JP1646292S - - Google Patents
Info
- Publication number
- JP1646292S JP1646292S JP2019009163F JP2019009163F JP1646292S JP 1646292 S JP1646292 S JP 1646292S JP 2019009163 F JP2019009163 F JP 2019009163F JP 2019009163 F JP2019009163 F JP 2019009163F JP 1646292 S JP1646292 S JP 1646292S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019009163F JP1646292S (en) | 2019-04-24 | 2019-04-24 | |
| US29/709,587 USD913229S1 (en) | 2019-04-24 | 2019-10-15 | Heater for heating semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019009163F JP1646292S (en) | 2019-04-24 | 2019-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1646292S true JP1646292S (en) | 2019-11-25 |
Family
ID=68610485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019009163F Active JP1646292S (en) | 2019-04-24 | 2019-04-24 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD913229S1 (en) |
| JP (1) | JP1646292S (en) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD402156S (en) * | 1996-02-02 | 1998-12-08 | Ako-Werke Gmbh & Co. Kg | Radiant stove heating element |
| USD410438S (en) * | 1997-01-31 | 1999-06-01 | Tokyo Electron Limited | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
| JP3477062B2 (en) * | 1997-12-26 | 2003-12-10 | 京セラ株式会社 | Wafer heating device |
| USD423028S (en) * | 1998-08-26 | 2000-04-18 | Matsushita Electric Industrial Co., Ltd. | Coil |
| TWI281833B (en) * | 2004-10-28 | 2007-05-21 | Kyocera Corp | Heater, wafer heating apparatus and method for manufacturing heater |
| JP2010080909A (en) * | 2008-08-26 | 2010-04-08 | Nuflare Technology Inc | Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device |
| USD693301S1 (en) * | 2010-03-12 | 2013-11-12 | Fluke Corporation | Rogowski coil |
| JP1541874S (en) * | 2015-03-16 | 2016-01-18 | ||
| USD839224S1 (en) * | 2016-12-12 | 2019-01-29 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing |
-
2019
- 2019-04-24 JP JP2019009163F patent/JP1646292S/ja active Active
- 2019-10-15 US US29/709,587 patent/USD913229S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD913229S1 (en) | 2021-03-16 |