JP1651167S - - Google Patents

Info

Publication number
JP1651167S
JP1651167S JPD2019-9164F JP2019009164F JP1651167S JP 1651167 S JP1651167 S JP 1651167S JP 2019009164 F JP2019009164 F JP 2019009164F JP 1651167 S JP1651167 S JP 1651167S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2019-9164F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2019-9164F priority Critical patent/JP1651167S/ja
Priority to US29/709,589 priority patent/USD913230S1/en
Application granted granted Critical
Publication of JP1651167S publication Critical patent/JP1651167S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2019-9164F 2019-04-24 2019-04-24 Active JP1651167S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JPD2019-9164F JP1651167S (en) 2019-04-24 2019-04-24
US29/709,589 USD913230S1 (en) 2019-04-24 2019-10-15 Heater for heating semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2019-9164F JP1651167S (en) 2019-04-24 2019-04-24

Publications (1)

Publication Number Publication Date
JP1651167S true JP1651167S (en) 2020-01-27

Family

ID=69182931

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2019-9164F Active JP1651167S (en) 2019-04-24 2019-04-24

Country Status (2)

Country Link
US (1) USD913230S1 (en)
JP (1) JP1651167S (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1705954S (en) * 2021-05-31 2022-01-25 coil

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD402156S (en) * 1996-02-02 1998-12-08 Ako-Werke Gmbh & Co. Kg Radiant stove heating element
USD410438S (en) * 1997-01-31 1999-06-01 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
JP3477062B2 (en) * 1997-12-26 2003-12-10 京セラ株式会社 Wafer heating device
USD423028S (en) * 1998-08-26 2000-04-18 Matsushita Electric Industrial Co., Ltd. Coil
TWI281833B (en) * 2004-10-28 2007-05-21 Kyocera Corp Heater, wafer heating apparatus and method for manufacturing heater
JP2010080909A (en) * 2008-08-26 2010-04-08 Nuflare Technology Inc Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device
USD693301S1 (en) * 2010-03-12 2013-11-12 Fluke Corporation Rogowski coil
JP1541874S (en) * 2015-03-16 2016-01-18
USD839224S1 (en) * 2016-12-12 2019-01-29 Ebara Corporation Elastic membrane for semiconductor wafer polishing

Also Published As

Publication number Publication date
USD913230S1 (en) 2021-03-16

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