JP1643941S - Substrate retaining ring - Google Patents
Substrate retaining ringInfo
- Publication number
- JP1643941S JP1643941S JP2018020938F JP2018020938F JP1643941S JP 1643941 S JP1643941 S JP 1643941S JP 2018020938 F JP2018020938 F JP 2018020938F JP 2018020938 F JP2018020938 F JP 2018020938F JP 1643941 S JP1643941 S JP 1643941S
- Authority
- JP
- Japan
- Prior art keywords
- retaining ring
- substrate retaining
- substrate
- polishing
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000005498 polishing Methods 0.000 abstract 2
Abstract
本物品は、ウエハ等の基板の面を研磨するために用いる基板研磨装置に用いられる基板保持リングである。This article is a substrate holding ring used in a substrate polishing apparatus for polishing the surface of a substrate such as a wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018020938F JP1643941S (en) | 2018-09-26 | 2018-09-26 | Substrate retaining ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018020938F JP1643941S (en) | 2018-09-26 | 2018-09-26 | Substrate retaining ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1643941S true JP1643941S (en) | 2019-10-21 |
Family
ID=83460085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018020938F Active JP1643941S (en) | 2018-09-26 | 2018-09-26 | Substrate retaining ring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1643941S (en) |
-
2018
- 2018-09-26 JP JP2018020938F patent/JP1643941S/en active Active
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