JP2000003569A - Head mechanism and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make the attitude of a slider stable on a recording medium independently of the working accuracy of a suspension or slider in a head mechanism formed in such a manner that the slider is adhered to the suspension. SOLUTION: The head mechanism 1 is constituted of the slider 2 with the recording and/or reproducing head mounted thereon, the suspension 3 for supporting the slider 2 and an adhesive layer 4 for adhering the slider 2 to the suspension 3. The adhesive layer 4 is filled between the slider 2 and the suspension 3 so that the dispersion in the mechanical dimension accuracy of the adhering surface between the slider 2 and the suspension 3 is absorbed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a head mechanism in which a slider on which a recording and / or reproducing head is mounted is bonded to a suspension, and a method of manufacturing the same.

[0002]

2. Description of the Related Art As shown in FIGS. 12 to 14, a head mechanism 100 used in a hard disk drive or the like is used.
Is a slider 101 on which a recording / reproducing head is mounted,
It is configured by being bonded to a suspension 103 by an adhesive 102. Here, the suspension 103
It has a base plate 103a fixed to a support, a gimbal 103b to which the slider 101 is bonded, and a load beam 103c to which the base plate 103a and the gimbal 103b are attached. The suspension 103 generates an urging force for pressing the slider 101 against the recording medium mainly due to the elasticity of the load beam 103c.

That is, at the time of recording / reproducing, as shown in FIG. 15, a base plate 103a is fixed to a support 104, and a recording medium 105 is arranged so as to face a slider 101 attached to a gimbal 103b. , The bending angle of the suspension 103 changes,
As a result, a biasing force is applied so as to press the slider 101 against the recording medium 105 mainly due to the elasticity of the load beam 103c.

At the time of recording / reproducing, the slider 101 is provided with a recording medium 10 which is driven to rotate with the slider 101.
5 and a biasing force from the suspension 103 are applied. Then, by balancing these loads, the posture is stabilized in a state of slightly floating on the recording medium 105.

By the way, in such a head mechanism 100, the reference surface of the base plate 103a is
The distance between the slider 101 and the surface facing the recording medium (hereinafter, Z-
Called Height. ) Is desired to have a predetermined size. In the conventional head mechanism 100, the slider 1
01 and the gimbal 103b are adhered without gaps,
The Z-Height has a predetermined size.

Therefore, in the conventional head mechanism 100, the slider 101 and the gimbal 103b are bonded to each other without forming a gap between the slider 101 and the gimbal 103b, as shown in FIGS. This is performed by applying and hardening the adhesive 102 around the bonding surfaces while applying a load so as to press the bonding surfaces so that the bonding surfaces of the 103 and the gimbal 103b are sufficiently adhered to each other. .

[0007]

By the way, in the head mechanism 100 as described above, the suspension 103
Usually, a thin plate made of stainless steel or the like is formed into a predetermined shape by etching, and then bent by press working to produce a load beam 103c. Thereafter, the base plate 103 is attached to the load beam 103c.
a and the gimbal 103b are attached by laser welding or the like.

Thus, the suspension 103 is usually
Are formed by machining, but there is a limit to the processing accuracy. This means that the suspension 103 has a slight deformation. That is, the suspension 1
Since there is a limit to the machining accuracy of the suspension 03, the suspension 1
For example, the suspension 103 may be warped with respect to the reference plane S1 as shown in FIG. 16 at the time of fabrication of the reference plane S1, or as shown in FIG. 17A or FIG. On the other hand, the suspension 103 may be twisted.

[0009] Such a minute deformation causes variation in the spring characteristics of the suspension 103. The variation in the spring characteristics of the suspension 103 appears as an imbalance in the load applied to the slider 101 when the slider 101 is mounted on the suspension 103. If the balance of the load applied to the slider 101 is out of balance, the attitude of the slider 101 on the recording medium 105 becomes unstable, and as a result, the recording / reproducing characteristics of the head mechanism 100 deteriorate.

In addition to the suspension 103,
The shape of the slider 101 may also vary during machining. Specifically, for example, during the mechanical processing of processing the slider 101 into a predetermined shape, there may be a variation in the parallelism between the recording medium facing surface of the slider 101 and the surface adhered to the gimbal portion 103b. In addition,
Recording medium facing surface of slider 101 and gimbal portion 103b
As shown in FIG. 18, when the thickness of each part of the slider 101 is t ₁ , t ₂ , t ₃ , and t ₄ , for example, | t ₁ −
t ₂ | and | t ₃ −t ₄ |. Such a variation in the parallelism also causes the attitude of the slider 101 to be unstable, as in the case of minute deformation of the suspension 103, and also causes deterioration of the recording / reproducing characteristics of the head mechanism 100.

In recent years, in particular, the size and capacity of the recording / reproducing apparatus have been further increased, and accordingly, the head mechanism itself has been reduced in size, and the load applied to the slider 101 has been reduced. For this reason, the influence of minute deformation of the suspension 103, variation in the parallelism of the slider 101, and the like has become a situation that cannot be ignored.

Conventionally, to solve the above problems,
For example, the load beam 103c of the suspension 103 is measured for each head mechanism while measuring the attitude, load balance, and the like of the slider 101 on the recording medium 105.
Is adjusted to adjust the spring characteristics of the suspension 103. However, in such a method, the man-hour required for manufacturing the head mechanism 100 is increased, and an expensive device is required, so that the manufacturing cost of the head mechanism 100 is increased.

The present invention has been proposed in view of the above-described conventional circumstances, and can stabilize the attitude of a slider on a recording medium regardless of the processing accuracy of a suspension or a slider. It is an object of the present invention to provide a head mechanism and a method of manufacturing the same.

[0014]

A head mechanism according to the present invention comprises a slider on which a recording and / or reproducing head is mounted, a suspension for supporting the slider, and an adhesive for bonding the slider to the suspension. And a layer. The adhesive layer is filled between the slider and the suspension so as to absorb variations in mechanical dimensional accuracy of the bonding surface between the slider and the suspension.

In the head mechanism according to the present invention, even if there is variation in the mechanical dimensional accuracy of the bonding surface between the slider and the suspension, the variation is absorbed by the adhesive layer filled between the slider and the suspension. . Therefore, even if the mechanical dimensional accuracy of the bonding surface between the slider and the suspension varies, the posture of the slider does not become unstable.

The method of manufacturing a head mechanism according to the present invention is a method of manufacturing a head mechanism in which a slider on which a recording and / or reproducing head is mounted is bonded to a suspension. In addition, the adhesive filled between the slider and the suspension is cured while the slider and the suspension are separated and supported.

In the method of manufacturing a head mechanism according to the present invention,
When the slider and the suspension are bonded together, the adhesive filled between the slider and the suspension is cured while the slider and the suspension are separated and supported. Therefore, even if there is a variation in the mechanical dimensional accuracy of the bonding surface between the slider and the suspension, the variation is absorbed by the adhesive layer filled between the slider and the suspension. Therefore, even if the mechanical dimensional accuracy of the bonding surface between the slider and the suspension varies, the posture of the slider does not become unstable.

[0018]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIGS. 1 to 4 show one structural example of a head mechanism to which the present invention is applied. Here, FIG. 1 is a plan view of a head mechanism 1 to which the present invention is applied, as viewed from a side on which a slider 2 is mounted. FIG. 2 is a cross-sectional view taken along line X ₁ -X ₂ in FIG. FIGS. 3 and 4 are enlarged views showing a portion of the head mechanism 1 on which the slider 2 is mounted. FIG. 3 is a cross-sectional view taken along line X ₃ -X ₄ in FIG. 1 is a sectional view taken along line X ₅ -X ₆ .

The head mechanism 1 is a head mechanism for a hard disk drive, and includes a slider 2 having a magnetic head 2a for recording / reproducing on / from a magnetic disk, a suspension 3 for supporting the slider 2, and a slider 2. And an adhesive layer for bonding the suspension to the suspension.

The suspension 3 has a load beam 5 formed by molding a thin plate made of stainless steel or the like into a predetermined shape.
And a base plate 6 attached to the rear end of the load beam 5 by laser welding or the like, and a gimbal 7 attached to the distal end of the load beam 5 by laser welding or the like.

The load beam 5 has, in order from the rear end to the front end, a base plate mounting portion 5a to which the base plate 6 is mounted, an elastic portion 5b bent at a predetermined angle, and rigidity by bending the side surface. And a gimbal mounting portion 5d to which the gimbal 7 is mounted.

The base plate mounting portion 5a is formed by laser welding or the like so that the position of the opening 5e formed at the center of the base plate mounting portion 5a and the position of the opening 6a formed at the center of the base plate 6 match. The base plate 6 is attached. Here, the openings 5e,
Reference numeral 6a is used for attaching the head mechanism 1 to a head mechanism supporting portion of the hard disk device when the magnetic head mechanism 1 is incorporated in the hard disk device.

The elastic portion 5b, which extends from the base plate mounting portion 5a to which the base plate 6 is mounted and is bent at a predetermined angle, has elasticity and acts to press the slider 2 against the magnetic disk during recording and reproduction.
Also, the portion of the load beam 5 ahead of the elastic portion 5b is
The rigid portion 5c has an increased rigidity by bending the side surface. Then, the tip of the rigid body 5c is
The gimbal 7 is attached to the gimbal attachment portion 5d to which the gimbal 7 is attached, and the gimbal 7 is attached to the gimbal attachment portion 5d by laser welding or the like.

The gimbal 7 is for preventing the movement of the slider 2 in the pitch direction and the roll direction at the time of recording / reproduction. The slider 2 is bonded to the gimbal 7 via the adhesive layer 4. . In addition, load beam 5
The dimple 5f abutting on the gimbal 7 is located at a position substantially corresponding to the center of the slider 2 bonded to the gimbal 7.
Are formed. This dimple 5f is a gimbal 7
The slider 2 can be moved in the pitch direction and the roll direction with a certain degree of freedom.

The slider 2 is bonded to the gimbal 7 by an adhesive layer 4 made of an epoxy resin-based adhesive or an ultraviolet-curable adhesive. Here, the adhesive layer 4 is filled between the slider 2 and the gimbal 7 so as to absorb variations in mechanical dimensional accuracy of the bonding surface between the gimbal 7 and the slider 2. In other words, in the head mechanism 1, the adhesive layer 4 is formed with a predetermined thickness so that the distance between the reference surface of the base plate 6 and the surface of the slider 2 facing the magnetic disk has a predetermined size during recording and reproduction. ing.

That is, the head mechanism 1 to which the present invention is applied
In this example, an adhesive layer 4 made of an adhesive filled between the slider 2 and the gimbal 7 is formed so as to have a certain thickness. The slider 2 is attached to the gimbal 7 so as to be always parallel to the gimbal 7. That is, in the head mechanism 1, even if the suspension 3 has a slight deformation or the parallelism of the slider 2 varies, such variation in mechanical dimensional accuracy is absorbed by the adhesive layer 4. The surface of the slider 2 facing the magnetic disk is always parallel to the reference surface.

Specifically, for example, as shown in FIG.
Even if the suspension 3 is warped with respect to the reference surface S3, the influence of the warpage of the suspension 3 is absorbed by a change in the film thickness distribution of the adhesive layer 4 between the gimbal 7 and the slider 2, and The surface of the slider 2 facing the magnetic disk is parallel to the reference surface S3. Or, for example,
As shown in FIG. 6, even if the suspension 3 is twisted with respect to the reference plane S4, the thickness distribution of the adhesive layer 4 between the gimbal 7 and the slider 2 changes, so that the suspension 3 The effect of the twist is absorbed, and the surface of the slider 2 facing the magnetic disk is parallel to the reference surface S4.

As described above, in the head mechanism 1, regardless of the processing accuracy of the suspension 3 and the slider 2, the magnetic disk facing surface of the slider 2 can always be parallel to the reference surface. Therefore, in the head mechanism 1, regardless of the processing accuracy of the suspension 3 and the slider 2, the attitude of the slider 2 on the magnetic disk during recording and reproduction can be stabilized.

In the above-mentioned head mechanism 1, the method of leading out the wiring from the magnetic head 2a mounted on the slider 2 may be arbitrary. For example, the wiring from the magnetic head 2a may be led out using a flexible printed circuit board on which wiring of a predetermined pattern is formed, a wire-like conductor, or the like, or as the suspension 3,
A wiring-integrated suspension in which wiring of a predetermined pattern is formed in advance may be used.

Next, a method of manufacturing the above-described head mechanism 1 will be described. Since the point of the present invention lies in the method of attaching the slider 2 to the suspension 3,
In the following description, only the method of attaching the slider 2 to the suspension 3 will be described in detail, and description of the manufacture of the slider 2 and the suspension 3 will be omitted.

When attaching the slider 2 to the suspension 3, first, as shown in FIG. 7, the base plate 6 of the suspension 3 is fixed to a suspension fixing jig 10. Further, as shown by an arrow B1, a force opposing the urging force of the suspension 3 to the slider 2 is applied to the tip of the suspension 3, thereby lifting the tip of the suspension 3.

Here, the suspension fixing jig 10
Has a fixed part 11 and a movable part 12. And
When fixing the base plate 6, first, the base plate 6 is placed on the fixing portion 11, and thereafter, as shown by the arrow B <b> 2, the movable portion 12 is moved to sandwich and fix the base plate 6. The suspension fixing jig 10 does not need to have such a configuration as long as the jig 10 can fix the base plate 6.

Then, with the distal end of the suspension 3 lifted, as shown in FIG. 7, the slider 2 supported by the slider supporting member 13 is moved to a position facing the gimbal 7 of the suspension 3 whose distal end is lifted. To distribute. Then, some with a gap T ₁ is formed between the gimbal 7 and the slider 2, the magnetic disk facing surface of the slider 2 is set to be a predetermined position.

Specifically, the jig 1 for fixing the base plate
Reference surface of base plate 6 fixed to zero and slider 2
Interval T ₂ of the magnetic disk facing surface, to be equal to the distance between the reference surface and the magnetic disk facing surface of the slider 2 of the base plate 6 during recording and reproduction (i.e. Z-Height). In other words, the reference surface of the base plate 6 and the surface of the slider 2 facing the magnetic disk are separated by a predetermined distance T.
_The suspension 3 and the slider 2 are supported in such a manner that the _two are in a parallel positional relationship.

Next, with the gimbal 7 of the suspension 3 and the slider 2 being supported apart from each other as described above,
As shown in FIG. 8, the gap between the gimbal 7 of the suspension 3 and the slider 2 is filled with an adhesive. Then, the adhesive is cured to form an adhesive layer 4 between the gimbal 7 and the slider 2, and the gimbal 7 and the slider 2 are bonded.

At this time, the jig 10 for fixing the base plate
Fixed to the interval T ₂ of the reference surface and the magnetic disk facing surface of the slider 2 of the base plate 6, the distance between the reference surface and the magnetic disk facing surface of the slider 2 of the base plate 6 during recording and reproduction (i.e. Z-Height) It is made to be equal to.

Accordingly, the head mechanism 1 in which the gimbal 7 and the slider 2 are adhered to each other while the gimbal 7 of the suspension 3 and the slider 2 are supported separately from each other as described above.
At the time of recording / reproducing, the distance between the reference surface of the base plate 6 and the surface of the slider 2 facing the magnetic disk (that is, Z-Height) is always a predetermined size regardless of the variation in mechanical dimensional accuracy of the slider 2 and the suspension 3. Becomes

As described above, in bonding the gimbal 7 and the slider 2 while the gimbal 7 of the suspension 3 and the slider 2 are supported while being separated from each other,
In order to lift the tip of the suspension 3, for example, as shown in FIG.
Use

That is, as shown in FIG. 9, a suspension supporting jig 21 is brought into contact with the surface of the suspension 3 to which the slider 2 is adhered, and the suspension supporting jig 21 is used as shown by an arrow B3. Then, the suspension 3 may be lifted. As a result, a force opposing the urging force of the suspension 3 on the slider 2 is applied to the suspension 3 and the suspension 3
Will be lifted. The abutment position of the suspension support jig 21 is preferably on the center line of the suspension 3 and close to the place where the slider 2 is mounted so that the suspension 3 can be supported in parallel and stably.

Alternatively, a suction device 22 may be used to lift the tip of the suspension 3, as shown in FIG. That is, the suspension 3
When the tip of the suspension 3 is lifted, the suspension 3 may be sucked up by the suction device 22 from the surface of the suspension 3 opposite to the surface to which the slider 2 is adhered, as shown by an arrow B4. Even if you do this,
The tip of the suspension 3 can be lifted.

The suction position of the suction device 22 is preferably a position corresponding to substantially the center of the slider 2 bonded to the gimbal 7, that is, a position where the dimple 5f is formed.

Alternatively, a suspension pulling lead wire 23 may be used to lift the tip of the suspension 3 as shown in FIG. That is, the suspension pull-up lead wire 23 is provided on the surface of the suspension 3 opposite to the surface to which the slider 2 is bonded.
When the tip of the suspension 3 is lifted, the suspension pull-up lead wire 23 may be pulled up as shown by an arrow B5. Even in this case, the tip of the suspension 3 can be lifted.

The mounting position of the suspension pulling lead wire 23 corresponds to a position corresponding to substantially the center of the slider 2 bonded to the gimbal 7, that is, the dimple 5.
It is preferable to set the position where f is formed. Also,
In the completed head mechanism, when the suspension pulling lead wire 23 becomes an obstacle, it is preferable that the suspension pulling lead wire 23 be removed after the bonding between the gimbal 7 and the slider 2 is completed.

As described above in detail, the gimbal 7 of the suspension 3 and the slider 2 are bonded to each other with the gimbal 7 and the slider 2 being supported while being separated from each other. Of the target dimensional accuracy.

That is, in the head mechanism 1 described above, even if the suspension 3 is warped, the suspension 3 is twisted in the roll direction or the pitch direction, or the parallelism of the slider 2 varies.
These effects are absorbed by a change in the thickness distribution of the adhesive layer 4.

As a result, the slider 2 and the suspension 3
The distance (that is, Z-Height) between the reference surface of the base plate 6 and the surface of the slider 2 facing the magnetic disk at the time of recording / reproducing has a predetermined size, regardless of the variation in the mechanical dimensional accuracy of the magnetic disk. Will face each other in the correct posture. Therefore, in the head mechanism 1, even if the mechanical dimensional accuracy of the slider 2 or the suspension 3 varies, the attitude of the slider 2 does not become unstable, and good recording / reproducing characteristics can be obtained.

In manufacturing the head mechanism 1, the timing of filling the adhesive between the gimbal 7 and the slider 2 may be before or after the positioning of the suspension 3 and the slider 2. . That is, an adhesive may be filled between the gimbal 7 and the slider 2 while the suspension 3 and the slider 2 are positioned and fixed, and the adhesive may be cured, or And / or the suspension 3 and the slider 2 with the gimbal 7 coated with an adhesive in advance.
May be determined, and then the adhesive may be cured. That is, in any case, when bonding the slider 2 and the gimbal 7, the slider 2 and the gimbal 7
The adhesive filled between the slider 2 and the gimbal 7 may be cured in a state in which the adhesive is separated and supported.

In the head mechanism 1, the thickness of the adhesive layer 4 between the slider 2 and the gimbal 7 is preferably as thin as possible. However, if the thickness of the adhesive layer 4 is small, it is impossible to absorb variations in mechanical dimensional accuracy of the slider 2 and the suspension 3 by changing the film thickness distribution of the adhesive layer 4. Therefore, the adhesive layer 4
In consideration of the degree of variation in the mechanical dimensional accuracy of the slider 2 and the suspension 3, it is preferable to make the thickness as thin as possible within a range that can absorb those variations.

In the above description, a head mechanism for a hard disk drive is taken as an example. However, the present invention is not limited to a head mechanism for a hard disk drive, and a recording and / or reproducing head is mounted. The present invention can be widely applied to a head mechanism having a slider attached to a suspension.

That is, the present invention is also applicable to, for example, a head mechanism for a flexible disk drive. Also, in the field of optical recording (including magneto-optical recording), a technology has been devised in which the spacing between the optical head and the recording medium is reduced by mounting the optical head on a slider to increase the recording density. The present invention is applicable to such a case.

[0052]

As is clear from the above description, according to the present invention, the attitude of the slider on the recording medium can be stabilized regardless of the processing accuracy of the suspension or the slider. In addition, the present invention can be realized only by forming an adhesive layer between the slider and the suspension. It can be realized much easier and at lower cost than the method.

[Brief description of the drawings]

FIG. 1 is a plan view of a configuration example of a head mechanism to which the present invention is applied, as viewed from a side on which a slider is mounted.

FIG. 2 is a sectional view taken along line X ₁ -X ₂ in FIG.

[Figure 3] is an enlarged view showing a portion of a slider of the head mechanism shown in Figure 1 is mounted, is a cross-sectional view in X ₃ -X ₄ line of FIG.

[Figure 4] is an enlarged view showing a portion of a slider of the head mechanism shown in Figure 1 is mounted, is a cross-sectional view in X ₅ -X ₆ line of Fig.

FIG. 5 is a view showing a state in which the influence of the warpage of the suspension is absorbed by changing the film thickness distribution of the adhesive layer between the gimbal and the slider when the suspension is warped.

FIG. 6 is a diagram illustrating a state in which the influence of the torsion of the suspension is absorbed by changing the thickness distribution of the adhesive layer between the gimbal and the slider when the torsion occurs in the suspension.

FIG. 7 is a view for explaining a step of attaching a slider to a suspension, showing a state in which a base plate is fixed and a front end portion of the suspension is lifted.

FIG. 8 is a diagram for explaining a process of attaching the slider to the suspension, and is a diagram showing a state where an adhesive is filled between the gimbal and the slider.

FIG. 9 is a diagram for explaining a method of lifting the tip portion of the suspension, and is a diagram showing a state where the tip portion of the suspension is lifted using a suspension support jig.

FIG. 10 is a diagram for explaining a method of lifting the tip portion of the suspension, and is a diagram showing a state where the tip portion of the suspension is lifted by using the suction device.

FIG. 11 is a diagram for explaining a method of lifting the tip portion of the suspension, and is a diagram showing a state where the tip portion of the suspension is lifted using a suspension pulling lead wire.

FIG. 12 is a cross-sectional view illustrating a configuration example of a conventional head mechanism.

13 is an enlarged view of a portion of the conventional head mechanism on which a slider is mounted, and is a circle A in FIG.
FIG. 2 is an enlarged view of a portion indicated by ₁ ;

14 is an enlarged view of a portion of the conventional head mechanism on which a slider is mounted, and is a view showing Y _{1 in} FIG. 12;
It is a sectional view taken along the -Y ₂ line.

FIG. 15 is a cross-sectional view showing a state at the time of recording and reproduction with respect to the head mechanism shown in FIG.

FIG. 16 is a cross-sectional view showing a state where the suspension of the head mechanism is warped.

FIG. 17 is a cross-sectional view showing a state where the suspension of the head mechanism is twisted.

FIG. 18 is a perspective view showing an example of a slider.

[Explanation of symbols]

1 head mechanism, 2 slider, 3 suspension, 4 adhesive layer, 5 load beam, 6 base plate, 7 gimbal

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Tohru Chiba No. 30 Kagano Sakai, Takae, Niida, Nakata-cho, Tome-gun, Miyagi Prefecture Sony Precision Magne Co., Ltd. In-house F-term (reference) 5D059 AA01 BA01 CA14 DA04 DA24 EA02

Claims (5)

[Claims] 1. A slider on which a recording and / or reproducing head is mounted, a suspension for supporting the slider, and an adhesive layer for bonding the slider and the suspension, wherein the adhesive layer comprises a slider. A head mechanism filled between the slider and the suspension so as to absorb variations in the mechanical dimensional accuracy of the bonding surface between the slider and the suspension. 2. The suspension according to claim 1, wherein the suspension has a base plate fixed to a support, and a slider bonding portion to which the slider is bonded. The elasticity of a portion between the base plate and the slider bonding portion allows the slider to be mounted on a recording medium. The adhesive layer has a predetermined size such that the distance between the reference surface of the base plate and the recording medium facing surface of the slider has a predetermined size during recording and / or reproduction. The head mechanism according to claim 1, wherein the head mechanism is formed with a thickness. 3. A method of manufacturing a head mechanism in which a slider on which a recording and / or reproducing head is mounted is bonded to a suspension, wherein the slider and the suspension are separated from each other when the slider and the suspension are bonded. A method of manufacturing a head mechanism, comprising: curing an adhesive filled between a slider and a suspension in a state where the head mechanism has been set. 4. The suspension has a base plate fixed to a support and a slider bonding portion to which the slider is bonded, and the elasticity of a portion between the base plate and the slider bonding portion transfers the slider to a recording medium. When the slider and the suspension are bonded to each other, the gap between the reference surface of the base plate and the recording medium facing surface of the slider during recording and / or reproduction is set to a predetermined size. 4. The method according to claim 3, wherein the adhesive is filled between the slider and the suspension. 5. The suspension has a base plate fixed to a support and a slider bonding portion to which the slider is bonded, and the elasticity of a portion between the base plate and the slider bonding portion transfers the slider to a recording medium. When the slider and the suspension are bonded to each other, the slider supports the base plate and applies a force opposing the above-described biasing force to a portion other than the base plate of the suspension. 4. The method according to claim 3, wherein the suspension is supported apart from the slider.