で固定したモジュール端部２２、２４とから
構成されている。中空糸膜２０は、ガス透過膜を細い中
空部を有する糸状に巻いた中空糸状の膜体であって、炭
酸ガスが中空糸膜２０の内側の中空部を流れつつ中空糸
膜（ガス透過膜）を内側から外側に透過して外側を流れ
る純水に溶解、拡散する。中空糸膜モジュール１４に使
用する中空糸膜２０は、外側を流れている純水に、中空
糸膜２０の中空部を流れている炭酸ガスを効率よく溶解
させる性能を有し、かつ外側を流れている純水が中空部
に入り込まない性質を有していれば、その種類は問わな
い。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Embodiment 1 This embodiment is an example of an embodiment of a specific resistance adjusting device of pure water according to the present invention, and FIG. 1 shows a configuration of a specific resistance adjusting device of pure water of the present embodiment. FIG. As shown in FIG. 1, the specific resistance adjusting device 10 of pure water according to the present embodiment includes a vertically long container 12 having a predetermined capacity, for storing and passing pure water, and an inside of the container 12. And a hollow fiber membrane module 14 provided in the main body. The container 12
A pure water inlet port 16 through which pure water flows is provided at a lower end, and a pure water outlet port 18 through which pure water whose specific resistance is adjusted flows out is provided at an upper end. The hollow fiber membrane module 14 includes a bundle of a large number of hollow fiber membranes 20 extending linearly long along the longitudinal direction of the container 12, and a module end in which the ends of the bundle of the hollow fiber membranes 20 are fixed with an adhesive. It is composed of parts 22 and 24. The hollow fiber membrane 20 is a hollow fiber membrane in which a gas permeable membrane is wound into a thread having a thin hollow portion. The hollow fiber membrane (gas permeable membrane) is formed while carbon dioxide gas flows through the hollow portion inside the hollow fiber membrane 20. ) From the inside to the outside, dissolves and diffuses in pure water flowing outside. The hollow fiber membrane 20 used in the hollow fiber membrane module 14 has a performance of efficiently dissolving the carbon dioxide gas flowing in the hollow portion of the hollow fiber membrane 20 in pure water flowing outside, and has a property of flowing outside. Any type can be used as long as the pure water does not enter the hollow portion.
【００１２】一方のモジュール端部２２は、容器１２の
純水出口側に設けられた炭酸ガス出口ポート２６を介し
て炭酸ガス供給管２８に接続され、各中空糸膜２０の中
空部に炭酸ガスを導入する。他方のモジュール端部２４
は、容器１２の純水入口側に設けられた炭酸ガス出口ポ
ート３０を介して炭酸ガス排出管３２に接続され、中空
糸膜２０の中空部を通過した余剰の炭酸ガスを排出す
る。また、炭酸ガス供給管２８には、炭酸ガスの圧力調
節弁３４と第１の流量調節弁３６とが直列に設けられ、
炭酸ガス排出管３２には、炭酸ガスの第２の流量調節弁
３８が設けられている。圧力調節弁３４は、弁開度を調
整することにより圧力調節弁３４の下流の炭酸ガスの圧
力、即ち中空糸膜モジュール１４に導入する炭酸ガスの
圧力を調節することができる。第１の流量調節弁３６
は、弁開度を調整することにより中空糸膜モジュール１
４に導入する炭酸ガスの流量を調節することができる。
また、第２の流量調節弁３８は、弁開度を調整すること
により中空糸膜モジュール１４から流出する炭酸ガスの
流量を調節することができる。One of the module ends 22 is connected to a carbon dioxide gas supply pipe 28 via a carbon dioxide gas outlet port 26 provided on the pure water outlet side of the container 12, and a carbon dioxide gas is supplied to the hollow portion of each hollow fiber membrane 20. Is introduced. The other module end 24
Is connected to a carbon dioxide gas discharge pipe 32 via a carbon dioxide gas outlet port 30 provided on the pure water inlet side of the container 12, and discharges excess carbon dioxide gas that has passed through the hollow portion of the hollow fiber membrane 20. The carbon dioxide gas supply pipe 28 is provided with a carbon dioxide gas pressure regulating valve 34 and a first flow rate regulating valve 36 in series,
The carbon dioxide gas discharge pipe 32 is provided with a second carbon dioxide gas flow control valve 38. The pressure control valve 34 can adjust the pressure of the carbon dioxide gas downstream of the pressure control valve 34, that is, the pressure of the carbon dioxide gas introduced into the hollow fiber membrane module 14 by adjusting the valve opening. First flow control valve 36
The hollow fiber membrane module 1 is adjusted by adjusting the valve opening.
4 can adjust the flow rate of the carbon dioxide gas introduced.
Further, the second flow rate control valve 38 can adjust the flow rate of the carbon dioxide gas flowing out of the hollow fiber membrane module 14 by adjusting the valve opening.
【００１３】以上の構成によって、純水入口ポート１６
から入った純水は、容器１２を満たし、中空糸膜モジュ
ール１４と接触しながら純水出口ポート１８に向かって
流れて行き、純水出口ポート１８から出て行く。一方、
炭酸ガスの圧力調節弁３４と流量調節弁３２によって圧
力と流量が調節された炭酸ガスは、炭酸ガス入口ポート
２６から入りモジュール端部２２を経て中空糸膜モジュ
ール１４の中空糸膜２０の中空部を通過し、一部が中空
糸膜を透過して外側の純水に溶解、拡散し、残部が他方
の端部２４から炭酸ガス出口ポート３０を通って出て行
く。With the above configuration, the pure water inlet port 16
Pure water that has entered the container 12 fills the container 12 and flows toward the pure water outlet port 18 while coming into contact with the hollow fiber membrane module 14, and exits from the pure water outlet port 18. on the other hand,
The carbon dioxide gas whose pressure and flow rate have been adjusted by the carbon dioxide gas pressure control valve 34 and the flow rate control valve 32 enters the carbon dioxide gas inlet port 26, passes through the module end 22, and passes through the hollow portion of the hollow fiber membrane 20 of the hollow fiber membrane module 14. , A part of which passes through the hollow fiber membrane, is dissolved and diffused in pure water on the outside, and the remainder goes out from the other end 24 through the carbon dioxide gas outlet port 30.
【００１４】純水の比抵抗値の調節には、炭酸ガスの圧
力と流量、及び純水の流量の３つのパラメータを使用す
ることが可能であるものの、一般的には、純水の使用量
は、洗浄装置のプロセス条件等により規定されている場
合が多いので、本実施形態例では、純水の流量の制御に
より、比抵抗値の調整は行わない。本実施形態例では、
純水の流量制御ではなく、炭酸ガスの圧力と流量を調節
することにより、純水の比抵抗値を調整する。比抵抗値
を調節する際には、使用する中空糸膜の性質、供給する
純水の圧力、炭酸ガスの純水への溶解効率等を考慮し、
純水への炭酸ガスの溶解時に気泡が発生しない圧力範囲
内で、先ず、炭酸ガスの圧力を最適な値に調節する。次
に、比抵抗値が所定の値となるように炭酸ガスの流量を
調節する。尚、炭酸ガス出口ポート３０から出てくる炭
酸ガスに関しては、状況に応じて最も効率のよい条件と
なるように、第２の流量調節弁３８を全閉〜全開の範囲
で調整し、その流量を調節する。通常は、第２の流量調
節弁３８を全閉にしておいて良い。Although it is possible to use the three parameters of the pressure and flow rate of carbon dioxide gas and the flow rate of pure water to adjust the specific resistance value of pure water, the amount of pure water used is generally used. Is often defined by the process conditions of the cleaning device, etc., in this embodiment, the specific resistance value is not adjusted by controlling the flow rate of pure water. In the present embodiment,
Instead of controlling the flow rate of pure water, the specific resistance value of pure water is adjusted by adjusting the pressure and flow rate of carbon dioxide gas. When adjusting the specific resistance value, considering the properties of the hollow fiber membrane to be used, the pressure of pure water to be supplied, the efficiency of dissolving carbon dioxide in pure water,
First, the pressure of the carbon dioxide gas is adjusted to an optimum value within a pressure range where bubbles are not generated when the carbon dioxide gas is dissolved in the pure water. Next, the flow rate of the carbon dioxide gas is adjusted so that the specific resistance value becomes a predetermined value. For the carbon dioxide gas coming out of the carbon dioxide gas outlet port 30, the second flow control valve 38 is adjusted in a range from fully closed to fully open so that the most efficient condition is obtained according to the situation. Adjust Normally, the second flow control valve 38 may be fully closed.
【００１５】実施形態例２ 本実施形態例は、本発明に係る純水の比抵抗値調整装置
の実施形態の別の例であって、図２は本実施形態例の純
水の比抵抗値調整装置の構成を示す断面図である。図２
に示すもののうち図１に示すものと同じ機能を果たすも
のには同じ符号を付してその説明を省略す。本実施形態
例の純水の比抵抗値調整装置４０は、容器４２に設ける
中空糸膜モジュール４４の中空糸膜の配置形状と、炭酸
ガス入口ポート４６及び炭酸ガス出口ポート４８の取り
付け位置が異なることを除いて、実施形態例１の純水の
比抵抗値調整装置１０の構成と同じ構成を備えている。 Embodiment 2 This embodiment is another example of the embodiment of the specific resistance adjusting apparatus of pure water according to the present invention. FIG. 2 shows the specific resistance of pure water of this embodiment. It is sectional drawing which shows the structure of an adjustment device. FIG.
1 that perform the same functions as those shown in FIG. 1 are given the same reference numerals and description thereof is omitted. In the pure water specific resistance adjusting device 40 of the present embodiment, the arrangement of the hollow fiber membranes of the hollow fiber membrane module 44 provided in the container 42 and the mounting positions of the carbon dioxide gas inlet port 46 and the carbon dioxide gas outlet port 48 are different. Except for this, the configuration is the same as the configuration of the specific resistance adjusting device 10 of the pure water of the first embodiment.
【００１６】容器４２の上部には、炭酸ガスを流入させ
る炭酸ガス入口ポート４６が設けられ、容器４２に中心
を通る反対側に炭酸ガスを流出させる炭酸ガス出口ポー
ト４８が設けてある。中空糸膜モジュール４４の一方の
端部５０は炭酸ガス入口ポート４６に連結され、他方の
端部５２は炭酸ガス出口ポート４８に連結され、中空糸
膜５４は容器内でＵ字状に懸架されている。The upper portion of the container 42 is provided with a carbon dioxide gas inlet port 46 for flowing carbon dioxide gas, and a carbon dioxide gas outlet port 48 for discharging carbon dioxide gas on the opposite side of the container 42 passing through the center. One end 50 of the hollow fiber membrane module 44 is connected to the carbon dioxide gas inlet port 46, the other end 52 is connected to the carbon dioxide gas outlet port 48, and the hollow fiber membrane 54 is suspended in a U-shape in the container. ing.
【００１７】本実施形態例の純水の比抵抗値調整装置４
０では、中空糸膜モジュール１４の中空糸膜５４をＵ字
状に懸架することにより、容器４２の高さ寸法を短くす
ることができる。中空糸膜の配置態様としては、その他
に螺旋状等の方法が考えられ、状況に応じて最適な配置
を採用する。The specific resistance adjusting device 4 of pure water according to the embodiment of the present invention.
At 0, the height of the container 42 can be reduced by suspending the hollow fiber membrane 54 of the hollow fiber membrane module 14 in a U-shape. As the arrangement mode of the hollow fiber membranes, a spiral method or the like can be considered in addition, and an optimum arrangement is adopted according to the situation.
【００１８】以上の構成により、実施形態例１及び実施
形態例２の純水の比抵抗値調整装置では、特別に複雑な
制御機構を設けることなく、主に供給する炭酸ガスの圧
力と流量を制御することにより、純水の比抵抗値を容易
に調節できるコンパクトな装置を経済的に製作すること
ができる。尚、実際の使用においては、通常、純水の使
用量は、数値の先頭の位の数値が、例えば純水の使用量
が１０００ｍ3 ／ｈｒであれば、千の位の数値が変動す
るような状況は起こり得ないことから、純水の使用量が
ある程度変動しても、炭酸ガスの圧力と流量を一定値に
固定した状態で、純水の比抵抗値をある範囲の変動に収
めることができる。よって、従来の純水の比抵抗値調整
装置のように複雑なフィードバック制御を行わなくて
も、実用上、問題がない。With the above configuration, the specific resistance value adjusting devices of the first and second embodiments can adjust the pressure and flow rate of mainly supplied carbon dioxide gas without providing a specially complicated control mechanism. By controlling, a compact device capable of easily adjusting the specific resistance value of pure water can be economically manufactured. In actual use, the amount of pure water used is usually such that the number in the first place of the numerical value fluctuates if the amount of pure water used is 1000 m 3 / hr, for example. Even if the amount of pure water used fluctuates to a certain extent, the specific resistance value of pure water must be kept within a certain range while the pressure and flow rate of carbon dioxide gas are fixed at constant values. Can be. Therefore, there is no practical problem even if complicated feedback control is not performed unlike the conventional pure water specific resistance value adjusting device.
【００１９】[0019]
【発明の効果】本発明の構成によれば、中空糸膜モジュ
ールに供給する炭酸ガスの圧力及び流量をそれぞれ調節
する圧力調節弁及び流量調節弁を炭酸ガス供給管に設け
て、純水に溶解する炭酸ガス量をその圧力及び流量によ
って制御することにより、従来の純水の比抵抗値調整装
置に必要とされていた電気的なフィードバック制御シス
テムが不要となり、経済的でコンパクトな純水の比抵抗
値調整装置を実現することができる。また、比抵抗値の
調節パラメーターとして、供給する炭酸ガスの圧力と流
量の２つだけを使用するので、純水の比抵抗値のコント
ロールが容易となる。According to the structure of the present invention, the pressure control valve and the flow control valve for controlling the pressure and the flow rate of the carbon dioxide gas supplied to the hollow fiber membrane module are provided in the carbon dioxide gas supply pipe, and the carbon dioxide gas is dissolved in pure water. By controlling the amount of carbon dioxide to be generated by the pressure and flow rate, an electric feedback control system required for a conventional pure water specific resistance value adjusting device is not required, and an economical and compact pure water ratio can be obtained. A resistance adjusting device can be realized. Further, since only the pressure and the flow rate of the supplied carbon dioxide gas are used as the adjustment parameters of the specific resistance value, the specific resistance value of the pure water can be easily controlled.
【図１】実施形態例１の純水の比抵抗値調整装置の構成
を示す断面図である。FIG. 1 is a cross-sectional view illustrating a configuration of a specific resistance adjusting device of pure water according to a first embodiment.
【図２】実施形態例２の純水の比抵抗値調整装置の構成
を示す断面図である。FIG. 2 is a cross-sectional view illustrating a configuration of a specific resistance adjusting device of pure water according to a second embodiment.
１０……実施形態例１の純水の比抵抗値調整装置、１２
……容器、１４……中空糸膜モジュール、１６……純水
入口ポート、１８……純水出口ポート、２０……中空糸
膜、２２、２４……中空糸膜の端部、２６……炭酸ガス
出口ポート、２８……炭酸ガス供給管、３０……炭酸ガ
ス出口ポート、３２……炭酸ガス排出管、３４……圧力
調節弁、３６……第１の流量調節弁、３８……第２の流
量調節弁、４０……実施形態例２の純水の比抵抗値調整
装置、４２……容器、４４……中空糸膜モジュール、４
６……炭酸ガス入口ポート、４８……炭酸ガス出口ポー
ト、５０、５２……端部、５４……中空糸膜。10 Specific resistance adjusting device for pure water according to the first embodiment, 12
... container, 14 ... hollow fiber membrane module, 16 ... pure water inlet port, 18 ... pure water outlet port, 20 ... hollow fiber membrane, 22, 24 ... end of hollow fiber membrane, 26 ... Carbon dioxide gas outlet port, 28 carbon dioxide gas supply pipe, 30 carbon dioxide gas outlet port, 32 carbon dioxide gas discharge pipe, 34 pressure regulator valve 36 first flow rate regulator valve 38 th Reference numeral 2 denotes a flow control valve, 40: a specific resistance adjusting device for pure water according to the second embodiment, 42: a container, 44: a hollow fiber membrane module,
6 ... carbon dioxide gas inlet port, 48 ... carbon dioxide gas outlet port, 50, 52 ... end, 54 ... hollow fiber membrane.
Claims (2)
束を有し、中空糸膜の内側中空部を通過する炭酸ガスを
中空糸膜の外側に透過させる中空糸膜モジュールと、中
空糸膜モジュールを内蔵し、かつ純水が中空糸膜モジュ
ールの外側を流れる密閉容器とを備え、中空糸膜モジュ
ールに炭酸ガスを導入して、容器内を流れる純水に炭酸
ガスを溶解させ、純水の比抵抗を調節する装置であっ
て、 炭酸ガスの圧力及び流量をそれぞれ調節する圧力調節弁
及び流量調節弁が、中空糸膜モジュールに炭酸ガスを供
給する炭酸ガス供給管に設けてあることを特徴とする純
水の比抵抗値調整装置。1. A hollow fiber membrane module having a bundle of a plurality of hollow fiber membranes formed of a gas permeable membrane, and allowing a carbon dioxide gas passing through an inner hollow portion of the hollow fiber membrane to permeate to the outside of the hollow fiber membrane. A closed vessel containing a fiber membrane module, and pure water flowing outside the hollow fiber membrane module, introducing carbon dioxide gas into the hollow fiber membrane module, dissolving carbon dioxide gas in pure water flowing in the vessel, An apparatus for adjusting the specific resistance of pure water, wherein a pressure control valve and a flow rate control valve for respectively controlling the pressure and flow rate of carbon dioxide gas are provided in a carbon dioxide gas supply pipe for supplying carbon dioxide gas to a hollow fiber membrane module. An apparatus for adjusting the specific resistance of pure water.
節弁が、中空糸膜モジュールを通過した炭酸ガスを外部
に流出させる炭酸ガス流出管に設けてあることを特徴と
する請求項１に記載の純水の比抵抗値調整装置。2. A carbon dioxide gas outlet pipe for discharging a carbon dioxide gas passing through a hollow fiber membrane module to the outside, wherein a second flow control valve for adjusting a flow rate of the carbon dioxide gas is provided. The specific resistance adjusting device for pure water according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17700698A JP2000005586A (en) | 1998-06-24 | 1998-06-24 | Device for adjusting resistivity value of pure water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17700698A JP2000005586A (en) | 1998-06-24 | 1998-06-24 | Device for adjusting resistivity value of pure water |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000005586A true JP2000005586A (en) | 2000-01-11 |
Family
ID=16023529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17700698A Pending JP2000005586A (en) | 1998-06-24 | 1998-06-24 | Device for adjusting resistivity value of pure water |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000005586A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003020405A1 (en) * | 2001-08-28 | 2003-03-13 | Mitsubishi Rayon Co.,Ltd. | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto, and membrane module |
| EP1537907A1 (en) * | 2002-07-08 | 2005-06-08 | Mitsubishi Rayon Co., Ltd. | Apparatus for producing carbonated water and method for producing carbonated water using the same |
| EP1629882A1 (en) * | 2004-08-30 | 2006-03-01 | Kwc Ag | Device for carbonating and cooling of beverages |
| JP2014024039A (en) * | 2012-07-28 | 2014-02-06 | Daiken Iki Kk | Liquid supply device and living organism cleaning device |
| WO2016167134A1 (en) * | 2015-04-13 | 2016-10-20 | Dic株式会社 | Device for adjusting specific resistance value and method for adjusting specific resistance value |
-
1998
- 1998-06-24 JP JP17700698A patent/JP2000005586A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7334780B2 (en) | 2001-08-28 | 2008-02-26 | Mitsubishi Rayon Company, Limited | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto and membrane module |
| WO2003020405A1 (en) * | 2001-08-28 | 2003-03-13 | Mitsubishi Rayon Co.,Ltd. | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto, and membrane module |
| US8096532B2 (en) | 2001-08-28 | 2012-01-17 | Mitsubishi Rayon Co., Ltd. | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto and membrane module |
| US7152850B2 (en) | 2001-08-28 | 2006-12-26 | Mitsubishi Rayon Co., Ltd. | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto, and membrane module |
| US7407154B2 (en) | 2001-08-28 | 2008-08-05 | Mitsubishi Rayon Co., Ltd. | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto and membrane module |
| US7237767B2 (en) | 2001-08-28 | 2007-07-03 | Mitsubishi Rayon Co., Ltd. | Device and method for manufacturing carbonated spring and carbonic water, control method for gas density applied thereto and membrane module |
| EP1537907A4 (en) * | 2002-07-08 | 2007-02-07 | Mitsubishi Rayon Co | Apparatus for producing carbonated water and method for producing carbonated water using the same |
| US7445197B2 (en) | 2002-07-08 | 2008-11-04 | Mitsubishi Rayon Co., Ltd. | Apparatus for producing carbonated water and method for producing carbonated water using the same |
| EP1537907A1 (en) * | 2002-07-08 | 2005-06-08 | Mitsubishi Rayon Co., Ltd. | Apparatus for producing carbonated water and method for producing carbonated water using the same |
| US7651074B2 (en) | 2002-07-08 | 2010-01-26 | Mitsubishi Rayon Co., Ltd. | Apparatus for producing carbonated water and method for producing carbonated water using the same |
| EP1629882A1 (en) * | 2004-08-30 | 2006-03-01 | Kwc Ag | Device for carbonating and cooling of beverages |
| JP2014024039A (en) * | 2012-07-28 | 2014-02-06 | Daiken Iki Kk | Liquid supply device and living organism cleaning device |
| WO2016167134A1 (en) * | 2015-04-13 | 2016-10-20 | Dic株式会社 | Device for adjusting specific resistance value and method for adjusting specific resistance value |
| CN107427786A (en) * | 2015-04-13 | 2017-12-01 | Dic株式会社 | Resistivity value adjusting apparatus and resistivity value method of adjustment |
| US10792623B2 (en) | 2015-04-13 | 2020-10-06 | Dic Corporation | Device for adjusting specific resistance value and method for adjusting specific resistance value |
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