JPH08161843A - Floating magnetic head device and production thereof - Google Patents

Abstract

PURPOSE: To secure the aligning accuracy of a slider and a supporting member corresponded to the miniaturization of the slider and to contrive realization for stably and surely making the slider to the low floating hight. CONSTITUTION: Two positioning markers 17 for fixing the slider 2 to a prescribed position of a fixing part 11a are provided on the leaf spring part 11b of a flexure 11. Then, the constitution is made so that a dimple 14 and each positioning marker 17 are positioned on a straight line in parallel with each slider rail 7a, 7b of the slider 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating magnetic head device suitable for writing and reading information signals to and from a hard disk, for example, and a method of manufacturing the same.

[0002]

2. Description of the Related Art A hard disk drive device incorporated in a computer or the like for recording and reproducing information is naturally equipped with a magnetic recording medium which is an information recording medium,
It is composed of a magnetic head for recording and reproducing information.

At this time, as the magnetic head element, the magnetic head element is in contact with the surface of the magnetic recording medium at the time of starting and stopping in order to avoid abrasion damage due to contact with the surface of the magnetic recording medium. A so-called contact start / stop (CSS) structure in which the air flow generated on the surface of the magnetic recording medium during high-speed rotation of the medium causes the magnetic head element to float above the surface of the magnetic recording medium with a minute gap (so-called flying height). ) Type floating magnetic head is used.

The flying magnetic head is composed of a slider having a magnetic head element mounted thereon and a flexible leaf-spring-shaped gimbal to which the slider is fixed.

The slider is made of, for example, Al ₂ O ₃ --Ti.
An air inflow groove made of a substrate made of O or the like and usually formed by machining with a grindstone for flying the slider above the magnetic recording medium in a stable floating posture with a minute gap, and on both sides of the air inflow groove. The slider head is formed, and the magnetic head element manufactured by the vacuum thin film forming technique is provided on the slider rail side on the end face on the air inflow end side.

Air-lubricated surfaces are formed on the respective slider rails, and taper portions, which are very gently inclined surfaces with an angle of 1 ° or less, are formed on the air inflow end sides of these air-lubricated surfaces. The slider is levitated by the air pressure generated on each air lubricated surface.

Further, the magnetic head element is constructed such that a lower layer core is formed on a substrate, and a conductor coil and an upper layer core are formed on the lower layer core via an insulating film. Then, the upper and lower cores are magnetically coupled via the back gap and the magnetic gap with the conductor coil sandwiched in the central portion to form a magnetic circuit portion.

The gimbal connects a flexure, which is a fixing means having a fixed part to which the slider is fixed, a mount part to which an actuator which is a drive part is connected, and the flexure, and applies a predetermined load to the slider. The load beam is a leaf spring-shaped load beam having flexibility. Here, the fixed portion of the flexure has a protrusion-shaped dimple for defining the flying height of the slider from the surface of the magnetic recording medium and transmitting the load of the gimbal to the slider on the surface of the fixed portion which does not have the slider. Are formed. In this case, the fixed portion comes into contact with the opposing load beam surface at the dimple. The flying height is determined by balancing the load transmitted to the dimples and the lift acting on the air-lubricated surface of the slider rail. Instead of the fixed portion, the dimple may be provided on the load beam that faces the surface of the fixed portion that does not have the slider.

[0009]

By the way, in recent years, there has been an increasing demand for higher recording density of hard disks, and in order to meet this demand, miniaturization of sliders of flying type magnetic head devices and reduction of flying height have been advanced. However, it is desired to realize a low flying height using, for example, a so-called nanoslider. In order to realize such a low flying height of the slider, it is necessary to control the flying height balance between the air-lubricated surfaces of the slider rails with high accuracy to reduce the flying height variation. Therefore, in manufacturing the flying type magnetic head device, the positional accuracy between the dimple and the air-lubricated surface at the time of forming the dimple that defines the flying height and the positional accuracy at the time of attaching the slider to the fixed portion are improved. Is essential.

Conventionally, when the slider is attached when manufacturing the flying magnetic head device, the slider is attached and fixed by positioning with reference to a reference hole provided at one end of the flexure and the outer shape of the slider. However, in this case, the positional accuracy of the reference hole and the dimple is not negligible with respect to the required value of the positional accuracy of the dimple and the air-lubricated surface, and the error for using the outer shape of the slider as a reference also helps. At present, the positional accuracy between the dimples and the air-lubricated surface can be achieved up to about ± 30 to ± 50 μm. However, in order to respond to the recent demands as described above, the positional accuracy is ± 10 ±
It is desired to achieve about 20 μm.

At present, there is no suitable method for ensuring the alignment accuracy between the slider and the fixed portion of the flexure, which corresponds to the miniaturization of the slider.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to make it possible to ensure the positioning accuracy between the slider and the support member, which corresponds to the miniaturization of the slider. It is an object of the present invention to provide a flying type magnetic head device and a method for manufacturing the same which can achieve a stable and reliable reduction in flying height of a slider.

[0013]

The object of the present invention may include a slider having a magnetic head element, a fixing means having a fixing portion of the slider, and a connecting means connected to the fixing means. A flexible support member is provided, the magnetic head element is in contact with the surface of the magnetic recording medium at the time of starting and stopping, and the air flow generated on the surface of the magnetic recording medium during high-speed rotation of the magnetic recording medium The present invention relates to a floating magnetic head device and a method for manufacturing the same, in which a magnetic head element is configured to fly and run with a flying height of a minute distance (flying height) from the surface of a magnetic recording medium.

The flying magnetic head device of the present invention is characterized in that a plurality of positioning markers for fixing the slider are provided at predetermined positions of the supporting member. It is difficult to perform accurate positioning with one positioning marker, and three or more positioning markers are provided according to the shape of each member of the floating magnetic head device and the relationship with the position of the material dimples. The positioning accuracy may be further improved.

At this time, specifically, in the case where the fixing means is formed with a protrusion for supporting the back surface of the slider, a positioning marker is formed on the fixing means together with the protrusion. Further, in the case where the connecting means is formed with a protrusion that defines the flying height of the slider from the surface of the magnetic recording medium, a positioning marker is formed on the connecting means together with the protrusion. The protrusions define the flying height of the slider from the surface of the magnetic recording medium.

Further, in the method of manufacturing the floating magnetic head device of the present invention, when manufacturing the floating magnetic head device, a step of simultaneously forming a protrusion and a positioning marker on the fixing means or the connecting means, The step of fixing the slider after the positioning of the slider with respect to the fixed portion is performed with the positioning marker as a reference. In this case, when forming the protrusion and the positioning marker, the pressing method, the drawing method,
It is desirable to use an etching method or a printing method.

[0017]

In the flying magnetic head device according to the present invention, a plurality of positioning markers for fixing the slider to the support member are provided. Therefore, the slider is fixed to the fixing portion provided on the fixing means using the positioning marker as a reference for positioning, and the positioning accuracy of the fixing portion and the slider at this time is easily and reliably determined by the positioning marker. It is held with the desired high precision.

Further, when manufacturing the above-mentioned floating type magnetic head device, since the protrusion and the positioning marker are simultaneously formed on the fixing means or the connecting means, the number of steps is smaller than the case where both are formed separately. It is reduced and formed at a required position without mechanical movement when forming both. Then, after that, the positioning marker is used to easily and surely align the fixed portion of the slider with the positioning marker as a reference. By fixing the slider, the slider is moved to a desired alignment accuracy. The levitation type magnetic head device provided is manufactured.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Several embodiments of a floating magnetic head device and a method of manufacturing the same according to the present invention will be described below in detail with reference to the drawings.

First, the first embodiment will be described. As shown in FIG. 1, the flying magnetic head according to the first embodiment has a slider 2 provided with a magnetic head element 1 and a flexible leaf spring-shaped gimbal to which the slider 2 is fixed. 3 and 3.

As shown in FIG. 2, the slider 2 is made of a substrate made of, for example, Al ₂ O ₃ --TiO, and is usually formed by machining with a grindstone. An air inflow groove 6 for flying in a stable flying posture with a so-called flying height, and slider rails 7a and 7b formed on both sides of the air inflow groove 6 so as to project in the longitudinal direction of the slider 2.
The slider rail 7 on the end surface 2a on the air inflow end side 10a
The magnetic head element 1 manufactured by the vacuum thin film forming technique is provided on the a and 7b sides.

An air lubrication surface a is formed on each of the slider rails 7a and 7b, and a taper portion which is an extremely gentle inclined surface having an angle of 1 ° or less is formed on the air inflow end 10a side of each air lubrication surface a. 8a and 8b are formed. The slider 2 is levitated by the air pressure generated on each air lubricated surface a.

Further, the magnetic head element 1 is constructed such that a lower layer core is formed on a substrate, and a conductor coil and an upper layer core are formed on the lower layer core via an insulating film. Then, the upper and lower cores are magnetically coupled via the back gap and the magnetic gap g with the conductor coil sandwiched in the central portion to form a magnetic circuit portion.

The gimbal 3 is a fixing means having a fixing portion 11a to which the slider 2 is fixed, and is a flexure 11 for absorbing an external force applied from the outside, a mount portion 13 to which an actuator which is a rotation driving portion is connected, and the above-mentioned. It is composed of a flexible leaf spring load beam 12 which is a connecting means for connecting the flexure 11 and applying a predetermined load to the slider 2.

As shown in FIG. 3, the flexure 11 is formed in a substantially rectangular shape having a reference hole 15 at one end, and is punched into a U shape (inverted U shape in the drawing). Since the cutout portion 16 is provided, the fixing portion 1 is provided.
1a is formed, and the leaf spring portion 11b other than the cutout portion 16 is formed.
It is configured in a form integrally formed with

Here, the fixing portion 11 of the flexure 11 is described.
In a, the back surface of the slider 2 is supported on the surface of the fixing portion 11a that does not have the slider 2, the flying height of the slider 2 from the surface of the magnetic recording medium is defined, and the load of the gimbal 3 is applied to the slider 2. A protrusion-shaped dimple 14 for transmitting is formed at a substantially central position of the fixed portion 11a. The dimple 14 is shown in FIG. 4 (line segment A- in FIG. 3).
As shown in the sectional view taken along line A '), it is formed by a press working method into a substantially elliptical shape which is recessed downward in the drawing, that is, in the direction in which the slider 2 is not provided on the surface of the fixed portion 11a. In this case, the fixed portion 11a is the dimple 1
At 4 there will be contact with the surface of the opposing load beam 12. The flying height is determined by the balance between the load transmitted to the dimple 14 and the lift acting on the air-lubricated surface a of the slider rails 7a and 7b.

In particular, as shown in FIG. 3, the plate spring portion 11b of the flexure 11 has the fixing portion 11a.
Two positioning markers 17 for fixing the slider 2 are provided at a predetermined position of a. At this time, the dimples 14 and the positioning markers 17 are formed in a straight line in parallel with the slider rails 7a and 7b of the slider 2 to be fixed. Here, as shown in FIG.
It is also conceivable that three or more positioning markers 17 are provided according to the need for positioning.

Here, the positioning marker 17 is punched and formed by the same processing method as the dimples 14, here, a press processing method.
When 4 is formed by, for example, the drawing method, the positioning marker 17 is also formed by the drawing method as shown in FIG. Thus, the dimple 14 and the positioning marker 17 are formed simultaneously in the same process. As a processing method for both, an etching method, a printing method, or the like may be used in addition to the above-mentioned pressing method.

In the first embodiment, the flexure 11
At least two positioning markers 17 for fixing the slider 2 to the fixing portion 11a are provided. Therefore, the slider 2 is fixed to the fixing portion 11a using the positioning marker 17 as a reference for alignment,
The positioning accuracy between the fixing portion 11a and the slider 2 at this time is easily and reliably maintained at a desired high accuracy by the positioning marker 17.

When the flying type magnetic head device having the above-mentioned structure is manufactured, when the slider 2 and the fixing portion 11a are attached, the slider 2 and the flexure 11 are connected to each other by using a manufacturing apparatus as shown in FIG. It is desirable to perform the position alignment and the attachment of the slider 2 and the fixing portion 11a.

This manufacturing apparatus has a jig 21 for superposing the slider 2 and the fixed portion 11a of the flexure 11 on each other.
Then, the jig 21 is finely moved in a predetermined direction to perform the relative alignment of the slider 2 and the flexure 11, and the alignment position of both is measured with the positioning marker 17 as a reference. And an optical unit 23 for controlling the position adjusting unit 22 and a control and processing unit 24 for performing image processing by the optical unit 23.

The jig 21 includes a base 31 and the base 3
Gimbal fixing part 32 provided on the 1 and base 31
The slider fixing portion 33 is provided above the XYΘ axis stage 41 which will be described later. The flexure fixing portion 32 has a pressing portion 32a, and the flexure 11 is
Is fixed to the slider fixing portion 33, and the slider 2 is fixed to the slider fixing portion 33 at its end portion, and plays a role of fixing the slider 2 when the flexure fixing portion 32 slightly moves during alignment. Here, the overlapping portion 34 of the slider 2 and the fixing portion 11a is placed and fixed on the support glass 37 made of a transparent glass material provided on the flexure fixing portion 32. Cavities 35 and 36 are formed in the lower portion of the support glass 37 and the portion of the base 31 corresponding to the vertical portion of the lower portion, respectively, and these cavities 35 and 3 are formed by the optical means.
The overlapping portion 34 on the supporting glass 37 can be observed through 6.

The alignment means 22 is the flexure 1
An XYΘ axis stage 4 is provided below the flexure fixing section 32 to which 1 is fixed, and is used for finely moving the flexure fixing section 32 independently in the X axis, Y axis, and Θ angle directions.
1 and a motor drive circuit 42 for finely driving the flexure fixing portion 32 by a predetermined amount in each direction via the XYΘ axis stage 41.

The optical means 23 has a single-lens, two-viewfield microscope 43, a focus stage 44 for adjusting the focus of the microscope 43, and two solid-state image pickup (CCD) cameras 45 for taking in images from the microscope 43. , 46. Here, the lens 43 a provided on the microscope 43 is installed toward the cavity 35 of the base 31. The control and processing means 24 is composed of a control and processing unit 51 and two monitors 52 and 53 which display images processed by the control and processing unit 51 in real time in correspondence with the CCD cameras 45 and 46. ing.

In order to attach the fixing portion 11a and the slider 2 using the above manufacturing apparatus, first, the flexure 11
Is fixed on the flexure fixing portion 32 by the pressing portion 32a of the flexure fixing portion 32. Then, the slider 2 is fixed on the slider fixing portion 33, a thermosetting adhesive is applied to the surface of the slider 2, and then the slider fixing portion 33 is provided between the fixing portion 11 a of the flexure 11 and the supporting glass 37. Insert 2 and superimpose them so that the center positions of both are approximately the same.

Next, the lens 43a provided in the microscope 43, which is a component of the optical means 23, is installed toward the cavity 35 of the base 31, and the focus stage 44 is moved to focus the leaf spring portion 11b of the flexure 11. The flexure 11 according to the positioning marker 17 provided on the
Position measurement. Here, when performing position measurement, C
Measurement of the position (coordinates) SL (left side in FIGS. 3, 5, and 6) and SR (right side in FIGS. 3, 5, and 6) of the positioning marker 17 while looking at the images in the visual fields of the CD cameras 45 and 46. I do. As a method of obtaining the coordinates at this time, the X direction is the lateral direction and the Y axis is the vertically downward direction with the origin at the upper left corner of each visual field.

In this case, as described above, the flexure 11
At the dimple 14 and two positioning markers 17
Are formed on a straight line in parallel with the sliders 7a and 7b of the slider 2, so that
Even if the position of the dimple 14 cannot be confirmed because it is located at a, it is equivalent to measuring the dimple 14 by measuring the positions SL and SR.

Similarly, the focus stage 44 is moved to focus on the slider 2, and the CCD camera 4
The positions of the predetermined positions CL and CR of the slider 2 are measured while looking at the images in the visual fields 5 and 46.

At this time, based on the measured predetermined positions SL, SR and CL, CR, the following correction amounts dX, d
Define Y and dΘ. (DXL, dYL) = ((SL-CL) _X , (SL-CL) _Y ) (1) (dXR, dYR) = ((SR-CR) _X , (SR-CR) _Y ) ... -(2) From equations (1) and (2), dX = (dXL + dXR) / 2 ... (3) dY = (dYL + dYR) / 2 ... (4) d.THETA. = (DYL-dYR) / 2. .. (5) Then, the XY.THETA.
The position is corrected by driving 1 and moving in each direction by the amount of each correction shown in the equations (3) to (5). At this time, if the result of the position correction is that the alignment between the slider 2 and the fixing portion 11a does not fall within the accuracy of ± 10 to ± 20 μm, the above position correction is performed again until it falls within the accuracy.

After that, the slider 2 and the holding portion 32b of the fixing portion 11a shown in FIG. 3 are fixed so as not to move the slider fixing portion 33, and the slider fixing portion 33 is removed. Is placed in a constant temperature bath to cure the adhesive, and as shown in FIG.

In the above-mentioned manufacturing apparatus, with respect to the slider 2 and the fixing portion 11a which are superposed on the jig 21, the position where the slider 2 and the fixing portion 11a are aligned by the optical means 23 is within the same visual field ( While grasping with two fields of view, the flexure fixing portion 32 of the jig 21 is finely moved in a predetermined direction by the alignment means 22 to perform relative alignment of the slider 2 and the fixed portion 11a and to attach the both. . In this way, the slider 2 and the flexure 1 are
Since the alignment work with 1 and the attachment work of both are performed on the same jig while observing with the optical means 23, it is possible to clearly confirm the attachment state of both. Accurate attachment is possible within the range of desired alignment accuracy.

At this time, in order to further improve the alignment accuracy, the number of measurement positions may be increased to provide three or more CCD cameras, and in the case where such a high attachment accuracy is not required, the CCD may be used. Camera 1
It is also possible to measure within one visual field as a stand.

As described above, in the first embodiment, since the dimple 14 and each positioning marker 17 are formed at the same time, the number of steps is reduced as compared with the case where both are formed separately, and both are formed. It is formed at a desired position without any mechanical movement when performing. Then, after that, the positioning marker 17 is used.
Is used as a reference to easily and surely align the fixed portion 11a of the slider 2, and by fixing the slider 2, a flying magnetic head device in which the slider 2 is provided within a desired alignment accuracy is obtained. It is made.

Next, the second embodiment will be described. The flying type magnetic head device according to the second embodiment has substantially the same structure as that of the first embodiment, but they are different in that the dimples are formed differently. The members corresponding to those in the above embodiment are designated by the same reference numerals and the description thereof is omitted.

That is, in the levitation type magnetic head device of the second embodiment, as shown in FIGS. 9 and 10, the projecting dimples 14 ′ are located above the fixed portions 11 a on the load beam 12. Is formed. At this time, the dimple 14 'and the surface of the fixing portion 11a on the side not having the slider 2 face each other to define the flying height. Along with that, two locations on the load beam 12 (one of which is the load beam 12
Each positioning marker 17 'is formed at the tip end of the above, and the other is a portion located inside the notch 16.

Also in this case, the dimples 14 'and the respective positioning markers 17' are simultaneously formed in the same step, and specifically, they are formed by a press working method, an etching method, a printing method or the like. To be done.

Also in the second embodiment, the slider 2 is attached to the fixing portion 11a of the flexure 11 as in the first embodiment.
There are provided at least two positioning markers 17 'for fixing the. Therefore, the slider 2 is fixed to the fixing portion 11a by using the positioning marker 17 'as a reference for alignment, and the fixing portion 11a at this time is fixed.
The positioning accuracy between the slider 2 and the slider 2 is easily and reliably maintained at a desired high accuracy by the positioning marker 17 '.

Further, when the flying magnetic head device is manufactured, since the dimples 14 'and the positioning markers 17' are formed at the same time, the number of steps is reduced as compared with the case where both are formed separately. Moreover, when they are formed, they are formed at required positions without any mechanical movement. Then, after that, the positioning marker 17 'is used to easily and surely perform alignment with the fixing portion 11a of the slider 2 with the positioning marker 17' as a reference, and the slider 2 is fixed to a desired position. A flying type magnetic head device in which the slider 2 is provided within the alignment accuracy is manufactured.

[0049]

According to the present invention, it is possible to ensure the positioning accuracy of the slider and the supporting member corresponding to the miniaturization of the slider, and to realize the stable and reliable low flying height of the slider. A floating magnetic head device and a method of manufacturing the same are provided.

[Brief description of drawings]

FIG. 1 is a perspective view schematically showing a floating magnetic head according to a first embodiment.

FIG. 2 is a perspective view schematically showing a slider that is a component of the flying magnetic head.

FIG. 3 is a plan view schematically showing a flexure which is a constituent element of the floating magnetic head.

FIG. 4 is a partial cross-sectional view taken along the line segment AA ′ in FIG.

FIG. 5 is a plan view schematically showing how three positioning markers are provided on a flexure which is a component of the floating magnetic head.

FIG. 6 is a plan view schematically showing dimples and positioning markers formed by a drawing method.

FIG. 7 is a schematic view showing an apparatus for manufacturing the flying magnetic head device.

FIG. 8 is a plan view schematically showing a state where a slider is fixed to a fixing portion of a flexure.

FIG. 9 is a plan view schematically showing a gimbal which is a constituent element of the flying magnetic head of the second embodiment.

FIG. 10 is a side view schematically showing a gimbal which is a constituent element of the floating magnetic head.

[Explanation of symbols]

 1 Magnetic Head Element 2 Slider 3 Gimbal 11 Flexure 12 Load Beam 13 Mount Part 14 Dimple 15 Reference Hole 16 Notch 17 Positioning Marker 21 Jig 22 Positioning Means 23 Optical Means 24 Control and Processing Means

Claims (6)

[Claims] 1. A floating type comprising: a slider having a magnetic head element; and a flexible support member having a fixing means having a fixing portion of the slider formed therein and a connecting means connected to the fixing means. The magnetic head device, wherein a plurality of positioning markers for fixing the slider are provided at predetermined positions on the supporting member, and the flying magnetic head device is characterized. 2. The flying type magnetic head device according to claim 1, wherein the fixing means is provided with a protrusion for supporting the back surface of the slider and a positioning marker. 3. The flying type magnetic head according to claim 1, wherein the connecting means is provided with a protrusion for defining the flying height of the slider from the surface of the magnetic recording medium and a positioning marker. apparatus. 4. A method of manufacturing a flying type magnetic head device according to claim 2, wherein a step of forming a protrusion and a positioning marker on the fixing means at the same time, and the positioning of the slider with respect to the fixing portion with the positioning marker as a reference. And a step of fixing the slider after performing the above step. 5. The method of manufacturing the floating magnetic head device according to claim 3, wherein the step of simultaneously forming a protrusion and a positioning marker on the connecting means, and the positioning of the slider with respect to the fixed portion with the positioning marker as a reference. And a step of fixing the slider after performing the above step. 6. The production of a floating magnetic head device according to claim 5, wherein both the protrusion and the positioning marker are formed by a pressing method, a drawing method, an etching method, or a printing method. Method.